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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 1

Department of Mechanical Engineering
Dr. G. Song, Associate Professor
2. Review of Smart Materials and
Structures (part 2): Piezoceramics

(
(
(

=
(
(
(

6
5
4
3
2
1
33 32 31
24
15
3
2
1
0 0 0 d d d
0 0 d 0 0 0
0 d 0 0 0 0
D
D
D
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 2
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Piezoelectricity
Piezoelectricity describes the phenomenon of generating an electric
charge in a material when subjecting it to mechanical stress (direct
effect), and conversely, generating a mechanical strain in response
to an applied electric field (converse effect).
PZT: It is an acronym for Lead Zirconate Titanate, which is a
commonly used piezoelectric ceramic material.
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 3
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Piezoelectric Ceramics
Piezoelectric elementary cell
(1) before poling
(2) after poling
Courtesy PI Polytec
The piezo effect exhibited by natural materials such as
quartz, tourmaline, Rochelle salt, etc. is very small.
Polycrystalline ferroelectric ceramic materials such as
BaTiO
3
and Lead Zirconate Titanate (PZT) have been
developed with improved properties.
Ferroelectric ceramics become piezo- electric when poled.
PZT crystallites are centro-symmetric cubic (isotropic) before
poling and after poling exhibit tetragonal symmetry
(anisotropic structure) below the Curie temperature (beyond
which the piezoelectricity is lost).
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 4
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Poling
Electric dipoles in Weiss domains
(1) unpoled ferroelectric ceramic, (2) during and
(3) after poling (piezoelectric ceramic)
Courtesy PI Polytec
Charge separation between the positive and negative ions is the reason for electric dipole behavior.
Groups of dipoles with parallel orientation are called Weiss domains.
The Weiss domains are randomly
oriented in the raw PZT material,
before the poling treatment has been
finished.
During poling, an electric field (>
2000 V/mm) is applied to the
(heated) piezo ceramics.
With the field applied, the material
expands along the axis of the field
and contracts perpendicular to that
axis.
The electric dipoles align and roughly
stay in alignment upon cooling. The
material now has a remnant
polarization (which can be degraded
by exceeding the mechanical,
thermal and electrical limits of the
material).
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 5
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Poling (cont)
When an electric voltage is applied to a poled piezoelectric
material, the Weiss domains increase their alignment proportional
to the voltage. The result is a change of the dimensions
(expansion, contraction) of the PZT material.
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 6
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Direct Piezoelectric Effect
- Sensors
Poling axis
Electrodes
+
_
V
Applied Force F
_
+
V
F
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 7
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Inverse Piezoelectric Effect
- Actuators
Poling axis
Electrodes
+
_
V
Resulting Strain S
_
+
S
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 8
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
More about Lead Zirconate Titanate (PZT)
Material
PZTs offer the user several benefits and advantages over other motion
techniques
1. Repeatable nanometer and sub- nanometer sized steps at high frequency
can be achieved with PZTs because they derive their motion through solid
state crystal effects. There are no moving parts (no "stick-slip" effect).
2. PZTs can be designed to move heavy loads (several tons) or can be made
to move lighter loads at frequencies of several 10 kHz.
3. PZTs act as capacitive loads and require very little power in static
operation, simplifying power supply needs.
4. PZTs require no maintenance because they are solid state and their motion
is based on molecular effects within the ferroelectric crystals.
With high-reliability PZT materials a strain on the order of 1/1000 (0.1%)
can be achieved; this means that a I00 mm long PZT actuator can
expand by 100 micrometers when the maximum allowable field is
applied.
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 9
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Curie Temperature
Above a certain temperature, called the Curie Point, a
piezoelectric material has a symmetric cubic crystal structure
and there is no net charge induced dipole
Below this temperature, the crystal structure becomes
tetragonal, the positive and negative charges no longer
coincide, producing a dipole
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 10
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Hysteresis (Open Loop PZTs)
Hysteresis curves of an open loop piezo
actuator for various peak voltages
Similar to electromagnetic devices, open loop piezo
actuators exhibit hysteresis (they are also referred to
as ferroelectric actuators). Hysteresis is based on
crystalline polarization effects and molecular friction.
The absolute displacement generated by an open loop
PZT depends on the applied electric field and the
piezo gain which is related to the remanent
polarization. Since the remanent polarization and
therefore the piezo gain is affected by the electric field
applied to the piezo, its deflection depends on whether
it was previously operated at a higher or a lower
voltage (and some other effects). Hysteresis is
typically on the order of 10 to 15 % of the commanded
