Industrial Microscopes LV150/150A/100D

Industrial Microscopes

Specifications and equipment are subject to change without any notice or obligation 2000-05 NIKON CORPORATION on the part of the manufacturer. April 2005.
WARNING
TO ENSURE CORRECT USAGE, READ THE CORRESPONDING MANUALS CAREFULLY BEFORE USING YOUR EQUIPMENT.

NIKON CORPORATION Fuji Bldg., 2-3, Marunouchi 3-chome, Chiyoda-ku, Tokyo 100-8331, Japan www.nikon.com/

NIKON INSTECH CO., LTD.

Parale Mitsui Bldg., 8, Higashida-cho, Kawasaki-ku, Kawasaki, Kanagawa 210-0005, Japan phone: +81-44-223-2175 fax: +81-44-223-2182 http://www.nikon-instruments.jp/eng/

NIKON INSTRUMENTS EUROPE B.V.

P.O. Box 222, 1170 AE Badhoevedorp, The Netherlands phone: +31-20-44-96-222 fax: +31-20-44-96-298 http://www.nikon-instruments.com/

NIKON INSTRUMENTS INC.

1300 Walt Whitman Road, Melville, N.Y. 11747-3064, U.S.A. phone: +1-631-547-8500; +1-800-52-NIKON (within the U.S.A.only) fax: +1-631-547-0306 http://www.nikonusa.com/

NIKON INSTRUMENTS (SHANGHAI) CO., LTD. CHINA phone: +86-21-5836-0050 fax: +86-21-5836-0030 (Beijing office) CHINA phone: +86-10-5869-2255 fax: +86-10-5869-2277 NIKON SINGAPORE PTE LTD SINGAPORE phone: +65-6559-3618 fax: +65-6559-3668 NIKON MALAYSIA SDN. BHD. MALAYSIA phone: +60-3-78763887 fax: +60-3-78763387

NIKON FRANCE S.A.S. FRANCE phone: +33-1-45-16-45-16 fax: +33-1-45-16-00-33 NIKON GMBH GERMANY phone: +49-211-9414-0 fax: +49-211-9414-322 NIKON INSTRUMENTS S.p.A. ITALY phone: + 39-55-3009601 fax: + 39-55-300993 NIKON AG SWITZERLAND phone: +41-43-277-2860 fax: +41-43-277-2861 NIKON UK LTD. UNITED KINGDOM phone: +44-20-8541-4440 fax: +44-20-8541-

NIKON CANADA INC. CANADA phone: +1-905-625-9910 fax: +1-905-625-0103

Printed in Japan (0504-05)T

Code No. 2CE-KWFH-7

This brochure is printed on recycled paper made from 40% used material.

En

MEMS

Semiconductors

Materials

Packages

Versatility

Extend your vision

Bare wafers Lithography process Probe, test processes Post-dicing Macromolecules, monomeric materials Organic/inorganic materials Polymers Thin film Magnetic materials Crystals Metallugraphy LF/TAB WL-CSP QFP SIP BGA, CSP, FC

Printer heads Micro sensors Optical switches GMR heads for HDD

Versatility

Casts and parts

Extend your vision

Optical performance

Improved performance
OA equipment parts Cell phones, PDAs, DSC, PC parts Automobiles, aeronautics

A modular microscopy system for breadth and depth

Precision molds FPD Display devices

PCB

Optical performance

Improved Basic performance Performance

Medium/small PCB FPC Interposer substrates

2

Precision molds

LCD, color filters Polarizing filters Organic EL

CCD LCOS

CMOS DMD
3

Versatility
The modular design of the Eclipse LV series allows an unprecedented level of versatility. The Eclipse LV series offers flexibility that enables it to cover a wide variety of products and applications, extending from development and quality control to inspection in the manufacturing process. Users will recognize the superb performance of the Eclipse LV series when inspecting semiconductors, FPD, packages, electronics substrates, materials (material science), medical devices, cast/metallic/ceramic parts, precision molds, MEMS, telecommunications devices, and a wide variety of other samples.

Accepts taller samples

The maximum sample height can be increased to 82mm from 47mm by inserting the LV-CR Column Riser 35 between the main body and arm of the microscope. This feature is useful for viewing the surfaces of precision molds, optical materials and other thick samples.

Extensive range of industrial stages and accessories

Users can select suitable models based on sample and stage stroke. All stages are highly durable with triple-plate design.

Dia base unit for diascopic illumination

In the Eclipse LV series, the LV-DIA Dia Base is available for diascopic illumination OEM use. Users can now take full advantage of the modular design. A UN2 transformer is used for the power supply.

Compact industrial stage: LV-S32 3x2 Stage

The newly designed LV-S32 3x2 is a compact stage for industrial microscopes. Its triple-plate design ensures durability, stability and ease of use, even when heavy samples such as metallic materials are observed. The standard glass plate makes this stage suitable for episcopic and diascopic LV-S32 3x2 Stage illumination.
Stroke: 75 x 50 mm
Roll-out section Tape-suction section Roll-in section Tape-transport section Stage section

47mm

82mm

Without column riser

With column riser An example of LV-DIA Dia Base built into a taped sample inspection system

Modular design

Non-Nikon stages (LV150 or LV150A only)

Use of non-Nikon stages, such as the Suruga Seiki B23-60CR, in combination with the LV-SUB Substage 2 allows the microscope to handle taller samples of up to 116.5 mm, thereby enabling the observation of fiber ends and other tools.

