Microsystems CAD Tools

Function Comments Free / Low Cost Commercial

Mask Layout
general purpose VLSI and
IC design
MAGIC / IRSIM
XCircuit
Microwind / Dsch
Tanner Tools
CADENCE
quick mask design Photoshop
Process Simulation
everything
SUPREM-III,
SUPREM-IV
TSUPREM4
SSUPREM4
everything FLOODS, FLOOPS
anisotropic etching ACES
lithography PROLITH
processing and device
simulator
MICROTEC
Device Simulation
2D
PISCES2 MEDICI
MINIMOS
1D SimWindows
MEMS
SUGAR
NODAS
MEMSCAP
Coventorware
(MEMCAD)
High Level
Simulation
Verilog, VHDL as well
VHDL-AMS
SMASH SMASH
VHDL ModelSim XE II ModelSim
High Level
Synthesis
Xilinx ISE WebPACK
Synopsys
LeonardoSpectrum
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Circuit Simulation
CaZM licensed to Tanner CaZM Tanner TSPICE
some of the programs
include the
macromodeling and
analog behavioral
extensions
SPICE from Berkeley
B2-Spice
WinSpice
SMASH
PSPICE
LTSpice
TopSPICE
SPECTRE
HSPICE
SMASH
PSPICE
ICAP
Graphics
Postprocessor
POSTMINI
Mathematical
Modeling
Matrix analysis and
computation
MATLAB
General purpose
multiphysics and nite
element analysis
ANSYS
FEMLAB
Mask Design:
MAGIC a program that was developed at Berkeley is available for physical layout and mask
design and is free. XCircuit, a circuit drawing and schematic capture program by Tim Edwards is
a local favorite! The Tanner LEDIT is another low cost integrated circuits design program.
CADENCE is a more expensive and sophisticated design system that includes physical layout and
mask design. All the above programs will produce CIF or GDS-II les that are necessary if you
like to get chrome masks. Worth noting is a recent release of VLSI tools for physical layout
(Microwind) and schematic capture/simulation (Dsch) by Etienne Sicard and Chen Xi from INSA
in France. The Microwind website also includes a nice set of tutorials and an e-book on VLSI
design. Steve Rubin's Electric VLSI Design System is a complete set of VLSI design tools for
Unix, Windows and Macintosh OS . The source for compiling the tools can be obtained freely or
you can download the binaries for a small fee from here.
For simple mask design printed on transparencies we use Adobe Photoshop. Instructions for how
we design masks using Photoshop are given here.
Process and Device Simulation:
SUPREM a process simulation tool and PISCES a device simulation tool were developed in
Professor Dutton's TCAD group at Stanford in the 80s and have evolved into commercial products
now sold by Silvaco - SSUPREM4 - and Synopsys - TSUPREM4 and MEDICI -. MINIMOS is
another comprehensive device simulation tool developed in Professor Selberherr's group in the
Institute for Microelectronics at Technical University of Vienna (TUV). FLOOPS and FLOODS are
also industrial strength TCAD tools from Professor Law's group at the University of Florida. All
the above programs were developed for dierent avors of UNIX and the source is available for
academic use from the corresponding groups at Stanford, TUV and University of Florida.
John Faricelli has compiled PISCES and MINIMOS for the Windows operating system and made
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them available through his website. They run from the command line (DOS environment) under
Windows 2000 or XP and thus have no graphics capabilities. POSTMINI is a very nice graphics
postprocessor also maintained by John that runs under many operating systems including Linux
and Windows and is capable of interfacing with the output le formats from a number of CAD
tools including SUPREM, PISCES, MINIMOS, SPICE e.t.c. A Windows version for SUPREM-IV
(A-9130) was compiled at the University of Swansea and it is available from Professor Allen's
web site at Georgia Tech.
MICROTEC is an easy to use process/device simulator from Siborg that runs under windows.
ACES is an anisotropic etch simulator from Professor Liu's group at the University of Illinois that
is now archived here. It accepts a mask input in a variety of formats and generates a 3D etch
prole. Unfortunately this program runs only under win95 or win98. The simulation algorithms
are discussed in a worthwhile reading journal paper.
PROLITH is a photolithography simulator originally developed by Chris Mack and is now a
commercial product available from KLA TenCor.
SimWindows is an easy to use, 1D device simulator written by David Winston at the
Optoelectronics Computer Systems Center of the University of Colorado. You can download some
information from here. The program is no more available on the U. Colorado site. Here is a local
copy (zip).
The website www.atomicscaledesign.net has links to a number of tools and resources for
atomistic level materials, process and function design.
Chemistry, Biochemistry and Chemical Engineering
2D and 3D molecular visualization software can be obtained from the chemistry software web
site.