motion.
Hysteresis can be eliminated by closed loop PZT
actuators.
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 11
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
The process starts with mixing and ball milling of the raw materials. Next, the
mixture is heated to 75% of the sintering temperature to accelerate reaction of
the components. The polycrystalline, calcinated powder is ball milled again to
increase its reactivity. Granulation with the binder is next to improve
processing properties. After shaping and pressing the (green) ceramics is
heated to 750 C to burn out the binder.
The next phase is sintering at temperatures between 1250 C and 1350 C.
The ceramic block is cut, ground, polished, lapped, etc., to the desired shape
and tolerance. Electrodes are applied by sputtering or screen printing
processes.
The last step is the poling process which takes place in a heated oil bath at
electrical fields up to several kV/mm.
PZT Ceramics Manufacturing
Process
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 12
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Multi-layer PZT Manufacturing
Process
Multi-layer PZT actuators require a different manufacturing process.
After milling a slurry is prepared. A foil casting process allows layer thickness
down to 20 m.
Next, the sheets are screen printed and laminated. A compacting process
increases density of the "green" ceramics and removes air trapped between the
layers.
The final steps are the binder burnout, sintering (co-firing) at temperatures
below 1100 C, end termination and poling.
All processes, especially the heating and sintering cycles must be controlled to
very tight tolerances. The smallest change affects quality and properties of the
PZT material..
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 13
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Applications of Piezo Actuators
Micro engraving systems
Knife edge control in
extrusion tools
Stimulation of vibrations
Piezo hammers Holography
Shock wave generation
Linear drives Mirror positioning
Shock wave generation Micro pumps Laser tuning
Vibration cancellation
Audiophysiological
stimulatiuon
Needle valve actuation Adaptive & active optics
Inspection systems
Micro dispensing
devices
Wear correction Fast mirror scanners
Microlithography
Vibration
cancellation
Cell penetration Tool adjustment
Fiber optic alignment &
switching
Critical dimension
measurement
Disk spin stands Micro manipulation
Out-of-roundness
grinding, drilling, tuning
Auto focus systems
Wafer and mask
positioning
Pole tip recession Gene technology Structural deformation
Scanning microscopy
Nano-metrology MR head testing Patch-clamp drives Vibration cancellation
Image stabilization
Microelectronics Disk Drive
Life Science,
Medicine, Biology
Precision Mechanics
and Mechanical
Engineering
Optics, Photonics and
Measuring Technology
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 14
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Applications: Mirror Positioning
Active secondary tip/tilt platform for IRTF
(Mauna Kea, Hawaii) with Hexapod 6-
Degrees-Of-Freedom alignment system.
Mirror diameter: 244 mm
Tip/tilt range: 250 rad
Resonant frequency: 490 Hz
Courtesy PI Polytec
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 15
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Applications: A Micro Scanner Actuated by
PZTs
Source: IEEE
2002 MEMS
Conference
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 16
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 17
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
18 18
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 18
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 19
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
20 20
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 20
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 21
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 22
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 23
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
24 24
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 24
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
25 25
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 25
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 26
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
27 27
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 27
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Applications: A Micro PZT
Speaker
Source: IEEE
2002 MEMS
Conference
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 28
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 29
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
30 30
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 30
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 31
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
32 32
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 32
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Applications: Vibration Control using PZT Actuator in
3-1 Mode
Poling
direction
1, X
3, z
2, y
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 33
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Applications: Active Control of a 11-
Foot Composite I-Beam Using PZT (3-
1 mode)
Base to Cantilever the 11-Foot Composite I-Beam
Piezo Patches as Sensors and Actuators
PC with Real-time Control System
Power Amplifier for Piezo Actuators
Poling
direction
1, X
3, z
2, y
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 34
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Applications: Active Vibration Control
using PZT Stack Actuators (3-3 mode)
LPACT
52
14
Base
Bay

