Instruments Company

Nikon Industrial Instruments and Applications

CONFIDENTIAL
Nikon Corporation Instruments Company
November 2013
2
NIKON CORPORATION
Instruments Company
Prologue(1)
CONFIDENTIAL
3
NIKON CORPORATION
Instruments Company
CONFIDENTIAL
Camera is not the whole product of Nikon
Prologue(2)
4
NIKON CORPORATION
Instruments Company
CONFIDENTIAL
Nikon contributes to the advancement of society
on the basis of Optical and Precise Technology
Prologue(3)
5
NIKON CORPORATION
Instruments Company
Nikon Industrial Instruments and applications
1. Introduction of Nikon Corporation
2. Industrial Instruments business
3. Microscope lineup for the industrial field and
application
4. Measuring Instruments lineup and application
CONFIDENTIAL
Contents
Instruments Company
1. Introduction of Nikon Corporation
CONFIDENTIAL
7
NIKON CORPORATION
Instruments Company
CONFIDENTIAL
Nikon contributes to the advancement of society
on the basis of Optical and Precise Technology
Introduction of Nikon Corporation(1)
8
NIKON CORPORATION
Instruments Company
CONFIDENTIAL
Optical and Precise
Technology
Imaging business
Instruments
business
Precision Equipment
business
Introduction of Nikon Corporation(2)
9
NIKON CORPORATION
Instruments Company
CONFIDENTIAL
Optical and Precise
Technology
Imaging business
Instruments
Company
Precision Equipment
Company
Digital Camera
Film Camera
Interchangeable lens
Speedlight
Film Scanner
Photographic accessories
Software
Introduction of Nikon Corporation(3)
10
NIKON CORPORATION
Instruments Company
CONFIDENTIAL
Optical and Precise
Technology
Imaging Company
Instruments
Company
Precision Equipment
business
IC Stepper and Scanner
LCD Stepper and Scanner
Introduction of Nikon Corporation(4)
11
NIKON CORPORATION
Instruments Company
CONFIDENTIAL
Optical and Precise
Technology
Imaging business
Instruments
business
Precision Equipment
business
Industrial Microscope
Stereoscopic Microscope
Digital Microscope
Measuring Instruments
3D Metrology Solution
SEMI Inspection Equipment
Biological Microscope
Introduction of Nikon Corporation(5)
12
NIKON CORPORATION
Instruments Company
Others
CONFIDENTIAL
Introduction of Nikon Corporation(6)
Binoculars Surveying Instruments Glasses
Photonics materials Customized telescopes
Instruments Company
2. Industrial Instruments business
CONFIDENTIAL
14
NIKON CORPORATION
Instruments Company
CONFIDENTIAL
Industrial Instruments
Microscopes
(for Inspection / Analysis)
Measuring Instruments
for Measurement
Stereoscopic Microscope
- SMZ series
Industrial Microscope
-L/LV series
-MA series
Digital Microscope
-ShuttlePix P-400R
Profile Projector
-V-24B, V-20B, V-12B series
Measuring Microscope
-MM series
CNC Video Measuring System
-VMA, VMR series, VMZ series
Digimicro
Autocollimator
Industrial Instruments business(1)
CONFIDENTIAL
15
NIKON CORPORATION
Instruments Company
CONFIDENTIAL
Industrial Instruments
Microscopes
(for Inspection / Analysis)
Measuring Instruments
for Measurement
Stereoscopic Microscope
- SMZ series
Industrial Microscope
-L/LV series
-MA series
Digital Microscope
-ShuttlePix P-400R
Profile Projector
-V-24B, V-20B, V-12B series
Measuring Microscope
-MM series
CNC Video Measuring System
-VMA, VMR series
Digimicro
Autocollimator
Industrial Instruments business(1)
CONFIDENTIAL
Instruments Company
3.Microscopes lineup and applications
CONFIDENTIAL
17
NIKON CORPORATION
Instruments Company
20,000X
10X
15,000X
10,000X
