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Nozzle diameter: 0.5, 0.7, 1.0, 1.3, 1.5, 1.8, 2.0 Type S: Standard type L: Large flow type
ZK2 ZQ ZR ZA ZX
The nozzle and the body, which have been made into a composite resin construction, are compact and lightweight. Nozzle diameter 0.528 g
ZM ZMA ZL ZH ZU
ZYY ZYX
VAC
<Silencer exhaust>
<Centralized exhaust>
Mounting hole
1039
Series ZH
RoHS
How to Order
Note Refer to Table (1) and (2) for the combination available for SUP, VAC and EXH port connection.
ZH 07 B S ZH 07 D S
0.5 0.7 1.0 1.3 1.5 1.8 2.0
06 01
06 01 01
EXH. port size Note)
Symbol 06 08 10 12 16 01 02 03 04 F01 F02 F03 F04 Size 6 8 10 12 16 Rc 1 8 Rc 1 4 Rc 3 8 Rc 1 2 G 18 G 14 G 38 G 12 Style One-touch One-touch One-touch One-touch One-touch Screw-in Screw-in Screw-in Screw-in Screw-in Screw-in Screw-in Screw-in
Nozzle diameter
05 07 10 13 15 18 20
Note) Do not make the piping diameter smaller, such as by connecting a reducer to the exhaust port, etc., since it may lower the performance.
The thread ridge shape is conforming to G thread standard (JIS B 0202), but other shapes are not conforming to ISO16030 and ISO1179.
6, Rc 1 8 6, Rc 1 8 6, Rc 1 8 G1 8 G18 G 18 6, Rc 1 8 6, Rc 1 8 8, Rc 1 8 1 1 G 8 G 8 G 18 8, Rc 1 8 10, Rc 1 4 10, Rc 1 4 G1 8 G14 G 14 10, Rc 1 4 3 1 G 4 12, Rc 8 12, Rc 3 8 G38 G 38 12, Rc 3 8 G38 12, Rc 3 8 16, Rc 1 2 16, Rc 1 2 G38 G12 G 12
1040
Series
ZH
Ejector Symbol
ZHB
ZK2 ZQ ZR ZA ZX ZM ZMA ZL ZH ZU
ZYY ZYX
Model
Model ZH05B ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D Nozzle diameter (mm) 0.5 0.7 1.0 1.3 0.5 0.7 1.0 1.3 1.5 1.8 2.0 Body ported type (Without silencer) Body ported type (Without silencer) Body type
ZHD
Max. vacuum pressure Maximum suction flow rate Air consumption (kPa) (L/min (ANR)) (L /min (ANR))
Type L
88
48
Type S 5 12 24 40 5 12
Connection (One-touch/Screw-in) SUP VAC EXH 6, Rc 1 8 G18 8, Rc 1 8 G18 6, Rc 1 8 G18 6, Rc 1 8 G18 8, Rc 1 8 G18 10, Rc 1 4 G1 4 12, Rc 3 8 G38 6, Rc 1 8 G18 10, Rc 1 4 G14 6, Rc 1 8 G18 6, Rc 1 8 G18 6, Rc 1 8 G18 8, Rc 1 8 G18
Weight (g) 28 28 33 66 11 12 16 27 43 55 95
88
48
24 40 55
88
53
65 85
Fiuid: Air, Operating temperature: 5 to 50 C, Max. operating pressure: 0.6 MPa. Standard supply pressure: 0.45 MPa
Precautions
Be sure to read before handling.
Refer to front matter 35 for Safety Instructions and pages 899 to 901 for Vacuum Equipment Precautions.
Caution
Mounting
Make sure that an excessive amount of load or moment is not applied to the ejector body due to pipe connections or installation.
Exhaust piping
On the ZHB models, keep exhaust ports open on at least one side. Make sure that the back pressure of the exhaust pipe on the ZHD models is 0.005 MPa or less. (Reference: Using tubing with an applicable diameter, its length must be 0.5 m or less.) (Port indication: P: supply port; V: vacuum port; E: exhaust port.)