35
27
Piezo Stack
Actuator
Force Sensor
Displacement to 90 m
Pushing Forces to 1000 N
Pulling Forces to 50 N
Sub-msec Response
Sub-nm Resolution
Preloaded PZT Stack Actuator (P-841 from PI Polytec)
35 35
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 35
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Applications: A Micro PZT Stack
Actuator
Source: IEEE
2001 MEMS
Conference
36 36
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 36
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
37 37
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 37
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
38 38
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 38
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
39 39
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 39
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
40 40
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 40
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
41 41
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 41
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
42 42
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 42
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
43 43
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 43
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 44
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Ultrasonic Piezo Rotary Motor
by Piezo System, Inc
Applications: Ultrasonic Piezo Rotary
Motor
How it works: Voltage excitation,
tuned to the bending resonance of a
piezo/metal ring, produces elastic
bending oscillations which travel along
the surface of the ring. This travelling
wave induces rotational motion in the
rotor pressed against it. When
excitation is stopped, the shaft is held
in place by friction force. By reversing
electrical excitation, the rotor turns in
the opposite direction.
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 45
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Definition of Directions
1
3
2
4
5
6
Poling axis
along 3 or Z
Because of the anisotropic nature of PZT
ceramics, effects are dependent on direction
(see figure).
To identify directions the axes, termed 1, 2,
and 3, are introduced (analogous to X, Y, Z
of the classical right hand orthogonal axial
set).
The axes 4, 5 and 6 identify rotations
(shear).
The direction of polarization (3 axis) is
established during the poling process by a
strong electrical field applied between two
electrodes.
For actuator applications the piezo properties
along the poling axis are most essential
(largest deflection).
z
x
y
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 46
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Piezoceramic Coefficients
Primary coefficients:
The primary piezoceramic coefficients are
the electromechanical coupling k
the voltage constants g
the strain constants d.
High electromechanical coupling is desired for all applications.
Actuators need high strain constants d.
Sensors need high voltage constants g.
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 47
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Strain coefficients or Strain
constants d
ij
d
ij
: Strain coefficients [m/Vl:
strain developed (m/m) per electric field applied (V/m) or (due to the sensor / actuator properties of
PZT material).
a measure of the strain produced by an applied electric field (The motor Effect )
- OR
Charge output coefficients IC/N]: charge density developed (C/m
2
) per given stress (N/m
2
)
a measure of the short circuit charge density to the applied stress (The generator Effect)
d
31
Indicates the electrodes are
perpendicular to the 3 axes
d
33
d
15
Indicates electrodes are perpendicular
to the 1 axes
Indicates that the piezoelectrically
induced strain or the applied stress is
shear around the 2 axes
d =
Strain
Applied field
Typical units:
Indicates that the piezoelectrically induced
strain or the applied stress is in the 1 direction
Indicates the electrodes are
perpendicular to the 3 axes
Indicates that the piezoelectrically
induced strain or the applied stress
is shear around the 3 direction
=
Short ct charge/electrode A
Applied stress
Coulomb/m
2
Newton/m
2
The first subscript gives the direction of the excitation, the second
describes the direction of the system response.
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 48
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Voltage coefficients or field output
coefficients
g
31
Indicates the electrodes are
perpendicular to the 3 axes
g
33
g
15
Indicates the electrodes are
perpendicular to the 1 axes
Indicates that the piezoelectrically
induced strain or the applied stress is
shear around the 2 axes
g =
Strain developed
Applied charge
density
Typical units:
Indicates that the piezoelectrically induced
strain or the applied stress is shear around the
1 axes
Indicates the electrodes are
perpendicular to the 3 axes
Indicates that the piezoelectrically
induced strain or the applied stress
is shear around the 3 axes
=
Open ct electric field
Applied stress
V/m
Newton/m
2
g
ij
: Voltage coefficients or field output coefficients [Vm/N]:
open circuit electric field developed (V/m) per applied mechanical stress (N/m
2
).
a measure of the electric field produced in the material by an applied mechanical
stress.
or
(due to the sensor / actuator properties of PZT material) strain developed (m/m) per
applied charge density (C/m
2
).
a measure of the strain developed by an applied electric field.
The first subscript gives the direction of the excitation, the
second describes the direction of the system response.
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 49
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Coupling coefficients
K
31
Indicates the electrodes are
perpendicular to the 3 axes
Electromechanical coupling
Indicates the stress/strain is in the 1 direction
K
p
Indicates the electrodes are
perpendicular to the 3 axes and
stress/strain is equal in all directions
perpendicular to the 3 axes
Electromechanical coupling
K
r
Indicates that ceramic is disk shaped,
the electrodes are perpendicular to the 3
axes and the stress/ strain is radial
Electromechanical coupling
K
2
=
Electrical energy converted to
mechanical energy
Input electrical energy
Mechanical energy converted to
electrical energy
Input mechanical energy
k
ij
: Coupling coefficients [no dimensions].
The coefficients are energy ratios describing the conversion from mechanical to electrical
energy or vice versa.
k
2
is the ratio of energy stored (mechanical or electrical) to energy (mechanical or electrical)
applied. Quantifies how much energy remains in the material rather than being converted into
another form. Typical values range from 0.40 to 0.70.
The first subscript gives the direction of the excitation, the second
describes the direction of the system response.
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 50
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Elastic Compliance Constants S
ij
Elastic compliance coefficient is ratio of strain in i-indirection due to stress in the j-
direction, provided there is no change of stress in other two directions.
Direct stresses and strains are denoted by indices from 1 to 3 and shears are denoted by
indices from 4 to 6.
For example, S
12
denotes direct strain in direction-1 due to direct stress in direction-2 and
stresses in directions 1 and 3 are unchanged.
In a similar way, S
55
denotes shear strain around the axis-2 due to shear stress around the
axis-2.
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 51
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
If the electric field across the piezoelectric element is held constant, such as the case
with short circuiting the electrodes, the properties are denoted by superscript E.
If the electric charge density is held constant, such as the case with an open circuit at the
electrodes, it is denoted by superscript 'D.'
strain
S
ij
=
stress
meter/meter per Newton/square meter, square meter/Newton
More about Elastic Compliance
Constants S
ij
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 52
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Other coefficients
Other important parameters are:
Young's modulus Y (describing the elastic properties of the material)
Because mechanical stressing of the ceramic produces an electrical response which opposes the
resultant strain, the effective Young's Modulus with electrodes short circuited is lower than with the
electrodes open circuited. In addition, the stiffness is different in the 3 direction from that in the 1 or
2 direction. Therefore, in expressing such quantities both direction and electrical conditions must
be specified.
The relative dielectric coefficients (permittivity)
The dielectric constants
The relative dielectric constant is the ratio of the permittivity of the material, to
the permittivity of free space, in the unconstrained condition, i.e., well below the
mechanical resonance of the part.
c (describing the capacitance of the material)
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 53
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
More Definitions
Definitions:
S = strain (constant if mechanically clamped)
T = stress (constant if not clamped)
E = electric field (constant for short circuit)
D = electrical displacement (constant for open circuit)
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 54
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
PZT-5H characteristics
Morgan Matroc Inc
~ 5.5 kV/cm Depoling field (DC)
~ 20 kV/cm Dielectric breakdown
~ 12 kV/cm Poling field
~ 11,000 psi Static tensile strength
> 75,000 psi Compressive strength
3400 K
33

