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Vacuum Systems
COV
Vacuum Heat Treatment for Epitaxy Susceptor Cleaning
Our COV furnaces are graphite-heated systems, designed for heat treatment in vacuum. We provide a wide variety of design, usable space, vacuum level, working temperature and gas treatment. Thanks to this, COV furnaces are particularly suitable for a gentle but efficient cleaning of graphite materials with or without SiC-coating. This treatment preserves the high quality level of MOVPE susceptors and enhances their lifetimes, while circulating through your production steps.
MOVPE
Furnace type: Usable volume (approx.): Usable dimensions (WxHxL): Max. charge load (approx.): Max. temperature: Temp. homogeneity:
Furnace type: Usable volume (approx.): Usable dimensions (xH): Max. charge load (approx.): Max. temperature: Temp. homogeneity:
Furnace type: Usable volume (approx.): Usable dimensions (xH): Max. charge load (approx.): Max. temperature: Temp. homogeneity:
110-3 mbar p 1050 mbar (0.1 Pa p 105 kPa). N2, Ar, CH4, H2, HCl, R12, R134a
Other dimensions, temperature- and pressure limits can be designed upon request.
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