1041
Series ZH
Exhaust Characteristics/Flow Characteristics
ZH05S
Exhaust Characteristics
Vacuum pressure Suction flow rate (L/min (ANR)) Air consumption (L/min (ANR)) Suction flow rate (L/min (ANR)) Air consumption (L/min (ANR)) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure Vacuum pressure (kPa) Suction flow rate (L/min (ANR))
ZH05L
Flow Characteristics Exhaust Characteristics Flow Characteristics
Air consumption
Air consumption
ZH07S
Exhaust Characteristics
Vacuum pressure Suction flow rate (L/min (ANR)) Air consumption (L/min (ANR))
ZH07L
Flow Characteristics Exhaust Characteristics
Vacuum pressure Air consumption Suction flow rate (L/min (ANR)) Air consumption (L/min (ANR))
Flow Characteristics
ZH10S
Exhaust Characteristics
Vacuum pressure Suction flow rate (L/min (ANR)) Air consumption (L/min (ANR))
ZH10L
Flow Characteristics Exhaust Characteristics Flow Characteristics
Air consumption
ZH13S
Exhaust Characteristics
Vacuum pressure Suction flow rate (L/min (ANR)) Air consumption (L/min (ANR))
ZH13L
Flow Characteristics Exhaust Characteristics Flow Characteristics
Air consumption
Air consumption
1042
Series
ZH
ZH15L
Flow Characteristics Exhaust Characteristics
Suction flow rate (L/min (ANR)) Air consumption (L/min (ANR))
Flow Characteristics
ZK2 ZQ ZR ZA ZX ZM ZMA ZL ZH ZU
ZYY ZYX
ZH18S
Exhaust Characteristics
Vacuum pressure
Suction flow rate (L/min (ANR)) Air consumption (L/min (ANR)) Vacuum pressure (kPa) Vacuum pressure (kPa)
ZH18L
Flow Characteristics Exhaust Characteristics
Suction flow rate (L/min (ANR)) Air consumption (L/min (ANR))
Flow Characteristics
Vacuum pressure
Vacuum pressure (kPa)
Air consumption
Air consumption
ZH20S
Exhaust Characteristics
Vacuum pressure
Suction flow rate (L/min (ANR)) Air consumption (L/min (ANR)) Vacuum pressure (kPa) Vacuum pressure (kPa)
ZH20L
Flow Characteristics Exhaust Characteristics
Suction flow rate (L/min (ANR)) Air consumption (L/min (ANR))
Flow Characteristics
Air consumption
Air consumption
Vacuum pressure
Vacuum pressure
1043
Series ZH
Box Type (Built-in silencer): ZHBS L--
One-touch connection
Applicable tubing diameter B 2 x K (Mounting hole)
Model ZH05BS-06-06 ZH05BL-06-06 ZH07BS-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 Model ZH05BS-06-06 ZH05BL-06-06 ZH07BS-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10
A 60
B 6
C 22
D 16
E 16.8
F 28
G 5
H 47
63 78 I 57
6 8 J
23 27.5 K
18 23 L 24
16.8 18.7 M 6
29 35 N 5.8
5 7 O 2
50 61 P 31
16.8 3.2
60 75
26 28
6 10
5.8 7.5
2 3
32 38.5
Model ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 ZH05BS-06-F01 ZH05BL-06-F01 ZH07BS-06-F01 ZH07BL-06-F01 ZH10BS-06-F01 ZH10BL-06-F01 ZH13BS-08-F02 ZH13BL-08-F02 Model ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 ZH05BS-06-F01 ZH05BL-06-F01 ZH07BS-06-F01 ZH07BL-06-F01 ZH10BS-06-F01 ZH10BL-06-F01 ZH13BS-08-F02 ZH13BL-08-F02
A 60
B 6
C 29.5
D 16
E 16.8
F 28
G 5
H 47
63 78
6 8
30.5 39
18 23
16.8 18.7
29 35
5 7
50 61
60
29.5
16
16.8
28
47
63 78 I 57
6 8 J 12
30.5 39 K 3.2
18 23 L
16.8 18.7 M
29 35 N
5 7 O 2
50 61 P 38.5
24 Rc 1 8 5.8
60 75
12 17
3.2 4.2
26 Rc 1 8 5.8 28 Rc 1 4 7.5
2 3
39.5 49.5
57
12
3.2
24
G 1 8 5.8
38.5
60 75
12 17
3.2 4.2
26 28
G 1 8 5.8 G 1 4 7.5
2 3
39.5 50
1044
Series
ZH
