70445EN 01 MaintenanceManual C2000iB, C4000iB (Unprotected)

MAINTENANCE MANUAL
B-70445EN/01
For Europe
FANUC LASER C2000*-MODEL B
FANUC LASER C4000*-MODEL B

No part of this manual may be reproduced in any form.
All specifications and designs are subject to change without notice.

The products in this manual are controlled based on Japans Foreign Exchange and
Foreign Trade Law. The export from Japan may be subject to an export license by the
government of Japan.
Further, re-export to another country may be subject to the license of the government of
the country from where the product is re-exported. Furthermore, the product may also be
controlled by re-export regulations of the United States government.
Should you wish to export or re-export these products, please contact FANUC for advice.

In this manual we have tried as much as possible to describe all the various matters.
However, we cannot describe all the matters which must not be done, or which cannot be
done, because there are so many possibilities.
Therefore, matters which are not especially described as possible in this manual should be
regarded as impossible.

B-70445EN/01 SAFETY PRECAUTIONS
s-1
SAFETY PRECAUTIONS

This manual contains precautions, which must be observed during
operation and maintenance of the laser oscillator to ensure the safety
of the operator and maintenance personnel and prevent damage to the
oscillator.
Maintenance involves a variety of risks and, therefore, must be
conducted by those personnel who have sufficiently trained in
maintenance and safety.
Besides the laser oscillator, the laser machining system contains a
machine, power magnetics cabinet, servo system, CNC, and operator's
panel. This manual describes the laser oscillator. For a description of
notes other than those on the oscillator, refer to the corresponding
manuals, supplied by the machine tool builder and FANUC.

Contents

DEFINITION OF WARNING, CAUTION, AND NOTE ................ s-2
WARNINGS AND CAUTIONS ON EXPOSURE........................... s-3
WARNINGS AND CAUTIONS ON MAINTENANCE .................. s-5
WARNINGS AND CAUTIONS ON HANDLING .......................... s-6
WARNINGS AND CAUTIONS ON MACHINING........................ s-8

SAFETY PRECAUTIONS B-70445EN/01
s-2
DEFINITION OF WARNING, CAUTION, AND NOTE

To ensure the safety of maintenance personnel (referred to as users)
and prevent damage to the machine, this manual indicates each
precaution on safety with "Warning" or "Caution" according to its
severity.
Supplementary information is indicated by "Note".
Read the contents of each "Warning", "Caution", and "Note" before
attempting to use the oscillator.

WARNING
Applied when there is a danger of the user being
injured or when there is a danger of both the user
being injured and the equipment being damaged if
the approved procedure is not observed.

CAUTION
Applied when there is a danger of the equipment
being damaged, if the approved procedure is not
observed.

NOTE
Notes are used to indicate supplementary
information other than Warnings and Cautions.

Read this manual carefully, and store it in a safe place.

s-3
WARNINGS AND CAUTIONS ON EXPOSURE

WARNING
1 It is extremely dangerous to expose your eyes to direct,
scattered, or reflected CO
2
laser light. Always wear
protective glasses while the laser is operating.
Exposure to laser light can cause blindness. If your eyes
are accidentally exposed, seek medical advice
immediately.
2 Do not turn on the laser oscillator while a panel is removed
or a door is open.
Operating the laser with a door open or panel removed
may result in the operator being directly exposed to CO
2

laser radiation. Exposure to laser light can cause blindness
and/or severe burns. If your eyes are accidentally exposed
to laser light, seek medical advice immediately.
Before turning on the power during maintenance if
absolutely necessary, wear protective glasses and clothing
to prevent accidents.
3 Surround the laser-machining tool with a fence made of a
material which absorbs laser light well (such as acrylic).
Place appropriate warning notices on the fence.
The door in the safety fence shall be fitted with an interlock
switch such that opening the door stops the laser.
Failure to provide such a fence exposes persons in the
vicinity of the machine tool to the danger of being exposed
to CO
2
laser radiation and the associated risk of blindness.
If a person is accidentally exposed to laser light, seek
medical advice immediately.
4 If the laser oscillator is operated with a panel open,
ultraviolet radiation is emitted from the high-frequency
discharge section. Gazing the discharge section for a long
time can cause visual disturbances such as impaired
eyesight.
Always wear protective glasses during work. If you feel
trouble with your eyes, seek medical advice immediately.
5 The laser beam shall be no higher than average eye
height. Enclose the path of the laser beam with covers. Do
not leave the end of the beam path open. Place laser-
absorbing material at the end of the beam path to absorb
the beam's energy.
A CO
2
laser beam is directional and has a high energy
density. Exposure to laser light can cause blindness.
Flammable material may burn or explode if exposed to the
laser beam. If your eyes are accidentally exposed to laser
light, seek medical advice immediately.

s-4
WARNING
6 If there is a possibility of being exposed to CO
2
laser
radiation exceeding the maximum permissible exposure
(MPE) level for skin, wear protective clothing.
Otherwise, there is a danger of being burnt.
7 The oscillator is fitted with a red semiconductor laser to
indicate the approximate position of invisible CO
2
laser
beam. Do not look directly at the semiconductor laser
beam. Otherwise, your eyes may be injured.

NOTE
1 Warning labels are affixed to those parts of the laser
oscillator where there is a danger of exposure to laser
radiation. Observe the precautions given on the labels.
2 During installation or maintenance necessitating the
opening of an oscillator door or the removal of a panel, only
persons who have undergone maintenance training should
operate the laser. In such a case, extreme caution must be
exercised.
3 Laser products shall conform to the regulations laid down in
the laser safety standard, including that stipulating control
using a key.
The oscillator start signal (RUN ON) shall be controlled with
a key switch such that the oscillator cannot be turned on
without a specific key.
Control using a key ensures that other than the authorized
personnel cannot operate the laser oscillator. It is
extremely dangerous if a person who is unfamiliar with the
equipment attempts to operate the laser oscillator.
The shutter shall be unlocked only while a beam is being
output. Otherwise, keep the shutter locked to provide
protection should the laser accidentally be turned on.
The laser oscillator is equipped with a warning light as an
option. The warning light blinks while discharge is in
progress or whenever laser radiation is possible.
While the warning light is blinking, pay careful attention to
laser radiation and high voltages.

s-5
WARNINGS AND CAUTIONS ON MAINTENANCE

WARNING
1 A high voltage of 3 to 4 kV
0-p
is applied to some places in
the laser oscillator cabinet. Therefore, do not turn the
power to the oscillator on or operate the oscillator when an
oscillator panel is open. Operating the laser oscillator with a
panel open can cause a touch on a high-voltage place,
resulting in electric shock.
2 Before daily inspection, the replacement of a maintenance
part or maintenance, open the main circuit breaker and turn
the power supply off (double power-off).
To prevent the power from being inadvertently turned on,
lock the circuit breaker open, and affix an indication of work
in progress. Before turning on the power during
maintenance if absolutely necessary, take measures for
safety.
3 The gas circulating system in the oscillator becomes very
hot.
Do not touch the gas pipes, turbo blower, heat exchanger,
or exhaust pump, until they have cooled down sufficiently
after the oscillator has been turned off. Otherwise, you may
be burnt.
4 The oscillator contains cooling fan units. Although the fan
units are fitted with a finger guard, to prevent injury, keep
your hands well away from the fans.

s-6
WARNINGS AND CAUTIONS ON HANDLING

WARNING
1 The oscillator output mirror and focusing lens on the
machining head both have a substrate made of ZnSe (zinc
selenide), a toxic substance. Therefore, do not touch the
mirror or lens with your bare hands if it is damaged.
Inhaling ZnSe dust may cause difficulty in breathing,
completely stopping the breathing of the victim in the worst
case.
If you accidentally touch the mirror or lens with your bare
hands, wash your hands well under running water.
If you accidentally inhale ZnSe dust or debris, seek medical
advice immediately.
2 If the laser oscillator must be moved, entrust the work to
the machine tool builder whenever possible. If performed
by inexperienced personnel, the oscillator may topple or be
dropped, resulting in a potentially fatal accident.
When the machine tool builder is not available to move the
oscillator, follow the procedure described on the hanging
method label. While moving the oscillator, stand well clear
and never pass under the oscillator.
3 Do not allow any dangerous or high-pressure gas to get
into the oscillator housing. The oscillator cabinet has a
hermetic structure (dustproof and dripproof), it cannot be
ventilated easily.
1) Flammable gases such as oxygen can cause a fire or
explosion.
2) Toxic gases can harm operators during maintenance.
3) Organic gases can degrade machining performance.
4) High-pressure gases can damage a panel or the
cabinet, resulting in injury from flying matters.
If such a gas accidentally gets into the oscillator housing,
remove a panel for ventilation. The installation room must
be also well ventilated.
To purge the oscillator housing, use purified, low-pressure
air or nitrogen.
4 Those who use a cardiac pacemaker must avoid
maintenance and inspection work during the discharge of
the oscillator because the electromagnetic waves
generated during the discharge may affect the operation of
the pacemaker.
If you feel sick or out of condition, either immediately leave
the spot or stop operation.

s-7
CAUTION
1 The oscillator is controlled according to the CNC internal
parameter settings. If a numeric value different from a
setting is entered and the oscillator is operated, the
oscillator may malfunction. In the worst case, the oscillator
may be damaged.
2 Use laser gas with the specified correct composition ratios.
If you use laser gas with different specifications by mistake,
performance degradation or an alarm will result. In the
worst case, the oscillator may be damaged.
3 If storing the laser oscillator for a long time or leaving it
unused for a long time, drain the inside of the oscillator.
Otherwise, corrosion and clogging may result.
Also drain the oscillator if it is likely to freeze in winter. If it
freezes, the water piping and cooling system components
will be damaged.

NOTE
Do not discard a used output mirror or focusing lens
together with regular waste. If the output mirror or focusing
lens is replaced, return the original to the supplier or
entrust it to a specialized disposal company.

s-8
WARNINGS AND CAUTIONS ON MACHINING

WARNING
1 Do not look at the machining point without eye protection.
Otherwise, your eyes may be exposed to reflected laser
light, resulting in blindness.
If your eyes are accidentally exposed to laser light, seek
medical advice immediately.
2 Before attempting to machine any material for the first time,
consult with the manufacturer of the material.
Some materials generate toxic gases when cut or drilled by
a laser beam.
Should you accidentally inhale any toxic gas, seek medical
advice immediately.
3 The workpiece becomes very hot during machining. Never
touch the workpiece with your bare hands. Otherwise, you
may be burnt.
4 During machining, extremely hot chips are likely to be
generated.
Unless sufficient caution is exercised, there is a danger of
the operator being burnt, or of a fire being started.
5 Some materials may burn or explode when laser machined.
Before attempting to machine any material for the first time,
consult with the manufacturer of the material, to prevent
the danger of fire of or the possibility of operator injury.

NOTE
1 Do not place any flammable material (such as paper, cloth,
or wood) near the workpiece table.
2 Keep a fire extinguisher beside the unit.

B-70445EN/01 PREFACE
p-1
PREFACE

Contents of the manual
This manual consists of the following chapters and appendixes:

Chapter 1 : Safety for Laser Handling
Chapter 1 describes the warning labels affixed to the optical
paths in the oscillator, and warnings, cautions and notes on high
voltages, high temperatures, and toxicity.
Chapter 2 : Internal Structure
Chapter 2 describes the structure and operation of the laser
oscillator.
Chapter 3 : Installation
Chapter 3 describes the installation and checking of the laser
oscillator.
Chapter 4 : Maintenance
Chapter 4 describes daily maintenance and periodic maintenance.
Chapter 5 : Troubleshooting
Chapter 5 describes the actions to be applied in the event of a
fault occurring in the laser oscillator.
Chapter 6 : Oscillator Connections
Chapter 6 describes the internal connections of the electrical
system, cooling system, and gas system.
Chapter 7 : Units
Chapter 7 describes how to replace and adjust internal units of
the laser oscillator.
Chapter 8 : Laser Optical System
Chapter 8 describes how to clean, replace, and align the optical
components of the laser oscillator.
Chapter 9 : Laser Software Function
Chapter 9 describes the software functions for controlling the
laser oscillator.
Appendix
A. External View of Laser Oscillator
B. Specifications
C. Error Code List
D. Diagnosis Screen Information
E. Parameter List
F. Control Sequences in Laser Oscillator
G. Installing Gas Fittings and Water Fittings
H. External Gas Leakage Recording Table
I. Glossary
PREFACE B-70445EN/01
p-2
Applicable models
This manual covers the following models. The following
abbreviations may be used in the text of this manual.
Model Abbreviation
FANUC LASER C2000i -MODEL B C2000i-B
FANUC LASER C4000i -MODEL B C4000i-B

Related manuals
The following manuals are available for the FANUC LASER
C2000i/C4000i-MODEL B
DESCRIPTIONS B-63662EN
CONNECTION MANUAL B-63663EN
OPERATORS MANUAL B-63664EN
MAINTENANCE MANUAL B-63665EN
FANUC Series 16i-LB
PARAMETER MANUAL B-63670EN
OPERATORS MANUAL B-70444EN FANUC LASER
C2000i/C4000i-MODEL B MAINTENANCE MANUAL
(this manual)
B-70445EN

B-70445EN/01 PREFACE
p-3

B-70445EN/01 TABLE OF CONTENTS

c-1
TABLE OF CONTENTS

SAFETY PRECAUTIONS............................................................................s-1
DEFINITION OF WARNING, CAUTION, AND NOTE ............................................. s-2
WARNINGS AND CAUTIONS ON EXPOSURE ..................................................... s-3
WARNINGS AND CAUTIONS ON MAINTENANCE ............................................... s-5
WARNINGS AND CAUTIONS ON HANDLING....................................................... s-6
WARNINGS AND CAUTIONS ON MACHINING..................................................... s-8
PREFACE....................................................................................................p-1
1 SAFETY FOR LASER HANDLING......................................................... 1
1.1 LASER BEAM................................................................................................ 2
1.2 HIGH VOLTAGE............................................................................................ 5
1.3 SAFETY ENCLOSURE (AT YOUR WORK STATION).................................. 8
1.4 FIRE .............................................................................................................. 8
1.5 TOXIC FUME................................................................................................. 8
1.6 HIGH TEMPERATURE.................................................................................. 9
1.7 WARNING LABELS..................................................................................... 12
1.8 HIGH-PRESSURE GAS .............................................................................. 20
1.9 KEY CONTROL........................................................................................... 20
1.10 SHUTTER LOCK......................................................................................... 21
1.11 EMERGENCY STOP BUTTON................................................................... 21
1.12 WARNING LIGHT (OPTIONAL) .................................................................. 21
2 INTERNAL STRUCTURE...................................................................... 22
2.1 OUTLINE..................................................................................................... 23
2.2 INTERNAL STRUCTURE............................................................................ 25
3 INSTALLATION .................................................................................... 31
3.1 INSTALLATION PROCEDURE ................................................................... 32
3.2 OSCILLATOR CONNECTIONS................................................................... 38
3.2.1 Laser Gas................................................................................................................38
3.2.1.1 Laser gas specification....................................................................................... 38
3.2.1.2 Gas pipe ............................................................................................................. 38
3.2.1.3 Leakage in external piping................................................................................. 39
3.2.1.4 Replacing the laser gas cylinder ........................................................................ 39
3.2.2 Cooling Water ........................................................................................................40
3.2.2.1 Specification of the cooling water ..................................................................... 40
3.2.2.2 Pure water supply unit ....................................................................................... 40
3.2.2.3 Cooling water piping ......................................................................................... 40
3.2.2.4 Anticorrosive ..................................................................................................... 41
3.2.2.5 Cleaning agent ................................................................................................... 41
TABLE OF CONTENTS B-70445EN/01

c-2
3.2.2.6 Antifreezing solution ......................................................................................... 42
3.2.3 Electrical Connections............................................................................................43
3.2.3.1 NC-to-oscillator connection and power supply cable connection ..................... 43
3.2.3.2 Details of safety circuit ...................................................................................... 48
3.3 DETAILS OF CHECKING............................................................................ 50
3.3.1 Power Supply Checking.........................................................................................50
3.3.1.1 Checking the power supply ............................................................................... 50
3.3.1.2 Phase rotation .................................................................................................... 50
3.3.1.3 Setting the frequency of the power supply of the hour meter............................ 50
3.3.1.4 Measurement of voltage of DC power supply unit............................................ 50
3.3.1.5 Checking the jumper pins .................................................................................. 52
3.3.1.6 Checking the Interface PCB signals .................................................................. 52
3.3.2 External Laser Gas Piping Leakage Check (Clamp Test) ......................................53
3.3.3 Checking Cooling Water ........................................................................................54
3.3.4 Check for Leakage within the Oscillator................................................................54
3.3.5 Locating Internal Leakage......................................................................................55
3.3.6 Discharge Aging.....................................................................................................56
3.3.7 Oscillation Characteristics......................................................................................57
3.3.8 Discharge Margin Check........................................................................................58
3.3.9 Power Supply Margin Check (Pulse Check) ..........................................................59
3.3.10 Beam Mode Check .................................................................................................59
3.4 PREPARATION PRIOR TO SHIPMENT ..................................................... 62
3.4.1 Packing for Transportation.....................................................................................63
3.4.2 Removing Cooling Water.......................................................................................64
4 MAINTENANCE .................................................................................... 65
4.1 DAILY INSPECTION ................................................................................... 66
4.2 PERIODIC MAINTENANCE ........................................................................ 67
4.3 DETAILS OF MAINTENANCE..................................................................... 69
4.3.1 Turbo Blower Oil ...................................................................................................70
4.3.1.1 Check method.................................................................................................... 70
4.3.1.2 Replenishment method ...................................................................................... 71
4.3.1.3 Replacement method.......................................................................................... 71
4.3.1.4 Storage and expiration date ............................................................................... 72
4.3.2 Exhaust Pump Oil...................................................................................................73
4.3.2.1 Check method.................................................................................................... 73
4.3.3 Exhaust Pump Filter ...............................................................................................74
4.4 MAINTENANCE PARTS.............................................................................. 75
5 TROUBLESHOOTING.......................................................................... 79
5.1 TROUBLESHOOTING PROCEDURE......................................................... 80
5.2 RESPONDING TO ALARM MESSAGES ON THE SCREEN...................... 81
5.3 MAJOR FAULTS ....................................................................................... 111
5.3.1 Laser Power Supply Alarm Display.....................................................................111
5.3.2 Power Supply Cannot Be Switched Off Using LCD/MDI Switch.......................112
5.3.3 Power Supply Cannot Be Switched On Using LCD/MDI Switch .......................112
5.3.4 Laser Output Just after Switch On Is Low ...........................................................112
5.3.5 Display of Fluctuating Laser Output on LCD......................................................113

c-3
5.3.6 Circuit Breaker for Cooling Fan, Solenoid Valve, and Stabilized Power Supply
Trips .....................................................................................................................113
5.3.7 Electromagnetic Contactor of Exhaust Pump Trips Thermally............................113
5.3.8 Main Breaker Trips ..............................................................................................114
5.3.9 Excessive Laser Gas Consumption ......................................................................114
5.3.10 Inverter Alarm Display.........................................................................................115
6 OSCILLATOR CONNECTIONS.......................................................... 118
6.1 ELECTRICAL CONNECTIONS................................................................. 119
6.2 COOLING WATER PIPING....................................................................... 121
6.3 GAS PIPING.............................................................................................. 123
7 UNITS.................................................................................................. 126
7.1 INPUT UNIT............................................................................................... 127
7.2 LASER POWER SUPPLY UNIT................................................................ 131
7.2.1 Replacement Method............................................................................................131
7.2.1.1 Replacing the power supply unit ..................................................................... 131
7.2.1.2 Replacing a high-speed diode.......................................................................... 132
7.2.1.3 Replacing an FET module PCB....................................................................... 133
7.2.2 Adjustment Method..............................................................................................134
7.2.2.1 Preparation....................................................................................................... 134
7.2.2.2 Base discharge adjustment............................................................................... 134
7.2.2.3 Maximum output adjustment ........................................................................... 135
7.2.2.4 Check............................................................................................................... 136
7.3 MATCHING BOX....................................................................................... 138
7.4 DISCHARGE TUBE................................................................................... 139
7.4.1 Placement Numbers..............................................................................................139
7.5 TRIGGER ELECTRODE ........................................................................... 141
7.6 TURBO BLOWER...................................................................................... 142
7.6.2 Leakage Check and Discharge Aging ..................................................................144
7.6.3 Adjusting the Oil Level Detection Signal ............................................................144
7.7 INVERTER................................................................................................. 145
7.7.1 Checking the Parameters ......................................................................................145
7.7.2 Replacement Method of Inverter..........................................................................154
7.7.3 Replacement Method of the Cooling Fan in the Inverter .....................................156
7.8 EXHAUST PUMP ...................................................................................... 158
7.8.2 Parts of Exhaust Pump .........................................................................................158
7.9 GAS CONTROLLER (C4000i-B) ............................................................... 159
7.9.1 Configuration .......................................................................................................159
7.9.2.1 Replacing the charge unit ................................................................................ 161
7.9.2.2 Replacing the exhaust unit............................................................................... 161

c-4
7.9.3.1 Setting the gas supply pressure switch ............................................................ 162
7.9.3.2 Setting the atmospheric pressure switch.......................................................... 162
7.9.3.3 Operating the gas supply pressure switch and atmospheric pressure switch... 163
7.9.3.4 Adjusting the exhaust unit (adjusting the laser gas consumption)................... 167
7.10 PRESSURE CONTROLLER (C2000i-B) ................................................... 168
7.10.1 Configuration .......................................................................................................168
7.11 EXHAUST CONTROLLER (C2000i-B) ...................................................... 170
7.11.1 Configuration .......................................................................................................170
7.11.3 Adjustment Method (Adjusting the Laser Gas Consumption) .............................171
7.12 REPLACING THE WATER DISTRIBUTION UNIT .................................... 172
7.12.2 Replacement of the Parts of Flow Switch ............................................................174
7.12.3 Adjusting the Flow Sensor ...................................................................................175
7.13 SHUTTER UNIT ........................................................................................ 176
7.13.1.1 Replacing the shutter unit ................................................................................ 176
7.13.1.2 Replacing the shutter mirror ............................................................................ 176
7.13.1.3 Replacing the shutter switch (thermal and photoelectric switches) ................. 177
7.14 BEAM ABSORBER.................................................................................... 178
7.14.2 Adjusting the Position ..........................................................................................178
7.15 GUIDE LASER (SEMICONDUCTOR LASER)........................................... 179
7.16 FAN UNIT.................................................................................................. 180
7.16.1 Replacing a Fan Unit ............................................................................................180
7.16.2 Attaching and Detaching a Cable to and from the Terminal Block .....................180
7.16.3 Replacing a Fan-assisted Radiator........................................................................181
7.17 POWER SENSOR UNIT............................................................................ 182
7.18 REPLACING THE DEW SENSOR ............................................................ 182
7.19 PCB........................................................................................................... 183
7.19.1 Replacing the Interface PCB................................................................................183
7.19.2 Replacing the 24V Power Supply ........................................................................183
7.19.3 Replacing the Input Control PCB.........................................................................183
7.19.4 Replacing the Turbo PCB.....................................................................................184
7.19.5 Replacing the Intermediate PCB B.......................................................................184
7.20 OIL MIST DECOMPOSING ELEMENT ..................................................... 185
7.21 GAS DUST COLLECTOR UNIT ................................................................ 186
7.21.1 Cleaning ...............................................................................................................186
7.22 LOW TEMPERATURE SENSOR UNIT..................................................... 187

c-5
7.23 OXYGEN SENSOR UNIT......................................................................... 188
7.23.1 Replacement Method (C4000i-B) ........................................................................188
7.23.2 Replacement Method (C2000i-B Short Optical Path Length Type) ....................188
7.23.3 Replacement Method (C2000i-B Long Optical Path Length Type).....................188
7.24 HIGH-SPEED I/O UNIT ............................................................................. 190
7.24.1 Replacement Method of FSSB PCB.....................................................................190
7.24.2 Replacement Method of I/O MODULE UNIT.....................................................190
7.24.3 Replacement Method of FSSB I/O MODULE EXTENSION UNIT...................191
8 LASER OPTICAL SYSTEM................................................................ 192
8.1 LASER OPTICAL PARTS.......................................................................... 193
8.2 CLEANING AND REPLACING THE OPTICAL PARTS............................. 194
8.2.1 Cleaning and Replacing the Output Coupler and Rear Mirror.............................195
8.2.2 Cleaning and Replacing the Folding Mirrors .......................................................197
8.2.3 Cleaning and Replacing the Beam Folding Unit ..................................................198
8.3 ALIGNMENT OF THE RESONATOR........................................................ 200
8.3.1 Alignment Procedure for Adjusting All Mirrors ..................................................202
8.3.1.1 Preparation....................................................................................................... 202
8.3.1.2 Adjustment method.......................................................................................... 202
8.3.2 Alignment Procedure during Installation after Transportation.............................204
8.3.2.1 Preparation....................................................................................................... 204
8.3.3 Alignment Procedure at Mirror Cleaning Time ...................................................206
8.3.3.1 Preparation....................................................................................................... 206
8.4 OBTAINING A MAXIMUM POWER........................................................... 207
8.4.1 Preparation............................................................................................................207
8.4.2 Procedure..............................................................................................................208
8.5 POWER CALIBRATION METHOD............................................................ 210
8.5.1 Setting a Power Input Compensation Coefficient ................................................210
8.5.2 Using the Power Probe.........................................................................................211
8.6 ALIGNMENT OF THE BEAM FOLDING UNIT
(C2000i-B, C4000i-B SHORT OPTICAL PATH LENGTH TYPE) .............. 213
8.7 ALIGNMENT OF THE GUIDE LASER....................................................... 215
9 LASER SOFTWARE FUNCTION........................................................ 216
9.1 MAINTENANCE SCREEN......................................................................... 217
9.1.1 Overview..............................................................................................................217
9.1.2 Method of Operation ............................................................................................217
9.1.3 Display Information .............................................................................................218
9.1.3.1 Compensation coefficient history display........................................................ 218
9.1.3.2 Parts run time display ...................................................................................... 219
9.1.3.3 Discharge-related alarm history display .......................................................... 220
9.1.3.4 Laser alarm history screens.............................................................................. 221
9.1.3.5 Pulse power feedback screens ......................................................................... 222
9.1.3.6 Power sensor time constant measurement screen ............................................ 222
9.1.3.7 Leak check screen............................................................................................ 223
9.1.3.8 Laser tuning screen.......................................................................................... 225
9.1.3.9 Command of running beam internally with shutter closed.............................. 227

c-6
9.1.3.10 Input and output of saved maintenance data.................................................... 227
9.2 AUTOMATIC AGING................................................................................. 229
9.2.1 Overview..............................................................................................................229
9.2.3 Manual Operation.................................................................................................230
9.2.4 Automatic Aging Function Setting Screen...........................................................230
9.3 AUTOMATIC LEAKAGE CHECK .............................................................. 233
9.3.1 Overview..............................................................................................................233
9.3.3 Operation of the Leakage Check Function...........................................................234
9.4 POWER FEEDBACK FUNCTION BASED ON THE ACTUAL
OUTPUT ESTIMATION METHOD............................................................. 235
9.4.1 Overview..............................................................................................................235
9.4.2 Data Table ............................................................................................................235
9.4.2.1 Method of registration ..................................................................................... 235
9.4.2.2 Data table structure.......................................................................................... 236
9.4.3 Compensation for Power Sensor Response Speed ...............................................237
9.4.3.1 Time constant measurement method................................................................ 237
9.4.4 Bell-shaped Filter for Power Feedback Gain .......................................................239
9.5 WARMING-UP FUNCTION....................................................................... 240
9.5.1 Overview..............................................................................................................240
9.5.2 Method of Setting.................................................................................................240
9.6 PURGE WORKING AFTER ALARM NO.4073 .......................................... 241
9.6.1 Overview..............................................................................................................241
9.6.2 Function................................................................................................................241
9.7 BASE BIAS MODULATION....................................................................... 243
9.7.1 Function................................................................................................................243
9.7.2 Setting...................................................................................................................243
9.8 PROCESSING MODE CHANGE FUNCTION ........................................... 244
9.8.1 Outline..................................................................................................................244
9.8.2 Setting...................................................................................................................244
9.8.3 Operation..............................................................................................................245
9.8.3.1 Change of processing mode............................................................................. 245
9.8.3.2 In case that laser alarm occurs during the processing mode change................ 246
9.8.3.3 Processing mode change during power calibration ......................................... 246
9.8.3.4 Processing mode change during warm up function......................................... 246
9.8.3.5 Processing mode change during automatic aging function.............................. 246
9.8.3.6 Processing mode change during beam output.................................................. 247
9.8.3.7 Display of mode change .................................................................................. 247
9.8.3.8 Power calibration............................................................................................. 247
9.8.3.9 Power calibration coefficient ........................................................................... 247
9.8.3.10 Automatic aging function setting screen ......................................................... 248
9.8.3.11 Laser gas monitor ............................................................................................ 248
APPENDIX
A EXTERNAL VIEW OF LASER OSCILLATOR.................................... 251
B SPECIFICATIONS............................................................................... 254

c-7
C ERROR CODE LIST............................................................................ 255
D DIAGNOSIS SCREEN INFORMATION .............................................. 257
D.1 INFORMATION DISPLAYED ON THE DIAGNOSIS SCREEN ................. 258
D.2 LASER OSCILLATOR STATUS DISPLAY................................................ 261
E PARAMETER LIST ............................................................................. 269
E.1 PARAMETERS FOR ENABLING/DISABLING VARIOUS FUNCTIONS.... 270
E.2 PARAMETERS FOR DISCHARGE TUBE SELECTION............................ 279
E.3 PARAMETERS FOR CONTOURING CONDITIONS................................. 280
E.4 PARAMETERS FOR EDGE MACHINING CONDITIONS ......................... 281
E.5 PARAMETERS FOR PIERCING CONDITIONS........................................ 284
E.6 PARAMETERS FOR HIGH-SPEED PIERCING CONDITIONS................. 285
E.7 PARAMETERS FOR POWER CONTROL................................................. 287
E.8 PARAMETERS FOR ASSIST GAS PRESSURE AND TIME SETTING.... 290
E.9 PARAMETERS FOR LASER MAINTENANCE TIMING INDICATION
FUNCTIONS.............................................................................................. 293
E.10 PARAMETERS FOR THE OSCILLATOR.................................................. 295
E.11 PARAMETERS FOR DISCHARGE ........................................................... 299
E.12 PARAMETERS FOR GAS CONTROL (1) ................................................. 301
E.13 PARAMETERS FOR HIGHLY REFLECTIVE MATERIAL ALARMS.......... 304
E.14 PARAMETERS FOR LASER POWER / VOLTAGE DROP....................... 306
E.15 PARAMETERS FOR POWER TABLE SETTING...................................... 307
E.16 PARAMETERS FOR AUTOMATIC AGING FUNCTION ........................... 309
E.17 PARAMETERS FOR POWER CONTROL (2) ........................................... 312
E.18 PARAMETERS FOR LASER GAS MIXER FUNCTION ............................ 313
E.19 PARAMETERS FOR GAS PRESSURE CONTROL (2) ............................ 315
E.20 PARAMETERS FOR POWER FEEDBACK BASED ON
THE ACTUAL OUTPUT ESTIMATION METHOD ..................................... 316
E.21 PARAMETERS FOR PROCESSING MODE CHANGE FUNCTION......... 319
E.21.1 Setting for Fine Mode...........................................................................................319
E.21.2 Setting for Alarm Monitor (Alarm No.4125) .......................................................323
E.21.3 Setting for Automatic Aging Function (Fine Mode) ............................................324
F CONTROL SEQUENCES IN LASER OSCILLATOR.......................... 328
F.1 OUTLINE OF LASER OSCILLATION SEQUENCES ................................ 329
F.2 INTRA-TUBE GAS PRESSURE CONTROL SEQUENCES...................... 331
F.3 TUBE VOLTAGE CONTROL SEQUENCES ............................................. 333

c-8
G INSTALLING GAS FITTINGS AND WATER FITTINGS..................... 335
G.1 GAS FITTINGS.......................................................................................... 336
G.1.1 Tightening a Fittings ............................................................................................336
G.1.2 Reinstalling a Fittings...........................................................................................336
G.2 WATER FITTINGS .................................................................................... 337
G.2.1 Tightening a Fittings ............................................................................................337
G.2.2 Reinstalling a Fittings...........................................................................................337
G.3 FITTINGS AND TUBE ORDERING INFORMATION................................. 338
H EXTERNAL GAS LEAKAGE RECORDING TABLE .......................... 341
I GLOSSARY......................................................................................... 344
B-70445EN/01 1.SAFETY FOR LASER HANDLING
- 1 -
1 SAFETY FOR LASER HANDLING

C2000i-B and C4000i-B produce the rated output laser power of
2000W and 4000W. The CO
2
laser beam is the wavelength of 10.6 m,
far infrared, and is invisible to human eyes.
The adequate care must be taken when CO
2
laser is operated, therefore.
When removing the panel, always turn the power source off and
confirm no power is applied to the laser machine.

This oscillator fulfills the requirements of the relevant product safety
standard of EN60825-1:1994+Amendment 2:2001.

Chapter 1, SAFETY FOR LASER HANDLING consists of the
following contents:

1.1 LASER BEAM.............................................................................2
1.2 HIGH VOLTAGE ........................................................................5
1.3 SAFETY ENCLOSURE (AT YOUR WORK STATION) ..........8
1.4 FIRE .............................................................................................8
1.5 TOXIC FUME..............................................................................8
1.6 HIGH TEMPERATURE..............................................................9
1.7 WARNING LABELS.................................................................12
1.8 HIGH-PRESSURE GAS ............................................................20
1.9 KEY CONTROL........................................................................20
1.10 SHUTTER LOCK ......................................................................21
1.11 EMERGENCY STOP BUTTON ...............................................21
1.12 WARNING LIGHT (OPTIONAL) ............................................21

1.SAFETY FOR LASER HANDLING B-70445EN/01
- 2 -
1.1 LASER BEAM

Fig.1.1(a)-(b) show the position of panel that laser beam exposure is
occurred without panel.

(1) Potential hazards
Laser oscillator emits CO
2
laser beam(10.6 m), which is high
power and invisible.
Being directly exposed to the CO
2
beam could severely
burn you.
The CO
2
beam could bource off your workpiece and burn
your eyes or skin.
LASER oscillator have a guide laser. The guide laser beam
is visible (red color) and low power. It is used to ensure that
the CO
2
beam is correctly positioned on your workpiece.
The diode laser beam is not considered harmful to your skin.
But if you stared head on into the guide laser beam, it could
harm your eyes.

(2) Safety recommendations
Never expose the eyes and skin to the laser beam. Be careful of
the laser beam when performing the inspection and maintenance.
Do not turn on the power supply to the oscillator when the panel
open and do not drive. It is bleached to radiation of the laser
beam and high voltage.
Do the countermeasure (For instance, installs safety glasses and
the protection gloves) to danger in case of stopped no finish and
nor opening the panel while it energizes the oscillator.
Install beam safety cover after mirror cleaning or replacement.
And if not beam safety cover installation, do not operation and
alignment.
Confirm when it does alignment, the protection pipe (Safety
cover) is installed. If it dose not install the protection pipe, it will
put the finger in the laser beam and there is possibility to do the
burn.
When entering the area exposed to the scattered beam, wear the
safety glasses. Mount the stand made of acrylic resin or any
material which can absorb the CO
2
laser beam to protect the
personnel from the scattered beam.
Avoid exposure of any part of your body to the CO
2
laser beam.
When testing the beam output, any personnel other than the
maintenance personnel should be out of the working environment.
In designing a material processing machine utilizing laser
oscillator, be sure that the CO
2
laser beam goes from laser to the
workpiece only through the enclosed beam delivery system. This
prevents the exposure to laser beam by the operator switch could
otherwise take place. It is absolutely necessary to include the
instructions given here in the manuals of the laser
material-processing machine as a whole, which are to be read.

- 3 -

Fig.1.1(a) Laser beam exposure is occurred without panel as operating (C2000i-B)

Fig.1.1(b) Laser beam exposure is occurred without panel as operating (C4000i-B)

- 4 -
Safety cover Safety cover Discharge tube
Discharge tube
Discharge tube
For
Short optical
path length
type
Safety cover

Beam

Beam
For
Long optical
path length
type
Discharge tube

Fig.1.1(c) The position of laser beam delivery (C2000i-B)

Safety cover Discharge tube Discharge tube
Safety cover
Discharge tube Discharge tube
Beam
For
Short optical
path length
type
For
Long optical
path length
type
Beam
For
Long optical
path length
type
Beam
Beam
For
Short optical
path length
type

Fig.1.1(d) The position of laser beam delivery (C4000i-B)

- 5 -
1.2 HIGH VOLTAGE

Fig.1.2(a)-(d) show the position of high voltage in oscillator.

1) Potential hazards
There is RF voltage of 3 to 4kVo-p in the cabinet of the laser
oscillator.
There is 200 VAC power in the relay panel, be careful not to
touch the high voltage.

2) Safety recommendations
When it checks the oscillator and exchange the unit, intercept a
main breaker of the oscillator and the power supply. Lock the
breaker to prevent misconnection and display the sign while
working.
Install safety cover after unit replacement or cable connection.
Unless safety cover is installed, never perform operation.
Follow standard industrial safety practices for working with high
voltage.

EXAMPLES
Do not work on the laser oscillator if you are tired or have
taken medicine.
Do not wear anything metal, like a ring, bracelet, watch,
belt buckle, earrings, or keys.
They might contact high voltage.
Never stand on a wet surface.
Do not touch electrical components in the cabinets with
both hands at once. Keep one hand in a pocket.

Fig.1.2(a) The position of high voltage in C2000i-B (Front, maintenance side).

- 6 -

Fig.1.2(b) The position of high voltage in C2000i-B (Back side).
- 7 -

Fig.1.2(c) The position of high voltage in C4000i-B (Front, maintenance side).

Fig.1.2 (d) The position of high voltage in C4000i-B (Back side).

- 8 -
1.3 SAFETY ENCLOSURE (AT YOUR WORK STATION)

CO
2
beam is delivery from oscillator. Direct or scattered beam is
exposed.

Mount the safety enclosure made of acrylic resin which can
absorb the laser beam around the working environment.
Mount the interlock switch on the safety enclosure door which
extinguishes the laser beam output when the door is open. Never
perform operation without safety cover of laser machine.

1.4 FIRE

When you work with the laser oscillator or machine, hot
fragments or slag can scatter from your workpiece. The CO
2

beam or a reflection of it could ignite flammable material.

The direct or scattered laser beam can ignite flammable materials
such as paper, cloth, and wood. Provide a beam absorber behind
the workpiece and around it during maintenance. The absorber
can be anodized aluminum, graphite or brick. Put a shield
between yourself and the workpiece when the CO
2
beam is on.
Even diffuse reflections can harm eyes and skin and may ignite
flammable material.

1.5 TOXIC FUME

Some materials such as certain plastics can emit toxic fume when
they burn under the laser beam.

Install the exhaust system to remove toxic fume from the work
environment.
Consult the manufacturer of the material you are processing to
learn if it creates any fumes when heated or burned.

- 9 -
1.6 HIGH TEMPERATURE

Fig.1.6 (a)-(d) show the position of high voltage in oscillator.

When you touch a part of high temperature, your skin burn.

The pipes of the gas circular system are very a high temperature.
Do not touch pipes, heat exchanger and turbo blower because it
does not do the burn. It is hot immediately after having stopped
driving. After getting cold enough in case of removing, dismount
it.

- 10 -

Fig.1.6(a) The position of high temperature in C2000i-B (Front, maintenance side).

Fig.1.6(b) The position of high temperature in C2000i-B (Back side).

- 11 -

Fig.1.6(c) The position of high temperature in C4000i-B (Front, maintenance side).

Fig.1.6(d) The position of high temperature in C4000i-B (Back side).

- 12 -
1.7 WARNING LABELS

The oscillator uses high voltages and laser beam radiation. Such
hazards are indicated with warning labels attached to the positions
shown in Fig. 1.7(a) to (d). This section describes the warning labels
and their positions.

Fig.1.7(a) Warning label positions (C2000i-B : front view)

Fig.1.7(b) Warning label positions (C2000i-B : back view)
- 13 -

Fig.1.7(c) Warning label positions (C4000i-B : front view)

Fig.1.7(d) Warning label positions (C4000i-B : back view)

- 14 -
<1> Class indication label

Model Maximum Power Laser medium
C2000i-B 3500W CO
2
/N
2
/He=5/35/60%
C4000i-B 5000W CO
2
/N
2
/He=5/35/60%
<2> Warning logotype

<3> Access label

- 15 -
<4> Label inside the access panel

<5> Lifting method label

<6> Aperture label

<7> Label of non-interlocked protective panel

- 16 -
<8> Identification label

Printed Pattern
Model
MODEL TYPE A KVA
C2000i-B C2000 A04B-0813-B322 110 33
C4000i-B C4000 A04B-0815-B332 190 55

<9> Address label

<10> Discharge section label

<11> Supply voltage label

- 17 -
<12> Label of over-current protective

<13> Label of motor and transformer (C2000i-B)

<13> Label of motor and transformer (C4000i-B)

- 18 -
<14> Label of warning light

<15> Maintenance label

<16> Certification label

<17> Short-circuit interrupting capacity of main breaker

- 19 -
<18> Label for regulating the atmospheric gases in the oscillator housing

<19> Cooling water and gas maintenance label

- 20 -
1.8 HIGH-PRESSURE GAS

Do not allow any dangerous or high-pressure gas to get into the
oscillator housing. The oscillator cabinet has a hermetic structure
(dustproof and drip-proof), it cannot be ventilated easily.
Flammable gases such as oxygen can cause a fire or explosion.
Toxic gases can harm operators during maintenance. Organic gases
can degrade machining performance. High-pressure gases can damage
a panel or the cabinet, resulting in injury from flying matters.
If such a gas accidentally gets into the oscillator housing, remove a
panel for ventilation. The installation room must be also well
ventilated.
To purge the oscillator housing, use purified low-pressure air or
nitrogen.

1.9 KEY CONTROL

All the laser products have to comply with the various kinds of laser
safety regulations, which include the use of key control. For instance,
FDA PART 1040 PERFORMANCE STANDARDS FOR
LIGHT-EMITTING PRODUCTS, Sec 1040. 10 (f), (4) states: "Each
laser system classified as a Class IIIb or IV laser product shall
incorporate a key-actuated master control. The key shall be removable
and the laser shall not be operable when the key is removed" and
EN60825-1:1994, 4.5 Key control state "Any laser system belonging
to one of the following classes shall incorporate a key operation
master control: Class 4 and Class 3B, except for Class 3B with not
more than five times the AEL of Class 2 in the wavelength range from
400 nm to 700 nm. The key shall be removable and the laser radiation
shall not be accessible when the key is removed."

Because the laser package products offered by FANUC cannot
produce the laser beam as they are in the state of shipment, the system
integrator who incorporates FANUC products into the system, which
generates the laser beam, is obliged to incorporate the master key as
defined by the relevant regulation.

- 21 -
1.10 SHUTTER LOCK

The shutter lock is prepared because it dose not put out the laser beam
by mistake. If you do not put out the beam, lock the shutter.

Use the mechanical switch at shutter lock switch, not electrical
component (Relay)or switching circuit (Transistor, FET).
Use the one with the compulsion dissociation mechanism for the
switch used for the shutter lock circuit and the switch for welding
prevention.

To designer of laser processing machine
1 Use a mechanical switch for the switch used to lock
the shutter. Do not use an electric switch (For
instance, transistor circuit, etc.). Moreover, use the
one with the contact dissociation mechanism to
prevent welding for a mechanical switch.
2 Put it in the series of the contact of the emergency
stop button in the shutter lock circuit. When the
emergency stop switch is pushed, it is necessary to
intercept the power supply to the shutter.

1.11 EMERGENCY STOP BUTTON

Press the emergency stop button when it is dangerous and breaks
down. The oscillator is stopped discharging, gas pressure control and
stand by LRDY state.

Use the one with the compulsion dissociation mechanism for the relay
used for the emergency stop circuit and the switch for welding
prevention.

1.12 WARNING LIGHT (OPTIONAL)

Laser oscillator is equipped with the warning light optionally. The
light is flashed during discharging and ready of laser beam emission.
Be careful of laser beam and high voltage.

To designer of laser processing machine
In EN60825-1, it needs the design with the fail safe
or redundant for warning equipment. The redundant
warning light is needed near the work-point of
processing machine. The warning light is prepared
for the oscillator. Select this as a warning light more
than the second for the fail-safe.
2.INTERNAL STRUCTURE B-70445EN/01
- 22 -
2 INTERNAL STRUCTURE

Chapter 2, INTERNAL STRUCTURE consists of the following
contents:

2.1 OUTLINE...................................................................................23
2.2 INTERNAL STRUCTURE........................................................25

B-70445EN/01 2.INTERNAL STRUCTURE
- 23 -
2.1 OUTLINE

Fig. 2.1 shows an outline of the structure of the oscillator.

Fig.2.1 Outline of structure

(1) Laser resonator
The resonator consists of an output coupler, a rear mirror, folding
mirrors, discharge tubes, a power sensor unit, etc. Several
discharge tubes are connected in series using folding mirrors,
with an output coupler and a rear mirror placed at the open ends
of the discharge tubes, thus sealing the tubes. The resonator is
fitted with a gas pipe connecting port through which laser gas is
fed into the discharge tubes. A discharge from the electrodes of
the discharge tubes energizes CO
2
molecules, which emit light.
This light is amplified by the stimulated emission that takes place
while the light travels back and forth between the output coupler
and the rear mirror. The resonator is capable of converting
electrical energy to optical energy (10.6-m single-wavelength
laser beam).

(2) Energization power supply
This is a high-frequency power supply of 2 MHz whose output is
controlled by the CNC. It discharges the laser gas flows through
the discharge tubes to energize CO
2
molecules.
- 24 -

(3) Laser gas circulating system
A gas circulating system is configured by connecting the
resonator and the fan (turbo blower) with a circulating pipe.
Laser gas runs through the discharge tubes at a speed of 200 m/s
or higher. In this circulating system, a water-cooled heat
exchanger, used to cool the high-temperature gas from the
discharge tubes, is provided at the inlet side of the turbo blower.
At the outlet side of the turbo blower, another water-cooled heat
exchanger is provided to dissipate the compression heat of the
turbo blower.

(4) Pressure control unit
To ensure stable laser output, this controller controls the laser gas
pressure of the laser gas circulating system with commands
issued from the CNC, while exhausting degraded laser gas.

(5) CNC interface
This is the interface of the laser oscillator for connecting to
FANUC Series 16i-L. CNC commands that, control the
operation of the laser oscillator, such as start/stop and laser
output, are input via this interface.

(6) Housing
An enclosure that houses the above components. The housing,
consisting of metal panels, completely encloses the laser
oscillator, thus protecting the operator from exposure to laser
radiation and from high voltages. All panels are screw-fixed and
cannot be removed without an appropriate tool.

- 25 -
2.2 INTERNAL STRUCTURE

This section describes the internal structure of the oscillator more
specifically. Fig.2.2(a) to (d) are internal structural drawing.

Fig.2.2(a) Internal structural drawing (C2000i-B : front view)

Fig.2.2(b) Internal structural drawing (C2000i-B : rear view)
- 26 -

Fig.2.2(c) Internal structural drawing (C4000i-B : front view)

Fig.2.2(d) Internal structural drawing (C4000i-B : rear view)
- 27 -
(1) Output coupler
A transmitting/reflecting mirror, which outputs the laser beam
after it, has been amplified inside the resonator. The output
coupler consists of a ZnSe (zinc selenide) substrate with
dielectric coated.

(2) Rear mirror
A reflecting mirror consisting of a Ge (germanium) substrate
coated with dielectric. The rear mirror is used to reflect the laser
beam within the resonator while transmitting part of the laser
light to the outside to obtain the monitor light for laser output
measurement.

(3) Folding mirror
A mirror with a Si (silicon) substrate coated with dielectric to
reflect the laser beam.
It linearly polarizes the laser beam.

(4) Discharge tube
A pair of Ag (silver) electrodes is metallized on the surface of a
hollow quartz glass tube. A high-frequency discharge between
these electrodes injects electrical energy into the laser gas. Each
electrode is coated with ceramic, preventing it from degrading
and thus improving system reliability.

(5) Trigger electrode
This electrode is capable of pre-discharging outside the laser
oscillation area so that the laser output becomes completely zero
when the beam is off.

(6) Power sensor
An optical sensor, which detects the intensity of the laser beam,
transmitted through the rear mirror, thus enabling monitoring of
the laser, output level.

(7) Oil mist decomposing element
This element is capable of decomposing the organic matter that
gets into the laser gas circulating system, with photocatalytic
effect, using the ultraviolet rays generated from the discharge
tubes.

(8) Laser power supply
This power supply outputs high-frequency power (2 MHz)
according to a specified output with commands from the CNC
and supplies it to the discharge tubes via the matching box.

(9) Matching box
The matching box contains a matching circuit, which ensures that
power is effectively input to the discharge tubes.

- 28 -
(10) Turbo blower
This fan circulates the laser gas in the gas circulating system at
high speed. It rotates at a high speed of 60,000 revolutions per
minute (min
-1
).

(11) Inverter
This inverter drives the turbo blower. It is responsible for
acceleration/deceleration control and issuing alarms during start
and stop of the blower.

(12) Turbo PCB
This PCB relays overheating and frequency reached signals of
the turbo blower. In addition, it monitors the oil level of the turbo
blower.

(13) Gas dust collection unit
This unit is a cyclone dust collector that removes dust that gets in
the gas circulating system.

(14) Heat exchanger (inlet)
Water-cooled heat exchanger used to cool the laser gas that has
been heated by discharge, before it is drawn into the turbo
blower.

(15) Heat exchanger (outlet)
Water-cooled heat exchanger used to cool the laser gas that has
been heated by compression in the turbo blower, before being
forced into the discharge tubes.

(16) Gas controller (C4000i-B)
This gas controller constantly monitors the gas pressure in each
discharge tube and supplies fresh laser gas to the circulating
system to keep the pressure constant while exhausting degraded
laser gas. It also monitors the supply status of the laser gas, purge
check for the circulating system, and other items and has a
function of adjusting the amount of flow of the gas to be
exhausted. It provides the functions of both the C2000i-B
pressure controller and the exhaust controller.

(17) Pressure controller (C2000i-B)
This gas controller constantly monitors the gas pressure in each
discharge tube and supplies fresh laser gas to the circulating
system to keep the pressure constant while exhausting degraded
laser gas. It also monitors the supply status of the laser gas, purge
check for the circulating system, and other items.

(18) Exhaust controller (C2000i-B)
The exhaust controller is capable of controlling the flow rate of
the gas to be exhausted.

- 29 -
(19) Exhaust pump
This pump is used to vacuum-exhaust laser gas from the gas
circulating system such that its pressure falls to that used for laser
oscillation. In addition, it exhausts part of the degraded gas in the
gas circulating system.

(20) Hour meter
The hour meter records the total number of hours that the laser
oscillator has operated (how many hours the exhaust pump has
operated) to indicate whether maintenance or inspection is
necessary.

(21) Shutter
The shutter is normally closed to keep the laser beam inside, and
can be opened and closed with CNC commands. It is equipped
with a position sensor and a temperature sensor and constantly
monitors the open/close status and the shutter mirror temperature.

(22) Beam absorber
To perform laser oscillation without emitting the laser beam to
the outside, the laser beam is reflected on the shutter mirror and
guided into the beam absorber. The absorber, which is
water-cooled, absorbs the laser beam. The absorber is equipped
with a temperature sensor, which allows the system to constantly
monitor the temperature of the absorber.

(23) Water distributor unit
This unit distributes temperature-regulated external cooling water
to each unit inside the laser oscillator. The unit is equipped with
a flow switch, which allows the system to constantly monitor the
flow rate of the cooling water.

(24) Intermediate PCB B
This PCB relays signals collected into the shutter section, such as
those from the limit switch, absorber temperature sensor, power
sensor, and dew sensor, to the interface PCB.

(25) Input unit
This unit distributes the power supplied to the oscillator to each
unit in the laser oscillator. It also protects each unit from
overcurrents.

(26) Input unit control PCB
This PCB relays contactor open/close signals according to CNC
commands to the input unit.

(27) Interface PCB
This PCB communicates with the CNC via the FANUC I/O
LINK (serial interface).

- 30 -
(28) 24V PSU
This unit supplies DC power (24 VDC) to the interface PCB and
various units.

(29) Dew sensor
This sensor is mounted to the output coupler holder to monitor
the output coupler for condensation. It prevents faults in each
unit from occurring due to condensation.

(30) Guide laser (red semiconductor laser)
A diode laser is overlaid on the same optical axis as a guide beam
for checking the optical axis because the CO
2
laser beam is
invisible to the unaided eye. The guide beam is emitted in
synchronization with the mechanical shutter only when the
shutter is closed. The guide laser can be used for roughly
adjusting the optical path of an external optical system and for
obtaining a guide for the machining point.

(31) Beam folding unit
This unit extends the optical path length by folding back the laser
beam output from the output coupler in the oscillator and
outputting the beam from the outlet of the oscillator. It consists
of one circular polarization mirror and one zero shift mirror or of
two zero shift mirrors. It is provided in an oscillator of short
optical path length type; it is not provided in an oscillator of long
optical path length type.

(32) Low temperature sensor
This sensor measures the temperature of cooling water. When the
temperature in the laser oscillator is 20 or less in start-up of
the oscillator, warm-up driving is executed by software. So it
prevents output power decrease.