1,000X
100X
Industrial
Microscope
L/LV series
MA series
Stereoscopic
Microscope
SMZ series
Magnification
Microscopes lineup and Applications
Digital
Microscope
SuttlePix
P-400R
CONFIDENTIAL
18
NIKON CORPORATION
Instruments Company
20,000X
10X
15,000X
10,000X
1,000X
100X
Industrial
Microscope
L/LV series
MA series
Magnification
Stereoscopic Microscope(1)
Digital
Microscope
SuttlePix
P-400R
Stereoscopic
Microscope
SMZ series
CONFIDENTIAL
19
NIKON CORPORATION
Instruments Company
SMZ series Stereoscopic Microscope
Stereoscopic Optical Image
Long Working Distance
Wide Field of View
Working
Distance
Good Operability
Stereoscopic Microscope(2)
CONFIDENTIAL
20
NIKON CORPORATION
Instruments Company
Wide field of View
Stereoscopic Optical Image
Image by SMZ800
(Zoom: 1X)
Image by LV150
(Obj Mag: 5X)
Image by SMZ800
(Zoom: 1X)
Stereoscopic Microscope(3)
Image by LV150
(Obj Mag: 5X)
Sample: PCB
CONFIDENTIAL
21
NIKON CORPORATION
Instruments Company
Long Working Distance
Watch Assembly
Soldering
Stereoscopic Microscope(4)
Working
Distance
CONFIDENTIAL
22
NIKON CORPORATION
Instruments Company
Wire Bonding System
PCB Inspection Equipment
Embedded Use
Stereoscopic Microscope(5)
CONFIDENTIAL
23
NIKON CORPORATION
Instruments Company
Application
Appearance Check / Inspection
Electronic Components, Precision Mold, PCB,
Metallic Components, Printing conditionVery wide range!!
Stereoscopic Microscope(6)
CONFIDENTIAL
24
NIKON CORPORATION
Instruments Company
Stereoscopic Microscope(7)
Working Distance (mm)
Zoom magnification
0.63x 15.75x
1.0 6.3X
0.8 8.0X
0.67 5.0X
0.67 5.0X
0.8 3.5X
0.7 3.0X
0 5.0X 10.0X
0.8 4.0X
SMZ800
SMZ1000
SMZ445/460
SMZ-2
SMZ745 SMZ745T
115
100
78
77.5
70
60
SMZ18/25
25.0X
CONFIDENTIAL
25
NIKON CORPORATION
Instruments Company
20,000X
10X
15,000X
10,000X
1,000X
100X
Magnification
Industrial Microscope(1)
Digital
Microscope
SuttlePix
P-400R
Stereoscopic
Microscope
SMZ series
Industrial
Microscope
L/LV series
MA series
CONFIDENTIAL
26
NIKON CORPORATION
Instruments Company
L / LV series Upright Industrial Microscope
MA series Inverted Industrial Microscope
Various Observation Method
Color Image in High Magnification
Extend your vision
Industrial Microscope(2)
CONFIDENTIAL
27
NIKON CORPORATION
Instruments Company
Bright Field
Dark Field
Simple POL
DIC
Fluorescence
Various Observation Methods
Industrial Microscope(3)
CONFIDENTIAL
28
NIKON CORPORATION
Instruments Company
Bright Field
The most standard observation method
The difference of the reflection indices and/or
colors of the lighted object as contrast
Industrial Microscope(4)
Circuit Pattern Chip
CONFIDENTIAL
29
NIKON CORPORATION
Instruments Company
Bright field Dark field
Dark Field
Enable to detect small particles, scratches, and etc.
Industrial Microscope(5)
CONFIDENTIAL
30
NIKON CORPORATION
Instruments Company
Bright field POL observation
POL observation
plate
Observing rocks
Simple POL
Changing the specimens color depending on its
polarization characteristic
Industrial Microscope(6)
CONFIDENTIAL
31
NIKON CORPORATION
Instruments Company
Bright field
DIC
DIC
Possible to observe the slightly gapped surface
not to detect by bright field
Industrial Microscope(7)
CONFIDENTIAL
32
NIKON CORPORATION
Instruments Company
Bright field
Through hole of a print circuit board
Fluorescence (B-2A)
Fluorescence
Possible to detect the defects or colors depending on the
fluorescence characteristics of the samples.