Model ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 ZH05BS-F01-F01 ZH05BL-F01-F01 ZH07BS-F01-F01 ZH07BL-F01-F01 ZH10BS-F01-F01 ZH10BL-F01-F01 ZH13BS-F01-F02 ZH13BL-F01-F02 Model ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 ZH05BS-F01-F01 ZH05BL-F01-F01 ZH07BS-F01-F01 ZH07BL-F01-F01 ZH10BS-F01-F01 ZH10BL-F01-F01 ZH13BS-F01-F02 ZH13BL-F01-F02
D 16
E 12
F 28
G 5
H 47
ZK2 ZQ ZR ZA ZX ZM ZMA ZL ZH ZU
ZYY ZYX
67.5 Rc 1 8 29.5
18 23
12 14
29 35
5 7
50 61
67.5 G 1 8 29.5
16
12
28
47
18 23 L
12 14 M
29 35 N
5 7 O 2
50 61 P 38.5
60 75
12 17
2 3
39.5 49.5
57
12
38.5
60 75
12 17
2 3
39.5 50
1045
Series ZH
S Body Ported Type (Without silencer): ZH05D S L ---, ZH15D L ---
One-touch connection
S type: White color L type: Black color Applicable tubing diameter E Applicable tubing diameter N
Model ZH05DS-06-06-06 ZH05DL-06-06-06 ZH07DS-06-06-06 ZH07DL-06-06-06 ZH10DS-06-06-08 ZH10DL-06-06-08 ZH13DS-08-10-10 ZH13DL-08-10-10 ZH15DS-10-12-12 ZH15DL-10-12-12 Model ZH05DS-06-06-06 ZH05DL-06-06-06 ZH07DS-06-06-06 ZH07DL-06-06-06 ZH10DS-06-06-08 ZH10DL-06-06-08 ZH13DS-08-10-10 ZH13DL-08-10-10 ZH15DS-10-12-12 ZH15DL-10-12-12 Model ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 ZH05DS-06-F01-06 ZH05DL-06-F01-06 ZH07DS-06-F01-06 ZH07DL-06-F01-06 ZH10DS-06-F01-08 ZH10DL-06-F01-08 ZH13DS-08-F02-10 ZH13DL-08-F02-10 ZH15DS-10-F03-12 ZH15DL-10-F03-12 Model ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 ZH05DS-06-F01-06 ZH05DL-06-F01-06 ZH07DS-06-F01-06 ZH07DL-06-F01-06 ZH10DS-06-F01-08 ZH10DL-06-F01-08 ZH13DS-08-F02-10 ZH13DL-08-F02-10 ZH15DS-10-F03-12 ZH15DL-10-F03-12
A 58.5
B 14.2
C 34
D 22
E 6
61 66 17.2 37 23 70 74.5 20 42.5 27.5 79.5 93.3 22.5 I 16.8 J 6 47 K 24 22 18.7 21.6 21.6 6 10 12 26 28 24.5 9.6 27 10.7 12 8 10 12 20 22 27 28 30 35 29.5 L 21 7.8 6 17 24 6 8 10 M 16.8 4.2 16.8 18.7 4.2 21.6 21.6 4.2 21.8 N O P
31.5 32.8
A 58.5
E 6
H 12
14.2 41.5 29.5 61 66 17.2 44.5 30.5 70 74.5 20 53.5 39 79.5 93.3 22.5 58.5 58.5 14.2 41.5 29.5 61 66 17.2 44.5 30.5 70 74.5 20 54 39 79.5 93.3 22.5 58.5 I J K 41 L 21 16.8 Rc 1 8 24 22 18.7 Rc 1 8 26 21.6 Rc 1 4 28 41
16.8 3.2
6 8 10
12 17 19
2 x G (Mounting hole)
16.8 3.2
12
6 8 10 M 7.8
12 17 19 P 24
8 10 12
20 22 27
28 30 35
7.8
17
24
8 10 12
20 22 27
28 30 35
1046
Series
ZH
Screw-in connection
S type: White color L type: Black color
2 x G (Mounting hole)
Model ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 ZH05DS-F01-F01-F01 ZH05DL-F01-F01-F01 ZH07DS-F01-F01-F01 ZH07DL-F01-F01-F01 ZH10DS-F01-F01-F01 ZH10DL-F01-F01-F01 ZH13DS-F01-F02-F02 ZH13DL-F01-F02-F02 ZH15DS-F02-F03-F03 ZH15DL-F02-F03-F03 Model ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 ZH05DS-F01-F01-F01 ZH05DL-F01-F01-F01 ZH07DS-F01-F01-F01 ZH07DL-F01-F01-F01 ZH10DS-F01-F01-F01 ZH10DL-F01-F01-F01 ZH13DS-F01-F02-F02 ZH13DL-F01-F02-F02 ZH15DS-F02-F03-F03 ZH15DL-F02-F03-F03
A 73.5
G 3.2
H 12
14.2 41.5 29.5 Rc 1 8 12 76 82 17.2 44.5 30.5 Rc 1 8 12 86 94.5 20 53.5 39 Rc 1 8 14 98.8 116.5 22.5 58.5 73.5 14.2 41.5 29.5 G 1 8 12 76 82 17.2 44.5 30.5 G 1 8 12 86 94.5 20 54 39 G 1 8 14 99.5 116.5 22.5 58.5 I J K 41 G 1 4 17 L 28.5 12 Rc 1 8 31.5 29.5 14 Rc 1 8 33.5 33 M N 41 Rc 1 4 17
ZK2
4.2 4.2 4.2 12 17 19
ZQ ZR ZA ZX ZM ZMA ZL ZH ZU
ZYY ZYX
3.2
12
12 17 19 P 24
7.8 Rc 1 8 17
9.6 Rc 1 8 20
28 30 35
