Vacuum Valves

Ball Valves

Angle Valves

In-line Valves

Special Valves
12

Gate Valves

Valve Accessories

Contents
Introduction
Page 12-3

Ball Valves
2-Way Ball Valves 3-Way Ball Valves Page 12-4 Page 12-5

Angle Valves
Manual Pneumatic Electromagnetic Page 12-6 to 12-9 Page 12-9 to 12-17 Page 12-18 to 12-19

In-line Valves
Manual Pneumatic Electromagnetic Page 12-20 to 12-22 Page 12-22 to 12-24 Page 12-25

Special Valves
Smooth Exhaust Angle Valves Gas Shut-off Valves Overpressure Valves Vent Valves Softvent Valves High Vacuum Needle Valves UHV Gas Dosing Valves Page 12-26 to 12-27 Page 12-28 Page 12-29 Page 12-30 Page 12-31 Page 12-31 Page 12-32 to 12-33

Gate Valves
Manual Pneumatic With Special Equipment Page 12-34 to 12-35 Page 12-36 to 12-39 Page 12-40

Valve Accessories

12

Control Valves Including Assembly Kit Position Indicators Connectors Straight Connectors Baffles Compressed-air Hoses

Page 12-41 to 12-42 Page 12-43 Page 12-43 Page 12-44 to 12-45 Page 12-45 Page 12-45

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Vacuum Valves
Introduction
Vacuum valves are essential shut-off elements for any vacuum system. They are used in vacuum lines or directly at the vacuum chamber. We provide you a large selection of vacuum valves for many applications in rough, medium, high, and ultra high vacuum. In the following we give an overview of the available vacuum valves and their applications. Ball valves are particularly suitable for rough vacuum. Under certain conditions they can also be used in medium vacuum. We offer two- and three-way ball valves of brass or stainless steel. Two-way ball valves possess an in the flow direction axially bored ball, which by turning 90 opens or closes the flow passage. Actuation is realised by a handle that also serves as position indicator. Pneumatic or electric actuators are available as an option. Three-way ball valves have three ports and the ball has either an L-bore or a T-bore. Depending on the position, several connections can be combined. Angle and in-line valves are available in a number of versions of usual nominal sizes. They are proven and cost-effective shut-off elements and most valves are suitable for use in high vacuum for industrial and research and development applications. The leak rates of these valves are very low. Special attention has been directed to materials and design, with respect to the demands of vacuum technology. The range covers valves of aluminium and stainless steel. Construction with manual, pneumatic and electromagnetic variants are available. Depending on the design KF, ISO-K, QCF or CF ports are available. Usually the valves are FKM sealed. Angle valves for UHV applications are also equipped with metal seals. The valve drive is bellows-sealed using hydroformed or edge welded bellows. The description of all variants and models is beyond the scope of this introduction but we will be pleased to help you choose the optimal product for your application. Gate valves are suitable for both high and ultra high vacuum applications. They have a very small installation length with maximum conductance and are primarily used as stop valves for pumping or sluice systems. High vacuum and ultra high vacuum valves are available, depending on application. Housings and valve seats of high-vacuum valves are FKM-sealed whereas metal seals are used in valves intended for UHV applications. The drives are manually or pneumatically actuated and the linear feedthroughs are bellowssealed. New in this catalog are UHV compatible angle valves with Quick-CF connection. QCF components and the appendant clamp chains VaCFix are developed by VACOM. They enable time- and space-saving mounting and can be connected with all existing vacuum installations through adapters. Please find further information on QCF components in chapter 3 Standard Components.. In addition to the above mentioned valves we also offer a wide range of special valves. There are vent valves with manual or electromagnetic drive. Mechanical overpressure valves for rough and medium vacuum help to protect your vacuum system. Furthermore, we supply gas dosing valves and shut-off valves with manual and/or electric drive. Depending on the model, they are applicable for HV to UHV and our UHV all-metal gas dosing valves comply with the highest standards of reproducibility and precision. Soft start and soft vent valves are especially designed for use in automated systems. Using a special two-stage switch they prevent turbulence and provide the controlled evacuation or venting of the vacuum systems. Special gate valves, such as 3-position gate valves or control gate valves are available on request. At the end of the chapter you will find accessories for the installation of our valves, e. g. position indicators.

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12-3

Ball Valves
2-way ball valves, manual
Brass (nickel plated) housing
Technical data
Series Description Actuation Connection Pressure range Pressure resistance of housing Pass He leak rate Housing construction Housing material Flange material Ball seal material Drive seal material Thread seal material Operating temperature Mounting position Visual position indicator Options ZKH-M 2-way ball valve for use in rough vacuum - applicable for noncorrosive media manual with handle KF flange 1 mbar to atmosphere PN20 (without flange tube) optically free < 1.0E-7 mbar l/s one-part brass, nickel plated stainless steel PTFE FKM PTFE (fixed with glue) 20 ... 150 C any position handle - other connections on request - pneumatic and electric drives on request

Order code ZKH-16M ZKH-25M ZKH-40M ZKH-50M

Connection DN16KF DN25KF DN40KF DN50KF

H 50 72 90 98

L ca. 88 ca. 110 ca. 144 ca. 156

L2 lbl14par lbl13par lbl12par lbl11par l lbl10par lbl09par lbl08par lbl07par lbl06par bl05par 100 120 180 185

Stainless steel housing

Technical data
Series Description Actuation Connection Pressure range Pass Pressure resistance of housing He leak rate Housing construction Housing material Flange material Ball seal material Drive seal material Thread seal material Operating temperature Mounting position Visual position indicator Options ZKH-S 2-way ball valve for use in rough vacuum - applicable for noncorrosive or slightly corrosive media manual with handle KF flange 1 mbar to atmosphere optically free PN30 (without flange tube) < 1.0E-7 mbar l/s one-part stainless steel stainless steel PTFE PTFE PTFE (fixed with glue) 20 ... 150 C any position handle - other connections on request - pneumatic and electric drives on request

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Order code ZKH-16S ZKH-25S ZKH-40S ZKH-50S

Connection DN16KF DN25KF DN40KF DN50KF

H 45 55 75 86

L ca. 107 ca. 126 ca. 166 ca. 191

L2 lbl14par lbl13par lbl12par lbl11par l lbl10par lbl09par lbl08par lbl07par lbl06par bl05par 80 115 150 170

12-4

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Ball Valves
3-way ball valves, manual
Stainless steel housing
Technical data
Series Description Actuation Connection Pressure range Pressure resistance of housing He leak rate Housing construction Housing material Flange material Ball seal material Drive seal material Thread seal material Operating temperature Mounting position Visual position indicator Options DKH-S 3-way ball valve with L or T boring for use in rough vacuum - applicable for non or slightly corrosive media manual with handle, switchover possibly overlapping KF flange 1 mbar to atmosphere PN30 (without flange tube) < 1.0E-7 mbar l/s one-part stainless steel stainless steel PTFE FKM / PTFE PTFE (fixed with glue) 20 ... 150 C any position handle - other connections on request - pneumatic and electric drives on request

Order code DKH-16S DKH-25S DKH-40S DKH-50S DKH-16S-T DKH-25S-T DKH-40S-T

Connection DN16KF DN25KF DN40KF DN50KF DN16KF DN25KF DN40KF

Boring L L L L T T T

H 65 81 93 105 65 81 93 105

L 120 144 171 200 120 144 171 200

L2 160 190 250 250 160 190 250 250

T lbl14par lbl13par lbl12par lbl11par l lbl10par lbl09par lbl08par bl07par 60 72 86 100 60 72 86 100

DN50KF T DKH-50S-T Dimensions H, L, L2 and T are approximate dimensions.

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12-5

Angle Valves
Compact, manual
Aluminium housing
Technical data
Series Description Actuation Connection Pressure range He leak rate Seal drive Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Mounting position Visual position indicator Durability until first service 2AVM..-A compact and light high vacuum angle valve, aluminium - applicable for noncorrosive processes and applications manual with handwheel KF flange 1.0E-8 mbar to atmosphere < 1.0E-9 mbar l/s hydroformed bellow 2-parts, actuator removable aluminium stainless steel stanless steel FKM FKM 5 ... 150 C any within handwheel 100,000 cycles

Order code 2AVM-16KF-VV-A 2AVM-25KF-VV-A 2AVM-40KF-VV-A 2AVM-50KF-VV-A

Connection DN16KF DN25KF DN40KF DN50KF

Conductance [l/s] 5 14 45 80

H 101 114 163 180

L 38 48 66 79

SL lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par T 40 50 65 70

Stainless steel housing

Technical data
Series Description 2AVM-..-S compact high vacuum angle valve, stainless steel - for all vacuum applications - applicable for corrosive processes manual with handwheel KF flange 1.0E-8 mbar to atmosphere < 1.0E-9 mbar l/s hydroformed bellow 2-parts, actuator removable stainless steel stainless steel stanless steel FKM FKM 5 ... 150 C any within handwheel 100,000 cycles - other sealing materials on request

12

Actuation Connection Pressure range He leak rate Seal drive Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Mounting position Visual position indicator Durability until first service Option