3130 K
11

193 deg. C Curie point

7500 kg/m
3

-8.4510
-12
m
2
/N S
13
E
-4.7810
-12
m
2
/N S
12
E
43.510
-12
m
2
/N S
44
E
20.710
-12
m
2
/N S
33
E
16.510
-12
m
2
/N S
11
E
74110
-12
m/V d
15
59310
-12
m/V d
33
-27410
-12
m/V d
31
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 55
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Major PZT manufacturers and PZT name
convention
Sensor Morgan-
Technology Matroc
BM300
- - - - -
BM400
5400 EC-64 PZT-4 Type-I
BM500
5500 EC-65 - PZT-5A Type-II
BM527 5600 EC-70 PZT-5J Type-V
BM532
5700 EC-76 - PZT-5H Type-VI
BM740
PZT-7A
BM800
5800 EC-69 - PZT-8 Type-III
BM900
K81
BM920
- - K83 - -
BM940
K85
Channel EDO Keramos Navy
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 56
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Different PZTs and Applications
-
BM300 BM400 BM500 BM527 BM532 BM740 BM800 BM900 BM920 BM940
Sonar Projectors - X - - - -- X - - -
Hydrophones X X X X X - X - X -
Depth Sounders - X X - - X X - - -
Communication - X X X X X X - - -
Sonobuoys X - X X X - - - X -
Linear Arrays X X X X X - - - X -
Level, Flow - X X X X X X - - -
Flaw Detection (NDE) X X X - X X X X X X
Thickness - X X - - X X X X X
Accelerometers - X X X X X X X - X
Actuators - X X - X - X - - -
NDT - - - - - X - X X X
Transducers X X X - X X X X X -
Sterilizers - X - - - - X - - -
Cleaners - X - - - - X - - -
Degreasers - X - - - - X - - -
Welders - - - - - - - - - -
Alarms - X - - - - X - - -
- BM300 BM400 BM500 BM527 BM532 BM740 BM800 BM900 BM920 BM940
Underwater
Measurement
Medical
Industrial
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 57
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Electric behavior of an unstressed medium under the influence of an electric
field E is
D = E
where is the permittivity.
The mechanical behavior (for E = 0) is
S = s T
where s is the compliance.
Basic Relationships
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 58
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
T d E D
dE T s S
' T
E
+ =
+ =

