Documente Academic
Documente Profesional
Documente Cultură
2011
Table of contents
1. Executive Summary 2. Methodology 3. MEMS Microphone Definition and Technologies Overview Advantages compared to ECM Detection principals Monolithic VS. Several chip solution Analog/Digital microphones Packaging & Patents Medical, Automotive and Military application Penetration rate of MEMS microphone MEMS microphone market forecast split by application
4. MEMS Microphone Industry Supply Chain and Main Players Supply chain overview Evolution of business models Main Players Profiles and Products Strategy of Main Players / New Challengers Geographic evolution Inactive players, M&A and latest announcements 5. MEMS Microphone Applications and Market by Application Mobile phone application Laptop and other consumer application
2011
6. Technology Evolution and Trends MEMS Microphone Technology roadmap Manufacturing and packaging evolution Challenges and opportunities From microphone to speaker? 7. Conclusion 8. Appendix 8.1 General overview of the MEMS Business MEMS History & Genealogy MEMS market challenges 8.2 MEMS Manufacturing Overview Micromachining technologies MEMS processes challenges MEMS manufacturing and packaging roadmaps
To provide application focus on key existing markets and most promising emerging ones: new features, technology evolution, insight about future opportunities & challenges:
Functions that are used, new features and specification requirements
2011
R&D centers
Understand the impact of new MEMS microphone manufacturing and packaging technologies Evaluate market potential of future technologies and products for new applicative markets
2011
Detection principles
Capacitive
Knowles Electronics EPCOS / Sonion MEMSTech Infineon Bosch / Akustica Panasonic NXP Semiconductor VTT Electronics
2011
Optical
Phone-Or (stopped) Toshiba NASA .
Microflow
Microflown .
Piezoresistive
AvagoTech Auxitrol
Piezoelectric
ASIC die
Manufacturing
Vendor
Knowles (USA)
AAC (CN)
ASIC suppliers
ADI, Xfab, Infineon
2006 Knowles S2.14, 1.6 mm x 1.6 mm, MEMS microphone die, with a 0.64 mm diameter diaphragm. The Knowles microphones use a separate ASIC 2011 7 die.
2007/2008 S3.15 is 1.35 mm x 1.35 mm and features only two bond pads, as compared to the four seen on the S2.14. The diaphragm is 0.64 mm in diameter.
2010 S4.10 microphone. The microphone die is only 1.1 mm x 1.1 mm, with a 0.64 mm diaphragm. It is worth noting that Knowles does not appear to have changed the basic layout of the technology, rather they have been shrinking the die, thus allowing them to lower the cost. They have achieved greater than 50% shrink in the die area between the S2.14 product and the newer S4.10 product, implying a doubling of the chip yield per wafer, while keeping the microphone diaphragm constant in size.
2011
Cost Reduction
Surface MM
Higher design freedom More sophisticated devices
Up to 500m structures Pressure sensors mostly Low cost but restricted design Repeatable process No IC process compatibility
W2W or C2W Use of Through Si Vias Most likely scenario for CMOS MEMS stacking in the future But will cost be competitive?
Integration with high-voltage CMOS (reduced parasitances) Structure increased vertical deflection (micro-mirrors); higher design freedom
?
3D Integration
Cavity SOI
New design freedom improves electrical perf. improves yield CMOS standard
CMOS MEMS
reuse semiconductor manufacturing lines cost can be lower compared to hybrid increased performance BUT process compatibility is an issue XeF2 use
70-80s
2011
80-90s
9
Timeline
90-2000s
Today/Future
2011 Copyrights Yole Dveloppement SARL. All rights reserved.
AAC Acoustic Technologies, Akustica/Bosch, Analog Devices, APM, Apogee, Apple, ASE, AudioPixels, Auxitrol, AvagoTech, B&K, BenQ, BSE, Continental, CSIL, CSMC-Tech, Draper Lab, Goertek, Google, GMEMS, Hosiden, Infineon, INN, Knowles acoustics/SonionMEMS, LG, Lingsen Pecision Industries, MEMSensing, MEMSTech, Merry electronics, Microflown, MosArt Packaging, Motorola, NASA, NCT, Nokia, NXP, Omron, Panasonic, Phone Or, Samsung, Siemens, Silicon Matrix, Solid State System, ST Microelectronics, Tong Hsing, TDK-EPC, Toshiba, UMC, VK mobile, VTT Electronics, Wolfson, Xfab, Yamaha
2011
10
MEMS Microphone
New!
Motion Sensors for Consumer & Mobile applications
New!
IMU &High Performance MEMS
New!
MEMS & Sensors for Smartphones
New!
Uncooled IR Cameras & detectors for thermography & nigh Vision
New!
CMOS Image Sensors
New!
MEMS Cosim+ MEMS Manufacturing Cost Simulation Tool MEMS Players: Analysis of Financial Performance
2011
11
www.yole.fr
www.i-micronews.com
2011
12