LV-S64 6x4 Stage Stroke: 150 x 100 mm

LV-S6 6x6 Stage Stroke: 150 x 150 mm

LV-DIA Bia Base

LV-SUB Stage (exclusive for LV150/LV150A)

LV-SUB Substage 2 (exclusive for LV150/LV150A)

Combination of LV-150 with LV-SUB Substage 2 and Suruga Seiki B23-60CR stage L-S6WH Wafer Holder 6 (for LV-S6 6x6 Stage) LV150 standard combination L-S6PL ESD Plate (for LV-S6 6x6 Stage)

Versatility

LV-S32PL ESD Plate (for LV-S32 3x2 Stage)

LV-S32SGH Slideglass Holder (for LV-S32 3x2 Stage)

Appropriate holder and substage are selected based on sample and stage combination.
5

Extend your vision

A wide variety of observation methods is available with the Eclipse LV series. Observations with first-order compensator, UV polarizing, and epi-fluorescence observations with UV excitation, in addition to brightfield, darkfield, DIC, simple polarizing, epi-fluorescence (excitation using visible light) and double-beam interferometry are all possible. Two new light sources also have been developed: high-intensity, low powerconsumption 12V-50W halogen light source and adjustable high-intensity mercury-fiber light source.

Optical Performance
Transmission wavelength coverage extended to UV
CFI LU Plan Fluor series
The new CFI LU Plan Fluor series covers transmission wavelength ranges up to UV. These objective lenses are suitable for various research, analysis and examination needs, while maintaining Nikons commitment to high NA and long working distance. Only one kind of objective lens is needed for brightfield, darkfield, simple polarizing, observation with firstorder compensator, DIC and UV epi-fluorescence observations. These objective lenses, which offer high resolution and easy-touse performance, can be combined not only with microscopes but also with other equipment for even greater versatility.

Universal epi-illuminator: LV-UEPI

The LV-UEPI universal epi-illuminator enables brightfield, darkfield, simple polarizing and DIC observations. Field and aperture diaphragms are automatically opened when the observation is switched from brightfield to darkfield, and return to their original position when switched back to brightfield.

High-intensity 12V-50W halogen light source: LV-LH50PC Precentered Lamphouse

Although the LV-LH50PC Precentered Lamphouse is 12V-50W, the brightness is equivalent to or higher than that of 12-100W types. The low powerconsumption halogen light source contributes to the compact design of the microscope while also being friendly to the environment. Focus drift due to heat from the illuminator is substantially reduced.

CFI60 LU Plan Fluor EPI series

Objective lenses with correction ring

CFI L Plan EPI CR series
The CFI60 series now includes the CFI L Plan EPI CR series to cope with the thinner coverglass used in liquid crystal displays, and highly integrated, and dense devices. Coverglass correction can be continuously made from 0 mm up to 1.2 mm (0-0.7 mm and 0.6-1.3 mm for 100x) with the correction ring. The 100x objective lens offers 0.85 high NA, while enabling high-contrast imaging of cells and patterns without being affected by the coverglass.
CFI60 LU Plan Fluor BD series

xtend your vision

Brightfield Darkfield Simple polarizing DIC

CFI60 L Plan EPI CR series of objective lenses with correction ring

Environmentally friendly Universal epi-illuminator 2: LV-UEPI2

The LV-UEPI2 universal episcopic illuminator is equipped with advanced optics suited to a wide variety of observation methodsbrightfield, darkfield, DIC and epifluorescenceand automatically sets optimal illumination in accordance with the field and aperture diaphragm, shutter, and filters, including diffuser and ND. This design enables the operator to concentrate on the observation.

Auto optimal illumination selection

Field diaphragm BF DF FL1 FL2 Any diameter Open Any diameter Any diameter Aperture diaphragm Any diameter Open Any diameter Any diameter Shutter Open Open Open Open UV-cut filter Insert Insert

The eco glass used in the CFI LU Plan Fluor and L Plan EPI CR series does not contain harmful substances such as lead and arsenic.
Without correction (50x)

With correction at 0.7 mm (50x)

CFI60 Series Objectives

Model CFI L Plan EPI CFI LU Plan Fluor EPI New Magnification 2.5X 5X 10X 20X 50X 100X 20X 50X 100X 20X 50X 100X 100X 150X 150X NA 0.075 0.15 0.30 0.45 0.80 0.90 0.40 0.55 0.80 0.35 0.45 0.70 0.95 0.95 1.25 Working Distance (mm) 8.8 23.5 17.3 4.5 1.0 1.0 13.0 10.1 3.5 24.0 17.0 6.5 0.4 0.3 0.25 Model CFI LU Plan Fluor BD New Magnification 5X 10X 20X 50X 100X 20X 50X 100X 100X 150X NA 0.15 0.30 0.45 0.80 0.90 0.40 0.55 0.80 0.90 0.90 Working Distance (mm) 18.0 15.0 4.5 1.0 1.0 13.0 9.8 3.5 0.51 0.4