(33) Oxygen sensor
This sensor measures oxygen density, so that it prevents that
trouble because of inflow of oxygen as assist gas from machine
tool occurs.
B-70445EN/01 3.INSTALLATION
- 31 -
3 INSTALLATION

Chapter 3, INSTALLATION consists of the following contents:

3.1 INSTALLATION PROCEDURE...............................................32
3.2 OSCILLATOR CONNECTIONS ..............................................38
3.3 DETAILS OF CHECKING........................................................50
3.4 PREPARATION PRIOR TO SHIPMENT.................................62

3.INSTALLATION B-70445EN/01
- 32 -
3.1 INSTALLATION PROCEDURE

Use the following procedure to make adjustments and checks during
installation.
As soon as the oscillator is delivered, loosen the clamps of the
resonator described in (3) below.

CAUTION
If the clamps of the resonator are left fastened for a
long time, the resonator can deform. As a result, a
problem such as a failure in beam mode
adjustment or insufficient laser output can arise.

(1) Check the environment at the installation location.
[Environmental conditions]
1 Ambient temperature +5 to 30C
2 Temperature variation 1.1C /minute maximum
3 Humidity 75% or below (relative humidity)
4 Vibration
Acceleration not to exceed 0.05G.
Vibration amplitude not to exceed 5m.
5 Atmosphere
Dust must be minimized.
There must be no organic volatile
components. There must be no
flammable gas or dangerous gas such
as oxygen.

(2) Adjust the table horizontally where the oscillator is installed, and
then put the oscillator on, and fix it by the bolts.

(3) Remove resonator and shutter clamps.
The clamp locations are shown in Figs.3.1(a) to (b).

- 33 -

Shutter
clamp
Resonator
clamp

Fig.3.1(a) Clamp locations (C2000i-B)

SHUTTER CLAMP
RESONATOR CLAMP RESONATOR CLAMP

Fig.3.1(b) Clamp locations (C4000i-B)

- 34 -

Bolt <1>
Beam cover
pipe
Beam flange
Space <2> between beam
flange and beam cover pipe

Mirror holder
Safety cover
Shutter unit
Beam cover pipe

Fig.3.1(f) Safety cover for shutter unit Fig.3.1(g) The details of Safety cover

(4) Check the safety cover of shutter unit
The beam flange of the safety cover is fixed with a small space
<2> exists between the beam cover pipe installed in output
mirror holder. Check whether the interference with the beam
flange and the beam cover pipe, and loosening of beam flange
installation bolt <1>. When there are interference of loosening,
adjust and tighten according to procedure below.
(a) In mirror alignment, do it after loosing bolt <1>.
(b) After the alignment, adjust to keep a small space <2>
between the hole of beam flange and the beam cover pipe.
And keep a small space <2>, and fix the beam flange with
bolt <1>.

(5) Check the outsides of units installed in the oscillator as follows:
Check items
1 Check whether any printed circuit boards are loose or removed.
2
Check whether any cables are damaged (such as damaged
sheathing).
3 Check whether any connectors are loose or detached.
4 Check that the discharge tubes are neither cracked nor damaged.
5
Check that the turbo blowers and other units are neither loose nor
missing.
6
Check that the power supply units and matching boxes are neither
loose nor missing.
7 Check that the input unit is neither loose nor missing.
8
Check that the connection to the electrode of each discharge tube is
not loose.
- 35 -
Check items
9
Check whether any fittings part of the water piping and gas piping is
loose.
10 Check all screw terminals in the units.
11
Check the oil level in the turbo blowers, and check for oil
contamination. (See Subsection 4.3.1 for details.)
12
Check the oil level in the exhaust pump, and check for oil
contamination. (See Subsection 4.3.2 for details.)

(6) Connect the power and signal lines to the oscillator. (See
Subsection 3.2.3 for details.)
Check items
1 Oscillator power cable
2 Grounding cable : less than 10 ohm(Protection class 1 grounding)
3 Signal cable between the CNC and oscillator (or optical fiber)
4 Signal cables

(7) Check the input power supply voltage, frequency and phase
rotation. (See Subsection 3.3.1 for details.)
Also set the frequency of the power supply to the hour meter.

(8) Check the setting of communication jumper pin LINK1 on the IF
PC board. (See Subsection 3.3.1 for details.)
If the communication cable is a metallic cable, insert the jumper
pin LINK1 into JD1; if the communication cable is an optical
fiber cable, insert the jumper pin into the COP side.

(9) Connect the laser gas and cooling water pipes. (See Subsections
3.2.1 and 3.2.2 for details.)
Check items
1
Check the laser gas composition and purity (check whether the
specifications are satisfied).
2 Check the laser gas piping status.
3
Check that there is no gas leakage in the external piping between the
gas cylinder and oscillator.
4
Check the quality of the cooling water (use of tap water passed
through an ion exchanger).

(10) Check the supply gas pressure.
Check that the secondary pressure of the gas regulator is
0.1750.025 MPa.

(11) Turn on the power, then check the operation of the fan motors in
the housing.
The fan motors installed in the oscillator start turning as soon as
the power to the CNC is turned on. Check the operation of each
fan motor. Note, however, that the fan motor installed in the laser
power supply does not start until the oscillator sequence starts the
turbo blower operation.

- 36 -
(12) Check the parameters and setting data.
A parameter table for the laser oscillator is attached to the
oscillator. Some machine builders prepare a parameter table
including parameters for the laser oscillator. If data sheets are not
found, contact the machine tool builder.
(a) On the setting screen of the CNC, set the parameter write
enable state.
(b) Check the parameters, and enter the same values as
specified in the parameter table.
(c) On the setting screen of the CNC, set the parameter write
protected state, and press the reset button.

CAUTION
1 If the oscillator is started with an incorrect
parameter value specified, the oscillator may fail in
the worst case. Be particularly careful when
entering and checking parameter values.
2 Some parameters may require modification to, for
example, suit the operating state of the oscillator or
enable maintenance. When parameters are
modified, it is recommended that modification
history (date, parameters before modification,
parameters after modification, and reason for
modification) be recorded so that old parameters
and invalid parameters are not used.
3 Be careful not to lose the attached data sheets,
and keep them safely.

(13) Check that cooling water is supplied normally, and that there is
no water leakage inside the oscillator or at any external
connection points. (See Subsection 3.3.3 for details.)
Check that the temperature of the cooling water is set to 20 to
30C.

(14) Conduct an oscillator vacuum leakage test.
Check the oscillator for any internal leakage.
When performing the leakage check, use the automatic leakage
check function described in Subsection 3.3.4.
If there is internal leakage, locate the leakage according to the
leakage location method described in Subsection 3.3.5.

(15) Check that the laser gas pressure is controlled normally.
(a) Set all bits of parameter No. 15025 through parameter No.
15028 to 0 because only the pressure control operation is to
be checked, without causing discharge.
Check that alarm Nos. 4073 and 4078 are not issued. If one
of the alarms is issued, see the solution in Section 5.2, and
take appropriate action.
(b) After completing the checking, reset the changed
parameters to their original settings.

- 37 -
(16) Start the laser oscillator to perform discharge aging. See
Subsection 3.3.6 to start the aging function.

(17) Check the oscillation characteristics and output. See Subsections
3.3.7, 3.3.8, and 3.3.9 for details of the check method.
Check items
(a) Check that the correction coefficient is 1100 or less.
(b) Oscillation characteristic check :
Check that the discharge voltage during base discharge and
when a rated output is specified is within the factory-set
value plus 200 V.
If the correction coefficient or discharge voltage exceeds the
maximum, repeat discharge aging.
(c) Discharge margin check : Check that a margin is provided.
(d) Voltage margin check : Check that no alarm is issued.

(18) Check the laser beam mode.

CAUTION
A beam mode deviation may occur depending on
the transportation method and storage condition.
When installing the oscillator, be sure to perform
this step. A mode deviation does not mean a
failure. Perform alignment by following the
procedure described in Subsection 8.3.2.

Follow the check procedure described in Subsection 3.3.10 to
ensure the following:
Check items
(a) Check that there is no significant difference from the mode
specified in the data sheets attached to the oscillator.
(b) Check that the mode shape is perfectly circular.
(c) Check that no interference fringes can be observed nearby.
If an abnormality is found, make mirror adjustments by
following the procedure described in Subsection 8.3.2.
- 38 -
3.2 OSCILLATOR CONNECTIONS

The oscillator has connections for laser gas piping, cooling water
piping, and power and signal cables. For details of the electrical
connections for the CNC and machine, refer to the corresponding
connection manual.

3.2.1 Laser Gas

3.2.1.1 Laser gas specification

Supply the laser oscillator with a mixture of gases that satisfy the
conditions listed below.
(1) Composition ratio and accuracy
(For the composition ratio, check the label and specifications of
the oscillator.)
Composition ratio and accuracy
CO
2
50.25
He
603
(He balance)
N
2
351.75
(2) Water (H
2
O) : 5 ppm or less
(3) Hydrocarbon (C
n
H
m
) : 1 ppm or less
(4) Gas purity : 99.99% or higher

3.2.1.2 Gas pipe

Observe the following cautions for piping between the laser gas
cylinder and laser oscillator.

(1) It is recommended that a polyethylene tube E series
(E-64-Y-0100: 3/8 inches, Yellow) having an inside diameter of
6 mm or larger (manufactured by Parker Hanniffin Corporation)
be used. Do not use a nylon, rubber, or urethane tube.
(2) Use swage-lock vacuum fittings. Do not use one-touch couplers,
quick couplers, or hose-band fittings.
(3) Minimize the length of tubing. It should be kept within 5 m.
Never exceed 15 m. For a length of 15 m or more, use stainless
bright annealed pipes. In this case, do not extend piping over 30
m.
(4) Minimize the number of fittings used. Connect pipes, if
necessary, using a swage-lock vacuum fittings or by TIG
welding.
A vacuum piping specialist should install piping.
(5) Always keep the piping materials clean. Do not allow foreign
matter to get in the pipe.
(6) Use a regulator that has been degreased and is free from gas
leakage.
- 39 -
(7) Please set the exhaust time of external piping (parameter
No.15260) long when the piping distance is 5m or more. The
standard value of the parameter is two seconds every 5m.

3.2.1.3 Leakage in external piping

After installing the piping, see Subsection 3.3.2, and be sure to
conduct a clamp test to check for gas leakage.
If the rate of change in primary pressure over eight hours exceeds 5%,
or if the rate of change in secondary pressure over eight hours exceeds
10% for a polyethylene tube E series or 6% for a stainless pipe,
leakage that prevents normal oscillator operation is present. Use the
helium leakage detector to locate the leakage and eliminate it.

3.2.1.4 Replacing the laser gas cylinder

If the primary pressure of the regulator installed in the laser gas
cylinder is 1 MPa or less, replace the laser gas cylinder with new one.
When laser gas runs out during oscillator operation, the oscillator
stops automatically. In this case, after the oscillator stops, replace the
gas cylinder.
When replacing the gas cylinder, close the main plug of the gas
cylinder, completely loosen the adjustment valve of the regulator, then
remove the regulator. If the adjustment valve of the regulator is left
tightened, external air will enter the piping. When the oscillator is
started after the replacement of the cylinder, the external piping
exhaust operates to remove gas inside the piping, and the oscillator
starts in the normal sequence.
When laser gas runs out during purging, a stop occurs while the inside
of the piping is in the negative pressure state. If the gas cylinder is
replaced in this state, the atmosphere is sucked. Therefore, be sure to
loosen the adjustment valve of the regulator before removing the
regulator.
Before the oscillator starts, the external piping exhaust operation takes
place then the automatic aging function operates to perform aging in
the oscillator to prevent possible troubles from occurring if the
atmosphere should be sucked.

- 40 -
3.2.2 Cooling Water

NOTE
To prevent that the cooling water flows in to the
oscillator by the irregular driving of the chiller in the
oscillator off, install the valve on the cooling water
inlet of the oscillator.

3.2.2.1 Specification of the cooling water

The quality of cooling water is specified in the table below. Use pure
water or tap water passed through an ion exchanger.
pH (25C) 6.0 to 8.0
Conductivity (25C) 200S/cm or less
Chlorine ion Cl
-
20ppm or less
Sulfate ion SO
4
2-
50ppm or less
M alkalinity 50ppm or less
Standard
item
Total hardness CaCO
3
50ppm or less
Iron Fe 0.3ppm or less
Sulfur ion S
2-
Not to be detected
Ammonia ion NH
4
+
0.2ppm or less
Reference
item
Ionic silica SiO
2
30ppm or less
ppm=mg/L

3.2.2.2 Pure water supply unit

Install a pure water supply unit (ion exchange resin) at the water inlet
of the chiller. The pure water supply unit can prevent problems with
the oscillator from occurring due to corrosion or a clogged pipe.
Replace the water periodically after every 1,500 hours because the
quality of the circulating cooling water is lowered.
Product name:
Pure Water Supply Cartridge
Manufacturer:
ORGANO Corporation
Use:
Refer to the description indicated on the product.

3.2.2.3 Cooling water piping

The pressure of 0.5MPa or less hangs to the water piping connected
with the laser oscillator, and lay down the piping that can endure this
hydraulic pressure enough.
Moreover, install the stop valve to prevent the water leak by the
operation of an unexpected chiller in the vicinity of the doorway of
the water of the laser oscillator when the cooling water system is
opened by maintenance etc.

- 41 -
3.2.2.4 Anticorrosive

Add the following anticorrosive to cooling water immediately after
installation to prevent problems due to corroding cooling water and to
decrease the frequency of replacement of cooling water.
Consult the chiller manufacturer for use of the anticorrosive.
Product name Manufacturer
1 CONTLIME K-6000 Mitsubishi Gas Chemical Company, Inc.
2 Kurilex L-111 Kurita Water Industries Ltd.

Use :
Add the anticorrosive above to cooling water initially so that the
concentration is within 1000 to 2000 ppm. (100 to 200 cc/100
liters). Monthly check the concentration of the anticorrosive
using concentration check paper dedicated to anticorrosives and
add the anticorrosive to cooling water until the concentration
reaches about 1000 ppm.
Concentration check paper :
Purchase a concentration check set (50 sheets of check paper, a
dropping pipette, etc.) together with CONTLIME K-6000
(manufactured by Mitsubishi Gas Chemical Company, Inc.).

CAUTION
If the above anticorrosive is added to cooling water
and the concentration is controlled, also be sure to
replace the cooling water every year.

3.2.2.5 Cleaning agent

To remove foreign matters such as fur that have adhered to the inside
of the cooling water circulating path, wash the cooling water
circulating path using the following detergent. Consult the chiller
manufacturer for use of the detergent.
Product name Manufacturer
1 DESLIME Mitsubishi Gas Chemical Company, Inc.
2 Kuridine I-302 Kurita Water Industries Ltd.

Use:
Add the detergent of 10% of the amount of cooling water,
circulate the water for an hour, then drain the water. After that,
rinse the cooling water circulating path thoroughly. Do not touch
a stock solution of DESLIME with your bare hands because the
solution is a strong chemical. If a stock solution accidentally
contacts your skin, wash the stock solution off your skin well
under running water.
If waste water used for washing is left standing, the main
ingredient, hydrogen peroxide is decomposed. Wait until
hydrogen peroxide is decomposed or dilute waste water with
water to reduce the concentration, then flush the waste water
down the drain.

- 42 -
3.2.2.6 Antifreezing solution

If the chiller is used in a cold district, it should be provided with an
antifreezing function. When the air temperature falls, the water supply
pump should be kept running. In a very cold district, incorporate a
heater into the chiller to prevent the water temperature to drop too
much. A chiller with a built-in heater is recommended because the
water temperature must reach 20C or greater to start the oscillator.
If the temperature inside the oscillator is too low when the oscillator is
started, a warm-up operation is automatically started.
When use of an antifreezing solution is unavoidable, use ethylene
glycol at a concentration within 30%. The use period should be the
four months in the winter season.
If an anticorrosive is contained in an antifreezing solution, corrosion
can occur. Do not use an antifreezing solution mixed with an
anticorrosive.

- 43 -
3.2.3 Electrical Connections

3.2.3.1 NC-to-oscillator connection and power supply cable
connection

Connect the cables to the laser oscillator as described below.

(1) Specifications of the circuit breakers for the factory facilities and
power cables
The voltage and maximum current supplied to the laser oscillator
are as follows:
Power supply voltage :
200VAC +10%,-15%, 50/60Hz1Hz , 3
or 220VAC +10%,-15%, 60Hz1Hz, 3
Maximum current : C2000i-B 110A
C4000i-B 190A

See the table below for the specifications of the circuit breakers
for the factory facilities and power cables.

Model Circuit breaker for factory facilities
Minimum cable
size
Allowable cable
clamp diameter
C2000i-B
Rated current: 150 or more
Short-circuit breaking capacity: 35kA or less
38mm
2

(UL cable:AWG1)
31mm to 37mm
C4000i-B
Rated current: 225 or more
Short-circuit breaking capacity: 35kA or less
100mm
2

(UL cable:AWG4/0)
14mm to 25mm

(2) Power cable
L1(U) , L2 (V), L3(W)
Recommended power cables
(a) If placing the cable in the duct
If laying the power cable by placing it in the duct between
the power board and the laser oscillator, use a single-core
cable.
OSC Recommendation Cross Section Diameter Current
C2000i-B
C4000i-B
Type Layout
Single Core
4 pieces
Hitachi Cable : 600V MLFC 50mm
2
124A* 14.4mm
LAPP : Multi standard single core
50mm
2
14mm 120A*
Furukawa : 600V LMFC 50mm
2
14.4mm 124A*
Hitachi Cable : 600V MLFC 150mm
2
250A* 22.2mm
Furukawa : 600V LMFC 150mm
2
22.2mm 250A*
Diameter
Cross Section

- 44 -
(b) If not placing the cable in the duct
If not placing the power cable in the duct between the
power board and the laser oscillator, you can use a
heavy-duty power cord cable.
OSC Recommendation Cross Section Diameter Current
C2000i-B
Hitachi Cable : 600V 2PNCT 38mm
2
124A 34mm
LAPP : OLFLEX 100 50mm
2
34.5mm 146A
C4000i-B
4 Core
Sheathed
Portable
1 piece

Cross Section Diameter
Type Layout
1 Core
Sheathed
Portable
4 pieces

Cross Section
Diameter
Hitachi Cable : 600V 2PNCT
LAPP : OLFLEX FD-90
100mm
2
253A* 24mm
120mm
2
23.8mm 219A*

(c) Recommended cable suppliers
Hitachi Cable : Hitachi Cable, Ltd.
Furukawa : The Furukawa electric Co., Ltd.
LAPP : U.I. Lapp GmbH
(d) Crimp terminal connectors
Use the CB type below as the terminal connectors attached
to the power supply cables for C4000i-B.
Size of cable
(mm
2
)
Manufacture
Spec.No. of crimp
terminal connector
Spec.No.of
the tool
100 to 117.2 CB100-S8
117.2 to 152.05
JST
CB150-S8
YF-1
* JST=JAPAN SOLDERLESS TERMINAL MFG Co.,
Ltd.
** Attach the crimp terminal to the cable after passing the
cable through the cable service entrance.
(e) Tightening torque for terminal
Tightening torque of mounting screws is as follows.
OSC Torque
C2000i-B 8-13Nm
C4000i-B 8-13Nm

(3) Ground cable
There are two grounding locations.
One of the locations is for calss-1 grounding.
The other location is for protective grounding. Install a
grounding wire to the location marked "PE".

(4) Interface connection cable
(a) I/O signals
16i-L
Connect an optical fiber cable to COP1 on the interface
PCB.
(b) Emergency stop signals (ESP1 and ESP2)
These signals are not used. Strap the corresponding points.
(c) OFF interlock signals (OFI1 and OFI2)
Making the power supply for the oscillator ready to be
switched off turns off these signals. Connect them in
parallel with an CNC OFF switch.
Contact current-carrying capacity : 3 A on 250 VAC or 5 A
on 30 VDC
- 45 -
(d) Laser oscillator ON/OFF signal (ON, OFF)
Connect 200 VAC in synchronization with the CNC
ON/OFF switch to this signal.
Current-carrying capacity : 10 mA on 200 VAC

Fig.3.2.3.1(a) Cable connection of (C2000i-B)

Fig.3.2.3.1(b) Cable connection (C4000i-B)

- 46 -

Fig.3.2.3.1(c) Location and Signal assignment of CNL1

(5) CNL1 terminal

B8 PF2 A8 PF1
B7 OFI2 A7 OFI1
B6 A2 A6 A1
B5 EMS2 A5 EMS1
B4 A4
B3 SHL2 A3 SHL
B2 A2 SC
B1 IB2 A1 IB1

CNL1 pin arrangement (as viewed from the wiring surface)
(a) PF1 and PF2
These terminals are for QF1 voltage tripping. Connect
+24 VDC and 0 V to PF1 and PF2, respectively.
(b) SHL1 and SHL2
These terminals are for shutter interlocking. Strapping
these terminals enables the shutter to be opened and closed.
Contact current-carrying capacity : At least 1.2 A on 24
VDC
Wire: 1.25 mm
2
, 25 m or shorter
(c) IB1 and IB2
These terminals are for semiconductor laser interlocking.
Strapping these terminals enables the semiconductor laser to
be turned on.
Contact current-carrying capacity: At least 10 mA on 24
VDC
(d) A1 and A2
These terminals are for supplying power to the safety box in
the laser oscillator and switching on and off the laser
oscillator power supply.
Connect +24 VDC and 0 V to A1 and A2, respectively.
Current-carrying capacity: At least 250 mA
(e) SC
This terminal is for outputting a shutter-closed signal. It
outputs the signal when the shutter is closed.
Connectable load capacity: 3 to 100 mA on 24 VDC
Note that the voltage applied to the load varies with the
current flowing through the load.
- 47 -
(f) EMS1 and EMS2
Connect these terminals to emergency stop switch contact
signals.
Contact current-carrying capacity : At least 1.2 A on 24
VDC

(6) Connection of the optical fiber cable for FSSB (C4000i-B)
(a) Remove fixed screw (M410) in the lower right of the
Laser high-speed I/O unit. And incline the Laser high-speed
I/O unit forward.
(b) Connect the optical fiber with optical connector COP10B.
(c) Tighten a fixed screw.

Laser high-speed I/O unit
The optical fiber is connected
with connector COP10B.
Fixed screw
(M410)
Hinge

Fig3.2.3.1(d) Connection of the optical fiber cable for FSSB to the laser high-speed I/O unit

- 48 -
3.2.3.2 Details of safety circuit

The figure shows the safety circuit for each oscillator.

Fig.3.2.3.2(a) Safety circuit of C2000i-B
- 49 -

Fig.3.2.3.2(b) Safety circuit of C4000i-B

- 50 -
3.3 DETAILS OF CHECKING

3.3.1 Power Supply Checking

3.3.1.1 Checking the power supply

Check whether the power supply satisfies the following specifications:
200VAC +10%, -15%, 50/60Hz 1Hz, 3
or 220VAC +10%, -15%, 60Hz1Hz, 3

3.3.1.2 Phase rotation

Connect input terminals L1, L2, and L3 to R, S, and T of the phase
rotation sensor, respectively, and check that the disk of the phase
rotation sensor turns clockwise.
Input terminal
L1 L2 L3 G (Class 1 Ground )
Phase rotation sensor
T
S
R

Fig.3.3.1.2 Phase rotation

3.3.1.3 Setting the frequency of the power supply of the hour meter

Set the frequency of the power supply of the hour meter to the
frequency of the input power supply.

3.3.1.4 Measurement of voltage of DC power supply unit

Check that the DC voltages output from the INTERFACE PCB and
stabilized power supply unit are within their allowable ranges.

(1) Interface PCB : See Fig.3.3.1.4(a).
Specification : A16B-2100-0143
Rated output voltage
Terminal
name
Rated
voltage
Voltage error
allowance
Application
5V 5V 5% Logic circuit
+24V +24V 10% Input, output signal
+15V +15V 5% Analog circuit
-15V -15V 5% Analog circuit
Fuse : FU3 :A60L-0001-0175#3.2 For +5V(3.2A)
- 51 -
Fuse

Fig.3.3.1.4(a) Interface PCB

(2) 24V power supply unit : See Fig.3.3.1.4(b).
This unit supplies +24 V to the Interface PCB.
Specification : A20B-1005-0124
Fuse : FU :A60L-0001-0175#3.2 3.2A (2 pieces are used.)

Fuse

Fig.3.3.1.4(b) 24V power supply

- 52 -
3.3.1.5 Checking the jumper pins

Jumper pin Setting
JD1
Enables communication with the CNC via a
metal cable
(When connector JD1B is used for connection)
LINK1
COP
Enables communication with the CNC via an
optical fiber cable
(When connector COP1 is used for connection)
1-2
When pulse output is specified using external
signals (EXTP and EXTN) with CN5 SH2
2-3 Normal setting
1
Gas pressure monitor circuit with a gain of 1
(C2000i-B, C4000i-B) PRG
5 Gas pressure monitor circuit with a gain of 5
NC Thermal relay contact a (C2000i-B, C4000i-B)
SFA1,SFA2
NO Thermal relay contact b

3.3.1.6 Checking the Interface PCB signals

The following table provides reference information for checking
signals on the Interface PCB:
Signal name Signal function
COR Voltage to operate the laser power supply 0 to 5V
COR1 COR6
Voltage to operate each laser power supply 0 to 5V
(COR=COR1==COR6)
GPC1 Specification of pressure inside discharge tube 0 to 13V
MON1
Sampling output of monitored laser power supply currents
and voltages.
Data is output in the order: pressure, voltage (No. 1);
pressure, current (No. 1); pressure, voltage (No. 2); and
so on.
LPW1 Monitoring of laser output power 0 to 10V
LTP1
Monitoring of pressure inside discharge tube 0 to 9V
Monitored values are clamped to 9V.
PAN1
Sampling outputs of monitored laser outputs and pressure
values inside discharge tube are output alternately.

- 53 -
3.3.2 External Laser Gas Piping Leakage Check (Clamp Test)

When you have installed or modified laser gas piping, conduct a
clamp test that checks for any leakage by sealing laser gas inside the
piping and observing the pressure change after a specified period of
time.
(1) Measurement
Measure and record the gas pressure as described below.
For recording measured data, use the external leakage record
table presented in Appendix H.
(a) Stop the oscillator. At least five minutes after purging is
completed, turn the secondary pressure adjustment handle
of the regulator in the pressure-reducing direction to
completely close the adjustment nozzle, then close the main
plug of the gas cylinder.
(b) Record the primary pressure (P
1S
), secondary pressure (P
2S
),
and start time (t
S
) of the regulator connected to the cylinder.
(c) When about eight hours have passed, record the primary
pressure (P
1E
), secondary pressure (P
2E
), and end time (t
E
) of
the regulator.
(d) Open the main plug of the gas cylinder
(Note)
, and measure
and record the primary pressure (P
1ST
) of the regulator. (The
temperature-corrected primary pressure is measured.)

NOTE
When opening the main plug of the gas cylinder,
you should stand at an oblique position to the
regulator. Never stand just in front of the pressure
gauge. If significant leakage is present, opening the
main plug causes an abrupt pressure to be applied
to the regulator, which can damage the regulator.

(2) Determination
Calculate the change ratio from measured values by using the
equation below to determine the leakage state.
(a) Primary pressure change ratio
(P
1ST
- P
1E
) 8 hours 100
Primary pressure change ratio=
P
1ST

(t
E
- t
S
) hours
If the primary pressure change ratio is 5% or less, no
leakage is assumed on the primary side.
(b) Secondary pressure change ratio
(P
2S
- P
2E
) 8 hours 100
Secondary pressure change ratio=
P
2S

(t
E
- t
S
) hours
If the secondary pressure change ratio is not greater than the
following value, no leakage is assumed on the secondary
side:
10% when a polyethylene tube E series is used for piping
6% when a metallic pipe such as a stainless pipe is used
for piping
- 54 -
3.3.3 Checking Cooling Water

(1) Turn off the main circuit breaker of the oscillator and the power
supply.
(2) Check that the water piping is connected to the water inlet (IN)
and outlet (OUT) of the oscillator in the correct direction.
(3) Completely open the water piping of the outlet to let water flow
without any obstacle. Move the chiller unit manually to let
cooling water to flow at a rate of about 10 liters per minute.
In this condition, check for water leakage in the following:
Water inlet (IN) and outlet (OUT) of the oscillator
Water piping (tubes, fittings, and so on) inside the oscillator
(4) If the above checking shows that there is no water leakage, feed
cooling water to the oscillator at the specified flow rate. Set the
output pressure of the cooling water circulating unit to 0.5 MPa
(5 bar) or less.
In this condition, check for water leakage in the following:
Water inlet (IN) and outlet (OUT) of the oscillator
Water piping (tubes, fittings, and so on) inside the oscillator
MODEL Rated flow rate
C2000i-B 75 liters/min
C4000i-B 160 liters/min

(5) Stop the chiller unit, and change the operation mode from
manual (local) to automatic (remote).
(6) If there is no water leakage, turn on the oscillator start switch.
Check that the start command from the CNC to cooling water
circulating unit causes the cooling water circulating unit to
operate as specified by the command. If the flow rate is
insufficient, alarm No. 4072 (shortage of cooling water) is issued
soon after the chiller unit is started. If the alarm is issued, check
the pipe diameter, piping route, and the circulating unit
installation position, and take measures to reduce the pressure
loss.
(7) Check that the cooling temperature of cooling water is set to 20
to 30C.
Normally, 27C is recommended.

3.3.4 Check for Leakage within the Oscillator

(1) Using the automatic leakage check function
Usually, use this method to check for leakage.
For how to conduct this check see Section 9.3.

- 55 -
3.3.5 Locating Internal Leakage

When gas leakage is present inside the oscillator, use a helium leakage
detector or liquid leakage checker to locate the leakage.

CAUTION
Because the turbo blower is not designed to
withstand pressure increase, do not increase
pressure beyond 0.08 MPa. Applying a high
pressure may damage the connector, oil gage, and
so on. To prevent the connector from being
damaged, apply pressure with the cable left
attached to the turbo blower.

(1) Turn on the power to the oscillator, then open the valve of the
gas cylinder.
(2) Set the secondary pressure of the regulator of the laser gas
cylinder to 0.05 MPa.
(3) To make the pressure in the oscillator higher than the
atmospheric pressure, set the atmospheric pressure switch
(PWS2) to 0.02MPa. (See Section 7.10.)
(4) Turn on the oscillator start switch, wait for 2 to 3 seconds, then
turn off the switch, and wait till purging.
(5) Apply the helium leakage detector to a possibly faulty position.
If there is a leakage, the checker indicates it by display or sound.
When using the liquid leakage checker, drip the liquid on a
possibly faulty position. If gas leaks, bubbles appear, so you can
determine the location of a leakage. After using the liquid
leakage checker, wipe off the checker, and clean the position
with alcohol.

NOTE
The helium leakage detector detects helium in the
laser gas. If ambient air flows, detection becomes
difficult. So, checking should be made in a nearly
no-wind condition.

(6) After completing the check, reset the value set in (3) above to the
original setting.

- 56 -
3.3.6 Discharge Aging

If the oscillator is left unused for a long time (three days or more), or
if the laser gas circulating system has been opened to the atmosphere
(for example, to clean the mirrors or replace gas system components),
aging is required. This involves warming up the discharge tubes and
circulating gas by performing internal discharge to output absorbent
contaminants as gas. If the laser gas circulating system has been
opened to the atmosphere, perform a leakage check before attempting
aging.

(1) When the laser gas circulating system has been opened to the
atmosphere
When the laser gas circulating system has been opened to the
atmosphere, perform discharge aging by using the automatic
aging function.
(a) Set bit 6 (EGE) of parameter No. 15008 to 1 to enable the
automatic aging function.
(b) Check and set the following parameters for Normal mode or
High power mode, and for Fine mode:
Parameter No.15320,29060 Laser output at power
correction
Parameter No.15321,29061 Oscillating frequency
command at power correction
Parameter No.15322,29062 Pulse duty command at power
correction
Parameter No.15323,29063 Correction time at power
correction
Parameter No.15324,29064 Gas pressure setting at power
correction (50 Hz)
Parameter No.15325,29065 Gas pressure setting at power
correction (60 Hz)
Parameter No.15326,29066 Laser output at aging
Parameter No.15327,29067 Oscillating frequency
command at aging
Parameter No.15328,29068 Pulse duty command at aging
Parameter No.15329,29069 Time per operation at aging
Parameter No.15330,29070 Gas pressure setting at aging
(50 Hz)
Parameter No.15331,29071 Gas pressure setting at aging
(60 Hz)

(c) Turn on the oscillator start switch (RUN) to enter the
discharge ready (LRDY) state. In this state, set the number
of aging operations in parameter No. 15334, and turn on the
discharge start switch (HVON). Aging is then performed as
many times as specified.
(d) After completing aging, the power compensation coefficient
is obtained, and the oscillation ready state (LSTR) is entered,
which makes the system ready for processing.
- 57 -
(2) When the oscillator is left unused for a long time
When the oscillator is started with the automatic aging function,
the function determines the unused period and performs aging as
many times as required.
(a) Set bit 6 (EGE) of parameter No. 15008 to 1 to enable the
(b) Turn on the oscillator start switch.
(c) The automatic aging function operates to perform aging.
(d) After aging is performed as many times as required, the
oscillation ready state (LSTR) is entered, and automatic
aging ends. (For details, see Section 9.2.)

3.3.7 Oscillation Characteristics

(1) Modify the parameters listed below.
Parameter No.15000#4 1 (enables power correction)
(2) Turn on the oscillator start switch to place the oscillator in the
discharge state.
(3) When the oscillator starts discharge, power correction is
performed, and the rated output is specified automatically.
(4) After power correction ends, record the compensation coefficient
(parameter No. 15204).
(5) Three minutes after power correction ends, record the base
discharge output, discharge voltage (RFV), and current (RFI).
(6) Specify the rated output, and record the discharge voltage (RFV)
and current (RFI).

Compare the values measured in (4), (5), and (6) above with the
values on the data sheets. If the discharge voltage (RFV) is high,
check the external laser gas piping and laser gas composition, or
perform discharge aging.

- 58 -
3.3.8 Discharge Margin Check

Parameter No.15000#4 0 (disable power correction)
Parameter No.15223,29022 Setting value -60 (bias command
value)
(2) After the setting of parameter No. 15223, No.29022 are changed,
warning message "Parameter was changed" is displayed when the
LRDY state is entered. Release the message by a reset operation.
(3) Remove the top panel of the oscillator so that the discharge tube
and trigger electrode can be checked.
discharge state.
(5) Check that discharge of the trigger electrode does not disappear
in 30 minutes after start of discharge.
(6) After checking ends, reset the parameters set in (1) to their
original settings.

If discharge disappears in (5), check the external laser gas piping and
laser gas composition, or perform discharge aging.

- 59 -
3.3.9 Power Supply Margin Check (Pulse Check)

Parameter No.15000#2 1 (Use of assist gas is disabled at
beam-on.)
Parameter No.15000#3 1 (Internal discharge is enabled in
manual mode.)
Parameter No.15008#6 0 (Automatic aging is disabled.)
Parameter No.15002#0 1 (Internal discharge is enabled in
automatic operation mode.)
Parameter No.15000#4 0 (Power correction is disabled.)
Parameter No.15208 0 (Output feedback is turned off.)
Parameter No.15209 0 (Output feedback is turned off.)
Parameter No.15210, No.29049
Value in Parameter No.15207
(maximum output power)
discharge state.
(3) Set the manual mode, and perform internal discharge operation
under the following conditions.
Output = Value in Parameter No.15207, No.29048
Duty = 5%
Frequency = 5Hz
(4) Check that no alarm occurs for 30 minutes after beam-on.
If an alarm is issued, check the external laser gas piping and laser
gas composition, or perform discharge aging.
(5) Upon the completion of the check, restore the parameters
modified in step (1) to their original values.

3.3.10 Beam Mode Check

CAUTION
1 A beam mode deviation may occur depending on
the transportation method and storage condition.
When installing the oscillator, be sure to perform
this step. A mode deviation does not mean a
failure. Perform alignment by following the
procedure described in Subsection 8.3.2.
2 KEEP OUT on the area where the laser beam is
irradiated. Make the KEEP OUT area with the
plastic chain, the stand and KEEP OUT sign.
There are not the flammable thing or the explosive
around the area where the laser beam is irradiated.
Set the table for mode taken or the power probe
table, just behind them, put the mask for the laser
beam. Put on the iron plate or the firebrick behind
the acrylic resin. Fix the blower or power probe with
the magnetic stand.
- 60 -

Iron plate
Firebrick
Acrylic resin or
Power probe
Blower
Bend mirror
Laser processing
machine

(1) Remove the guide pipe or the first bend mirror located between
the exit of the laser beam of the oscillator and machine.
(2) Start the oscillator.
(3) Output a laser beam by using programmed commands with the
output set to the rated output, a duty cycle set to 100%, and the
output duration set to 0.1 second. At this time, blow air with a
drier or the like.

CAUTION
1 First, check the beam position. Laser light, if
allowed to penetrate the acrylic material because of
incorrect operation, is very dangerous. The paint of
the machine is also likely to be damaged. So,
attach as feel plate, then an acrylic plate, about
30cm 30cm 3mm in size.
If a guide laser is used, confirm that CO
2
gas laser
light is directed to the same spot as the guide laser.
2 Ventilate the optical path. Acrylic gas staying
around the optical path can increase the mode
diameter or cause shape deformation, which
prevents correct mode checking.
3 Close the shutter when working in the vicinity of the
accessible Class IV laser path. And, confirm that
there are no persons in the vicinity of the
accessible Class IV laser path before starting the
Class IV laser during the Alignment Task when the
Class IV laser path is accessible.

- 61 -
(4) Next, attach an acrylic block (with a thickness of 30 mm or
more) to the position indicated by the white acrylic mark. Ensure
that the surface of the acrylic block is perpendicular to the
direction of CO
2
gas laser light. Adjusting the block such that the
guide laser is reflected from the acrylic block surface and returns
to the beam outlet can check the perpendicularity of the acrylic
block surface.
(5) Set the conditions of the beam output program as follows:
Output = Rated output
Duty = 100 %
Duration = See the following table.
Perform internal discharge with a rated output specified. If actual
output Pa differs from the specified output, mode shape
comparison becomes difficult. So, modify the command so that
the output difference is suppressed to within 2%.
Example
With the C4000i-B, setting is made to output 4080 W to
3920 W.
Model Duration
C2000i-B 4 sec
C4000i-B 2.5 sec

(6) Direct the drier so that it blows air at 45 to the acrylic block,
then output the beam. If air is not provided correctly, the acrylic
vapor will catch fire. If fire occurs, the mode depth may become
shortened.
The following two types of mode patterns are collected:
Cold mode:
A pattern is obtained after the oscillator is left in the base
discharge state for at least five minutes to let the resonator
cool down.
Hot mode:
A pattern is obtained immediately after internal discharge
with the rated output is performed for two to three minutes.
(7) Record the directions (X direction, Y direction), output
conditions, and drier blowing direction for the burn pattern.
From the hot mode pattern, check for output coupler deformation
and dirt in the internal mirrors.
If there is a problem, align the resonator of the oscillator, or clean
or replace mirrors by following the procedure described in
Section 8.3.2.
- 62 -
3.4 PREPARATION PRIOR TO SHIPMENT

For shipment and transportation, follow the steps explained below.
(1) Disconnect all CNC connecting cables.
(2) Disconnect the power cable and ground cable. Cover the cable
inlet holes with tape or the like.
(3) Remove the laser gas pipes, and attach blanking plugs to the
pipes to prevent dust from entering.
(4) Detach the cooling water piping, and remove the water. For
details of how to remove the cooling water, see Subsection 3.4.2.

CAUTION
Any residual cooling water may result in corrosion
or clogging; furthermore, if any residual cooling
water freezes, a pipe or the oscillator itself may be
damaged.

(5) Install the resonator clamp and shutter clamp, and fit a blanking
cap onto the beam outlet.
(6) Check the security of all connectors and printed circuit boards.
Install protective covers.
(7) Check that all removed mounting screws are reinstalled.
(8) Install the panels to the cabinet.

- 63 -
3.4.1 Packing for Transportation

Prior to shipment and transportation, the packing and checking
operations described below must be performed.
(1) External dimensions : See the Appendix A.
(2) Weight of product :
Model Weight
C2000i-B Approx. 700kg
C4000i-B Approx. 900kg

(3) Allowable impact : 2G
Note that the maximum impact in transit depends greatly on the
means of transport employed, as indicated in Table 3.4.1.

Table 3.4.1 Maximum impacts according to means of transport
Means of transport

Airplane Ship Railroad Truck
Forwards/
backwards
6G 15G 12G 5G
Left/right 2.5G 12G 5G 4G
Direction
Up/down 2.5G 12G 5G 4G

(4) Notes on transportation
When lifting the oscillator for transportation, pass wires through
the four eyebolts, and hook up the oscillator by crane.

- 64 -
3.4.2 Removing Cooling Water

Remove cooling water according to the procedure below.
(1) Open the cooling water inlet (IN) and outlet (OUT), and leave
both open.
(2) Once the cooling water has stopped draining, connect a
compressed air hose to the cooling water inlet (IN). Check that
the cooling water outlet is open.
(3) Gradually supply compressed air, allowing the pressure to build
up to 0.1 to 0.2 MPa. Never apply full pressure suddenly.
Continue to supply compressed air at this pressure for about 5
minutes.
(4) Increase the compressed air pressure to 0.3 to 0.4 MPa, and
supply air until water inside the white water piping of the
oscillator is completely removed. It takes about 10 minutes to
remove water.
For C4000i-B close the orange water removal valve of the water
distributor unit, and further supply compressed air for five
minutes.
(5) Exchange the cooling water inlet (IN) and outlet (OUT) and
supply compressed air to execute steps (3) and (4).
(6) When the removal of cooling water is completed, detach the
compressed air hose, and attach the blanking plugs (provided
with the oscillator at shipment) to the PT plugs of the cooling
water inlet (IN) and outlet (OUT).

CAUTION
Also, the cooling water should be removed from the
oscillator whenever the oscillator is to be stored
over the winter, when there is a danger of the
cooling water freezing. The frozen cooling water
may destroy the water pipes or heat exchangers.

Flowmeter sensor
control
Valve for
removing water
LED
Valve for removing
pressure

Fig.3.4.2 External view of the water distributor unit
B-70445EN/01 4.MAINTENANCE
- 65 -
4 MAINTENANCE

In FANUC LASER C2000i/C4000i-MODEL B, periodic inspection
items have been reduced, and adjustments have been made easy. To
keep the oscillator in a satisfactory operating condition over a long
period, however, it is necessary to carry out periodic maintenance
(including daily maintenance) described in this chapter. The
oscillator is designed to maintain the same performance and reliability
as it has when it is installed, provided that maintenance is carried out
as prescribed.

Chapter 4, MAINTENANCE consists of the following contents:

4.1 DAILY INSPECTION................................................................66
4.2 PERIODIC MAINTENANCE....................................................67
4.3 DETAILS OF MAINTENANCE ...............................................69
4.4 MAINTENANCE PARTS..........................................................75

4.MAINTENANCE B-70445EN/01
- 66 -
4.1 DAILY INSPECTION

Table 4.1 lists daily inspection items. Inspect the FANUC LASER
C2000i/C4000i -MODEL B according to this table. When parts
(including oil) have been used for a prescribed period, replace them
quickly.

Table 4.1 Daily inspection items for FANUC LASER C2000i/C4000i-MODEL B
Item Period Content and instruction
1 Residual laser gas Daily
Check to see if the primary pressure is 1.0 MPa or less as measured at the
regulator on the laser gas cylinder. If the primary pressure is 1.0 MPa or lower,
replace the gas cylinder. See Subsection 3.2.1 for the gas specifications.
2 Exhaust pump oil Weekly
Make sure that the oil level is between L (minimum) and H (maximum). Usually,
oil is supplied until the oil level is in the middle between L and H. If the oil level
is below L, supply oil according to Subsection 4.3.2. Be sure to replace the oil
periodically, every 6 months of use or every 1500 hours of operation, whichever
is earlier.
3 Exhaust pump oil leak Weekly
Make sure that no oil is leaking from the vane pump main body, drain cock and
their periphery. If oil is leaking, immediately replace the exhaust filter according
to Section 4.3.3, because it is likely to have been clogged. Be sure to replace
the exhaust filter periodically, every one year of use or every 3000 hours of
operation, whichever is earlier.
4 Turbo blower oil Weekly
Make sure that the oil level is between L (minimum) and H (maximum)
according to Fig. 4.3.1. Usually , oil is suppled until the oil level is at 3/4 above
L. If the oil level is below L, supply oil according to Subsection 4.3.1. Be sure to
replace the oil periodically, every 4 months of use or 1000 hours of operation,
whichever is earlier.
5 Turbo blower oil leak Weekly
Make sure that no oil is leaking from the turbo blower main body, oil inlet, cock,
and their periphery. If oil is leaking, locate the leak. If oil leaks for any reason
other than a cock being open, call FANUC.
6 Laser output Weekly
1. Check to see if the laser output measured at the outlet of the short optical
path oscillator is 5% or more lower than the specified output. If this is the
case, clean or replace the optical components in the external reflection unit.
2. If the laser output decreases within the oscillator, alarm message No. 4085 is
issued. If this message appears, clean or replace the mirror in the oscillator
quickly.
Daily Make sure that the chiller discharge output is 0.5 MPa or less.
7 Cooling water
Weekly
Check the quality of cooling water circulating in the chiller. If the water is
colored badly, replace it completely. Be sure to replace the cooling water
every two months. Adding an anticorrosive to cooling water can decrease the
replacement frequency. See Subsection 3.2.2.4 for descriptions about the
anticorrosive.

- 67 -
4.2 PERIODIC MAINTENANCE

The laser oscillator contains consumables that must be replaced
periodically. Table 4.2(a) or (b) lists such consumables and the related
periodic maintenance work.
Perform periodic maintenance as well as daily inspection described in
Section 4.1 by using the listed periods as guidelines.
Note, however, that the replacement and maintenance intervals are not
guaranteed values.
Table 4.2(a) Periodic maintenance items and periods
Item
Period of
maintenance
(operation hour)
Remarks
1 Replacement of output coupler 3,000 to 4,000 hours Replace when the quality declines
2 Replacement of rear mirror 3,000 to 4,000 hours Replace when the quality declines
3 Replacement of folding mirror 3,000 to 4,000 hours Replace when the quality declines
4 Changing oil for exhaust pump 1,500 hours Change when the exhaust speed declines
5 Replacement of filter for exhaust pump 3,000 hours Replace when the exhaust speed declines
6 Replacement of exhaust pump 10,000 hours Replace when the exhaust speed declines
7 Changing oil for turbo blower 1,000 hours Change when properties of oil change
8
Replacement of turbo blower
(overhaul)
12,000 hours
Replace when the ability declines, the dust
comes out, or there is an abnormal sound
9 Replacement of filter for gas controller 12,000 hours Replace when the filter is choked up
10
Replacement of O-ring for discharge
tube
6,000 hours Replace when the gas leakage occurs
11 Replacement of O-ring for gas pipe 6,000 hours Replace when the gas leakage occurs
12 Cleaning of discharge tube 10,000 hours
Clean when the quartz powder adheres to the
mirrors
13 Replacement of discharge tube 30,000 hours Replace when the quality declines
14 Changing of cooling water 1,500 hours Change when cooling water changes in quality
15 Cleaning of cooling water system 3,000 hours Clean when cooling water system is choked up
16 Replacement of warning lamp 3,000 hours Replace when the warning lamp doesn't light up
17
Replacement of photo catalytic
element
10,000 hours Replace when the quality declines
18 Replacement of cooling fan 30,000 hours Under the influence of the environment

NOTE
1 Turbo blower is the precision machine, featuring super high speed of 60,000 min
-1
.
When the quality of the turbo blower oil is getting bad with long time running, it is
possible that the turbo blower breaks down. So please absolutely change the oil
with 1,000 hours or less.
2 There is the laser maintenance screen to manage the periodic maintenance. So
please use this function.

- 68 -
Model C2000i-B C4000i-B
Cleaning of output and rear mirrors only None

1,500 to 2,000
Cleaning of all internal mirrors 3,000 to 4,000

NOTE
1 If the mirror is not change, the mirror cleaning
periods are 3,000 to 4,000 hours at least.
2 The mirror cleaning periods are not guaranteed
values. They are standard values in the field.

- 69 -
4.3 DETAILS OF MAINTENANCE

When opening the panels and doors during maintenance, keep the
power turned off. Before replacing oil, be sure to check that purging is
completed.

Fig.4.3(a) Oil gauge of turbo blower and exhaust pump (C2000i-B)

Fig.4.3(b) Oil gauge of turbo blower and exhaust pump (C4000i-B)

- 70 -
4.3.1 Turbo Blower Oil

4.3.1.1 Check method

Check the amount of oil in the turbo blower while referring to the
figure below. The oil level should be between graduations H and L.
This check should be made when the oscillator is at a rest. When the
turbo blower is running, it is impossible to check the amount of oil
correctly.

Fig.4.3.1(a) Turbo blower oil check points Fig.4.3.1(b) Oil gauge

- 71 -
4.3.1.2 Replenishment method

(1) Remove the hexagonal-head screw from the oil inlet with a 17
mm wrench. Be careful not to lose the O-ring on the screw.
Before supplying turbo oil, stop the oscillator according to the
correct procedure and turn off the power. If the oscillator is not
stopped by the correct procedure, the pressure in the turbo
blower becomes negative. Opening the oil inlet under such a
condition lets a large amount of air get in the turbo blower. An
air flow caused this way can bring oil mist into the oscillator,
possibly resulting in the optical mirror getting dirty.
Removing the inner cap of oil bottle, cut the top of the nozzle
about 5mm. Attach the new tube for suppling on the nozzle.
Then insert it into oil inlet, and supply the oil. Be careful not to
allow dust to enter through the inlet.
Supply oil until the oil reaches the 3/4 level relative to the L
indication when viewed through the oil window. Note that both
too little and too much oil can result in mechanical failure.
(3) Clean the oil inlet, hexagonal-head screw of the oil inlet, and
O-ring by wiping with a clean cloth or paper. Ensure that these
parts are completely free of dust. If the oil is contaminated with
dust, the turbo blower may fail. Set the O-ring in the groove
around the hexagonal-head screw of the oil inlet, then tighten the
hexagonal-head screw. Note that if the O-ring is not set correctly,
or if the hexagonal-head screw is not tightened fully, the turbo
blower may not be air-tight.
(4) If oil has spilled over, wipe it up. Otherwise, the peripheral
equipment may be affected adversely.
(5) If there is oil left over, put the inner lid back on the bottle, and
keep the bottle in a dark, cool place.

4.3.1.3 Replacement method

(1) Get a container for oil drain on hand, and put the tip of the drain
tube into the container.
(2) Turn the oil drain cock through 90 degrees clockwise, and the oil
will start draining.
(3) After all the oil has been drained, close the oil drain cock by
setting it back in the initial place.
(4) Supply oil by following the same procedure as for replenishment.

NOTE
Execute discharge aging after changing turbo
blower oil.

- 72 -
4.3.1.4 Storage and expiration date

Use the turbo blower within expiration date which is showed on
sticker. Use a clean supply tube when you pour the oil and be careful
noto put dust in turbo blower. Keep away from direct sunlight and
keep in a cool, dry and well-ventilated place. Keep as much as
possible in a clean environment.

4.3.1(c) Expiration date 4.3.1(d) Explanation of using turbo blower oil

- 73 -
4.3.2 Exhaust Pump Oil

4.3.2.1 Check method

Watch the oil gauge, and check that the oil level is between
graduations L and H. Also check whether the oil is dark. If the oil
level is below L, add oil to the turbo blower or replace the oil in it. If
the oil level is above H, drain until the oil level becomes below H.
The exhaust of the turbo blower contains oil mist. The exhaust pump
will capture oil mist, and the amount of exhaust pump oil increases
with time. When the oil has increased too much, the filter gets
immersed in the oil, possibly causing white mist to come out from the
pump, or oil to leak. Furthermore, the exhaust capacity may get
lowered, or the pump may be damaged.

Fig.4.3.2(a) Turbo blower oil check points Fig.4.3.2(b) Oil gauge


(1) Stop the oscillator, and turn off the power.
(2) Remove the maintenance panel.
(3) Remove the oil inlet plug. There is an O-ring on it. Be careful
not to damage it. A missing or damaged O-ring can lower the
exhaust capacity of the pump.
(4) Insert the drain tube into a drain oil pot.
(5) Fully open the drain cock.
(6) After the oil has been drained up, close the cock.
(7) Supply 1.8 liters of new oil through the oil inlet, while watching
the oil gauge.
(8) Attach the oil inlet plug.
(9) Put the maintenance panel back in place, and turn on the power.

- 74 -
4.3.3 Exhaust Pump Filter


Replace the filter every 3000 hours, or when the exhaust power has
degraded. If the filter gets clogged, the pump output becomes low. Fig.
4.3.3 shows where the filter of a exhaust pump is located.
(1) Stop the oscillator, and turn off the power.
(2) Remove the maintenance panel.
(3) Remove the black screw button from the pump.
(4) Remove the filter cover and O-ring.
(5) Remove the spring and washer.
(6) Pull out the exhaust filter element.
(7) Orient a new exhaust filter element correctly, and reverse the
procedure from step 6 to step 3. (An upward arrow is indicated
on the front surface of the filter element.)

NOTE
The exhaust filter element should be installed
securely. If it is installed incorrectly, or the O-ring is
not inserted accurately, oil mist (white) will come
out from the exhaust outlet.

(8) Put the maintenance panel back in place, and turn on the power.

Nut
O-ring
Cartridge
cover
Spring
with washer
Oil level gauge
Stopper
Exhaust filter cartridge

Fig. 4.3.3 Exchange of exhaust pump filter

- 75 -
4.4 MAINTENANCE PARTS

The maintenance parts are listed below. Refer to the following tables
for maintenance unit and parts specification information.