Order code 2AVM-16KF-VV-S 2AVM-25KF-VV-S 2AVM-40KF-VV-S 2AVM-50KF-VV-S

Connection DN16KF DN25KF DN40KF DN50KF

Conductance [l/s] 5 14 45 80

H 101 114 163 180

L 38 48 66 79

SL lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par T 40 50 65 70

12-6

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Angle Valves
KF Valve, HV, manual
Aluminium or stainless steel housing
Technical data
Series Description Actuation Connection Pressure range Impermeability valve seat Impermeability housing Seal drive Housing material Housing seal material Seal valve plate material Operating temperature Mounting position Durability until first service 3AVM manual used angle valve with KF flange for HV applications manual with handwheel KF flange 1.0E-9 mbar to 3 bar < 1.0E-9 mbar l/s < 1.0E-9 mbar l/s bellow stainless steel / aluminium FKM FKM -30 ... 130 C any 50,000 cycles

Order code Aluminium 3AVM-16KF-VV-A 3AVM-25KF-VV-A 3AVM-40KF-VV-A 3AVM-50KF-VV-A Stainless steel 3AVM-16KF-VV-S 3AVM-25KF-VV-S 3AVM-40KF-VV-S -

Connection Conductance H [l/s] DN16KF DN25KF DN40KF DN50KF 5 13 40.5 72.5

SL 40 50 65 70

111 46 143 57 181 70 185 85

Standard HV, manual

Stainless steel housing
Technical data
Series Description Actuation Pressure range He leak rate Seal drive Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Mounting position Visual position indicator Durability until first service 4AVM-..-VV rugged, versatile applicable HV angle valve, stainless steel - O-ring sealed housing manual with handwheel 1.0E-8 mbar to atmosphere < 1.0E-9 mbar l/s diaphragm bellow 2-parts, actuator removable stainless steel AM350 stanless steel FKM FKM 5 ... 150 C any handwheel position 100,000 cycles

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Order code 4AVM-16KF-VV-S 4AVM-25KF-VV-S 4AVM-40KF-VV-S 4AVM-50KF-VV-S 4AVM-63ISOK-VV-S

Connection DN16KF DN25KF DN40KF DN50KF DN63ISO-K

H 142 147 199 236 292

L 57 57 76 89 102

SL lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par SL T 40 50 65 70 88

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12-7

Angle Valves
CF Standard UHV, manual
Stainless steel housing
Technical data
Series Description Actuation Pressure range Impermeability valve seat Impermeability housing Seal drive Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Bakeout temperature opened Mounting position Visual position indicator Durability until first service 4AVM-..-MV competitive, rugged and versatile applicable UHV angle valve - metal sealed housing manual with handwheel 1.0E-9 mbar to atmosphere < 1.0E-9 mbar l/s < 1.0E-10 mbar l/s diaphragm bellow 2-parts, actuator removable stainless steel AM350 stanless steel copper FKM 5 ... 150 C max. 200 C any handwheel position 100,000 cycles

Order code 4AVM-16CF-MV-S 4AVM-40CF-MV-S 4AVM-63CF-MV-S

Connection DN16CF-R DN40CF-R DN63CF-R

H 139 202 309

L 57 76 102

SL lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par SL T 38 63 105

Quick CF Valve, UHV, manual

Stainless steel housing
Technical data
Series Description Actuation Connection Pressure range Impermeability valve seat Impermeability housing Seal drive Housing material Housing seal material Seal valve plate material Bakeout temperature valve housing Bakeout temperature drive Mounting position Durability until first service 7AVM-..-QCF manual used angle valve with QCF flange for UHV applications handwheel Quick CF 1.0E-10 mbar to 5 bar 1.0E-9 mbar l/s 5.0E-10 mbar l/s bellow stainless steel metal FKM 150 C 120 C any 10,000 cycles

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Order code 7AVM-16QCF-MV-S 7AVM-40QCF-MV-S

Connection DN16QCF DN40QCF

Conductance [l/s] 5 45

HL 108.9 168.3

L 40 69

SL lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par T 38 63

12-8

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Angle Valves
All-metal, manual
Stainless steel housing
Technical data
Series Description 4AVM-..-MM all metal UHV angle valve - copper sealed housing and valve seat - for use in UHV and extreme UHV manual with hexagon key (torque wrench) CF flanges - rotatable 1.0E-11 mbar to atmosphere < 1.0E-10 mbar l/s diaphragm bellow 2-parts, actuator removable stainless steel AM350 copper replaceable copper gasket to 350 C to 300 C any position hexagon bolt gasket exchange through lateral flange

Actuation Connection Pressure range He leak rate Seal drive Housing construction Housing material Bellows material Housing seal material Seal valve plate material Bakeout temperature opened Bakeout temperature closed Mounting position Visual position indicator Note

Order code 4AVM-16CF-MM-S 4AVM-40CF-MM-S

Connection DN16CF-R DN40CF-R

H 122 170

L 38 54

SL lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par SL T 38 63

KF Valve, HV, pneumatic

Aluminium or stainless steel housing
Technical data
Series Description Actuation Connection Pressure range Impermeability valve seat Impermeability housing Seal drive Housing material Housing seal material Seal valve plate material Operating temperature Mounting position Position Indicator/ control valve Durability until first service 3APV pneumatic driven angle valve with KF flange for HV applications pneumatic NC (NO on request) KF 1.0E-8 mbar to 3 bar < 1.0E-9 mbar l/s < 1.0E-9 mbar l/s bellow stainless steel / aluminium FKM FKM -30 ... 130 C any on request 1,000,000 cycles

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Order code Aluminium 3AVP-16KF-VV-A 3AVP-25KF-VV-A 3AVP-40KF-VV-A Stainless steel 3AVP-16KF-VV-S 3AVP-25KF-VV-S 3AVP-40KF-VV-S

Connection DN16KF DN25KF DN40KF

HL

L 48 57 70

SL 40 50 65

123 152 148 177 178 207

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12-9

Angle Valves
Compact, pneumatic
Aluminium housing
Technical data
Series Description 2AVP-..-A compact and light high vacuum angle valve, aluminium, with pneumatic drive, - type 2AVP without solenoid valve - type 2AVPS1 with integrated solenoid valve pneumatic single-acting, pressureless closed KF and ISO-F flange 1.0E-8 mbar to atmosphere < 1.0E-9 mbar l/s hydroformed bellow 4 ... 7 bar 2-parts, actuator removable aluminium stainless steel stanless steel FKM FKM - type 2AVP 5 ... 60 C - type 2AVPS1 5 ... 50 C 24 V DC, 0.55 W 3 m solenoid connection cable, baffle and plug connection for hose 6 mm incl. any within drive cap prepared for mounting of electronic autoswitches from nominal width DN25 also Reed-switches 2,000,000 cycles - high temperature version to 150 C - other sealing materials - double-acting drives - other nominal widths on request - autoswitches - solenoid valves - air pressure accessories

Actuation Connection Pressure range He leak rate Seal drive Air pressure Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Power supply control valve Scope of delivery of the series 2AVPS1-...-A-P Mounting position Visual position indicator Electric position indicator Durability until first service Other options

Order code

Connection Conductance [l/s] DN16KF DN25KF DN40KF DN50KF DN63ISO-K DN16KF DN25KF DN40KF DN50KF DN63ISO-K 5 14 45 80 160 5 14 45 80 160

L2 SL 40 50 65 70 88

Air l pressure b M5 M5 Rc 1/8 Rc 1/8 Rc 1/8 M5 M5 M5 M5 Rc 1/8, M5

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2AVP-16KF-VV-A 2AVP-25KF-VV-A 2AVP-40KF-VV-A 2AVP-50KF-VV-A 2AVP-63ISOK-VV-A 2AVPS1-16KF-VV-A-P 2AVPS1-25KF-VV-A-P 2AVPS1-40KF-VV-A-P 2AVPS1-50KF-VV-A-P 2AVPS1-63ISOK-VV-A-P

103 38 113 48 158 66 170 79 196 100

103 38 16.5 40 113 48 16.5 50 158 66 17.5 65 170 79 17.5 70 196 100 29 88

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Angle Valves
Compact, pneumatic
Stainless steel housing
Technical data
Series Description 2AVP-..-S compact high vacuum angle valve, stainless steel with pneumatic drive, - type 2AVP without solenoid valve - type 2AVPS1 with integrated solenoid valve pneumatic single-acting, pressureless closed KF and ISO-F flange 1.0E-8 mbar to atmosphere < 1.0E-9 mbar l/s hydroformed bellow 4 ... 7 bar 2-parts, actuator removable stainless steel stainless steel stanless steel FKM FKM - type 2AVP 5 ... 60 C - type 2AVPS1 5 ... 50 C 24 V DC, 0.55 W 3 m solenoid connection cable, baffle and plug connection for hose 6 mm incl. any within drive cap prepared for mounting of electronic autoswitches from nominal width DN25 also Reed-switches 2,000,000 cycles - high temperature version to 150 C - other sealing materials - double-acting drives - autoswitches - solenoid valves - air pressure accessories

Actuation Connection Pressure range He leak rate Seal drive Air pressure Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Power supply control valve Scope of delivery of the series 2AVPS1-...-S-P Mounting position Visual position indicator Electric position indicator Durability until first service Other options

