Case 1: Constant Surface Concentration

 x 
N ( x, t )  N o erfc 
 2 Dt 
erfc0   1, erfc   0, erfc x   erfc x   2

Q  total number of diffused impurities  t

N 
x j  2 Dt erfc 1  B 
 N0 
N   N
  D( N )  xj  t
t x x 
 
N  x, t1 , t 2 ,...t n   N 0 erfc
x 
 2 D t  D t  ...  D t 
 11 2 2 n n  1

Approximate Profiles
 Low concentration diffusion D = constant, N(0, t) = N0

erfc x   e  ax 2 bx

 High concentration diffusion D = D(N), N(0, t) = N0

As N ( x, t )  N o (1  0.87Y  0.45Y 2 )
x
Y
8 N 0 Di t / ni

B N ( x, t )  N o (1  Y 2 / 3 )
x
Y
12 N 0 Dit / ni
2
Case 2: Diffusion from Limited Source
Q  x2 
N ( x, t )  exp   N ( x,0)   ( x)
A Dt  4 Dt 
Two-Step Diffusion

 x 
N ( x, t1 )  N 0 erfc  Q1  2 N 0 A D1t1 
2 Dt 
 11 

x2

N  x, t 2  
Q1 4 D2t 2
e
A D2t 2
1
x2
2 N 0  D1t1   4 D2t2
2
   e (if D1t1  D2t 2 )
  D2t 2 
3

Notes on Diffusion Profiles

Semi-log scale Linear scale

log10 N N

x x

Out-diffusion
NB

NB / 2
Same area