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2E 2qVext
υ= =
M M
Mυ 1 M
r= = 2 Vext
qB B q
1 δM L
D= 1 − cos φ + sin φ
2R M R
Example: Mass Resolution
If an analyzing magnet bends the ion beam through 450 and L = R = 50 cm, find
the displacement D that would be seen if B10 is sent through the system when it is
tuned for B11 . If the extraction potential is 20 kV, find the required field.
Since the difference in mass is 1
amu, δM 1
= = 0.1
M 10
and
1
2
1
[ ]
D = 50 cm 1 − cos450 + sin450 = 2.5cm
10
Since slit widths are typically a few millimeters, this analyzer could easily
resolve these two masses. Obviously, heavier mass species will be more
difficult to resolve and may require a larger radius magnet. According to
previous Equation
1 10 ×1.67 ×10 −27 kg
B= 2 −19
2 × 10 4
V = 0.13T = 1.3kG
0.50m 1.6 ×10 C
where the units of field are tesla (T) and kilogauss (kG).
B11+ + e − → B11
The total distance that an ion travels in the solid is the range. The
projection of this distance along the depth axis is the projected
range, Rp.
Nuclear and electronic components of S(E) for several
common silicon dopants as a function of energy.