Order code 2AVP-16KF-VV-S 2AVP-25KF-VV-S 2AVP-40KF-VV-S 2AVP-50KF-VV-S 2AVP-63ISOK-VV-S 2AVPS1-16KF-VV-S-P 2AVPS1-25KF-VV-S-P 2AVPS1-40KF-VV-S-P 2AVPS1-50KF-VV-S-P 2AVPS1-63ISOK-VV-S-P

Connection Conductance [l/s] DN16KF DN25KF DN40KF DN50KF DN63ISO-K DN16KF DN25KF DN40KF DN50KF DN63ISO-K 5 14 45 80 160 5 14 45 80 160

L2 SL 40 50 65 70 88

Air l pressure b M5 M5 Rc 1/8 Rc 1/8 Rc 1/8 M5 M5 M5 M5 -

103 30 113 40 158 55 170 75 209 100

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103 38 16.5 40 113 48 16.5 50 158 66 17.5 65 170 79 28 70 88 196 100 29

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12-11

Angle Valves
Compact - ready for installation, pneumatic
Aluminium housing
Technical data
Series Description 2AVP-..-A-A compact and light high vacuum angle valve, aluminium - pneumatic drive - ideal for automated processes - ready for connection with solenoid valve and autoswitches incl. pneumatic single-acting, pressureless closed KF flange internal thread M5 port RJ45, 8-pin 1.0E-8 mbar to atmosphere < 1.0E-9 mbar l/s hydroformed bellow 4 ... 7 bar 2-parts, drive removable, solenoid valve and plate contact with touch-proof cover aluminium stainless steel stanless steel FKM FKM 5...50 C 24 V DC, 0.55 W any LED-red (closed)-green (open) 2 Reed-switches, 24 V DC, max. 0.2 A switched current 2,000,000 cycles

Actuation Connection Air pressure connection Electrical connection Pressure range He leak rate Seal drive Air pressure Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Power supply control valve Mounting position Visual position indicator Electric position indicator Durability until first service

Order code 2AVPS1-16KF-VV-A-A 2AVPS1-25KF-VV-A-A 2AVPS1-40KF-VV-A-A

Connection DN16KF DN25KF DN40KF

Conductance [l/s] H L AirL2 pressure lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par SL connectio 5 103 38 16.5 40 14 45 113 48 158 66 16.5 17.5 50 65

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12-12

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Angle Valves
Compact with snap closure, pneumatic
Aluminium housing
Technical data
Series Description 2AVP-..-Q high vacuum angle valve, aluminium - housing snap closure - compact and low weight - for applications with maintenance intensive processes - pneumatic and valve drive removable for cleaning and maintenance via snap closure without demounting of the valve housing pneumatic single-acting, pressureless closed KF flange 1.0E-8 mbar to atmosphere < 1.0E-9 mbar l/s hydroformed bellow 4 ... 7 bar 2-parts, drive with snap closure removable aluminium stainless steel stanless steel FKM FKM 5...60 C any within drive cap prepared for mounting of electronic autoswitches from nominal width DN25 also Reed-switches - autoswitches - solenoid valves - air pressure accessories - high temperature version to 150 C - inner surface oxalic acid oxidised - other sealing materials

Actuation Connection Pressure range He leak rate Seal drive Air pressure Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Mounting position Visual position indicator Electric position indicator Accessories on request

Other options

Order code 2AVP-16KF-VV-A-Q 2AVP-25KF-VV-A-Q 2AVP-40KF-VV-A-Q 2AVP-50KF-VV-A-Q

Connection DN16KF DN25KF DN40KF DN50KF

Conductance [l/s] 5 14 45 80

SL Air pressure A l connection b i 40 50 65 70 M5 M5 Rc 1/8 Rc 1/8

120 38 133 48 178 66 190 79

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12-13

Angle Valves
KF Standard HV, pneumatic
Stainless steel housing
Technical data
Series Description 4AVP-..-KF rugged high vacuum angle valve, stainless steel with KF flanges and pneumatic drive - versatile use - metric and imperial dimensions pneumatic single-acting, pressureless closed KF flange internal thread Rc 1/8 1.0E-8 mbar to atmosphere ISO- or ANSI standard < 1.0E-9 mbar l/s diaphragm bellow 4 ... 6.5 bar 2-parts, actuator removable stainless steel AM350 stanless steel FKM FKM 5 ... 150 C any not available 2 Reed switches (optional) 4 to 240 V AC/DC, 5 to 40 mA (temperature max. 50 C) 1,000,000 cycles - solenoid valves - air pressure accessories

Actuation Connection Air pressure connection Pressure range Blade dimensions He leak rate Seal drive Air pressure Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Mounting position Visual position indicator Electric position indicator Durability until first service Options

Order code 4AVP-16KF-VV-S 4AVP-25KF-VV-S 4AVP-40KF-VV-S 4AVP-50KF-VV-S 4AVP-16KF-VV-S-Z 4AVP-25KF-VV-S-Z

Connection DN16KF DN25KF DN40KF DN50KF DN16KF DN25KF DN40KF DN50KF DN16KF DN25KF DN40KF DN50KF DN16KF DN25KF DN40KF DN50KF

H L SL 142 57 40 149 57 199 76 246 89 157 57 150 57 118 76 262 89 158 57 164 57 214 76 251 88 172 57 166 57 210 76 263 89 50 65 70 55 52 61 86 40 50 65 70 55 52 61 86

Dimensions metric metric metric metric imperial imperial imperial imperial metric metric metric metric imperial imperial imperial imperial

Autoswitch Air pressure lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par connectio no no no no no no no no yes yes yes yes yes yes yes yes

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4AVP-40KF-VV-S-Z 4AVP-50KF-VV-S-Z 4AVP-16KF-VV-S-L 4AVP-25KF-VV-S-L 4AVP-40KF-VV-S-L 4AVP-50KF-VV-S-L 4AVP-16KF-VV-S-Z-L 4AVP-25KF-VV-S-Z-L 4AVP-40KF-VV-S-Z-L 4AVP-50KF-VV-S-Z-L

12-14

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Angle Valves
ISO-K Standard HV, pneumatic
Stainless steel housing
Technical data
Series Description 4AVP-..-ISO rugged high vacuum angle valve, stainless steel with ISO-K flanges and pneumatic drive - versatile use - metric and imperial dimensions pneumatic double-acting ISO-K flange internal thread Rc 1/8 1.0E-8 mbar to atmosphere ISO- or ANSI standard < 1.0E-9 mbar l/s diaphragm bellow 4 ... 6.5 bar 2-parts, actuator removable stainless steel AM350 stanless steel FKM FKM 5 ... 150 C any not available 2 Reed switches (optional) 4 to 240 V AC/DC, 5 to 40 mA (temperature max. 50 C) 500,000 cycles - solenoid valves - air pressure accessories

Actuation Connection Air pressure connection Pressure range Blade dimensions He leak rate Seal drive Air pressure Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Mounting position Visual position indicator Electric position indicator Durability until first service Options

Order code 4AVP-63ISOK-VV-S 4AVP-100ISOK-VV-S 4AVP-63ISOK-VV-S-Z 4AVP-100ISOK-VV-S-Z 4AVP-63ISOK-VV-S-L 4AVP-100ISOK-VV-S-L 4AVP-63ISOK-VV-S-Z-L 4AVP-100ISOK-VV-S-Z-L

Connection DN63ISO-K DN63ISO-K DN100ISO-K DN63ISO-K DN100ISO-K DN63ISO-K DN100ISO-K

H L SL Dimensions 280 102 88 metric metric imperial imperial metric metric imperial imperial 274 102 83 370 165 114 281 100 88 347 152 108 281 100 88 347 152 108

Autoswitch Air pressure lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par connectio no no no no yes yes yes yes

DN100ISO-K 364.5 165 108

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12-15

Angle Valves
Quick CF Valve, UHV, pneumatic
Stainless steel housing
Technical data
Series Description Actuation Pressure range Impermeability valve seat Impermeability housing Seal drive Housing material Housing seal material Bakeout temperature valve housing Bakeout temperature drive Mounting position Opening / closing time Position Indicator/ control valve Durability until first service 7AVP-..-QCF pneumatic driven angle valve with Quick CF flange for UHV applications pneumatic NC 1.0E-10 mbar to 5 bar 1.0E-9 mbar l/s 5.0E-10 mbar l/s bellow stainless steel metal 150 C 120 C any DN16 - 0.1 s / DN40 - 0.55 s on request 3,000,000 cycles

Order code 7AVP-16QCF-MV-S 7AVP-40QCF-MV-S

Connection DN16QCF DN40QCF

Conductance [l/s] 5 45

HL 107.8 162.9

L Autoswitch SL lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par 40 38 69 63

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Angle Valves
Standard HV, pneumatic
Stainless steel housing
Technical data
Series Description 4AVP-..-MV rugged UHV angle valve, stainless steel with pneumatic drive - versatile use - metal sealed housing pneumatic single-acting, pressureless closed CF flanges, rotatable internal thread Rc 1/8 1.0E-9 mbar to atmosphere ISO- or ANSI standard < 1.0E-9 mbar l/s < 1.0E-10 mbar l/s diaphragm bellow 4 ... 6.5 bar 2-parts, actuator removable stainless steel AM350 stanless steel copper FKM 5 ... 150 C max. 200 C any not available 2 Reed switches (optional) 4 to 240 V AC/DC, 5 to 40 mA (temperature max. 50 C) 1,000,000 cycles - solenoid valves - air pressure accessories