Industrial Microscope(8)
CONFIDENTIAL
33
NIKON CORPORATION
Instruments Company
Bright field Fluorescence (BV-2A)
Possible to recognize the color (RGB) by fluorescence
OLED
Industrial Microscope(9)
CONFIDENTIAL
34
NIKON CORPORATION
Instruments Company
Color Image in High Magnification
Obj Mag: 5X
Obj Mag: 10X Obj Mag: 20X
Obj Mag: 50X
Obj Mag: 100X
Industrial Microscope(10)
CONFIDENTIAL
35
NIKON CORPORATION
Instruments Company
Application
Appearance Inspection / Defects Analysis
Electronic Components, Semiconductor, FPD, PCB.
Metallic Components, Rocks, Mold, Ceramic
Industrial Microscope(11)
CONFIDENTIAL
36
NIKON CORPORATION
Instruments Company
BF,
Simple POL
EPI 170x230mm Inverted CFI60-2
MA100
BF, DF, DIC,
Simple POL
EPI 50x50mm Inverted CFI60-2
MA200
BF, DF, DIC,
Simple POL, FL
EPI & DIA 150x100mm Upright CFI60-2
LV100ND
BF, DF, DIC,
Simple POL, FL
EPI 150x150mm Upright CFI60-2
LV150N(A)
BF, DF, DIC,
Simple POL, FL
EPI & DIA 200x200mm Upright CFI60-2
L200ND
BF, DF, DIC,
Simple POL
EPI 200x200mm Upright CFI60-2
L200N
BF, DF, DIC,
Simple POL
EPI & DIA 300x300mm Upright CFI60-2
L300D
BF, DF, DIC,
Simple POL
EPI 300x300mm Upright CFI60-2
L300
Observation
Method
Illumination
Stage size
(Max)
Upright /
Inverted
Objective
Lens
Industrial Microscope(11)
CONFIDENTIAL
37
NIKON CORPORATION
Instruments Company
Digital Sight series
Color Camera Head DS-Vi1 Color Camera Head DS-Fi2
Control Unit DS-U3 Control Unit DS-L3
CONFIDENTIAL
38
NIKON CORPORATION
Instruments Company
20,000X
10X
15,000X
10,000X
1,000X
100X
Industrial
Microscope
L/LV series
MA series
Stereoscopic
Microscope
SMZ series
Magnification
Digital Microscope Shuttlepix (1)
Digital
Microscope
SuttlePix
P-400R
CONFIDENTIAL
39
NIKON CORPORATION
Instruments Company
Shuttlepix P-400R Digital Microscope
Portability (Anytime, Anywhere)
Easy to use
Digital Microscope Shuttlepix (2)
Motorized stand set Handheld set
CONFIDENTIAL
40
NIKON CORPORATION
Instruments Company
20,000X
10X
15,000X
10,000X
1,000X
100X
Industrial
Microscope
L/LV series
MA series
Stereoscopic
Microscope
SMZ series
Magnification
Summary of Microscope(1)
Digital
Microscope
SuttlePix
P-400R
CONFIDENTIAL
41
NIKON CORPORATION
Instruments Company
20,000X
10X
15,000X
10,000X
1,000X
100X
Industrial
Microscope
L/LV series
MA series
Stereoscopic
Microscope
SMZ series
Magnification
Summary of Microscope(2)
Digital
Microscope
SuttlePix
P-400R
We can provide instruments to meet
your demands for inspection and analysis
CONFIDENTIAL
Instruments Company
4. Measuring Instruments lineup
and applications
CONFIDENTIAL
43
NIKON CORPORATION
Instruments Company
CONFIDENTIAL
Industrial Instruments
Industrial Microscopes
(for Inspection / Analysis)
Measuring Instruments
for Measurement
Stereoscopic Microscope
- SMZ series
Industrial Microscope
-L/LV series
-MA series
Profile Projector
-V24B, V20B, V12B series
Measuring Microscope
-MM series
CNC Video Measuring System
-VMA, VMR series
Digimicro
Autocollimator
Measuring Instruments and Applications(1)
44
NIKON CORPORATION
Instruments Company
CONFIDENTIAL
Industrial Instruments
Industrial Microscopes
(for Inspection / Analysis)
Measuring Instruments
for Measurement
Stereoscopic Microscope
- SMZ series
Industrial Microscope
-L/LV series
-MA series
Table Top SEM
-Neoscope
Profile Projector
-V24B, V20B, V12B series
Measuring Microscope
-MM series
CNC Video Measuring System