CFI LU Plan BD ELWD

CFI LU Plan EPI ELWD

CFI LU Plan Apo BD

CFI L Plan EPI SLWD

CFI LU Plan Apo EPI

Brightfield Darkfield Simple polarizing Observation with first-order compensator UV polarizing epi-fluorescence DIC Epi-fluorescence (UV excitation possible)

CFI L Plan Apo EPI WI

Model CFI L Plan EPI CR CFI L Plan EPI CR CFI L Plan EPI CRA CFI L Plan EPI CRB

New New New New

Magnification 20x 50x 100x 100x

NA (mm) 0.45 0.7 0.85 0.85

Working Distance (mm) 10.9-10.0 3.9-3.0 1.2-0.85 1.3-0.95

Glass Thickness Correction Range 0-1.2mm 0-1.2mm 0-0.7mm 0.6-1.3mm

ptical Performance

Improved performance
Usability has been vastly improved as has durability and rigidity.

Observation Methods
Brightfield
The antiflare design applied to the objective lenses and light source ensures bright, high-contrast images.

Simple polarizing
In addition to simple polarizing, a lambda plate can be inserted into the optical path to achieve observations with a firstorder compensator. This is useful for liquid crystal inspections (when used in combination with the LVUEPI 2).

Tilting trinocular eyepiece tube

Thorough ESD protection

Darkfield
LV-TT2 Tilting Trinocular Eyepiece Tube
The newly developed LV-TT2 tilting trinocular eyepiece tube (erect image) offers comfort to all users, regardless of their stature or viewing position. The optical path changeover of 100:0/20:80 allows the simultaneous use of a monitor. Nikons unique Fly-eye Lens used in the darkfield illuminator yields a threefold increase in brightness over previous models. This allows highsensitivity detection of defects and height gaps in samples.

mproved performance

YM-PO Polarizer

L-AN Analyzer

LV-PO Polarizer

LV-FLAN FL Analyzer

LV-P Plate

Nomarski DIC
All parts of the microscope that might be touched, including the body, tube and stage, have been insulated. This improves anticontamination and prevents samples from being harmed by static electricity, thereby improving yields. Electrostatic decay time: 1000-10V, within 0.2 sec.
L-DIC DIC Prism (standard) L-DIHC DIC Prism (high contrast)

Epi-fluorescence
UV, V, BV, B or G excitation fluorescence filter blocks can be selected. This method is perfect for the observation of OEL, ion migration and other substrate uses.

Highly durable motorized nosepiece

Brightfield

Epi-fluorescence B-2A

Highly rigid, vibration-free body

LV-NU5A Nosepiece
The LV-NU5A motorized universal quintuple nosepiece is 10 times more durable than its predecessor and can be used with the LV150A. In combination with the LV-NCNT motorized nosepiece controller, it can also be used in other devices. The use of structural analysis during the design process has improved rigidity and antivibration parameters to yield clear images even at high magnification.
YM-PO L-AN L-DIC L-DICH[??] Polarizer Analyzer DIC Prism High-contrast DIC Prism

Standard or high contrast DIC sliders can be selected to suit the sample. This method is useful for the surface observations of various devices and precision molds.
Fluorescence filter blocks LV-UV Polarizer LV-FLAN FL Analyzer

Double-beam interferometry equipment (measures minute height gaps)

Michelson (TI) and Mirau (DI) types of episcopic doublebeam interferometry can be carried out. A filar micrometer eyepiece can be used to examine or measure samples while avoiding direct contact.

Diascopic illumination
Diascopic illumination is used to observe optical parts, FPD and other samples that transmit light.

Manual nosepiece
A variety of manual nosepieces are available to suit all needs.

C-N6 Nosepiece (Brightfield)

L-NBD5 Nosepiece (Bright/darkfield)

L-NU5 Nosepiece (Universal) Condenser Episcopic Two-beam Interferometry Equipment TI/DI

Applications
(Episcopic illumination type)
Semiconductor (IC wafer)
LV-TI3 Trinocular Tube
A trinocular tube with an optical path changeover of 100:0/0:100.

Semiconductor (IC wafer)

MEMS (optical switch)

LV-LH50PC Precentered Lamphouse

A low power-consumption 12V-50W halogen light source equivalent to or higher than the 12V-100W type.

CFI-series eyepiece

Brightfield

Darkfield

Brightfield

LV-UEPI
An illuminator that can be used for brightfield, darkfield, simple polarizing and DIC observations.

LV150/LV150A
The LV150 and LV150A microscopes are used for episcopic illumination.

Micro bump

Compact disc (CD)

Image sensor (CCD)

LV-NU5A Nosepiece
A universal motorized nosepiece that is 10 times more durable than its predecessors.

CFI LU Plan Fluor series

These objective lenses feature a high NA, long working distances and an extended transmission wavelength range.