Actuation Connection Air pressure connection Pressure range Blade dimensions Impermeability valve seat Impermeability housing Seal drive Air pressure Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Bakeout temperature opened Mounting position Visual position indicator Electric position indicator Durability until first service Options

Order code 4AVP-16CF-MV-S 4AVP-40CF-MV-S 4AVP-16CF-MV-S-Z 4AVP-40CF-MV-S-Z 4AVP-16CF-MV-S-L 4AVP-40CF-MV-S-L 4AVP-16CF-MV-S-Z-L 4AVP-40CF-MV-S-Z-L

Connection DN16CF-R DN40CF-R DN16CF-R DN40CF-R DN16CF-R DN40CF-R DN16CF-R DN40CF-R

H L SL 140 57 38 198 76 63 166 57 196 76 156 57 212 76 181 57 212 76 64 62 38 63 64 62

Dimensions metric metric imperial imperial metric metric imperial imperial

Autoswitch lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par no no no no yes yes yes yes

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12-17

Angle Valves
Compact, electromagnetic
Aluminium housing
Technical data
Series Description 2AVE electromagnetic high vacuum angle valve, aluminium - for closure of prevacuum lines and automatic applications - integrated control electronics for coil performance - compact and competitive electromagnetic, single-acting, currentless closed KF flange DIN angle-plug 1.0E-8 mbar to atmosphere < 1.0E-9 mbar l/s hydroformed bellow 2-parts, actuator removable aluminium stainless steel stanless steel FKM FKM 5 40 C 24 V DC +/- 10 % 10/minute class B any LED (red) 500,000 cycles

Actuation Connection Electrical connection Pressure range He leak rate Seal drive Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Power supply Max. voltage fluctuation Max. switching frequency Inductor insulation Mounting position Visual position indicator Durability until first service

Nominal Conducdiameter tance [l/s] DN16KF DN25KF Order code 2AVE5-16KF-VV-A-R 2AVE5-25KF-VV-A-R Power Supply Control
Model Supply voltage Inverse-polarity protection Current draw Switching frequency Signaling

Power input [W] open 36 48 hold 5 5 Connection DN16KF DN25KF

Current input [A] open 1.5 2.0 H 110 140 H2 145 175 hold 0.2 0.2 L 38 48 Autoswitch SL lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par 40 50

5 8

12

DIN - angular connector 22...24...30 V DC, ripple smaller 2.0 V yes approximately 1.8 A fr approximately 150 ms to open approximately 0.15 A to hold max. 0.5 Hz LED bright to open (24 V at magnetic valve) LED dark to hold (6 V after 150 ms at magnetic valve) Relay control: Jumper plugged, 24 V are directly switched, for approximately 150 ms a current of 1.8 A flows through the contact, double poled circuit SPS control: jumper open, 24 V (static), the valve is switched via a control input (24 V / 3 mA)

Control Possibilites
Option 1

Option 2

12-18

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Angle Valves
KF Standard HV, electromagnetic
Aluminium or stainless steel housing
Technical data
Series Description 8AVE electromagnetic high vacuum angle valve - versatile use - versions made of aluminium or stainless steel - autoswitches incl. - high conductivity - rugged electromagnetic, single-acting, currentless closed KF flange DIN angle-plug 1.0E-9 mbar to 2.1 bar < 1.0E-9 mbar l/s hydroformed bellow 2-parts, actuator removable aluminium or stainless steel stainless steel stanless steel FKM FKM 240 V AC, 50/60 Hz 400 /h 1 bar any 2 Reed-switches, max. 24 V AC/ V DC, max. 0.25 A, max 3 W - assembled flanges - unequal flanges - pneumatic drive

Actuation Connection Electrical connection Pressure range He leak rate Seal drive Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Power supply Max. switching frequency Max. pressure difference during opening Mounting position Electric position indicator Options

Nominal Conducdiameter tance [l/s] DN16KF DN25KF DN40KF Order code 8AVE6-16KF-VV-A-L 8AVE6-25KF-VV-A-L 8AVE6-40KF-VV-A-L 8AVE6-16KF-VV-S-L 8AVE6-25KF-VV-S-L 8AVE6-40KF-VV-S-L 4 10 34

Lifetime (cycles) 500,000 130,000 130,000

Max. operating temperature [C] 45 50 50 H SL T 160 40 126 182 50 142 230 65 170 160 40 126 182 50 142 230 65 170

Power input [VA] open 417 993 1986 hold 4.7 8.6 8.6 Material aluminium aluminium aluminium stainless steel stainless steel stainless steel Autoswitch lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par

Connection DN16KF DN25KF DN40KF DN16KF DN25KF DN40KF

12

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12-19

In-line Valves
Diaphragm valve, manual
Aluminium housing
Technical data
Series Description 15DVM diaphragm valve, aluminium for use in rough and medium vacuum - simple and compact manual with handwheel KF flange 1.0E-6 mbar to atmosphere < 1.0E-7 mbar l/s FKM-diaphragm 2-parts, actuator removable aluminium 5 ... 150 C any handwheel position

Actuation Connection Pressure range He leak rate Seal drive Housing construction Housing material Operating temperature Mounting position Visual position indicator

Order code 15DVM-10KF-VV-A 15DVM-16KF-VV-A 15DVM-25KF-VV-A

Connection DN10KF DN16KF DN25KF

H 85 85 140

Autoswitch LMaterial lbl14par lbl13par lbl12par lbl11par Material lbl10par lbl09par lbl08par lbl07par 80 80 100

Butterfly valve, manual

Aluminium or stainless steel housing
Technical data
Series Description 3BVM high vacuum butterfly valve - versions of aluminium or stainless steel - O-ring sealed rotary feedthrough manual with T-handle KF flange 1.0E-8 mbar to atmosphere < 1.0E-9 mbar l/s O-rings aluminium or stainless steel FKM FKM - aluminium: 80 C - stainless steel: 150 C any T-handle position after 3,000 cycles first maintenance

12

Actuation Connection Pressure range He leak rate Seal drive Housing material Housing seal material Seal valve plate material Max. operating temperature Mounting position Visual position indicator Durability until first service

Order code 3BVM-25KF-VV-A 3BVM-40KF-VV-A 3BVM-50KF-VV-A 3BVM-25KF-VV-S 3BVM-40KF-VV-S 3BVM-50KF-VV-S

Connection DN25KF DN40KF DN50KF DN25KF DN40KF DN50KF

H 117 132 140 117 132 140

L 50 60 60 50 50 60

Material Autoswitch lbl14par lbl13par lbl12par lbl11par Material lbl10par lbl09par lbl08par lbl07par aluminium aluminium aluminium stainless steel stainless steel stainless steel

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In-line Valves
KF Valve, HV, manual
Aluminium or stainless steel housing
Technical data
Series Description Actuation Connection Pressure range Impermeability valve seat Impermeability housing Seal drive Housing material Housing seal material Seal valve plate material Operating temperature Mounting position Durability until first service 3IVM manual used gate valve with KF flange for HV applications handwheel KF 1.0E-9 mbar to 3 bar < 1.0E-9 mbar l/s < 1.0E-9 mbar l/s bellow stainless steel / aluminium FKM FKM -30 ... 130 C any 50,000 cycles

Order code Aluminium 3IVM-16KF-VV-A 3IVM-25KF-VV-A 3IVM-40KF-VV-A Stainless steel 3IVM-16KF-VV-S 3IVM-25KF-VV-S -

Connection DN16KF DN25KF DN40KF

H 111 143

L2 70 80

L 46 57 70

181 110

KF Standard-HV, manual
Stainless steel housing
Technical data
Series Description 4IVM competitive and rugged high vacuum in-line valve, stainless steel - versatile use manual with handwheel KF flange 1.0E-8 mbar to atmosphere < 1.0E-9 mbar l/s diaphragm bellow 2-parts, actuator removable stainless steel AM350 stanless steel FKM FKM 5 ... 150 C any handwheel position 100,000 cycles

Actuation Connection Pressure range He leak rate Seal drive Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Mounting position Visual position indicator Durability until first service

12

Order code 4IVM-16KF-VV-S 4IVM-25KF-VV-S 4IVM-40KF-VV-S 4IVM-50KF-VV-S

Connection DN16KF DN25KF DN40KF DN50KF

H 113 113 147 173

L 102 107 130 178

Autoswitch L2 lbl14par lbl13par lbl12par lbl11par M lbl10par lbl09par lbl08par lbl07par aterial 57 57 76 88

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12-21

In-line Valves
CF Standard UHV, manual
Stainless steel housing
Technical data
Series Description 4IVM-..-MV rugged UHV in-line valve - versatile use - metal sealed housing manual with handwheel CF flanges - rotatable 1.0E-9 mbar to atmosphere < 1.0E-9 mbar l/s < 1.0E-10 mbar l/s diaphragm bellow 2-parts, actuator removable stainless steel AM350 stanless steel copper FKM 5 ... 150 C max. 200 C any handwheel position 100,000 cycles

