Unit 2 PDF

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Texas Christian University Department of Engineering Ed Kolesar
Introduction to
Microeletromechanical Systems
(MEMS)
Lecture 4 Topics
Fundamental MEMS Processes and Devices
Surface Micromachined Polysilicon Comb Drives
o Mechanics
Stress and Strain
Cantilevers
Resonance
o Electrostatics
Parallel Plate Capacitor
Pull-In Voltage
Comb Drives
MEMS Overview
Micromachining: lithography, deposition, etching,
Processes & Foundries
Devices & Structures
Methodology
History & Markets
Introduction
&
Background
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Fundamental MEMS
Processes and Devices
Example: surface micromachined polysilicon comb
drives
Mechanics for MEMS
- Stress and strain
- Cantilever beams
- Resonance
Electrostatics for MEMS
- Parallel-plate capacitors
- Pull-in voltage
- Comb drives
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Electrostatic Comb Drives
Principle: interlacing comb fingers
create large capacitor area;
electrostatically actuated
suspended microstructures (Tang,
Nguyen and Howe, 1989)
Features:
Linear relationship between
capacitance and displacement
Higher surface area / capacitance
than parallel plate capacitor
Electrostatic actuation: low power
(no DC current)
Static (Fixed) Comb
Released
(Moving) Comb
Spring
Suspensions
Electrostatic Comb Drives
Comb drives combine mechanical and electrostatic issues:
Elasticity
Stress and strain
Resonance (natural frequency)
Capacitance
Electrostatic forces
Electrostatic work and energy
Tang, Nguyen and Howe
JMEMS 1989.
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Axial Stress And Strain
Stress: force applied to surface
= F/A
measured in N/m
2
or Pa
compressive or tensile
Strain: ratio of deformation to length
= l / l
measured in %, ppm, or microstrain
A
l
F
l
wood
Al
Si
Youngs Modulus:
E = /
Hookes Law:
K = F/l = E A/l
Shear Stress And Strain
Shear Stress: force applied parallel to surface
= F/A
measured in N/m
2
or Pa
Shear Strain: ratio of deformation to length
= l / l
Shear Modulus:
G = /
A
l
F
l
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Poissons Ratio
Tensile stress in x direction results in compressive
stress in y and z direction (object becomes longer
and thinner)
Poissons Ratio:
= -
y
/
x
= - transverse strain / longitudinal strain
Metals: 0.3
Rubbers: 0.5
Cork: 0
Cantilever Beams
Axial Strain: (y) = y/
radius of curvature
Axial Stress: (y) = E (y)
Axial Force: dF = (y) w dy
Bending Moment:
M = 1/12 t
3
w E /
= E I /
I = 1/12 t
3
w
(area moment of inertia)
L
t
w
x
y
Assume that x axis lies
in center of beam
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Cantilever Beams
F(x) = F
0
M(x) = M
0
+ F(L-x)
For M
0
= 0
y(x) = F / (6EI) (3 Lx
2
- x
3
)
y(L) = FL
3
/ 3EI
Spring Constant, K
= F/y = 3EI/L
3
= Et
3
w / 4L
3
L
M
0
F
0
x
y
Assume that we apply a force F
0
and
a moment M
0
on a beam with length L
Cantilever Beams
Point Load Distributed Load
Cantilever y(x) = F/(6EI) (3 Lx
2
-x
3
) y(x) = x
2
/(24EI) (6L
2
- 4Lx + x
2
)
max
= FLt / 2I
max
= L
2
t / 4I
Bridge y(x) = Fx/(48EI) (3 Lx-4x
2
) y(x) = x
2
/(24EI) (L - x)
2
for L/2 x 0
max
= FLt / 8I
max
= L
2
t / 12I
L length of beam, t thickness of beam, w width of beam
I = wt
3
/12 bending moment of inertia
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SCS Beam
E = 100 GPa
K = Ea
3
b / 4L
3
= 0.4 N/m = 0.4 N/m
How much does beam bend
in a 1g gravity field?
m = V (assume mass at end of beam)
= 2.3 gram/cm
3
400 m
3
10
-12
kg
y 2.5 10
-11
m = 0.25
detectable!
L=100m
t=2m
x
y
w=2m
Example:
Resonators
mx + bx + Kx = F
(Newton dynamics with
damping and springs)
For b = 0:
f
0
= / 2 100 kHz
Notice: if t = 1m
f
y
= f
0
/ 2
f
z
= f
0
L = 100m
t = 2m
x
y
w = 2m
3
3
2
1
mL
w Et
m
= =
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Electrostatic Forces
Parallel Plate Capacitor:
Capacitance:
C = Q/V =
0