S = Strain (6x1)
T = Stress (6x1)
E = Electric field (3x1)
S
E
= Compliance (zero field) (6x6)
d = Piezoelectric coefficient (6x3)
D = Electric displacement (3x1)

T
= Dielectric constant (zero stress) (3x3)
Input Voltage
M
i
c
r
o
-
s
t
r
a
i
n
0
Constitutive Equation
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 59
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
More about PZT Properties
PZT materials exhibit most of the characteristics of ceramics, namely a high
elastic modulus, brittleness and low tensile strength.
The material itself is mechanically isotropic, and by virtue of the poling
process, is assumed transversely isotropic in the plane normal to the poling
direction as far as piezoelectric properties are concerned.
This means that for PZT materials,
s
11
= s
22
, s
13
= s
23
, s
44
= s
55
d
31
= d
32
and d
15
= d
24
.
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 60
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Constitutive Equation
Poling
direction
1, X
3, z
2, y
1 11 12 13 31
2 12 22 13 31
3 13 13 33 33
23 44 15
31 44 15
12 66
1 15 11
2 15 11
3 31 31 33 33
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0 0 0
0 0 0 0 0 0 0
0 0 0 0 0 0 0 0
0 0 0 0 0 0 0
0 0 0 0 0 0 0
0 0 0 0 0
S S S d
S S S d
S S S d
S d
S d
S
D d
D d
D d d d

( (
(
(
(
(
(
(
=
(
(
(
(
(
(
(

1
2
3
23
31
12
1
2
3
E
E
E

(
( (
( (
( (
( (
( (
( (
( (
( (
( (
( (
( (
( (
( (



E d D
E d s
'
+ =
+ =
61 61
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 61
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Piezo Sensor Equation

=
12
31
23
3
2
1
6
5
4
3
2
1
The stress vector is written as

(
(
(

=
(
(
(

6
5
4
3
2
1
33 32 31
24
15
3
2
1
0 0 0 d d d
0 0 d 0 0 0
0 d 0 0 0 0
D
D
D
This equation summarizes the principle of operation of piezoelectric
sensors. A stress field causes an electric displacement to be generated as a
result of the direct piezoelectric effect.
Note that shear stress in the 1-2 plane,
6
is not capable of generating any
electric response.
62 62
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 62
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Electric displacement D
The electric displacement D is related to the generated charge by the relation
| |

(
(
(

=
3
2
1
3 2 1
dA
dA
dA
D D D q
where dA
1
, dA
2
and dA
3
are the components of the electrode area in the 2-3, 1-3
and 1- 2 planes respectively.
It can be seen that the charge collected, q, depends only on the component of the
infinitesimal electrode area dA normal to the displacement D. The charge q and
the voltage generated across the sensor electrodes V
c
, are related by the
capacitance of the sensor, C
p
as
V
c
= q/C
p
Therefore, by measuring the charge generated by the piezoelectric material, it is
possible to calculate the stress in the material.
63 63
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 63
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Piezo Actuator Equation
11 12 13 1 1 31
12 11 13 2 2 31
13 13 33 3 3 33
44 23 23 15
44 31 31 15
66 12 12
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0
0 0 0 0 0 0 0
0 0 0 0 0 0 0
0 0 0 0 0 0 0 0
S S S d
S S S d
S S S d
S d
S d
S






( (
( (
( (
( (

= +
( ` ` (
(
(
(
(
) )
1
2
1
3
2
3
0
0
0
E
E T
E

+
` `
(
)
(
(
(
)
thermal coefficients of expansion, 1/K
temperature change, K
3
2
1
In a plane perpendicular to the piezo-polarization, it has isotropic
properties, i.e., transversely isotropic material in the plane 1-2. For
orthotropic material, there is no temperature shear strain. However, there
is a shear strain induced due to electrical field E
l
and E
2
.
64 64
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 64
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Free Strains
For piezoceramic materials:
Actuation Strain

(
(
(
(
(
(
(
(

=
3
2
1
15
15
33
31
31
E
E
E
0 0 0
0 0 d
0 d 0
d 0 0
d 0 0
d 0 0
These are called free strains