Actuation Connection Pressure range Impermeability valve seat Impermeability housing Seal drive Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Bakeout temperature opened Mounting position Visual position indicator Durability until first service

Order code 4IVM-16CF-MV-S 4IVM-40CF-MV-S

Connection DN16CF-R DN40CF-R

H 120 149

L 119 133

Autoswitch L2 lbl14par lbl13par lbl12par lbl11par M lbl10par lbl09par lbl08par lbl07par aterial 69 83

KF Valve, HV, pneumatic

Aluminium or stainless steel housing
Technical data
Series Description Actuation Connection Pressure range Impermeability valve seat Impermeability housing Seal drive Housing material Housing seal material Seal valve plate material Operating temperature Mounting position Position Indicator/ control valve Durability until first service 3IVP pneumatic driven gate valve with KF flange for HV applications pneumatic NC KF 1.0E-8 mbar to 3 bar < 1.0E-9 mbar l/s < 1.0E-9 mbar l/s bellow stainless steel / aluminium FKM FKM -30 ... 130 C any on request 1,000,000 cycles

12

Order code Aluminium 3IVP-16KF-VV-A 3IVP-25KF-VV-A 3IVP-40KF-VV-A Stainless steel 3IVP-16KF-VV-S 3IVP-25KF-VV-S -

Connection DN16KF DN25KF DN40KF

HL

L 48 57 65

L2 80 100 110

123 152 153 182 166 215

12-22

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In-line Valves
KF Standard-HV, pneumatic
Stainless steel housing
Technical data
Series Description 4IVP rugged high vacuum in-line valve, stainless steel with pneumatic drive - versatile use pneumatic single-acting, pressureless closed KF flange internal thread Rc 1/8 1.0E-8 mbar to atmosphere < 1.0E-9 mbar l/s diaphragm bellow 4 ... 6.5 bar 2-parts, actuator removable stainless steel AM350 stainless steel FKM FKM 5 ... 150 C any not available 2 Reed switches (optional) 4 to 240 V AC/DC, 5 to 40 mA (temperature max. 50 C) 1,000,000 cycles - solenoid valves - air pressure accessories

Actuation Connection Air pressure connection Pressure range He leak rate Seal drive Air pressure Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Mounting position Visual position indicator Electric position indicator Durability until first service Options

Order code 4IVP-16KF-VV-S 4IVP-25KF-VV-S 4IVP-40KF-VV-S 4IVP-50KF-VV-S 4IVP-16KF-VV-S-L 4IVP-25KF-VV-S-L 4IVP-40KF-VV-S-L 4IVP-50KF-VV-S-L

Connection DN16KF DN25KF DN40KF DN50KF DN16KF DN25KF DN40KF DN50KF

H 105 106 145 182 105 106 145 182

L 102 107 130 178 102 107 130 178

L2 57 57 76 88 57 57 76 88

Autoswitch Autoswitch lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par no no no no yes yes yes yes

12

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12-23

In-line Valves
Standard-UHV, pneumatic
Stainless steel housing
Technical data
Series Description 4IVP-..-MV rugged UHV in-line valve, stainless steel with pneumatic drive - optically free channel - metal sealed housing pneumatic single-acting, pressureless closed CF flanges, rotatable internal thread Rc 1/8 1.0E-9 mbar to atmosphere < 1.0E-9 mbar l/s < 1.0E-10 mbar l/s diaphragm bellow 4 ... 6.5 bar 2-parts, actuator removable stainless steel AM350 stanless steel copper FKM 5 ... 150 C max. 200 C any not available 2 Reed switches (optional) 4 to 240 V AC/DC, 5 to 40 mA (temperature max. 50 C) 1,000,000 cycles - solenoid valves - air pressure accessories

Actuation Connection Air pressure connection Pressure range Impermeability valve seat Impermeability housing Seal drive Air pressure Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Bakeout temperature opened Mounting position Visual position indicator Electric position indicator Durability until first service Options

Order code 4IVP-16CF-MV-S 4IVP-25CF-MV-S 4IVP-16CF-MV-S-L 4IVP-40CF-MV-S-L

Connection DN16CF-R DN40CF-R DN16CF-R DN40CF-R

H 105 142 105 145

L 119 133 119 133

L2 57 76 57 76

Autoswitch Autoswitch lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par no no yes yes

12

12-24

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In-line Valves
KF Standard-HV, electromagnetic
Aluminium or stainless steel housing
Technical data
Series Description 8IVE electromagnetic high vacuum in-line valve - versatile use - versions made of aluminium or stainless steel - autoswitches incl. - high conductivity - rugged electromagnetic, single-acting, currentless closed KF flange DIN angle-plug 1.0E-9 mbar to atmosphere < 1.0E-8 mbar l/s hydroformed bellow 2-parts, actuator removable aluminium or stainless steel stainless steel stanless steel FKM FKM 240 V AC, 50/60 Hz 400 /h 1 bar any 2 Reed-switches, max. 24 V AC/ V DC, max. 0.25 A, max 3 W

Actuation Connection Electrical connection Pressure range He leak rate Seal drive Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Power supply Max. switching frequency Max. pressure difference during opening Mounting position Electric position indicator

Nominal Conducdiameter tance [l/s] DN16KF DN25KF DN40KF Order code 8IVE6-16KF-VV-A-L 8IVE6-25KF-VV-A-L 8IVE6-40KF-VV-A-L 8IVE6-16KF-VV-S-L 8IVE6-25KF-VV-S-L 8IVE6-40KF-VV-S-L 4 10 34

Lifetime (cycles) 500,000 130,000 130,000

Max. operating temperature [C] 45 50 50 H L 143 80 172 100 222 130 143 80 172 100 222 130 L2 38 51 76 38 51 76

Power input [VA] open 417 993 1986 hold 4.7 8.6 8.6 Material aluminium aluminium aluminium stainless steel stainless steel stainless steel Autoswitch lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par

Connection DN16KF DN25KF DN40KF DN16KF DN25KF DN40KF

12

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12-25

Special Valves
Smooth exhaust angle valves, pneumatic
Aluminium housing
Technical data
Series Description 2AVP-..-A-S high vacuum angle valve with smooth exhaust - for evacuation of vacuum systems and chambers without turbulences - compact aluminium housing - pneumatic drive - type 2AVP without solenoid valve - type 2AVPS1 with integrated solenoid valve pneumatic, single acting, 2-parts switchable, atmospheric pressure closed KF and ISO-F flange 1.0E-7 mbar to atmosphere < 1.0E-8 mbar l/s hydroformed bellow 4 ... 7 bar 2-parts, actuator removable aluminium stainless steel stanless steel FKM FKM - type 2AVP 5 ... 60 C - type 2AVPS1 5 ... 50 C 24 V DC, 0.55 W 3 m solenoid connection cable, baffle and plug connection for hose 6 mm incl. within drive cap prepared for mounting of electronic autoswitches for position of main valve - nominal diameter DN25 to DN63 up to 2,000,000 cycles - nominal diameter DN100 to DN160 up to 1,000,000 cycles - high temperature version to 150 C (only type 2AVP) - other sealing materials - other nominal diameters on request - autoswitches - solenoid valves - air pressure accessories

Actuation Connection Pressure range He leak rate Seal drive Air pressure Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Power supply control valve Scope of delivery of the series 2AVPS1-...-SP Visual position indicator Electric position indicator Durability until first service Other options

12

Nominal diameter DN25KF DN40KF DN50KF

Detailed view

Conductance main valve [l/s] 14 45 80 160 Order code

Conductance initial valve [l/s] 0.5 - 3 2-3 2.5 - 11 4 - 18

Air pressure connection 2AVP M5 Rc 1/8 Rc 1/8 Rc 1/8 Connection DN25KF DN40KF DN50KF DN63ISO-K H 2AVPS1 M5 M5 M5 M5 L L2 SL

DN63ISO

without solenoid valve 2AVP-25KF-VV-A-S 2AVP-40KF-VV-A-S 2AVP-50KF-VV-A-S 2AVP-63ISOK-VV-A-S

with solenoid valve 2AVPS1-25KF-VV-A-SP 2AVPS1-40KF-VV-A-SP 2AVPS1-50ISOK-VV-A-SP 2AVPS1-63ISOK-VV-A-SP

123 48 11 50 170 66 12 65 183 79 12 70 217 100 13 88

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Special Valves
Smooth exhaust angle valves, pneumatic
Stainless steel housing
Technical data
Series Description 2AVP-..-S-S high vacuum angle valve with smooth exhaust - for evacuation of vacuum systems and chambers without turbulences - compact stainless steel housing - pneumatic drive pneumatic, single-acting, two-stage switchable, pressureless closed KF and ISO-F flange 1.0E-8 mbar to atmosphere < 1.0E-8 mbar l/s hydroformed bellow 4 ... 7 bar 2-parts, actuator removable stainless steel stainless steel stanless steel FKM FKM 5...60 C any within drive cap prepared for mounting of electronic autoswitches for position of main valve 2,000,000 cycles - autoswitches - solenoid valves - air pressure accessories - high temperature version to 150 C - other sealing materials