LV-S6 6x6 Stage

An episcopic illumination stage capable of inspecting 150mm wafers. (With 6 wafer holder)

Brightfield

Simple polarizing

Brightfield

PCB (ion migration)

PCB (ion migration)

Precision mold

L150A controls

Brightfield
Motorized nosepiece controls

Epi-fluorescence

DIC

10

11

Applications
(Episcopic/diascopic illumination type)
LCD (color filter)
LV-TI3 Trinocular Tube
A trinocular tube with an optical path changeover of 100:0/0:100.

LCD (conductive particle)

Test reticle

LV-LH50PC 12V-50W Lamphouse

A low power-consumption 12V-50W halogen light source equivalent to or higher than the 12V-100W type.

CFI-series eyepiece

Diascopic brightfield

DIC

Diascopic brightfield

LV-UEPI2
The LV-UEPI2 illuminator enables brightfield, darkfield, DIC, simple polarizing, and UV excitation epi-fluorescence observations.

Carbon paper

Nodular graphite cast iron

LV100D
The LV100D microscope is capable of episcopic and diascopic illumination.

Nosepiece
Selectable from C-N6 (brightfield), L-NBD5 (bright/darkfield) and LNU5 (universal) nosepieces.

CFI LU Plan Fluor Series

These objective lenses feature high NA, long working distances and an extended transmission wavelength range.

DIC

Brightfield

DIC

LV-S32 3x2 Stage

This small, industrial-use stage has a triple-plate design and can be used for episcopic and diascopic illumination.

Tourmaline

Tourmaline

Tourmaline

Brightfield

DIC

Double-beam interferometry

12

13

Eyepiece tubes

Illuminators

Double Port

Polarizing/DIC accessories
Simple Polarizing Observation with first-order compensator

LV-TI3 Trinocular Eyepiece Tube ESD

LV-TT2 Tilting Trinocular Eyepiece Tube LV-UEPI Y-IDP Double Port (Beamsplit 45:55/0:100) Y-IDP Double Port 0/100 (Beamsplit 100:0/0:100)

Eyepieces
Model CFI 10x CFI 10xM CFI 10CMfor C-TE binocular ergo tube CFI 12.5x CFI 15x CFI UW 10x CFI UW 10xM Mirometer eyepiece 10xN F.O.V. 22 22 22 16 14.5 25 25 20 Photomask included Stroke 10 mm Main scale: 0.1 mm/increments Sub scale: 0.01 mm/increments Photomask included Crosshairs and micrometer included Remarks

YM-PO Polarizer

L-AN Analyzer

LV-PO Polarizer

LV-FLAN FL LV-P Analyzer Plate

UV polarizing epi-fluorescence

DIC

LV-UEPI2

LV-UV Polarizer

LV-FLAN FL Analyzer

YM-PO L-AN Polarizer Analyzer

L-DIC DIC Prism

L-DICH High-contrast DIC Prism

Nosepieces

IN 0 100 0

OUT 100

Substages (LV150/LV150A)

C-N6 Nosepiece (Brightfield)

L-NBD5 Nosepiece (Bright/darkfield)

L-NU5 Nosepiece (Universal)

LV-NU5A Motorized Nosepiece (Universal) LV-SUB Stage LV-SUB Stage 2

Objective lenses

Stages

CFI LU PLAN FLUOR EPI series

CFI L PLAN EPI CR series

LV-S6 6x6 Stage

LV-S64 6x4 Stage

LV-S32 3x2 Stage

CFI LU PLAN FLUOR BD series

Holders
For LV-S6 6x6 Stage For LV-S32 3x2 Stage

Objective adapters

LU objective Adapter M32-25

C-OA 15mm Adapter

L-S6WH Wafer Holder

L-S6PL ESD Plate

LV-S32PL ESD Plate

LV-S32SGH Slideglass Holder

Diascopic illumination condensers

Micrometers
Objective micrometer Eyepiece micrometer Grid micrometer

LWD Achromat

Slide (Swing-out??) Achromat 2-100x

C-C Abbe

C-C Achro

DF (Dry)

14

ACCESSORIES

15

Digital cameras for microscopes

Ultrahigh-definition Digital Camera

The Digital Sight series is a powerful imaging system for monitoring/capturing images taken under brightfield, darkfield, DIC, epi-fluorescence, and other observation methods.

The DXM1200F produces true-to-life, extremely high-quality images with up to approximately 12 million output pixels. It meets the demanding requirements of professional users and is excellent for image analysis in advanced R&D fields.

Standalone type This type comes with an LCD monitor, making it convenient for on-screen monitoring without a PC and in applications that require long/multiple exposures.

PC-connection type This type requires connection to a PC and allows observation on a PC monitor, image capture, measurement and analysis when special application software, ACT-2U, is used.

Real imaging cameraDS-2Mv-L1

Live image display at 30fps max. Image size: 1600 x 1200 pixels 6.3 TFT monitor Analog RGB output CompactFlash card slot USB mass-storage-class compatible Direct print function (Pict bridge compatible) optional*1 Ethernet (100BASE/TX) port*2
*1: A CP900DC dedicated printer and C-mount adapter are necessary. Provided with real 10 mode (10X printing). *2: FTP Client/Server, HTTP Server Telnet Server functions provided.