0
E d
E d
E d
E d
E d
1 15
2 15
3 31
3 31
3 31
6
5
4
3
2
1
where d
33
, d
3l
, and d
l5
are piezoelectric strain
coefficients.
65 65
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 65
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
PZT Actuator: Longitudinal (d33 mode)
Motor
d33 mode
d31 mode
Poling
direction
1, X
3, z
2, y
PZT Actuator: Transverse (d31 mode) Motor
66 66
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 66
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
PZT Actuator: Double-layer
Extension Mode
PZT Actuator: Double-layer Bending Mode
67 67
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 67
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
PZT Actuator: Multi-layer
68 68
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 68
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Lateral (31) Mode Piezoelectric
Sensor
l
t
w
Structure
1
2
3
P
V
1
+

Top & Bottom Surfaces

Electroplated
Principle: Bond or embed a Piezo wafer to a surface
and monitor electric potential on electrodes. Piezo is
poled perpendicular to plated surfaces
Piezoelectric sensors produce a charge when strained
laterally.

69 69
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 69
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Axial Force Sensor
tp
1
2
3
Polarity
V
F
Principle: Sense dynamic (AC) load in the poling direction.
Sensor is placed in the series load path. If a parallel load path
exists, make sensor as possible to attract a majority of the load.
70 70
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 70
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
PZT Shear Mode Sensor
p
p
Strain

P
P
V
1
+

V
2
+

Strain Direction
Electroplated
Top & Bottom
Part of Structure
Being Monitored
Bridge
3
2
1
Principle: Two PZTs poled
transverse to their electrodes are
bonded to a surface and connected
with a bridge. Longitudinal strain
induces shear in the PZTs and a
Voltage through the d
15
coefficient.
Kistler Instrument A.G. of Switzerland has a patent on the basic idea.
A Similar approach (shear mode) is employed in most accelerometers and load
cells since there is much lower pyroelectric sensitivity and hence better
coherence at low frequency.
71 71
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 71
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
A Specific Example
Voltage applied in the 3-direction and the Deflection Out is a 3D effect
For an element of thickness t, length L and width w, an applied
voltage V produces the following change in shape:
V d t
t
LV d
L
t
wV d
w
33
31 31
, , = = =
72 72
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 72
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Example of a PZT Disk
in Static Operation with Open Circuit
Poling axis
Force
L = 20 mm, A = 1 cm
2
kV
Compressive stress 10
6
Pa
30
15
E = -g
33
T
73 73
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 73
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Voltage-Force Relationship
EL V =
A
F
T =
T g E
33
=
C
F
d F
A
L
g V
33 33
= =
25 N generates about 100 volts, about the force generated from
squeezing your hand
and

C - Capacitance
74 74
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 74
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Displacement-Voltage Relation

= = =
L
L
L
V
d E d S
33 33
V d L
33
=
16kV or E = 800 V/m yields L = 10 micro meters.
All the above is static analysis
75 75
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 75
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Finite Element Modeling of Piezoceramic
Smart Structures
Euler-Bernoulli Model
No axial load
Shear deformation can be neglected
Uniform along its length
Predicts the correct curvature of actuator and base over the entire
contact area
Considers the actuator as a layer
Treating bimorphs, the correct neutral axis is used which is the
neutral axis of the layered system
76 76
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 76
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
t
p
z
x
h

t
p
w
p

1
W
1
W(z) W
2
y
x

2
y
z
Poling
direction
1, X
3, z
2, y
The Piezo Element Rigidly Bonded to a
Structure
w
p
h
77 77
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 77
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
X (u)
Z (W)
We have , where u is the displacement in x direction.
From the deformed configuration shown in the upper figure, we can get
Then,
dx
du
x
=
dx
dW
dx
dW
z
dx
dW
z u =
2
2
dx
W d
z
dx
du
x
= =
78 78
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 78
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
In terms of nodal displacements, W
1
, W
2
,
1
and
2
the bending
displacement is given by
2
3 2
2
3 2
1
3 2
1
3 2
2 3
2 2 3 1 ) (

(
(

|
.
|

\
|
+
|
.
|

\
|
+
(
(

|
.
|

\
|

|
.
|

\
|
+

(
(

|
.
|

\
|
+
|
.
|

\
|

|
.
|

\
|
+
(
(

|
.
|

\
|
+
|
.
|

\
|
=
h
h
x
h
x
W
h
x
h
x
h
h
x
h
x
h
x
W
h
x
h
x
x W
(1)
Let q
1
= W
1
, q
2
=
1
, q
3
= W
2
, q
4
=
2
, then
) ( ) ( ) (
4
1
t q x x W
i
i
i
=
=
(2)
(3)
79 79
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 79
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
where
h
h
x
h
x
x
h
x
h
x
x
h
h
x
h
x
h
x
x
h
x
h
x
x
(
(

|
.
|

\
|
+
|
.
|

\
|
=
|
.
|

\
|
+
|
.
|

\
|
=
(
(

|
.
|

\
|
+
|
.
|

\
|
=
|
.
|

\
|
+
|
.
|

\
|
=
3 2
4
3 2
3
3 2
2
3 2
1
) (
2 3 ) (
2 ) (
2 3 1 ) (
(4)
80 80
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 80
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
The governing equations of motion for smart structures are
based upon the electromechanical coupling effect. The
piezoceramic material shown in the figure satisfy the following
equation:
)
`

