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VACUUM PUMPS (METHODS) Gas Transfer Vacuum Pump Positive Displacement Vacuum Pump Reciprocating Displacement Pump Diaphragm Pump Piston Pump Multiple Vane Rotary Pump Rotary Pump Drag Pump Gaseous Ring Pump Turbine Pump Axial Flow Pump Radial Flow Pump Molecular Drag Pump Turbomolecular Pump Kinetic Vacuum Pump Fluid Entrainment Pump Ejector Pump Liquid Jet Pump Gas Jet Pump Vapor Jet Pump Diffusion Pump Diffusion Ejector Pump Ion Transfer Pump Bulk Getter Pump Getter Ion Pump Self Purifying Diffusion Pump Fractionating Diffusion Pump Entrapment Vacuum Pump Adsorption Pump Cold Trap Getter Pump Sublimation Pump Evaporation Ion Pump Sputter Ion Pump Cryopump
Liquid Ring Pump Rotary Piston Pump Sliding Vane Rotary Pump Rotary Plunger Pump
Dry Pump
Roots Pump
Condenser
Pressure Equivalents
Atmospheric Pressure (Standard) = 0 14.7 29.9 760 760 760,000 101,325 1.013 1013 gauge pressure (psig) pounds per square inch (psia) inches of mercury millimeter of mercury torr millitorr or microns pascal bar millibar
PRESSURE RANGES
RANGE ROUGH (LOW) VACUUM HIGH VACUUM ULTRA HIGH VACUUM PRESSURE 759 TO 1 x 10 -3 (mbar) 1 x 10 -3 TO 1 x 10 -8 (mbar) LESS THAN 1 x 10 -8 (mbar)
(Page 17 manual)
FLOW REGIMES
Viscous Flow: Distance between molecules is small; collisions between molecules dominate; flow through momentum transfer; generally P greater than 0.1 mbar Transition Flow: Region between viscous and molecular flow Molecular Flow: Distance between molecules is large; collisions between molecules and wall dominate; flow through random motion; generally P smaller than 10-3 mbar
Under viscous flow conditions doubling the pipe diameter increases the conductance sixteen times. The conductance is INVERSELY related to the pipe length
(Page 28 manual)
Under molecular flow conditions doubling the pipe diameter increases the conductance eight times. The conductance is INVERSELY related to the pipe length.
C = 3.81 x d3 x l
T M
(l/sec)
EXAMPLE: T = 295 K (22 OC) M = 28 (nitrogen) C = 3.81 x d3 x l = 3.81 x d3 l = 12.36 x d3 l = 12.36 x 0.64 = 7.9 (l/sec) x T M 295 28 (l/sec)
d = 4 cm l = 100 cm (l/sec)
Series Conductance
RT = R1 + R2 1 = 1 + 1
CT CT C1 C2 C1 C2
PUMP SYSTEM
1 = C 1 + C2
C1 x C2 CT = C1 x C2 C 1 + C2
GAS LOAD
Outgassing Permeation Real Leaks Diffusion Virtual Backstreaming
Pumpdown Curve
10+1 10-1 Pressure (mbar) 10-3 10-5 10-7 Diffusion 10-9 10-11 1 10 10 3 10 5 Permeation 10 7 10 9 10 11 10 13 10 15 10 17 Time (sec) Surface Desorption Volume
(Page 45 manual)
Pump Mechanism
OIL BACKSTREAMING
Pump Construction
(Page 66 manual)
Release of Vapors
(Page 67 manual)
Pumping Speed
1 Pumping Speed (Air) 2
Critical Point 1. Compression Ratio Limit 2. Constant Speed 3. Constant Q (Overload) 4. Mechanical Pump Effect
10-10
10--1
Turbomolecular Pump
INLET FLANGE STATOR BLADES HIGH PUMPING SPEED ROTOR BODY
HIGH COMPRESSION
Pump Operation
Molecule V