Real imaging cameraDS-2Mv-U1

Live image display at 12fps (800 x 560) Image size: 1600 x 1200 pixels PC connection via USB2.0 Dedicated application softwareACT-2U

Approx. 12 million output pixels comparable to film high-end cameras, thanks to Nikons exclusive microstep high-density imaging technology Live image display at a frame rate of 12 fps max. The wide exposure latitude produces true-to-life images regardless of brightness level.

Camera control software

ACT-1
Dedicated camera control software ACT-2U

Minimizes fatigue during large-volume, extended time shooting.

All essential sections, including live image preview, captured image window, thumbnail, and image capture parameter setting panel, are simultaneously displayed on a single screen, enabling users to easily understand image capture procedures. The size of the parameter setting panel has been reduced to leave more space for image display.

Option: camera control software

ACT-2
The optional ACT-2U software offers the following arrays of convenient measurement tools.

Camera control software for DS-L1/DS-U1

Scene modeoptimal imaging with a single mouse click
Optimal imaging parameters have been preset for each sample type, therefore anyone, regardless of experience, can easily perform photography of the highest level.
Wafer/IC chip Metal/ceramics PCB

Two-point distance

Circumference/diameter

Scale

Area

A host of measuring tools

Two-point distance Scale Point to line distance Intersection angle Circumference/diameter

Point to line distance

XY scale

Intersection angle

Screen pattern (crossline, circle)

Area (DS-U1 only)

XY scale

Screen pattern (crossline, circle)

Cross scale (DS-L1 only)

*Dedicated ACT-2U camera control software is necessary when using the DS-U1.

Camera heads
Select the best type to match your sample and use.

For brightfield, darkfield, DIC observations

DS-2MBW
Image size: 1600 x 1200 pixels 15 fps (30 max.) Superb movie

For fluorescence observations (that require long exposure)

DS-2MBWc DS-5Mc
Image size: 1600 x 1200 pixels Image size: 2560 x 1920 pixels Sensitivity approx. 5 times greater Includes a Peltier device than predecessors Brilliant images with minimum noise Includes a Peltier device Brilliant images with minimum noise

DS-5M
Image size: 2560 x 1920 pixels True-to-life recording of minute images

16

Digital Camera
17

Dimensional diagrams
LV150A/LV150
95.5

LV-TI3 Trinocular Tube ESD

118

LV-TT2 Tilting Trinocular Tube

100 153

LV-CR Column Riser 35

155 35

IN 0 100 0

OUT 100

10 192.7 65.5 60 50 264.6

138 .3

508.5

137

59

66

31 52

.3

387.2

E.P.

20 96.8

36

E.P. 54.5 82 92.5 103 118 73.7 75 98.5 104

20
IN 0 100 0 OUT 100

326

193

134.5

51

51 202.5

78.1

60

67

341 456.8 90 267.0

250

LV-S6 6x6 Stage LV100D

95.5

LV-S64 6x4 Stage

129 299 140.5

LV-S32 3x2 Stage

227 181

205

JAPAN

205.5

174

205.5

186

174

111

34

34

188

188

134

84

134

35

114

JAPAN

317 357 317

40

31

217 299 25.5

25.5

25.5

25.5

31

495

45.5

45.5

140.5

391

34 109

25.5

326

34 109 109

34

JAPAN

193

92

341

140.5

250

LV-SUB Stage
94

LV-SUB Stage 2
50

76

151

LV-S32PL ESD Plate

122

LV-S32SGH Slideglass Holder

122

100 70

74

LV-UEPI Universal Epi-illuminator

336 295

LV-UEPI2 Universal Epi-illuminator 2

410.5 370 110 79.3 25.5

74 50

88

8-M4

4-M4

106 120

66 96

26.5

54

30

88

45.5

140.5

129

76.5 4 4 30.5 13

48

48

130

100

81.3

54

45

13 60 276

40

65 5

12

113.3

40

300.5

100

16

21 51

LV-NU5A Nosepiece

LV-NCNT Nosepiece Controller

26.5

(39)

35

57

25

29

LV-DIA Dia Dase

171.5 60

61

57

4.7

100

250 48

336 295 110 79.3

410.5 370

25.5
(89) 55.7

149

15 :160mm
) (182

250

93.7

130

95

95

81.3

171.5

167.5

88

54

45

48

71

127

62

13 60 276

Cable length 220mm (cord bush exit to connector exit)

40

Cable length 220mm (cord bush exit to connector exit)