CONSUMABLES
Quantity
No. Item Specifications
C2000i-B C4000i-B
1 A04B-0813-D200 1 0
2
Output coupler
A04B-0815-D201 0 1
3 A04B-0813-D201 1 0
4
Rear mirror
A04B-0818-D201 0 1
5 Folding mirror A04B-0817-D202 3 6
6 Zero shift mirror(l/0) A98L-0001-0616/C (2) (1)
7 Retarder (l/4) A98L-0001-0617/C 0 (1)
8 A98L-0001-0619/2030 2 2
9 JB-OR4D-P34 2 2
10 JB-OR4D-P38 2 2
11
O-ring for mirror holder
JB-OR4D-P41 2 2
12 O-ring for folding mirror JB-OR4D-G55 3 6
13 A290-4533-T001
2
DT1,DT4
0
14
Discharge tube
A290-4544-T001
2
DT2,DT3
8
15 A98L-0003-0004/P26S 8 16
16
O-ring for discharge tube
A98L-0003-0737/P26 (8) (16)
17 Trigger electorode A98L-0005-0187 4 8
18 O ring for Trigger electorode JB-OR4D-P10 4 8
19 Bolt for Trigger electorode A98l-0004-0801/4-15 8 16
20 A290-4523-V170 2 0
21
Photo catalytic element
A290-4540-V170 0 2
22
O ring for Photo
Catalytic element
JB-OR4D-G45 2 2
23 Exhaust pump A90L-0001-0425 1 1
24 Exhaust pump filter A98L-0001-0911 1 1
25 Exhaust pump oil A98L-0040-0093/1.0L6 (3.6L) (3.6L)
26 Nut for Exhaust pump A90L-0001-0425/71244351 1 1
27
Cartridge cover
for Exhaust pump
A90L-0001-0425/71231470 1 1
28
O ring
for Exhaust pump
A90L-0001-0425/71237142 1 1
29
Spring with washer
for Exhaust pump
A90L-0001-0425/71233500 1 1
30 Stopper for Exhaust pump A90L-0001-0425/71066848 1 1
31
Oil level gauge
for Exhaust pump
A90L-0001-0425/71231020 1 1
32 A04B-0800-K328/1 1 1
33
Turbo blower oil
A04B-0800-K328/3 (1/3) (1/3)
34 O-ring for TB oil inlet JB-OR4D-P10A 1 1
35 Dew sensor unit A04B-0800-D005 1 1
36 Dew sensor A91L-0001-0228 1 1
- 76 -
Quantity
C2000i-B C4000i-B
37 A57L-0001-0095/B080 1 1
38
Temperature switch
for absorber
A57L-0001-0095/B090 1 1
39
Shutter position
detect switch unit
A04B-0815-D002 1 1
40
Shutter position
detect switch
A57L-0001-0119/X1R5F1 2 2
41 Shutter switch unit A04B-0810-D010 1 1
42 A04B-0813-D014 1 0
43
Shutter thermal switch unit
A04B-0815-D021 0 1
44 A57L-0001-0057/080 1 0
45
Thermal switch
A57L-0001-0057/090 0 1
46 Photo sensor A57L-0001-0091 2 2
47 A91L-0001-0151/B 1 0
48
Water flow switch
A91L-0001-0214/180 0 1
49 Rotor for Water flow switch A91L-0001-0151/P-1 1 1
50
Rotor cap
for Water flow switch
A91L-0001-0151/P-2 1 1
51
Rotor pin
For Water flow switch
A91L-0001-0151/P-3 1 1
52 Low temperature sensor unit A04B-0800-D004 1 1
53 Oxygen sensor unit A04B-0800-C342 1 1
54 A55L-0001-0225/01CBS (2) (2)
55
Micro switch
for beam path unit A04B-0800-D006 (1) (1)
56 Diode laser unit A04B-0811-D401 1 1
57 A90L-0001-0455 1 0
58
Fan for shutter
A90L-0001-0335/B 0 1
59 Fan A90L-0001-0396 16 37
60 Hour meter A91L-0001-0219 1 1
61 A60L-0001-0460/N150JH1
1
QF1
0
62
Auto breaker
A60L-0001-0460/N225JH1 0
1
QF1
63 A60L-0001-0423/Q050
2
QF2,3
0
64 A60L-0001-0423/Q030
1
QF4
0
65 A60L-0001-0423/N010
2
QF5,6
0
66 A60L-0001-0464/A040 0
4
QF2-5
67 A60L-0001-0464/A010 0
1
QF6
68 A60L-0001-0464/B010 0
1
QF7
69
Breaker
A60L-0001-0464/A030 0
1
QF8
70 Motor starter A60L-0001-0389/HT
1
QF7
1
QF9
71 A58L-0001-0539/SN38B
3
KM1-3
0
72
Magnetic contactor
A58L-0001-0540/MS10BB5
1
KM5
0
- 77 -
Quantity
C2000i-B C4000i-B
73 A58L-0001-0540/SN10BB
1
KM4
0
74 A58L-0001-0539/SN38B
3
KM1-3
5
KM1-5
75 A58L-0001-0539/BSN38B 0
5
KM1-4,6
76
Magnetic contactor
A58L-0001-0540/BMS10BB5 0
1
KM5
77 Assistance contactor A58L-0001-0539/BAX440 0
1
KM6
78 Transformer A44L-0001-0161 1 1
79 A58L-0001-0479/321-T01 1 0
80
Safety box
A58L-0001-0479/301 0 1
81 Surge absorber A74L-0001-0128/L 1 1
82 A70L-0001-0064/10 1 0
83
Noise filter
A70L-0001-0054 1 1
84 A97L-0200-0649/2-0.5-S 1 0
85
Gas filter
A97L-0203-0201/A 0 1
86 Nylon ferrule 1/4 inches A98L-0004-0348/2-N 16 0
89 Brass ferrule 1/4 inches A98L-0004-0348/2-B 0 24
92
Water coupler for Laser
Power supply unit
A97L-0201-0927/2P-N10 4 8
93
Water coupler for Laser
Power supply unit
A97L-0201-0927/2S-N10 4 8
94 Shutter mirror A290-4516-X204 1 1
95
Shutter mirror
for guide laser
A98L-0001-0708 1 1
96 A97L-0201-0556/B 1 0
97
Heat exchanger (out)
A97L-0201-0691/B 0 1
98 A97L-0201-0828 1 0
99
Heat exchanger (in)
A97L-0201-0439/B 0 1
100 A97L-0200-0849 2 4
101
Heat exchanger
for cabinet A97L-0201-0588 2 4
102 A97L-0200-0872/E 1 0
103
Beam absorber
A97L-0201-0972 0 1
104 Warning light A49L-0001-0069 1 1
105 RF FET PCB1 A20B-1007-0140 2 4
106 RF FET PCB2 A20B-1007-0150 2 4
107 Stepup Trans. PCB A20B-1008-0150 2 4
108 A50L-2001-0342 2 4
109
Diode module
A50L-2001-0439 16 32
110 Fan for laser PSU A90L-0001-0396 4 8
111 Fan for matching box A90L-0001-0396/T 2 4
112 Mirror cleaning liquid A98L-0001-0857/1 1 1
113 Inverter A90L-0001-0500/8LF 1 1
114 Fan for inverter A90L-0001-0500/8LF-FAN 1 1
- 78 -
REPAIRABLE PARTS
Quantity
C2000i-B C4000i-B
1 A14B-0082-B211 2 0
2
Laser PSU unit
A14B-0082-B212 0 4
3 A14B-0082-B321 2 0
4
Matching box
A14B-0082-B322 0 4
5 IF PCB A16B-2100-0143 1 1
6 Intermediate PCB B A16B-1600-0364 1 1
7 Intermediate unit A04B-0815-C323 1 1
8 A16B-1600-0660 1 0
9
Input unit CTRL PCB
A16B-1600-0665 0 1
10 Turbo PCB A16B-1600-0670 1 1
11 24V PSU A20B-1005-0124 1 1
12 Power sensor unit A04B-0807-D001 1 1
13 A04B-0813-C411 1 0
14
Shutter unit
A04B-0815-C414 0 1
15 A04B-0800-C011 1 0
16
Turbo blower
A04B-0800-C015 0 1
17 Pressure CTRL unit A04B-0810-C403 1 0
18 Pressure sensor A91L-0001-0256/200 1 1
19 A04B-0815-D402 1 0
20
Control valve
A04B-0816-D402 0 1
21 Exhaust CTRL unit A04B-0807-C405 1 0
22
Charge unit
(Gas controller)
A04B-0815-D403 0 1
23
Exhaust unit
(Gas controller)
A04B-0815-D400 0 1
24
Sensor base
(Gas controller)
A290-4540-V050 0 1
25 A04B-0813-C420 1 0
26
Water distributor
A04B-0815-C420 0 1
27 A04B-0810-C451 1 0
28
Beam folding unit
A04B-0811-C451 0 1

B-70445EN/01 5.TROUBLESHOOTING
- 79 -
5 TROUBLESHOOTING

Chapter 1, TROUBLESHOOTING consists of the following
contents:

5.1 TROUBLESHOOTING PROCEDURE.....................................80
5.2 RESPONDING TO ALARM MESSAGES ON THE SCREEN81
ALM No.4061, ALM No.4062.................................................81
ALM No.4063 ..........................................................................82
ALM No.4065 ..........................................................................85
ALM No.4066 ..........................................................................86
ALM No.4067 ..........................................................................87
ALM No.4068 ..........................................................................88
ALM No.4069, ALM No.4070.................................................89
ALM No.4071, ALM No.4072.................................................90
ALM No.4073 ..........................................................................91
ALM No.4074, ALM No.4075.................................................92
ALM No.4076 ..........................................................................93
ALM No.4077 ..........................................................................94
ALM No.4078 ..........................................................................95
ALM No.4079, ALM No.4080.................................................96
ALM No.4081 ..........................................................................98
ALM No.4082 ..........................................................................99
ALM No.4085, ALM No.4087...............................................100
ALM No.4088 ........................................................................101
ALM No.4089, ALM No.4090, ALM No.4094.....................102
ALM No.4099 ........................................................................103
ALM No.4100 ........................................................................104
ALM No.4101 ........................................................................105
ALM No.4105 ........................................................................106
ALM No.4106 ........................................................................107
ALM No.4107, ALM No.4116, ALM No.4124.....................109
ALM No.4125, ALM No.4132...............................................110
5.3 MAJOR FAULTS.....................................................................111

5.TROUBLESHOOTING B-70445EN/01
- 80 -
5.1 TROUBLESHOOTING PROCEDURE

The troubleshooting procedure to be applied depends on the failure
occurrence status as indicated below. Perform checking according to
the items listed below.

(1) Action in response to alarm screen display (See Section 5.2.)
(2) Major faults
(a) Laser power supply unit alarm display (See Section 5.3.1.)
(b) The power cannot be turned off with the LCD/MDI power
switch. (See Section 5.3.2.)
(c) The power cannot be turned on with the LCD/MDI power
switch. (See Section 5.3.3.)
(d) The laser output level is low immediately after the power is
turned on. (See Section 5.3.4.)
(e) The laser output displayed on the LCD screen is unstable.
(See Section 5.3.5.)
(f) A cooling fan circuit breaker trips. (See Section 5.3.6.)
(g) The magnetic contactor for an exhaust pump causes thermal
trip. (See Section 5.3.7.)
(h) The main circuit breaker trips. (See Section 5.3.8.)
(i) Excessive laser gas consumption. (See Section 5.3.9.)
(j) An inverter related alarm is displayed. (See Section 5.3.10.)

CHECKING ON FAULTS

After identifying the following items, call the service center.
(1) General information on a fault
(a) Date and time of occurrence
(b) State of operation
(c) Timing of a fault (alarm)
(d) Alarm number
(e) How often the fault occurs

(2) Other information
(a) Oscillator and CNC unit names
(b) Oscillator serial number
(c) Machine tool builder name, machine type
(d) Software series and edition indicated on the LCD screen
when power is turned on
(e) Parameter settings;
Check the current parameter settings with the corresponding
values indicated on the unit, and report your finding to the
service center.

- 81 -
5.2 RESPONDING TO ALARM MESSAGES ON THE SCREEN

Alarm numbers, as well as DGN. No. and parameter No., are those of
the FS16i-L.
See the conceptual diagram of alarm processing and a list of alarms in
an appendix of this manual.

ALM No.4061
A/D CONVERTER1
Alarm output condition
This alarm is issued when the A/D converter 1 on the Interface PCB
does not return the conversion completion signal in the specified time
after the start of conversion. This A/D converter is designed to read gas
pressure and power data.
Related data
DGN. No.981 Data when A/D1 conversion becomes abnormal.

No. Cause of trouble Solution
1 Poor connection in
communication
cable
Check the conductivity and connection of the
communication cable.
2 Anomaly of
Interface PCB
Replace the Interface PCB.
3 Anomaly of CNC
PCB
Replace the faulty PC board in the CNC.

ALM No.4062
A/D CONVERTER2
This alarm is issued when the A/D converter 2 on the Interface PCB
does not return the conversion completion signal in the specified time
after the start of conversion. This A/D converter is designed to read
discharge tube voltage and current data.
Related data
DGN. No.982 Data when A/D2 conversion becomes abnormal.

1 Poor connection in
communication
cable
Check the conductivity and connection of the
communication cable.
2 Anomaly of
Interface PCB
3 Anomaly of CNC
PCB
Replace the faulty PC board in the CNC.

- 82 -
ALM No.4063
RF POWER SUPPLY / LASER GAS
This message appears when the laser power supply unit becomes
abnormal or performs protective operation. The power supply
unit performs protective operation even if an error occurs in other
than the power supply unit itself. This alarm will recur after
replacement of the power supply alone without eliminating the
root cause.
This alarm is issued if, after the LRDY state is established in the
sequence, an alarm signal is sent from the power supply unit, and any of
the power supply operation status signal becomes "0". Note that a
power supply that is not set with parameter No. 15025 or 15027 is not
checked.
Related parameters
Parameters Nos.15025,15027 Power supply selection
Related data
DGN. No.966 Power supply unit operation status
DGN. No.970 Power supply unit selection signal
DGN. No.974 Power supply unit alarm display

(1) Preliminary inquiry
No. Check item Cause of trouble, Solution
1 Checking the
faulty power
supply
1) When the alarm is issued, check the number of
the faulty power supply on the diagnosis screen.
2) Check the LED that lights on the faulty power
supply (see Subsection 5.3.1).
2 Checking
parameters
Confirm that all the parameters described in the
attached parameter sheets are correctly set.
In case there exists any error, correct it.
3 Checking the
discharge
tubes
1) Check for looseness or positional deviation in
the fixtures for mounting the discharge tubes,
and if any problem is found, take appropriate
action.
2) Check whether the electrode has separated, and
replace it.
3) Check whether the inside and outside of each
discharge tube is dirty, and clean it.
4) Check each discharge tube for a crack, and
replace it.
5) Check the O-ring of each discharge tube for
damage, and replace it.
4 Checking the
trigger
electrodes
Check whether the electrode portion of the trigger
electrode is discolored, and replace it.
5 Checking the
matching box
1) Check whether the matching box fan stops, and
replace it.
2) Check whether any coil in the matching box
becomes black, and replace it.
- 83 -
No. Check item Cause of trouble, Solution
6 Checking the
laser gas
1) Check whether the laser gas composition is
correct, and replace the laser gas with the one
that satisfies the specifications.
2) Check for gas leakage in the external laser gas
piping, investigate the faulty location by
referencing Chapter 3, and correct the external
piping.
3) Investigate the faulty location to check for
leakage inside the oscillator, and replace the
faulty part.
7 Checking the
cooling water
Check that the cooling water temperature is within
the range from 20 to 30C.
The amount of water supplied to the power supply
may have decreased. Check whether the piping is
clogged, and take appropriate action.
8 Interface PCB
abnormal
9 Pressure
sensor
abnormal
Replace the pressure sensor.
10 Checking
cable
connectors
Check for looseness in the cables and connectors
connected to the power supply, matching box, and
discharge tubes.
11 Insufficient
discharge
aging
See the description of automatic aging in (1) in
Subsection 3.3.6, and perform aging.

(2) Confirming operation and investigating the cause of a fault
Switch on the failing power unit, observe the condition and
clarity the cause referring to the following tables.
No. Phenomenon Presumption cause
1 An alarm is issued when the LED of a
laser power supply unit is not turned on.
The Interface PCB is
faulty.
Poor cable contact
2 An alarm occurs before discharge begins.
(The time when 200 VAC is supplied to
the power supply)
The laser power supply
is defective.
3 The RF current is small in comparison
with other power supply units and the
discharge tends to disappear. (DCI alarm)
4 The RF discharge current is large in
comparison with other units. The alarm is
DCV alarm.
The laser power supply
is maladjusted.
5 The RF voltage of all the units is high
during discharge and the laser power is
low. The discharge tends to disappear.
(DCI alarm)
When the purge is repeatedly performed,
the RF voltage gradually decreases and
the laser power recovers.
This phenomenon often appears after the
laser was not used for a long period.
The external laser gas
pipe is abnormal.
The gas composition is
not normal due to
leakage of a gas.
- 84 -
No. Phenomenon Presumption cause
6 The RF voltage of all the units is high and
the laser power is low. The discharge is
tends to disappear. (DCI alarm)
Even though the purge is repeatedly
performed, the situation does not recover.
Internal leakage of
oscillator
Internal leakage of
water of the oscillator
7 The RF voltage of all the units is high.
The discharge is tends to disappear. The
output is high for the high output
command, and it is lower than the
standard for the low output command.
(DCI alarm)
The intra-tube pressure
of the laser gas is high
or the gas composition
is not normal (excessive
amount of N
2
).
8 The RF voltage of all the units is low. The
discharge is widely spread. In the high
laser power region, the power is low but in
the low power region, it is higher than the
normal value. The alarm is DCV alarm.
The intra-tube pressure
of the laser gas is high
or the gas composition
is not normal (excessive
amount of He).
9 Although the RFV, RFI, and output are
normal, an alarm may occur.
Anomaly of the Laser
power-supply unit itself
(anomaly of alarm
circuit).

Solution
1 Laser power supply abnormal Locate the faulty
component, then
replace it.
2 High-speed diode or FET module
damaged
Replace the faulty
component or PC
board.
3 Laser power supply maladjusted Adjust the laser power
supply.

- 85 -
ALM No.4065
SHUTTER ACTION
This alarm is issued if, after the LRDY state is established in the
sequence, the shutter open command does not match the shutter state.
When the shutter open signal SHOP is "1", the system is considered
normal with the shutter state signals SHON=1 and SHOF=0.
When the shutter open signal SHOP is "0", the system is considered
normal if the shutter state signals SHON=0 and SHOF=1.
Otherwise, the alarm is issued. When SHOP changes, however, the
alarm monitor is masked for the time set in parameter No. 15152
(default: 3 seconds).
Related data
DGN. No.961 #4 SHON Shutter open state
DGN. No.961 #5 SHOF Shutter closed state
DGN. No.973 #0 SHOP Shutter open command
F200 #4 SHTONL Shutter ON signal
F200 #3 SHTOFL Shutter OFF signal

See the following table, and check the operation status.
[Open] command
DGN. No.973 #0=1
[Close] command
DGN. No.973 #0=0
Shutter open state signal
DGN. No.961 #4
1 1 0 0 1 1 0 0
Shutter close state signal
DGN. No.961 #5
0 1 0 1 0 1 0 1
Normal/Abnormal O X X X X X X O

1 Shutter clamp not removed. Remove the shutter clamp.
2 Anomaly of shutter position
detector
Replace the position detector.
3 Shutter cam loosened. Tighten the screw again.
4 Shutter arm section caught Eliminate the cause of the problem.
If the problem cannot be solved,
replace the unit.
5 Intermediate PCB B is faulty. Replace the intermediate PCB B.
6 Anomaly of cables
connecting each PCB.
Check the connection of each cable.

- 86 -
ALM No.4066
DISCHARGING
After the discharge start (HV ON) signal is turned on, the
discharge starts. At this time, this alarm is issued if at least one
discharge tube does not discharge and causes high voltage.
When the HVON signal is turned on, the discharge tubes are started up
to the maximum specified with the bias command in six seconds. Then,
after the time set with parameter No.15222 has elapsed, the voltage of
each discharge tube is compared with the setting of parameter
No.15221. This alarm is issued if the voltage of at least one discharge
tube exceeds the setting of the parameter.
Related parameters
Parameter No.15221 Discharge start check voltage
Parameter No.15222 Discharge wait time
Parameter No.15223, No.29022 Bias command
Related data
DGN. Nos.909-914 Discharge tube voltage and current
G222 #7 HVON Discharge start signal

1 Anomaly of parameter
setting
Make a setting using the values of
parameters listed in the parameter table
attached to the machine.
2 Anomaly of laser gas
composition
Use the laser gas with the specified
composition accuracy.
3 Discharge tube
electrode mounting
bracket loosened
Check the electrode contacts, and secure
any loose mounting brackets.
4 Leakage in vacuum
system or water
leakage
Locate the leakage, and replace the
defective part.
5 The gas flow control
valve is closed
Adjust the gas flow control valve to obtain
the specified gas flow rate.
6 Matching box
abnormal
Replace the matching box.
7 Crack or pinhole in
discharge tube
Replace the discharge tube.

- 87 -
ALM No.4067
LASER CABINET OH
The temperature of the input side of the cooling fan is monitored
and sends alarm when it exceeds 60C.
When the temperature decreases below the prescribed value, the
alarm state can be solved by resetting. Before that, it cannot be
solved.
This alarm is issued if the "temperature in the cabinet" signal becomes
"0" after the start of the oscillator and immediately before the completion
of purging.
Related parameters
Parameter TPS(No.15015#1) Temperature sensor installed
0: Laser cabinet temperature switch 1: Low temperature sensor
Related data
DGN. No.961 #1 *CAT Temperature in the cabinet
Related item
Alarm No.4124 Over cool

1 Excessive environmental
temperature
Lower the ambient temperature by
ventilation (5 to 30C)
2 Excessive cooling water
temperature
Set the temperature of the cooling water
to within an appropriate range (20 to
30C).
3 Anomaly of cooling fan motor Replace the cooling fan motor.
4 Anomaly of temperature
switch
Check the continuity of the temperature
switch. If any disconnection is found,
replace the temperature switch.
For C2000i-B and C4000i-B, this
temperature switch is not installed.
5 Anomaly of oscillator
Interface PCB
Replace the faulty PCB.
6 Anomaly of connecting
cables between the PCBs.

- 88 -
ALM No.4068
BEAM REFLECTION
This alarm is issued, if a workpiece reflects laser beam more than
the rating to the laser oscillator. This can happen when the laser
beam is used to drill, cut, or weld materials (such as copper, brass,
and aluminum) having a high reflectivity to the laser beam (10.6
m).
This alarm is issued when the actual laser output is in one of the
following conditions at the time of beam output:
(1) The actual laser output is higher than the average command power
(power duty) by more than the value set in parameter No. 15265
or 15267.
(2) The actual laser output exceeds the value set in parameter No.
15266.
The actual laser output is not monitored for five seconds after the beam
is turned on or the output is changed.
Related parameters
Parameter No.15012 Beam reflection alarm monitor
Parameter No.15215 Power input compensation coefficient
Parameter No.15265 Allowable output increase value
Parameter No.15266 Output limit
Parameter No.15267 Maximum permissible output increase for pulse
output
Parameter No.15268 Mask time for beam reflection alarm monitor
Parameter No.15269Permissible value for beam reflection warning
signal
Parameter No.29005 Time constant 1 for Power sensor response
delay compensation filter
Related data
DGN. No.906 Actual output

1 Excessive returning
beam back into the
resonator
Lower the output specified in the command, or
take an action to reduce the reflected laser
beam.
for alarm detection
Check the values set in parameters Nos. 15265
and 15266 against the corresponding values in
the parameter table attached to the unit.
3 Anomaly of output
table parameter
Check the values set in parameters Nos. 15280
to 15308 against the corresponding values in the
parameter table attached to the unit.
4 Anomaly of input
compensation
coefficient parameter
Check the value set in parameter No. 15215
against the corresponding value in the parameter
table attached to the unit.
After replacing the rear mirror or power sensor, it
is necessary to change this parameter setting.
See Section 8.5.
5 Anomaly of Time
constant 1 for Power
sensor response
delay compensation
filter
Check the value set in parameter No. 29005
against the corresponding value in the parameter
table attached to the unit.
After replacing power sensor, it is necessary to
change this parameter setting.

- 89 -
ALM No.4069
LASER IF PCB
This alarm appears when there occurs the anomaly in the 24V
power unit voltage +5, 15, +24V of Interface PCB for CNC
interface.
The enable signal in the interface PCB becomes "0" and this alarm is
issued when an error occurs in the stabilized power unit voltage (+5V,
15V, +24V) after the start of the oscillator and immediately before the
completion of purging.
Related data
DGN. No.960#0 *ENB Enable signal in the interface

1 Fuse blowing Correct the cause of the blown fuse, then
replace the fuse.
2 Anomaly of 24V power
source unit
Check the output voltage (24V 10%) of the
24V power source unit. If the allowable
voltage range is exceeded, replace the unit.
3 Anomaly of power unit of
Interface PCB
See Subsection 3.3.1.4 for details of the
normal supply voltage. If the allowable
voltage range is exceeded, replace the
Interface PCB.
4 Laser oscillator main circuit
breaker abnormal
Check whether the main circuit breaker is
conducting (ON) for all three phases.

ALM No. 4070
CHILLER NOT READY
Turning on the oscillator start switch causes the system to output
a chiller start request signal to the machine. After a chiller ready
signal is received from the chiller unit, this signal is monitored,
and if this signal is interrupted, this alarm is issued.
Monitoring starts in four seconds after the output of a chiller start signal,
and monitoring ends when the oscillator start switch is turned off.
If the chiller ready signal CLRDY (G221#6) becomes 0 during
monitoring, this alarm is issued.
Related data
G221 #6 CLRDY Chiller ready signal
F221 #4 CLON Chiller start request signal

1 Failure in cooling water
supply unit
Check the cooling water supply unit.
2 Poor connection Check the connection between the
cooling water supply unit and CNC.

- 90 -
ALM No.4071
ASSIST GAS NOT READY
When starting machining, the CNC monitors the assist gas ready
signal from the assist gas supply unit in the machine. If this
signal is interrupted, this alarm is issued. This alarm is issued
also when in G32PQ, is not 0 to 3, or is not 1 to 7 during
program execution.
This alarm is issued when the assist gas ready signal (G221#7)
becomes 0 during the assist gas output command.
Related data
G221 #7 AGRDY Assist gas ready signal
G222 #5 AGST Assist gas start signal
F222 #0-#2 AG1-3 Assist gas selection signal

Check the PMC parameter state, and check the signal from the assist
gas supply unit. If the signal is abnormal, check the assist gas supply
unit.
This alarm is issued also when in G32PQ, is not 0 to 3, or is
not 1 to 7 during program execution.
1 Failure in assist gas
supply unit
Check the assist gas supply unit.
2 Poor connection Check the connection between the assist
gas supply unit and CNC.

ALM No.4072
CHILL FLOW
This alarm appears when the water shortage takes place.
This alarm is issued if the cooling water amount signal becomes "0"
from the time the oscillator start switch is turned on until it is turned off
and the signal remains "0" when re-checked in five minutes.
Related data
DGN. No.961#0 *MVW Cooling water amount

1 Shortage of cooling
water
1) The capacity of the chiller unit is insufficient,
or the water flow rate is reduced due to a
clogged pipe. Use a chiller unit having
sufficient capacity, or clean the piping.
2) Check whether the cooling water is
distributed normally throughout between the
external optical system and the laser
oscillator. Ensure that cooling water is
supplied to the laser oscillator at the specified
flow rate.
2 Anomaly of sensor
cable
3 Anomaly of water flow
rate sensor
If this alarm is issued even when the specified
flow rate is satisfied, adjust (in Subsection
7.12.3), clean, or replace the water flow sensor.

- 91 -
ALM No.4073
LASER GAS PRES.
The pressure of the laser gas supplied to the laser oscillator is
monitored. This alarm is issued, if this pressure becomes lower
than the permissible level.
1) This alarm is issued if the laser gas supply pressure switch signal
MGP becomes "0" from the time the oscillator start switch is turned
on until it is turned off.
The alarm monitor is masked while the purge valve is open and for
five seconds after the valve is closed, and while the exhaust valve of
the external piping is open and for five seconds after the valve is
closed.
2) This alarm is issued when purge operation is not completed in three
minutes after the start of purge operation.
3) When a laser gas mixing device is provided, this alarm is issued if
the tank supply pressure signal TEM becomes 0.
Related parameters
Parameter No.15009 #7 TEM
Tank supply pressure (automatically rewritten with
the state signal from the mixer)
Related data
DGN. No.960 #5 *MGP Laser gas supply pressure switch
DGN. No.972 #0 PUG Purge valve

1 Tool low supply
pressure of laser
gas
Adjust the secondary pressure at the regulator on
the gas cylinder so that the pressure of laser gas
supplied to the laser oscillator is
0.175MPa0.025MPa (rating) as measured at the
entry of the oscillator.
2 No laser gas. Check whether the gas cylinder is empty or whether
the connection valve is closed. If empty, replace the
gas cylinder.
Leakage from the
gas tube leading
to the oscillator
Check that the gas pipe joint is secure. Also check
whether the tube or pipe is broken. If so, replace it.
Gas supply
pressure switch or
cable abnormal
Check whether the gas supply pressure switch is set
correctly. If not, set the sensor as explained in
Chapter 7. If the pressure switch cannot be reset,
replace it.

Note
If this alarm occures in purge action, after next RUN ON, the
automatic aging will be executed.
Related item: 9.6 PURGE WORKING AFTER ALARM NO.4073

- 92 -
ALM No.4074
OXYGEN DENSITY
The oxygen density in the cabinet of the laser oscillator is
monitored by sensor. When this is greater than the allowance
value, the alarm occurs.
This alarm is issued if the oxygen density signal becomes "0" from the
time the oscillator start switch is turned on until the purge finishes.
For 5 minutes after CNC ON, the alarm monitor is ignored.
Related parameter
Parameter No.15013#6 OXC Oxygen density monitor function
Related data
DGN. No.960#5 *RBT Oxygen density

1 Oxygen density is
higher
Check if the assist gas flows in the cabinet of laser
oscillator
2 Anomaly of the
oxygen sensor unit.
Replace the oxygen sensor unit.
Anomaly of
intermediate PCB B
Replace the intermediate PCB B

ALM No.4075
CHILL TEMP.
A dew sensor is mounted to the output coupler holder in the
oscillator. This alarm occurs when the sensor detects
condensation. After this alarm occurs, the alarm status cannot be
reset until the condensation status is released.
This alarm is issued if the condensation signal becomes "0" from the
time the oscillator start switch is turned on until it is turned off.
Related data
DGN. No.961#2 *WT1 Condensation

1 Tool low cooling
water temperature
Set the water temperature near the room
temperature (plus about 1C). (Maximum water
temperature: 30C)
2 Connecting
anomaly of dew
sensor cable
Check whether the cable is securely connected to
the dew sensor. If not, reattach the cable.
3 Anomaly of dew
sensor
If the sensor operates when there is no
condensation around the sensor, the sensor is
abnormal. Replace the sensor.
4 Sensor in
condensation
state
When drying the sensor that is in the condensation
state, do not blow on the sensor with hot wind whose
temperature is 60C or higher.

- 93 -
ALM No.4076
LASER POWER DOWN
This alarm is issued if the monitored laser output is lower than
the specified laser output by at least the allowable value.
This alarm is issued when the actual laser output level is lower than the
average command power (power x duty) by more than the value set in
parameter No. 15271. Monitoring, however, is not performed for three
seconds after the beam is turned or after the output is changed.
Related parameters
Parameter No.15271 Allowable output drop value
Related data
DGN. No.906 Actual output

1 Lack of output
from laser power
sensor unit
The thermocouple inside the power sensor unit may
be damaged, or there may be a poor terminal
connection. Measure the direct current resistance
between the terminals of the power sensor unit, and
check that the measured value falls within 200 to
800 ohms. If the measured value falls outside this
range, replace the power sensor unit.
2 Connecting
anomaly of the
cable of laser
power sensor unit.
Check whether the cable is securely connected to
the power sensor unit. If not, reattach the cable.
3 Anomaly of
intermediate PCB
B
If the above checks do not reveal any abnormality,
and there is no output from intermediate PCB B,
replace the PCB.
4 Decrease in actual
output level
1) Check whether the mirrors are dirty, degraded, or
damaged, and clean or replace faulty mirrors.
2) Align the mirrors.
3) Check whether the temperature of the cooling
water satisfies the setting, and adjust the
temperature.
4) Check for internal leakage due to a damaged
discharge tube or degraded O-ring, and replace
any faulty part.
5) Check for leakage in the gas circulating system
and for water leakage, and if any problem is
found, take appropriate action.
6) Check the frequency setting for the inverter.
7) Check the values set in parameters Nos. 15242,
15243, 29023 and 29024 against the
corresponding values in the parameter table
attached to the unit.
8) Replace the laser gas with one having the
specified composition.

- 94 -
ALM No.4077
ABSORBER TEMP.
This alarm is issued if the temperature absorber exceeds the
allowable value. In the usual operation, this beam absorber is
irradiated by the rated output only during the laser output
compensation conducted after the start of the oscillator.
This alarm is issued if the absorber temperature signal becomes "0"
after the start of the oscillator and immediately before the completion of
purging.
Related data
DGN. No.961#7 *ABT Absorber temperature

1 Insufficient cooling
water
The amount of cooling water being supplied to the
beam absorber may be insufficient. Check whether
the cooling water tube between the water branch
unit and beam absorber is clogged. If the tube is
clogged, replace the tube.
2 Temperature
switch wired
incorrectly
Check if the cable is securely connected to the
temperature sensor. If not, reattach the cable.
3 Temperature
switch abnormal
The temperature switches are designed to be
actuated by a specified temperature or higher. If a
temperature switch is actuated at a temperature
lower than the specified temperature, replace the
temperature switch.
C2000i-B, C4000i-B One sensor for 80C
and one sensor for 90C
4 Absorber
abnormal
If the temperature rises when water is flowing,
replace the absorber.

- 95 -
ALM No.4078
LASER TUBE PRES.
The gas pressure is monitored after the discharge start ready
condition (LRDY) is established. This alarm is issued, if the
monitored gas pressure deviates by Parameter No.15251 from
the set gas pressure.
This alarm is issued if the actual gas pressure falls out of the set gas
pressure Parameter No.15251after LRDY is established. The
pressure is not monitored from the time the HV ON signal is turned off
until LRDY is established.
Related parameters
Parameter No.15251
Related data
DGN. No.905 Actual gas pressure

setting of gas pressure
control
Check whether the values of parameters Nos.
15000#1,15244,15245,15246,15251 are set as
indicated in the attached parameter table. If a
different value is set, set the value specified in
the data sheets.
2 Leakage in circulating
system
1) Check whether any joints in the gas
circulating system are loose. If a loose joint
is found, tighten the joint firmly.
2) Check whether any components of the gas
circulating system are cracked. If a cracked
component is found, replace that
component.
3) Check that the discharge tubes are free
from any hole or crack and that the O-rings
are not degraded. If a cracked or damaged
component is found, replace it.
3 Stopped turbo blower Check the turbo blower and inverter.
4 Abnormal supply laser
gas pressure setting
Adjust the secondary pressure at the regulator
on the gas cylinder so that the pressure of
laser gas supplied to the laser oscillator is
0.175MPa0.025MPa (rating) as measured at
the entry of the oscillator.
5 Anomaly of pressure
sensor
6 The gas flow control
valve is closed.
Adjust the gas flow control valve to supply gas
at the specified flow rate.
7 Anomaly of gas
controller
If the above checks do not reveal any
abnormality, replace the gas control ler.

- 96 -
ALM No.4079
PUSH RESET KEY
If the emergency stop button is pressed after the discharge start
ready condition (LRDY) is set up, the shutter is closed, discharge
stops, and the LRDY condition is resumed, then this alarm is
issued. To reset the alarm, remove the cause of trouble, release
the emergency stop button, and press the reset key on the
operator's panel.
This alarm is issued if an emergency stop occurs after LRDY is
established in the sequence.
Related data
DGN. No.960#1 *ESAL Emergency stop processing signal

ALM No.4080
LASER TUBE EXHAUST
When the oscillator start switch is turned on, the exhaust pump
starts evacuating the gas in the circulating system to place the
oscillator in the low-pressure state. At this time, this alarm is
issued if the pressure does not reach the prescribed vacuum
pressure when the specified time (default: 10 minutes) has
elapsed after the start of exhaust.
Turning the oscillator start switch on causes exhaust to start. This alarm
is issued if the laser gas pressure does not reach the setting of
parameter No. 15240 when the time set in parameter No.15259 has
elapsed.
Related parameters
Parameter No.15240 Evacuation completion negative pressure
Parameter No.15259 RUN-ON exhaust time
Related data

1 Incorrect gas pressure
control parameter setting
Check if the value of parameter No. 15240 is
set as indicated in the attached parameter
table. If a different value is set, set the value
specified in the data sheets.
2 Anomaly of Interface PCB If the gas pressure of the gas circulating
system does not decrease at all, the Interface
PCB may be faulty. Check whether the
CP89(Solenoid valve signal) connector on
the PCB is loose. Also check the signals of
the Interface PCB. If an abnormal signal is
detected, replace the Interface PCB.
- 97 -
3 Gas leakage from piping 1) Check whether any component joints in the
gas circulating system are loose. If a loose
joint is found, tighten the joint firmly.
2) Check whether any components in the gas
circulating system are cracked. If a cracked
component is found, replace that
component.
3) Check whether the O-ring of each
discharge tube is worn. Replace any
O-rings that exhibit excessive wear. If a
Teflon O-ring is ever removed, it must be
replaced with a new one.
4) Check whether there is a hole or crack in a
discharge tube. If a hole is found in a
discharge tube, replace the discharge tube.
4 Anomaly of exhaust
pump
abnormality, the performance of the exhaust
pump has deteriorated. Check the following
items.
1) Check whether specified oil is provided at
an appropriate level. Supply specified oil
as explained in Chapter 4.
2) Check whether the exhaust filter of the
pump is clogged. Replace the exhaust
filter as explained in Chapter 4.
3) Check whether the exhaust pump outlet is
clogged to disable exhaust operation.
Remove the cause of the clogging.
4) Check whether the exhaust pump turns in
the reverse direction because of a
problem in phase rotation. If the steps
above do not clear the fault, replace the
exhaust pump.

- 98 -
ALM No.4081
GAS PRES. CONTROL
The pressure is monitored 45 seconds after the start of gas
pressure control. This alarm is issued if the pressure falls out of
the prescribed range.
This alarm is issued when the actual gas pressure is not within 20 of
the parameter setting (parameter No. 15241) after 45 seconds have
passed since the start of gas pressure control.
Related parameters
Parameter No.15241 Gas pressure at the start of discharge
Related data

setting of gas pressure
control
Check whether the values of parameters
Nos. 15000#1, 15244, 15245, 15246 are set
as indicated in the attached parameter table.
If a different value is set, set the value
2 Gas leakage from piping 1) Check whether any component joints of
the gas circulating system are loose. If a
loose joint is found, tighten the joint firmly.
2) Check whether any components of the
gas circulating system are cracked. If a
cracked component is found, replace that
component.
from any hole or crack and that the
O-rings are not degraded.
If any hole or degrading is found in such a
component, replace it.
3 Anomaly of supply laser
gas pressure
Adjust the secondary pressure at the
regulator on the gas cylinder so that the
pressure of laser gas supplied to the laser
oscillator is 0.175MPa0.025MPa (rating) as
measured at the entry of the oscillator.
4 Anomaly of Interface PCB Measure the pressure monitor voltage (about
0 V to 9 V at the LTP test terminal) and
command voltage (about 5 V to 10 V at the
GPC test terminal) being output by the
Interface PCB. If a measured voltage is
abnormal, replace the Interface PCB.
control valve
Check the command voltage from the
Interface PCB, pressure monitor voltage, and
the operation of the exhaust pump. If no
problem is found, replace the pressure
control valve.
6 Anomaly of connection
cable
Check the cable connections.
sensor
abnormality, replace the pressure sensor.

- 99 -
ALM No.4082
TUBE PRES. SENSOR
This alarm appears when the signal of the pressure sensor used
for pressure control detector vanishes.
This alarm is issued if the actual gas pressure is detected to be zero or
less twice in a row at 16-msec intervals from the time the oscillator start
switch is turned on until it is turned off.
Related data

1 Open or poor contact in
connection cable
between pressure sensor
and Interface PCB
Check the cable connection. If the connection
is abnormal, replace the cable.
2 Anomaly of Interface PCB If the signal from the pressure sensor is
normal, but the output from the Interface PCB
is zero or less, the Interface PCB is faulty.
sensor
If the supply voltage (15 V) to the pressure
sensor is normal, but the output from the
sensor is zero or less, the pressure sensor is
faulty. Replace the pressure sensor.

- 100 -
ALM No.4085
MIRROR CLEANING
This alarm appears when the laser output power decreases and
takes an abnormally higher calibration coefficient.
This monitoring is executed at the start of the oscillator for the
purpose of checking for decreases in output due to contamination
and degradation of optical components.
This alarm is issued when the power compensation coefficient exceeds
the power compensation limit during execution of power compensation.
Power compensation coefficient = (Pc/Pa) 1024
Pc : Parameter No. 15200 or 15201
Pa : Actual laser output
Related parameters
Parameter No.15200 Power compensation command output for a half
of the discharge tubes
Parameter No.15201 Power compensation command output for all
discharge tubes
Parameter No.15203 Power compensation limit
Parameter No.15204, No.29020 Power compensation coefficient

1 An optical part in the
laser resonator is out of
position.
Align the laser resonator.
2 An optical part in the
laser resonator is dirty.
Clean or replace the optical part.
3 Other causes See the solution to the problem of laser output
decrease described in alarm No. 4076.

ALM No.4087
SHUTTER OH
This alarm is issued when the temperature of the shutter mirror
exceeds a preset maximum.
This alarm is issued if the shutter temperature signal becomes "0" after
LRDY is established in the sequence.
Related parameters
DGN. No.961#6 *SHT Shutter temperature

1 Contamination of shutter
mirror
Clean the shutter mirror. If this alarm recurs
after the shutter mirror is cleaned, replace the
mirror.
switch
Replace the temperature switch.
3 Temperature switch cable
broken
Replace the cable.
4 Intermediate PCB B or
Interface PCB is faulty.
Replace the faulty PCB.
5 Anomaly of PCB
connection cables
6 Anomaly of cooling fan When the cooling fan stops, replace it.
- 101 -

ALM No.4088
LASER VOLTAGE DOWN
This alarm is issued, if the voltage applied to the discharge tube
drops largely.
1) Immediately before the oscillation ready state (LSTR) is established,
the RF voltage of the power supply with the smallest number in the
selected discharge tubes is compared with the discharge tube
voltage in normal condition (parameter No. 15270). This alarm is
issued if the voltage has dropped by at least the allowable discharge
tube voltage drop. If the drop is less than the allowable drop, the RF
value at this time is stored in parameter No. 15270 as the discharge
tube voltage in normal condition.
2) During power compensation or in LSTR in which external power
control is not in progress, the RF voltage is compared with the
discharge tube voltage in normal condition (parameter No.15270). If
the voltage has dropped by at least the allowable discharge tube
voltage drop, another comparison is made in one second. This
alarm is issued if the state remains unchanged.
Related parameters
Parameter No.15270, No.29025 Discharge tube voltage in normal
condition
Parameter No.15272 Allowable discharge tube voltage drop
Related data
DGN. Nos.909-924 Discharge tube voltage and current

1 Invalid parameter
setting
15242, 15243, 15270, 15272, 29023, 29024 and
29025 are set as indicated in the attached
parameter table. If a different value is set, set the
value specified in the data sheets.
2 The laser gas
composition is not as
specified.
Replace the laser gas with specified laser gas.
3 Anomaly of discharge
tube voltage detection
system
If discharge is performed, but the monitored
discharge tube voltage is extremely low, replace
the matching box.
4 Degradation of turbo
blower gas circulating
performance
Check whether the turbo blower and
high-frequency inverter are normal. Replace the
turbo blower or inverter if found to be faulty.
5 Laser high-speed I/O
unit is faulty. Or
Connection is faulty.
Check the connection of the cable.
If laser high-speed I/O unit is faulty, replace it.

- 102 -
ALM No.4089
ASSIST GAS NO SELECT
This alarm is issued when no assist gas is output during beam
output.
This alarm is issued, if an attempt is made to radiate a laser beam,
when no assist gas is selected, or an assist gas condition is not set up.
Related data
F222#0 to #2 Assist gas selection signal

ALM No.4090
LASER NOT GENERATE
This alarm is issued if an attempt is made to radiate a laser beam
when the laser is not in the oscillation ready (LSTR) state.
This alarm is issued if the oscillation ready (LSTR) state is not
established during beam output.
Related data
F221#6 Oscillation in-progress signal

ALM No.4094
VANE PUMP
This alarm occurs when the thermal switch of the magnetic
contactor for the exhaust pump is tripped.
This alarm is issued if the exhaust pump alarm RPAL becomes "0" after
the start of the oscillator and immediately before the completion of
purging.
Related data
DGN. No.972 RPA Exhaust pump start
DGN. No.961#3 *RPAL Exhaust pump alarm

1 Anomaly of exhaust
pump
Check the following items.
1) Check whether specified oil is provided at an
appropriate level. Supply specified oil as
explained in Chapter 4.
2) Check whether the exhaust filter of the pump is
clogged. Replace the exhaust filter as
explained in Chapter 4.
3) Check whether the exhaust pump outlet is
clogged to disable exhaust operation. Remove
the cause of the clogging.
4) Check whether the exhaust pump turns in the
reverse direction because of a problem in
phase rotation. If the steps above do not clear
the fault, replace the exhaust pump.
2 Exhaust pump
operation abnormal
Replace the exhaust pump.
3 Anomaly of
Interface PCB
If the thermal switch of the contactor does not trip,
the Interface PCB is abnormal. Replace it.
4 Signal cable broken Check the cable connections.

- 103 -
ALM No.4099
GAS PRES. NOT REACH
After the discharge start signal (HV ON) is turned on, the gas
pressure in the discharge tube is compared with the setting of the
pressure in the tube during oscillation. This alarm is issued if the
pressure does not reach the tolerable amount by which the target
pressure is not reached.
When the integral value of gas pressure control is preset and the
pressure is increased from the from the gas pressure at the start of
discharge to the gas pressure during oscillation, this alarm is issued if
the actual gas pressure has not increased to the value equal to the
setting of the pressure in the tube during oscillation (parameter No.
15242 or 15243) minus the setting of parameter No.15248 in 15
seconds after the gas pressure target reaches the gas pressure during
oscillation.
Related parameters
Parameter No.15001#3 Specifies whether to preset the integral value
of gas pressure control.
Parameters Nos.15242,15243, 29023, 29024
Setting of the pressure in the tube during
oscillation
Parameter No.15247 Pressure control integrator element preset
value
Parameter No.15248 Tolerable amount by which the target gas
pressure is not reached
Related data
DGN. No.905 Pressure in the discharge tube

1 Invalid parameter
setting
15001# 3, 15247, and 15248 are set as
indicated in the attached parameter table. If a
the data sheets.
2 Gas leakage from
internal piping
1) Check whether any component joints of the
gas circulating system are loose. If a loose
joint is found, tighten the joint firmly.
2) Check whether any components of the gas
circulating system have cracked. If a
component.
from any hole or crack and that the O-rings
are not degraded.
3 Pressure sensor
abnormal

- 104 -
ALM No.4100
INVERTER 1
If the inverter used to power the turbo blower is abnormal, this
alarm is issued.
When this alarm is issued, check that the alarm LED on the LED
indicator section of the inverter is lit. At this time, do not turn off
the power to the inverter because the alarm will be reset if the
power is turned off.
This alarm is issued if the inverter alarm signal becomes "0" after the
start of the oscillator and immediately before the completion of purging.
Related data
DGN. No.962#0 *IAL1 Inverter alarm

1 Invalid parameter
setting
15240, 15241, 15242, 15243, 29023 and 29024
are set as indicated in the attached parameter
table. If a different value is set, set the value
2 Anomaly of turbo
blower
Replace the turbo blower. The possible causes
of the faulty turbo blower are listed below. Check
them.
1) Damaged impeller
2) Failed bearing
The bearing may have failed as a result of one or
more of the following causes:
1) Deteriorated oil
2) Foreign matter in the bearing
So, always replace the oil at the recommended
intervals.
3 Invalid inverter setting Set the inverter correctly as explained in Section
7.7.
4 Inverter abnormal Replace the inverter.

- 105 -
ALM No.4101
OUT OF FREQUENCY 1
This alarm is issued, if a frequency reached signal is not received
within 120 seconds after the turbo blower is started.
This alarm is issued if a turbo blower is used as a fan (bit 5 of parameter
No.15003 = 1) and the frequency reach signal does not become "1"
within 120 seconds after the blower is started.
Related parameters
Parameter No.15003#5 TON Oscillator with a turbo blower
Related data
DGN. No.962#1 *AR1 Frequency reach signal

1 Cable connection
abnormal
Check whether the cable is securely connected
to the inverter. If not, reattach the cable.
2 Invalid parameter
setting
15240, 15241, 15242, 29023 and 29024 are set
as indicated in the attached parameter table. If a
the data sheets.
3 Anomaly of turbo
blower
Replace the turbo blower. The possible causes
of the faulty turbo blower are listed below. Check
them.
1) Damaged impeller
2) Failed bearing
The bearing may have failed as a result of one or
more of the following causes:
1) Deteriorated oil
2) Foreign matter in the bearing
4 Invalid inverter setting Set the inverter correctly as explained in Section
7.7.
5 Inverter abnormal Replace the inverter.

- 106 -
ALM No.4105
TURBO TEMP. 1
This alarm is issued, if the temperature of the turbo blower motor
winding becomes higher than the permissible level.
This alarm is issued if the turbo temperature signal becomes "0" after
the start of the oscillator and immediately before the completion of
purging.
Related data
DGN. No.962#5 *OH Turbo winding temperature

1 Cooling water temperature
high
Set the temperature of the cooling water
to within an appropriate range (20 to
30C).
2 Insufficient cooling water The amount of cooling water supplied to
the turbo blower may be insufficient.
Check whether the cooling water tube
between the water distributor unit and
turbo blower is twisted or clogged. If the
tube is twisted or clogged, replace the
tube.
If a tube in the turbo blower is clogged,
clean the tube.
sensor
If the sensor is abnormal, replace the
turbo blower because the sensor is built
into the winding in the turbo blower.
4 Anomaly of cable connection Check whether the cable is securely
connected to the turbo PCB. If not,
reattach the cable.

- 107 -
ALM No.4106
BLOWER OIL SHORTAGE
This alarm is issued if the signal from the turbo blower oil sensor
indicates that the oil level has fallen below the setting or if the
temperature of the oil has risen.
This alarm is issued if the turbo blower oil signal becomes "0" after the
start of the oscillator and immediately before the completion of purging.
Related data
DGN. No.962#2 *L-V Turbo blower oil

1 The oil level is
lower than
specified.
Replenish the turbo blower with oil until the oil level
on the oil gauge is between H and L.
2 Invalid alarm level
setting
Set the sensor correctly as explained in Subsection
7.6.3.
3 Sensor abnormal Replace the turbo blower.
4 Insufficient turbo
blower cooling
When the temperature of the turbo blower motor
section is high, check whether the cooling water path
is clogged. This alarm is issued also when the
cooling water in the turbo blower becomes
insufficient. If the temperature of the bottom plate of
the turbo blower is high, check whether the cooling
water path is clogged. If the cooling water path is
clogged, clean the turbo blower.
5 Abnormal
temperature
increase in turbo
blower
The turbo blower heated up abnormally in the
following situations:
1) The turbo blower was turned when the
atmospheric pressure was observed inside the
gas circulating system.
2) A significant internal leakage occurred,
increasing the gas pressure.
3) The set pressure for the inside of the discharge
tubes is too high.
4) The oil has been degraded.
Investigate the cause of the above, and take
appropriate action.

- 108 -
ALM No.4107
MIRROR NOT INSTALLED
In an oscillator in which a beam reflection unit is installed, this
alarm is issued if this unit is not attached with a mirror holder.
This alarm is issued if the beam reflection unit signal becomes "0" after
the discharge start ready (LRDY) state is established in the sequence.
Related data
DGN. No.962#3 *M-R Beam reflection unit

1 Invalid pin setting If the optical path length unit is not provided,
set jumper pin SP2 on the PCB
(A16B-1600-0670) to x.
2 Faulty turbo PCB Replace the turbo PCB.
3 Faulty micro switch Replace the micro switch
cable

ALM No.4116
BLOWER OIL TIM LIMIT
When ACT TIME of BLOWER OIL in Operation Time Screen
of Laser Maintenance Screen Function exceeds SET TIME by
500 hours, the alarm occurs.
When ACT TIME of BLOWER OIL in Operation Time Screen of Laser
Maintenance Screen Function exceeds SET TIME by 500 hours, the
alarm occurs.
The alarm does not occur when Cycle Start Lamp signal F000#5(STL)
is 1
Related paramet4er
Parameter No.15160#2 OAL Time limit of Turbo blower oil exchange
Related data
F000#5 STL Cycle Start Lamp signal

1 ACT TIME of BLOWER
OIL exceeds SET TIME
by 500 hours
Exchange the turbo blower oil, and display
Operating Time Screen, and set 0 at the
ACT TIME of BLOWER OIL. Then push the
reset key

NOTE
1 When alarm is not released, it is impossible to
restart.
2 When parameter No.15160#2(OAL) is 0, the
alarm is not monitored.
3 SET TIME in Operation Time Screen of Laser
Maintenance Screen Function is 0, the alarm is
not monitored.

