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(7)
The total charge on electrode is calculated as the
sum of the nodal charges. If F
F
is the nodal force
with a constant displacement and Q
Q
is the nodal
charge with a fixed potential, the total charge on
an electrode can be computed by taking
summation of all the nodal charges which is
written as:
(8)
Where I
el
is a unity vector at positions
corresponding to those electrical DOFs for an
electrode.
Figure 5: Equivalent Butterworth Van Dyke lumped
element equivalent circuit of BAW resonator [6]
Considering the BVD model [6] shown in the
figure 5 admittance of the equivalent circuit is:
(9)
When an unrestrained piezoelectric ceramic
element is exposed to a high frequency
alternating field, an impedance minimum, planar
frequency coincides with the series resonance
frequency, fs. At higher resonance, another
impedance minimum (i.e the axial resonance
frequency) is encountered. The thickness mode
frequency constant, NT, is related to the
thickness of the ceramic element, h by [17]:
N
T
= fs h (10)
III. SIMULATED RESULTS
Figure 6: Bulk acoustic wave resonator used in this paper
A pictorial representation of the modelled BAW
resonator is displayed in the figure above. All
simulations are performed in COMSOL
Multiphysics 4.3 environment. It is a finite
element analysis; solver and simulation software
packaged for various physics and engineering
applications, especially coupled phenomena, or
Multiphysics. In addition it also enables user to
enter coupled systems of partial differential
equations (PDEs). It also offers extensive
interface to MATLAB and its toolboxes for a
variety of pre-processing and post processing
applications [18][19]. All the geometrical
measurements were carried out using the MEMS
module present in the software tool.
The model consists of two thin film metal layers,
piezoelectric layer and a silicon substrate as
displayed graphically in Figure 6. The bottom
layer is the silicon substrate layer on top which is
a thin metal layer serving as the ground
electrode. A thin piezoelectric layer is
sandwiched between two metal layers. It may be
noted that the top metal serves as the positive
electrode while the bottom is the ground
electrode, a potential is applied between them.
The whole simulation is done by dividing the
readings into two broad categories i.e.
thickness of the piezoelectric layer is increased
in the second reading. The physical deformation
along with the admittance, Eigen frequency and
International Journal of Exploring Emerging Trends in Engineering (IJEETE)
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series resonant frequency of the device body are
tabled in accordance with the simulated results as
shown below. Four different piezoelectric
materials are used for each simulation Zinc
Oxide, PZT 5H, LiNbO
3
, Barium titanate.
Reading I: Thickness (m) of: PZD = 9.6, Metal
(Al) = 0.2, Silicon = 6.9.
Figure 7: Admittance, Eigen frequency and series
resonance frequency with Zinc Oxide as PZD
Table 1: Result 1
Piezoele
ctric
material
(PZD)
Thickness(m)
Defo
rmat
ion
n(n
m)
Re
son
ant
fre
q
(M
hz)
|Ad
mitta
nce|
PZD
Met
al
Sili
con
ZnO
9.6 0.2
6.9
1.03
22
1
10
0
PZT 5H 9.6 0.2
6.9
61.1
23
9.9
10
2.5
Lithium
niobate
9.6 0.2
6.9
2.46
16
5
10
-1
Barium
titanate
9.6 0.2
6.9
3.8
19
9.5
10
0.5
Reading II: Thickness (m) of : PZD = 3,
Metal= 0.4, Silicon = 1.6, top metal = Al, bottom
metal = Mb
International Journal of Exploring Emerging Trends in Engineering (IJEETE)
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All Rights Reserved 2014 IJEETE Page 18
Figure 8: Admittance, Eigen frequency and
series resonance frequency with LiNbO
3
as PZD
Table 2: Result 2
IV. CONCLUSION
The simulated model has the capability to sustain
different types of oscillations, where the lowest
and highest series resonant frequencies were
found in Lithium niobate (165 MHz) and PZT
5H (977.5 MHz) respectively within the
investigated range of 100 MHz to 1 GHz. The
frequency response analysis shown in figure 7
and figure 8 shows the deformation in surface
with the change in frequency. The highest value
of deformation was observed when PZT 5H was
used as the PZD material, i.e. 61.1 nm. The
admittance plot in each reading is used to
determine the resonant and anti-resonant
frequency. It may also be observed that the
absolute value of admittance is highest in PZT
5H, i.e. of the order of 10
3
.
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and Martti M. Salomaa,Finite element
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Piezoelectri
c material
(PZD)
Thickness(m)
Defor
matio
n
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freq
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International Journal of Exploring Emerging Trends in Engineering (IJEETE)
Vol. 01, Issue 01, Sept, 2014 WWW.IJEETE.COM
All Rights Reserved 2014 IJEETE Page 19
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International Journal of Exploring Emerging Trends in Engineering (IJEETE)
Vol. 01, Issue 01, Sept, 2014 WWW.IJEETE.COM
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AUTHORS BIBLOGRAPHY
Wahengbam Kanan Kumar
was born in Manipur, India in
1991. Presently he is pursuing
M.Tech in VLSI Design at
Maharishi Markandeshwar
University. After completing
B.E. in 2012 he was a guest lecturer at NERIST
(Deemed University). His research interests
include SAW & BAW physics, MEMS based
design, Digital circuit design, Memory design,
Fuzzy logic, Neural network, Image processing.
Anuj Goel was born in
Haryana, India in 1983. He is
presently working as Assistant
Professor in ECE Department,
MMEC, M.M.University,
India. His research interests
include MEMS Modelling, VLSI Design etc.