113.3 105

300.5 65 5 105

43.5

115 111 55 341 367

116 73.5

40

127

61

25

16

21 51

18

34

110

69 15
10 48

28

19

Polarizers/analyzers/plate
YM-PO Polarizer
85.4 79

LV-PO Polarizer
85.4 79

LV-UVPO Polarizer
85.4 79

Main specifications
L-AN Analyzer
90

LV150/150A
30

30

30

30

Main body Focusing section Nosepiece

Baseless type (spacer insertable between arm and stand); Max. sample height 47mm (when configured with 3x2 stage/6x4 stage), 82mm with column riser, 116.5mm with Suruga Seiki B23-60CR; 12V-50W brightness control transformer built in Coaxial coarse/fine focus knob, left: coarse/fine, right: fine; Stroke 40mm, coarse 14.0mm/rotation (torque adjustable, with refocusing mechanism), fine focusing 0.1mm/rotation (1mm/increments) C-N6 Nosepiece (brightfield, sextuple), L-NBD5 Nosepiece (bright/darkfield quintuple, with flare prevention), L-NU5 Nosepiece (universal quintuple, with flare prevention), LV-NU5A Nosepiece (for LV150A, high-durability motorized universal quintuple, with flare prevention) 12V-50W high-intensity halogen lamp (ESD-applied); Field (centerable) and aperture diaphragms synchronized with B/D changeover; 25mm filter (NCB11, ND16, ND4) insertable; Polarizer/analyzer mountable 12V-50W high-intensity halogen lamp (ESD-applied); 120W high-intensity mercury-fiber illuminator (with brightness control, no centering necessary) mountable; Centerable field and aperture diaphragms synchronized with B/D changeover; f25mm filter (NCB11, ND16, ND4) insertable; Polarizer/analyzer/l plate insertable, excitation balancer insertable LV-TI3 Trinocular (erect image, F.O.V. 22/25), LV-TT2 Tilting Trinocular (erect image, F.O.V. 22/25), Y-TF Trinocular (inverted image, F.O.V 22/25), Y-TB Binocular (inverted image, F.O.V 22), C-TE Tilting Binocular (inverted image, F.O.V 22) LV-S32 3x2 Stage (stroke: 75x50 mm including glass plate), ESD-applied (excluding glass plate) LV-S64 6x4 Stage (stroke: 150x100 mm including glass plate), ESD-applied (excluding glass plate) LV-S6 6x6 Stage (stroke: 150x150 mm; only for episcopic illumination) CFI eyepiece series CFI60 series 1000-10V, within 0.2 sec. 1.2A/75W Approx. 8.6kg

6.5

7.5

LV-FLAN FL Analyzer
113.5

LV-P Plate
47
45 ' 30

30

7.5

6.5

90 6.5 3

Episcopic illuminator LV-U EPI Episcopic illuminator LV-U EPI2

Objective lenses
CFI LU PLAN FLUOR
CFI LU Plan Fluor EPI 5X
29 23.8 5 M25x0.75 5

10

Eyepiece tube Stage

CFI LU Plan Fluor EPI 10X
29 23.8 M25x0.75 5

CFI LU Plan Fluor EPI 20X

29 23.8 M25x0.75

CFI LU Plan Fluor EPI 50X

30 23.8 M25x0.75

CFI LU Plan Fluor EPI 100X

30 23.8 M25x0.75

Eyepiece Objective lens

JAPAN

JAPAN

L.U

36.5

W.D.=23.5

42.5

59

55.5

60

59

60

60

60

WD 17.5

20X /
50

45 A WD 4.5

45

50X /

80 A WD 1.0 W.D.=1

45

100X /

90 A WD 1.0 W.D.=1

60

WD 23.5

W.D.=17.5

30 A

L.U

47.5

15A

30 10X /

L.U

47.5

45

5X /

L.U

JAPAN

JAPAN

JAPAN

Electrostatic decay time Power consumption Weight

L.U

4.5

40

4.5 3.5

4.5

2.3

30

20

17.5

8.5 17.5 21.8 24

8.8 18 21.8 24

CFI LU PLAN FLUOR BD

CFI LU Plan Fluor BD 5X
36 34 30.8 5

LV100D
Main body Baseless type (spacer insertable between arm and stand); Max. sample height 29mm, 64mm with column riser; 12V-50W brightness control transformer built in Coaxial coarse/fine focus knob, left: coarse/fine, right: fine; Stroke 30mm, coarse 14.0mm/rotation (torque adjustable, with refocusing mechanism), fine focusing 0.1mm/rotation (1mm/increments) C-N6 Nosepiece (brightfield, sextuple), L-NBD5 Nosepiece (bright/darkfield quintuple, with flare prevention), L-NU5 Nosepiece (universal quintuple, with flare prevention) 12V-50W high-intensity halogen lamp (ESD-applied); Field (centerable) and aperture diaphragms synchronized with B/D changeover; f25mm filter (NCB11, ND16, ND4) insertable; Polarizer/analyzer insertable 12V-50W high-intensity halogen lamp (ESD-applied); 120W high-intensity mercury-fiber illuminator (with brightness control, no centering necessary) mountable; Centerable field and aperture diaphragms synchronized with B/D changeover; f25mm filter (NCB11, ND16, ND4) insertable; Polarizer/analyzer/l plate insertable, excitation balancer insertable 12V-50W high-intensity halogen lamp; Field (centerable) and aperture diaphragms synchronized with B/D changeover; Filters (ND8, NCB11) insertable LV-TI3 Trinocular (erect image, F.O.V. 22/25), LV-TT2 Tilting Trinocular (erect image, F.O.V. 22/25), Y-TF Trinocular (inverted image, F.O.V 22/25), Y-TB Binocular (inverted image, F.O.V 22), C-TE Tilting Binocular (inverted image, F.O.V 22) LV-S32 3x2 Stage (stroke: 75x50 mm including glass plate) LV-S64 6x4 Stage (stroke: 150x100 mm including glass plate) CFI eyepiece series CFI60 series 1000-10V, within 0.2 sec. 1.2A/75W Approx. 9.4kg