- 109 -
ALM No.4124
OVER COOL
The oscillator has a low temperature sensor on the side of
resonator plate to measure the temperature of cooling water.
This alarm is issued if the cooling water temperature becomes less than
20 after laser warm-up driving at parameter No.15000#4=1 and
15015#0=1 and 15015#1=1.
Related parameter
Parameter No.15000#4 CLB Power compensation
Parameter No.15015#0 OWU Warm up function
Parameter No..15015#1 TPS Cabinet or Low temperature sensor
Related data
DGN. No.961#1 *CAT

1 Faulty chiller unit Check temperature setting.
Or fix the chiller unit.
2 Faulty low temperature
sensor
Replace the temperature sensor.
3 Faulty intermediate PCB Replace the intermediate PCB.
4 Faulty interface PCB Replace the interface PCB.
cable

- 110 -
ALM No.4125
LASER GAS SPEC/MIX
The composition(mixture) of laser gas is not correct for set
processing mode.
This alarm is issued if DCI value of laser power supply is equal to ro
higher than parameter No.29047 when in-tube pressure reached
parameter No.29046 after HVON(G222#7)=1.
Related parameter
Parameter No.15008#5 DCW Power compensation
Parameter No.29046 In-tube pressure to check gas spec.
Parameter No..29047 DCI maximum value to check gas spec.
Related item
Processing mode change function

1 Faulty composition of the
laser gas in the gas
cylinder
Check laser gas composition.
Replace the correct spec.
2 Internal or external gas
leakage
1) Check whether any component joints of
the gas circulating system are loose. If a
loose joint is found, tighten the joint firmly.
2) Check whether any components of the
gas circulating system are cracked. If a
component.
from any hole or crack and that the
O-rings are not degraded.

ALM No.4132
PARAMETER WAS CHANGED
This alarm is issued if a parameter is changed.
This alarm is issued if parameter No. 15223, 15242, or 15243 is
changed after the discharge start ready (LRDY) state is established.
Related data
Parameter No.15223, No.29022 Specified discharge bias value
Parameters Nos.15242,No.15243, No.29023, No.29024
Setting of the pressure in the tube
during oscillation
Before turning on the discharge start signal (HV ON), press the
RESET key to release this alarm.
- 111 -
5.3 MAJOR FAULTS

5.3.1 Laser Power Supply Alarm Display

(1) If an alarm is issued to indicate the occurrence of a power supply
fault, check the diagnosis screen to determine which power
supply unit issued that alarm signal. The bit corresponding to the
power supply unit that issued the alarm signal is set to 1.
Pressing the reset key or turning off the power clears the display.
DGN. No.974 #7 #6 #5 #4 #3 #2 #1 #0
Power supply No.8 No.7 No.6 No.5 No.4 No.3 No.2 No.1

(2) While the power to the oscillator is on, check the LEDs on the
power supply unit in which the alarm was issued. If the oscillator
is turned off after an alarm is issued, the LED indication
disappears.

(3) The following types of alarm turn on LEDs:
DCI1 : DC momentary overcurrent alarm
DCI2 : DC peak current alarm (DC power alarm)
DCI3 : DC steady current alarm
RFF : RFF alarm
VC : DC control power supply alarm
OH : Power supply overheat
RFV : RF overvoltage alarm
RFI : RF overcurrent alarm

(4) The following lists the conditions and causes of the alarms.
Type of
alarm
Condition
Upper
limit
Causes
DCI1 120A
DCI2 78.8A
DCI3
This alarm is issued if the DC current
of the power supply unit is high when
the oscillator is operating in CW/pulse
mode.
55A
Load short-circuit
Discharge tube
dielectric
breakdown
RFF This alarm is issued if a load such as
a discharge tube is abnormal.
- Short-circuit in
power supply load
and abnormal
discharge
VC This alarm is issued if an overcurrent
or overvoltage occurs in the control
power supply of the power supply unit.
- Abnormal control
circuit
OH This alarm is issued if water is not
flowing through the cooling water heat
sink of the power supply unit.
60C Faulty chiller unit
Water path
clogging
RFV This alarm is issued if a high voltage
is applied to the discharge tube when
the oscillator is operating in CW/pulse
mode.
5.8 to
6kV
Infinite load
Discharge tube
breakdown
Failure to install a
feeder
- 112 -
Type of
alarm
Condition
Upper
limit
Causes
RFI This alarm is issued if a high RF
current flows through the discharge
tube when the oscillator is operating in
CW/pulse mode.
5.45A Abnormal
feedback circuit

If the power supply unit fails just because the high-speed diode
or FET module is damaged, the power supply unit can be
repaired by component or PCB replacement. Other adjustments
are not required.
If the power supply unit is replaced, and adjustment is needed,
adjust the power supply unit after aging.

5.3.2 Power Supply Cannot Be Switched Off Using LCD/MDI Switch

The power supply to the unit cannot always be switched on and off. It
can be switched off only before the oscillator start switch (RUN) is
turned on or after the completion of purging with the RUN switch off
and the purge lamp lit.

5.3.3 Power Supply Cannot Be Switched On Using LCD/MDI Switch

Non-fuse breaker for Interface PCB is tripping.

5.3.4 Laser Output Just after Switch On Is Low

(1) The cooling water temperature is not normal, although the chiller
unit is operating. This phenomenon may be caused when the
ambient temperature is low. In such a case, the specified
temperature will be set in five to ten minutes after the unit starts.
So, perform activation again.
(2) Slight leakage exists in the tube between laser oscillator and gas
cylinder. If the laser output in the first run after a long halt is low
and becomes normal after the second run, slight leakage may be
present in the tube between the laser oscillator and gas cylinder.
(See Subsection 3.3.2.)
Check for leakage in the gas piping system, for looseness in
joints, and for any crack in the tube. If any problem exists,
eliminate the leakage, additionally tighten the joint, or replace
the tube.

- 113 -
5.3.5 Display of Fluctuating Laser Output on LCD

First check if parameter No. 15216 is taking the value of 60, which is
a standard. In case the fluctuation continues with this value used, read
the laser output monitor value indicated in DGN. No.906. Its range of
fluctuation is smaller than 50. If it exceeds this value, check the
followings.
(1) Is the coaxial cable between the laser power sensor mounted on
the rear mirror holder and the intermediate PCB B or the cable
between the intermediate PCB B and the Interface PCB inside
the laser oscillator fixed tightly?
(2) Is there anomaly in the laser power sensor output? Is the DC
resistor between the terminals of the power sensor unit in the
range 200800(C2000i-B, C4000i-B)?
(3) Check the input signal (LPWI-0V) of the intermediate PCB B.

If there exists any anomaly in the results of the above investigations,
replace the anomalous component.

5.3.6 Circuit Breaker for Cooling Fan, Solenoid Valve, and
Stabilized Power Supply Trips

If a load short-circuit such as a burn-in of a fan motor coil occurs in
the cooling fan, solenoid valve, or stabilized power supply, the circuit
breaker (NBK1) trips. Replace the component in which the load
short-circuit occurred, and check the cabling to the component.
Replace a cable if it is abnormal.

5.3.7 Electromagnetic Contactor of Exhaust Pump Trips Thermally

Possible causes are listed below. Take appropriate action.
1 Anomalous setting of
thermal relay
Ascertain if the setting of the contactor is
done at correct value. If not so, correct it.
(setting value = 5.5A)
2 Too high viscosity of oil 1) Check if the room temperature is lower
than 5 degree. If so, raise it.
2) Check the deterioration of oil, which
causes the viscosity increase. If so,
change it.
3 Reverse rotation direction
of pump
The normal direction is counterclockwise
when seen from the side of motor fan. If not
so, correct it at the terminal.
4 Excessive oil During pump operation, check the oil level
through the oil check window. If the oil level
is between L and H, the oil level is regarded
as normal.
5 Undesignated oil is used. Use the designated oil.
6 Exhaust filter choked. Replace it.
7 Loosened terminal of
connecting cable
Fix it tightly.
8 Vane damaged Replace the exhaust pump.
- 114 -

5.3.8 Main Breaker Trips

1 Damaged circuit breaker Check for loose terminals. If the circuit
breaker is burned black, replace it.
2 Beyond rated current Check whether the power magnetics
cabinet in the oscillator is abnormal. Turn
off the circuit breakers connected to the
power supply and inverter sequentially to
determine the unit that caused excessive
current.
3 Electric leakage When the circuit breaker has an electric
leakage breaker function, there is an
electric leakage in the oscillator. Locate the
leakage, such as the power supply, turbo
blower, or fan, and replace the faulty
component.

5.3.9 Excessive Laser Gas Consumption

1 Gas leakage between gas
cylinder and oscillator
Ascertain the following.
1) Anomalous mounting of regulator.
2) Anomalous connection between tube
and regulator.
3) Anomalous connection of gas inlet fitting
of oscillator.
2 Anomalous adjustment of
gas controller or exhaust
controller
Make adjustments according to the
adjustment method described in Chapter 7.

- 115 -
5.3.10 Inverter Alarm Display

(1) Cause of alarm
When an inverter alarm is issued, a message as shown below appears
on the digital panel of the inverter. The causes of the inverter alarms
are listed below.

Display : Exx.z
Exx : Cause of alarm (Message)
z : Status of inverter at alarm occurred

Causes of inverter alarms (Model : SJH300:A90L-0001-0500/8LF)
Message Contents Cause
E01
Overcurrent (during turbo blower
constant-speed operation)
E02
deceleration)
E03
acceleration)
E04 Overcurrent (others)
Turbo blower rotor locked
Abrupt acceleration or abrupt
deceleration
E05
Inverter overload (overload
operation)
E06
Damping resistor overload
protection
Invalid inverter setting
Turbo blower faulty
E07 Overvoltage protection
Inverter faulty
Increased supply voltage
E08 EEPROM error
(NOTE)

Inverter faulty
Invalid inverter setting
E09 Insufficient voltage (voltage drop) Supply voltage drop
E10 CT error
E11 CPU error
E12 External trip
E13 USP error
Inverter faulty
E14 Ground protection
Turbo blower or wiring
ground-fault
E15
Overvoltage protection in receiving
power (supply voltage increase)
Increased supply voltage
E16
Protection against instantaneous
power failure
Momentary loss of supply
voltage
E21
Temperature increase (supply
voltage increase)
Fan motor faulty
Inverter faulty
E23 Gate array error Inverter faulty
E24 Protection against missing phase
Missing Phase of Power
supply
E30 IGBT error
E35 Thermistor error
E36 Abnormal brake
E60 to 69 Option 1 error 1 to 9
E70 to 79 Option 2 error 1 to 9
Inverter faulty
- - - -
Standby state because of voltage
shortage
Not powered.

- 116 -
NOTE
If E8 (EEPROM error) occurs, check parameter
settings.

Status of inverter when the alarm was issued
Indication Status Indication Status
0 Reset 5
Operation command is
input with frequency 0.
1 Stopped 6 Being started.
2 Being decelerated. 7 DC current damping state
3 Constant speed 8 Under overload control
4 Being accelerated. ---- --------

(2) Alarm indication
This inverter can display information on the most recently issued
six alarms as shown below. The latest alarm is indicated on trip
monitor 1 (d081).
d081 : Trip monitor 1

Indication items
<1> Cause of alarm (See the table of causes of inverter alarms
given previously.)
<2> Frequency (Hz) when the alarm was issued
<3> Output current (A) when the alarm was issued
<4> DC voltage (V) across P and N when the alarm was issued
<5> Cumulative operation time (hours) when the alarm was
issued
<6> Cumulative power-on time (hours) when the alarm was
issued

- 117 -
Display method
d081
(Function/FUNC keys)
(1) E01.3
(Up/Down keys)
(2) 1000
(Up/Down keys)
(3) 28.0
(Up/Down keys)
(4) 280
(Up/Down keys)
(5) 15
(Up/Down keys)
(6) 18
(Up/Down keys)

6.OSCILLATOR CONNECTIONS B-70445EN/01
- 118 -
6 OSCILLATOR CONNECTIONS

Chapter 6, OSCILLATOR CONNECTIONS consists of the
following contents:

6.1 ELECTRICAL CONNECTIONS.............................................119
6.2 COOLING WATER PIPING...................................................121
6.3 GAS PIPING............................................................................123

B-70445EN/01 6.OSCILLATOR CONNECTIONS
- 119 -
6.1 ELECTRICAL CONNECTIONS

Fig.6.1(a) Electrical connection diagram (C2000i-B)

- 120 -

Fig.6.1(b) Electrical connection diagram (C4000i-B)

- 121 -
6.2 COOLING WATER PIPING

(C2000i-B)

Fig.6.2(a) Water flow system diagram (C2000i-B)
- 122 -
(C4000i-B)

Fig.6.2(c) Water flow system diagram (C4000i-B)
- 123 -
6.3 GAS PIPING

Figs.6.3(a) shows the flow of supply gas and exhaust gas in the laser
oscillator. Figs.6.3(b) to (c) are system diagrams showing the piping
in the laser oscillator.

Fig.6.3(a) Schematic diagram of laser gas flow (1/2)

- 124 -

Fig.6.3(a) Schematic diagram of laser gas flow (2/2)
- 125 -

Fig.6.3(b) Gas flow system diagram (C2000i-B)

Fig.6.3(c) Gas flow system diagram (C4000i-B)
7.UNITS B-70445EN/01
- 126 -
7 UNITS

Chapter 7, UNITS consists of the following contents:

7.1 INPUT UNIT............................................................................127
7.2 LASER POWER SUPPLY UNIT ............................................131
7.3 MATCHING BOX...................................................................138
7.4 DISCHARGE TUBE................................................................139
7.5 TRIGGER ELECTRODE.........................................................141
7.6 TURBO BLOWER...................................................................142
7.7 INVERTER ..............................................................................145
7.8 EXHAUST PUMP....................................................................158
7.9 GAS CONTROLLER (C4000i-B)00 .......................................159
7.10 PRESSURE CONTROLLER (C2000i-B)................................168
7.11 EXHAUST CONTROLLER (C2000i-B).................................170
7.12 REPLACING THE WATER DISTRIBUTION UNIT.............172
7.13 SHUTTER UNIT......................................................................176
7.14 BEAM ABSORBER.................................................................178
7.15 GUIDE LASER (SEMICONDUCTOR LASER).....................179
7.16 FAN UNIT................................................................................180
7.17 POWER SENSOR UNIT .........................................................182
7.18 REPLACING THE DEW SENSOR.........................................182
7.19 PCB...........................................................................................183
7.20 OIL MIST DECOMPOSING ELEMENT................................185
7.21 GAS DUST COLLECTOR UNIT............................................186
7.22 LOW TEMPERATURE SENSOR UNIT ................................187
7.23 OXYGEN SENSOR UNIT....................................................188
7.24 HIGH-SPEED I/O UNIT..........................................................190

B-70445EN/01 7.UNITS
- 127 -
7.1 INPUT UNIT

The input unit consists of a power magnetics cabinet, interface PCB,
and stabilized power supply. The power magnetics cabinet is
configured as described below:

C2000i-B

QF1 KM1
PSU
No. 2
PSU
No. 1
QF3
QF4
QF5
QF6
Thermal
Relay
QF2
QF7
Transformer
unit
QF8
KM2
KM3
KM4
Inverter
AC FAN
Magnetic valve
Interface PCB
Turbo
blower
CNC INPUT UNIT
AS ALARM SHORT
POWER OFF
When an alarm is occurred, it is shorted.
KM5
Hour
meter
Exhaust
pump
24V PSU

Fig.7.1(a) Block diagram of input unit (C2000i-B)
- 128 -

Fig.7.1(b) Layout of input unit (C2000i-B)

- 129 -
C4000i-B

QF1
KM1
PSU
No. 2
PSU
No. 1
QF3
QF4
QF7
Thermal
Relay
QF2
KM2
KM3
PSU
No. 3
CNC INPUT UNIT
AS ALARM SHORT
POWER OFF
When an alarm is occurred, it is shorted.
KM5
Hour
meter
QF9
Exhaust
pump
Magnetic valve
Interface PCB
Transformer QF10
QF6
Z110
QF5
KM4
PSU
No. 4
QF8 KM6
Inverter
Turbo
blower
Asst.Contact
FAN 24V PSU

Fig.7.1(c) Block diagram of input unit (C4000i-B)
- 130 -

Fig.7.1(d) Layout of input unit (C4000i-B)

- 131 -
7.2 LASER POWER SUPPLY UNIT

7.2.1 Replacement Method

7.2.1.1 Replacing the power supply unit

(1) Turn off the power to the CNC, and turn off the main circuit
breaker of the oscillator. Turn off the power to the chiller unit.
(2) Remove the water fittings, and power and signal cables.
- Water fittings B
- XT21 (200VAC)
- XT22 (output terminal)
- CP51
- CP73
- Ground cable

XT21
CP51
CP73
XT22
Alarm indicator(LED)
Water fittings
Ground

(3) Remove the bolts for mounting the power supply unit, and pull
out the power supply unit while sliding it right and left.
- 132 -
(4) After replacing the power supply unit with a new one, tighten the
mounting bolts, and attach the water fittings and the power and
signal cables.
When attaching the water fittings, loosen portion A shown in the
figure, determine the orientation of the fittings, tighten portion A
by your fingers, then additionally tighten the portion by 60 with
a wrench.

(5) Then, make power supply adjustments. (See Subsection 7.2.2.)

7.2.1.2 Replacing a high-speed diode

breaker of the oscillator.
(3) Remove the mounting screws on the top plate of the laser power
supply unit, and remove the top plate.
(4) As shown in Fig. 7.2.1, you can see the two FET module PCBs
and the diode unit.
(5) Check for a damaged element, and replace it.
(a) Checking the high-speed diode
Measure the resistance across the anode and cathode of the
diode with a tester. If the resistance is several ohms, the
diode is regarded as being damaged. (The resistance of a
normal diode is several mega-ohms.)
To measure the resistance of a diode, touch the positive
probe of the tester to the cathode of the diode, and touch the
negative probe to the anode.
(b) Remove the damaged diode, and replace it.
(6) After diode replacement, power supply adjustment is
unnecessary.
- 133 -

Fig. 7.2.1 Layout of diodes and FET module PCBs

7.2.1.3 Replacing an FET module PCB

breaker of the oscillator.
(3) Remove the mounting screws on the top plate of the laser power
supply unit, and remove the top plate.
(4) As shown in Fig. 7.2.1, you can see the two FET module PCBs
and the diode unit.
(5) Check for a damaged element, and replace it.
(a) Checking an FET module PCB
Measure the resistance across check pins D and S shown in
Fig. 7.2.1. If the resistance is several kilo-ohm, the PCB is
regarded as being damaged. (The resistance of a normal
FET module PCB is several tens kilo-ohms to several
mega-ohms.)
(6) After PCB replacement, power supply adjustment is unnecessary.

- 134 -
7.2.2 Adjustment Method

The power supply is adjusted by adjusting the base discharge with
trimmer VR11 and adjusting the maximum power supply output with
trimmer VR13.
For the base discharge adjustment, it is important to have main
discharge of a discharge tube disappear and implement an electrical
shutter, and to maintain trigger discharge. When an attempt is made to
produce a laser output while no trigger discharge is present, the power
supply unit issues an alarm to protect the power supply unit itself.
Repeating this attempt several times applies stress to the power supply
unit and discharge tubes. For the maximum output adjustment, it is
important to make an adjustment so that the specified maximum
output for the power supply unit can be achieved. If the output
exceeds the maximum level, the power supply and discharge tubes
will be damaged. If the output is insufficient, the laser output
decreases.

7.2.2.1 Preparation

(1) Prepare the following tools:
(a) A cable to be connected to CN17 to measure DCI and DCV.
(b) Precise screwdriver for trimmer adjustments
(c) Digital tester
(2) Check the S2 jumper pin setting (setting of the VR13 adjustment
range) against the data listed in Table 7.2.2.
(3) Check the S5 jumper pin setting (setting of the matching box
temperature sensor) against the data listed in Table 7.2.2.
* The S2 and S5 settings are initialized to the data listed in
Table 7.2.2 at the shipment of the power supply unit, so
they usually need not be changed.
(4) Connect the cable for measuring DCI and DCV to CN17.

7.2.2.2 Base discharge adjustment

Rewrite the following parameters: (Upon completion of adjustment,
return the parameters to the original values.)
CNC parameters Settings
1
Parameter No.15000#4, parameter No.15201
(Output compensation disable)
0
2 Parameter No.15208 (Laser power feedback disable) 0
3
Parameters Nos.15207, 15210, 15212
(Maximum output power)
Maximum
command
4 Parameter No.15223 (Bias command value) 2850
5
For only C2000i-B
Parameter No.15213 (invalidate Enhanced pulse)
32000
6 Parameter No.29016#0 (High power mode) 0

(1) Start the oscillator, and wait until the gas pressure is stabilized in
the base discharge state.
- 135 -
(2) Then, check that all discharge tubes are continuously discharging.
If a discharge tube stops discharging, turn VR11 of the power
supply corresponding to the discharge tube clockwise until it turns
on.
(3) Adjust VR11 of the power supply unit so that only one of the four
discharge tubes is in the state present immediately before flashing
by main discharge occurs (main discharge disappearing in the
other three tubes).
(4) Record the value of RFI-(a)
(5) For C2000i-B
By turning VR11, adjust the value of RFI so that the value of
(a) recorded in (4) above less 100mA is set.
For C4000i-B
By turning VR11, adjust the value of RFI so that the value of
(a) recorded in (4) above less 140mA is set for the power
supplies of No.2 to No.4.
(6) Turn off the discharge start signal (HV OFF), then set 2790 as the
bias command in parameter No.15223 (the current value minus
60).
(7) Check that trigger electrode discharge lasts for five minutes in the
base discharge state. If discharge is turned off, turn VR11 of the
power supply clockwise slowly, and increase the value of RFI by
4 mA or DCV by 0.7V. Turn off the discharge start signal (HV
OFF) then back on, then repeat this operation until discharge is
maintained for five minutes.
(8) Turn off the discharge start signal (HV OFF), then reset the bias
command value in parameter No.15223 to the original value.
(9) When the base discharge state is entered, wait until the gas
pressure steady, and then record the RFI value. ......................... (A)

7.2.2.3 Maximum output adjustment

(1) Specify the output of a half of the rated output value, and turn on
the beam. While checking that the power supply output does not
exceed the maximum power supply output (see Table 7.2.2) and
that the value of DCV does not exceed 230 V, increase the output
command value gradually to the maximum command value
indicated in Table 7.2.2. If the maximum value is about to be
exceeded, turn VR13 counterclockwise to prevent the maximum
value from being exceeded.
(2) After output of the maximum command value, wait 3 minutes.
Then, adjust VR13 to set the power supply output to the
maximum power supply output.
(3) Record the value of RFI-(B)

- 136 -
7.2.2.4 Check

(1) Fine adjustment
(a) In the base discharge state, adjust the RFI value to the value
of (A) with VR11.
(b) Output the maximum command value, and adjust the RFI
value to the value of (B) with VR13.
(c) Repeat (a) and (b) until the values almost match.
(d) Turn off the beam, and wait 3 minutes. Record the DCV,
DCI, RFV, and RFI values of each power supply. Check
that the actual laser output Pa is 0 W. If Pa is not 0 W, make
a power adjustment again.
(e) After output of the maximum command value, wait 3
minutes. Record the DCV, DCI, RFV, and RFI values of
each power supply. Then, check that the value of RFV does
not exceed the maximum RFV (Table 7.2.2).

(2) Pulse output test
(a) For the C2000i-B, set the pulse test command value
specified in Table 7.2.2 (the value in parameter No. 15307)
in parameter No. 15207 and 15210.
(b) Perform internal discharge by outputting the pulse test
command specified in Table 7.2.2 with a frequency of 5 Hz
and a duty cycle of 5% for the pulse test time specified in
Table 7.2.2, and check that no alarm is issued. If an alarm is
issued, make a power supply adjustment again.

(3) Return the modified parameter values to the original values.

- 137 -
NOTE
1 RFI value recording and adjustment
If the CNC monitor is located in a place distant from the
oscillator, and you have no assistant, record and adjust the
RFI monitor voltage value on the CN18 connector for RFV
and RFI monitoring on the power supply unit instead of the
RFI value displayed on the CNC screen. After the
adjustment, however, record and check the RFI value by
using the monitor indication on the CNC screen. For the
CN18 connector for RFV and RFI monitoring on the power
supply, use the conversion formula presented in Note 2 of
Table 7.2.2.
2 Alarm processing after modification of Intra-tube pressure
at oscillation time and bias command setting
After modification of parameter No. 15242 and No. 15243
(intra-tube pressure at oscillation time) and parameter No.
15223 (bias command), take the actions below.
(1) If an alarm is issued, indicating that the parameters have
been modified, reset the alarm, and turn on the
discharge start signal (HV ON).
(2) If an alarm requesting that the CNC power be turned off
is displayed, and purge operation is started, turn off the
power to the NC upon completion of purge operation,
and restart.

Table 7.2.2 Settings for power supply adjustments
C2000i-B C4000i-B
S2 setting B201 B201
S5 setting USUAL USUAL
Electric shutter adjustment 100mA 140mA
Maximum command value Parameter No.15306 Parameter No.15307
Maximum power supply output
DCIDCV=
875050W 875050W
Maximum RFV <4600V <4600V
Pulse test command Parameter No.15307 Parameter No.15307
Pulse test time >30min >30min
Gas pressure setting
92Torr
(High power mode)
105Torr
(High power mode)

NOTE
1 Power supply output = DCIDCV,
DCI= (Voltage between DCI-N and DCI-P of CN17)5,
DCV= (Voltage between DCV-N and DCV-P of CN17)30
2 RFI= (Voltage between RFI-N and RFI-P of CN18)/2,
RFV= (Voltage between RFV-N and RFV-P of CN18)1000

- 138 -
7.3 MATCHING BOX


(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for the
laser oscillator.
(2) Disconnect the power, signal, fan cables from the matching box.
(3) Remove the resonator fan unit, and remove the rod or cable
attached to the matching box.
(4) Remove the two mounting screws, and remove the matching box
by slightly pulling it toward you while swinging it right and left.
(5) Mount a new matching box by reversing steps (4) to (2).

- 139 -
7.4 DISCHARGE TUBE

7.4.1 Placement Numbers

The identification numbers of the discharge tubes when viewed from
the maintenance side of the oscillator are indicated below.

DT3 DT4
DT2 DT1

Fig.7.4.1(a) Identification numbers (C2000i-B)

DT7 DT8
DT6 DT5
DT2 DT1
DT3 DT4

Fig.7.4.1(b) Identification numbers (C4000i-B)


(1) Turn off the power to the CNC, then turn off the power to the
laser oscillator.
(2) Remove the top cover of the oscillator.
(3) Detach the cable and feeder connecting the discharge tube with
the matching box, by loosening the thumbscrew.
Remove all the screws from the flange which secures the
discharge tube.
(4) Move the discharge tube toward the output, rear, and folding
mirrors, while rotating it. If the O-ring is too tight to allow the
discharge tube to be moved, lubricate the O-ring with alcohol.
Before attempting to move the discharge tube, however, move
the flange to the center of the tube. Then, hold the supported end
of the discharge tube, leaving a gap of 5 mm, then push the
discharge tube while rotating it. At this time, be careful not to
damage the end of the discharge tube.
- 140 -
(5) Move the O-ring to the center of the discharge tube, then remove
the discharge tube. If the O-ring is at the end of the discharge
tube, the end of discharge tube may be damaged while it is being
removed.
(6) Remove the copper plate (or feeder) from the removed discharge
tube, then mount it on a new discharge tube.
(7) Mount the flange onto the new discharge tube, then mount a new
O-ring. Before mounting the O-ring, wipe it with alcohol. A
Teflon O-ring is hard, and must be expanded slightly (by hand)
before being mounted.
(8) Insert the new discharge tube into the discharge tube holder by
reversing step (4), then perform assembly by reversing steps (3)
and (5).
(9) Attach the cable or feeder between the matching box and
discharge tube. Note that the cable or feeder must not be placed
closely to other cables, feeders, and metal plates.
(10) After the replacement, start the oscillator, check for leakage, and
If the discharge area of the new discharge tube greatly differs
from those of the other discharge tubes, adjust the power supply.

- 141 -
7.5 TRIGGER ELECTRODE


(1) Turn off the power to the CNC, then turn off the main circuit
breaker and power supply for the laser oscillator.
(2) Remove the cable connected to the trigger electrode.
(3) The mounting screw of the trigger electrode is made of plastic.
With a 3-mm non-ball-point hexagonal wrench, remove the
screw. If the screw head is damaged, use needle-nose pliers to
loosen the screw.
(4) Replace the O-ring with a new one, and mount a new trigger
electrode with the attached screw. If the O-ring or plastic bolt is
damaged, replace it. Never use a metal screw.
Item Specification
1 O-ring JB-OR4D-P10
2 Plastic bolt A98L-0004-0801#4-15

(5) Tighten the plastic bolt with a tightening torque of 0.5 Nm. If you
cannot prepare a torque wrench, use a small L wrench (64 mm
23 mm). Hold the shorter side, and tighten the bolt as far as you
do not feel a pain in your fingers. Use a wrench having a
hexagonal end; never use a ball-point type wrench.
(6) Fix the cable to the trigger electrode with a tightening torque of
1.3 Nm.
(7) After the replacement, start the oscillator, check for leakage, and

Plastic bolts
Cable

- 142 -
7.6 TURBO BLOWER

When the turbo blower is replaced, the gas circulating system is open
to the atmosphere for a long time. Pay particular attention to the
immediate surroundings to ensure that dust and other contaminants do
not enter the gas circulating system.
Clean the flanges of the turbo blower and the pipe flanges before
replacing the turbo blower.
Do not incline the turbo blower while transporting and installing it. If
the turbo blower is tilted, it is possible for the lubricating oil to enter
to the laser gas circulating system, and to contaminate the laser gas
circulating system and optical mirrors. In this case, the turbo blower
can no longer be used.


breaker and power supply for the laser oscillator. Turn off the
power to the chiller unit.
(2) Disconnect the cooling water tube, gas tube, power cable
connector, and ground cable from the turbo blower, then drain
the oil from the turbo blower.
(3) For C4000i-B, remove the conduit cable for the power supply.
(4) Detach the gas tube (gas dust collector) from the turbo blower
outlet. Cover the openings of the removed gas tube and the turbo
blower with masking tape to prevent foreign matter from entering
them.
(5) Detach all the tubes connected to the piping on the inlet side of
the turbo blower, then remove the piping.
(6) Remove the hexagon headed bolt which secures the damping
rubber, and remove the turbo blower with the plate. The turbo
blower weighs about 30 kg, so special care should be taken.
(7) Remove the two metal brackets from the removed turbo blower,
and mount them on a new turbo blower. Also, remove the filter
from the inlet of the old turbo blower, and attach the filter to the
new turbo blower.
(8) Mount the new turbo blower on the oscillator. Attach the
damping rubber, and fasten it temporarily. Then, secure the gas
tube. Be careful not to damage the O-ring, and be sure to insert
the O-ring. Adjust the position of the turbo blower not to apply
excessive force to the bellows pipe.
(9) After securing the piping, tighten the bolt of the damping rubber.
(10) Attach the cooling water tube, gas tube, cable connector, and
ground cable.
For C4000i-B, connect the conduit cable for the power supply.
Connect the cooling water tube, gas tube, power cable connector,
and ground cable.
If the sleeve or ferrule of the cooling water tube or gas tube is
deformed, replace it with the attached sleeve or ferrule.
(11) Supply turbo blower oil.
- 143 -

Damping rubber

Dust
collector
PSU output cables
Maintenance Side
Inlet pipe
Dust
collector
Back Side

Filter
Case of No dust collector
Filter
Case of dust collector

Fig.7.6.1 Turbo blower

Water tube Gas tube
Power cable
Connection of TB
- 144 -
7.6.2 Leakage Check and Discharge Aging

(1) See the oil window of the turbo blower to check whether the oil
level is in the 3/4 position between Hi and Low.
(2) Check for leakage.
(3) Perform discharge aging.

7.6.3 Adjusting the Oil Level Detection Signal

Follow the procedure below to make signal settings:
(1) Turn trimmer VR1 counterclockwise to the extreme end.
(2) Start the oscillator, perform internal discharge with the rated
output for 15 minutes, then place the oscillator in the base
discharge state.
(3) Measure the oil level output voltage Vso between VL1 and 0 V
(GND).
(4) Turn trimmer VR1 clockwise, and check that alarm No. 4106 is
issued, indicating turbo oil shortage.
(5) Monitor voltage Vc between VA1 and 0 V (GND), and set the
alarm level by adjusting trimmer VR1 so that the Vc value
satisfies the following equation:
Vc = Vso 0.778
(6) Press the reset key of the CNC, and check that the alarm is reset.

Fig.7.6.3 Layout on the turbo PCB

VR2 VA2
VL2
0V VR1 VA1 VL1
- 145 -
7.7 INVERTER

7.7.1 Checking the Parameters

With the digital operator's panel attached to the inverter, all
parameters can be set and checked. Operate the digital operator's panel
with the power to the oscillator turned on.
The parameters of an inverter purchased by FANUC are set before
shipment from the factory. So, usually, the parameters need not be
changed. If parameters need to be modified for a reason, detach the
cable connected to terminal No. 2 (soft lock signal) of the inverter
terminal block.

(1) Names and descriptions of the components of the digital operator's panel

Name Description
Monitor Displays settings such frequency and output current values.
RUN (operation) lamp Turned on when the inverter is running.
Program lamp Turned on when the monitor displays the setting of each function.
Blinks when a warning is given (when a setting is incorrect).
POWER lamp Power lamp of the control circuit
ALARM lamp Turned on when the inverter trips
Monitor lamp Lamp for indicating the display status of the monitor.
Hz: Frequency, V: Voltage, A: Current, kW: Power, %: Ratio
Operation command
indication lamp
Turned on when the operation command destination is set to the operator.
Operation key Key for stopping the motor.
This key, however, is enabled only when the operation command destination is set to the
operator. (Check that the operation command indication lamp is on.)
STOP/RESET key Used to stop the motor or reset an alarm.
FUNC (function) key Used to enter the monitor mode, basic setting mode, extended function mode, and function
mode.
STR (store) key Used to store set values. (Be sure to press this key when changing set values.)
Up/down key Used to change the extended function mode, function mode, or set values.
- 146 -
(2) Method of operation
(a) Method of displaying the monitor mode, basic setting mode, and extended
function mode
Monitor (4-digit LED display)
<1> Display of set monitor state
(In the initial state, 0.00 is displayed.)
A different value is displayed if the power is turned off
then back on while the basic setting mode or extended
function mode is indicated.
Press the key.
<2> The code No. of the monitor mode is
displayed. (d001 is displayed.)
The monitor screen is displayed by pressing the
FUNC (function) key once when the code No. of
the monitor mode is displayed.
Press the key. Press the key.
(d002 is displayed.)
Press the key.
(19 times).
Press the key.
(19 times).
The display returns to the state
of <2>.
Press the key.
(6 times).
Press the key.
(6 times).
<4> The extended function mode is
displayed. (A--- is displayed.)
Extended function mode
The screen displays A bCHPU in this order.
Press the key.
(8 times).
Press the key.
(8 times).
<3> The code No. of the basic setting mode is
displayed. (F001 is displayed.)
See Item (c) Function code setting method.

- 147 -
(b) Function setting method
Change the operation command destination
(operator control terminal).
<1> The extended function mode is displayed.
(A--- is displayed.)
Display "A---" according to the display method of (1).
Initially, the operation command destination is operator, so
the operation command indication lamp is turned on.
<2> The code No. of the function mode is displayed.
(A001 is displayed.)
Press the key.
Press the key.
Press the key.
<3> Function mode data display
<5> The extended function mode is displayed. (A--- is
displayed.)
Press the key.
From this state, a transition can be made to another
extended function mode, the monitor mode, or basic
mode.
<4> The code No. of the monitor mode is displayed.
Modified setting data is set by pressing the key.
The operation command indication lamp is turned off
because the operation command destination is changed to
control terminal.
From this state, a transition can be made to another function
code.
Press the key.
Press the key.
As the operation command destination, the
initial data 02 (operator) is displayed.
PRG (program) is turned on because
function mode data is displayed.
The operation command destination is
changed to control terminal (01).

- 148 -
(c) Function code setting method

Press the key.
The code No. of the monitor mode, basic setting mode, or extended function monitor can be directly entered instead of
using the scroll method.

An example of changing from monitor mode code No. d001 to function code No. A029 is indicated below.
<6> The setting of the function code
No. is completed.
Press the and
key at the same time.
"9" in the ones digit position blinks.
("9" is set.)
Press the key (2
times) or press the
key (8 times).
The setting of A029 is completed.
Note) If a code No. not listed in the
code table is entered, "A" at
the left end blinks again.
Check the code No. and enter
a correct value.
<2> Extended function mode change
<5> Change the ones digit of the
function code No..
"d" blinks.
"1" in the ones digit position blinks. Press the key (2
times).
Press the key.
"A" blinks

Pressing the key sets the value of the
blinking digit position.
"2" in the tens digit position blinks.
Press the key (to
set "A".)
Press the key (2
times).
<3> Change the hundreds digit of
the function code No..
<4> Change the tens digit of the
function code No..
Press the
key.
("0" is set.)
"0" in the hundreds digit position blinks.

"0" in this position is not changed. So,
just press the key to set 0.
"0" in the tens digit position blinks.

- 149 -
(d) Parameter settings
Code Name of function
Initial
value
Setting
value
Remarks
d001 Output frequency monitor - - Hz
d002 Output current monitor - - A
d003 Rotation direction monitor - - F (forward rotation)/o (stop)/r (reverse rotation)
d004 PID feedback monitor - -
d005 Intelligent input monitor - -
d006 Intelligent output monitor - -
d007 Frequency conversion monitor - -
d013 Output voltage monitor - - V
d014 Input power monitor - - kW
d016 Cumulative run time monitor - -
d017 Power ON time monitor - -
hr
d080 Trip count monitor - - Times
d081 Trip monitor 1 - -
Cause, frequency (Hz), current (A), voltage (V), run
time (hr), power ON time (hr)
d090 Warning monitor - -
F001 Output frequency 0.00Hz 1000 0.0, start frequency to maximum frequency
F002 First acceleration time setting 30.00s 70
F202 Second acceleration time setting 30.00s 30.00s
F003 First deceleration time setting 30.00s 70
F203 Second deceleration time setting 30.00s 30.00s
0.01 to 3600
Monitor mode
F004 Operation direction selection 00 01 00: Forward rotation, 01: Reverse rotation
A001 Frequency command selection 02 02
00: VR, 01: Terminal, 02: Operator, 03: RS485, 04:
Option 1, 05: Option 2
A002 Operation command selection 02 01
01: Terminal, 02: Operator, 03: RS485, 04: Option
1, 05: Option 2
A003 First base frequency 1000Hz 1000Hz 30 to maximum frequency
A203 Second base frequency 1000Hz 1000Hz 30 to second maximum control frequency
A004 First maximum frequency 1000Hz 1000Hz
Basic setting
A204 Second maximum frequency 1000Hz 1000Hz
30 to 1500
A005 AT terminal selection 00 00
00: Switched between and 0 and 01 on AT
terminal, 01: Switched between 0 and 02 on AT
terminal
A006 02 selection 00 00
00: Single, 01: 0 and 01 auxiliary speed (with no
reversing), 02: 0 and 01 auxiliary speed (with
reversing)
A011 0 start 0.00Hz 0.00Hz
A012 0i-And 0.00Hz 0.00Hz
0.00 to 1500
A013 0 start ratio 0% 0%
A014 0i-And ratio 100% 100%
0 to 100
A015 0 start selection 01 01 00i-Axternal start frequency, 01: 0 Hz
Analog input
A016 0, 01, 02 filter 8 times 8 times 1 to 30
A019 Multistage speed, jogging 00 00
00: Binary (settable up to 16 stages of speed with
4 terminals), 01: Bit (settable up to 8 stages of
speed with 7 terminals)
A020 First multistage speed 0 0.00Hz 1000
0.00, start frequency to maximum frequency (The
value of F001 is automatically entered.)
A220 Second multistage speed 0 0.00Hz 0.00Hz
0.00, start frequency to second maximum control
frequency
A021 Multistage speed 1 0.00Hz 0.00Hz
0.00, start frequency to maximum frequency
Multistage
speed
selection
A038 Jogging frequency 1.00Hz 1.00Hz 0.00, start frequency to 9.99
- 150 -
Initial
value
Setting
value
Remarks
Multistage
speed
selection
A039 Jogging selection 00 00
00: Free run at JG stop time (disabled during
operation), 01: Gradual stop at JG stop time
(disabled during operation), 02: Direct current
damping at JG stop time (disabled during
operation), 03: Free run at JG stop time (enabled
during operation), 04: Gradual stop at JG stop time
(enabled during operation), 05: Direct current
damping at JG stop time (enabled during
operation)
A041 First torque boost selection 00 00
A241 Second torque boost selection 00 00
00: Manual torque boost, 01: Automatic torque
boost
A042 First manual torque boost 1.0% 2.0
A242 Second manual torque boost 1.0% 1.0%
0.0 to 20.0
A043
First manual torque boost
breakpoint
5.0% 10
A243
Second manual torque boost
breakpoint
5.0% 5.0%
0.0 to 50.0
A044 First control method 00 00
A244 Second control method 00 00
00: VC, 01: VP raised to the power of 1.7, 02: Free
V/f setting
V/f
characteristics
A045 Output voltage gain 100 95 20 to 100
A051 Direct current damping selection 00 00 00: Disabled 01: Enabled
A052 Direct current damping frequency 0.50Hz 0.50Hz 0.00 to 60.00
A053 Direct current damping delay time 0.0s 0.0s 0.0 to 5.0
A054 Direct current damping power 0% 0% 0 to 100
A055 Direct current damping time 0.0s 0.0s 0.0 to 60.0
A056
Direct current damping edge/level
selection
01 01 00i-Adge operation, 01: Level operation
A057 Start direct current damping power 0% 0% 0 to 100
A058 Start direct current damping time 0.0s 0.0s 0.0 to 60.0
Direct current
damping
A059
Direct current damping carrier
frequency
5.0kHz 5.0kHz 0.5 to 10 derating applicable
A061 First frequency upper limiter 0.00Hz 0.00Hz
0.00, first frequency lower limiter to maximum
frequency
A261 Second frequency upper limiter 0.00Hz 0.00Hz
0.00, second frequency lower limiter to second
setting maximum frequency
A062 First frequency lower limiter 0.00Hz 0.00Hz 0.00, start frequency to maximum frequency
A262 Second frequency lower limiter 0.00Hz 0.00Hz
0.00, start frequency to second setting maximum
frequency
A063 Jump frequency 1 0.00Hz 0.00Hz 0.00 to 1500
A064 Jump frequency width 1 0.50Hz 0.50Hz 0.00 to 10.00
A069 Acceleration stop frequency 0.00Hz 0.00Hz 0.00 to 1500
Upper/lower
limiter/jump
A070 Acceleration stop time 0.0s 0.0s 0.00 to 60.0
A071 PID selection 00 00 00: Disabled, 01: Enabled
A072 PID P gain 1.0 1.0 0.2 to 5.0
A073 PID I gain 1.0s 1.0s 0.0 to 3600
A074 PID D gain 0.00s 0.00s 0.00 to 100.0
A075 PID scale 1.00% 1.00% 0.01 to 99.99
PID control
A076 PID feedback selection 00 00 00: Feedback 01, 01: Feedback 0
A081 AVR selection 00 00
00: On at all times, 01: Off at all times, 02: Off at
deceleration time
AVR
A082 Motor voltage selection 200/400V 200/400V
200, 215, 220, 230, 240/380, 400, 415, 440, 460,
480/575, 600
A085 Operation mode selection 00 00 00: Normal operation, 01: Power-saving operation
A086
Power-saving response/precision
adjustment
50.0s 50.0s 0.0 to 100.0
A092 First acceleration time 2 15.00s 15.00s
A292 Second acceleration time 2 15.00s 15.00s
A093 First deceleration time 2 15.00s 15.00s
A293 Second deceleration time 2 15.00s 15.00s
0.01 to 3600
A094
Stage 12 acceleration/deceleration
selection
00 00
A294
Stage 22 acceleration/deceleration
selection
00 00
00: Switching by 2 channels, 01: Switching by
setting
A095 Stage 12 acceleration frequency 0.00Hz 0.00Hz
A295 Stage 22 acceleration frequency 0.00Hz 0.00Hz
A096 Stage 12 deceleration frequency 0.00Hz 0.00Hz
A296 Stage 22 deceleration frequency 0.00Hz 0.00Hz
0.00 to 1500
A097 Acceleration pattern selection 00 00
Operation
mode/
deceleration
function
A098 Deceleration pattern selection 00 00
00: Straight line, 01: S-shaped curve, 02:
U-shaped curve, 03: Reversed-U-shaped curve
- 151 -
Initial
value
Setting
value
Remarks
A101 01 start 0.00Hz 0.00Hz
A102 01 end 0.00Hz 0.00Hz
0.00 to 1500
A103 01 start ratio 20% 20%
A104 01 end ratio 100% 100%
0 to 100
A105 01 start selection 01 01 00i-Axternal start frequency, 01: 0 Hz
A111 02 start 0.00Hz 0.00Hz
A112 02 end 0.00Hz 0.00Hz
-1500 to 1500
A113 02 start ratio -100% -100%
External
frequency
adjustment
A114 02 end ratio 100% 100%
-100 to 100
A131 Acceleration curve constant 02 02 Acceleration/
deceleration A132 Deceleration curve constant 02 02
01 to 10 : Small swelling to Large swelling
b001 Retry selection 00 00
00: Trip, 01: 0 Hz start, 02: f-matched start, 03: trip
after f-matched gradual stop, 04: Restart at
frequency before momentary stop
b002 Allowable momentary stop time 1.0s 1.0s 0.3 to 25.0
b003 Retry wait time 1.0s 1.0s 0.3 to 100
b004
Momentary stop during
stop/shortage trip selection
00 00
00: Disabled, 01: Enabled, 02: Disabled during
stop and deceleration for stop
b005
Momentary stop/shortage retry
count selection
00 00 00: 16 times, 01: Unlimited
b006 Open phase selection 00 01 00: Disabled, 01: Enabled
Restart after
momentary
stop
b007
f-matched lower-limit frequency
setting
0.00Hz 0.00Hz 0.00 to 1500
b012 First electronic thermal level 24A 24A
b212 Second electronic thermal level 24A 24A
0.2*(rated current) to 1.2*(rated current)
b013
First electronic thermal
characteristics selection
00 00
b213
Second electronic thermal
characteristics selection
00 00
00: Reduction characteristics, 01: Constant torque
characteristics, 02: Free setting
b015
Free electronic thermal frequency
1
0Hz 0Hz 0 to 1500
b016 Free electronic thermal current 1 0.0A 0.0A 0.0 to 1000
b017
2
0Hz 0Hz 0 to 1500
b019
3
0Hz 0Hz 0 to 1500
Electronic
thermal
b021 Overload limitation selection 01 01
00: Disabled, 01: Enabled at acceleration or
constant-speed operation time, 02: Enabled at
constant-speed operation time
b022 Overload limitation level 36A 36A 0.5*(rated current) to 2*(rated current)
b023 Overload limitation constant 1.00s 1.00s 0.1 to 30
b024 Overload limitation 2 selection 01 01
00: Disabled, 01: Enabled at acceleration or
constant-speed operation time, 02: Enabled at
constant-speed operation time
b025 Overload limitation level 2 36A 36A 0.5*(rated current) to 2*(rated current)
Overload
limitation
b026 Overload limitation constant 2 1.00s 1.00s 0.1 to 30
Lock b031 Soft lock selection 01 00
00: (When the SFT terminal is on) Items other than
this item cannot be modified., 01: (When the SFT
terminal is on) Items other than this item a
frequency cannot be modified.,
02: Items other than this item cannot be modified.,
03: Items other than this item a frequency cannot
be modified.,
10: Can be modified during operation.
b100 Free V/f frequency 1 0Hz 0Hz 0 to free V/f frequency 2
b101 Free V/f voltage 1 0.0V 0.0V 0 to 800.0
b102 Free V/f frequency 2 0Hz 0Hz 0 to free V/F frequency 3
b112 Free V/f frequency 7 0Hz 0Hz 0 to 400
Free V/f
- 152 -
Initial
value
Setting
value
Remarks
C001
Intelligent input terminal 1
selection
18 18
C002
selection
16 15
C003
selection
06 07
C004
selection
11 11
C005
selection
09 09
C006
selection
03 03
C007
selection
02 02
C008
selection
01 01
01: RV (reverse rotation), 02: CF1 (multistage
speed 1), 03: CF2 (multistage speed 2), 04: CF3
(multistage 3), 05: CF4 (multistage speed 4), 06:
JG (jogging), 07: DB (external direction current
damping), 08: SET (second damping), 09: 2CH
(2-stage acceleration/deceleration), 11: FRS (free
run), 12: EXT (external trip), 13: USP (restart
prevention function at power supply recovery time),
14: CS (commercial switching), 15: SFT (soft lock),
16: AT (analog in switching), 18: RS (reset), 20:
STA (3-wire activation), 21: STP (3-wire hold), 22:
F/R (3-wire forward/reverse), 23: PID (PID enable/
disable), 24: PIDC (PID integral reset), 27: UP
(remote operation speedup), 28: DWN (remote
operation slowdown), 29: UDC (remote operation
data clear), 31: OPE (forced operation), 32 to 38:
SF1 to SF7 (multistage speed bits 1 to 7), 39:
OLR(Overload limit switching), no: NO (No
assignment)
C011 Intelligent input 1a/b selection 00 00
Intelligent
(INT) input
terminal
C019 FWa/b selection 00 00
00:NO, 01:NC
C021
Intelligent output terminal 11
selection
01 01
C022
selection
00 00
C023
selection
03 03
C024
selection
02 02
C025
selection
08 08
INT output
terminal
C026 Alarm relay output terminal 05 05
00: RUN (during operation), 01: FA1 (when
constant speed is reached), 02: FA2 (more than
set frequency), 03: OL (advance notice of
overload), 04: OD (excessive PID deviation), 05:
AL (trip signal), 06: FA3 (setting frequency only),
08: IP (during momentary stop), 09: UV
(insufficient voltage), 11: RNT (run time exceeded),
12: ONT (ON time exceeded), 13: THM (thermal
warning)
C027 FM selection 00 00
00: Output frequency, 01: Output current, 03:
Digital output frequency, 04: Output voltage, 5:
Output power, 06: Thermal load ratio, 07: LAD
frequency
C028 AM selection 00 00
Monitor
terminal
C029 AMI selection 00 00
00: Output frequency, 01: Output current, 04:
Output voltage, 05: Output power, 06: Thermal
load ratio, 07: LAD frequency
C031 Intelligent output 11a/b selection 00 00
C036 Alarm relay output a/b selection 01 01

00:NO, 01:NC
C040
Overload advance notice signal
output mode selection
01 01
00: During acceleration/deceleration or during
constant-speed operation, 01: During
constant-speed operation only
C041 Overload advance notice level 24A 24A 0.0 to 2*(rated current)
C042 Acceleration reach frequency 0.00Hz 0.00Hz
C043 Deceleration reach frequency 0.00Hz 0.00Hz

0.00 to 1500
Level output
terminal state
C044 PID deviation excess level 3.0% 3.0% 0.0 to 100.0
C070 Data command selection 02 02
02: Operator, 03: RS485, 04: Option 1, 05: Option
2
C071 Communication rate selection 04 04
03:2400bps, 04:4800bps, 05:9600bps,
06:19200bps
C072
Communication station number
selection
1 1 1 to 32
C073 Communication bit length selection 7 7 7: 7 bits, 8: 8 bits
C074 Communication parity selection 00 00 00: With no parity, 01: Even parity, 02: Odd parity
C075 Communication stop bit selection 1 1 1: 1 bit, 2: 2 bits
Communica-
tion function
adjustment
C078 Communication wait time 0ms 0ms 0 to 1000
- 153 -
Initial
value
Setting
value
Remarks
C081 0 adjustment
Factory-
adjusted
Factory-
adjusted

C082 01 adjustment
Factory-
adjusted
Factory-
adjusted

C083 02 adjustment
Factory-
adjusted
Factory-
adjusted

C085 Thermistor adjustment 105.0 105.0 0.0 to 1000
C086 AM offset adjustment 0.0V 0.0V 0.0 to 10.0
C087 AMI adjustment 80 80 0 to 255
Analog meter
setting
C088 AMI offset adjustment
Factory-
adjusted
Factory-
adjusted

b034 Run time/power ON time level 0hr 0hr
0. to 9999.(0 to 99990hr)/1000 to 6553(100000 to
655300)hr
b035
Operation direction limitation
selection
00 02
00: Forward and reverse rotation enabled, 01:
Forward rotation only enabled, 02: Reverse
rotation only enabled
b036 Reduced-voltage start selection 06 06
00: Short reduced-voltage start time to 06: Long
reduced-voltage start time
b037 Display selection 00 00
00: All data displayed, 01: Function-by-function
display, 02: User setting/this setting
b080 AM adjustment 180 180 0 to 255
b081 FM adjustment 60 60 0 to 255
b082 Start frequency 0.50Hz 0.50Hz 0.10 to 9.99
b083 Carrier frequency 5.0kHz 5.0kHz 0.5 to 10.0 derating applicable
b084 Initialization selection 00 00
00: Trip history clear, 01: Data initialization, 02:
Trip history data clear + data initialization
b085 Initialization data selection 00 00 00: Domestic, 01: CE, 02: USA
b086 Frequency conversion factor 1.0 1.0 0.1 to 9.99
b087 Stop key selection 00 01 00i-Anabled, 01: Disabled
b088 Free run stop selection 00 00
00: 0 Hz start, 01: f-matched start, 02: Start at
frequency immediately before free run
b090 BRD use ratio 0.0% 0.0% 0.0 to 100.0
b091 Stop time selection 00 00 00: Deceleration ? stop, 01: Free run stop
b092 Cooling fan operation selection 00 01
00: At all times, 01: During operation only
(including 5 minutes after power-on and stop)
b095 BRD selection 00 00
00: Disabled, 01: Enabled (disabled during stop),
02: Enabled (enabled even during stop)
b096 BRD on level 360/720V 360/720V 330 to 380 / 660 to 760
b098 Thermistor selection 00 00 00: Disabled, 01: PTC, 02: NTC enabled
b099 Thermistor error level 3000 3000 0 to 9999
C061 Thermal warning level 80% 80% 0 to 100
C091 Debug mode selection 00 00 00: Not displayed, 01: Displayed
C101 Up/down selection 00 00
00: Frequency data not saved, 01: Frequency data
saved
C102 Reset selection 00 00
00: Trip released when ON, 01: Trip released when
OFF, 02: Enabled only at trip time (released when
ON)
C103
Reset selection f-matched
selection
00 00 00: 0 Hz start, 01: f-matched start
C121 0 zero adjustment
Factory-
adjusted
Factory-
adjusted

Factory-
adjusted
Factory-
adjusted

Factory-
adjusted
Factory-
adjusted

H003 First motor capacity selection
Factory-
adjusted
5.5
H203 Second motor capacity selection
Factory-
adjusted
Factory-
adjusted

H004 First motor pole count selection 4 2
H204 Second motor pole count selection 4 4

2, 4, 6, 8
H006 First stabilizer constant 100 100
H206 Second stabilizer constant 100 100

0 to 255
P001 Option 1 error time operation
l ti
00 00
P002 Option 2 error time operation
l ti
00 00

00:TRP, 01:RUN
Others
U001
to
U012
User 1 selection
to
User 12 selection
no No

no. d001 to P002

- 154 -
7.7.2 Replacement Method of Inverter

(2) Detach the cable connected to the connector (CN138) located
under the inverter.
(3) Remove the front cover (by removing the set screw), then detach
the cables from the terminal block of the main circuit.
The following cables are connected to the inverter:
R, S, T : Main power supply input
U, V, W : Inverter output
G : Ground
Terminal block Terminal symbol 1 : Reset signal
Terminal symbol 2 : Soft lock signal
Terminal symbol 8 : Reverse command
signal
Terminal symbol 11 : Frequency arrival
signal
Terminal symbols AL0, AL1 :
Alarm output (relay
contact output: Normal
if ON)
Terminal symbol H : 10 VDC
Terminal symbol O : Frequency command
Terminal symbol L : Analog power supply
common
Terminal symbol CM1,CM2 : Common
(4) Remove the inverter (by removing the four set screws).
(5) From the removed inverter, detach the cable (with a bracket)
connected to the terminal block of the control circuit (by
removing the two setscrews securing the bracket).
(6) Remove the front cover of a new inverter, then remove the blind
cover of the cabling section.
Next, instead of the blind cover, attach the cable (with the
bracket attached) originally connected to the old inverter.
(7) Connect the cable to the terminal block of the control circuit.
(8) Mount the new inverter on the oscillator.
(9) Connect the cables to the terminal block of the main circuit.
(10) Install the front cover, and connect the cable to the connector
(CN138).

