HIGH PURITY GASES AND CHEMICALS FOR THE SEMICONDUCTOR INDUSTRY

SULFUR HEXAFLUORIDE

Schwefelhexafluorid

SF6
SF6 is used by the Semiconductor industry for plasma etching prior to Chemical Vapor Deposition (CVD). These processes include Oxide etching, Nitride etching and wafer cleaning. SF6 gas, which is itself inert, dissociates in the presence of an RF field to form reactive Fluoride ions. These highly reactive ions are excellent for etching Tungsten and Tungsten Silicide films. SF6 is a colorless odorless, non flammable and non toxic gas in normal atmospheric conditions. It is shipped as a liquefied gas under its own vapor pressure. Air Liquide Electronics has developed innovative and customized solutions : Working with worldwide suppliers, Providing technical supports and high quality analysis, Ensuring quality all along the supply chain.

Hazards Identification and Labelling

- Liquefied gas - In high concentrations may cause asphyxiation ADR Cylinder labelling European Classification Not classified as dangerous substance

Physical and Chemical Properties

Physical Property Molecular weight Boiling Point Relative gas density, (air=1) Relative liquid density, (H2O=1) Vapor pressure @ 20C Unit 146 g/mol - 64C 5 1.4 21 Bar

Stability and Compatibility First Aid Measures

In case of inhalation: remove victim to uncontaminated area wearing self contained breathing apparatus. Keep victim warm and rested. Call a doctor. Apply artificial respiration if breathing stopped. In case of skin/eye contact: Flush eyes thoroughly with water for at least 15 minutes. Obtain medical assistance.

Toxicological Properties Ecological Information

Not known toxicological effects from this product. No known ecological damage caused by this product

Stable under normal conditions. Avoid elevated temperatures (the presence of certain metals may promote catalytic decomposition of the gas). Under action of heat, SF6 is decomposed by hydrogen sulfide with the formation of hydrofluoric acid. Metals Compatible with all current metals at normal operating temperatures. Avoid alloys containing greater than 2% of magnesium in the presence of water. Other materials Compatible with PTFE, FKM and EPDM. Precautions have to be taken with PCTFE (risk of swelling).

SF6 - Version 1

HICH PURITY GASES AND CHEMICALS FOR THE SEMICONDUCTOR INDUSTRY

SULFUR HEXAFLUORIDE

Schwefelhexafluorid

SF6
Product Specifications
Impurity

SF6 Nominal Purity N50

Specifications < 8 ppmV < 2 ppmV < 0.5 ppmV < 5 ppmV < 0.1 ppmV < 10 ppmV < 1 ppmV < 0.01 ppmw Analysis GC GC GC Hygrometer Titration GC GC ICP-MS

Package
Cylinder Material Size (cm) Water Capacity Tare Weight Load B20 B50 Carbon Steel Carbon Steel 20.4 x 82 22.9 x 150 20.6 L 50.6 L 30.2 kg 20 Kg 65 kg 50 kg

Air Liquide Assistance for Safety and Handling

N2 O2 CO, CO2 H2O Acidity CF4 THC Ca, Pb, Co, Zn, Cr, Cu, Fe, Mn, Na, Ni Shelf Life 3 years GC: Gas Chromatograph ICP-MS: Inductively Coupled Plasma Mass Spectroscopy * Please contact us for the latest information

Valves

Technology Diaphragm Body 316L SS / Brass Seat disc PCTFE Diaphragm Hastelloy / Brass Valve Outlet NF C / DINC 6 * Other sizes and packages are also available.

NEVER USE THIS PRODUCT WITHOUT REVIEWING THE MATERIAL SAFETY DATA SHEET (MSDS) INFORMATION.

Air Liquide is committed to product stewardship the safe handling of our products all along the chain. This includes the following safety services and capabilities for our customers: Emergency Response Team resources for onsite emergency assistance. Fully automated gas cabinets / liquid dispensers with hazardous leak detectors. Onsite hazardous material handling and safety training. Assistance in design / layout / implementation of onsite storage facility.

Global Technical Expertise

Air Liquide Electronics is globally committed to the technical development and support of process applications for high quality products. Air Liquide brings experience and leading edge expertise in the handling and supply of electronics products around the globe. By providing a comprehensive array of world-wide technical developments and services for specialty gas process applications, Air Liquide is constantly strengthening its position as the premier global partner to the semiconductor industry.

Shipping Information
UN N Class 1080 ADR/RID 2,2A (road) IATA (air) 2 IMDG (sea) 2.2

Subsidiary Risk -

Label / Transport information Label2 : Non flammable non toxic gas FS: 2.09

References

With passengers, 75 kgmax/pack. No passenger, max: 150 kg/ pack.

Gas encyclopedia Air Liquide Material Safety Data Sheet Nr 110

GSMU: 620

Product Supply and Ordering Information

Product is shipped from our various German stockpoints, which are dedicated to supplying high purity products for electronics applications. For customer service and additional information, please call :

Air Liquide GmbH - ELECTRONICS Phone: (int + 49) (0)211- 66 99 - 0 Fax: (int + 49) (0)211- 66 99 - 333 Internet : www.airliquide.de

The information contained in this technical data sheet is not contractual, and in particular implies no guarantee on our part with respect to the product use or use methods, which are users sole responsibility. Users must in particular make sure they are not infringing any existing patent.

ELECTRONICS

SF6. - Version 1