CFI LU Plan Fluor BD 10X

36 34 30.8

CFI LU Plan Fluor BD 20X

36 34 30.8 5

CFI LU Plan Fluor BD 50X

40.4 (Over head screw) 40 35 30.8 M32x0.75 5

CFI LU Plan Fluor BD 100X

40.4 (Over head screw) 40 35 M32x0.75 30.8 5

Focusing section Nosepiece

M32x0.75

M32x0.75

M32x0.75

0.2

0.2

0.2

35

L.U

L.U

JAPAN

0.5

JAPAN

JAPAN

0.5

42

45

51

W.D.=18

55.5

5X /

54

W.D.=15

60

60

60

54

59

60

59

15A WD 18

10X /
45

JAPAN

JAPAN

30 A WD 15

L.U

6.7

WD 4.5

WD 1.0

3.95

45

35

35
W.D.=1

60

20X /

L.U

L.U

45 A

50X /

80 A

100X /

90 A WD 1.0

Episcopic illuminator LV-U EPI Episcopic illuminator LV-U EPI2

(28.4) 37

W.D.=1

25

26.2 33.5

W.D.=4.5

27.6 35.5

(28.4) 37

Diascopic illuminator

CFI L PLAN EPI CR

CFI L PLAN EPI 20XCR
35 33.5 29.5 27.5 5

CFI L PLAN EPI 50XCR

33.5 32 29 27 23.8

CFI L PLAN EPI 100XCRA

35.5 34 29.5 28.5

CFI L PLAN EPI 100XCRB

35.5 34 29.5 28.5 23.8

Eyepiece tube Stage

(0.5)

(0.5)

(0.7)

M25x0.75 5

M25x0.75-6g (0.7)

M25x0.75

5 11.7 10.8

13 14.5

14.3

(1 6 )

) (7

(1 6 )

11

13 14.3

Eyepiece Objective lens

60.3
L

49.1

58.2

5 56.1 60.2 60.2 58.7 3 6.5 15.5 60.1 13

256.5 45

21.1

0.6(CG)

0.6(CG)

JAPAN

0.3(CG)

JAPAN

0.9(CG)

(45

30

22

JAPAN

JAPAN

26 6.5 45

22

45

20X /0.45

50X / 0.70

100X / 0.35

100X / 0.35

Electrostatic decay time Power consumption Weight

6.2

31.5

27 32.5

20

W.D.=1.2

20

13 18.8 23.3 26 31.5

W.D.=3.5

W.D.=10.5

11.5 19.8 24.8

W.D.=1.1

1.8 6.4

3.1

25

14.5 19.8 24.8 27 32.5

21

System diagram
LV150LV150A
Camera Mount
Photomicrographic System FX-III Series ENG-mount CCTV Camera C-mount Zooming Adapter C-mount CCTV Adapter Zooming Lens Relay Lens 1x C-mount CCTV Camera C-mount CCTV Adapters 0.35x 0.45x C-mount Direct 0.6x CCTV Adapter 0.7x DXM1200F DS-5M DS-2M

LV100D
Eyepieces
L-W 10x ESD CFI 10x CFI CFI CFI 10xM 10xCM 12.5x C-CT CFI Centering 15x Telescope Filar Micrometer 10xN CFI UW CFI UW 10x M 10x

Camera Mount
Photomicrographic System FX-III Series ENG-mount CCTV Camera C-mount Zooming Adapter C-mount CCTV Adapter Zooming Lens Relay Lens 1x C-mount CCTV Camera C-mount CCTV Adapters 0.35x 0.45x C-mount Direct 0.6x CCTV Adapter 0.7x

DXM1200F DS-5M DS-2M

Eyepieces
L-W 10x ESD CFI 10x CFI CFI CFI 10xM 10xCM 12.5x C-CT CFI Centering 15x Telescope

Filar Micrometer 10xN CFI UW CFI UW 10x M 10x

Projection Lenses PLI 2x PLI 2.5x PLI 4x PLI 5x

ENG-mount ENG-mount CCTV Adapter Zooming Adapter ENG-mount CCTV Adapters 0.45x 0.6x Relay Lens 1x

Adapter C-mount Adapter A 0.7x

F.N.22

F.N.25

C-mount CCTV Adapter VM2.54x

Projection Lenses PLI 2x PLI 2.5x PLI 4x PLI 5x

ENG-mount ENG-mount CCTV Adapter Zooming Adapter ENG-mount CCTV Adapters 0.45x 0.6x Relay Lens 1x