- 155 -

Fig.7.7 Inverter replacement procedure
- 156 -
7.7.3 Replacement Method of the Cooling Fan in the Inverter

Begin working after ten minutes or more have passed since it shut
off because there is danger of the electric shock.
(2) Remove the inverter from the oscillator referring to 7.7.2
(3) Remove the cooling fan with the procedure below:
(a) Detach the terminal cover. (M4:1 screw)
(b) Detach the digital operators panel and the spacer.
(c) Detach the front cover. (M4:2 screws)
(d) Detach up the cooling fan holder plate while pressing the
tabs on both side of the cooling fan holder plate.
(e) Detach the connector J21 from the power PCB. Pull out the
connector to the direction of figure. At this time, do not pull
the cable.
(f) Detach the cooling fan from the cooling fan holder plate.
Remove the cable clamp when it has adhered
(4) Install the new cooling fan with the procedure below:
(a) Install the new cooling fan in the cooling fan holder plate.
Confirm the wind direction. (Cooler fan's label side is
direction of the vomit.)
(b) Connect the fan connector to J21 on the power PCB.
(c) Fix the cooling fan holder plate to the inverter main body.
(d) Install the front cover. (M4:2 screws)
(e) Install the digital operators panel and the spacer.
(f) Install the terminal cover. (M4:1 screw)
(5) Install the inverter to the oscillator referring to 7.7.2
- 157 -

Label side of
Cooling fan
Tab
Screw 2
Digital operators panel
Front cover
Terminal cover
Screw 1
Spacer
ConnectorJ21

Cooling fan
holder plate

Power PCB

- 158 -
7.8 EXHAUST PUMP


(2) Drain the cooling water from the oscillator, then disconnect the
two water tubes.
(3) Disconnect the tubes from the pump outlet and inlet. Then,
disconnect the heavy-duty power cables from the terminal block
on the side of the pump.
(4) Remove the bolts securing the exhaust pump unit, then remove
the pump unit. Remove the bolts securing the pump to the
mounting plate, then remove the pump.
(5) Position the new exhaust pump on the mounting plate, then
secure the pump unit by reversing steps (2) to (4). The new pump
may not be fitted with gas and water fittings. Remove them from
the old pump, bind seal tape on the threaded part, and install
them in the original positions.
(6) Pumps are shipped without lubricating oil. Add oil to the pumps.
Operating the pump without lubricating oil will cause the thermal
switch to trip, and will ultimately damage the pump.
(7) Start the oscillator, perform leakage tests for the laser oscillator,
and check the operation of the exhaust pump.
When the power is first turned on, check that gas is output from
the gas outlet of the oscillator. The pump starts after gas has been
discharged from the external pipes for a few seconds. If no gas is
discharged, or the pump sounds abnormally, the pump turns
reversely. Check the cabling.

7.8.2 Parts of Exhaust Pump

Parts list of the exhaust pump is shown below.
Item Spec. No. Remark
Nut A90L-0001-0425/71244351
Cartridge cover A90L-0001-0425/71231470 With O-ring
O-ring A90L-0001-0425/71237142
Spring with washer A90L-0001-0425/71233500
Stopper A90L-0001-0425/71066848 With O-ring
Oil level gauge A90L-0001-0425/71231020 With O-ring and screws
Refer to Fig4.4.3., and change each part as same as 4.3.3

- 159 -
7.9 GAS CONTROLLER (C4000i-B)

7.9.1 Configuration

The gas control unit consists of an charge unit, exhaust unit, pressure
sensors, and so on. Fig. 7.9 shows an installation photo of the gas
control unit. The following outlines the functions of components
shown in the figure:
(1) Pressure sensor
This sensor monitors the pressure in the pipe on the turbo blower
inlet side.
(2) Atmospheric pressure switch
This part monitors whether the pressure in the oscillator has
reached atmospheric pressure.
(3) Filter
This filter prevents impurities from entering the oscillator.
(4) Gas supply pressure switch
This part continuously monitors the pressure of the laser gas
supplied from an external source (gas cylinder).
(5) Purge valve
When the machine operation stops, this valve supplies laser gas
to the oscillator until the pressure in the oscillator reaches
atmospheric pressure.
(6) External pipe exhaust valve
When the oscillator starts, this valve opens for a certain period of
time to allow laser gas in the laser gas pipe between the oscillator
and gas cylinder to escape.
(7) Gas supply valve
When the machine is operating, this value opens to supply laser
gas to the oscillator.
(8) Pressure control valve
According to the command issued from the CNC, this valve
controls the flow rate of the laser gas supply to maintain a
specified laser gas pressure in the oscillator.
(9) Exhaust flow rate adjustment valve
This valve adjusts the flow rate of laser gas released from the
oscillator during normal operation.
(10) Exhaust valve
When the oscillator starts, this valve opens to allow laser gas to
escape from the oscillator. During normal operation, this valve is
closed, and a constant amount of gas escapes through the exhaust
flow rate adjustment valve connected in parallel.
(11) Three way valve
This valve connects the exhaust pump to the oscillator to
discharge laser gas from the oscillator during exhaust pump
operation. When the exhaust pump is stopped, this valve
switches to the atmosphere to open the exhaust pump to
- 160 -
(12) Bypass valve
This valve connects the motor chamber of the turbo blower to the
exhaust pump. When the oscillator starts, this valve opens to
release laser gas from the motor section. During normal
operation, this valve is closed, and a constant amount of gas is
released through the orifice connected in parallel.

Pressure
sensor
(PS)
Gas supply
pressure switch(PSW1)
Purge valve(V2)
Charge unit
External pipe exhaust valve(V6)
Gas supply valve(V1)
Gas control PCB
Exhaust unit
Bypass valve(V5)
Three way valve(V3)
Silencer
Exhaust valve(V4)
Exhaust flow rate
adjustment valve
(CV2)
Pressure control
valve (CV1)
Filter(F1)
Air pressure
switch (PSW2)

Fig.7.9 Installation of the gas controller

- 161 -

7.9.2.1 Replacing the charge unit

(2) Close the valve of the external laser gas supply (for example, a
gas cylinder).
(3) Disconnect all tubes and cables. Pressurized laser gas may
remain in the control unit. Discharge this gas by loosening the
nut on the fittings.
(4) Remove the unit securing screws, then remove the unit.
(5) Mount a new unit by reversing steps (3) and (4).
(6) Adjust the charge unit by following the adjustment procedure
described in Subsection 7.9.3.
(7) Turn on the oscillator, then perform a gas leakage check and
discharge aging.

7.9.2.2 Replacing the exhaust unit

(2) Disconnect the tubes and cables from the exhaust unit.
(3) Remove the screws that secure the unit, and remove the unit to
replace it with a new one.
(5) Turn on the oscillator, then perform a gas leakage check and
discharge aging.
(6) Perform all settings as described in Subsection 7.9.3.4, then
check the operation.

- 162 -

7.9.3.1 Setting the gas supply pressure switch

The gas supply pressure switch is a sensor labeled PSW1 in the gas
controller.

(1) Turn on the power to the CNC. Never turn on the oscillator start
signal (RUN).
CAUTION
Remove the key of the switch not never to turn on
the start signal (RUN).

(2) Adjust the secondary pressure of the regulator of the external
laser gas supply unit (gas cylinder, for example) to 0.1 MPa.
(3) For how to operate the part, see the procedure described in
Subsection 7.9.3.3. Cancel the lock mode, then enter settings.
After making settings, check that the LED (green) of OUT1
lights.
(4) To check the settings, reduce the secondary pressure of the
regulator of the laser gas supply unit (gas cylinder, for example)
to 0.04 MPa, and check that the green LED of OUT1 of this
sensor goes off.
(5) After the check described in (4), set the lock mode again.

7.9.3.2 Setting the atmospheric pressure switch

The atmospheric pressure switch is a part labeled PSW2 in the gas
controller.

(1) Turn on the main circuit breaker and power supply, then turn on
the power to the CNC. Then, power is supplied to the sensor.
Never turn on the gas pressure control start signal (RUN).
(2) For how to operate the part, see the procedure described in
Subsection 7.9.3.3. Cancel the lock mode, then enter settings.
(3) Remove the orange gas tube. This causes the atmospheric
pressure switch to detect the atmospheric pressure.
(4) Clear the switch to zero as described in Subsection 7.9.3.3.
Attach and secure the removed gas tube again. Check that the
green LED of OUT1 lights after setting.
(5) Turn on the gas pressure control start signal (RUN), and check
that the green LED of OUT1 of this sensor goes off after the
exhaust pump starts exhaust operation.
(6) After the check described in (5), set the lock mode again.

- 163 -
7.9.3.3 Operating the gas supply pressure switch and atmospheric
pressure switch

The sensors operate in one of four modes. In the measurement mode, a
pressure value being measured is indicated. In the initial setting mode,
basic operation is set. In the pressure setting mode, an operating
pressure is set. In the lock mode, key operation is locked. Moreover,
the sensors have a zero-clear function for canceling an initial offset
value.
Set the initial setting mode, pressure setting mode, zero-clear function,
and key lock mode in this order. For mode switching, press or hold
down the SET key as indicated below. (When the power is turned on,
the measurement mode is set.)
Measurement
mode
SET ( 2 seconds)
SET ( 4 seconds)
SET (< 2 seconds) SET
SET
SET
Note) Zero-clear operation is performed in the measurement mode.
Pressure setting mode
Initial setting mode
Key lock mode

(1) Names of Components

Fig.7.9.3.3 Details of the gas supply pressure sensor and atmospheric
pressure switch

LED indicator section:
Indicates a measured pressure value, settings, and error code.
Switch output 1 operation indicator lamp (green LED):
Turned on when OUT1 is on.
Switch output 2 operation indicator lamp (red LED):
Turned on when OUT2 is on.
UP ( ) and DOWN ( ) buttons:
Used to change the mode and settings.
SET button:
Used to change the mode and set a value finally.
The indicator section of the sensor indicates a pressure value as a
gauge pressure in MPa. If the pressure value is beyond the pressure
range, "---" appears in the LED indicator.
- 164 -
(2) Setting procedure
When setting in each mode, follow the procedure described below.

Setting in the initial setting mode
Perform basic setting for the sensor. To enter the initial setting
mode, hold down the SET key for 2 to 4 seconds in the
measurement mode. This setting operation is common to the gas
supply pressure sensor and atmospheric pressure sensor.
List of settings (Unit: MPa)
Setting Remarks
Unit setting (Mpa)
Usually, this setting need
not be made.
Output mode setting Normal Open For both OUT1 and OUT2
Response time setting 768 (ms)
Automatic/manual setting Manual

Hold down the SET key for 2 to
4 seconds.
OUT1 output setting becomes
possible.
Press and set Normal Open.

Press the SET key.
OUT2 output setting becomes
possible.
Press and set Normal Open.

Press and set 768 ms.

Press and set the manual mode.

Measurement mode
Press the SET key.
Press the SET key.
Press the SET key.
Automatic/manual setting
becomes possible.
Response time setting
becomes possible.

- 165 -
Setting in the pressure setting mode
Perform operating pressure setting for the sensor. Note that
different values are set for the gas supply pressure sensor and
atmospheric pressure sensor.
List of settings (Unit: MPa)
Gas supply pressure
switch (PSW1)
Atmospheric pressure switch
(PSW2)
P1 0.050 0.000
P2 0.045 -0.005
P3 0.200 0.100
P4 0.200 0.100

Set 0.200 by pressing and .


Press the SET key.
P_2 and a number are displayed
alternately.

Press the SET key.
Press the SET key.
Press the SET key.
Measurement mode
alternately.
Settings for the gas supply pressure
switch (PSW1)

Set -0.005 by pressing and .


Settings for the atmospheric
pressure switch (PSW2)
In the measurement mode, hold down the
SET key for less than 2 seconds.
alternately.
alternately.

- 166 -
Zero clear
Clear the initial offset value of the sensor. This setting can be
made in the measurement mode. Set the atmospheric pressure
sensor only.

Check that the measurement
mode is set.
Detach the tube.
Press and simultaneously.
Set the indication to 0.

To the measurement mode
Attach the tube again.

Setting in the key lock mode
Key locking protects against an inadvertent modification to the
setting of the sensor. This setting is common to the gas supply
pressure sensor and atmospheric pressure sensor.
The key lock mode is set by holding down the SET key for 4
seconds or more in the measurement mode.

UnL or LoC is displayed.
After various settings, set
LoC.

Press the SET key.
To the measurement mode
Hold down the SET key for 4
seconds or more.

- 167 -
7.9.3.4 Adjusting the exhaust unit (adjusting the laser gas
consumption)

(1) Detach the tube from the filter of the gas controller, and attach a
gas flowmeter with laser gas specifications.
(2) Set 30 in parameter No. 15260, and start the oscillator. Air
entered when the oscillator is open to the atmosphere in 1) above
is released. After 30 seconds, turn off the oscillator start switch
(RUN).
(3) Restart the laser oscillator, and place the oscillator in the
oscillation ready state (LSTR).
(4) Perform internal discharge with a low output level specified first.
Increase the output command level gradually to the rated output.
If the discharge voltage is high, perform purging, then, increase
the output command level again.
(5) While observing the flow rate on the gas flowmeter when
internal discharge is performed with the rated output, turn the
exhaust flow rate adjustment valve to adjust the flow rate to the
setting.
(6) Purge the oscillator.
(7) Detach the gas flow meter, and attach the tube again. Perform the
operation described in (2) to replace gas in the tube.
(8) Reset the modified parameter to its original value.

Predetermined flow rate
Oscillator model Flow rate
C4000i-B 10 liters/hour (0.166 liters/minute)

- 168 -
7.10 PRESSURE CONTROLLER (C2000i-B)

7.10.1 Configuration

Fig. 7.10 shows the pressure controller. The following outlines the
functions of components shown in the figure:
(1) Pressure sensor
This sensor monitors the pressure in the pipe on the turbo blower
inlet side.
(2) Atmospheric pressure switch
This sensor monitors whether the pressure in the oscillator has
reached atmospheric pressure.
(3) Filter
This filter prevents impurities from entering the oscillator.
(4) Gas supply pressure switch
This sensor continuously monitors the pressure of the laser gas
supplied from an external source (gas cylinder).
(5) Purge valve
When the machine operation stops, this valve supplies laser gas
to the oscillator until the pressure in the oscillator reaches
(6) External pipe exhaust valve
When the oscillator starts, this valve opens for a certain period of
time to allow laser gas in the laser gas pipe between the oscillator
and gas cylinder to escape.
(7) Gas supply valve
When the machine is operating, this value opens to supply laser
gas to the oscillator.
(8) Pressure control valve
According to the command issued from the CNC, this valve
controls the flow rate of the laser gas supply to maintain a
specified laser gas pressure in the oscillator.

- 169 -

Filter
External exhaust valve (V6)
Purge valve (V2)
Gas supply valve (V1)
pressure control
valve (CV1) Pressure sensor
Atmospheric pressure
switch (PSW2)
Gas supply pressure
switch (PSW1)

Fig.7.10 Pressure controller


Refer to 7.9 about adjustment of the gas supply pressure
switch(PSW1) and the atmospheric switch(PSW2).

- 170 -
7.11 EXHAUST CONTROLLER (C2000i-B)

7.11.1 Configuration

(1) Exhaust flow rate adjustment valve
This valve adjusts the flow rate of laser gas released from the
oscillator during normal operation.
(2) Exhaust valve
When the oscillator starts, this valve opens to allow laser gas to
escape from the oscillator. During normal operation, this valve is
closed, and a constant amount of gas escapes through the exhaust
flow rate adjustment valve connected in parallel.
(3) Three way valve
This valve connects the exhaust pump to the oscillator to
discharge laser gas from the oscillator during exhaust pump
operation. When the exhaust pump is stopped, this valve
switches to the atmosphere to open the exhaust pump to
(4) Bypass valve
This valve connects the motor chamber of the turbo blower to the
exhaust pump. When the oscillator starts, this valve opens to
release laser gas from the motor section. During normal
operation, this valve is closed, and a constant amount of gas is
released through the orifice connected in parallel.
Fig.7.11 Installation of the exhaust controller

Adjustment valve
(CV2)
Exhaust valve (V4) Exhaust distributor unit
Three way
valve (V3)
Silencer (F3)
Bypass valve
(V5)
- 171 -

(2) Remove the connected tubes and cables.
(3) Remove the screws fastening the unit, and remove the unit to
replace it with a new one.
(4) Install the new unit in the order from (3) to (2).
Ensure that all tubes are fastened and that all cables are
connected correctly.

7.11.3 Adjustment Method (Adjusting the Laser Gas Consumption)

(1) Detach the tube connected to the filter of the pressure controller,
and attach a gas flowmeter with laser gas specifications.
(2) Set 30 in parameter No. 15260, and start the oscillator. Air
entered when the oscillator is open to the atmosphere in 1) above
is released. After 30 seconds, turn off the oscillator start switch
(RUN).
(3) Restart the laser oscillator, and place the oscillator in the
oscillation ready state (LSTR).
(4) Perform internal discharge with a low output level specified first.
Increase the output command level gradually to the rated output.
If the discharge voltage is high, perform purging, then, increase
the output command level again.
(5) While observing the flow rate on the gas flowmeter when
internal discharge is performed with the rated output, turn the
exhaust flow rate adjustment valve to adjust the flow rate to the
setting.
(6) Purge the oscillator.
(7) Detach the gas flow meter. Perform the operation described in (2)
to replace gas in the tube.
(8) Reset the modified parameter to its original value.

Predetermined flow rate
Oscillator model Flow rate
C2000i-B 10 liters/hour (0.167 liters/minute)

- 172 -
7.12 REPLACING THE WATER DISTRIBUTION UNIT


Replace the water distributor unit as follows.
(2) See Section 3.4, and remove water from the oscillator by
supplying compressed air.
(3) Mark the water pipes connected to the distribution unit, then
disconnect the pipes.
(4) Remove the bolts securing the distribution unit, then remove the
unit.
(5) Mount a new distribution unit by reversing steps (3) and (4).
Connect the water pipes correctly, noting the alignment marks.
(6) Operate the chiller unit manually to circulate the cooling water.
Check that no water leaks from the fittings that were
disconnected during the replacement. After checking, restore the
original chiller setting. Check the amount of water in the chiller
unit, and add water if necessary.
i-B

Fig.7.12(a) Detail of water distributor unit (C2000i-B)

- 173 -
i-B

Fig.7.12(b) Detail of water distributor unit (C4000i-B)

- 174 -
7.12.2 Replacement of the Parts of Flow Switch

Parts spec. No. are shown below.
Item Spec. No.
1 Rotor A98L-0001-0151/P-1
2 Rotor cap A98L-0001-0151/P-2
3 Rotor pin A98L-0001-0151/P-3

Fig.7.12(c) Parts of flow switch

(2) Remove the cooling water in the oscillator with the supply
compressed air, refer to 3.4.2
(3) Remove the rotor cap with the rotor cap opener attached to rotor
cap, and go on to remove the rotor and rotor pin.
(4) Attach some new parts according to Fig.7.12(c).
(5) Screw tight the rotor cap to the die face, applying the grease to
the O-ring thin.
(6) Drive the chiller unit manually, and confirm no water leakage.
When the confirmation is finished, reset the chiller unit. And
then refill the water.

- 175 -
7.12.3 Adjusting the Flow Sensor

CAUTION
Remove the key of the switch not never to turn on
the start signal (RUN).

(1) Turn the CNC on. Never turn on the oscillator start signal (RUN)
at this stage. Therefore, drive the chiller unit in the manual
operation.

(2) Adjust the flow rate of cooling water flowing into the oscillator
to an alarm setting flow rate. Use a flowmeter with a proper and
accurate rated flow rate.
Model
Alarm setting flow
rate
Rated flow rate
C2000i-B 55liters/minute 75 liters/minute
C4000i-B 120 liters/minute 160 liters/minute

(3) Check that the LED (red) of the flow sensor is turned on.

Adjustment volume
Cock LED
Drain valve

(4) Adjust the knob of the flow sensor to a minimum level where the
LED (red) is blinking.
(5) Open the valve at the chiller outlet, make an adjustment to the
alarm-off setting flow rate, and check that the green LED of the
water flow sensor is turned on.
Model Alarm-off setting flow rate
C2000i-B 60 liters/minute
C4000i-B 125 liters/minute

(6) Close the valve again, make an adjustment to the alarm setting
flow rate, and check that the red LED of the water flow sensor is
turned on.

- 176 -
7.13 SHUTTER UNIT


7.13.1.1 Replacing the shutter unit

(2) Disconnect the cables from intermediate PCB B.
(3) Remove the bolts which secure the unit, then remove the unit.
(5) After the shutter unit is replaced, the CO
2
laser beam and guide
laser beam may be misaligned with each other. In such a case,
align the CO
2
laser beam and guide laser beam with each other
according to Section 8.7.

Fig.7.13External view of shutter unit

7.13.1.2 Replacing the shutter mirror

Replace the shutter mirror as follows. Be careful not to leave
fingerprints on the shutter mirror.
(1) Remove the thermal switch from the heat sink.
(2) Remove the two bolts from the reflective surface side of the
shutter mirror. Then, you can remove the shutter mirror with the
heat sink to which the shutter mirror is attached.
(3) Apply a minute amount of thermal compound (Ryosan Company
910-50) to the rear of a new shutter mirror, then mount the new
shutter mirror by reversing steps (1) to (2).

- 177 -
7.13.1.3 Replacing the shutter switch (thermal and photoelectric
switches)

(1) Remove connector CN52B and CN54B from intermediate PCB
B, then disconnect its cable.
(2) The shutter thermal switch and photoelectric switch are
integrated into a sensor unit. So, remove both switches.
(3) Install a new sensor unit. At this time, ensure that the wire mark
of the photoelectric switch matches the label indication (OPEN,
CLOSE) of the shutter unit. The replacement is completed by
reconnecting to intermediate PCB B.

CAUTION
To prevent stress caused by shutter open/close
operation from being imposed on the cable, the
cable must be run with a sufficient allowance as
shown in Fig. 7.12.

- 178 -
7.14 BEAM ABSORBER


(2) Drain the water from the oscillator, then disconnect the water
pipes.
(3) Disconnect the temperature sensor Faston terminal.
(4) Remove the bolts, then remove the absorber. Before removing
the absorber, mark the position of the absorber or mounting
metal bracket. If the position of the absorber is shifted as a result
of the replacement, the laser beam is not directed to the center of
the absorber. In such a case, the absorber must be adjusted.
(5) Mount a new absorber, aligning it with the marked position.
(6) Connect the water tubes and temperature sensor cable.
original chiller setting.
(8) Start the oscillator, and check the absorber position as described
in the next subsection.

7.14.2 Adjusting the Position

(1) Draw a cross on an acrylic plate, then fix the plate such that the
center of the cross is aligned with the center of the absorber
aperture.
(2) Provide a flow of cooling air to the acrylic plate, using a drier,
for example.
(3) Start the oscillator, and turn on the discharge start switch
(HVON). As soon as the output starts increasing on the output
display screen, turn off the discharge start switch (HVOFF).
Laser oscillation starts, and a round beam mark is left on the
acrylic plate.
(4) Adjust the absorber such that the mark on the acrylic plate is
aligned with the center of the absorber.
(5) Repeat step (3), then check the position of the absorber. If the
mark is still not aligned with the center of the absorber, adjust the
absorber again.
(6) In step (3), soot from the burnt acrylic plate may adhere to the
shutter mirror. Check whether the shutter mirror has been
contaminated with soot or other particles, and clean the mirror if
necessary.

- 179 -
7.15 GUIDE LASER (SEMICONDUCTOR LASER)


(2) Remove connector CN59 from intermediate PCB B, then
disconnect the cable.
(3) Remove the three screws securing the laser unit, then replace the
laser unit with a new one.
(4) Insert the cable of the guide laser into the connector on
intermediate PCB B, then secure the cable.
(5) Replacing the guide laser causes the direction of the laser output
to shift. To adjust the direction, superimpose the guide laser
beam on the CO
2
laser beam, as explained in Section 8.7.

- 180 -
7.16 FAN UNIT

There are two major types of fan unit in the oscillator.

(1) Fan unit
Consists of several fans and a terminal block.
(2) Fan-assisted radiator
Consists of a water-cooled radiator, several fans, and a terminal
block.

7.16.1 Replacing a Fan Unit

(2) Disconnect the power supply cable and ground cable from the
terminal block.
(3) Remove the fan unit from the oscillator.
(4) Mount a new fan unit, then secure it by tightening the screws.
(5) Connect the power supply cable and ground cable.
(6) Close the main circuit breaker, turn on the power to the oscillator,
then turn on the power to the CNC. Then, check that the fans
rotate.

7.16.2 Attaching and Detaching a Cable to and from the Terminal
Block

(1) The cable is held by the fitting of the terminal block. By pressing
the fitting from the top with a sharp screwdriver, the securing
force is released, and the cable can be extracted.
(2) When inserting a cable, press the fitting from the top with a sharp
screwdriver. Ensure that the cable is not pulled out.

- 181 -
7.16.3 Replacing a Fan-assisted Radiator

(2) Cooling water is passed through the radiator of the fan unit.
Drain the water from the radiator, then disconnect the water
pipes.
(3) Disconnect the power supply cable and ground cable from the
terminal block.
(4) Remove the fan unit from the oscillator. At this time, the radiator
may still contain water. Therefore, plug the radiator fittings with
rag to prevent water being spilled on the other units.
(5) Mount a new fan unit, then secure it by tightening the screws.
(6) Connect the water tubes.
(7) Connect the power supply cable and ground cable.
original chiller setting.
(9) Close the main circuit breaker, turn on the power to the oscillator,
then turn on the power to the CNC. Then, check that the fans
rotate.

- 182 -
7.17 POWER SENSOR UNIT

Be careful not to touch or apply force to the black, light-sensitive
surface. Also ensure that no dust enters the sensor.


(2) Disconnect the coaxial cable from the power sensor unit.
(3) Remove the mounting screws of the power sensor unit, and
remove the unit.
(5) Turn on the laser, then check that the laser output indication
appears.


See the setting of the power input compensation coefficient in Section
8.5, and check the compensation coefficient.

7.18 REPLACING THE DEW SENSOR


(2) Disconnect the dew sensor cable from the connector.
(3) Remove the screws securing the dew sensor, then replace the
sensor with a new one.
(4) Connect the dew sensor cable to the connector.
(5) After the replacement, no adjustment is needed.

- 183 -
7.19 PCB

7.19.1 Replacing the Interface PCB

(2) Disconnect all cables from the Interface PCB.
(3) Remove the screws or edge supports, then remove the interface
PCB.
(4) Mount a new PCB by reversing steps (2) and (3). Connect the
cables, noting the alignment marks. Ensure that no terminals are
loose. Check that the connectors are connected firmly.
(5) Set the jumper pins to the same status as present before the
replacement.

7.19.2 Replacing the 24V Power Supply

(2) Remove the Interface PCB.
(3) Disconnect all cables from the 24V power supply.
(4) Remove the four edge supports, then remove the 24V power
supply.
(5) Mount a new 24V power supply by reversing steps (2) and (4).
Connect the cables, noting the alignment marks. Ensure that no
terminals are loose.

7.19.3 Replacing the Input Control PCB

(2) Remove the Interface PCB.
(3) Disconnect all cables from the input control PCB.
(4) Remove the four edge supports, then remove the input control
PCB.
cables, noting the alignment marks. Check that the connectors are
connected firmly.

- 184 -
7.19.4 Replacing the Turbo PCB

(2) Disconnect all cables from the turbo PCB.
(3) Remove the four edge supports, then remove the turbo PCB.
cables, noting the alignment marks.
(5) Once the turbo PCB has been replaced, the turbo blower oil level
alarm must be set. For the setting, see Subsection 7.6.3.

7.19.5 Replacing the Intermediate PCB B

(2) Disconnect all cables from the intermediate PCB B.
(3) Remove the four edge supports, then remove the intermediate
PCB B
cables, noting the alignment marks.

- 185 -
7.20 OIL MIST DECOMPOSING ELEMENT


(2) Remove the mounting screws, pull out the element while tilting
it.
(3) Insert a new element in the reverse order, and fasten it with the
screws.
(4) Check for leakage, and perform discharge aging.

* Pay attention to the installation orientation of the oil mist
decomposing element.
The element of oil decomposition
Screws

Fig.7.20 Oil mist decomposing element
- 186 -
7.21 GAS DUST COLLECTOR UNIT

7.21.1 Cleaning

(2) Remove the mounting screws, and remove the dust box.
(3) Detach the dust box slits and wipe them with a clean cloth
moistened with alcohol. Also, clean the inside of the dust box.
(4) The slit on the maintenance side differs from the slit on the rear
side. If these blades are installed on these sides reversely, the
dust collection capability lowers. The slits and the dust collector
have the marking A or B, and match the markings each
other.
(5) Check for leakage, and perform discharge aging.

Two screws
Slit
Bolt 6 pieces
Dust box

Fig.7.21 Gas dust collector unit
- 187 -
7.22 LOW TEMPERATURE SENSOR UNIT


(2) Disconnect the cable from the connector on the unit.
(3) Remove the screws securing the unit, then replace the unit with a
new one.
(4) Connect the cable the connector.

Low temperature
sensor Screw

Fig.7.22 Low temperature sensor unit
- 188 -
7.23 OXYGEN SENSOR UNIT

7.23.1 Replacement Method (C4000i-B)

(2) Disconnect the cable from the connector XS30 on the unit.
(3) Remove the 4 screws securing the unit, then replace the unit with
a new one.
(4) Connect the cable with the connector XS30.

7.23.2 Replacement Method (C2000i-B Short Optical Path Length Type)

(2) Remove the turbo PCB and the cover.
(4) Loosen the 4 screws securing the unit, then replace the unit with a
new one.
(6) Install the turbo PCB and the cover.

7.23.3 Replacement Method (C2000i-B Long Optical Path Length Type)

(2) Remove the Intermediate PCB B and the cover.
(4) Loosen the 4 screws securing the unit, then replace the unit with a
new one.
(6) Install the Intermediate PCB B and the cover.

- 189 -
Connector XS30) Connector(XS30)
Screw
(M410)
Screw
(M410)
(Fixed from the
back)
C4000i-B C2000i-B

Fig.7.23 Oxygen sensor unit
- 190 -
7.24 HIGH-SPEED I/O UNIT

Fig.7.24 High-speed I/O unit

7.24.1 Replacement Method of FSSB PCB

(2) Disconnect the cables
(CN210,CN215A,CN215B,CN216A,CN216B) on the PCB.
(3) Remove the 3 screws securing the FSSB PCB, then replace the
PCB with a new one.
(4) Connect the cable with the connectors.

7.24.2 Replacement Method of I/O MODULE UNIT

(2) Disconnect the cable (CN210,CP11A,COP10B) from the
connector on the High-speed I/O unit.
(3) Remove the 3 screws securing the High-speed I/O unit, then
remove the unit.
(4) Remove FSSB I/O module extension unit, referring to 7.24.3.
(5) Disconnect the cable (CB155A,CB156A,CNF1) on FSSB I/O
module.
(6) Remove the 2 screws securing the FSSB I/O module, then replace
it with a new one and connect the cables.
(7) Place the FSSB I/O module extension unit, referring to 7.24.3.
(8) Place the High-speed I/O unit, and connect the cables.

- 191 -
7.24.3 Replacement Method of FSSB I/O MODULE EXTENSION UNIT

(2) Remove the High-speed I/O unit, referring 7.24.2.
(3) Disconnect the cables (CN155B,CN156B,CNF2) on FSSB I/O
module extension unit.
(4) Remove the 2 screws securing the FSSB I/O module extension
unit, then replace the unit with a new one.
(5) Place the High-speed I/O unit, referring to 7.24.2.

8.LASER OPTICAL SYSTEM B-70445EN/01
- 192 -
8 LASER OPTICAL SYSTEM

Chapter 8, LASER OPTICAL SYSTEM consists of the following
contents:

8.1 LASER OPTICAL PARTS ......................................................193
8.2 CLEANING AND REPLACING THE OPTICAL PARTS.....194
8.3 ALIGNMENT OF THE RESONATOR...................................200
8.4 OBTAINING A MAXIMUM POWER....................................207
8.5 POWER CALIBRATION METHOD......................................210
8.6 ALIGNMENT OF THE BEAM FOLDING UNIT
(C2000i-B, C4000i-B SHORT OPTICAL PATH
LENGTH TYPE) ......................................................................213
8.7 ALIGNMENT OF THE GUIDE LASER.................................215

B-70445EN/01 8.LASER OPTICAL SYSTEM
- 193 -
8.1 LASER OPTICAL PARTS

Table 8.1 lists the optical parts and their features.

Table 8.1 Optical parts and their features
Name Specification
Substrate
material
Color
(front/rear)
Marking Application
1 A04B-0813-D200 C2000i-B
2
Output coupler
A04B-0815-D201
ZnSe
Amber
(Transparent) C4000i-B
3 A04B-0813-D201 C2000i-B
4
Rear mirror
A04B-0818-D201
Ge Silver/silver
C4000i-B
5 Folding mirror A04B-0817-D202 Si Gold/gray DEMMR
C2000i-B
C4000i-B
6 0 shit mirror A98L-0001-0616#C /0-45
C2000i-B
C4000i-B
(Short optical path
length type)
7
Circular polarizer
mirror
A98L-0001-0617#C /4
C2000i-B
C4000i-B
(Short optical path
length type)

NOTE
ZnSe : Zinc selenide
Ge : Germanium
Si : Silicon

- 194 -
8.2 CLEANING AND REPLACING THE OPTICAL PARTS

The output coupler, rear mirror, and folding mirrors of the laser
oscillator must be cleaned or replaced periodically. Similarly, if the
laser output or beam mode becomes abnormal, the optical parts must
be cleaned or replaced. When the optical parts are cleaned or replaced,
the vacuum system is open to the atmosphere. So, ensure that dust
does not enter the vacuum system.
Use the specified mirror cleaning liquid. (Spec.No:
A98L-0001-0857/1)
Clean the mirrors according to the following procedure:

NOTE
All folding mirrors need not be cleaned each time.
Clean two or three folding mirrors at a time.

Remove the beam cove pipe
(See Subsection 3.1(3))
Clean the output coupler
Clean the rear mirror
Clean two or three folding mirrors
Clean two folding mirrors
C2000i-B
C4000i-A
Attach the beam cover pipe
(See Subsection 3.1(3))
Leakage check (See Subsection 3.3.5.),
discharge aging (See Subsection 3.3.6.),
alignment (See Subsection 8.3.3.)
Clean two folding mirrors
- 195 -
8.2.1 Cleaning and Replacing the Output Coupler and Rear Mirror

Fig.8.2.1(a) Exploded view of the output coupler

(a) Turn off the power to the CNC, then turn off the main circuit
(b) Before starting cleaning, wipe away any foreign matter from
around the mirror holder. Then, remove the mirror cover or the
power sensor.
(c) When the pressure of the vacuum system of the oscillator is
lower than the atmospheric pressure, the output coupler may be
sucked, making it difficult to remove the output coupler or rear
mirror. Check that the oscillator is in the purge state, and loosen
the blind joint on the top of the turbo blower to allow the internal
pressure of the vacuum system to equalize with the atmospheric
pressure.
(d) Loosen the mirror holding screw, then remove the mirror holder
from the mirror stage.
(e) Remove the output coupler from the mirror holder, then place the
output coupler on lens cleaning paper. Check the removed
O-rings. Replace an O-ring that is damaged or has lost elasticity.
Proceed to step (l) to replace the mirror.
(f) Gently blow clean air by using a camera blower across the mirror
surface to remove dust and dirt.
- 196 -
(g) Drip ethyl alcohol or lens cleaner onto the mirror surface, and
gently wipe dirty areas by using a cotton swab moistened with
the fluid.
(h) Place lens cleaning paper on the mirror, then spray ethyl alcohol
or lens cleaner over the paper and mirror. Then, move the lens
cleaning paper horizontally to and fro across the mirror.
(i) Remove any fiber dust by blowing clean air with a camera
blower.
(j) Repeat Steps (g) through (i) until all dirt on the mirror surface is
removed. Finally, clean the mirror surface with ethyl alcohol.
(k) Clean the back surface of the mirror similarly.
(l) Wipe the mirror holder and O-rings with ethyl alcohol.
(m) An arrow mark is provided on the side of the output coupler, and
a line is drawn above the mark with a felt-tipped marker. If the
line has disappeared, look for a mark-off line. Place the output
coupler on the holder. At this time, ensure that the reflecting
plane (the plane indicated by the arrow on the side of the mirror)
of the output coupler or rear mirror does not face the holder but
faces the opposite direction, and that the arrow on the side of the
output coupler or rear mirror is aligned with the round mark of
the mirror holder. Insert the O-rings evenly so that the mirror
does not float.

Fig.8.2.1(b) Method of installing the mirror holder

(n) Install the mirror holder by reversing steps (b) through (d). The
mark on the mirror holder is provided on the bottom for
C2000i-B, and is provided on the side for C4000i-B.
Tighten the mirror holding screw then loosen it. Next, turn it by
fingers. After feeling a resistance, retighten the screw by 30
degrees.
(o) Close the main circuit breaker or turn on the power supply of the
laser oscillator, then turn on the power to the CNC. Perform
evacuation. When the gas pressure (DGN. 905) reaches 100 or
less, retighten the mirror holding screw.
(p) Perform a leakage check.
- 197 -
(q) Install the beam cover or the power sensor. This completes
cleaning and replacement work.
(r) When the rear mirror is replaced, set a power input compensation
coefficient (parameter No.15215) again according to Section 8.5

8.2.2 Cleaning and Replacing the Folding Mirrors

(2) Before starting cleaning, wipe away any foreign matter from
around the mirror holder.
(3) Loosen the mirror holder mounting screw, and remove the mirror
holder. Vacuum grease is applied to the rear of the folding mirror.
So, the mirror does not come off easily from its holder. Clean the
folding mirror without removing it from its holder. To replace
the mirror, proceed to step (9).

Fig.8.2.2(b) Exploded view of the holding mirror

(4) Gently blow clean air by using a camera blower across the mirror
(5) Drip ethyl alcohol or lens cleaner onto the mirror surface, and
the fluid.
- 198 -
(6) Place lens cleaning paper on the mirror, then spray ethyl alcohol
(7) Remove any fiber dust by blowing clean air with a camera
blower.
(8) Repeat Steps (5) through (7) until all dirt on the mirror surface is
Proceed to step (12).
(9) When replacing the mirror, first remove the mirror from its
holder. Vacuum grease is applied to the rear of the mirror. So,
insert the tip of a standard screwdriver into the hole on the side
of the mirror holder to push up the mirror for removal. At this
time, do not apply an excessive force to the mirror holder and the
spring section of the mirror holder. If the mirror cannot be
removed, blow warm air onto the holder to warm it by using a
drier.
(10) Apply a thin coat of vacuum grease to the rear of a new mirror.
(11) Place the mirror in its holder, and blow warm air onto the holder
to warm it by using a drier. This will soften the vacuum grease
and bond the mirror onto the holder. Check for excessive00
vacuum grease, if any, around the mirror. If the mirror is dirty,
clean the mirror according to steps (4) through (8).
(12) By using a cotton swab moistened with ethyl alcohol, clean the
part of the mounting section that touches the mirror. Flakes of
coating may remain in this area. Those flakes can cause the
mirror to be misaligned.
(13) Install the mirror holder by reversing steps (2) through (3). At
this time, insert the holder perpendicular to the alignment unit so
that the mirror touches the mirror holder evenly. When tightening
the fixing screws, tighten each screw evenly.
(14) Turn on the main circuit breaker and the power supply of the
laser oscillator, then turn on the power to the CNC. Next, make a
leakage check.

8.2.3 Cleaning and Replacing the Beam Folding Unit

(2) Before starting cleaning, wipe away any foreign matter from
around the mirror holder.
(3) Loosen the mirror holder mounting screw, and remove the mirror
holder. Do not detach the cable connected to the holder, but
loosen the clamp of the cable.
Vacuum grease is applied to the rear of the mirror. So, the mirror
does not come off easily from its holder. Clean the mirror
without removing it from its holder. To replace the mirror,
proceed to step (9).
(4) Gently blow clean air by using a camera blower across the mirror
(5) Drip ethyl alcohol or lens cleaner onto the mirror surface, and
the fluid.
- 199 -
(6) Place lens cleaning paper on the mirror, then spray ethyl alcohol
(7) Remove any fiber dust by blowing clean air with a camera
blower.
(8) Repeat Steps (5) through (7) until all dirt on the mirror surface is
Proceed to step (12).
(9) When replacing the mirror, remove the mirror by sliding it from
the mirror holder.
(10) Apply a thin coat of vacuum grease to the rear of a new mirror.
(11) Slide the mirror into the mirror holder so that it bonds onto the
holder. This will soften the vacuum grease and bond the mirror
onto the holder. Check for excessive vacuum grease, if any,
around the mirror. If the mirror is dirty, clean the mirror
according to steps (4) through (8).
(12) By using a cotton swab moistened with ethyl alcohol, clean the
part of the mounting section that touches the mirror. Flakes of
coating may remain in this area. Those flakes can cause the
mirror to be misaligned.
(13) Install the mirror holder by reversing steps (2) through (3). At
this time, ensure that the mirror touches the mirror holder evenly.
When tightening the fixing screws, tighten each screw evenly.
(14) Ensure that, in the coil section of the water tube connected to the
holder, another tube is not caught. Adjust the clamping of the
cable. This completes cleaning and replacement work.
(15) Adjust the optical axis according to Section 8.6 so that a beam is
output at the center of the oscillator beam outlet.
- 200 -
8.3 ALIGNMENT OF THE RESONATOR

The theory of alignment is such that while monitoring the laser output
signal with a tester, you adjust the angle of each mirror to obtain a
maximum output power. Once this adjustment is made, all mirrors are
set for maximum output. So, if a mirror is cleaned or replaced, the
original state or original beam mode can be restored by adjusting only
that mirror to maximize its output power.

Fig.8.3(a) Position of micrometer for alignment (C2000i-B)

- 201 -

Fig.8.3(b) Position of micrometer for alignment (C4000i-B)

CAUTION
Close the shutter when working in the vicinity of
the accessible Class IV laser path. And, confirm
that there are no persons in the vicinity of the
accessible Class IV laser path before starting the
Class IV laser during the Alignment Task when the
Class IV laser path is accessible.
- 202 -
8.3.1 Alignment Procedure for Adjusting All Mirrors

This subsection describes the procedure for readjusting a laser
oscillator already installed and adjusted using an old method, to
restore its maximum output state. Use this procedure in the following
cases:
To adjust an existing oscillator that has not been adjusted using
the maximum power method
When an oscillator is disassembled because of a failure
When all mirrors are cleaned or replaced at a time
For cleaning or replacing the mirrors, follow the procedure described
in Section 8.2. Do not remove all mirrors at a time inadvertently.

8.3.1.1 Preparation

(1) Record the adjustment screw readings of the output coupler
(O.C.), rear mirror (R.M.), and folding mirrors (F.M.).
(2) Collect a burn pattern, and use it as the start state for mode
adjustment.
Near (3m) :
Cold mode or Hot mode (internal discharge for three minutes)
Far :
Cold mode or Hot mode (internal discharge for three minutes)

8.3.1.2 Adjustment method

(1) For C2000i-B
(a) Obtain a maximum power based on O.C. by using the R.M.
as the reference.
(b) Obtain a maximum power based on FM1 by using the O.C.
as the reference.
(c) Obtain a maximum power based on FM1 by using the R.M.
as the reference.
(d) Collect a burn pattern. If the mode is good, end this
procedure. If not, start all over again from step (a). At this
time, collect a burn pattern in each step. If the mode is
finally good, end this procedure.

(2) For C4000i-B
(a) Obtain a maximum power based on O.C. by using the R.M.
as the reference.
(b) Obtain a maximum power based on FM4 by using the R.M.
as the reference.
- 203 -
(c) Obtain a maximum power based on FM4 by using the O.C.
as the reference.
(d) Obtain a maximum power based on FM2 by using the O.C.
as the reference.
(e) Obtain a maximum power based on FM6 by using the R.M.
as the reference.
(f) Collect a burn pattern. If the mode is good, end this
procedure. If not, start all over again from step (a). At this

- 204 -
8.3.2 Alignment Procedure during Installation after Transportation

Misalignment can occur due to transportation or storage state (as in
the case where a clamp is not removed). Be sure to make an alignment
according to the procedure described in this subsection at the first
installation.

8.3.2.1 Preparation

(2) Collect a burn pattern, and use it as the start state for mode
adjustment. If the mode is good, end the adjustment.

Near (3m) :
Cold mode or Hot mode (Internal discharge for three minutes)
Far :


(1) For C2000i-B
(a) Obtain a maximum power based on FM1.
(b) Obtain a maximum power based on FM1 by using O.C. as
the reference.
(c) Obtain a maximum power based on FM1 by using R.M. as
the reference.
(d) Collect a burn pattern. If the mode is good, end this
procedure. If not, start all over again from step (b). At this

(2) For C4000i-B
(a) Obtain a maximum power based on FM4.
(b) Obtain a maximum power based on FM4 by using R.M. as
the reference.
(c) Obtain a maximum power based on FM4 by using O.C. as
the reference.
(d) Obtain a maximum power based on FM2 by using O.C. as
the reference.
(e) Obtain a maximum power based on FM6 by using R.M. as
the reference.
- 205 -
(f) Collect a burn pattern. If the mode is good, end this
procedure. If not, start all over again from step (b). At this

- 206 -
8.3.3 Alignment Procedure at Mirror Cleaning Time

When cleaning or replacing mirrors of a laser oscillator already
adjusted using the maximum power method, use the alignment
procedure described in this subsection. All folding mirrors need not be
cleaned each time.

8.3.3.1 Preparation

(2) Collect a burn pattern. This is used for checking mirror dirt. If
the mode is good, end the adjustment.
Near (3m) :
Far :


(1) For C2000i-B
(a) Clean the O.C. and R.M. mirrors.
(b) Obtain a maximum power based on O.C. by using R.M. as
the reference.
(c) Clean the FM1, FM2, and FM3 mirrors.
(d) Obtain a maximum power based on FM1.

(2) For C4000i-B
(a) Clean the O.C. and R.M. mirrors.
(b) Obtain a maximum power based on O.C. by using R.M. as
the reference.
(c) Clean the FM3 and FM4 mirrors.
(d) Obtain a maximum power based on FM4.
(e) Clean the FM1, FM2, FM5, and FM6 mirrors.
(f) Obtain a maximum power based on FM6 by using FM2 as
the reference.

- 207 -
8.4 OBTAINING A MAXIMUM POWER

8.4.1 Preparation

(1) Using the conditions Pc = rated output, Duty cycle = 15%, and
Frequency = 100 Hz, adjust the duty cycle to determine the
actual conditions for internal discharge.
Maximum value of Duty is 25% for C2000i-B and 20% for
C4000i-B.
If a large output is used, the mode present when a maximum
power is obtained is not always the best due to thermal distortion
of each mirror. A capability of detecting an output variation due
to base output fluctuation, tester resolution, chiller temperature,
and so forth is required. If the discharge area is narrow, the
output variation dependent on a shift of the internal optical axis
becomes small.
(2) Connect the tester to the BNC terminal CN59 of intermediate
PCB B.
(3) Start internal discharge. Start adjustment when the output
becomes stable after 5 minutes.

Output terminal(CN59) for Alignment

Fig.8.4.1 External view of intermediate PCB B

- 208 -
8.4.2 Procedure

By using two mirrors A and B with mirror A used as the reference,
find a position where a maximum power is obtained based on mirror B.
While turning mirror A in one direction in steps of an interval of the
micrometer, for example, 1 division (10 m) or 2 divisions (20 m),
adjust mirror B for each division, and obtain a maximum power at
each point of mirror A. Graph the data at each point of A, and
determine a mirror A position representing a maximum power. Then,
by aligning mirror A at such a position, adjust mirror B to obtain a
maximum power. Two micrometers are provided for each mirror. So,
be sure to obtain a maximum power with one axis, then obtain a
maximum power with the other axis. Do not move the X-axis and
Y-axis at the same time.
- 209 -

(4) (5)
(3)
(2)
In (3), the power is decreased,
indicating that the direction is wrong.
So, in (5), the adjustment screw is
returned to the original position.
(1)
(6)
(7) (8)
(9)
(10)
A=7.580 A=7.570 A=7.590
A=7.600 A=7.610 A=7.620 A=7.630 A=7.640
A=7.590
Counterclockwise
(1)
Power
Power
5 15
10
5
Initial setting of A = 7.590
Clockwise
B is adjusted to obtain a maximum power.
Same state as (1)
(10)
(6)
Power
A=7.650 A=7.590
(1)
(7)
(8)
(9)
(1)
A=7.638 A=7.614
B is adjusted to obtain a maximum power.
A maximum power is obtained based on B.
Maximum power position of A
= (7.590+7.638) / 2
= 7.614
Do not determine the maximum power position of A at the actual maximum power point (peak point).
Instead, find the first position (1)' with the same power after a peak, and set a position halfway between (1)
and (1)'. Adjust B to obtain a maximum power at that position.
A maximum power is obtained based on B.
30% below peak

- 210 -
8.5 POWER CALIBRATION METHOD

8.5.1 Setting a Power Input Compensation Coefficient

After replacing the rear mirror of the laser oscillator or replacing the
power sensor unit, check and set the power input compensation
coefficient. A laser beam is directly measured. So, be sure to strictly
observe the safety precautions related to a laser beam.