=
)
`

1
3
11 31
31 3
1
3
T
E
S d
d
S
D
E
T
(5)
Where D
3
represents the electric displacement, charge per
unit area, E
3
represents the applied field intensity, S
1
represents the strain, T
1
is the stress, is the permitivity of
the piezoelectric material, d
31
is the piezoelectric charge
coefficient and is the elastic constant for the
piezoelectric material.
T
3

p
E
E S / 1
11
=
Poling
direction
1, X
3, z
2, y
81 81
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 81
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Equation (5) can be written as
)
`

=
)
`

1
3
31
31
2
31 3
1
3
S
E
E E d
E d E d
T
D
p p
p p
T
(6)
Potential Energy:
dV E D S T U
v
p
) (
2
1
3 3 1 1
+ =

(7)
which can be rewritten as, where W
p
is the width of the
piezoceramic

+
+ =
h
t
p p
p
dxdz E D S T W U
0
3 3 1 1
) (
2
1

(8)
82 82
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 82
Department of Mechanical Engineering
Dr. G. Song, Associate Professor

+
)
`

)
`

=
h
t
T
p
p
dxdz
S
E
T
D
W
0 1
3
1
3
1 0
0 1
2
1
(9)
The strain S
1
can be written as
2
2
1
x
W
z S
x

= =
(10)
Substituting Eq. (6) into Eq. (9), we get


+
+
+ =
)
`

(
(

)
`

=
h
t
x p x p p
T
p
h
t
x p p
p p
T
T
x
p p
p
p
dxdz E E E d E E d W
dxdz
E
E E d
E d E d E
W U
0
2
3 31
2
3
2
31 3
0
3
31
31
2
31 3 3
] 2 ) [(
2
1
2
1

(11)
83 83
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 83
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
By using the expression in Eq. (10), we get

+
|
|
.
|

\
|

+ =
h
t
p p p
T
p p
p
dxdz
x
W
z E
x
W
z E E d E E d W U
0
2
2
2
2
2
2
3 31
2
3
2
31 3
] 2 ) [(
2
1

(12)
Substituting W(x) from Eq. (3), we get
q k q be q e U
p
T T
p
2
1
2
1
2
=
(13)
84 84
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 84
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
where
( )
dx
dx
d
dx
d
t
t E t W k
dx
dx
d
t
W E d b
E t e
E d
t
h W
j
h
i
p
p p p p ij p
h
i
p
p p i
p
p
T
p
p
2
2
0
2
2
2
2
0
2
2
31
3
2
31 3
3
] [
2

|
|
.
|

\
|
+ + =

|
|
.
|

\
|
+ =
=
=

(14)
By substituting
i
from Eq. (4), we get
|
|
.
|

\
|
+ =
|
|
.
|

\
|
+ =
= =
2
2
0
31 4
31 2
3 1
p
p p
p
p p
t
W E d b
t
W E d b
b b
(15)
85 85
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 85
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Stiffness Matrices:
Define
|
|
.
|

\
|
+ + =
3
2
2 p
p p p p
t
t E t W k
2
34 24
2
23
2
14
3
13
2
12
44
3
33
2
2
22
3 3
2
2
11
6
,
2
6
,
6
12
,
6
4
,
12
4 4
3
12 12
3
h
k
k
h
k
k
h
k
k
h
k
k
h
k
k
h
k
k
h
k
k
h
k
k
h
k
h
t
t E t W k
h
k
h
t
t E t W k
p
p p p p
p
p p p p
= =
= =
= =
= =
=
|
|
.
|

\
|
+ + =
=
|
|
.
|

\
|
+ + =
(16)
86 86
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 86
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
By including the beam element for the elastic energy, we can
rewrite Eq. (13) as
kq q Be q e U
T T
2
1
2
1
2
=
where
T
p b
b b b b B k k k ] , , , [ ;
4 3 2 1
= + =
(17)
(18)
where
k
b
= stiffness matrix for the structure
k
p
= stiffness matrix for the piezoceramic member
87 87
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 87
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
The kinetic energy of piezoceramic can be written as
dx w T
h
p p
2
0
2
1