-VMA, VMR series
Digimicro
Autocollimator
DP-E1
E-MAX
Data Processing System
Measuring Instruments and Applications(2)
45
NIKON CORPORATION
Instruments Company
Use for
Length / angle measurement
Tolerance judgment
Manufacturer for
Electronics, Automotive, Machinery, Metal,
Fiber, Steel, Mold
Gear
Connector
Measuring Instruments and Applications(3)
CONFIDENTIAL
46
NIKON CORPORATION
Instruments Company
Flexible PCB
IC lead frame
Mold
Precision Mold
Mold
Measuring Instruments and Applications(4)
CONFIDENTIAL
47
NIKON CORPORATION
Instruments Company
Accuracy
Dimension
1um
10um
100um
1D 2D 3D
Caliper
Micro Meter
Profile Projector
Video
Measuring
System
Digimicro Digimicro
Measuring
Microscope
Measuring Instruments and Applications(5)
CONFIDENTIAL
48
NIKON CORPORATION
Instruments Company
Accuracy
Dimension
1um
10um
100um
1D 2D 3D
Caliper
Micro Meter
Profile Projector
Video
Measuring
System
Digimicro Digimicro
Measuring
Microscope
Manual
Auto
Measuring Instruments and Applications(6)
CONFIDENTIAL
49
NIKON CORPORATION
Instruments Company
Accuracy
Dimension
1um
10um
100um
1D 2D 3D
Caliper
Micro Meter
Profile Projector
Video
Measuring
System
Digimicro Digimicro
Measuring
Microscope
Digimicro(1)
CONFIDENTIAL
50
NIKON CORPORATION
Instruments Company
MF-1001, MF-501, MH-15M Digimicro
1 Dimension
Height / Depth of Samples
Higher Accuracy
Digimicro(2)
CONFIDENTIAL
51
NIKON CORPORATION
Instruments Company
Digimicro
1 Dimension
Height / Depth of the Samples
Higher Accuracy
Measure
the Height
Digimicro(3)
CONFIDENTIAL
52
NIKON CORPORATION
Instruments Company
Caliper
Micro Meter
Profile Projector
Video
Measuring
System
Digimicro Digimicro
Measuring
Microscope
Accuracy
Dimension
1um
10um
100um
1D 2D 3D
Profile Projector(1)
CONFIDENTIAL
53
NIKON CORPORATION
Instruments Company
V-24B, V-20B, V-12B seriesProfile Projector
2 Dimension (X. Y), Angle
Wide field of viewAccurate Magnification
Stage Reading
Chart Comparison
Profile Projector(2)
CONFIDENTIAL
54
NIKON CORPORATION
Instruments Company
Wide Field of ViewAccurate Magnification

Image on the Screen
Profile Projector(3)
Try to measure
the distance between
one line and another line
Put on the stage
CONFIDENTIAL
55
NIKON CORPORATION
Instruments Company
X-axis movement
Y-axis movement
Accurate Measurement is possible
Stage reading
Profile Projector(4)
CONFIDENTIAL
56
NIKON CORPORATION
Instruments Company

Image on the Screen
Profile Projector(5)
Measure the Angle
Try to measure the angle
Put on the stage
CONFIDENTIAL
57
NIKON CORPORATION
Instruments Company
Chart Comparison
Image on
the Screen
Chart Image
Chart Image w/ Tolerance
Profile Projector(6)
CONFIDENTIAL
58
NIKON CORPORATION
Instruments Company
external counter
attachable
12inch
V VV V- -- -12BS 12BS 12BS 12BS
12inch
V VV V- -- -12BSC 12BSC 12BSC 12BSC

external counter
attachable
12inch
V VV V- -- -12BD 12BD 12BD 12BD
5X, 10X, 20X, 25X,
50X, 100X, 200X
12inch
V VV V- -- - 2BDC 2BDC 2BDC 2BDC
10x6,
8x6,
6x4,
4x4,
2x2,
O3L
20inch
V VV V- -- -20B 20B 20B 20B
5X, 10X, 20X,
50X, 100X
9V stage
external counter
attachable
24inch
V VV V- -- -24B 24B 24B 24B
Projection lens
3 lens attachable
Stage
Built in
digital protractor
Built in
digital counter
Screen
Size
Profile Projector(7)
CONFIDENTIAL
59
NIKON CORPORATION
Instruments Company
Caliper
Micro Meter
Profile Projector
Video
Measuring
System
Digimicro Digimicro
Measuring
Microscope
