Capacitance.

xls To determine electrostatic force By Alex Slocum 1/2/02, last modified 2/10/04 by Alex Slocum Enters numbers in BOLD, Results in RED Capacitor oxide gap) gap, h 1.00E-07 Eoxide 3.45E-11 desired maximum capacitance, cdes 1.00E-11 required area (microns x microns) 170 Capacitor (air gap) Eair area desired minimum capacitance, Cdesmin Required air gap (microns) Force of attraction: Voltage, V gap, h (microns) field strength E0 (1/2EoE^2) stress area (mm^2) Force (mN)

8.85E-12 0.000000029 1.00E-12 0.26

7 0.1 7.00E+07 3.45E-11 8.46E+04 2.90E-08 2.45

7 2.5 2.80E+06 8.85E-12 3.47E+01 2.90E-08 0.00