Actuation Connection Pressure range He leak rate Seal drive Air pressure Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Mounting position Visual position indicator Electric position indicator Durability until first service Accessories on request

Other options

Nominal diameter DN25KF DN40KF DN50KF DN63ISO Order code 2AVP-25KF-VV-S-S

Detailed view

Conductance main valve [l/s] 14 45 80 160

Conductance initial valve [l/s] 0.5 - 3 2-8 2.5 - 11 4 - 18 Connection DN25KF DN40KF DN50KF DN63ISO-K

Air pressure connection M5 Rc 1/8 Rc 1/8 Rc 1/8 H 123 170 183 217 L 48 66 79 100

12
Autoswitch SL lbl14par lbl13par lbl12par lbl11par Material lbl10par lbl09par lbl08par lbl07par 50 65 70 88

2AVP-40KF-VV-S-S 2AVP-50KF-VV-S-S 2AVP-63ISOK-VV-S-S

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12-27

Special Valves
Gas shut-off valves, electromagnetic
Stainless steel housing
Technical data
Series Description 2O..VE high vacuum gas shut-off valve for ventilation and inlet of process gases - metal-sealed - used for purest gas application - overpressure stable - stainless steel housing electromagnetic, single-acting, currentless closed gas bolting VCR or Swagelok DIN angle-plug to 1.0E-8 mbar < 1.0E-8 mbar l/s welded 2-parts, actuator removable stainless steel stainless steel stanless steel FKM stainless steel 5 40 C 24 V DC, 5 ... 11 W +/- 10 % 3 ... 10 bar (see table) any not available 2,000,000 cycles

Actuation Connection Electrical connection Pressure range on vacuum side He leak rate Seal drive Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve material Operating temperature Power supply Max. voltage fluctuation Max. pressure difference during opening Mounting position Visual position indicator Durability until first service

Order code 2O2VE5-14S-VM-S 2O3VE5-14S-VM-S 2O4.5VE5-14S-VM-S 2O2VE5-14V-VM-S 2O3VE5-14V-VM-S

Max. pressure difference during opening [bar] 8 10 8 8 10 8 Connection Swagelok 1/4" Swagelok 1/4" Swagelok 1/4" VCR 1/4" VCR 1/4" VCR 1/4" H 64 75.5 82 64 75.5 82

Max. inverse pressure difference [bar] 5 4 2 5 4 2 L 56 61 61 51 57 57 Inner diameter 2 3 4.5 2 3 4.5 CV A l value b u 0.17 0.33 0.6 0.17 0.33 0.6

12

2O4.5VE5-14V-VM-S Order code 2O2VE5-14S-VM-S 2O3VE5-14S-VM-S 2O4.5VE5-14S-VM-S 2O2VE5-14V-VM-S 2O3VE5-14V-VM-S 2O4.5VE5-14V-VM-S

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Special Valves
Overpressure valves, manual
Stainless steel housing
Technical data
Series Description 9SVM overpressure valve for rough and medium vacuum, stainless steel - easy handling - merely mechanical operating mode - low maintenance external thread G 1/4" approx. 0.3 bar overpressure 1.0E-6 mbar to 2 bar fixed adjusted < 3.0E-8 mbar l/s stainless steel stanless steel FKM 20 ... 150 C vertical other trigger pressures on request

Connection Trigger pressure Pressure range Adjustment He leak rate Housing material Valve plate material Seal valve plate material Operating temperature Mounting position Other options

Order code 9SVM-14GA-VV-S

Connection G 1/4"

H 65

Autoswitch L CV lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par Inner value 20

Adapters
Order code KF10GI14 KF16GI14-316 KF25GI14 VR11.5-3 Description KF-G adapter, stainless steel KF-G adapter, stainless steel KF-G adapter, stainless steel O-ring, FKM Connection Autoswitch CV lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par Inner value L DN10KF - G 1/4" DN16KF - G 1/4" DN25KF - G 1/4" -

12

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12-29

Special Valves
Vent valves, manual
Stainless steel housing
Technical data
Series Description 13VVM high vacuum venting valve, stainless steel - easy handling - low maintenance KF flange 1.0E-9 mbar to 2 bar manual with knurled screw < 1.0E-8 mbar l/s O-ring stainless steel stainless steel FKM 5 ... 150 C any

Connection Pressure range Closure principle He leak rate Seal lock Housing material Knurled nut material Seal material Operating temperature Mounting position

Order code 13VVM-16KF-VV-S 13VVM-25KF-VV-S 13VVM-40KF-VV-S

Connection DN16KF DN25KF DN40KF

Power H Drive lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par lbl06par lbl05par input dead hold 32 32 32

Vent valves, electromagnetic

Aluminium housing
Technical data
Series Description 6VVE high vacuum venting valve, aluminium with electromagnetic drive - easy mounting - for inert gas and air electromagnetic, single-acting, currentless closed or opened DN16KF flange DIN angle-plug < 1.0E-8 mbar to 1 bar < 1.0E-8 mbar l/s FKM -20 ... 80 C -10 ... 130 C 100/minute ~10 l in 12 s (Kv=0.21m/h) 30 ms class F IP65 500,000 cycles

Actuation Connection Electrical connection Pressure range He leak rate Seal valve plate material Operating temperature Media temperature Max. switching frequency Max. flow Cycle time Inductor insulation Degree of protection Durability until first service

12

Order code

Power supply 240 VAC 24 VDC 240 VAC 24 VDC

Power input activate 9.5 VA 5W 9.5 VA 5W

Power Drive dead l input hold b l 6.3 VA 5W 6.3 VA 5W closed closed open open

6VVE6-16KF-VV-A 6VVE5-16KF-VV-A 6VVE6-16KF-VV-A-NO 6VVE5-16KF-VV-A-NO

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Special Valves
Softvent valves, pneumatic
Stainless steel housing
Technical data
Series Description 2VVP-..-S-S high vacuum ventilation valve with softvent function to dose ventilation of vacuum systems and chambers, pneumatic drives, for air and inert gases single-acting, two-stage switchable, pressureless closed gas bolting 1/4" VCR or 1/4" Swagelok internal thread M5 1.0E-8 mbar to 2 bar < 1.0E-8 mbar l/s hydroformed bellow 4 ... 7 bar stainless steel, internal elctropolished stainless steel aluminium FKM stainless steel diaphragm 5...50 C 150 C 4.6 mm 0.2 to 4.6 mm 3 mm within drive cap 500,000 cycles - solenoid valves - air pressure accessories

Actuation Connection Air pressure connection Pressure range He leak rate Seal drive Air pressure Valve housing material Bellows material Drive housing material Housing seal material Seal valve plate material Operating temperature Max. bakeout temperature Eff. cross-section inlet Eff. cross-section softvent inlet Diameter inlet bore Visual position indicator Durability until first service Accessories

Order code 2VVP-14S-VM-S-S 2VVP-14V-VM-S-S

Connection Swagelok 1/4" VCR 1/4"

lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par lbl06par lbl05par SL H L

High vacuum needle valves, manual

Aluminium housing
Technical data
Series Description 8LVM needle valve for rough, medium and high vacuum - easy handling - applicable for air and inert gases manual with handwheel KF flange 1.0E-5 mbar to atmosphere < 1.0E-7 mbar l/s aluminium brass stainless steel FKM 0.1 l/s (at 1 bar pressure difference) any 100-division scale at handwheel

12

Actuation Connection Pressure range He leak rate Housing material Drive housing material Needle material Housing seal material Max. flow Mounting position Visual position indicator

Order code 8LVM-10KF-VV-A

Connection DN10KF

H 68

L 62

SL lbl14par lbl13par lbl12par lbl11par l lbl10par lbl09par lbl08par lbl07par lbl06par bl05par 30

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12-31

Special Valves
UHV gas dosing valves, manual
Stainless steel housing
Technical data
Series Description 10LVM all metal UHV gas dosing valve with diaphragm-sealed valve seat - precise and reproducible proportioning - durable and low maintenance - motor drive retrofit manual with handwheel CF flanges - rotatable, 1/4" VCR- or 1/4" Swagelok connection 1.0E-10 mbar l/s to 1 mbar l/s 1.0E-10 mbar to 10 bar < 1.0E-10 mbar l/s multipart, drive removable (not demountable) stainless steel One combined gold plated stainless steel diaphragm 1.0 ... 1.4 cm 4.6 cm to 450 C to 300 C 10 bar from each side any position handwheel, 0 ... 10 cycles 100,000 cycles - heating element with intergrated thermocouple - controller for heating element - step motor with controller (retrofit) - controllable via analog signal 0 ... 10 V DC - other connection combinations

Actuation Connection Range of control Pressure range He leak rate Housing construction Housing material Seal drive and housing Dead volume: main flange side Dead volume: lateral flange side Bakeout temperature opened Max. operating temperature Max. differential pressure Mounting position Visual position indicator Durability until first service Accessories on request Option Other options

Order code Manual drive 10LVM-16CF-MM-S 10LVM-14S-MM-S 10LVM-14V-MM-S Step motor drive 10LVS-16CF-MM-S 10LVS-14S-MM-S 10LVS-14V-MM-S