Accuracy
Dimension
1um
10um
100um
1D 2D 3D
Measuring Microscope(1)
CONFIDENTIAL
60
NIKON CORPORATION
Instruments Company
MM-200, MM-400, MM-800
Measuring Microscope
3 Dimension (X, Y, Z)
Accurate Magnification + Stage Reading
System Expandability
Configured with DSC
Measuring Microscope(2)
CONFIDENTIAL
61
NIKON CORPORATION
Instruments Company
Accurate Magnification + Stage Reading

Image via Eyepieces
X-axis movement
Y-axis movement
Measuring Microscope(3)
Try to measure
the distance between
one line and another line
Put on the stage
CONFIDENTIAL
62
NIKON CORPORATION
Instruments Company
System Expandability / Configured with DSC
Measuring Microscope(4)
8-segment LED Ring Light w/ industrial microscope unit Foot switch
Color Camera Head DS-2Mv w/ PC unit (E-MAX installed)
CONFIDENTIAL
63
NIKON CORPORATION
Instruments Company
Manual No Yes 2x2
MM MM MM MM- -- -200 200 200 200
No
MM MM MM MM- -- -400S 400S 400S 400S
Manual No
MM MM MM MM- -- -400SL 400SL 400SL 400SL
Motorized
MM MM MM MM- -- -400LM 400LM 400LM 400LM
Yes
MM MM MM MM- -- -400L 400L 400L 400L
Manual
No
Yes
6x4, 4x4, 2x2
MM MM MM MM- -- -400 400 400 400
No
MM MM MM MM- -- -800S 800S 800S 800S
Manual No
MM MM MM MM- -- -800SL 800SL 800SL 800SL
Motorized
MM MM MM MM- -- -800LM 800LM 800LM 800LM
Yes
MM MM MM MM- -- -800L 800L 800L 800L
Manual
No
Yes
12x8, 10x6, 8x6
MM MM MM MM- -- -800 800 800 800
Motorized / Manual
Focusing Mount
Z-axis Scale
Measurement
Controller
Mountable
Stage Size
Main Body Type
Measuring Microscope(5)
CONFIDENTIAL
64
NIKON CORPORATION
Instruments Company
Uncertainty Repeatability and/or Reproducibility
Machine factor
error of indication
aberration
probing error
non-synchronization error
self-sustained oscillation
Environment Factor
change in temperature
temperature inclination
floor vibration
disturbance light
electromagnetism
Human factor
skill
attention
distress
operation mistake
writing mistake
Data Processing System(1)
CONFIDENTIAL
65
NIKON CORPORATION
Instruments Company
Uncertainty Repeatability and/or Reproducibility
Machine factor
error of indication
aberration
probing error
Non-Synchronization Error
Self-sustained oscillation
Environment Factor
Change in Temperature
Temperature Inclination
Floor vibration
Disturbance light
Electromagnetism
Human factor
skill
attention
distress
operation mistake
writing mistake
Reduction by using
Data Processing System
Automated Measuring System
Data Processing System(2)
CONFIDENTIAL
66
NIKON CORPORATION
Instruments Company
DP-E1
Data Processor
E-MAX
Data Processing Software
Data Processing System(3)
CONFIDENTIAL
67
NIKON CORPORATION
Instruments Company
DP-E1
Data Processor
*Built-in Counter Display
*Automatic Calculation
*Memorizing Teaching Steps
*Out put results by printer
Reduction of
-Calculation error
-Data difference from measurement procedures
among operators
-Writing error of results
Data Processing System(4)
CONFIDENTIAL
68
NIKON CORPORATION
Instruments Company
E-MAX
Data Processing Software
*Configured with DSC Unit + PC
*Sub-pixel Image Processing
*Automated Edge Detection
*Automatic Calculation
*Memorizing Teaching Steps
*Storing of Results in PC
Reduction of
-Calculation error
Data difference from measurement procedures
among operators
-Writing error of results
-Uncertainty due to different skills of operators
Data Processing System(5)
CONFIDENTIAL
69
NIKON CORPORATION