(1) Set the following parameters:
Parameter No.15208
4096 (For C4000i-B)
6144 (For C2000i-B)
Parameter No.15209
200 (For C2000i-B)
400 (For C4000i-B)
(2) By collecting the mode, check if the mirrors of the oscillator are
aligned correctly. If the mode is incorrect, make a readjustment.
(3) Perform internal discharge at the rated output for 1 minute or
more, run the program below in the automatic mode, and place a
power probe in the middle of the optical path to measure the
output value Pr of a laser beam irradiated outside.
At this time, it is recommended to make a measurement at the
beam outlet.
Record the actual output value Pa displayed on the laser setting
screen simultaneously with this measurement.
G32 P1 Q1 ;
G24 S1800 Q100 R20000 ;
G32 P0 ; (irradiation for 20 seconds)
M30
Use a power probe calibrated periodically. Calibration coefficient
data is attached to a calibrated power probe.
The correct measurement value is: Pr' (probe-converted value) =
Pr (probe reading) calibration coefficient.
(4) If power input compensation coefficient K is set correctly in
parameter No.15215, Pa = Pr' should result. If the value of Pa
differs from Pr' by 5% or more, set power input compensation
coefficient K (parameter No.15215) again according to the
following expression:
K (new value) = Pr' (probe-converted value)/Pa K (old value)
(5) Make a measurement again as described in step (3) above to
check that Pa = Pr'.
- 211 -
8.5.2 Using the Power Probe

(1) Start up the oscillator after modifying the following parameters:
Parameter No.15000#4 0 (to disable power compensation)
Parameter No.15208 4096 (or 6144) 0 (to disable power
feedback)
(2) Specify an irradiation output and start internal discharge. Modify
parameter No.15204 so that the value of Pa after 1 minute is the
irradiation output.
Suppose that when parameter No.15204 = 1024, 2000 W is
specified, and the value of Pa is 2100. In this case, the following
is obtained:
1024 200/2100 = 975
So, modify the value of parameter No.15204 to 975.
The specified irradiation output approximately equals the value
of Pa.
(3) Modify the following parameter
Parameter No.15208 0 4096 (or 6144) (to enable power
feedback)
(4) Create a program according to the irradiation condition.
Example G32 P1 Q1;
G24 S_ Q100 R_ ; (S : output, R : time)
G32 P0 ;

Table 8.5.2 List of irradiation outputs and irradiation periods
Probe: For 2kW (H-3C)
Laser model
Irradiation output
(W)
Irradiation period
(seconds)
1 C2000i-B 1800 20
2 C4000i-B 1800 20

When the rated output of the 4000W laser is irradiated to the
probe, the maximum allowable laser beam strength of the probe
is exceeded, resulting in a probe surface destruction. So, when
making a measurement, decrease the output to prevent the probe
surface from being destructed. Note, however, that if dust or dirt
is attached to the probe surface, the probe surface may be
destructed by a decreased output.
(5) Place the power probe at the beam outlet of the oscillator. Hold
the probe so that the probe head plane is perpendicular to the
beam.
(6) Perform internal discharge at the irradiation output for 1 minute.
Then, start the program. Record the value of Pa immediately
before the end of the program.
(7) Record the measurement value (hold value) of the probe.
(8) Make three measurements. When one measurement is completed,
cool the probe. Pour tap water onto the probe until the probe is
cooled down to the room temperature. Before making the next
measurement, dry the probe sufficiently by using a drier.
- 212 -
(9) Find the average of three probe measurement values. Let Pr be
this average.
Apply this value to the following expression to find an actual
output:
Actual output Pr' = Pr (probe coefficient)
(10) Upon completion of the work above, return the parameters to the
original values.

- 213 -
8.6 ALIGNMENT OF THE BEAM FOLDING UNIT (C2000i-B,
C4000i-B SHORT OPTICAL PATH LENGTH TYPE)

The beam folding unit has two mirrors. One mirror is fixed, on which
laser beams from the output coupler are reflected first. The other is
movable.
(1) Start the oscillator and make sure that laser beams can be
irradiated.
(2) Attach an acrylic plate at about 3 m away from the beam outlet of
the oscillator, then collect the burn pattern of the CO
2
gas laser
beam (rated output, CW, irradiation period of 0.1 second). Do
not touch the acrylic plate after beam pattern collection.
(3) Check if the CO
2
gas laser beam and the guide laser beam are
aligned with each other. If not, make an adjustment according to
Section 8.7.
(4) Adjust the adjustment screw of the beam folding unit so that the
center of the oscillator laser beam matches the center of the guide
laser beam. Do not touch the screws at the support points. The
spacing of support points of the mirror holder is adjusted to 3
mm.

Fig.8.6(a) Beam folding unit adjustment position (C2000i-B)

- 214 -
A slant movement
can be made with
the adjustment
screws.

Fig.8.6(b) Beam folding unit adjustment position (C4000i-B)
- 215 -
8.7 ALIGNMENT OF THE GUIDE LASER

Make an adjustment so that the center of the CO
2
laser beam is aligned
with the center of the guide laser beam.
(1) Attach an acrylic plate at about 3 to 10 m away from the beam
outlet of the laser oscillator, and collect the burn pattern of the
CO
2
laser beam (rated output, CW, irradiation period of 0.1
second). Do not attempt to touch the acrylic plate after beam
pattern collection.
(2) By turning the X-axis and Y-axis adjustment screws, align the
guide laser beam with the center of the burn pattern obtained in
step (1). Turn the adjustment screws using a 2-mm hexagon
wrench.
(3) Compare the optical axis of the guide laser beam with the center
of the burn pattern of the CO
2
laser beam, obtained
approximately 1 m from the laser oscillator outlet. If the
difference between the two beam centers is within 2 mm, the
optical axis adjustment can be regarded as being successful.
(4) If an optical axis mismatch is detected in step (3), adjust the
optical axis of the guide laser beam by moving the plate and
stage of the guide laser unit. Then, repeat the adjustment
procedure from step (2).

Fig.8.7 Guide laser adjustment position

9.LASER SOFTWARE FUNCTION B-70445EN/01
- 216-
9 LASER SOFTWARE FUNCTION

Chapter 9, LASER SOFTWARE FUNCTION consists of the
following contents:

9.1 MAINTENANCE SCREEN.....................................................217
9.2 AUTOMATIC AGING ............................................................229
9.3 AUTOMATIC LEAKAGE CHECK........................................233
9.4 POWER FEEDBACK FUNCTION BASED ON
THE ACTUAL OUTPUT ESTIMATION METHOD.............235
9.5 WARMING-UP FUNCTION...................................................240
9.6 PURGE WORKING AFTER ALARM NO.4073 ....................241
9.7 BASE BIAS MODULATION..................................................243
9.8 PROCESSING MODE CHANGE FUNCTION ......................244

B-70445EN/01 9.LASER SOFTWARE FUNCTION
- 217 -
9.1 MAINTENANCE SCREEN

9.1.1 Overview

The laser maintenance screen function can display maintenance
information for the preventive maintenance and failure investigation,
and operate data so that the decrease of failure rate and the efficiency
of work.
The laser maintenance screen is composed of the following screens.

Name of screen Function
1
Screens for power calibration coefficient
history
History of Power calibration coefficient and RF voltage
No.1 can be referred.
2 Screens for parts working time
Working time for the parts needed periodical
maintenance is counted and displayed.
3
History screens of alarm related to
electrical discharge
When the alarms related to the electrical discharge are
generated, the related data can be logged and referred
later.
4 Laser alarm history screens
Laser alarms and warnings are logged and can be
referred later.
5 Pulse power feedback screens
Table data for the pulse power feedback by actual power
presumption method can be read into CNC and edited.
6
Power sensor time constant
measurement screen
The time constant of laser power sensor can be
measured.
7 Leak check screen Leak of laser oscillator can be checked.
8 Laser tuning screen
The data used at maintenance are displayed and
operated in 1 screen.
It is possible to command running beam internally with
shutter closed.

It has another function below:
Function
1 Output of the saved maintetnance data to the memory card
Input the table data for pulse power feedback from the memory card

9.1.2 Method of Operation

(1) Set bit 0 (MNT) of parameter No. 15160 to 1 to enable
maintenance screen display.

#7 #6 #5 #4 #3 #2 #1 #0
15160 MDS MNT

MNT
0 : Does not display the laser maintenance screen.
1 : Displays the laser maintenance screen.
MDS
0 : Disables data input on the laser maintenance screen.
1 : Enables data input on the laser maintenance screen.

- 218-
(2) Press the "Setting" operation key on the CNC.
Then, press the soft keys at the bottom of the CNC screen as
follows:

POWER SET DATA 3D.TRN
STATUS MAINT.

PW.CLB ACT TM DISCH.
L ALM
PWR FB PS TC LEAK TUNE

9.1.3 Display Information

9.1.3.1 Compensation coefficient history display

When the power compensation coefficient setting function is operated,
a power compensation coefficient and the current RFV1 value and
date/time are preserved. Up to 30 items of data can be recorded. If this
limit is exceeded, the oldest data is deleted to record new data.

Pressing the [PW.OFS] soft key displays the power compensation
coefficient history screen.
This screen consists of three pages. One page displays ten
compensation coefficients. Data with younger dates is displayed in
upper fields on the screen. When a new compensation coefficient is
registered, it is displayed on the top line of the first page.
To switch pages, use the "PAGE " and PAGE " keys on the MDI
panel. The preserved compensation coefficient data cannot be edited.

- 219 -
9.1.3.2 Parts run time display

Pressing the [ACT.TM] soft key causes the operation time display
screen to be displayed. To switch pages, use the "PAGE " and PAGE
" keys on the MDI panel.

If you enter a limit time in a set time field in advance, the operation
time display will turn red when the operation time exceeds 90% of the
set time. If it exceeds the set time, the operation time display in red
reverse video.
If working time is over the limit time for any item, warning signal
(F226#0) is output to PMC.
And if the following items are over the limit time, the signal (F226 #1
to #7) is output corresponding to the each item. Please use these
signals in case warning lamps are equipped on a operators panel.
Turbo-blower overhaul F226#1
Blower oil change F226#2
Inner mirror cleaning F226#3
Mirror cleaning of optical compensation unit F226#4
Chiller coolant change F226#5
The set time and the operation time are in 0.1-hour units.

Methods of entering a set time and resetting an operation time
In this normal state, this screen prohibits the entry of data so that
data such as operation times is not deleted by mistake.
To enter data, first set bit 1 of parameter No. 15610 (MDS) to 1.
To enter a set time or reset an operation time, position the cursor
on the desired field, using the arrow keys as appropriate, enter a
setting from the MDI unit, and press the <INPUT> key.
No special soft keys such as all clear are not available. To reset
an operation time, set 0.

- 220-
9.1.3.3 Discharge-related alarm history display

When the CNC detects any of the following alarms, the CNC
automatically preserves data such as power supply operation state and
displays such data on the discharge-related alarm history screen:
- ALM.4063 R/F power supply error
- ALM.4066 Abnormal discharge start
- ALM.4076 Decreased laser power
- ALM.4088 Abnormal discharge tube voltage
If alarms subject to data preservation are issued, up to five data items
can be preserved. If an alarm is issued besides the existing five alarms,
the oldest data is deleted to preserve the new data. In addition to five
data items preserved for issued alarms, one data item collected at the
end of normal power compensation operation is preserved as normal
data. Thus, data for an alarm issued can be compared with normal
data.

Pressing the [ALARM] soft key displays the discharge-related alarm
history screen. This screen consists of six pages. The first page
displays data collected at the end of normal power compensation, and
the second through the sixth pages display data for alarms issued. To
switch pages, use the "PAGE " and PAGE " keys on the MDI panel.
The discharge-related alarm history screen allows data to be
referenced only. The discharge-related alarm history screen does not
allow preserved data to be modified and deleted. The CNC preserves
the data below when an alarm mentioned above is issued and when
power compensation ends.
(1) Data preserved at the end of normal compensation operation
Compensation end date
Compensation end time
Output conditions (output, frequency, duty cycle)
Actual output
Power compensation coefficient
Power supply data (RFV, RFI, DCV, DCI, DCW)

(2) Data preserved when an alarm is issued
Alarm issue date
Alarm issue time
Issued alarm number
Sequence number at the time of alarm issue
Elapsed time after switching to a sequence number at the
time of alarm issue
- 221 -
Output conditions (output, frequency, duty cycle)
Actual output
Power compensation coefficient

9.1.3.4 Laser alarm history screens

The history of only Laser alarms and warnings are displayed.
Following data can be logged 50 in all. The oldest datum is deleted
and new one is logged in case of exceeding 50 items.
Laser warning
Laser alarm
(1) Laser warning
Information for maintenance is logged as laser warning.
The information is only logged. So, message or PMC signal is not
output.
Laser warning is only following information now.

Warning No. 0001
Message PURGE INCOMPLETE
Meaning CNC is powered off before copletng purge.

(2) Reference of logged laser alarms
Pushing soft-key [L ALARM] makes displaying laser alarm history
screen (9 inch CRT image).
5 Laser alarms and warnings are logged in 1 page and total 10
pages are included.
PAGEand PAGEkeys on MDI panel should be used
to change the pages.
Logged data cannot be deleted.
- 222-

9.1.3.5 Pulse power feedback screens

Table data for actual power presumption that are used for pulse power
feedback by actual power presumption method can be referred and
input.
Pushing soft-key [PWR.FB] with setting 1 to parameter
No.29000#1(PTB) makes displaying pulse power feedback screen.

9.1.3.6 Power sensor time constant measurement screen

A time constant of laser power sensor can be automatically measured
in power sensor time constant measurement screen.
Pushing soft-key [PW SNS] with setting 1 to parameter No.2900#2
(PTC) makes displaying power sensor measurement screen.
CNC measures an actual delay time by measuring a power sensor
output with output laser and sets the time to the parameter as a time
constant.
In practical, beam stops after running beam with shutter closed for a
set time by a set power and CNC measures the time that a monitored
power of power sensor is down.
- 223 -
The measured time is set in parameter No.29005 as the time constant
of linear delay filter.

(1) Sequence of time constant measuremen
Pushing soft-key [STRT] in time constant measurement screen or
setting PMC signal PTCMR to 1 makes start of measuring.
Push soft-key [QUIT] or set PMC signal PTCMR to 0 in order to
quit the measurement.
Pushing soft-key [(OPRT)] in time constant measurement screen
makes displaying soft-key [STRT] and [QUIT].
A peak laser power should be set in parameter No.29003 because
of a rated power is different for each type of oscillator.
And beam output time should be set in parameter No.29004.

A beam is internally run with shutter closed in case of satisfying
following conditions.

Laser sequence No. (Diagnose No.908) is 30.
Shutter lock is ON. (*SHTLC signal is 0.)
Shutter is closed.
Beam is not output.
Alarm does not occur.

Present status can be confirmed in power sensor time constant
measurement screen.

9.1.3.7 Leak check screen

It is possible to set parameters for leak check and confirm leak check
result by leak check screen.
Pushing soft-key [leak] makes displaying leak check screen.
Switching off gas control start signal (G222#6) after setting
parameters for leak check causes starting leak check.

- 224-
(1) Switching bit to select leak check enable or disable
Status of parameter No.15153#0 is displayed and it is possible to set
the parameter in leak check screen.
0 : Leak check disable
1 : Leak check enable

(2) Leak check judgment time
Setting value of leak check judgment time (parameter No.15154) is
displayed and it is possible to input a value to the parameter in the
screen.

(3) Status
The status of leak checks operation is displayed. The following
contents are displayed.

STAND BY
GAS PRES CHECK 1ST
LAS PRES CHECK 2ND
GAS PRES CHECK 3RD
GAS PRES CHECK 4TH

(4) Time remaining
The estimated time to leak check end is displayed when all the
valves are shut after completion of evacuation.
The displayed time is deducted by passage time.
The displayed time is not guaranteed because it is rough estimated.

(5) Leak check result
Laser gas pressure 1 to 4 (Diagnose No.954 to 957) read during leak
check are displayed.
The data are only displayed and cannot be reset or operated.
The data are displayed by Torr and kilo-Pascal (kPa).

- 225 -
9.1.3.8 Laser tuning screen

Parameters and diagnoses that are often used at maintenance are
displayed in a mass.
Parameters can be set from the screen.
Running beam internally with shutter closed can be commanded from
the screen

(1) Displayed datas
Pushing soft-key [TUNE] makes displaying laser tuning screen (9
inch CRT image).
Laser tuning screen is composed of 3 pages.
PAGEand PAGEkeys on MDI panel should be used
to change the pages.
Data displayed each page are as follows.

- 226-
Page Data name Message Type No. Notice
1 Command power for running beam internally
Pulse Frequency for running beam internally
Pulse duty for running beam internally
Power calibration coefficient
Actual laser power
Laser gas pressure
Laser sequence status
RF voltage
RF current
DC voltage
DC current
DC wattage
PC:
FR:
DU:
COE:
PA:
TP:
SEQ.
RFV (PSU1-PSU8)
RFI (PSU1-PSU8)
DCV (PSU1-PSU8)
DCI (PSU1-PSU8)
DCW (PSU1-PSU8)
WRK
WRK
WRK
PRM
DGN
DGN
DGN
DGN
DGN
DGN
DGN
DGN

15204
906
905
908
909-
910-
925-
926-
941-

(Note)
2 Assist gas enable
Beam on enable with shutter closed
Power calibration enable
Evacuation enable at RUN-OFF
DCV,DCI,DCW display enable
Power calibration command at all tubes use
Power calibration coefficient
Upper limit of power command
Laser power feedback gain
Maximum power command
AGA
BMO
CLB
GVW
(DCW)
POWER CALIB. 4
PWR-CALIB. COE
PWR-COMAND LIMIT
FEEDBACK GAIN
MAXIMUM POWER
PRM
PRM
PRM
PRM
PRM
PRM
PRM
PRM
PRM
PRM
15000#2
15000#3
15000#4
15003#2
15008#5
15201
15204
15207
15208
15210

3 Minimum power command
Upper limit of power command for duty
unclamped
Power input calibration coefficient
Wait time for starting discharge
Bias command
Laser gas pressure at oscillating(50Hz)
Laser gas pressure at oscillating(60Hz)
Permission range for power down
Power table data for all tubes use 6
Power table data for all tubes use 7
MINIMUM POWER
UNCLMP PC
CMD-LMT

PWR-INPUT CALIB.
WAIT DISCHARGE
BIAS COMMAND
INT. PRES. OSCIL
INT. PRES. OSCIL
POWER DEC. LIMIT
(POWER TBL ALL 6)
(POWER TBL ALL 7)
PRM
PRM

PRM
PRM
PRM
PRM
PRM
PRM
PRM
PRM
15211
15212

15215
15222
15223
15242
15243
15271
15306
15307

(Note) It is not possible to set by this screen.

Type) WRK:Special parameter(Writable)
PRM:parameter(Writable)
DGN:Diagnose(Only display)

Remark ) Please set 1 to parameter No.15160#1(MDS) in case
of writing special parameter and parameter.

- 227 -
9.1.3.9 Command of running beam internally with shutter closed

It is possible to command running beam internally with shutter closed
in laser tuning screen.
Pushing soft-key [(OPRT)] in laser tuning screen makes displaying
soft-key [DISCH.], [DISC.2] and [CAN]. (Refer to figure on the
previous page.)
Pushing soft-key [DISCH.] or [DISC.2] with satisfying following
conditions causes running beam internally with shutter closed

Parameter No.15160#1(MDS) is set 1.
Laser sequence No. (Diagnose No.908) is 30.
Shutter is closed.
Beam output is not commanded.
Laser alarm does not occur.

Pushing soft-key [CAN] during running beam internally causes
stopping beam.
When soft-key [DISCH.] is pushed, the beam output condition is
determined only by the command power, the pulse frequency, and the
pulse duty in the laser tuning screen.
The power calibration coefficient, the power feedback and each
override-command are invalid.
When soft-key [DISC.2] is pushed, above 3 functions are valid.

NOTE
The running beam internally does not stop even if
the switch of the RESET or BEAM OFF is pushed
in case of commanding the running beam internally
on the laser tuning screen.
And the running beam internally stops when the
switch of the emergency stop or HV-OFF is
pushed.

9.1.3.10 Input and output of saved maintenance data

The saved data can be output to memory card or other external device
via reader puncher interface (RS-232C). And some kind of the data
can be input.
The format of the output data is almost the same as the display of
LCD, but the comment is output only in English.
The data that can be input and output are as follows.

Data Output Input
Power calibration coefficient history data OK NG
Parts running time data OK NG
Alarm related to discharging data OK NG
Laser alarm history data OK NG
Power feedback table data OK OK

- 228-
(1) Output the data to memory card with operating the each
maintenance screen
(a) The I/O channel should be switched to the memory card by
setting 4 to parameter No.0020.
(b) After switching the operation mode to "EDIT", data are
output by pushing the soft-key as follows. [OPER] ->
[PUNCH] -> [EXEC]
(c) The output data are saved as a text file and the file is named
as follows.

Data File name
Power calibration coefficient history data PW-OFS.DAT
Parts running time data P-ACT.DAT
Alarm related to discharging data LSALM-H.DAT
Laser alarm history data LSRALMHT.DAT
Power feedback table data LPPFBDT.DAT

(2) Data Input from and output to external device via reader puncher
interface with operating the each maintenance screen
(a) HANDY-FILE should be connected with CNC.
And HANDY-FILE should be communicated with CNC by
setting communication conditions such as I/O channel, baud
rate, etc to CNC parameters.
(b) Select the screen of desired data and push soft-key [(OPRT)]
after switching the operation mode to "EDIT",.
(c) Push soft-key [PUNCH] in case of data output and push
soft-key [READ] in case of data input.
And push soft-key [EXEC], then data can be output or input.
(d) The file name should be set by the receiver (HANDY-FILE).

(3) Data Input from and output to memory card with operating
ALL-IO screen
(a) The I/O channel should be switched to the memory card by
setting 4 in the parameter (No.0020).
(b) After switching the operation mode to "EDIT", ALL-IO
screen should be selected, and push the soft-key
corresponding to the desired data.
(c) Push soft-key [OPER], and soft-key [PUNCH] and [F
READ] are displayed.
Push soft-key [PUNCH] in case of data output. Push
soft-key [F READ] in case of data input.
(d) Set an arbitrary file name set and push soft-key [EXEC].

Data Soft-key
Power calibration coefficient history data [PW.OFS]
Parts running time data [ACT.TM]
Alarm related to discharging data [DISCH.]
Laser alarm history data [L ALM]
Power feedback table data [PWR FB]

- 229 -
9.2 AUTOMATIC AGING

9.2.1 Overview

The automatic aging function automatically performs aging
(warmed-up gas operation) according to the halt period of the laser
oscillator.
The date and time (year/month/day/time) when the oscillator was
previously stopped is recorded in a parameter. By comparing this date
and time with the date and time when the oscillator is restarted, the
halt period of the oscillator is calculated. In accordance with the
calculated halt period, the number of aging operations is automatically
calculated. A minimum halt period that requires automatic aging can
be set in parameter No. 15339. A value from 30 hours to 120 hours
can be set in this parameter. The number of aging operations is
calculated as indicated below.

Halt period
Number of
aging
operations
Remark
0 to setting (No.15339) 0
Setting to 84 hours 2
0 when a value from 30 to 84 is
set in parameter No. 15339
85 hours to 108 hours 3
0 when a value from 85 to 108 is
set in parameter No. 15339
0 when a value from 109 to 120
is set in parameter No. 15339
181 hours or more 7


(1) Set bit 6 (EGE) of parameter No. 15008 to 1 to enable the

#7 #6 #5 #4 #3 #2 #1 #0
15008 EGE

EGE Automatic aging function is:
1 : Enabled.
0 : Disabled.

(2) Check that the following parameter is set:
Parameter No.15320 to 15333
(3) When the oscillator start switch (RUN) is turned on, the number
of aging operations is calculated from the date and time when the
oscillator was stopped previously and the current date and time
when the oscillator is started. The calculated number of aging
operations is automatically set in parameter No. 15334.
- 230-
(4) Aging operation is performed as many times as the number of
aging operations set in parameter No. 15334.
In aging, warmed-up gas operation (internal discharge) is
performed at low gas pressure and low power.
(5) The oscillator is started up at low pressure, and internal discharge
is performed at low power for a one-aging time. The discharge
then stops, and the oscillator returns to the LRDY state.
(6) The cycle from steps (4) to (5) above is automatically repeated as
many times as the set number.
(7) After the aging cycle is performed as many times as the set
number, power compensation operates, and the oscillator is
started up.
(8) Upon completion of automatic aging, the oscillator is placed in
the oscillation preparation completion state (LSTR).

9.2.3 Manual Operation

By using the automatic aging function, discharge aging with the laser
gas circulating system opened to the atmosphere can be performed.
(1) When the discharge preparation completion state (LRDY) is set
by turning on the oscillator start switch (RUN), set the number of
aging operations in parameter No. 15334.
(2) When the discharge start switch (HVON) is turned on after the
parameter is set, aging operation is performed as many times as
the set number. Upon completion of aging, the oscillation
preparation completion state (LSTR) is set.

9.2.4 Automatic Aging Function Setting Screen

On the Automatic aging function setting screen, it is possible to
display and change the setting value which is necessary on Automatic
aging function, as follow:
Push the MDI key OFFSET several times for displaying the laser
setting screen. Push the soft key [SET]. Push the soft key [AGING]

STATUS MAINT. AGING

- 231 -
Screen Page 1
No.15008#6
No.15334
No.15335
No.15336
No.15337
No.15338

No.15340
Parameter No.

Screen Page 2
No.15326
No.15327
No.15328
No.15329
No.15330
No.15331
No.15339

Parameter No.
Screen Page 3
No.15000#4
No.15200
No.15201
No.15321
No.15322
No.15205
No.15242
No.15243

Parameter No.

(1) Manual start up for aging function
The item MANUAL MODE on the page 1 is 0 when CNC is
turned on. By RUN ON after setting the item MANUAL MODE
to 1 on the page 1 of the aging setting screen, the aging function
starts according to the item SET MANUAL TIMES irrespective
of setting value of parameter No.15008#6 or oscillator stop time.
The item MANUAL MODE becomes 0 automatically when
the laser oscillator becomes LSTR status after the aging function is
completed.
- 232-

(2) Method to stop the manual aging
When the aging function starts up, the setting values of gas
pressure and laser output conditions are renewed automatically. If
it is necessary to stop the aging function during the aging function
is executed and to execute usual start up sequence, see as follow.
Both the manual aging and the automatic aging are the same
operation.

(a) The machine that cant operate HV ON
(a-1) RUN OFF and wait till PURGE status
(a-2) Set the value of MANUAL MODE on the page 1 to 0
(a-3) Set the value of AGING on the page 1 to 1
(a-4) Set the present time to each TIME DATA on the page 1
(a-5) After setting values are changed, RUN ON again. The
parameters of gas pressure(No.15242, 15243) are
changed to the value of No.15324 and No.15325
automatically, and the parameters of power calibration
condition (No.15201, 15332, 15333, 15205) are changed
to the values of parameters from No.15320 to No.15323.

(b) The machine that can operate HV ON
(b-1) Turn off the HV ON
(b-2) Set the value of TIME LEFT on the page 1 to 0
(b-3) After setting value is changed, turn on the HV ON again.
The parameters of gas pressure and the parameters of
power calibration condition (No.15201, 15332, 15333,
15205) are changed to the values of parameters from
No.15320 to No.15323.

(3) Screen changing
It is possible to change the screen by parameters
#7 #6 #5 #4 #3 #2 #1 #0
15014 MAG

MAG For Automatic aging function setting screen:
0 : Only page 1 can be displayed and only item MANUAL MODE
can be set. The only value 2 can be set in the item MANUAL
TIMES
1 : All the items of all the pages can be displayed. The value from 2
to 255 can be set in the item MANUAL TIMES

- 233 -
9.3 AUTOMATIC LEAKAGE CHECK

9.3.1 Overview

In order to check the vacuum system for a leakage, all valves are
closed automatically and the intra-tube pressure is measured at
intervals of a certain time period. Measured data is preserved. From
data recorded on the diagnosis screen, whether a leakage is found can
be checked.


(1) Set bit 0 (LCK) of parameter No. 15153 to 1 to enable the
leakage check function.

#7 #6 #5 #4 #3 #2 #1 #0
15153 LCK

LCK
0: Disables the automatic leakage check function.
1: Enables the automatic leakage check function.

Set also a leakage check determination time.

15154 Leakage judgment time

[Unit of data] Second
[Valid data range] 3 to 65535
[Standard setting value] 900 (15 minutes)
Set a period of time for which the valves are closed to maintain the
pressure for a leakage check. Within a set period of time, the internal
pressure of the discharge tube is measured four times in total.
When 1 or 2 is set to in this parameter, the automatic leackage check
function is not executed.

15256 Evacuating time in RUN OFF sequence

[Unit of data] Second
[Standard setting value] 600 (10 minutes)
If gas pressure control start signal (G222#6:RUN) is turned off with
setting parameter No.15003#2 to 1, oscillator is evacuated for the
set time. This parameter exists before addition of this function.
However, the minimum setting value is changed from 600 to 0.

(2) Parameter setting by the maintenance screen
Refer to 9.1.

- 234-
9.3.3 Operation of the Leakage Check Function

(1) When the oscillator start switch (RUN) is turned off in the
oscillation preparation completion state (LSTR), gas pressure
control is terminated. After waiting for a turbo blower stop time
of about 75 seconds (waiting is performed even if the turbo
blower is stopped), evacuation is started.
(2) When evacuation has been performed for the time (10 minutes,
usually) set in parameter No. 15256 or the pressure (DGN.
No.905) inside the discharge tube becomes zero, all valves are
closed. Then, the oscillator sequence state number (DGN.
No.908) becomes 51 (in the leakage check mode), and the
all-valve-closed signal (F224#3: AVCL) is output. "All valves"
mean the following:
GRDY : Laser gas supply valve
PUG : Purge valve
OPV : External piping exhaust valve
BPV : Bypass valve
VEN : Exhaust valve
TWV : Three-way valve
PCV : Gas pressure control valve
(3) When all valves are closed, the pressure in the discharge tube
(DGN. No.905) is sampled, and sampled data is preserved as
diagnosis information in DGN. No.954 through DGN. No.957.
The pressure in the discharge tube is first sampled 30 seconds
after all valves are closed, then is sampled three times at intervals
of 1/3 of the leakage determination time. DGN. No.954 through
DGN957 are cleared when the leakage check mode is set.
(4) Upon completion of the last sampling operation, the
all-valve-closed signal (AVCL) is turned off, and a purge
operation is performed. When the purge operation is completed,
the leakage check mode signal (LCKMD) is also turned off.
RUN=OFF
Evacuation time
parameter No.15155
+75 seconds
AVCL=1
30
seconds
Ts
seconds
Ts
seconds
Ts
seconds
Leakage determination time parameter No.15154
T=3Ts seconds
Completion of purge
Pchk1
(DGN. No.954)
Pchk2
(DGN. No.955)
Pchk3
(DGN. No.956)
Pchk4
(DGN. No.957)
LSTR
G
a
s

p
r
e
s
s
u
r
e
Time
Leakage check mode

- 235 -
9.4 POWER FEEDBACK FUNCTION BASED ON THE ACTUAL
OUTPUT ESTIMATION METHOD

9.4.1 Overview

Based on specified output conditions, this function estimates an actual
output by using the data table in which the relationships between the
specified output conditions and actual outputs are registered, and
exercises feedback control, aiming at the estimated value. Necessary
data needs to be registered beforehand in the data table.
The feedback gain and compensation clamp value are the same as
used with the conventional feedback control function. (A feedback
gain is set in parameter No. 15208, and a compensation clamp value is
set in parameter No. 15209.)

9.4.2 Data Table

9.4.2.1 Method of registration

(1) Set bit 0 (MNT) of parameter No. 15160 and bit 1 (PTB) of
parameter No. 29000 to 1 to enable display of the data table
screen for actual output estimation.

#7 #6 #5 #4 #3 #2 #1 #0
15160 MNT

MNT
0: Does not display the laser maintenance screen.
1: Displays the laser maintenance screen.

#7 #6 #5 #4 #3 #2 #1 #0
29000 PTB PFB

PFB Pulse power feedback control based on the actual output estimation
method is:
0 : Not used.
1 : Used.
PTB On the data table screen for actual output estimation, data input is:
0: Disabled.
1: Enabled.
When this parameter is set to 0, the screen is not displayed, and data
cannot be input.
Usually, set this parameter to 0 to prevent the data from being
modified inadvertently.

- 236-
(3) Press the operation key "Setting" of the CNC. Then, press the
soft keys displayed at the bottom of the CNC screen as shown
below.
STATUS MAINT.

L ALM
Data table for actual output estimation

9.4.2.2 Data table structure

This function creates a table for each of eight specified peak powers.
For one peak power, 8 frequencies and 6 duty cycles can be set.
Frequencies and duty cycles need not be set at equal intervals.

Data table for actual output estimation
Peak power
Duty 1 Duty 2 Duty 3 Duty 4 Duty 5 Duty 6
Frequency 1 Actual output
1
Actual output
9
Actual output
17
Actual output
25
Actual output
33
Actual output
41
2
Actual output
10
Actual output
18
Actual output
26
Actual output
34
Actual output
42
3
Actual output
11
Actual output
19
Actual output
27
Actual output
35
Actual output
43
4
Actual output
12
Actual output
20
Actual output
28
Actual output
36
Actual output
44
5
Actual output
13
Actual output
21
Actual output
29
Actual output
37
Actual output
45
6
Actual output
14
Actual output
22
Actual output
30
Actual output
38
Actual output
46
7
Actual output
15
Actual output
23
Actual output
31
Actual output
39
Actual output
47
8
Actual output
16
Actual output
24
Actual output
32
Actual output
40
Actual output
48

Eight tables are prepared (for peak powers 1 to 8).
Data to be registered needs to satisfy the following conditions:
Peak power 1 < Peak power 2 < Peak power 3 . . < Peak power 8
Frequency 1 < Frequency 2 < Frequency 3 . . . < Frequency 8
Duty 1 < Duty 2 < Duty 3 . . < Duty 6
- 237 -
9.4.3 Compensation for Power Sensor Response Speed

To improve the response delay of the power sensor, the monitored
value of the power sensor to be returned in response to an output
command value is estimated, and feedback control is exercised
according to the deviation between the estimated value and the
monitored value of the power sensor. Estimation processing is based
on the primary delay filter to which an output command value is input.
So, a time constant needs to be set beforehand.

9.4.3.1 Time constant measurement method

(1) Set bit 2 (PTC) of parameter No. 29000 to 1 to enable display of
the data table screen for actual output estimation. The rated
output depends on the oscillator model. So, set a measured peak
power in parameter No. 29003 actually. In addition, set a beam
output time in parameter No. 29004.

#7 #6 #5 #4 #3 #2 #1 #0
29000 PTC

PTC On the time constant measurement screen, time constant measurement
is:
0: Disabled.
1: Enabled.
When this parameter is set to 0, the screen is not displayed, and time
constant measurement is disabled.
However, a time constant measurement can be made using an external
signal.
Usually, set this parameter to 0 to prevent the time constant
measurement function from being started inadvertently.

29003 Peak power in power sensor time constant measurement

[Data type] Word
[Unit of data] W
Set a peak power in measurement of the time constant of the power
sensor.
Usually, set the rated output of the oscillator.

29004 Beam output time in power sensor time constant measurement

[Data type] Word
[Unit of data] msec
Set a period of time for which a beam is output to measure the time
constant of the power sensor.

- 238-
(2) Press the operation key "Setting" of the CNC. Then, press the
soft keys displayed at the bottom of the CNC screen as shown
below.
STATUS MAINT.

L ALM
Time constant
measurement screen

(3) Start a measurement by pressing the [START] soft key on the
dedicated time constant measurement screen. Perform internal
discharge at the rated output for a certain time, then stop the
beam command. Next, measure the time required until the
monitored value of the power sensor becomes lower than 36.8%
of the rated output. Set the measured time in parameter No.
29005 as the time constant of the primary delay filter.

29005 Power sensor time constant

[Data type] Word
[Unit of data] msec
Set a time constant for the power sensor.

- 239 -
9.4.4 Bell-shaped Filter for Power Feedback Gain

To suppress output command value variation due to power feedback at
the time of output command value switching, a bell-shaped filter can
be applied to the power feedback gain.

(1) Filter setting method
Set parameter No. 29001 and parameter No. 29002.

29001 Time constant 1 (T1) for bell-shaped filter for power feedback gain

[Data type] Word
[Unit of data] msec
Set a time constant for a linear section. When 0 is set in this parameter,
the bell-shaped filter is not used.


[Data type] Word
[Unit of data] msec
Set a time constant for a round section.

A bell-shaped filter can be specified by setting two time
constants: one for the linear section T1 (parameter No. 29001)
and the other for the round section T2 (parameter No. 29002).

T1
T2
t
Gain

- 240-
9.5 WARMING-UP FUNCTION

9.5.1 Overview

The warm up function detects the temperature in the laser oscillator
when the laser oscillator is started. And this function is executed the
warm up of the laser oscillator when the temperature of the laser
oscillator is too low. The output power decreases, and the alarm as the
protection operation is generated in the state of the low temperature of
the laser oscillator. So the laser can be safely started up by warming
up the laser oscillator beforehand.

When the temperature in the laser oscillator is 20 or less in start-up
of the laser, warming up starts. The warm up function executes inner
discharge two times or less. And the laser power calibration is done
after warm up. The alarm No.4124(OVER COOL) is generated, when
the temperature of the laser oscillator does not reach 20 after warm
up. This alarm is cleared by reset. The warm up is interrupted in case
of HV-OFF or the RUN-OFF.

9.5.2 Method of Setting

#7 #6 #5 #4 #3 #2 #1 #0
15015 TPS OWU

[Data type] Bit
OWU
0: Invalid
1: Effective
It is necessary to set parameter No.15000#4(the power calibration
efficiency) to 1 for executing warming-up function.

TPS Switch of temperature sensor installed in laser oscillator.
0: The cabinet temperature sensor is installed.
1: The low temperature sensor is installed.

- 241 -
9.6 PURGE WORKING AFTER ALARM NO.4073

9.6.1 Overview

When laser gas in the cylinder runs low, laser alarm No.4073
(Decrease of laser gas pressure) happens by detecting supply gas
pressure. Then exchanging of gas cylinder is needed. In this case, the
air enters into gas tube between gas cylinder and oscillator. As a
result, there is a possibility of the failure of laser power supply unit
and discharge tube because of abnormal discharge.
This new sequence has the function that works the exhaust valve of
the external pipe (V6) after exchanging gas cylinder and RUN
ON ,and that executes automatic aging function if necessary. As a
result, laser gas composition is normally kept, and it prevents the
failure of laser power supply unit and discharge tube because of
abnormal discharge. Therefore it contributes that the reliability is
improved.

9.6.2 Function

(1) Alarm No.4073 during laser sequence except for Sequence 12
When alarm No.4073 happens in laser sequence except for
sequence 12, laser gas supply valve (V1) is closed at once.
Because of this operation, gas pressure in the external gas pipe is
higher than atmospheric pressure. Therefore it can reduce that the
air enters into the external pipe in exchanging gas cylinder. After
exchanging gas cylinder, in turning on laser oscillator, laser gas
that has remained in outside pipe is exhausted, and then laser gas
supply valve(V1) is opened, and turn-on sequence is carried on.

NOTE
After occurrence of alarm No.4073 and exchanging
of laser gas cylinder, don't execute RUN-OFF
during sequence No.16 when V6 opens. It is
reason that oscillator turns on without cleaning the
gas in external tube because of closing V6 next
RUN ON. If RUN OFF was executed in sequence
No.16, it is necessary to turn off NC and re-execute
RUN ON.

- 242-
(2) Alarm No.4073 during laser sequence in Sequence 12
If the gas cylinder empties during purge working in RUN-OFF,
alarm No.4073 will happen in three minutes because of shortage
of the laser gas and the impossibility of purge working.
In this case, gas pressure in external pipe is lower than
atmospheric pressure. Therefore a large volume of the air enter in
external pipe when gas cylinder is exchanged. If oscillator is
worked in this state, even though exhaust is executed working
V6, it is impossible to remove the contamination in external pipe.
As a result, abnormal discharge occurs, and then some parts ,such
as power supply unit, discharge tube and trigger electrode ,might
break. To avoid this bad situation, V6 is worked and aging
automatically is executed.

NOTE
1 In spite of parameter No.15008#6=0 which means
that automatic aging is disable, aging is
automatically executed two times when alarm
No.4073 happens without no-arrival to purge in
three minutes.
2 After occurrence of alarm No.4073 and exchanging
of laser gas cylinder, don't execute RUN-OFF
during sequence No.16 when V6 opens. It is
reason that oscillator turns on without cleaning the
gas in external tube because of closing V6 next
RUN ON. If RUN OFF was executed in sequence
16, it is necessary to turn off NC and re-execute
RUN ON.

- 243 -
9.7 BASE BIAS MODULATION

9.7.1 Function

Using this function, laser power dropping time is shorter in power
command off, and some effects will be expected as follows:
(1) The burning and the blowing of pierce at the start of processing
will decrease sharply.
(2) This function will realize an ideal electrical shutter in the old
type oscillator also.
(3) It is not necessary to adjust the base discharge at the treating for
the failure like (1) or (2).
(4) This function can simplify the power supply unit adjustment, and
the adjusting time is shorter.
(5) The reliability of the conventional trigger electrode method will
be improved.

9.7.2 Setting

Set the values in the parameters below.

15224 Modulation voltage : Vd

[Unit of data] mV

15225 Modulation time: Td

[Unit of data] 10msec

(Example) C4000i-A: Modulation voltage 200mV
Modulation time 5sec
Power
Command
Power
Conventional method Base Bias modulation
Vd
Td
Power
Command
Power
- 244-
9.8 PROCESSING MODE CHANGE FUNCTION

9.8.1 Outline

Processing mode change function can change two level of laser
gas pressure and various parameters corresponding to the laser gas
pressure to realize a suitable processing performance of FANUC
LASER C series for the processing material or the processing
objectives.

9.8.2 Setting

Processing mode change function can be used when parameter
No.29016#7(CCM)=1. When this function is available, you can select
the parameter setting for Normal mode or High power mode or
Fine mode in laser processing mode change screen. In Fine mode,
under mentioned setting must be set in the newly added parameters.
Conventional parameters are used in High power mode.

Table 9.8.2(a) Setting parameters for each mode.
Setting
Parameter
(Normal mode)
(High power mode)
Parameter
(Fine mode)
Power calibration coefficient No.15204 No.29020
Bias value No.15223 No.29022
In-tube pressure No.15242(50Hz)
No.15243(60Hz)
No.29023(50Hz)
No.29024(60Hz)
Normal discharge tube voltage No.15270 No.29025
Power table (HALF) No.15290 to
No.15298
No.29026 to
No.29034
Power table (ALL) No.15300 to
No.15308
No.29037 to
No.29045
Upper limit on power No.15207 No.29048
Maximum peak power No.15210 No.29049
Upper limit on power when the duty
ratio is not clamped
No.15212 No.29050
Criterion for clamping the duty ratio No.15213 No.29051

Table 9.8.2(b) Setting parameters for automatic aging function of each mode
Setting
Parameter
(Normal mode)
(High power mode)
Parameter
(Fine mode)
Laser power in normal calibration No.15320 No.29060
Oscillation freq. in normal calibration No.15321 No.29061
Pulse duty ration in normal calibration No.15322 No.29062
Calibration time of normal calibration No.15323 No.29063
Gas pressure in normal calibration (50Hz) No.15324 No.29064
Gas pressure in normal calibration (60Hz) No.15325 No.29065
Laser power in aging No.15326 No.29066
Oscillation freq. in aging No.15327 No.29067
Pulse duty ration in aging No.15328 No.29068
- 245 -
Setting
Parameter
(Normal mode)
(High power mode)
Parameter
(Fine mode)
Calibration time in aging No.15329 No.29069
Gas pressure in aging (50Hz) No.15330 No.29070
Gas pressure in aging (60Hz) No.15331 No.29071
Pulse frequency in normal calibration No.15332 No.29072
Pulse duty ration in normal calibration No.15333 No.29073

9.8.3 Operation

9.8.3.1 Change of processing mode

Setting screen for processing mode change is displayed with under
mentioned procedure.
(1) Push the MDI key OFFSET several times and select the laser
setting screen.
(2) Push the soft key [SET].
(3) Push the page key and select setting screen for
processing mode.

This setting item on this screen can change another parameter setting
for processing mode and corresponds to the state of parameter
No.29016#0(CTA).

If you change the processing mode when laser oscillator is in purge
state, or discharge start signal HVON (G222#7) isnt turned on after
laser oscillator is in discharge start ready state (F221#1/ LRDY=1), set
the processing mode in the setting screen and start the laser start-up
sequence. When laser oscillator becomes laser oscillation state
(F221#6/ LSTR=1), laser beam can be outputted in the set processing
mode.

- 246-
If you change the processing mode when on the way of start-up
sequence after laser oscillator is in discharge start ready state(F221#1/
LRDY=1) and HVON signal is turned on or when laser oscillator is in
laser oscillation state(F221#6/ LSTR=1), laser sequence is restarted
after returning to the state before discharging automatically by CNC.
The state of signal HVON must be kept as 1 at this time. Discharge
start ready signal LRDY is not turned on because laser sequence is
restarted from just after discharge start ready state. The changed
processing mode isnt available just after changing the setting. The
changed processing mode becomes available when laser sequence is
restarted just after the discharge start ready state automatically by
CNC.

9.8.3.2 In case that laser alarm occurs during the processing mode
change

In case that laser alarm happens during the processing mode change,
laser gas change function is interrupted. Automatic restart of laser
sequence by CNC does not work even if alarm is released. When laser
sequence becomes PURGE or LRDY state by laser alarm, turn on the
signal RUN( G222#6) or signal HVON after removing the causes of
alarm and releasing the alarm display by reset. Then, Laser oscillator
is started by CNC according to the set mode.

9.8.3.3 Processing mode change during power calibration

In case of changing the processing mode during power calibration is
being executed, power calibration function is interrupted and laser
sequence is restarted automatically by CNC to change the processing
mode. After that, power calibration function is restarted according to
changed processing mode.

9.8.3.4 Processing mode change during warm up function

Warm up function of laser oscillator warms up the laser oscillator by
repeating internal discharge. In case of changing the processing mode
during warm up function, the laser oscillator is started up in the same
way as you change the processing mode during power calibration.

9.8.3.5 Processing mode change during automatic aging function

In case of changing the processing mode during automatic aging
function is being executed, aging operation at that time is executed in
processing mode before changing. Next execution cycle of aging
function is executed in processing mode after changing. For example,
if you change the processing mode when remaining cycles of aging
function is 6, aging function that cycle time is 6 is executed in
processing mode before changing. Next aging cycle (remaining cycle
is 5) is executed in changed processing mode after former aging
cycle (remaining cycle is 6) is completed.

- 247 -
9.8.3.6 Processing mode change during beam output

In the setting screen, processing mode can be changed even if during
automatic operation or laser output by manual operation. But laser
beam cant be outputted at that time because laser oscillation is
stopped and restarted automatically by CNC to change laser gas. And
laser alarm happens by stopping the oscillation. Laser gas change
function is interrupted when laser alarm happens. So, laser sequence is
not restarted automatically by CNC even if alarm is released. In this
case, please turn on signal RUN or HVON as normal laser start-up to
restart laser sequence by manual.
Changing the processing mode during laser beam output is not
recommended in conclusion.

9.8.3.7 Display of mode change

The message GAS CHG blinks in the lower right-hand of CNC
screen when laser gas change sequence is started automatically by
CNC to change the processing mode.
When processing mode is changed during power calibration, power
calibration function is re-executed after laser gas change sequence is
started. In this case, message PWR CLB blinks because power
calibration is executed even if during processing mode change.

9.8.3.8 Power calibration

In case of processing mode is changed when laser oscillator is in
oscillation state (LSTR=1), laser oscillation is stopped and laser
sequence is restarted up automatically. But power calibration is not
executed again.

9.8.3.9 Power calibration coefficient

A same value of power calibration coefficient is set to parameter
No.15204 for Normal mode or High power mode and parameter
No.29020 for Fine mode automatically by CNC when laser oscillator
is started according to set processing mode and power calibration
function is executed.
If you change the power calibration coefficient value of each
processing mode by manual operation during laser oscillator is in
oscillation state(LSTR=1), laser oscillator output laser beam with the
changed power calibration coefficient.

- 248-
9.8.3.10 Automatic aging function setting screen

In the automatic aging function, the parameters that are used for the
function are changed to those for Normal mode or High power mode
or for Fine mode by processing mode setting. And displayed items of
aging function are also changed in the aging function setting screen. In
case of parameter No.15014#4(MAG)=1, all the pages of aging setting
screen are displayed. At that time, the items displayed in page 2 and
page 3 are changed to those for Normal mode or High power mode or
for Fine mode by processing mode setting. Which setting values are
displayed is indicated on the automatic aging setting screen.

9.8.3.11 Laser gas monitor

In the laser oscillator start up sequence, alarm No.4125 happens if
DCI value of laser power supply is equal to or higher than parameter
No.29047 when in-tube pressure reaches parameter No.29046 after
HVON(G222#7)=1. This alarm shows that the composition (mixture)
of laser gas is not correct for set processing mode. When this alarm
happens, oscillator stop sequence is started and laser oscillator returns
to PURGE state.
This alarm is monitored just only one time even if laser oscillator start
up sequence is repeated by automatic aging function or warm up
function.
Alarm No.4125 cant be monitored if parameter No.29046, No.29047
or No.15008#5 is 0.

APPENDIX

B-70445EN/01 APPENDIX
- 251 -
A.EXTERNAL VIEW OF LASER
OSCILLATOR
A EXTERNAL VIEW OF LASER
OSCILLATOR

APPENDIX B-70445EN/01
- 252 -
A. EXTERNAL VIEW OF LASER
OSCILLATOR

Fig.A(a) External view of laser oscillator (C2000i-B : short optical path length type)

Fig.A(b) External view of laser oscillator (C2000i-B : long optical path length type)

- 253 -
A.EXTERNAL VIEW OF LASER
OSCILLATOR
Beam
Beam

Fig.A(c) External view of laser oscillator (C4000i-B : short optical path length type)
Beam
Beam

Fig.A(d) External view of laser oscillator (C4000i-B : long optical path length type)
B.SPECIFICATIONS APPENDIX B-70315EN/01
- 254 -
B SPECIFICATIONS

Item
C2000i-B
(Short optical
path length)
C2000i-B
(Long optical
path length)
C4000i-B
(Short optical
path length)
C4000i-B
(Long optical
path length)
Type C2000i-B C4000i-B
Method High-speed axial CO
2
laser by high-frequency discharge extitation
Structure Integrated type (Oscillator and power supply)
Rated laser output 2,000 W 4,000 W
2,500 W 4,000 W
Maximum laser output
Continuously variable output range of 100W or greater
2,700W 5,000W
Pulse peak value
For 500Hz or less and a duty cycle of 50% or less
1% 2%
Output stability
For rated output and eight continuous operation duting output feedback control
Laser wavelength 10.6m
Beam mode Low order one
Beam diameter (at outlet)
Approximately
27mm or less
Approximately
24mm or less
Approximately
27mm or less
Approximately
24mm or less
Polarization 45 linear polarization Circular polarization 90 linear polarization
Angel of beam
divergence (full angle)
2 mrad or less
Pulse output command
frequency
5 to 2,000 Hz
Pulse output command
duty factor
0 to 100%
Composition
Mixture of CO
2
:He:N
2
(N
2
balance)
Composition ratio 50.25% : 603.00% : 351.75%
Gas pressure 0.1750.025 MPa (0.15 to 0.20 MPa) measured on a gauge
Laser gas
Consumption About 10 liters/h
Amount 75 liters/min or more 160 liters/min or more
Temperature 20 to 30C
Stability of
water
temperature
1C (for laser output stablility of 1%) 2C (for laser output stablility of 2%)
Circulating
water pressure
0.5 MPa or less on a gauge
Cooling
water
Recommended
cooling capacity
22Kw or more 44kW or more
Power requirements 200VAC +10%, -15% 50/60 Hz1Hz or 220VAC +10%, -15% 60 Hz1Hz
Required input power 33 kVA 55 kVA
Maximum current 110A 190A
Hour meter Total operation hoursof the exhaust pump
Electric shutter Provided
Warning lamp Blinks while discharge is in progress. (option)
Mass About 700 kg About 900 kg

B-70445EN/01 APPENDIX C.ERROR CODE LIST
- 255 -
C ERROR CODE LIST

Number Message Alarm handling level
4061 A/D CONVERTER1 Up to a purge
4062 A/D CONVERTER2 Up to a purge
4063 RF POWER SUPPLY / LASER GAS Up to LRDY
4065 SHUTTER ACTION Up to LRDY
4066 DISCHARGING Up to LRDY
4067 LASER CABINET OH Up to a purge
4068 BEAM REFLECTION
In the LSTR state,
shutter closed, beam OFF
4069 LASER IF PCB Up to a purge
4070 CHILLER NOT READY Up to a purge
4071 ASSIST GAS NOT READY
In the LSTR state,
4072 CHILL FLOW Up to a purge
4073 LASER GAS PRES. Up to a purge
4074 OXYGEN DENSITY Up to a purge
4075 CHILL TEMP. Up to a purge
4076 LASER POWER DOWN Up to a purge
4077 ABSORBER TEMP. Up to a purge
4078 LASER TUBE PRES. Up to a purge
4079 PUSH RESET KEY Up to LRDY
4080 LASER TUBE EXHAUST Up to a purge
4081 GAS PRES. CONTROL Up to a purge
4082 TUBE PRES. SENSOR Up to a purge
4083 SHUTTER NOT OPEN
In the LSTR state,
4085 MIRROR CLEANING
Alarm issued
To be canceled with reset
4087 SHUTTER OH Up to LRDY
4088 LASER VOLTAGE DOWN Up to a purge
4089 ASSIST GAS NO SELECT
4090 LASER NOT GENERATE
In the LSTR state,
4094 VANE PUMP Up to a purge
4099 GAS PRES. NOT REACH Up to a purge
4100 INVERTER 1 Up to a purge
4101 OUT OF FREQUENCY 1 Up to a purge
4105 TURBO TEMP. 1 Up to a purge
4106 BLOWER OIL SHORTAGE Up to a purge
4107 MIRROR NOT INSTALLED Up to LRDY
4116 BLOWER OIL TIME LIMT Up to a purge
4124 OVER COOL
Alarm issued
To be canceled with reset
4125 LASER GAS SPEC/MIX ALARM 1
4132 PARAMETER WAS CHANGED Up to LRDY

C.ERROR CODE LIST APPENDIX B-70445EN/01
- 256 -

PURGE
: Completion state
LRDY
: Discharge ready state
LSTR
: Discharge ready
/TREAT
ALARM
MONITOR
1
ALARM
MONITOR
2
ALARM?
RUN ON
HV ON=
ON
ALARM?
RESET
RESET
MONITOR
MONITOR

Alarm treatment of FANUC LASER C2000i/C4000i -MODEL B

B-70445EN/01 APPENDIX D.DIAGNOSIS SCREEN INFORMATION
- 257 -
D DIAGNOSIS SCREEN INFORMATION

If a fault occurs, it is necessary to determine in which of the CNC,
machine, and laser oscillator the fault occurred. In cases other than
faults in which the machine seems to be faulty because it does not
operate due to an external signal waiting state, it is useful if the
internal state of the CNC, the states of the interfaces of the PMC and
the laser oscillator, and other information can be confirmed easily.
This section describes the data display items of the self-diagnosis
function of the CNC that indicate the states of the faults that can occur
inside the laser oscillator. For a description of the data display items
of the self-diagnosis function that are related to the states of the faults
that can occur inside the CNC, PMC, and machine, refer to the
FANUC Series 16i-L Maintenance Manual.