r
A / d
0
8.854 10
-12
F/m
dielectric constant of free space
r
dielectric permittivity
Stored energy:
W = C V
2
= Q
2
/ C
Electrostatic force between plates:
F = C/d V
2
d A
V
Electrostatic Actuation
Positioning of capacitor plate:
F
el
=
0

r
AV
2
/ x
2
F
S
= K (x - d
0
)
d
0
: distance at rest (no applied voltage)
Stable equilibrium when F
el
= -F
S
x
V
x
F
d
0
Kd
0
F
el
(V)
-F
S
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Pull-In Point
The higher V, the closer the plate
is pulled in. F
el
when d 0.
What is the closest stable
distance x
min
?
F
el
and -F
S
must be tangential:
-
0

r
A/x
3
V
2
= -K , so
V
2
= K x
3
/
0

r
A
Substitute into F
el
= -F
S
to get
x
min
= 2/3 d
0
can control x only from 2/3 d
0
to d
0
x
V
Electrostatic Comb Drive
Capacitance is approximately:
C =
0

r
A/d
= 2n
0

r
lh/d
Change in capacitance when
moving by x:
C =
0

r
A / d
= 2n
0

r
l h/d
Electrostatic force:
F
el
= V
2
dC/dx = n
0

r
h/d V
2
Note: F
el
independent of l over wide
range (fringing field), and quadratic in V.
l
w
d
V
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Electrostatic Accelerometer
Example: use MEMS comb structures as accelerometer
h = 100 m
n = 100
d = 1 m
Spring Constant: K = 1 N/m
Proof Mass: m = 0.1 mg
Acceleration: a = 0.1 g
x = 0.1 m
C = 17.7 fF
Accelerometers
SANDIAs IMEMS Process
http://www.sandia.gov/mems/
micromachine/pix/techinfo/cmos.gif
Three-axis accelerometer
micrograph with labeling
of functional units as
reported by Lemkin et al,
Proceedings ISSCC
1997.
Texas Christian University
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Gyroscopes
F. Ayazi and K. Najafi, Design and
fabrication of a high-performance
polysilicon vibrating ring gyroscope, in
Proc. IEEE Micro Electro Mechanical
Systems Workshop (MEMS 1998),
Heidelberg, Germany, February 1998,
pp. 621626.
MEMS Gyroscope
(B. Clark, R. Horowitz and R. T. Howe, 1996)
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Comb Drive Design
Combs Suspensions
Linear
Rotational
Cantilever / Bridge
Crab Leg
Comb Drive Failure Modes
Comb drives require low stiffness in x direction but high
stiffness in y, z direction as well as rotations.
Note: comb fingers are in unstable equilibrium with
respect to the y direction.
Good Poor Poor
x
y
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Comb Drive Fabrication
Surface micromachining
with 1 released
polysilicon layer
Tang, Nguyen and Howe (UC Berkeley)
This process formed
basis for many
subsequent MEMS
designs
Figure: Tang, Nguyen and Howe, 1989.
Electrostatic Actuators
Ideas
Comb drive
Rotors
Scratch drive
T-drive
Parallelogram
Zipper
DMD (torsional mirrors)
Impact actuator
Microengine
Inchworm motors (see
actin and myosin)
Issues
Force, F
Range, s
Frequency, 1/t
P = F s/t
Linearity
Efficiency
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Acceleration, velocity, distance
Force, momentum
Kinetic energy
Dynamics (spring,damper,mass)
Oscillation (assume b=0 )
Translation Rotation
2
2
1
mv E =
x v a & & & = =
Ft mv p
F
= =
x m x b Kx F & & & + + =
m K f
2
=
1
Angular acc., ang. vel., angle
Torque, angular momentum
Kinetic energy
Dynamics (moment of inertia)
Oscillation (assume =0 )

& &
& = =
Tt I p r L
F r T
= = =
=

& & &
I T + + =
I f =
2
1
2
2
1
I E =
Force generated when rotating a rotating system
Underlying principle: conservation of angular
momentum.
Torque:
Time-dependent angular velocity:
Gradient:

r r
r r
= = = I I L T ) (
Coriolis Force
=

0
sin
cos
0
) ( t
t
t
r
0
cos
sin
0
) ( t
t
t
r
= =
0
I I T
r
= =
= =
= =
0
2
1 2
2
1
0
2
0
, : disk
, : ring
/ /
: Force Coriolis
mv F mr I
mv F mr I
r I r T F
c
c
c

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