Instruments Company
Avoidance of Human
Factor
Manual
Visual Observation
Focusing
Detecting Measuring Point
Match Edge Image with
Cross Line
Moving Stage
Selecting Magnification
Adjusting Illuminator
Reading and recording
results
Calculating / Evaluating of
pass / fail
Statistical Control

Automated
Digital Image (CCD)
Auto Focus
Auto Search
Edge Filter
CNC Drive
CNC Zoom
CNC Light Control
Application Software
(Ditto)
(Ditto)

Possibility of Human Factor

in Each Process
CNC Video Measuring System(1)
CONFIDENTIAL
70
NIKON CORPORATION
Instruments Company
Accuracy
Dimension
1um
10um
100um
1D 2D 3D
Caliper
Micro Meter
Profile Projector
Video
Measuring
System
Digimicro Digimicro
Measuring
Microscope
Manual
Auto
CNC Video Measuring System(2)
CONFIDENTIAL
71
NIKON CORPORATION
Instruments Company
NEXIV VMA, VMZ-R(VMR) series
CNC Video Measuring System
3 Dimension (X, Y, Z)
Automated
teaching step, edge detection, focusing,
results output, light control
CNC Video Measuring System(3)
CONFIDENTIAL
72
NIKON CORPORATION
Instruments Company
NEXIV VMA, VMZ-R(VMR) series
CNC Video Measuring System
3 Dimension (X, Y, Z)
Automated
teaching step, edge detection, focusing,
results output, light control
CNC Video Measuring System(4)
Higher Accuracy
and
Higher Productivity
CONFIDENTIAL
NIKON CORPORATION
Instruments Company
Type1
Type2
Type3
VMZ-R6555
Zoom Optics Illuminator Main Body
CNC Video Measuring System(5)
VMZ-R3020
VMZ-R4540
LED episcopic and diascopic illuminators
with 50-degree incident angle
TypeTZ
TZ has LED episcopic, diascopic (for
higher magnification) and darkfield
illuminators
Type4
LED episcopic and diascopic illuminators
with three incident angles
LED episcopic and diascopic illuminators,
with LED 8-segment ring illuminator with
an 18-degree incident angle
TypeA
CONFIDENTIAL
74
NIKON CORPORATION
Instruments Company
iNEXIV VMA-2520
0.11 NA
73.5 mm W.D.
RENISHAW (Option) Touch Probe
250 x 200 x 200 mm XYZ stroke
Size / Weight
FOV
Magnification
Max.
work piece weight
0.35 3.5 x
13.3 x 10 1.33 x 1 mm
15 kg
570 x 700 x 740 mm / 72kg
CNC Video Measuring System(6)
Long Working Distance, Wide field of View
Space saving
CONFIDENTIAL
75
NIKON CORPORATION
Instruments Company
iNEXIV VMA-2520
0.11 NA
73.5 mm W.D.
RENISHAW (Option) Touch Probe
250 x 200 x 200 mm XYZ stroke
Size / Weight
FOV
Magnification
Max.
work piece weight
0.35 3.5 x
13.3 x 10 1.33 x 1 mm
15 kg
570 x 700 x 740 mm / 72kg
CNC Video Measuring System(6)
Long Working Distance, Wide field of View
Space saving
Components of Machinery, Mold,
Automotive, Medical Device etc.
CONFIDENTIAL
76
NIKON CORPORATION
Instruments Company
Nikon Measuring Instruments Nikon Measuring Instruments
Auto
Most
Highest
Operation
Accuracy
Function
Semi-Auto Manual
Lowest
Price
CNC Video Measuring Systems CNC Video Measuring Systems
NEXIV
NEXIV
VMZ VMZ- -R3020 R3020
VMZ VMZ- -R4540 R4540
VMZ VMZ- -R6555 R6555
CNC Video Measuring System CNC Video Measuring System
iNEXIV
iNEXIV
VMA VMA- -2520 2520
Measuring Microscopes Measuring Microscopes
MM
MM
MM MM- -200 200
MM MM- -400 400
MM MM- -800 800
w E w E- -MAX MAX
w DP w DP- -E1 E1
Profile Projector Profile Projector
PP
PP
V V- -24B 24B
V V- -20B 20B
V V- -12B 12B
w E w E- -MAX MAX
w/ DP w/ DP- -E1 E1
Summary(1)
77
NIKON CORPORATION
Instruments Company
We provide our instruments
to meet
your needs for inspection and measurement
Summary(2)
Thank you !!