Connection 1 DN16CF-R DN40CF-R Swagelok 1/4" VCR 1/4"

Connection 2 DN16CF-R DN16CF-R Swagelok 1/4" VCR 1/4"

10LVM-4016CF-MM-S 10LVS-4016CF-MM-S

12

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Special Valves
UHV gas dosing valves, manual
Stainless steel housing
Technical data
Series Description 14LVM all metal UHV gas metering valve with sapphire sealing - precise metering - easy handling manual with handwheel CF flanges - inlet rotatable - outlet trapped 2.0E-10 ... 1 mbar l/s 1.0E-11 mbar to 1 bar < 1.0E-10 mbar l/s stainless steel diaphragm welded stainless steel copper alloy sealing elements (replaceable) sapphire sealing gasket 1.0 ... 1.4 cm 4.6 cm to 450 C 10 bar from each side any - approx. 300 cycles without baking - approx. 100 cycles at bakeout temperature 250C - approx. 20 to 30 cycles at bakeout temperature 450C

Actuation Connection Range of control Pressure range He leak rate Seal drive Housing construction Housing material Valve plate material Seal valve plate material Dead volume: main flange side Dead volume: lateral flange side Bakeout temperature Max. differential pressure Mounting position Durability until first service

Order code 14LVM-4016CF-MS-S

Connection vacuum DN40CF-F DN16CF-F *

Connection inlet DN16CF-R DN16CF-R

lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par lbl06par lbl05par H SL 109 98

14LVM-16CF-MS-S * Flange with imperial tapped holes.

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Gate Valves
Standard HV, manual
Stainless steel housing
Technical data
Series Description 5GVM-..-VV high vacuum gate valve, stainless steel - housing and valve seat O-ring sealed (replaceable) - intern and extern electropolished - rugged and durable manual with handwheel KF and ISO-F flange 1.0E-9 mbar to atmosphere < 2.0E-9 mabr l/s diaphragm bellow 2-parts, actuator removable stainless steel AM350 stanless steel FKM FKM 5 ... 150 C 25 mbar arbitrary (from DN200 onwards please specify with ordering) within handwheel 100,000 cycles - other flange standards - lateral measuring flange

Actuation Connection Pressure range He leak rate Seal drive Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Max. pressure difference during opening Mounting position Visual position indicator Durability until first service Other options

Order code 5GVM-16KF-VV-S 5GVM-40KF-VV-S 5GVM-50KF-VV-S 5GVM-63ISOF-VV-S 5GVM-100ISOF-VV-S 5GVM-160ISOF-VV-S 5GVM-200ISOF-VV-S 5GVM-250ISOF-VV-S

Connection DN16KF DN40KF DN50KF DN63ISO-F DN100ISO-F DN160ISO-F DN200ISO-F DN250ISO-F DN320ISO-F

Conductance [l/s] 13 88 317 615 2122 7140 11597 24990 43268

H 103 206 227 273 477 574 687 907 1050

L 40 51 51 52 61 60 68 80 80

lbl06par lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par T 48 84 97 90 178 222 286 344 403

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5GVM-320ISOF-VV-S

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Gate Valves
CF Standard UHV, manual
Stainless steel housing
Technical data
Series Description 5GVM-..-MV UHV gate valve, stainless steel - housing metal sealed - valve seat O-ring sealed (replaceable) - intern and extern electropolished - rugged and long-lasting manual with handwheel CF flanges - fixed, with metric threaded holes 1.0E-10 mbar to atmosphere < 2.0E-9 mabr l/s diaphragm bellow 2-parts, actuator removable, inside and outside electropolished stainless steel AM350 stanless steel copper FKM 5 ... 150 C max. 200 C 25 mbar arbitrary (from DN200 onwards please specify with ordering) within handwheel 100,000 cycles - lateral measuring flange

Actuation Connection Pressure range He leak rate Seal drive Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Bakeout temperature opened Max. pressure difference during opening Mounting position Visual position indicator Durability until first service Other options

Order code 5GVM-16CF-MV-S 5GVM-40CF-MV-S 5GVM-63CF-MV-S 5GVM-100CF-MV-S 5GVM-160CF-MV-S 5GVM-200CF-MV-S 5GVM-250CF-MV-S

Connection DN16CF-F DN40CF-F DN63CF-F DN100CF-F DN160CF-F DN200CF-F DN250CF-F

Conductance [l/s] 12 128 524 1726 5289 12006 21497

H 103 206 264 473 563 671 896

L 40 52 61 75 81 85 99

lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par lbl06par T 48 84 111 178 222 286 344

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Gate Valves
Standard-HV, pneumatic
Stainless steel housing
Technical data
Series Description 5GVP-..-VV high vacuum gate valve, stainless steel with pneumatic drive - solenoid valve and autoswitches incl. - housing and valve seat O-ring sealed (replaceable) - intern and extern electropolished - rugged and durable pneumatic double-acting KF and ISO-F flange internal thread NPT1/8 1.0E-9 mbar to atmosphere < 2.0E-9 mabr l/s diaphragm bellow 4 ... 6 bar 2-parts, actuator removable, inside and outside electropolished stainless steel AM350 stanless steel FKM FKM valve and housing 5 ... 150 C pneumatic drive to 60 C 220 VAC, 4 W 25 mbar arbitrary (from DN200 onwards please specify with ordering) not available 2 Reed-switches, to 28 V DC, to 20 mA (only for valves from DN40) 100,000 cycles - other flange standards - high temperature microswitch - differing operating voltage - lateral measurement flange

Actuation Connection Air pressure connection Pressure range He leak rate Seal drive Air pressure Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Power supply control valve Max. pressure difference during opening Mounting position Visual position indicator Electric position indicator Durability until first service Other options

Order code 5GVPS3-16KF-VV-S-L 5GVPS3-40KF-VV-S-LR

Connection DN16KF DN40KF DN50KF DN63ISO-F DN100ISO-F DN160ISO-F DN200ISO-F DN250ISO-F DN320ISO-F DN400ISO-F DN500ISO-F DN600ISO-F

Conductance [l/s] 13 88 317 615 2122 7140 11597 24990 43268 74905 132197 228856

H 109 251 272 318 456 553 666 863

L lbl06par lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par T 40 48 51 51 84 97

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5GVPS3-50KF-VV-S-LR 5GVPS3-63ISOF-VV-S-LR 5GVPS3-100ISOF-VV-S-LR 5GVPS3-160ISOF-VV-S-LR 5GVPS3-200ISOF-VV-S-LR 5GVPS3-250ISOF-VV-S-LR 5GVPS3-320ISOF-VV-S-LR 5GVPS3-400ISOF-VV-S-LR 5GVPS3-500ISOF-VV-S-LR 5GVPS3-600ISOF-VV-S-LR

52 111 61 178 60 222 68 286 80 344

1006 80 403 1247 109 503 1500 121 645 1746 121 813

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Gate Valves
CF Standard-UHV, pneumatic
Stainless steel housing
Technical data
Series Description 5GVP-..-MV UHV gate valve, stainless steel with pneumatic drive - solenoid valve and autoswitches incl. - metal sealed housing - valve seat O-ring sealed (replaceable) - intern and extern electropolished - rugged and durable pneumatic double-acting CF flanges - fixed, with metric threaded holes internal thread NPT1/8 1.0E-10 mbar to atmosphere < 2.0E-9 mabr l/s diaphragm bellow 4 ... 6 bar 2-parts, actuator removable, inside and outside electropolished stainless steel AM350 stanless steel copper FKM valve and housing 5 ... 150 C pneumatic drive to 60 C max. 200 C, with high temperature micro switches and drives 220 VAC, 4 W 25 mbar arbitrary (from DN200 onwards please specify with ordering) not available 2 Reed-switches, to 28 V DC, to 20 mA (only for valves from DN40) 100,000 cycles - other flange standards - high temperature microswitch - high temperature actuation - differing operating voltage - lateral measuring flange

Actuation Connection Air pressure connection Pressure range He leak rate Seal drive Air pressure Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Bakeout temperature opened Power supply control valve Max. pressure difference during opening Mounting position Visual position indicator Electric position indicator Durability until first service Other options

Order code 5GVPS3-16CF-MV-S 5GVPS3-40CF-MV-S-LR 5GVPS3-63CF-MV-S-LR 5GVPS3-100CF-MV-S-LR 5GVPS3-160CF-MV-S-LR 5GVPS3-200CF-MV-S-LR 5GVPS3-250CF-MV-S-LR

Connection DN16CF-F DN40CF-F DN63CF-F DN100CF-F DN160CF-F DN200CF-F DN250CF-F

Conductance [l/s] H 12 108 128 524 1726 5289 12006 21497 251 309 452 542 650 852

L 40 52 61 75 81 85 99

lbl06par lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par T 48 12 84 111 178 222 286 344

