15 Lilac Lane, Somersworth, NH 03878

Airex Linear Motor Vacuum Compatibility Airex motors are available on an individual project basis for vacuum applications. Application specific vacuum and particle requirements as well as coil, cable and track configurations will dictate which available options are needed. Airex Corporation is an ISO 9001 certified company with a 50 year history designing and developing motors with stringent vacuum operational requirements for military and space applications. We have developed and delivered vacuum compatible coil and linear motor assemblies to equipment manufacturers of semiconductor processing equipment both directly and through our licensees. Our components have been applied to missile guidance systems, deep space optical imaging equipment, cryogenic coolers, interplanetary chemical analysis, space-based laser communications, and precision semiconductor lithography stages. Our work is typically split between research and development projects and manufacturing activities in high reliability magnetics for high performance or emerging technologies. Equipment is on site for environmental testing such as thermal cycling, thermal shock, vibration and burn-in, as well as manufacturing and test equipment for vacuum/pressure molding and analysis of electrical performance. Materials used in our linear motors have a heritage in space flight. Specifically, linear motor epoxies, magnet wires, lead wires, connecting boards, magnets and housings were utilized in a JPL design to position optics in space. Space applications demand light weight, power efficient, high reliability devices that can survive the high shock/vibration of launch, large temperature excursions in a vacuum environment, and years of low activity. Airex Corporations linear motor product and manufacturing methods descend directly from our magnetics development for space missions, strategic missile programs, semiconductor lithography and invasive medical applications where commercial motor products fell short on performance. On the commercial side, our motors have been -9 tested and deployed in vacuum environments to 10 Torr utilizing pre-designed manufacturing steps specific to the application (see below), and have never failed for vacuum incompatibility. Airex linear motors have also been used exclusively in lithography applications for EUV stages. These were the first magnetics qualified for use in the vacuum chamber where lenses could not be cleaned and were never exposed to the atmosphere. This was a 10-6 Torr requirement. Licensees have qualified these motors for vacuum applications in Europe as well as the Far East. Additional applications using Airex vacuum compatible linear motors include water cooled P20 linear motors used for reticule and wafer handling in photolithography and P12 series motors used for shuttling wafers and precision assembly.

Tel: 603.841.2040

airex.com

Fax: 603.692.4317

15 Lilac Lane, Somersworth, NH 03878

Additionally, due to their construction features, materials, and manufacturing, our standard commercial motors are designed to operate in vacuum applications from 10-1 Torr to 10-4 Torr without special processing. Specific out-gassing data on our motors is not available because there are several hundred configurations of our motors and tests on these motors are performed in concert with other components and lastly these tests are typically proprietary for our customers. We can provide a quote for you should you want an out-gassing test for this application. The construction of our standard and vacuum compatible linear motors is outlined below: Standard Coil Processing: Coils are machine wound in place for unsurpassed coil-to-coil uniformity. Self-standing formed coils are heat bonded into a formed geometry. Internal electrical connections are Teflon-insulated crimp and/or soldered joints to Teflon lead wires. Coil assemblies are pressure molded in a thermally conductive, heat cured epoxy. The cable, anodized aluminum mounting bracket, and an ULTEMTM connection cover are attached using the same heat-cured epoxy. Coil burn-in at 125 C completes any epoxy bonds minimizing out-gassing of volatiles. Coils are 100% tested including thermal stress burn-in, Hi-pot at 500 volts ac, as well as electrical characteristics to assure quality and performance compliance. Finish products are cleaned with acetone and packaged in heat sealable poly bags. Standard Magnet Track Processing: Nickel plated neodymium iron boron magnets are bonded to nickel plated, low carbon steel side plates with acrylic adhesive. Side plates are assembled to a nickel plated aluminum connecting rib using black oxide coated carbon steel fasteners. The assembly is mechanically inspected and cleaned with acetone prior to the application of product and warning labels. (For most vacuum application we ship the labels separately and let the customer decide weather or not they want to apply them.) The track is packaged in a heat sealable poly bag Additional Vacuum Processing Options for Operation at >10-4 Torr. For an additional cost, Airex offers some or all of the preparation steps indicated below. These steps add varying costs to the product and are more commonly used in
Tel: 603.841.2040 airex.com Fax: 603.692.4317

15 Lilac Lane, Somersworth, NH 03878

applications concerned with condensable volatiles including semiconductor, space or optical systems. Coil Processing Options: Thermal vacuum bake-outs. Individual coil assemblies can be vacuum processed and/or impregnated to further minimize out-gassing. High-flex Teflon leads can be broken out individually in place of a cable configuration. Non-anodized aluminum can be specified. Parylene encapsulation could be applied to the coil assembly minimizing particle generation. A machined groove in the mounting bracket would provide a bleed path to minimize virtual leaks. Extra cleanings, washes and nitrogen back filled packaging are additional options. Magnet Track Processing Options: Thermal vacuum bake-outs. Machined grooves in the side plate would provide bleed paths to minimize virtual leaks. Vented, stainless steel screws can be used for assembly Drilled fasteners (such as Helicoil) can be used. Extra cleanings, washes and nitrogen back filled packaging are additional options 400 series stainless steel can be used in place of the nickel plated low carbon steel (this can be an expensive option). If there are any other vacuum or operational requirements, please consult Airexs Engineering Department.

Tel: 603.841.2040

airex.com

Fax: 603.692.4317