MEMS Design and Simulation:
MEMSPro is a physical layout, extraction, visualization and simulation tool set from MEMSCAP.
MEMS Architect is a complementary set of tools for higher level MEMS synthesis. Conentorware
(MEMCAD) from Coventor is an industrial strength set of tools for MEMS synthesis and
simulation.
SUGAR from Prof. Pister's group at Berkeley is a simulation environment for Windows and Linux
that represents complex MEMS structures using simple coupled elements it can plot 3D MEMS
structures for visualization. It requires MATLAB version 6.x for the numerics; download latest
version from SourceForge. NODAS from Prof. Fedder's group at Carnegie Mellon is a library of
parameterized cells for the electrical and electromechanical analysis of MEMS devices. It
requires Analogy's (now Synopsys) simulator SABER.
Circuit Simulation and Models:
SPICE and its various commercial incarnations has its origins in Nagel's work in Prof. Pederson's
group at Berkeley. HSPICE from Avant! (now Synopsys) is an industrial strength version of
SPICE but pricey as well. B2 Spice and TopSPICE are low cost programs from Beige Bag
Software and Penzar respectively that have a nice schematic capture interface and behavioral
extensions. WinSpice has a simple windows command line interface and is port of Berkeley
SPICE 3f4 program by Mike Smith available from his website. If you are running Linux the article
here is helpful in getting Berkeley SPICE 3f4 up and running. A windows compilation of
Berkeley SPICE 3f5 that includes some of the latest MOS models from Berkeley (BSIM3v3.2.4,
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BSIM4.4.0, BSIMSOIv3.2 for SOI devices) and a minimalist but functional windows interface is available from the
website of Prof. Vogt at the University of Duisburg. A local copy can be found here. LTSpice/SwitcherCAD III
available as a free download from Linear Technology's website is a SPICE simulator for windows
that has a nice schematic capture interface, behavioral extensions and it is very fast (AGA
favorite!). Finally there is a version of SPICE3f5 compiled by by Charles Williams for the
Macintosh from University of Exeter (MacSpice3f5).
ICAP from Intusoft, and PSPICE from OrCAD are commercial enhanced Windows versions of
SPICE. Dolphin SMASH is another industrial strength SPICE simulator with many powerful
functional extensions. A limited version of the program (good for most class related work) is
available free from the Dolphin website. TSPICE from Tanner uses dierent numerics but has
compatible input format and it has its origins in the CaZM simulator from the Microelectronics
Center of the University of North Carolina (MCNC).
MOS models: The more recent versions of the BSIM model including a BSIMSOI model can be
obtained from Berkeley. The EKV model from EPFL is an excellent model now available in many
versions of SPICE including LTSpice from Linear Technology and SMASH.
The netlists and device parameters for SPICE decks in dierent commercial and academic
version of SPICE are slightly dierent. This document (long!) from Agilent lists compatibilities
between SPICE , HSPICE and SPECTRE (pdf).
eCIRCUIT CENTER is a very nice web site that includes tutorials and a wealth of hands on
information on circuit design and simulation with SPICE, including a brief history, and some down
to earth discussion of the numerical algorithms.
Behavioral Simulation:
ModelSim is an industrial strength high level VHDL/Verilog simulator from Mentor Graphics. A
light version of it (ModelSim XE II) is included with Xilinx's ISE WebPACK and a free license can
be obtained from Xilinx.
Dolphin SMASH: Multi-domain simulator, a version of SPICE with support for VHDL, VHDL-AMS
and other simulation extensions - free download with limited abilities-. HAMSTER site:
VHDL-AMS simulation environment -free download-. The Hamburg site for VHDL provides a
wealth of information on high level behavioral modeling and synthesis tools. Here is another
comprehensive site for analog and mixed signal extensions to VHDL (VHDL-AMS).
Behavioral Synthesis:
FPGA vendors such as Xilinx and Altera have their own tools for synthesis from VHDL. For ASIC
design, Synopsys and LeonardoSpectrum from Mentor Graphics can be used with the Tanner
libraries to synthesize custom layout from VHDL.
Mathematical Modeling
MATLAB scientic and technical computing. Download Kermit Signon's Matlab primer (somewhat
dated by still useful) here. There is a student version of Matlab at a very reasonable price! It
includes a handful of toolboxes and I encourage you to buy it for personal use. For what you get it
is a pretty good deal! For other tutorial introduction to MATLAB and "how to" follow the links
from this UMCP site. The industry standard tool for nite element analysis is ANSYS. FEMLAB
from COMSOL is another nite element analysis and multiphysics simulation tool that is easy to
learn. FEMLAB used to require MATLAB for the numerics but version 3.x comes with its own
solver.
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A more extensive list of freeware, shareware or academic tools can be found at the University of
Illinois Urbana Champaign MASS web site.
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