Adapter C-mount Adapter A 0.7x

F.N.22

F.N.25

V-T Photo Adapter

C-mount CCTV Adapter VM4x

Epi-fluorescence Accessories
C-FL Fluorescence Filter Block L-AN Analyzer YM-PO Polarizer D-FB Excitation Light Balancer

C-mount CCTV Adapter VM2.54x

V-T Photo Adapter

C-mount CCTV Adapter VM4x

Epi-fluorescence Accessories
C-FL Fluorescence Filter Block L-AN Analyzer YM-PO Polarizer D-FB Excitation Light Balancer

O
C-mount Adapter 0.55x

P P'
LV-FLAN FL Analyzer

Q Q'
LV-PO Polarizer

D-FB

O
NCB11

P P'
LV-FLAN FL Analyzer

Q Q'
LV-PO Polarizer

D-FB

NCB Slider

NCB Slider
NCB11

LV-TV TV Tube

S
ND16

ND Slider
ND4

LV-TV TV Tube

C-mount Adapter 0.55x

S
ND16

ND Slider
ND4

IN OUT

T
LV-UVPO Polarizer

IN OUT

LV P Plate

LV P Plate

LV-UVPO Polarizer

Intermediate Modules Eyepiece Tubes

E F
LV-TI3 Trinocular Tube ESD LV-TT2 Tilting Trinocular Tube C-ER Eyelevel Riser 0.5x 2nd Objective Y-IDP Double Port (100 0 / 55 45)

Intermediate Modules Eyepiece Tubes

F
Y-TB Binocular Tube Other Eclipse series eyepiece tubes can be used. LV-TT2 Tilting Trinocular Tube C-ER Eyelevel Riser

0.5x 2nd Objective

F
Y-TB Binocular Tube Other Eclipse series eyepiece tubes can be used.

E F

E F
LV-TI3 Trinocular Tube ESD

E F

Y-IDP Double Port (100 0 / 55 45)

P
Y-IDP Double Port (100 0/0 100)

LV-UEPI Universal Epi-Illuminator

P
Y-IDP Double Port (100 0/0 100)

LV-UEPI Universal Epi-Illuminator

I
LV-UEPI2 Universal Epi-Illuminator 2

I
LV-UEPI2 Universal Epi-Illuminator 2

Q P' R

Q P' R

O
LV-CR Column Riser 35

I T Q' S
C-SP Simple Polarizing Polarizer

O
LV-CR Column Riser 35

I T Q' S

B
LV-SUB Substage

A B C I

Condensers
DF (dry) D-C Abbe C-C Achromat LWD Achromat Slide (Swing-out??) Achromat 2-100x

Surugaseiki B23-60CR

LV-SUB Substage 2

Lamphouses
LV-HL50W 12V-50W-LL Halogen Lamp LV-LH50PC Precentered Lamphouse

Stages
L-S6WH Wafer Holder L-S6PL ESD Plate LV-S32SGH Slidegalss Holder LV-S32PL ESD Plate

Lamphouses Stages
I I
12V-100W Lamp D-LH 12V-100W Precentered Lamphouse (Requires TE2 External External Power Supply)
MIN. MAX.

LV-S32SGH Slidegalss Holder

LV-S32PL ESD Plate

LV-HL50W 12V-50W-LL Halogen Lamp LV-LH50PC Precentered Lamphouse

POWER

LV-S6 6x6 Stage

LV-S64 6x4 Stage

LV-S32 3x2 Stage

100W TE2 Power Supply

LV-S64 6x4 Stage

LV-S32 3x2 Stage

POWER

I I

12V-100W Lamp D-LH 12V-100W Precentered Lamphouse (Requires TE2 External Power Supply)
POWER

MIN.

MAX.

I
C-HGF Fiber Adapter Fiber L-DIC DIC Prism

TE2-PS100W Power Supply (YM-EPI3 3-pin extension cord is required)

MIN.

MAX.

100W TE2 Power Supply

L-DIC DIC Prism

Nosepieces

A
External Power Supply Adapter

Nosepieces

A I
C-HGF Fiber Adapter

L-DIHC High Contrast DIC Prism

LV-NU5A Motorized Nosepiece

L-NU5 U5 Nosepiece LU Nosepiece Adapter M32-25

L-NBD5 DB5 Nosepiece

C-N C-N6 Nosepiece

P-N P-N5 Nosepiece

L-DIHC High Contrast DIC Prism

Adapter L-NU5 U5 Nosepiece L-NBD5 DB5 Nosepiece LU Nosepiece Adapter M32-25 C-N C-N6 Nosepiece P-N P-N5 Nosepiece

External Power Supply

LU Plan Fluor BD Objective LV-NCNT Nosepiece Controller*

LU Plan Fluor EPI Objective

C-OA 15MM Adapter DI Objective

CFI L/LU EPI P Objective

TI Objective Adapter

LU Plan Fluor BD Objective

LU Plan Fluor EPI Objective

C-OA 15MM Adapter DI Objective

CFI L/LU EPI P Objective

TI Objective Adapter

LV-NCNT Nosepiece Controller Cable 10m *Not necessary on the LV150A as the operation unit has been built into the main body.

22

23