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VACUUM PUMPING METHODS

VACUUM PUMPS (METHODS) Gas Transfer Vacuum Pump Positive Displacement Vacuum Pump Reciprocating Displacement Pump Diaphragm Pump Piston Pump Multiple Vane Rotary Pump Rotary Pump Drag Pump Gaseous Ring Pump Turbine Pump Axial Flow Pump Radial Flow Pump Molecular Drag Pump Turbomolecular Pump Kinetic Vacuum Pump Fluid Entrainment Pump Ejector Pump Liquid Jet Pump Gas Jet Pump Vapor Jet Pump Diffusion Pump Diffusion Ejector Pump Ion Transfer Pump Bulk Getter Pump Getter Ion Pump Self Purifying Diffusion Pump Fractionating Diffusion Pump Entrapment Vacuum Pump Adsorption Pump Cold Trap Getter Pump Sublimation Pump Evaporation Ion Pump Sputter Ion Pump Cryopump

Liquid Ring Pump Rotary Piston Pump Sliding Vane Rotary Pump Rotary Plunger Pump

Dry Pump

Roots Pump

Condenser

Pressure Equivalents
Atmospheric Pressure (Standard) = 0 14.7 29.9 760 760 760,000 101,325 1.013 1013 gauge pressure (psig) pounds per square inch (psia) inches of mercury millimeter of mercury torr millitorr or microns pascal bar millibar

PRESSURE RANGES
RANGE ROUGH (LOW) VACUUM HIGH VACUUM ULTRA HIGH VACUUM PRESSURE 759 TO 1 x 10 -3 (mbar) 1 x 10 -3 TO 1 x 10 -8 (mbar) LESS THAN 1 x 10 -8 (mbar)

(Page 17 manual)

Viscous and Molecular Flow

Viscous Flow (momentum transfer between molecules)

Molecular Flow (molecules move independently)

FLOW REGIMES
Viscous Flow: Distance between molecules is small; collisions between molecules dominate; flow through momentum transfer; generally P greater than 0.1 mbar Transition Flow: Region between viscous and molecular flow Molecular Flow: Distance between molecules is large; collisions between molecules and wall dominate; flow through random motion; generally P smaller than 10-3 mbar

Conductance in Viscous Flow

Under viscous flow conditions doubling the pipe diameter increases the conductance sixteen times. The conductance is INVERSELY related to the pipe length
(Page 28 manual)

Viscous Flow (Long Round Tube; air)


C = 1.38 x 102 x d4 x P1 + P2 (l/sec) l 2 d l P1 P2 = = = = diameter of tube in cm length of tube in cm inlet pressure in torr exit pressure in torr

Viscous Flow (Long Round Tube; nitrogen)


EXAMPLE: d = 4 cm l = 100 cm P1 = 2 torr P2 = 1 torr

C = 138 x d4 x P1 + P2 (liter/sec) 2 l C = 138 x 256 x 3 (liter/sec) 100 2 C = 530 (liter/sec)

Conductance in Molecular Flow

Under molecular flow conditions doubling the pipe diameter increases the conductance eight times. The conductance is INVERSELY related to the pipe length.

Conductance in Molecular Flow (Long Round Tube)


C = 3.81 x d3 x l T M (l/sec)

d = diameter of tube in cm l = length of tube in cm T = temperature (K) M = A.M.U.

Conductance in Molecular Flow (Long Round Tube)


EXAMPLE:
T = 295 K (22 OC) M = 28 (nitrogen)

C = 3.81 x d3 x l

T M

(l/sec)

295 = 3.81 x d3 x 28 l = 12.36 x d3 (l/sec) l

EXAMPLE: T = 295 K (22 OC) M = 28 (nitrogen) C = 3.81 x d3 x l = 3.81 x d3 l = 12.36 x d3 l = 12.36 x 0.64 = 7.9 (l/sec) x T M 295 28 (l/sec)

d = 4 cm l = 100 cm (l/sec)

Series Conductance
RT = R1 + R2 1 = 1 + 1
CT CT C1 C2 C1 C2
PUMP SYSTEM

1 = C 1 + C2
C1 x C2 CT = C1 x C2 C 1 + C2

GAS LOAD
Outgassing Permeation Real Leaks Diffusion Virtual Backstreaming

GAS LOAD (Q) IS EXPRESSED IN: mbar liters per second

Pumpdown Curve
10+1 10-1 Pressure (mbar) 10-3 10-5 10-7 Diffusion 10-9 10-11 1 10 10 3 10 5 Permeation 10 7 10 9 10 11 10 13 10 15 10 17 Time (sec) Surface Desorption Volume

PUMP OPERATING RANGES


Ultra High Vacuum High Vacuum Rough Vacuum Rotary Vane Mechanical Pump Rotary Piston Mechanical Pump Dry Mechanical Pump Sorption Pump Blower/Booster Pump Venturi Pump High Vac. Pumps Ultra-High Vac. Pumps 10-12 10-10 10-8 10-6 10-4 P (mbar) 10-2 1 10+2

Rotary Vane, Oil-Sealed Mechanical Pump

(Page 45 manual)

Pump Mechanism

OIL BACKSTREAMING

PRESSURE LEVELS: LESS THAN 0.2 mbar

PUMP OPERATING RANGES


Ultra High Vacuum High Vacuum Rough Vacuum Roughing Pumps Liquid Nitrogen Trap Diffusion Pump Turbo Pump Cryo Pump Ion Pump Tit. Subl. Pump 10-12 10-10 10-8 10-6 10-4 P (Torr) 10-2 1 10+2

VACUUM SYSTEM USE


9 1 8 7 5 8 2 2 6 3a 3 8 1 Chamber 2 High Vac. Pump 3 Roughing Pump 3a Fore Pump 4 Hi-Vac. Valve 5 Roughing Valve 6 Foreline Valve 7 Vent Valve 8 Roughing Gauge 9 High Vac. Gauge

Oil Diffusion Pump

Pump Construction

(Page 66 manual)

How the Pump Works

How the Pump Works

Release of Vapors

(Page 67 manual)

First stage vapors are separated from others

Pumping Speed
1 Pumping Speed (Air) 2
Critical Point 1. Compression Ratio Limit 2. Constant Speed 3. Constant Q (Overload) 4. Mechanical Pump Effect

10-10

10--3 Inlet Pressure (Torr)

10--1

Maximum Tolerable Foreline Pressure

VACUUM SYSTEM USE

LN2 COLD TRAP

Turbomolecular Pump
INLET FLANGE STATOR BLADES HIGH PUMPING SPEED ROTOR BODY

HIGH COMPRESSION

BEARING EXHAUST HIGH FREQ. MOTOR BEARING

Rotor - stator assembly

Pump Operation
Molecule V

Moving Wall with Speed V Principle of the Turbomolecular Pump

Roughing through the turbo


6 1 5 2 2 7 4 1 2 3 4 5 6 Chamber Turbo Pump Roughing Pump Vent Valve Roughing Gauge High Vac. Gauge

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