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Gate Valves
Rectangular gate valve, pneumatic
Technical data
Series Description 2RVP rectangular gate valve, aluminium, with pneumatic drive for use in semiconductor production - versions as rectangular door or with cassette housing - autoswitches incl. - high durability - lowest particle emission pneumatic double-acting - cassette housing standard - cassette housing MESC-compatible (half height) - cassette housing MESC-compatible (complete height) - rectangular door without flange 1.0E-8 mbar to atmosphere L-motion < 1.0E-8 mbar l/s < 1.0E-8 mbar l/s diaphragm bellow 4.5 ... 6 bar aluminium aluminium FKM FKM valve and housing 5 ... 150 C pneumatic drive 5 ... 60 C 40 mbar vertical not available 2 Reed switches, to 24 V DC, to 40 mA, with circular connector (6-pin) 2,000,000 cycles

Actuation Connection

Pressure range Closure principle Impermeability valve seat Impermeability housing Seal drive Air pressure Housing material Valve plate material Housing seal material Seal valve plate material Operating temperature Max. pressure difference during opening Mounting position Visual position indicator Electric position indicator Durability until first service

drawing 1

Connection: standard cassette housing

Order code 2RVP-32222RS-VV-A-LR Wafer size 200 200 300 H H2 H3 H4 L L2 L3 T T2 T l b 2 50 50 60

365 112 36 365 112 36 377 112 50

32 222 184 340 49 46 236 184 340 49 50 336 224 440 59

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2RVP-46236RS-VV-A-LR 2RVP-50336RS-VV-A-LR

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Gate Valves
Rectangular gate valve, pneumatic
Connection: half height MESC standard cassette housing
Order code 2RVP-46236RHM-VV-A-LR 2RVP-50336RHM-VV-A-LR Wafer size H H2 H3 H4 H5 L L2 L3 L4 T T2l l b

200 365 112 50 36 44 236 184 340 305 49 50 300 377 112 50 36 45 336 244 440 405 59 60

Connection: full height MESC cassette housing

Order code 2RVP-46236RM-VV-A-LR Wafer size 200 H H2 H3 H4 H5 36 L L2 L3 L4 T T2l l b

365 112 50

85 236 184 340 305 49 50

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Connection: rectangular door without flange

Order code 2RVP-32222R-VV-A-LR 2RVP-46236R-VV-A-LR 2RVP-50336R-VV-A-LR Wafer size 200 200 300 H 365 365 377 H2 112 112 97 H4 45 59 62 L 235 249 348 lbl14par lbl13par T L2 T2 L4 L3 T L 49 49 59

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Gate Valves
With special equipment
Laminar flow gate valves
Technical data These valves have a gas inlet through which an inert gas can be let into the valve to avoid a destruction of the valve mechanics while eliminating contact of the corrosive process gas.

3-position gate valves

Technical data These electropneumatic valves can be used maintenance-free up to 1,000,000 cycles (depending on application) and they can, besides the open and closed position, take any set third position. Thus, the pumping speed of the attached pump can be reduced.

Throttle gate valves

Technical data These electropneumatic valves can take each position between the open and closed status. Thus, together with pressure and flow controller, a pressure and flow regulation is possible. For these valves a maintenance-free handling up to 1,000,000 cycles (depending on application) can be warranted as well.

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Valve Accessories
Control valves including assembly kit for single-acting pneumatic valves
Technical data
Monostable. Currentless closed, opened under voltage. Pressure 4 ... 7 bar.

230 V AC, 1/8" connection

Order code KITSTV1-230-18 Constituents EVZ512M-4DO-01F K31 SD18F DN18R KQH06-U01 Description solenoid valve, monostable DIN power socket silencer for solenoid valve double nipple with external thread straight connectors for thread 6 mm Number 1 1 1 1 1

24 V DC, 1/8" connection

Order code KITSTV1-24-18 Constituents EVZ512M-5DO-01F K31 SD18F DN18R KQH06-U01 Description solenoid valve, monostable DIN power socket silencer for solenoid valve double nipple with external thread straight connectors for thread 6 mm Number 1 1 1 1 1

230 V AC, M5-connection

Order code KITSTV1-230-M5 Constituents VZ110-4DO-M5 K31 AN120-M5 M-5UN KJH06-M5 Description solenoid valve, monostable DIN power socket baffle for control valve double nipple for compressed air straight connection for compressed air Number 1 1 1 1 1

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24 V DC, M5-connection
Order code KITSTV1-24-M5 Constituents VZ110-5DO-M5 K31 AN120-M5 M-5UN KJH06-M5 Description solenoid valve, monostable DIN power socket baffle for control valve double nipple for compressed air straight connection for compressed air Number 1 1 1 1 1

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Valve Accessories
Control valves including assembly kit for double-acting pneumatic valves
Technical data
Impulse control. Position change via piloting each connection. Bistable, holds currentless the chosen position. Pressure 4 ... 7 bar.

230 V AC, 1/8" connection, bistable

Order code KITSTV22-230-18 Constituents SY5220-4YO-01F-Q K41 SD18F WA18R KQH06-U01 KQL06-U01 TU0604BU Description solenoid valve, bistable DIN socket silencer for solenoid valve angular connector with external thread straight connectors for thread 6 mm angular connector for compressed air compressed air hose, polyurethane, blue, 6 mm Number 1 2 2 1 2 1 0.2 m

24 V DC, 1/8" connection, bistable

Order code KITSTV22-24-18 Constituents SY5220-5YO-01F-Q K41 SD18F WA18R KQH06-U01 KQL06-U01 TU0604BU Description control valve bistable DIN socket silencer for solenoid valve angular connector with external thread straight connectors for thread 6 mm angular connector for compressed air compressed air hose, polyurethane, blue, 6 mm Number 1 2 2 1 2 1 0.2 m

230 V AC, M5-connection, bistable

Order code KITSTV22-230-M5 Constituents VZ3223-4DO-M5 K31 AN120-M5 M-5UN M-5UL KJH06-M5 KJL06-M5 TU0604BU Description control valve bistable DIN power socket baffle for control valve double nipple for compressed air angular connector for compressed air straight connection for compressed air angular connector for compressed air compressed air hose, polyurethane, blue, 6 mm Number 1 2 2 1 1 2 1 0.2 m

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24 V DC, M5-connection, bistable

Order code KITSTV22-24-M5 Constituents VZ3223-5DO-M5 K31 AN120-M5 M-5UN M-5UL KJH06-M5 KJL06-M5 TU0604BU Description control valve bistable DIN power socket baffle for control valve double nipple for compressed air angular connector for compressed air straight connection for compressed air angular connector for compressed air compressed air hose, polyurethane, blue, 6 mm Number 1 2 2 1 1 2 1 0.2 m

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Valve Accessories
Position indicator
Reed switch with LED, 2-pole
Order code D-A93L D-A93-M8 Connection cable M5 plug Length [m] 3 0.5

Electronic switch with LED, 2-pole

Order code D-M9BL D-M9BSAPC D-M9BL-PAAR Connection cable M5 plug cable Length [m] 3 0.5 2x3

Electronic switch with LED, 3-pole

Order code D-M9PL D-M9PSAPC D-M9PL-PAAR Connection cable M5 plug cable Length [m] 3 0.5 2x3

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Power socket with cable
For integrated control valves of series 2AVPS1 without switching
Order code SY100-30-4A-10 SY100-30-4A-20 SY100-30-4A-30 Length [m]#Fehler 1 2 3

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Valve Accessories
Straight connectors
External thread double-sided
Order code M-5UN DN18G Connection M5 G1/8 Type pivoting fixed H 10 12

R1/8 fixed 12 DN18R Screw connection with double-sided external thread as connection between internal threads.

Internal thread double-sided

Order code Connection Type H G1/8 fixed 18 MU18G Screw connection with double-sided internal thread as connection between external threads.

Internal and external thread

Order code Inner thread Outer thread H M5 R1/8 7 M-5B Screw connection with double-sided external and internal thread as connection between threads of different sizes.

Plug connection from thread to 6 mm hose

Order code M-5H6 KJH06-M5 M-01H-6 Connection M5 M5 R1/8 Type fixed fixed H 12.5 16.5

rotatable 14.7

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R1/8 rotatable 15.4 KJH06-01S* universal thread 1/8 rotatable 15.4 KQH06-U01 * Thread Teflon plated. ** gasket over gasket Straight connection between internal thread and hose (nylon, soft nylon, polyurethane) with external diameter 6 mm.

Angular connectors, pivoting

Internal and external thread
Order code M-5UL Connection M5 H 11.3 L 13

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Valve Accessories
Angular connectors, pivoting
External thread double-sided
Order code WA18R Connection R1/8 H 12 L 12

Plug connection - angular connectors from thread to 6 mm hose

Order code M-5HL6 KJL06-M5 KJL06-01S* Connection M5 M5 R1/8 H L 10.2 13.5 17.4 16.1 18.5 17.8

universal thread 1/8 23.5 20 KQL06-U01** * Thread Teflon plated. ** gasket over gasket 90 connection between inner thread and hose (nylon, soft nylon, polyurethane) with external diameter 6mm.

Silencers

Order code AN120-M5 AN110-01 AN103-01 SD18F

Connection M5 R1/8 R1/8 G1/8

Material sintered bronze sintered bronze plastics sintered bronze

Attenuation [dB] lbl13par lbl14par [A]H4 T2 L4 L3 L2 T L > 18 > 19 > 25 -

Compressed-air hose, polyurethane, sold by meter

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Order code TU0604BU

Outer diameter 6

Inner diameter 4

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