= (19)
where
p
is mass per unit length for the piezoceramics. The
kinetic energy for the piezoceramic element can be written as

= q M q T
p
T
p
2
1
where
| |

=
h
j i p
ij
p
dx x x m
0
) ( ) ( (20)
88 88
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 88
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
The total kinetic energy is then given by

= q M q T
T
2
1
where M = M
b
+ M
p
M
b
= mass matrix for beam
M
p
= mass matrix for piezoceramic
The Lagrangian function, L , is given by
L = T U
kq q Be q e q M q
T T
p
T
2
1
2
1
2
1
2
+ =

The Lagrangian equation is
0 =

|
|
.
|

\
|

k
k
q
L
q
L
dt
d
(21)
(22)
(23)
89 89
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 89
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Substituting Eq. (22) into Eq. (23) and using q as generalized
coordinates, we get
a
Be q k q m = +

] [ ] [
where
] [ ] [ ] [
] [ ] [ ] [
p b
p b
k k k
m m m
+ =
+ =
and e
a
is applied voltage.
Eq. (24) represents the equation for the actuator.
(24)
90 90
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 90
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Taking q as a generalized coordinate, the equation for
sensor voltage output in terms of q is
q B e
T
s
=
(25)
Eq. (25) represents the voltage output from a piezoceramic
sensor. Up to now, we have considered only an element.
The equation for the global form is determined by combining
the equations.
91 91
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 91
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Example
Let us consider a system as shown in the following figure.
1 2 3 4
Actuator Sensor
1 1
, W
2 2
, W
3 3
, W
4 4
, W
5 5
, W
The system consists of four elements. Elements 1 and 4 are
beam elements. Element 2 is a piezoceramic beam element and
is used as an actuator. Element 3 is a piezoceramic/beam
element and is used as a sensor.
92 92
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 92
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
Let us assume that
(
(
(
(

=
(
(
(
(

=
1
44
1
43
1
42
1
41
1
34
1
33
1
32
1
31
1
24
1
23
1
22
1
21
1
14
1
13
1
12
1
11
1
1
44
1
43
1
42
1
41
1
34
1
33
1
32
1
31
1
24
1
23
1
22
1
21
1
14
1
13
1
12
1
11
1
] [
] [
m m m m
m m m m
m m m m
m m m m
m
k k k k
k k k k
k k k k
k k k k
k
Beam element 1
93 93
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 93
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
(
(
(
(

=
(
(
(
(

=
a a a a
a a a a
a a a a
a a a a
a
a a a a
a a a a
a a a a
a a a a
a
m m m m
m m m m
m m m m
m m m m
m
k k k k
k k k k
k k k k
k k k k
k
44 43 42 41
34 33 32 31
24 23 22 21
14 13 12 11
44 43 42 41
34 33 32 31
24 23 22 21
14 13 12 11
] [
] [
Actuator element ( beam + piezoceramic)
94 94
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 94
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
(
(
(
(

=
(
(
(
(

=
s s s s
s s s s
s s s s
s s s s
s
as s s s
s s s s
s s s s
s s s s
s
m m m m
m m m m
m m m m
m m m m
m
k k k k
k k k k
k k k k
k k k k
k
44 43 42 41
34 33 32 31
24 23 22 21
14 13 12 11
44 43 42 41
34 33 32 31
24 23 22 21
14 13 12 11
] [
] [
Sensor element ( beam + piezoceramic)
95 95
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 95
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
(
(
(
(

=
(
(
(
(

=
4
44
4
43
4
42
4
41
4
34
4
33
4
32
4
31
4
24
4
23
4
22
4
21
4
14
4
13
4
12
4
11
4
4
44
4
43
4
42
4
41
4
34
4
33
4
32
4
31
4
24
4
23
4
22
4
21
4
14
4
13
4
12
4
11
4
] [
] [
m m m m
m m m m
m m m m
m m m m
m
k k k k
k k k k
k k k k
k k k k
k
Beam element 4
96 96
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 96
Department of Mechanical Engineering
Dr. G. Song, Associate Professor

(
(
(
(
(
(
(
(
(
(
(

+ +
+ +
+ +
+ +
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Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 97
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
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98 98
Control of Smart Structures 2. Review of Smart Materials and Structures (Part 2) 98
Department of Mechanical Engineering
Dr. G. Song, Associate Professor
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