Appendix D, DIAGNOSIS SCREEN INFORMATION consists of
the following contents:

D.1 INFORMATION DISPLAYED ON THE DIAGNOSIS
SCREEN...................................................................................258
D.2 LASER OSCILLATOR STATUS DISPLAY..........................261

D.DIAGNOSIS SCREEN INFORMATION APPENDIX B-70445EN/01
- 258 -
D.1 INFORMATION DISPLAYED ON THE DIAGNOSIS
SCREEN

With the diagnosis function, the information below can be displayed.

[CNC PMC status display]
#7 #6 #5 #4 #3 #2 #1 #0
G220 *DU16 *DU8 *DU4 *DU2 *DU1

*DU1 to *DU16 Duty override signals

#7 #6 #5 #4 #3 #2 #1 #0
G221 AGRDY CLRDY

CLRDY Chiller prepared signal
AGRDY Assist gas prepared signal

#7 #6 #5 #4 #3 #2 #1 #0
G222 HVON RUN AGST BEMON SHTON SCLON *BEMLC *SHTLC

*SHTLC Shutter lock signal
*BEMLC Beam lock signal
SCLON Guide light on signal
SHTON Shutter open signal
BEMON Beam on signal
AGST Assist gas start signal
RUN Oscillator start signal
HVON Discharge start signal

#7 #6 #5 #4 #3 #2 #1 #0
G223 POV7 POV6 POV5 POV4 POV3 POV2 POV1 POV0

POV7 to POV0 Power override signals

#7 #6 #5 #4 #3 #2 #1 #0
G224 LCKON

LCKON Leakage check signal

#7 #6 #5 #4 #3 #2 #1 #0
G228 *FOV7 *FOV6 *FOV5 *FOV4 *FOV3 *FOV2 *FOV1 *FOV0

*FOV7 to *FOV0 Frequency override signal

#7 #6 #5 #4 #3 #2 #1 #0
G488 PTCMR

PTCMR Power sensor time constant measure signal

- 259 -
[CNC PMC status display]
#7 #6 #5 #4 #3 #2 #1 #0
F220 MWRM SHTONL SHTOFL

SHTOFL Shutter off state signal
SHTONL Shutter on state signal
MWRM Output decrease alarm signal

#7 #6 #5 #4 #3 #2 #1 #0
F221 BEAM LSTR RFHV CLON WAIT PURGE LRDY LARM

LARM Laser alarm signal
LRDY Discharge start prepared signal
PURGE Purge completed signal
WAIT Gas pressure in-controlling signal
CLON Chiller start request signal
RFHV Base in-discharging signal
LSTR Oscillation ready signal
BEAM Beam on signal

#7 #6 #5 #4 #3 #2 #1 #0
F222 CW PULSE AG3 AG2 AG1

AG1 to AG3 Assist gas select signals
PULSE Pulse mode state output signal
CW Continuous wave mode state output signal

#7 #6 #5 #4 #3 #2 #1 #0
F224 AGING AVCL LCKMD

AVCL Valve close signal
0 : Normal state
1 : All valve closed state
LCKMD Leakage check mode signal
0 : Normal sequence
1 : Leakage check mode
AGING Automatic aging in progress signal

#7 #6 #5 #4 #3 #2 #1 #0
F226 LSMCW LSMBM LSMIM LSMTO LSMTM LSMNT

LSMNT Item that working time is over limit time exists or not
0: Not exits
1: Exist
LSMTM Request signal for turbo-blower overhaul
LSMTO Request signal for turbo-blower oil change
LSMIM Request signal for inner mirror cleaning
LSMBM Request signal for optical compensation unit mirror
LSMCW Request signal for chiller coolant change.

- 260 -
#7 #6 #5 #4 #3 #2 #1 #0
F487 WMUP CLNT AVCL LCKMD

LCKMD Leakcheck mode signal
0:Normal sequence
1:Leak check mode
AVCL All valves closed state signal
0:Normal state
1:State that all valve shut
CLNT Coolant water temperature
0 : Normal level
1 : Lower level
WMUP Laser warm-up driving
0 : Discontinued
1 : Continuing

#7 #6 #5 #4 #3 #2 #1 #0
F488 BMRF PTCMM

PTCMM Power sensor time constant measure-in-process signal
BMRF The reflected beam power is
0: less than the permissible value (Parameter No.15269).
1: larger than the permissible value (Parameter No.15269).

#7 #6 #5 #4 #3 #2 #1 #0
F489 LGCG

LGCG Processing mode signal
0 : High power mode (parameter No.29016#0(CTA)0)
1 : Fine mode (parameter No.29016#0(CTA)1

- 261 -
D.2 LASER OSCILLATOR STATUS DISPLAY

900 LASER POWER COMMAND

Displays a value specified in a laser output power command and sent
to the D/A converter.

901 LASER BIAS COMMAND

Displays a value specified in a base discharge command and sent to
the D/A converter.

902 PULSE ON TIME

Displays the ON time period of an output power command pulse
signal.

903 PULSE OFF TIME

Displays the OFF time period of an output power command pulse
signal.

904 GAS PRES. CONTROL

Displays a value specified in a pressure command for the pressure
controller that controls pressure inside the discharge tube, and sent to
the DA converter.

905 LASER TUBE PRES.

Displays the pressure inside the discharge tube.
Display range : 0 to 900

906 LASER POWER

Displays monitored laser output power values.
Unit : W

- 262 -
908 LASER SEQUENCE

No. Contents No. Contents
10 Purge completion state 23
Wait for change to discharge
start gas pressure
12 Purge being executed 26 Start of discharge in progress
14 75-s wait 27 Base discharge set waiting state
16 Exhaust pump activated 28
Power compensation in
progress
17
Wait for completion of
evacuation
30 LSTR
18
Wait until specified turbo
rotation is reached
49
RUN time
evacuation in progress
20
LRDY (discharge start ready
signal waiting)
50
RUN restart time
75-second waiting state
51
Automatic leakage check in
progress

909
RF VOLTAGE 1
910
RF CURRENT 1

911
RF VOLTAGE 2
912
RF CURRENT 2

913
RF VOLTAGE 3
914
RF CURRENT 3

915
RF VOLTAGE 4
916
RF CURRENT 4

917
RF VOLTAGE 5
918
RF CURRENT 5

919
RF VOLTAGE 6
920
RF CURRENT 6

921
RF VOLTAGE 7
922
RF CURRENT 7

923
RF VOLTAGE 8
924
RF CURRENT 8

Voltage applied to discharge tube from No. 1 to No. 8 (power supply
unit, precisely) and current
Voltage (unit: V)
Current (unit: mA)
- 263 -
925
DC VOLTAGE 1
926
DC CURRENT 1

927
DC VOLTAGE 2
928
DC CURRENT 2

929
DC VOLTAGE 3
930
DC CURRENT 3

931
DC VOLTAGE 4
932
DC CURRENT 4

933
DC VOLTAGE 5
934
DC CURRENT 5

935
DC VOLTAGE 6
936
DC CURRENT 6

937
DC VOLTAGE 7
938
DC CURRENT 7

939
DC VOLTAGE 8
940
DC CURRENT 8

Injection voltage and current of power supplies 1 to 8 (valid when bit
5 of parameter No. 15008 is 1).
Voltage (unit: 0.1 V)
Current (unit: 0.1 A)

941 DCW 1

942 DCW 2

943 DCW 3

944 DCW 4

945 DCW 5

946 DCW 6

947 DCW 7

948 DCW 8

Injection power of power supplies 1 to 8 (valid when bit 5 of
parameter No. 15008 is 1).
Unit : W

954 LCKMD INT. PRES. 1

Pressure at the start of a leakage check
Display range: 0 to 900

- 264 -

Pressure at the time 1/3 of the leakage judgment time has elapsed


Pressure at the time 2/3 of the leakage judgment time has elapsed


Pressure at the end of a leakage check

#7 #6 #5 #4 #3 #2 #1 #0
960 *SFI *RBT *MGP *AP FRQ *ESA *EN

*EN Intra-IF enable signal
0 : Disabled
1 : Enabled
*ESA Emergency stop signal
0 : Emergency stop
1 : Normal processing
FRQ Power frequency detection
0 : 50 Hz
1 : 60 Hz
*AP Air pressure sensor
0 : Lower than air pressure
1 : Same as air pressure
*MGP Laser gas supply pressure
0 : Low
1 : Normal
*RBT Oxygen concentration
0 : Abnormal
1 : Normal
*SFI Safety interlock
0 : Interlocked
1 : Normal

#7 #6 #5 #4 #3 #2 #1 #0
961 *ABT *SHT SOF SON *RAL *WT1 *CAT *MVW

*MVW Cooling water amount
0 : Abnormal
1 : Normal
- 265 -
*CAT With the low temperature sensor(Parameter No.15015#1=1)
0 : Coolant temperature is lower.(Abnormal)
1 : Coolant temperature is appropriate.(Normal)
With the cabinet temperature switch(Parameter No.15015#1=0)
0 : Cabinet temperature is Abnormal
1 : Cabinet temperature is Normal
*WT1 Condensation
0 : Abnormal
1 : Normal
*RAL Exhaust pump alarm
0 : Abnormal
1 : Normal
SON Open shutter
The shutter is open when this bit is set to 1.
SOF Closed shutter
The shutter is closed when this bit is set to 1.
*SHT Shutter temperature
0 : Abnormal
1 : Normal
*ABT Absorber temperature
0 : Abnormal
1 : Normal

#7 #6 #5 #4 #3 #2 #1 #0
962 FBD GAS *OH1 *TC1 *M-R *L-V *AR1 *IA1

*IA1 Inverter alarm
0 : Abnormal
1 : Normal
*AR1 Frequency signal
0 : Mismatch
1 : Match
*L-V Turbo blower oil
0 : Oil level too low
1 : Normal
*M-R Beam reflection unit
0 : Mirror not mounted
1 : Normal
*TC1 Turbo current
0 : Abnormal
1 : Normal
*OH1 Turbo winding temperature
0 : Abnormal
1 : Normal
GAS Multiple to the gas pressure value on the software
0 : x1
1 : x2
FBD FSSB I/O is
0 : Not installed.
1 : Installed.

- 266 -
#7 #6 #5 #4 #3 #2 #1 #0
966 *PSA08 *PSA07 *PSA06 *PSA05 *PSA04 *PSA03 *PSA02 *PSA01

*PSA01 to *PSA08 Displays the operating states of power supply units No. 1 to 8.

#7 #6 #5 #4 #3 #2 #1 #0
968 ACS PLS SL4 SL3 SL2 SL1 SL0

SL0 to SL4 Select signals for discharge tube monitor data
PLS Pulse command signal
0 : Filter provided
1 : No filter provided
ACS Access notice signal
0 : OFF
1 : ON

#7 #6 #5 #4 #3 #2 #1 #0
969 HSC SP2 SP1

SP1 Pressure/power select signal
SP2 Pressure/power select signal
HSC High-speed A/D conversion start

#7 #6 #5 #4 #3 #2 #1 #0
970 PS08 PS07 PS06 PS05 PS04 PS03 PS02 PS01

PS01 to PS08 Power select signals 1 to 8
0 : Not selected
1 : Selected

#7 #6 #5 #4 #3 #2 #1 #0
972 TWV BPV PTL GRY VEN RPA RBA PUG

PUG Purge valve
0 : Closed
1 : Open
RBA Blower activation
0 : Stopped
1 : Activated
RPA Exhaust pump activation
0 : Stopped
1 : Started
VEN Air release valve
0 : Closed
1 : Open
GRY Laser gas supply valve
0 : Closed
1 : Open
PTL Flashing light
0 : Off
1 : On
- 267 -
BPV Bypass valve
0 : Closed
1 : Open
TWV Three-way valve
0 : Air release
1 : Open

#7 #6 #5 #4 #3 #2 #1 #0
973 LSC OPV FW IB *PCL OFS SOP

SOP Shutter open command
0 : Closed
1 : Open
OFS Off sequence
0 : OFF
1 : ON
*PCL DC power alarm clear
0 : Clear
1 : Normal
IB Semiconductor laser-on command
0 : OFF
1 : ON
FW Inverter start signal
0 : Stopped
1 : Started
OPV External piping exhaust valve
0 : Closed
1 : Open
LSC Low speed A/D conversion start
0 : OFF
1 : ON

#7 #6 #5 #4 #3 #2 #1 #0
974 PSAR8 PSAR7 PSAR6 PSAR5 PSAR4 PSAR3 PSAR2 PSAR1

PSAR1 to PSAR8 Power unit alarms 1 to 8
0 : Normal
1 : Abnormal

- 268 -
980 GAS PRES. SENSOR ALM

981 A/D CONV-1 ALM

982 A/D CONV-2 ALM

983 VOLTAGE DOWN

984 POWER DOWN

985 BEAM REFLECTION

986 LASER EFFICIENCY

987 GAS BOTTLE CHANGE

111 : Cylinder replacement request 0 : Cylinder replaced

988 MIXING ABNORMAL

111 : Abnormal mixing 0 : Normal mixing

B-70445EN/01 APPENDIX E.PARAMETER LIST
- 269 -
E PARAMETER LIST

This appendix describes the parameters for the Series 16i-L.

Appendix E, PARAMETER LIST consists of the following
contents:

E.1 PARAMETERS FOR ENABLING/DISABLING VARIOUS
FUNCTIONS............................................................................270
E.2 PARAMETERS FOR DISCHARGE TUBE SELECTION.....279
E.3 PARAMETERS FOR CONTOURING CONDITIONS ..........280
E.4 PARAMETERS FOR EDGE MACHINING CONDITIONS..281
E.5 PARAMETERS FOR PIERCING CONDITIONS ..................284
E.6 PARAMETERS FOR HIGH-SPEED PIERCING
CONDITIONS..........................................................................285
E.7 PARAMETERS FOR POWER CONTROL ............................287
E.8 PARAMETERS FOR ASSIST GAS PRESSURE AND TIME
SETTING..................................................................................290
E.9 PARAMETERS FOR LASER MAINTENANCE TIMING
INDICATION FUNCTIONS ...................................................293
E.10 PARAMETERS FOR THE OSCILLATOR.............................295
E.11 PARAMETERS FOR DISCHARGE .......................................299
E.12 PARAMETERS FOR GAS CONTROL (1).............................301
E.13 PARAMETERS FOR HIGHLY REFLECTIVE MATERIAL
ALARMS..................................................................................304
E.14 PARAMETERS FOR LASER POWER / VOLTAGE DROP.306
E.15 PARAMETERS FOR POWER TABLE SETTING.................307
E.16 PARAMETERS FOR AUTOMATIC AGING FUNCTION...309
E.17 PARAMETERS FOR POWER CONTROL (2).......................312
E.18 PARAMETERS FOR LASER GAS MIXER FUNCTION......313
E.19 PARAMETERS FOR GAS PRESSURE CONTROL (2) ........315
E.20 PARAMETERS FOR POWER FEEDBACK BASED ON
THE ACTUAL OUTPUT ESTIMATION METHOD.............316
E.21 PARAMETERS FOR PROCESSING MODE CHANGE
FUNCTION..............................................................................319

E.PARAMETER LIST APPENDIX B-70445EN/01
- 270 -
E.1 PARAMETERS FOR ENABLING/DISABLING VARIOUS
FUNCTIONS

#7 #6 #5 #4 #3 #2 #1 #0
15000 FLT CLB BMO AGA LGC LPC

[Data type] Bit
LPC Power control function
0: Invalid (standard)
1: Valid
LGC Two stage gain selection of intra-tube pressure control
0: Invalid
1: Valid (standard)
(When this bit is 1, parameter No. 15245 becomes valid.)
AGA Assist gas preparation check with beam on
0: Valid (standard)
1: Invalid (for maintenance)
BMO Beam on only with beam off
0: Invalid (standard)
1: Valid (for manual only and maintenance)
CLB Power compensation
0: Disabled
1: Enabled (standard)
FLT Filter in power control
0: Invalid
1: Valid (standard)

#7 #6 #5 #4 #3 #2 #1 #0
15001 LHC PC8 NGC PES G0B EXA

[Data type] Bit
EXA Selection of assist gas
0: 3 types (standard)
1: 7 types
G0B When G00 is specified, a beam
0: Outputs (standard).
1: Does not output.
PES Piercing time during machine lock or dry run
0: Enabled (standard)
1: Disabled
NGC
0: Presets an integral gas pressure control value.
1: Does not preset an integral gas pressure control value.
PC8 The power compensation function
0: Specifies a fixed value for the power.
1: Increases the power in eight levels.
- 271 -
LHC
0: Does not control the oscillator with external signals (standard).
1: Controls the oscillator with external signals.
In the automatic operation mode, external signals are used to turn on
and off the shutter and beam output.

#7 #6 #5 #4 #3 #2 #1 #0
15002 PSH PCG ADC BMA

[Data type] Bit
BMA
0: Disables beam output with the shutter closed in the automatic
operation mode (standard).
1: Enables beam output with the shutter closed in the automatic
operation mode (for maintenance).
ADC
0: Uses the select signal to determine AD converter 2 data.
1: the DI signal to determine AD converter 2 data. (standard)
PCG When the machining condition setting function is used together with
G24:
0: High-speed piercing is not performed if no address is specified.
1: High-speed piercing is performed even if no address is specified.
PSH
0: Uses all discharge tubes.
1: Uses half of the discharge tubes.

#7 #6 #5 #4 #3 #2 #1 #0
15003 C60 TR1 TON IVT GVW HPT TIV

[Data type] Bit
TIV
0: Inverts the sign (+/-) of the amount of tracing displacement.
1: Does not invert the sign (+/-) of the amount of tracing
displacement.
HPT
0: Rewrites parameter settings for extending or shortening piercing.
1: Does not rewrite parameter settings for extending or shortening
piercing.
GVW
0: Disables evacuation when RUN is turned off (for maintenance).
1: Enables evacuation when RUN is turned off (standard).
IVT The oscillator is:
0: Not equipped with an inverter.
1: Equipped with an inverter.
TON The oscillator is:
0: Not equipped with a turbo blower.
1: Equipped with a turbo blower.
TR1 The number of turbo blowers to be used is:
0: Two.
1: One.
- 272 -
C60 The number of discharge tubes is:
0: Based on the ordinary specification.
1: 16.

#7 #6 #5 #4 #3 #2 #1 #0
15004 CWY ECH EDG SPB STC AGC

[Data type] Bit
AGC
0: Uses the "G32 P_;" command (when Q, T, and R are not
specified) as the flow pattern command.
1: Uses the "G32 P_;" command (when Q, T, and R are not
specified) as the gas pressure control direct command.
STC
0: Controls the shutter with a G code.
1: Controls the shutter with an external signal.
SPB
0: Outputs a beam in skip operation.
1: Outputs no beam in skip operation.
EDG
0: Turns the beam off when switching the assist gas during edge
machining.
1: Does not turn the beam off when switching the assist gas during
edge machining.
ECH
0: Does not clear the active E number upon reset.
1: Clears the active E number upon reset.
CWY
0: A CO
2
laser oscillator is used.
1: A CW-YAG laser oscillator is used.

#7 #6 #5 #4 #3 #2 #1 #0
15005 DLY ITR GNS BPV TTD INB

[Data type] Bit
INB
0: Stops beam output upon completion of pulse distribution.
1: Stops beam output upon completion of in-position check.
TTD
0: Each laser power supply drives only one discharge tube.
1: Each laser power supply drives two discharge tubes.
BPV
0: Opens the bypass valve during power calibration.
1: Closes the bypass valve during power calibration.
GNS
0: Stops the assist gas output during assist gas switching by the
assist gas direct command. (standard)
1: Does not stop assist gas output during assist gas switching by the
assist gas direct command.
ITR
0: Disables the tracing control interlock signal (G227#6 *TRIL).
1: Enables the tracing control interlock signal (G227#6 *TRIL).
- 273 -
DLY
0: Disables the beam output condition delay function.
1: Enables the beam output condition delay function.

#7 #6 #5 #4 #3 #2 #1 #0
15006 PCN PCL PIN TRM NCC

[Data type] Bit
NCC
0: Displays the processing condition setting screen.
1: Does not display the processing condition setting screen.
TRM
0: Enables the zero-point, start-point and end-point soft keys for the
trace setting screen.
1: Disables the zero-point, start-point and end-point soft keys for
the trace setting screen.
PIN
0: Specifies a G13 address P using metric input.
1: Specifies a G13 address P using inch input.
PCL
0: On-screen pressure display of assist gas in kg/cm
2
.
1: On-screen pressure display of assist gas in MPa.
PCN
0: Rewrites the power compensation factor with 1024 when power
compensation is not performed.
1: Does not rewrite the power compensation factor and retains the
previous value when power compensation is not performed.

#7 #6 #5 #4 #3 #2 #1 #0
15007 STO XSC ECK ESE

[Data type] Bit
ESE
0: After completion of distribution, executes piercing during edge
machining.
1: After completion of distribution, checks the smoothing errors,
then executes piercing during edge machining.
ECK
0: Determines the angle on the actual processing path during edge
machining.
1: Determines the angle on the path in the machining program
during edge machining.
XSC
0: Does not operate the edge machining function in the exact stop
mode.
1: Operates the edge machining function in the exact stop mode.
STO
0: Does not execute the after-flow and pre-flow when the assist gas
command is issued with the same type and same flow pattern.
1: Executes the after-flow and pre-flow when the assist gas
command is issued with the same type and same flow pattern.

- 274 -
#7 #6 #5 #4 #3 #2 #1 #0
15008 RMP EGE DCW SOC TAL GPC MST

[Data type] Bit
MST
0: When a reference displacement amount is specified with a plus
sign (+) in the trace command, the nozzle approaches the
workpiece. When a reference displacement amount is specified
with a minus sign (-), the nozzle moves away from the
workpiece.
1: When a reference displacement amount is specified with a plus
sign (+) in the trace command, the nozzle moves away from the
workpiece. When a reference displacement amount is specified
with a minus sign (-), the nozzle approaches the workpiece.
GPC
0: Exercises tracing control according to the reference displacement
amount.
1: Exercises tracing control according to the gap amount (distance
between the nozzle and workpiece).
TAL
0: Invalidates the "out-of-tracing-range alarm" when the trace check
mode signal (G225#2 TRCKM) is set to "1."
1: Invalidates both of the "out-of-tracing-range alarm" and "excess
tracing displacement alarm" when the trace check mode signal
(G225#2 TRCKM) is set to "1."
SOC
0: Uses the reference displacement amount for piercing as that for
tracing control not during processing when the processing
condition setting function is used.
1: Uses the reference displacement amount for piercing as that for
tracing control only during piercing when the processing
condition setting function is used.
DCW
0: Does not display the DCV, DCI, and DCW values on the
diagnostic display.
1: Displays the DCV, DCI, and DCW values on the diagnostic
display.
EGE
0: Disables the automatic aging function.
1: Enables the automatic aging function.
RMP
0: The step function uses only the up/down step distances to
measure the travel distance.
1: The step function uses the up/down step distances and feedrate
setting to measure the travel distance.

- 275 -
#7 #6 #5 #4 #3 #2 #1 #0
15009 TEM BCG BEM AFZ BS2 BS1 AS2 AS1

[Data type] Bit
AS1, AS2, BS1, BS2 Parameters for the laser gas mixing function.
This function stores and monitors the operating status of the mixer.
These parameters need not be set manually because they are
automatically set.
AS2, AS1 Indicates the status of tank A.
AS2 AS1 Status
0 0 Filling gases in tank A
0 1 Mixing gases in tank A
1 0 Supplying gases in tank A
1 1 Setup for filling gases in tank A in progress

BS2, BS1 Indicates the status of tank B.
BS2 BS1 Status
0 0 Filling gases in tank B
0 1 Mixing gases in tank B
1 0 Supplying gases in tank B
1 1 Setup for filling gases in tank B in progress

AFZ
1: Does not include the Z-axis in calculation for actual cutting
feedrate display.
0: Includes the Z-axis in calculation for actual cutting feedrate
display.
BEM
1: The supply pressure of the three-gas cylinder is normal.
0: The supply pressure of the three-gas cylinder is low.
BCG
1: The three-gas cylinder is not replaced.
0: The three-gas cylinder is replaced.
TEM
1: The tank supply pressure is normal.
0: The tank supply pressure is low.

#7 #6 #5 #4 #3 #2 #1 #0
15010 OVE NRT TRG

[Data type] Bit
TRG
0: Disables the trigger pulse command control function.
1: Enables the trigger pulse command control function.
NRT
0: Disables the specification for NRTL
1: Enables the specification for NRTL
- 276 -
OVE
0: Does not allow edge machining and feedrate clamp based on arc
radius to be used together.
1: Allows edge machining and feedrate clamp based on arc radius
to be used together.

#7 #6 #5 #4 #3 #2 #1 #0
15011 OPV ST2 CSC LVE EDS

[Data type] Bit
EDS
0: Uses the conventional conditions as the cutting conditions during
execution of edge machining or start-up processing for a return.
1: Uses the piercing operating conditions in edge machining for the
laser power, assist gas type, and assist gas pressure as cutting
conditions during execution of edge machining or start-up
processing for a return.
This setting has priority over the setting of bit 3 of parameter No.
15011.
LVE
0: Performs assist gas switching according to the conventional
specifications at the start of edge machining and at the start of
cutting for the return distance after that.
1: Ignores the time setting when the gas type and pressure do not
change for assist gas switching at the start of edge machining and
at the start of cutting for the return distance after that.
This setting is invalid when bit 0 of parameter No. 15011 is set to 1.
CSC When the following four values, S, P, Q, and F, are concurrently
specified in the first G01, G02, or G03 block following G24 in the
start-up processing mode,
0: Executes conventional start-up processing without using the
specified S, P, Q, and F values.
1: Cancels operation of start-up processing and performs cutting
using the specified S, P, Q, and F values.
ST2 The operation of the step function is based on:
0: Conventional specifications.
1: New specifications.
OPV
0: The external piping exhaust valve operates only once after
power-on. (conventional)
1: The external piping exhaust valve always operates when RUN is
turned on.

- 277 -
#7 #6 #5 #4 #3 #2 #1 #0
15012 CVA BRF

[Data type] Bit
BRF For Beam reflect alarm monitor:
0: The alarm mask time is fixed for 5sec and the parameter for
maximum permissible output increase is common to CW and
pulse output (No.15265).
1: The alarm mask time is set in parameter No.15268 and the
parameter for maximum permissible output increase is set for
each of CW and pulse output (No.15265, No.15267).
CVA Angle determination for the edge machining function:
0: Follows the setting of bit 3 (ECK) of parameter No. 15007.
1: Does not follow the setting of bit 3 (ECK) of parameter No.
15007, but is performed based on the programmed path.

#7 #6 #5 #4 #3 #2 #1 #0
15013 ZCM OXC IVA

[Data type] Bit
IVA Evacuation is performed:
0: Only when RUN is turned off after the LSTR state is set
(conventional).
1: At all times when RUN is turned off.
ZCM If a command is issued to a trace axis during automatic operation:
0: The command is ignored.
1: Alarm No. 4134 is issued.
OXC Oxygen density sensor:
0: Invalid
1: Effective

#7 #6 #5 #4 #3 #2 #1 #0
15014 GAG MAG

[Data type] Bit
MAG In automatic aging function setting screen,
0: Only Page 1 can be displayed and only item Manual mode can
be set. The only value 22 can be set in the item Manual times.
1: All the items of all the pages can be displayed. The value from 2
to 255 can be set in the item Manual times.

GAG In re-starting after Alarm No.4073 on Purge sequence,
0: Excuting the automatic aging
1: No excuting the automatic aging.

- 278 -
#7 #6 #5 #4 #3 #2 #1 #0
15015 TPS OWU

[Data type] Bit
OWU Laser oscillator warm up function is
0: Invalid
1: Effective
Parameter No.15000#4 must be set to 1 when laser oscillator warm
up function is available. This setting must not be changed during laser
oscillator warm up function is being executed.
TPS Changing the temperature sensor that is installed in laser oscillator.
0: Laser cabinet temperature switch is installed.
1: Low temperature sensor is installed.
This setting must not be changed during laser oscillator warm up
function is being executed.
Setting of
(TPS,OWU)
Function
(0,0)
Warm up function does not work
Alarm No.4124 is not detected. Alarm No.4067 is detected.
(1,0)
Alarm No.4124 is not detected. Alarm No.4067 is not
detected.
(0,1)
Alarm No.4124 is not detected. Alarm No.4067 is detected.
(1,1)
Warm up function works
Alarm No.4124 is detected. Alarm No.4067 is not detected.

#7 #6 #5 #4 #3 #2 #1 #0
15018 FSB FSD

[Data type] Bit
FSD In case of executing ON/OFF control of laser power with FSSB I/O,
Laser Beam delay function is
0: Invalid
1: Effective
FSB Laser power control function with FSSB I/O is
0: Invalid
1: Effective

- 279 -
E.2 PARAMETERS FOR DISCHARGE TUBE SELECTION

#7 #6 #5 #4 #3 #2 #1 #0

#7 #6 #5 #4 #3 #2 #1 #0

[Data type] Bit
PS1 to PS16 Power supply selection when half of the discharge tubes are used
Set the bit for each discharge tube to be used to 1, and set the other
bits to 0.

#7 #6 #5 #4 #3 #2 #1 #0

#7 #6 #5 #4 #3 #2 #1 #0

[Data type] Bit
PS1 to PS16 Power supply selection when all the discharge tubes are used
Set the bit for each discharge tube to be used to 1, and set the other
bits to 0.

NOTE
Parameters No. 15026 and No. 15028 and
provided for future addition of power supply units.
In the current specifications, this parameter is not
used. Set all bits to 0.

- 280 -
E.3 PARAMETERS FOR CONTOURING CONDITIONS

15040 Power output setting

[Data type] Word
[Unit of data] W

15041 Pulse frequency setting

[Data type] Word
[Unit of data] Hz

15042 Pulse duty ratio setting

[Data type] Word
[Unit of data] %

- 281 -
E.4 PARAMETERS FOR EDGE MACHINING CONDITIONS

15050 Edge detection angle

[Data type] Word
[Unit of data] deg
A corner is assumed to be present when the angle formed by two
blocks is smaller than the specified angle.

15051 Peak piercing power value

[Data type] Word
[Unit of data] W
Set a peak power value for piercing to be performed at the top of a
corner.

15052 Piercing pulse frequency

[Data type] Word
[Unit of data] Hz
Set a pulse frequency for piercing to be performed at the top of a
corner.

15053 Piercing pulse duty ratio

[Data type] Word
[Unit of data] %
Set a pulse duty ratio for piercing to be performed at the top of a
corner.

15054 Piercing time

[Data type] 2-word
[Unit of data] msec
Set a piercing time used for piercing to be performed at the top of a
corner.

15055 Piercing assist gas pressure

[Data type] Word
[Unit of data] 0.01MPa or 0.1 kg/cm
2

Set an assist gas pressure for piercing to be performed at the top of a
corner.

- 282 -
15056 Type of piercing assist gas

[Data type] Word
[Unit of data]
Set a type of assist gas to be used for piercing.

15057 Return distance

[Data type] 2-word
[Unit of data]
Increment system IS-A IS-B IS-C Unit
Metric input 0.01 0.001 0.0001 mm
Inch input 0.001 0.0001 0.00001 inch

Set a return distance from the top of a corner to the next block.

15058 Return feedrate

[Data type] Word
[Unit of data] mm/min
Set a return feedrate to be used for movement from the top of a corner
to the next block.

15059 Peak return power value

[Data type] Word
[Unit of data] W
Set a peak return power value to be used for movement from the top
of a corner to the next block.

15060 Return frequency

[Data type] Word
[Unit of data] Hz
Set a return frequency to be used for movement from the top of a
corner to the next block.

15061 Return duty ratio

[Data type] Word
[Unit of data] %
Set a return duty ratio to be applied to movement from the top of a
corner to the next block.

- 283 -
15062 Reference displacement during edge machining operation

[Data type] Word
[Unit of data] 0.001mm
[Valid data range] Parameters No.15531 to No.15532
Set a return duty cycle to be applied when machining proceeds from a
corner summit to the next block.

- 284 -
E.5 PARAMETERS FOR PIERCING CONDITIONS

15070 Piercing power

[Data type] Word
[Unit of data] W
Set the piercing power.

15071 Piercing frequency

[Data type] Word
[Unit of data] Hz
Set the piercing frequency.

15072 Piercing duty ratio

[Data type] Word
[Unit of data] %
Set the piercing duty ratio.

15073 Piercing time

[Data type] 2-word
[Unit of data] msec
Set the piercing time.

- 285 -
E.6 PARAMETERS FOR HIGH-SPEED PIERCING
CONDITIONS

15080 High-speed piercing power

[Data type] Word
[Unit of data] W
Set the high-speed piercing power.

15081 Initial high-speed piercing frequency

[Data type] Word
[Unit of data] Hz
Set the initial high-speed piercing frequency.

15082 Incremental high-speed piercing frequency

[Data type] Word
[Unit of data] Hz
Set the incremental high-speed piercing frequency.

15083 Initial high-speed piercing duty ratio

[Data type] Byte
[Unit of data] %
Set the initial high-speed piercing duty ratio.

15084 Incremental high-speed piercing duty ratio

[Data type] Byte
[Unit of data] %
Set the incremental high-speed piercing duty ratio.

15085 High-speed piercing step time

[Data type] Word
[Unit of data] msec
Set the high-speed piercing step time.

- 286 -
15086 Number of high-speed piercing steps

[Data type] Word
[Unit of data]
Set the number of high-speed piercing steps

15087 High-speed piercing end time

[Data type] 2-word
[Unit of data] msec
Set the high-speed piercing end time

- 287 -
E.7 PARAMETERS FOR POWER CONTROL

#7 #6 #5 #4 #3 #2 #1 #0
15088 IPC

[Data type] Bit (Power-off)
IPC The power control mode is:
0: Specified by using the format where S and F are specified in the
same block.
1: Specified with G63 or by using the format where the external
signal (G224#1) is input.

#7 #6 #5 #4 #3 #2 #1 #0
15089 LP8 LP7 LP6 LP5 LP4 LPZ LPY LPX

[Data type] Bit
LP*
0: Does not use the *-axis for speed calculation for the power
control function.
1: Uses the *-axis for speed calculation for the power control
function.
If no bit is specified, the power control function operates, assuming
the first axis (LPX) and second axis (LPY) to be specified.
Ordinarily, specify each axis to be used for interpolation. Do not
specify a synchronously controlled axis for simple synchronous
control or PMC axis.

15090 Minimum output power

[Data type] Word
[Unit of data] W

15091 Minimum pulse frequency

[Data type] Word
[Unit of data] Hz

15092 Minimum pulse duty ratio

[Data type] Word
[Unit of data] %
Set the minimum pulse duty ratio.

- 288 -
15093 Power control constant

[Data type] Word
[Unit of data] %
Set the power control constant.

15094 Power control filter time constant

[Data type] Word
[Unit of data] msec
Set the power control filter time constant.

15095 Allowable variation in power control speed

[Data type] Byte
[Unit of data] mm/min (specified increment for B8F1-08 or earlier) or %
[Standard setting value] 4
Set the amount by which the power control speed is allowed to vary.
This parameter is valid when parameter No. 15450 is set to 0.
To set a value of 256 or greater, use parameter No. 15450.
Set this parameter according to the setting of bit 6 of parameter No.
15096 (SDB) as follows.

#7 #6 #5 #4 #3 #2 #1 #0
15096 EGM SDB FOV SQ0 PCD PCF PCP

[Data type] Bit
PCP
0: Does not control the output according to the feedrate in power
control.
1: Controls the output according to the feedrate in power control.
PCF
0: Does not control the frequency according to the feedrate in
power control.
1: Controls the frequency according to the feedrate in power
control.
PCD
0: Does not control the duty ratio according to the feedrate in power
control.
1: Controls the duty ratio according to the feedrate in power
control.
SQ0 When 0 is specified for the peak power (S) or pulse duty ratio (Q), the
power control function is:
0: Executed.
1: Stopped.
- 289 -
FOV If the feedrate override is changed in the power control mode:
0: The new override after the change is used as the reference
feedrate for power control.
1: The reference feedrate for power control remains unchanged.
SDB Specifies how to specify an allowable variation in power control speed
(parameter No. 15095), as follows:
0: Speed (mm/min) to be directly specified
1: Percentage (0 to 100%) of the speed specified when the power
control mode was entered to be specified
EGM
0: Cancels the power control mode in the edge machining or
start-up processing mode.
1: Stops power control only during return distance movement in the
edge machining or start-up processing mode.
In the edge machining or start-up processing mode, the E number for
specifying conditions for edge machining or start-up processing is
selected.

15097

Parameter for calculating the displacement of the output
(output at a speed of F = 0)

[Data type] Word
[Unit of data] W

15098

Parameter for calculating the displacement of the frequency
(frequency at a speed of F = 0)

[Data type] Word
[Unit of data] Hz

15099

Parameter for calculating the displacement of the duty ratio
(duty ratio at a speed of F = 0)

[Data type] Word
[Unit of data] %
- 290 -
E.8 PARAMETERS FOR ASSIST GAS PRESSURE AND TIME
SETTING

15100 Selection of assist gas

[Data type] Word
[Unit of data]
Select a type of assist gas.

15101 Selection of flow pattern

[Data type] Word
[Unit of data]
Select a assist gas flow pattern.

15102 Pre-flow time 1



[Data type] Word
Set the assist gas pre-flow time.

15108 After-flow time 1



[Data type] Word
Set the assist gas after-flow time.

15114 Pre-flow pressure 1



[Data type] Word
2

Set the assist gas pre-flow pressure.
- 291 -
15120 Processing flow pressure 1



[Data type] Word
2

Set the assist gas processing flow pressure.

15126 After flow pressure 1



[Data type] Word
2

Set the assist gas after-flow pressure.

15132 Maximum assist gas pressure

[Data type] Word
2

Set an assist gas pressure (kg/cm
2
(MPa)) at which 10V is output in
analog output.

15135 Assist gas pressure set time

[Data type] Word
Set a desired assist gas pressure set time.

15136 Assist gas pressure

[Data type] Word
2

Set a desired assist gas pressure.

15137 Assist gas pressure set time for piercing

[Data type] Word
Set a desired assist gas pressure set time for piercing.
- 292 -
15138 Assist gas pressure for piercing

[Data type] Word
2

Set a desired assist gas pressure for piercing.

15139 Assist gas stop time

[Data type] Word
Set the wait time when the assist gas stops.

- 293 -
E.9 PARAMETERS FOR LASER MAINTENANCE TIMING
INDICATION FUNCTIONS

15150 Laser RUN ON time

[Data type] 2-word
[Unit of data] 0.1 hour
A cumulative RUN ON time is automatically set.

15151 Exhaust pump operation time

[Data type] 2-word
[Unit of data] 0.1 hour
A cumulative exhaust pump operation time is automatically set.

15152 Shutter alarm mask time

[Data type] Word
[Unit of data] msec
Set a time from when shutter operation is directed until shutter alarm
monitoring starts.

#7 #6 #5 #4 #3 #2 #1 #0
15153 LCK

[Data type] Bit
LCK
0: Disables the automatic leakage check function.
1: Enables the automatic leakage check function.

15154 Leakage judgment time

[Data type] Word
[Unit of data] sec
Set the time during which the valve is closed and the internal pressure
of a discharge tube is kept for leakage check. The internal pressure of
a discharge tube is measured four times within the specified time. If a
value of 0 to 2 is set, the automatic leakage check function does not
operate.

- 294 -
15155 Evacuation time in Leak check sequence

[Data type] Word
[Unit of data] sec
[Valid data range] 0 to 32767 (standard setting 600)
Evacuation time when the oscillator start signal is turned off in Leak
check sequence is set in this parameter. When a set value is 0.
Evacuation time operates as 600(10 minutes).
In edition to which this parameter is not added, Evacuation is operated
according to the parameter No.15256.

#7 #6 #5 #4 #3 #2 #1 #0
15160 OAL MDS MNT

[Data type] Bit
MNT
0: Does not display the laser maintenance screen.
1: Displays the laser maintenance screen.
When the value indicating that the laser maintenance screen is not
displayed is specified, the compensation factor is also stored and the
cumulative operating time is also set. You can display the laser
maintenance screen to check the data when required.
MDS
0: Disables data input on the laser maintenance screen.
1: Enables data input on the laser maintenance screen.
Data input on the laser maintenance screen is disabled to prevent the
end user from entering data such as the operating time unintentionally.
(The data can only be referenced.)
Setting this parameter to 1 enables data input.

OAL Specifies whether Oil exchange time limit alarm monitor for turbo
blower is enabled or disabled.
0: Disabled
1: Enabled

- 295 -
E.10 PARAMETERS FOR THE OSCILLATOR

15200

Power used for power compensation factor determination when half of the
discharge tubes are used

[Data type] Word
[Unit of data] W
Set a power to find the power compensation factor when half of the
discharge tubes are used.

15201

Power used for power compensation factor determination when all
discharge tubes are used

[Data type] Word
[Unit of data] W
Set a power to find the power compensation factor when all discharge
tubes are used.

15203 Power calibration limit

[Data type] Word
[Unit of data]
If the power compensation factor exceeds this value, the low output
alarm signal (F220#6 MWRN) is output to notify the user of the time
to clean or replace the mirror.

15204 Power calibration coefficient

[Data type] Word
[Unit of data]
This is to calibrate command power for real power. This parameter is
automatically set at power compensation after the oscillator start
signal (G222#6 RUN) is turned on.

15205 Power compensation time

[Data type] Word
[Unit of data] sec
Set a power compensation time.

- 296 -
15206 Time constant for the power sensor input filter

[Data type] Word
[Unit of data] msec
This time constant is used when the laser power monitor value input
from the power sensor is multiplied by the primary delay filter.

15207 Maximum specifiable power

[Data type] Word
[Unit of data] W
If the power setting after power compensation or power feedback
addition exceeds this value, the power output is clamped to this value.

15208 Laser power feedback gain

[Data type] Word
[Unit of data]
Set the laser power feedback gain.

15209 Power feedback clamp

[Data type] Word
[Unit of data]
This clamp value is used to prevent the excess power setting from
being made during power feedback.

15210 Maximum command power

[Data type] Word
[Unit of data] W
This is power clamp when power command is greater than this value.

15211 Minimum command power

[Data type] Word
[Unit of data] W
This is power clamp when power command is smaller than this value.

- 297 -
15212 Maximum specifiable power when the duty ratio is not clamped

[Data type] Word
[Unit of data] W
If parameter No. 15213 does not clamp the duty ratio to 50%, and a
specified power after power compensation and power feedback
processing exceeds the setting in this parameter, the power is clamped
to the setting. If a value of 0 is set, the setting of parameter No. 15207
is set.

15213 Duty ratio clamp criterion

[Data type] Word
[Unit of data] W
When a specified power multiplied by an override value exceeds the
value set in this parameter, the duty ratio is clamped to 50% (fixed
value), and the peak value is clamped to the value set in parameter No.
15210. If a value of 0 is set, the setting of parameter No. 15210 is set.

15214 Maximum specifiable CW-YAG laser frequency

[Data type] Word
[Unit of data] Hz
When a CW-YAG laser oscillator is used, the specified frequency is
clamped to this value.

15215 Power input calibration coefficient

[Data type] Word
[Unit of data] W
[Valid data range] 102(0.12
10
) to 10240(102
10
)
(If 0 is specified, 1024 (12
10
) is assumed.)
Set the power input compensation factor.

15216 Power display filter time constant

[Data type] Word
[Unit of data] msec
This is the filter time constant with which fluctuation in power display
is suppressed.

- 298 -
15217 Beam stop delay time

[Data type] Word
[Unit of data] msec
Set the time between the in-position check and stop of the beam.

15219 Beam output condition delay time

[Data type] Byte

- 299 -
E.11 PARAMETERS FOR DISCHARGE

15220 Discharge start command value

[Data type] Word
[Unit of data] mV
Set a command value to start discharge.

15221 Discharge start decision voltage

[Data type] Word
[Unit of data] V
If the discharge tube voltage is lower than the specified value after the
elapse of the discharge waiting time, it is assumed that discharge has
started.

15222 Discharge waiting time

[Data type] Word
Set a wait time after the specification of the start of discharge until the
discharge start command value is set.

15223 Bias command

[Data type] Word
[Unit of data] mV
Set a bias command value for the oscillation preparation completion
state (LSTR).

15224 Modulation voltage

[Data type] Word
[Unit of data] mV
Set the voltage to which the normal bias value is lowered during
modulation by the base modulation function.

15225 Modulation time

[Data type] Word
Set a time required usually to decrease the bias value with the base
modulation function at the time of modulation.

- 300 -
15231 Power feedback mask time in the case of power command variation

[Data type] Word
[Unit of data] msec
If a power command value variation is detected, power feedback
control is stopped for the time set in this parameter.

15232 Maximum allowable power command variation (dead zone width)

[Data type] Word
[Unit of data] W
If a power command value variation is smaller than the value set in
this parameter, power feedback control is continued, assuming that
there is no power command variation.

- 301 -
E.12 PARAMETERS FOR GAS CONTROL (1)

15240 Negative pressure in exhaust completion

[Data type] Word
[Unit of data] (1=13Pa)
This pressure is used for evacuating the discharge tubes in laser
start-up sequence.

15241 Intra-tube pressure in discharge start

[Data type] Word
Internal gas pressure of the discharge tubes at the start of discharge

15242 Tube pressure for oscillation (50Hz)

[Data type] Word
Internal gas pressure of the discharge tubes during laser oscillation. (at
50 Hz)

15243 Tube pressure for oscillation (60Hz)

[Data type] Word
Internal gas pressure of the discharge tubes during laser oscillation. (at
60 Hz)

15244 Gas pressure control gain

[Data type] Word
[Unit of data]
This is the gain to feedback control the intra-tube laser gas pressure.

15245 Intra-tube pressure control gain 2

[Data type] Word
[Unit of data]
Set the gas pressure control gain during base discharge.
When bit 1 of parameter No.15000 is 1, this parameter is valid.

- 302 -
15246 Pressure control integration gain

[Data type] Word
[Unit of data]
This is feedback integration gain for gas pressure control.

15247 Pressure control integral element preset value

[Data type] Word
[Unit of data]
[Valid data range] -32768 to 32767
Integral element preset value for gas pressure control

15248 Allowable gas pressure insufficiency

[Data type] Word
Allowable value used to determine to issue no alarm if the gas
pressure does not reach the setting

15249 Gas pressure rising time

[Data type] Word
[Unit of data] sec
Set the gas pressure rising time in sequence 27.

15250 Gas pressure rising time 2

[Data type] Word
[Unit of data] sec
Set a time required to proceed, in sequence 18, from the negative
pressure in exhaust completion (parameter No. 15240) to the
intra-tube pressure in discharge start (parameter No. 15241).

15251 Maximum allowable gas pressure deviation

[Data type] Word
If the difference between the tube pressure for oscillation and actual
pressure is greater than this setting, laser tube pressure alarm
(No.4078) is issued.

- 303 -
15255 RUN ON evacuation time

[Data type] Word
[Unit of data] sec
Set an evacuation time to be applied at oscillator start time (RUN).

15256 RUN OFF evacuation time

[Data type] Word
[Unit of data] sec
When bit 2 of parameter No. 15003 (GVW) is set 1 and the oscillator
start signal (G222#6 RUN) is set to "0," evacuation is performed
according to this time setting.

15257 Number of abnormal vibrations detected

[Data type] Word
[Unit of data]
If the number of abnormal vibrations (per 10 minutes) detected
exceeds the value specified in this parameter, an alarm is issued.

15258 Time constant of the filter used for laser gas pressure variation suppression

[Data type] Word
[Unit of data] msec
[Valid data range] 17 to 32767 (If a value less than 16 is specified, the filter does not
function.)

15259 Exhaust time when RUN is ON

[Data type] Word
[Unit of data] sec
Set an exhaust time to be applied at oscillator start time (RUN).

15260 Period when the exhaust value of the external pipe is open

[Data type] Byte
[Unit of data] sec
[Valid data range] 0 to 60 (When a time beyond 60 sec is specified, the time is clamped
to 60 sec.)
Set the time the exhaust valve of the external pipe is open.
- 304 -
E.13 PARAMETERS FOR HIGHLY REFLECTIVE MATERIAL
ALARMS

15265 Maximum allowable power increase

[Data type] Word
[Unit of data] W
If the difference between the specified power and actual output power
is greater than this value, beam reflection error alarm (No.4068) is
issued.
This parameter is valid only for CW output in case of parameter
No.15012#3(BRF)=1. Parameter No.15267 is valid for pulse output.
This parameter is valid in case of both CW and Pulse output, if Pulse
power feedback by actual power presumption method is valid.

15266 Maximum allowable power

[Data type] Word
[Unit of data] W
If the actual output exceeds this value, beam reflection error alarm
(No.4068) is issued.

15267 Maximum allowable power increase in pulse output

[Data type] Word
[Unit of data] W
Maximum permissible output increase for pulse output is set in this
parameter.
When the difference between the specified power and actual power
exceeds this value at pulse output, an alarm No.4068 (beam reflection
error) is raised.
While, Maximum permissible output increase for CW output is set in
parameter No.15265.
This parameter is valid in case of parameter No.15012#3(BRF)=1.
This parameter is valid in case that Pulse power feedback by actual
power presumption method is not valid.

- 305 -
15268 Mask time for beam reflection error alarm

[Data type] Word
[Unit of data] msec
The mask time for monitoring beam reflection alarm (No.4068) and
warning signal (F488#7) when beam is started to output or average
command power is changed is set in this parameter. This parameter is
used when pulse power feedback by actual power presumption
method.
Mask time works as 5000msec when setting value is 0.

15269 Threshold for generating the beam reflection error warning signal

[Data type] Word
[Unit of data] W
When the power of reflected beam exceeds this value, beam reflection
warning signal (F488#7) is output to PMC.

- 306 -
E.14 PARAMETERS FOR LASER POWER / VOLTAGE DROP

15270 Discharge tube voltage in normal operation

[Data type] Word
[Unit of data] V
Set the discharge tube voltage during normal base discharge.
This parameter is automatically rewritten after the discharge start
signal (G222#7 HVON) is turned on.

15271 Power decrease limit

[Data type] Word
[Unit of data] W
If the difference between the specified output and actual output is
greater than this setting, low output alarm (No.4076) is issued.

15272 Discharge tube voltage decrease limit

[Data type] Word
[Unit of data] V
If the difference between the discharge tube voltage during use of the
laser and that at the start-up of the laser is greater than this setting, low
voltage alarm (No.4088) is issued.

15276 Laser gas replacement time

[Data type] Word
[Unit of data] sec
Time during which a new laser gas is filled in the internal piping
system after RUN is turned on

- 307 -
E.15 PARAMETERS FOR POWER TABLE SETTING

15280 Table interval when half of the discharge tubes are used

15281 Table interval when all discharge tubes are used

[Data type] Word
[Unit of data]
[Standard setting value] Refer to the parameter data sheet delivered with the machine.
Set the increment in watts used for the setting in the output command.

15290 Power command 0 when half of the discharge tubes are used









[Data type] Word
[Unit of data] W
Sequentially set the output setting starting from 0 for each table
interval when half of the discharge tubes are used.

- 308 -
15300 Power command 0 when all discharge tubes are used









[Data type] Word
[Unit of data] W
Sequentially set the output setting starting from 0 for each table
interval when all discharge tubes are used.

- 309 -
E.16 PARAMETERS FOR AUTOMATIC AGING FUNCTION

15320 Command power for power compensation coefficient calculation

[Data type] Word
[Unit of data] W

15321 Oscillation frequency command for power compensation coefficient

[Data type] Word
[Unit of data] Hz

15322 Pulse duty cycle command for power compensation coefficient

[Data type] Word
[Unit of data] %

15323 Command time for power compensation coefficient calculation

[Data type] Word
[Unit of data] sec

15324 Gas pressure setting for normal compensation (50Hz)

[Data type] Word

15325 Gas pressure setting for normal compensation (60Hz)

[Data type] Word

15326 Power command when aging is performed with the automatic aging

[Data type] Word
[Unit of data] W

15327 Oscillation frequency command for aging

[Data type] Word
[Unit of data] Hz
- 310 -

15328 Pulse duty cycle command for aging

[Data type] Word
[Unit of data] %

15329 Power command time for aging

[Data type] Word
[Unit of data] sec

15330 Gas pressure setting (50 Hz) for aging

[Data type] Word

15331 Gas pressure setting (60 Hz) for aging

[Data type] Word

15332 Oscillation frequency command value for power compensation

[Data type] Word
[Unit of data] Hz

15333 Pulse duty cycle command during power compensation

[Data type] Word
[Unit of data] %

15334 Number of aging operations

[Data type] Word
[Unit of data]
[Valid data range] 0 to 32767 (Automatically set by the CNC)

15335 Time data 1 when the HV is turned off after LSTR

[Data type] 2-word
[Unit of data] Year
[Valid data range] 0 to 99999999 (Automatically set by the CNC)

- 311 -

[Data type] 2-word
[Unit of data] Month
[Valid data range] 1 to 12 (0 to 99999999) (Automatically set by the CNC)


[Data type] 2-word
[Unit of data] Day


[Data type] 2-word
[Unit of data] Hour

15339 Stop time for the oscillator requiring aging operation

[Data type] Word
[Unit of data] hour
[Valid data range] 0 to 32767 (range of valid settings: 30 to 120)
If the setting is less than 30, internal processing assumes the value to
be 60.

