The paper examines a MEMS-based electric field sensor and proposes a method in order to improve the equivalent Q factor.

Although the paper seems to be successfully formulating the necessary equations for Q factor and solution stabilities, it seems to report all results obtained in this research without a firm attempt to give the essence of the findings. Overall, the paper lacks novelty and practical interpretations from the results presented. The paper is not acceptable in its current form and major revisions are needed in order for the paper to be reconsidered. Below are some guidelines that might be useful for the authors. 1. In Equation 6, the square root sign should be extended so that the second term is covered as well. 2. The transition from equation 17 to equation 18 is not clear. It is not clear how the term enters the equation. 3. The assumptions and procedure made to use the averaging method through equations 19-22 are not clear. Either a more clear explanation should be provided or the full derivation can be added as an appendix for the convenience of the reader. 4. Due to its size, complexity and low resolution, it is not possible to interpret Figure 4, which should be modified. 5. Subscripts should be used through Fig 5-12 in axes labels. 6. The simulation results in Section 3 are not systematic; therefore it is not possible to jump into strong conclusions. More results should be provided and presented in a compact manner. For instance, the authors claim to validate equation 24 by changing Q1 from 106 to 125, and claim that the parameter can prevent saturation while the transient time stays unchanged, however, the results presented are too weak to draw such strong conclusions. 7. The experimental setup is poorly described, with only a few details. The results are not compared with the simulation results and the authors do not seem to be using the same values of Vr for experiments and simulations, which make a comparison impossible. 8. Figure 13-14 have very low fonts and poor resolutions. 9. Overall, the writing has many flaws and it has to be revised greatly considering English grammar rules. 10. The references given in the paper should contain more international journals.