17 Rc 1 4 36.5 38.5 10.7 Rc 1 4 22 19 Rc 3 8 43 44.5 28.5 12 G 1 8 31.5 29.5 14 G 1 8 33.5 33 9.6 G 1 8 20 7.8 G 1 8 17 12 Rc 3 8 27
24
28 30 35
1047
Series ZH
S Body Ported Type (Without silencer): ZH18D S L---, ZH20D L---
One-touch connection
S type: White color L type: Black color Applicable tubing diameter E Applicable tubing diameter N
Model A B ZH18DS-12-12-12 114 21 ZH18DL-12-12-12 ZH20DS-12-16-16 124.6 26.8 ZH20DL-12-16-16 Model I ZH18DS-12-12-12 21.8 ZH18DL-12-12-12 ZH20DS-12-16-16 24.2 ZH20DL-12-16-16 J 12 16
C 41 46 K 35.5 38.5
30.5 12 21.8 3.5 21.8 32.7 12 21.8 3.5 24.2 L 50 54.3 M 17 21.7 N 12 16 O 10 12
2 x G (Mounting hole)
Model ZH18DS-12-03-12 ZH18DL-12-03-12 ZH20DS-12-04-16 ZH20DL-12-04-16 ZH18DS-12-F03-12 ZH18DL-12-F03-12 ZH20DS-12-F04-16 ZH20DL-12-F04-16 Model ZH18DS-12-03-12 ZH18DL-12-03-12 ZH20DS-12-04-16 ZH20DL-12-04-16 ZH18DS-12-F03-12 ZH18DL-12-F03-12 ZH20DS-12-F04-16 ZH20DL-12-F04-16
A 110
B 21
C 52.5 61 52.5 67 K
D 42
H 19 24 19 24 O 10 12 10 12
12 21.8 3.5
124.6 26.8 I J
Screw-in connection
S type: White color L type: Black color
2 x G (Mounting hole)
Model ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 ZH18DS-F03-F03-F03 ZH18DL-F03-F03-F03 ZH20DS-F03-F04-F04 ZH20DL-F03-F04-F04 Model ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 ZH18DS-F03-F03-F03 ZH18DL-F03-F03-F03 ZH20DS-F03-F04-F04 ZH20DL-F03-F04-F04
A 137
B 21
C 52.5 61 52.5 67 K 47 50 47 50
H 19 24 19 24 O 10 12 10 12
42 Rc 3 8 19 47.7 Rc 3 8 19 42 G
38
19
157.1 26.8 I J
19 Rc 3 8 24 Rc 1 2 19 24 G 38 G
12
17 Rc 3 8 22 Rc 1 2 17 22 G 38 G
12
1048
Series
ZH
Basic Type
EXH
Caution
Handling of application circuits 1. Countermeasures for power outages
ZK2 ZQ ZR ZA ZX ZM ZMA ZL ZH ZU
ZYY ZYX
SUP VAC
Select a supply valve for the ejector that is normally open or one that is equipped with a self-holding function. For picking electronic parts or small precision parts, if the picking nozzle is approximately 1 mm in diameter, the vacuum remains high by being restricted by the nozzle. As a result, it will not be possible to verify it with the vacuum switch. In such a case, it is necessary to use an ejector that is suited to the nozzle and to select a vacuum switch with a favorable hysteresis and precision.
If a workpiece is made of porous material or if there is air leakage from the area between the pad and the workpiece, use a nozzle with a large diameter and a large suction flow volume. If the amount of leakage is known based on the effective sectional area of the side with the leakage, the vacuum pressure can be estimated in accordance with the ejectors flow volume characteristics. To protect the ejectors and valves from dust, the use of a suction filter (Series ZFA, ZFB, ZFC) is recommended. It is recommended that verification be made with a vacuum switch as much as possible. To serve as a vacuum release valve, use a 2 port or 3 port valve. As for the performance of the valve, select a valve for a low vacuum. In addition, add a needle valve that can regulate the flow volume of the vacuum releasing air. Use the atmospheric pressure or a positive pressure for the vacuum releasing pressure. For common exhaust as shown below, use an exhaust pipe big enough to prevent exhaust resistance.
Exhaust pipe with enough capability
4. Suction filter
7. Common exhaust
Exhaust
1049