- 312 -
E.17 PARAMETERS FOR POWER CONTROL (2)

15450 Allowable variation in power control speed

[Data type] Word
[Unit of data] mm/min
Set the amount by which the power control speed is allowed to vary.
When this parameter is set to 0, parameter No. 15095 is valid.
Parameter No. 15095 and this parameter differ in the range of valid
settings.
For details of setting, see the explanation of parameter No. 15095.

- 313 -
E.18 PARAMETERS FOR LASER GAS MIXER FUNCTION

15710 Wait time for checking the remaining amount in the gas cylinder

[Data type] Word
[Unit of data] sec
[Standard setting value]
Wait time when the remaining amount in the gas cylinder is checked

15711 Gas mixture wait time

[Data type] Word
[Unit of data] min
Time required until gas mixture is complete and the mixed gas can be
supplied after gases are filled in the tank.

15712 Gas mixer evacuation time

[Data type] Word
[Unit of data] min
Set the time required for evacuating the mixer. This value is also used
for the time required for evaluation for leakage check.

15713 Helium exhaust time

[Data type] Word
[Unit of data] msec
Time required for exhausting the Helium gas from piping before the
next gas is filled after the helium gas is filled

15714 Nitrogen and CO
2
exhaust time

[Data type] Word
[Unit of data] msec
Time required for exhausting the nitrogen gas or CO
2
from the piping
before the next gas is filled after that gas is filled

- 314 -
15715 Vacuum criteria gas pressure

[Data type] Word
This value is used for determining the degree of vacuum of the laser
gas pressure in the gas mixer.
If the laser gas pressure does not reach this value, an alarm is issued.

15716 Evacuation wait time

[Data type] Word
[Unit of data] min
Wait time for evacuation. If the setting is 0, a value of 30 is input.

- 315 -
E.19 PARAMETERS FOR GAS PRESSURE CONTROL (2)

#7 #6 #5 #4 #3 #2 #1 #0
15800 TPC

[Data type] Bit
TPC The control function of driving the turbo blower with a constant
power
0: Invalid
1: Valid

15801

Maximum internal pressure when the control function of driving the turbo
blower with a constant power is enabled

[Data type] Word
Maximum setting for the internal laser pressure. If the internal laser
pressure setting calculated from the laser power setting exceeds the
setting of this parameter, the internal laser pressure is clamped to this
value.

15802
Laser power setting used as the maximum internal pressure when the
control function of driving the turbo blower at a constant power is enabled

[Data type] Word
[Unit of data] W
Laser power setting used when the setting of parameter No. 15801 is
used as the internal laser pressure setting. The proportional constant
for the internal laser gas pressure setting and laser power setting is
determined using this parameter and parameter No. 15801.

15803

Compensation factor for the internal pressure setting when the control
function of driving the turbo blower at a constant power is enabled

[Data type] Word
[Unit of data] 1/1024
Compensation factor by which the internal laser pressure setting is
multiplied. When the parameter setting is 1024, compensation factor
1.0 is used for multiplication.

15804

Maximum exhaust valve open time for internal pressure control during
oscillation

[Data type] Word
[Unit of data] msec
Set the maximum open time for exhaust valve PCV.
- 316 -
E.20 PARAMETERS FOR POWER FEEDBACK BASED ON THE
ACTUAL OUTPUT ESTIMATION METHOD

#7 #6 #5 #4 #3 #2 #1 #0
29000 PTC PTB PFB

[Data type] Bit
PFB Power feedback control based on the actual output estimation method
is:
0: Disabled.
1: Enabled.
PTB On the data table screen for actual output estimation, data input is:
0: Disabled.
1: Enabled.
When this parameter is set to 0, the cursor is not displayed on the
screen, and data input is disabled.
PTC On the time constant measurement screen, time constant measurement
is:
0: Disabled.
1: Enabled.
When this parameter is set to 0, no time constant measurement is
made even when the [EXEC] soft key is pressed.
However, a time constant measurement can be started by using an
external signal.


[Data type] Word
[Unit of data] msec
Set a time constant for a linear section. When 0 is set in this parameter,
the bell-shaped filter is not used.


[Data type] Word
[Unit of data] msec
Set a time constant for a round section.

- 317 -
29003 Peak power in power sensor time constant measurement

[Data type] Word
[Unit of data] W
Set a peak power in measurement of the time constant of the power
sensor.
Usually, set the rated output of the oscillator.

29004 Beam output time in power sensor time constant measurement

[Data type] Word
[Unit of data] msec
Set a period of time for which a beam is output to measure the time
constant of the power sensor.

29005 Time constant 1 for Power sensor response delay compensation filter

[Data type] Word
[Unit of data] msec
The time constant to compensate for the response delay of the power
sensor should be set. This parameter is used with the parameter
No.29006. The value to the parameter No.29005 should be set with
using the time constant measurement screen usually. The
compensation operation is not executed in case of 0 in this parameter.

29006 Time constant 2 for Power sensor response delay compensation filter

[Data type] Word
[Unit of data] msec
The time constant to compensate for the response delay of the power
sensor should be set. This parameter is used with the parameter
No.29005. The compensation operation is not executed when the
value of parameter No.29005 is less than the value of this parameter.
The standard value for each model of the laser should be used usually.
Refer to the data sheet attached to the laser oscillator for standard
value.

29010 Oscillator series to which data table is applied

[Data type] Word
[Unit of data]
Set the oscillator series of the registered data table. This parameter is
set when CNC is shipped from FANUC.

- 318 -
29011 Model to which data table is applied

[Data type] Word
[Unit of data]
Set the oscillator model of the registered data table. Set the model
name represented by A-Z of alphabet with being replaced with
numeral. For instance, A is 1 and E and 5. This parameter is set when
CNC is shipped from FANUC.

29012 Version number of the data tables

[Data type] Word
[Unit of data]
Set the version of the registered data table. This parameter is set when
CNC is shipped from FANUC. However, 0 is automatically set if data
is changed on the actual power presumption table data screen.

- 319 -
E.21 PARAMETERS FOR PROCESSING MODE CHANGE
FUNCTION

E.21.1 Setting for Fine Mode

#7 #6 #5 #4 #3 #2 #1 #0
29016 CCM FTN CPC CTA

[Data type] Bit
CTA The processing mode of laser oscillator is :
0: High power mode.
1: Fine mode.

CPC On the power compasation when the automatic aging is disable, for
high power mode or fine mode, the laser power command in power
compasation is:
0: distinguished.
1: not distinguished.

FTN For the parameter No.29016#0=0, on the setting screen of the
processing mode change function
0: High power mode is displayed.
1: Normal mode is displayed.mode.

CCM Processing mode change function is :
0: Not available.
1: Available.
NOTE
Parameter CTA can't be turned on when parameter
CCM is off. Even if CTA is set to 1 in case of
CCM=0, the setting of CTA returns to zero. If
parameter CCM is turned off in case of CTA=1, CTA
returns to zero and thus processing mode is
changed. To prevent unexpected operation,
parameter CCM should be set when laser oscillator
is in PURGE state. Dont set parameter CCM except
for PURGE state

29020 Power calibration coefficient (Fine mode)

[Data type] Word
[Unit of data]
The coefficient is used to calibrate the specified power according to
the actual power. This parameter is automatically specified during
power calibration.

- 320 -
29022 Bias value (Fine mode)

[[Data type] Word
[Unit of data] mV
Specify a bias value.

29023 In-tube pressure during osillation (50Hz) (Fine mode)

[[Data type] Word
The discharge tube has the gas pressure during laser oscillation
(50Hz).

29024 In-tube pressure during osillation (60Hz) (Fine mode)

[[Data type] Word
The discharge tube has the gas pressure during laser oscillation
(60Hz).

29025 Normal discharge tube voltage (Fine mode)

[[Data type] Word
[Unit of data] V
Specify a discharge tube voltage in normal reference discharge. This
parameter is automatically rewritten after the discharge start signal
(G222#7/HVON) turned ON.

- 321 -
29026 Value 0 when half of the discharge tubes are used (Fine mode)









[[Data type] Word
[Unit of data] V
Specify power setting 0 to 8 at the table intervals, in the indicated
order, when half of the discharge tubes are used. For the standard
setting, refer to the sheet attached to the laser oscillator.

29037 Value 0 when all of the discharge tubes are used (Fine mode)









[[Data type] Word
[Unit of data] V
Specify power setting 0 to 8 at the table intervals, in the indicated
order, when half of the discharge tubes are used. For the standard
setting, refer to the sheet attached to the laser oscillator.

- 322 -
29048 Upper limit on power (Fine mode)

[[Data type] Word
[Unit of data] W
When the specified power value exceeds this setting after power
calibration and power feedback addition, the actual power is clamped
to this setting.

29049 Maximum peak power (Fine mode)

[[Data type] Word
[Unit of data] W
When a peak power higher than this setting is specified, the actual
power is clamped to this setting. (The value obtained by applying
power override is clamped.)

29050 Upper limit on power when the duty ratio is not clamped (Fine mode)

[[Data type] Word
[Unit of data] W
When the duty ration is not clamped to 50% according to parameter
NO.29051 and when the specified power exceeds this setting after
power calibration and power feedback addition, the actual power is
clamped to this setting. When 0 is specified, the value of parameter
No.29048 is assumed.

29051 Criterion for clamping the duty ratio (Fine mode)

[[Data type] Word
[Unit of data] W
If the value obtained by multiplying the specified peak power value by
the power override value is greater than the value set in this parameter,
the duty ratio is clamped at 50% (fixed value), and the specified peak
power value is clamped at the value set in parameter No.29049. When
0 is specified, the value of parameter No.29049 is assumed.

- 323 -
E.21.2 Setting for Alarm Monitor (Alarm No.4125)

#7 #6 #5 #4 #3 #2 #1 #0
15008 DCW

[Data type] Bit
DCW In diagnostic display, the values of DCV, DCI, and DCW are:
0: Not displayed.
1: Displayed.
This parameter is valid only for oscillators that support this display.
The name of this parameter is not displayed.

NOTE
Alarm No.4125 cant be monitored when parameter
No.15008#5 , No.29046 or No.29047 is zero. If
alarm No.4125 is needed to be monitored, set this
parameter to 1 and set proper setting value to
No.29046 and No.29047.

29046 In-tube pressure to check gas spec.

[[Data type] Word
DCI value of laser power supply is equal to or higher than parameter
No.29047 when in-tube pressure reaches this parameter value after
HVON(G222#7)=1. Alarm No.4125 cant be monitored if this
parameter value is zero.

29047 DCI maximum value to check gas spec.

[[Data type] Word
[Unit of data] 0.1A
DCI value of laser power supply is equal or higher than this parameter
value when in-tube pressure reaches parameter No.29046 after
HVON(G222#7)=1. Alarm No.4125 cant be monitored if this
parameter value is zero

- 324 -
E.21.3 Setting for Automatic Aging Function (Fine Mode)

29060 Laser power in normal calibration (Fine mode)

[[Data type] Word
[Unit of data] W
Set the power specified for obtaining the power calibration coefficient
NOTE
When manually performing the aging operation by
changing the setting, set the same value in
parameter No.29060 and No.15201

29061 Oscillation frequency in normal calibration (Fine mode)

[[Data type] Word
[Unit of data] Hz
Set the frequency specified for obtaining the power calibration
coefficient.
NOTE
parameter No.29061 and No.29072.

29062 Pulse duty ration in normal calibration (Fine mode)

[[Data type] Word
[Unit of data] %
Set the pulse duty specified for obtaining the power calibration
coefficient.
NOTE

29063 Calibration time of normal calibration (Fine mode)

[[Data type] Word
[Unit of data] sec
Set the time specified for obtaining the power calibration coefficient.
NOTE

- 325 -
29064 Gas pressure in normal calibration (50Hz) (Fine mode)

[[Data type] Word
Set the in-tube pressure to be set for oscillation during power
calibration. For an oscillator containing an inverter, set the same value
as the setting of parameter No.29065. (The value set when an
oscillator containing no inverter is used in an area using a supply
frequency of 50Hz.)
NOTE
The gas pressure may have been changed in the
field. So, input the setting of parameters No.29023
and No.29024 in parameters No.29064 and
No.29065.

29065 Gas pressure in normal calibration (60Hz) (Fine mode)

[[Data type] Word
Set the in-tube pressure to be set for oscillation during power
calibration. For an oscillator containing an inverter, set the same value
as the setting of parameter No.29064. (The value set when an
oscillator containing no inverter is used in an area using a supply
frequency of 60Hz.)
NOTE
field. So, input the setting of parameters No.29023
and No.29024 in parameters No.29064 and
No.29065.

29066 Laser pwer in aging (Fine mode)

[[Data type] Word
[Unit of data] W
Set the power to be specified when aging is performed by the

29067 Oscillation frequency in aging (Fine mode)

[[Data type] Word
[Unit of data] Hz
Set the frequency to be specified when aging is performed by the

- 326 -
29068 Pilse duty ration in aging (Fine mode)

[[Data type] Word
[Unit of data] %
Set the pulse duty ration to be specified when aging is performed by
the automatic aging function.

29069 Calibration time in aging (Fine mode)

[[Data type] Word
[Unit of data] sec
Set the time to be specified per operation when aging is performed by
the automatic aging function.

29070 Gas pressure in aging 50Hz (Fine mode)

[[Data type] Word
Set the in-tube pressure to be set during oscillation when aging is
performed by the automatic aging function. For an oscillator
containing an inverter, set the same value as the setting of parameter
No.29071. (The value set when an oscillator containing no inverter is
used in an area using a supply frequency of 50Hz.)
NOTE
field. So, input the values obtained by subtracting
100 from the settings of parameter No.29023 and
No.29024 in parameters No.29070 and No.29071.

29071 Gas pressure in aging 60Hz (Fine mode)

[[Data type] Word
Set the in-tube pressure to be set during oscillation when aging is
performed by the automatic aging function. (The value set when an
oscillator containing an inverter is used or when an oscillator
containing no inverter is used in an area using a supply frequency of
60Hz.)
NOTE
field. So, input the values obtained by subtracting
100 from the settings of parameter No.29023 and
No.29024 in parameters No.29070 and No.29071.

- 327 -
29072 Pulse frequency in normal calibration (Fine mode)

[[Data type] Word
[Unit of data] Hz
Set the frequency specified for power calibration.

NOTE
parameters No.29072 and No.29061.

29073 Pulse duty ration in normal calibration (Fine mode)

[[Data type] Word
[Unit of data] %
Set the pulse duty ration specified for power calibration.
NOTE
parameters No.29073 and No.29062.


- 328 -
F. CONTROL SEQUENCES IN
LASER OSCILLATOR
F CONTROL SEQUENCES IN LASER
OSCILLATOR

Appendix F, CONTROL SEQUENCES IN LASER OSCILLATOR
consists of the following contents:

F.1 OUTLINE OF LASER OSCILLATION SEQUENCES..........329
F.2 INTRA-TUBE GAS PRESSURE CONTROL SEQUENCES.331
F.3 TUBE VOLTAGE CONTROL SEQUENCES........................333

- 329 -
F.CONTROL SEQUENCES IN
LASER OSCILLATOR
F.1 OUTLINE OF LASER OSCILLATION SEQUENCES

SEQ 0
SEQ 10
SEQ 20
SEQ 30
CNC POWER = ON
CNC POWER = OFF
(START KEY)
RUN = ON
(START KEY)
RUN = OFF
HVON = OFF
HVON = ON
(WAIT=1)
SEQ29(RFHV=1)
(WAIT=1)
(RFHV=0)
INITIAL
READY OF
DISCHARGING
READY OF
OSCILLATION
PURGE = 0
LRDY = 0
PTLP = 0
LSTR = 0
PURGE = 1
LRDY = 0
PTLP = 0
LSTR = 0
PURGE = 0
LRDY = 1
PTLP = 0
LSTR = 0
PURGE = 0
LRDY = 0
PTLP = 1
LSTR = 1
POWER OFF state

Descriptions of the signals used in the figure
RUN : Oscillator start switch
HVON : Discharge start switch
PURGE : Purge in tube completion signal
LRDY : Discharge preparation completion signal
PTLP : Warning light signal
LSTR : Oscillation preparation completion signal

As is shown in the flow chart, the laser oscillation sequences can be
divided into four steps.
[SQ0] POWER OFF state
This is the state prior to power on where all the signals are in off state.
[SQ10] INITIAL state (purge completion state)
After power is turned on, laser comes into PURGE=1 state. This
signal is on when atmospheric pressure sensor monitors that the
intra-tube pressure equals atmospheric pressure.
Usually when this signal is on, purge completion lamp on operational
board is lit.

- 330 -
LASER OSCILLATOR
[SQ20] READY OF DISCHARGING state
When oscillator start switch is turned on, evacuation is carried on and
then gas pressure control begins. When the gas pressure reaches the
set pressure, the discharge preparation completion state (LRDY) is set
to enable the discharge start switch (HVON) to be turned on.
[SQ30] READY OF BEAM-ON OPERATION state
When HVON is turned on, a high voltage is applied to the discharge
tube to start discharge. Next, the intra-tube gas pressure is controlled
at the pressure at oscillation time, and a compensation coefficient is
found. Then, the base discharge state is set, and the oscillation
preparation completion state is set.

The sequences for starting the oscillator are as follows:
Sequence
number
Meaning
10 Initial state (purge completed state)
16 Exhaust pump being started
17
State waiting for a negative pressure to be reached upon
completion of exhaust operation (leakage check)
18
State waiting for the turbo blower frequency arrival signal
(AR) to be turned on
20
Discharge preparation completion state (LRDY) (waiting for
discharge to be started)
26 Discharge being started
27
State waiting for the base discharge state to be set after the
start of discharge
28 Power compensation being performed
30 Oscillation preparation completion state (LSTR)

The sequences for stopping the oscillator are as follows:
Sequence
number
Meaning
30 Oscillation preparation completion state (LSTR)
23
State waiting for setting from gas pressure during laser
oscillation to discharge start time gas pressure
20 Discharge preparation completion state (LRDY)
14 State waiting 75 seconds
49 Vacuum being drawn with RUN turned off
12 Purge operation being performed
10 Initial state (purge completed state)

In addition, the following sequences are used:
Sequence
number
Meaning
50 State waiting 75 seconds with RUN turned on again
51 Automatic leakage check being made
- 331 -
LASER OSCILLATOR
F.2 INTRA-TUBE GAS PRESSURE CONTROL SEQUENCES

Gas pressure control is exercised as shown below.

Parameter
No.15256
SQ18 SQ20
SQ26
SQ27 SQ28 SQ30 SQ23 SQ20 SQ12
SQ16
SQ17
SQ49
GAS
PRESSURE
Parameters
No.15242
No.15243
(No.29023)
(No.29024)
Parameter
No.15241

Parameter
No.15240

RUN
ON
HVON
ON
LSTR HVON
OFF
LRDY RUN
OFF
2torr
Parameter
No.15205
Parameter
No.15249
: Command
: Real

START OF
GAS CONTROL
LRDY TIME
70sec
Parameter
No.15250
(****) means for Fine mode


- 332 -
LASER OSCILLATOR

[SQ10] This is the state after power is turned on in which intra-tube gas
pressure equals atmospheric pressure.

[SQ16, 17, 18] Setting the laser start switch to ON starts evacuation, which continues
until the pressure designated by parameter No. 15240 is reached. After
evacuation up to the value set in parameter No. 15240, gas pressure
control starts. Then, the pressure increases to the value set in
parameter No. 15241. When the intra-tube gas pressure reaches within
20 Torr for parameter No.15241, the turbo blower starts and reaches
the specified speed in about 70 seconds. Then, the discharge
preparation completion state (LRDY = 1) is set. If the frequency
reached signal is not issued by the inverter within 120 seconds of the
turbo blower being started, an alarm is issued.

[SQ20] In the discharge preparation completion state (LRDY=1), the
discharge start switch (HVON) is enabled.

[SQ26, 27, 28] When the discharge start switch (HVON) is turned on in the discharge
preparation completion state, a high voltage is applied to the discharge
tube to set the base discharge state. At the same time, gas pressure
control is exercised. The intra-tube gas pressure increases from the
value of parameter No. 15241 to the value set in parameter No. 15242
or 15243. At this time, a check is made to see if the intra-tube gas
pressure is within (Parameter No.15251) relative to the value of
parameter No. 15242 or 15243. If the intra-tube gas pressure is not
within this range, an alarm is issued. If there is no problem, an output
compensation coefficient calculation is made.

[SQ30] This is oscillation preparation completion state (LSTR=1) in which
laser oscillation is ready.

[SQ23] When HVON is turned off, discharge ends, and the state changes from
the oscillation preparation completion state (LSTR) to the discharge
preparation completion state (LRDY). At this time, the intra-tube gas
pressure changes from the value set in parameter No. 15242 or 15243
to the value set in parameter No. 15241.

[SQ14, 49, 12] When the oscillator start switch is set to OFF in the SQ20 state, gas
pressure control ends, and the termination of the turbo blower
operation is awaited for 70 seconds. Then, if evacuation is enabled
(when bit 2 of parameter No. 15003 is set to 1), evacuation is
performed for the period of time set in parameter No. 15256. Then,
laser gas is filled until the intra-tube gas pressure becomes equal to the
atmospheric pressure. Upon completion of laser gas filling, the purge
state is set. When the purge state is set, power OFF interlock is
released, and the power can be turned off.

- 333 -
LASER OSCILLATOR
F.3 TUBE VOLTAGE CONTROL SEQUENCES

The control of tube voltage is done simultaneously with that of gas
pressure as shown in the following sequences.

H.V.ON
LSTR
No compensation
LSTR
In compensation
SQ20
Parameter
No.15222
20sec or
30sec
Gas
voltage
check
Parameter
No.15205
[TIME]
Parameters Nos.15200, 15201 1/2
Parameters
Nos.15200, 15201
Parameter
No.15223
(No.29022)
In output
compensation
In no
compensation
Eight step of
compensation
Command voltage
Tube voltage

Parameter
No.15221
Tube voltage
Command
voltage
GAS
PRESSURE
Parameters
No.15242, 15243
(No.29023,29024)
Parameter
No.15241
SQ292 SQ293 SQ294
SQ27 SQ30
SQ291
6sec
SQ28 SQ26
(****) means for Fine mode


- 334 -
LASER OSCILLATOR

[SQ291] When the discharge start switch (HVON) is turned on, a high voltage
is applied to the discharge tube, and voltage control is started. The
command induces discharge by changing the command value in a
ramp manner to the value set in parameter No. 15223. The time
required to reach the value set in parameter No. 15223 after the
discharge start switch (HVON) is turned on is 6 seconds.

[SQ292] In this sequence, discharge is maintained at the discharge command
value set in parameter No. 15223 for the period of time set in
parameter No. 15222 (discharge start wait time). Here all the tubes
must be in discharge. The state of discharge is checked by comparing
tube voltage with discharge start voltage (parameter No. 15221).

[SQ293] When discharge start is confirmed in SQ292, power command
changes to parameter No. 15223 (bias command).Here base discharge
is established for a while and the comparison between discharge tube
voltage and parameter No. 15270 (tube voltage in normal discharge) is
done using the following decision equation.
V
n-1
- V
n
< parameter No. 15272
V
n-1
: parameter No. 15270 (tube voltage in normal discharge)
V
n
: monitored voltage of the tube of the smallest number
(power supply)
Parameter No. 15272 : Tube voltage decrease limit
The decision of normal state is given by the holding of the above
inequality. When normal, monitored voltage of Vn tube is set for
parameter No. 15270. If parameter No. 15000#4 is 0 (no power
compensation) then, laser enters oscillation preparation completion
(LSTR) state.

[SQ294] When normal base discharge is confirmed and parameter No. 15000#4
is 1, this sequence begins to obtain power calibration coefficient.
Power calibration is to calibrate so that real and command powers
become equal. The equation used is as follows.
Parameter No. 15204 = Pc / Pa 1024
Parameter No. 15204 : Power calibration coefficient
Pc : Command power
Pa : Actual power
The calibration coefficient is calculated by outputting the value
specified with parameter No. 15200 (when half of the discharge tubes
are used) or parameter No. 15201 (when all the discharge tubes are
used) then assigning that value to the above equation.
The value of Pa becomes an actual value measured after the time set in
parameter No. 15205 (compensation time setting) has elapsed.
The difference between the specified power and actual power is also
monitored. The laser is judged as being normal provided the
difference is less than the value specified with parameter No.
15271(power decrease limit).The calibration coefficient is clamped to
the value specified for parameter No. 15203 (power calibration limit).
Once the above procedure has terminated normally, the laser enters
the oscillation preparation completion (LSTR) state.
- 335 -
G.INSTALLING GAS FITTINGS
AND WATER FITTINGS
G INSTALLING GAS FITTINGS AND
WATER FITTINGS

Appendix G, INSTALLING GAS FITTINGS AND WATER
FITTINGS consists of the following contents:

G.1 GAS FITTINGS .......................................................................336
G.2 WATER FITTINGS .................................................................337
G.3 FITTINGS AND TUBE ORDERING INFORMATION.........338

- 336 -
G. INSTALLING GAS FITTINGS
AND WATER FITTINGS
G.1 GAS FITTINGS

G.1.1 Tightening a Fittings

(1) Cut the end face of the tube at right angles, then install a box nut,
back ferrule, and front ferrule on the tube as shown below. At
this time, pay attention to their directions.
(2) Insert the tube through the fittings all the way through, then
tighten the box nut until you feel a resistance with fingers. Next,
tighten the nut further by one and a quarter turns with a wrench.

Method of installing ferrules

(3) After the work above, mark the box nut and the main fittings as
shown in the figure.

G.1.2 Reinstalling a Fittings

(1) Before removing the tube, provide marks so that the positions of
the box nut and the main fittings can be identified.
(2) Remove the tube.
(3) When installing the tube, ensure that the mark on the box nut of
the fittings matches the position marked in step (1).
(4) If the same marked position is reached just by gently turning the
box nut by fingers, cut the tube area where the old ferrule was
installed, then install a new ferrule according to the procedure
described in Subsection G.1.1.

- 337 -
AND WATER FITTINGS
G.2 WATER FITTINGS

G.2.1 Tightening a Fittings

(1) Cut the end face of the tube at right angles, then install a box nut
and sleeve on the tube as shown below. At this time, pay
attention to their directions.
(2) Insert the tube through the fittings all the way through, then
tighten the box nut until you feel a resistance with fingers. Next,
tighten the nut further by one and a half turns with a wrench.

Method of installing a water tube

(3) After the work above, mark the box nut and the main fittings as
shown in the figure.

G.2.2 Reinstalling a Fittings

(1) Before removing the tube, provide marks so that the positions of
the box nut and the main fittings can be identified.
(2) Remove the tube.
(3) When installing the tube, ensure that the mark on the box nut of
the fittings matches the position marked in step (1).
(4) If the same marked position is reached just by gently turning the
box nut by fingers, cut the tube area where the old sleeve was
installed, then install a new sleeve according to the procedure
described in Subsection G.2.1.

- 338 -
AND WATER FITTINGS
G.3 FITTINGS AND TUBE ORDERING INFORMATION

The ordering information of the fittings, ferrules, sleeve, and box nut
is provided below.
(A sleeve and box nut are delivered together with a fittings.)

Gas fittings
Tube
diameter
Screw
section
Ordering information
1/4 A97L-0200-0648#H-2B-B 1/4
3/8 A97L-0200-0648#H-2C-B
1/4 A97L-0200-0648#H-3B-B 3/8
3/8 A97L-0200-0648#H-3C-B
3/8 A97L-0200-0648#H-4C-B
Nipple
1/2
1/2 A97L-0200-0648#H-4D-B
1/4 A97L-0200-0648#L-2B-B 1/4
3/8 A97L-0200-0648#L-2C-B
1/4 A97L-0200-0648#L-3B-B 3/8
3/8 A97L-0200-0648#L-3C-B
3/8 A97L-0200-0648#L-4C-B
Elbow
1/2
1/2 A97L-0200-0648#L-4D-B
1/4 - A98L-0004-0348#2-N
3/8 - A98L-0004-0348#3-N
Ferrule
(Nylon)
1/2 - A98L-0004-0348#4-N
1/4 - A98L-0004-0348#2-B
3/8 - A98L-0004-0348#3-B
Ferrule
(Brass)
1/2 - A98L-0004-0348#4-B
1/4 - A97L-0200-0648#UN-2-B
3/8 - A97L-0200-0648#UN-3-B
Box nut
1/2 - A97L-0200-0648#UN-4-B

Gas tube
Diameter Color Material
(x: Specifies a length not
longer than 10 m in steps of 1
m.)
Yellow Polyethylene A98L-0004-0261#4-Y-x
Orange Polyethylene A98L-0004-0261#4-O-x
1/4
Transparent PFA A98L-0004-0435#8-x
Yellow Polyethylene A98L-0004-0261#6-Y-x
Blue Polyethylene A98L-0004-0261#6-BU-x
3/8
Transparent PFA A98L-0004-0435#4-x
1/2 Transparent PFA A98L-0004-0435#5-x

- 339 -
AND WATER FITTINGS
Water fittings (Material: Brass)

Tube
diameter
Screw
section
1/8 A97L-0200-0651#N-06A-B 6mm
1/4 A97L-0200-0651#N-06B-B
1/4 A97L-0200-0651#N-08B-B 8mm
3/8 A97L-0200-0651#N-08C-B
1/4 A97L-0200-0651#N-10B-B
3/8 A97L-0200-0651#N-10C-B
10mm
1/2 A97L-0200-0651#N-10D-B
3/8 A97L-0200-0651#N-12C-B 12mm
1/2 A97L-0200-0651#N-12D-B
Nipple
16mm 1/2 A97L-0200-0651#N-16D-B
1/8 A97L-0200-0651#L-06A-B 6mm
1/4 A97L-0200-0651#L-06B-B
1/4 A97L-0200-0651#L-08B-B 8mm
3/8 A97L-0200-0651#L-08C-B
1/4 A97L-0200-0651#L-10B-B
3/8 A97L-0200-0651#L-10C-B
10mm
1/2 A97L-0200-0651#L-10D-B
3/8 A97L-0200-0651#L-12C-B 12mm
1/2 A97L-0200-0651#L-12D-B
Elbow
16mm 1/2 A97L-0200-0651#L-16D-B
6mm - A97L-0200-0651#U-06-B
8mm - A97L-0200-0651#U-08-B
10mm - A97L-0200-0651#U-10-B
12mm - A97L-0200-0651#U-12-B
Union
16mm - A97L-0200-0651#U-16-B
6mm - A97L-0200-0651#LU-06-B
8mm - A97L-0200-0651#LU-08-B
10mm - A97L-0200-0651#LU-10-B
12mm - A97L-0200-0651#LU-12-B
Union
elbow
16mm - A97L-0200-0651#LU-16-B
6mm - A97L-0200-0651#S-06
8mm - A97L-0200-0651#S-08
10mm - A97L-0200-0651#S-10
12mm - A97L-0200-0651#S-12
Sleeve
16mm - A97L-0200-0651#S-16
6mm - A97L-0200-0651#UN-06-B
8mm - A97L-0200-0651#UN-08-B
10mm - A97L-0200-0651#UN-10-B
12mm - A97L-0200-0651#UN-12-B
Box nut
16mm - A97L-0200-0651#UN-16-B

- 340 -
AND WATER FITTINGS
Water tube
Diameter Color Material
(x: Specifies a length not longer than
10 m in steps of 1 m.)
White Nylon A98L-0004-0263#8-W-x 6mm
Black Nylon A98L-0004-0263#8-BA-x
White Nylon A98L-0004-0263#6A-W-x 16mm
Black Nylon A98L-0004-0263#6A-BA-x

- 341 -
H.EXTERNAL GAS LEAKAGE
RECORDING TABLE
H EXTERNAL GAS LEAKAGE RECORDING
TABLE

- 342 -
H. EXTERNAL GAS LEAKAGE
RECORDING TABLE
External Gas Leakage Recording Table
Date: / /
Customer Name
Customer Staff in Charge

Record necessary data according to the procedure below.

Primary pressure gage
(C)
Secondary pressure
adjustment handle (A)
Secondary
pressure gage (D)
To laser oscillator
Main cylinder valve
(B)
Gas cylinder

Fig. H Gas regulator
Recording procedure

<1> Stop the oscillator, and complete purging. Then, turn off the power.
<2> When 5 minutes or more has elapsed after the power is turned off, turn the secondary pressure
adjustment handle (A) of the gas regulator in the depressurization direction, and close the main cylinder
valve (B) after closing all adjustment nozzles.
<3> Record the readings of the primary pressure gauge (C) and secondary pressure gauge (D) together with
start time and ambient temperature data.
Primary pressure gauge
(C1)
Secondary pressure
gauge (D1)
Start time (t1) Ambient temperature
(kgf/cm
2
,Mpa) (kgf/cm
2
,Mpa)
Day hours minutes C
(After recording the data above, leave the oscillator for 8
hours as it is, then record the data below.)
<4> Record the readings of the primary pressure gauge (C) and secondary pressure gauge (D) together with
start time and ambient temperature data after a certain time (8 hours as standard, but desirably a period
of time a little bit longer than 8 hours).
(C2)
Secondary pressure
gauge (D2)
End time (t2) Ambient temperature
(kgf/cm
2
,Mpa) (kgf/cm
2
,Mpa)
Day hours minutes C
<5> Open the main cylinder valve (B) slowly
(Note)
. After the main cylinder valve is fully opened, record the
reading of the primary pressure gauge (C).
(C3)
(kgf/cm
2
,Mpa)

NOTE
When opening the main cylinder valve, do not stand in front of the regulator but
stand slantwise relative to the regulator. When the main cylinder valve is opened
if there is a large amount of leakage, the regulator may be destructed because
an abrupt pressure is applied to the regulator, and broken pieces can scatter.

<6> End of measurement
- 343 -
H.EXTERNAL GAS LEAKAGE
RECORDING TABLE

Decision

Whether there is a leakage can be determined from the results of measurement as described below. If you
send your recording table via FAX to the FANUC service center, the service center will check if there is a
leakage.

(1) Leakage on the primary piping
Calculate the primary pressure variation rate according to the expression below to determine the
leakage state.
The unit of t1 and t2 is the hour.
C3 C2 8
Primary pressure variation rate (%)=
C3
t2 t1
100
If the calculated primary pressure variation rate is 5% or less, the presence of no leakage is
determined.

(2) Leakage on the secondary piping
Calculate the secondary pressure variation rate according to the expression below to determine the
leakage state.
The unit of t1 and t2 is the hour.
D1 D2 8
Secondary pressure variation rate (%)=
D1
t2 t1
100
The presence of no leakage is determined if the calculated primary pressure variation rate is as
follows:
- 10% or less when the piping is a polyethylene tube
- 6% or less when the piping is a stainless tube

I.GLOSSARY APPENDIX B-70445EN/01
- 344 -
I GLOSSARY

Name Meaning
Access panel
Part of the protective housing or enclosure that, when removed or moved, will permit
exposure to laser radiation or collateral radiation beyond an allowable value.
AEL : Accessible
Emission Limit
Maximum accessible emission level set up for each class of laser products
Alignment Optical axis adjustment
Aperture Iris, or stop
Beam Aggregate of unidirectional, diverging, or conversing rays
Beam diameter
Defined as the distance between two symmetrical points on a beam cross section at which
the power per unit area is 1/e2 of the maximum power per unit area. At FANUC, however,
the diameter measured with an acrylic burn pattern.
Beam divergence Angle through which a beam spreads
Burn pattern
Laser beam mode pattern generated on a plate such as an acrylic plate for confirmation
purposes
Circular polarization
Polarization in which a plane of polarization rotates about the axis along which the light
progresses and does not have directivity; an electric or magnetic field based on circular
polarization has a constant intensity.
CO
2
laser Laser that uses a carbon dioxide gas as a laser medium
CW : Continuous wave Continuously radiated laser output
Cyclone A separator using centrifugal force.
dielectric An electric insulator.
Discharge excitation Realization of inverted population by means of discharge
Enhanced pulse Greatly amplified peak output of a pulse
Excitation
Transition of atoms or molecules to a higher energy level by supplying them with external
energy
Exposure time Duration through which laser radiation is emitted
Fast axial flow laser Laser in which gas flows rapidly in the same direction as the laser beam
Feedback control
Control in which the controlled amount is compared with the target value through feedback
and corrective operation is performed to make them match.
Laser Device for generating light by stimulated emission
Laser controlled area
Area in which activities are controlled or monitored for protection from hazards resulting
from laser radiation
Laser Diode Laser that uses a semiconductor as an exciting medium
Laser mirror Reflecting mirror used in a laser resonator
Laser safety officer
Person having sufficient knowledge about evaluation and management of hazards of
lasers and in charge of safety management of lasers
Laser safety standard
Standard to protect human bodies from hazards resulting from laser beams in view of use
of lasers and about laser products for sale
Linear polarization
Polarization in which a plain of polarization is at a constant angle with the axis along which
the light progresses
Maintenance
Action taken by a user to preserve normal operation of a product, such as adjustment or
other measures specified in documents created by the manufacturer for users
Matching circuit
If power is to be transmitted by connecting two different electric circuits, maximum power
can be sent by setting the circuits to appropriate conditions. A matching circuit is a circuit
that sets the circuits to appropriate conditions.
B-70445EN/01 APPENDIX I.GLOSSARY
- 345 -
Name Meaning
Maximum output
Maximum radiation power or maximum radiation energy per pulse that a laser product
outputs in all directions where there is a hazard of exposure in view of operational
capacity in every area at any point of time after the production of the laser product
Mode State of a resonant system in which an electromagnetic field has a specific distribution
MPE : Maximum
Permissible Exposure
Maximum laser radiation level that can be radiated onto human bodies without harmful
influence to them in an ordinary environment
Operation
Laser product's action covering all intended functions, not including maintenance or
service.
Optical resonator
Device in which stimulated emission of light is used for a laser and which consists of a pair
of reflecting mirrors facing each other
Parameter Variable that is assigned a given value for a specific purpose and indicates that purpose
Phase
Amount representing a positional relationship between two adjacent highest or lowest
points on a wave
Power density Energy per unit area
Protective housing
Laser product housing or its part designed to protect humans from exposure to a laser
beam exceeding an accessible emission level or strong collateral radiation
Pulse duration The time from the rise half-value point of a pulse to the fall half-value point.
Pulse duty Ratio (%) of a duration in which a pulsating laser output is on, to its entire cycle
Pulse frequency Repetition frequency at which pulsating laser beams are radiated from an oscillator
Pulse laser Laser that outputs energy in the form of a single pulse or a pulse train
Pulse output Laser output radiated in the form of a pulse train
Radian Measurement unit of angle; 1 radian equals 360/2p
Radiant energy Energy emitted, transmitted, or received (measured in joules, or J)
Safety interlock
Device combined with the protective housing of a laser product to stop its operation
automatically when part of the housing is removed
Sequence A succession of steps carried out in a prescribed order
Stimulated emission
The emission of light by atoms and molecules at a certain energy level, induced by
incident light, at the same frequency, in the same phase, and in the same polarized state,
thereby shifting the atoms and molecules to a lower energy level.
Target Jig used to radiate and position a laser beam
Threshold Physical quantity necessary to generate laser beams

B-70445EN/01 INDEX

i-1
INDEX
<A>
Adjusting the exhaust unit (adjusting the laser gas
consumption) .......................................................... 167
Adjusting the Flow Sensor ............................................ 175
Adjusting the Oil Level Detection Signal ..................... 144
Adjusting the Position................................................... 178
Adjustment Method....... 134, 162, 169, 182, 202, 204, 206
Adjustment Method (Adjusting the Laser Gas
Consumption).......................................................... 171
ALIGNMENT OF THE BEAM FOLDING UNIT
(C2000i-B, C4000i-B SHORT OPTICAL PATH
LENGTH TYPE) .................................................... 213
ALIGNMENT OF THE GUIDE LASER ..................... 215
ALIGNMENT OF THE RESONATOR........................ 200
Alignment Procedure at Mirror Cleaning Time ............ 206
Alignment Procedure during Installation after
Transportation......................................................... 204
Alignment Procedure for Adjusting All Mirrors ........... 202
Anticorrosive................................................................... 41
Antifreezing solution....................................................... 42
Attaching and Detaching a Cable to and from
the Terminal Block ................................................. 180
AUTOMATIC AGING................................................. 229
Automatic Aging Function Setting Screen............ 230, 248
AUTOMATIC LEAKAGE CHECK............................. 233
<B>
BASE BIAS MODULATION....................................... 243
Base discharge adjustment ............................................ 134
BEAM ABSORBER..................................................... 178
Beam Mode Check.......................................................... 59
Bell-shaped Filter for Power Feedback Gain ................ 239
<C>
Change of processing mode .......................................... 245
Check ............................................................................ 136
Check for Leakage within the Oscillator......................... 54
Check method ........................................................... 70, 73
Checking Cooling Water................................................. 54
Checking the Interface PCB signals................................ 52
Checking the jumper pins................................................ 52
Checking the Parameters............................................... 145
Checking the power supply............................................. 50
Circuit Breaker for Cooling Fan, Solenoid Valve, and
Stabilized Power Supply Trips................................ 113
Cleaning ........................................................................ 186
Cleaning agent................................................................. 41
Cleaning and Replacing the Beam Folding Unit ........... 198
Cleaning and Replacing the Folding Mirrors ................ 197
CLEANING AND REPLACING THE OPTICAL
PARTS.................................................................... 194
Cleaning and Replacing the Output Coupler and Rear
Mirror...................................................................... 195
Command of running beam internally with shutter
closed ...................................................................... 227
Compensation coefficient history display ..................... 218
Compensation for Power Sensor Response Speed ........ 237
Configuration ................................................ 159, 168, 170
CONTROL SEQUENCES IN LASER
OSCILLATOR........................................................ 328
Cooling Water ................................................................. 40
Cooling water piping............................................... 40, 121
<D>
DAILY INSPECTION.................................................... 66
Data Table..................................................................... 235
Data table structure ....................................................... 236
DEFINITION OF WARNING, CAUTION, AND
NOTE....................................................................... s-2
DETAILS OF CHECKING............................................. 50
DETAILS OF MAINTENANCE.................................... 69
Details of safety circuit ................................................... 48
DIAGNOSIS SCREEN INFORMATION..................... 257
Discharge Aging.............................................................. 56
Discharge Margin Check................................................. 58
DISCHARGE TUBE..................................................... 139
Discharge-related alarm history display........................ 220
Display Information ...................................................... 218
Display of Fluctuating Laser Output on LCD............... 113
Display of mode change................................................ 247
<E>
Electrical Connections............................................. 43, 119
Electromagnetic Contactor of Exhaust Pump Trips
Thermally................................................................ 113
EMERGENCY STOP BUTTON.................................... 21
INDEX B-70445EN/01

i-2
ERROR CODE LIST.................................................... 255
Excessive Laser Gas Consumption ............................... 114
EXHAUST CONTROLLER (C2000i-B)...................... 170
EXHAUST PUMP ........................................................ 158
Exhaust Pump Filter ........................................................ 74
Exhaust Pump Oil ........................................................... 73
EXTERNAL GAS LEAKAGE RECORDING
TABLE ................................................................... 341
External Laser Gas Piping Leakage Check
(Clamp Test) ............................................................. 53
EXTERNAL VIEW OF LASER OSCILLATOR......... 251
<F>
FAN UNIT.................................................................... 180
FIRE.................................................................................. 8
FITTINGS AND TUBE ORDERING
INFORMATION..................................................... 338
Function ................................................................ 241, 243
<G>
GAS CONTROLLER (C4000i-B) ................................ 159
GAS DUST COLLECTOR UNIT................................. 186
GAS FITTINGS............................................................ 336
Gas pipe .......................................................................... 38
GAS PIPING................................................................. 123
GLOSSARY.................................................................. 344
GUIDE LASER (SEMICONDUCTOR LASER).......... 179
<H>
HIGH TEMPERATURE................................................... 9
HIGH VOLTAGE............................................................. 5
HIGH-PRESSURE GAS................................................. 20
HIGH-SPEED I/O UNIT............................................... 190
<I>
In case that laser alarm occurs during the processing
mode change ........................................................... 246
INFORMATION DISPLAYED ON THE DIAGNOSIS
SCREEN................................................................. 258
Input and output of saved maintenance data ................. 227
INPUT UNIT ................................................................ 127
INSTALLATION............................................................ 31
INSTALLATION PROCEDURE ................................... 32
INSTALLING GAS FITTINGS AND WATER
FITTINGS............................................................... 335
INTERNAL STRUCTURE....................................... 22, 25
INTRA-TUBE GAS PRESSURE CONTROL
SEQUENCES ......................................................... 331
INVERTER................................................................... 145
Inverter Alarm Display.................................................. 115
<K>
KEY CONTROL............................................................. 20
<L>
Laser alarm history screens ........................................... 221
LASER BEAM.................................................................. 2
Laser Gas......................................................................... 38
Laser gas monitor .......................................................... 248
Laser gas specification .................................................... 38
LASER OPTICAL PARTS........................................... 193
LASER OPTICAL SYSTEM........................................ 192
LASER OSCILLATOR STATUS DISPLAY............... 261
Laser Output Just after Switch On Is Low .................... 112
Laser Power Supply Alarm Display.............................. 111
LASER POWER SUPPLY UNIT................................. 131
LASER SOFTWARE FUNCTION............................... 216
Laser tuning screen ....................................................... 225
Leak check screen ......................................................... 223
Leakage Check and Discharge Aging ........................... 144
Leakage in external piping .............................................. 39
Locating Internal Leakage............................................... 55
LOW TEMPERATURE SENSOR UNIT ..................... 187
<M>
Main Breaker Trips ....................................................... 114
MAINTENANCE............................................................ 65
MAINTENANCE PARTS .............................................. 75
MAINTENANCE SCREEN ......................................... 217
MAJOR FAULTS ......................................................... 111
Manual Operation.......................................................... 230
MATCHING BOX........................................................ 138
Maximum output adjustment......................................... 135
Measurement of voltage of DC power supply unit.......... 50
Method of Operation..................................... 217, 229, 233
Method of registration................................................... 235
Method of Setting.......................................................... 240
<N>
NC-to-oscillator connection and power supply cable
connection................................................................. 43
B-70445EN/01 INDEX

i-3
<O>
OBTAINING A MAXIMUM POWER......................... 207
OIL MIST DECOMPOSING ELEMENT..................... 185
Operating the gas supply pressure switch and
atmospheric pressure switch ................................... 163
Operation....................................................................... 245
Operation of the Leakage Check Function.................... 234
Oscillation Characteristics............................................... 57
OSCILLATOR CONNECTIONS........................... 38, 118
OUTLINE OF LASER OSCILLATION
SEQUENCES ......................................................... 329
OXYGEN SENSOR UNIT .......................................... 188
<P>
Packing for Transportation.............................................. 63
PARAMETER LIST..................................................... 269
PARAMETERS FOR ASSIST GAS PRESSURE AND
TIME SETTING..................................................... 290
PARAMETERS FOR AUTOMATIC AGING
FUNCTION............................................................ 309
PARAMETERS FOR CONTOURING CONDITIONS280
PARAMETERS FOR DISCHARGE............................ 299
PARAMETERS FOR DISCHARGE TUBE
SELECTION........................................................... 279
PARAMETERS FOR EDGE MACHINING
CONDITIONS........................................................ 281
PARAMETERS FOR ENABLING/DISABLING
VARIOUS FUNCTIONS........................................ 270
PARAMETERS FOR GAS CONTROL (1).................. 301
PARAMETERS FOR GAS PRESSURE
CONTROL (2) ........................................................ 315
PARAMETERS FOR HIGHLY REFLECTIVE
MATERIAL ALARMS .......................................... 304
PARAMETERS FOR HIGH-SPEED PIERCING
CONDITIONS........................................................ 285
PARAMETERS FOR LASER GAS MIXER
FUNCTION............................................................ 313
PARAMETERS FOR LASER MAINTENANCE
TIMING INDICATION FUNCTIONS................... 293
PARAMETERS FOR LASER POWER / VOLTAGE
DROP...................................................................... 306
PARAMETERS FOR PIERCING CONDITIONS ....... 284
PARAMETERS FOR POWER CONTROL ................. 287
PARAMETERS FOR POWER CONTROL (2)............ 312
PARAMETERS FOR POWER FEEDBACK BASED
ON THE ACTUAL OUTPUT ESTIMATION
METHOD ............................................................... 316
PARAMETERS FOR POWER TABLE SETTING...... 307
PARAMETERS FOR PROCESSING MODE
CHANGE FUNCTION........................................... 319
PARAMETERS FOR THE OSCILLATOR.................. 295
Parts of Exhaust Pump .................................................. 158
Parts run time display.................................................... 219
PCB............................................................................... 183
PERIODIC MAINTENANCE ........................................ 67
Phase rotation.................................................................. 50
Placement Numbers....................................................... 139
Power calibration .......................................................... 247
Power calibration coefficient......................................... 247
POWER CALIBRATION METHOD........................... 210
POWER FEEDBACK FUNCTION BASED ON
THE ACTUAL OUTPUT ESTIMATION
METHOD ............................................................... 235
Power sensor time constant measurement screen.......... 222
POWER SENSOR UNIT.............................................. 182
Power Supply Cannot Be Switched Off Using
LCD/MDI Switch.................................................... 112
Power Supply Cannot Be Switched On Using
LCD/MDI Switch.................................................... 112
Power Supply Checking.................................................. 50
Power Supply Margin Check (Pulse Check) ................... 59
PREFACE......................................................................p-1
Preparation .................................... 134, 202, 204, 206, 207
PREPARATION PRIOR TO SHIPMENT...................... 62
PRESSURE CONTROLLER (C2000i-B)..................... 168
Procedure ...................................................................... 208
Processing mode change during automatic aging
function................................................................... 246
Processing mode change during beam output ............... 247
Processing mode change during power calibration ....... 246
Processing mode change during warm up function....... 246
PROCESSING MODE CHANGE FUNCTION ........... 244
Pulse power feedback screens ....................................... 222
Pure water supply unit..................................................... 40
PURGE WORKING AFTER ALARM NO.4073 ......... 241
<R>
Reinstalling a Fittings............................................ 336, 337
Removing Cooling Water................................................ 64
INDEX B-70445EN/01

i-4
Replacement Method
...............71, 73, 74, 131, 138, 139, 141, 142, 158, 161
.................171, 172, 176, 178, 179, 182, 182, 185, 187
Replacement Method (C2000i-B Long Optical Path
Length Type) .......................................................... 188
Replacement Method (C2000i-B Short Optical Path
Length Type) .......................................................... 188
Replacement Method (C4000i-B) ................................. 188
Replacement Method of FSSB I/O MODULE
EXTENSION UNIT................................................ 191
Replacement Method of FSSB PCB.............................. 190
Replacement Method of I/O MODULE UNIT.............. 190
Replacement Method of Inverter................................... 154
Replacement Method of the Cooling Fan in the Inverter156
Replacement of the Parts of Flow Switch ..................... 174
Replacing a Fan Unit..................................................... 180
Replacing a Fan-assisted Radiator ................................ 181
Replacing a high-speed diode ....................................... 132
Replacing an FET module PCB.................................... 133
Replacing the 24V Power Supply ................................. 183
Replacing the charge unit.............................................. 161
REPLACING THE DEW SENSOR.............................. 182
Replacing the exhaust unit ............................................ 161
Replacing the Input Control PCB.................................. 183
Replacing the Interface PCB......................................... 183
Replacing the Intermediate PCB B ............................... 184
Replacing the laser gas cylinder...................................... 39
Replacing the power supply unit ................................... 131
Replacing the shutter mirror.......................................... 176
Replacing the shutter switch (thermal and photoelectric
switches) ................................................................. 177
Replacing the shutter unit.............................................. 176
Replacing the Turbo PCB ............................................. 184
REPLACING THE WATER DISTRIBUTION UNIT.. 172
Replenishment method.................................................... 71
RESPONDING TO ALARM MESSAGES ON
THE SCREEN .......................................................... 81
<S>
SAFETY ENCLOSURE (AT YOUR WORK
STATION) .................................................................. 8
SAFETY FOR LASER HANDLING................................ 1
SAFETY PRECAUTIONS ............................................ s-1
Setting ................................................................... 243, 244
Setting a Power Input Compensation Coefficient ......... 210
Setting for Alarm Monitor (Alarm No.4125) ................ 323
Setting for Automatic Aging Function (Fine Mode) ..... 324
Setting for Fine Mode ................................................... 319
Setting the atmospheric pressure switch........................ 162
Setting the frequency of the power supply of the hour
meter ......................................................................... 50
Setting the gas supply pressure switch .......................... 162
SHUTTER LOCK........................................................... 21
SHUTTER UNIT .......................................................... 176
Specification of the cooling water................................... 40
SPECIFICATIONS....................................................... 254
Storage and expiration date ............................................. 72
<T>
Tightening a Fittings ............................................. 336, 337
Time constant measurement method............................. 237
TOXIC FUME .................................................................. 8
TRIGGER ELECTRODE ............................................. 141
TROUBLESHOOTING.................................................. 79
TROUBLESHOOTING PROCEDURE.......................... 80
TUBE VOLTAGE CONTROL SEQUENCES............. 333
TURBO BLOWER ....................................................... 142
Turbo Blower Oil ............................................................ 70
<U>
UNITS........................................................................... 126
Using the Power Probe.................................................. 211
<W>
WARMING-UP FUNCTION........................................ 240
WARNING LABELS...................................................... 12
WARNING LIGHT (OPTIONAL) ................................. 21
WARNINGS AND CAUTIONS ON EXPOSURE........ s-3
WARNINGS AND CAUTIONS ON HANDLING....... s-6
WARNINGS AND CAUTIONS ON MACHINING..... s-8
WARNINGS AND CAUTIONS ON
MAINTENANCE .................................................... s-5
WATER FITTINGS...................................................... 337

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70445EN 01 MaintenanceManual C2000iB, C4000iB (Unprotected)

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