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Drag_Force Mico_flow
sensor
MEMS Project
Prof.Mohammad Killany
Mohhammad Alahdab 2121354 Laith Al-Ramahi 0116385
Table of contents :
Abstract --------------------------------------2
Introduction---------------------------------2
Principle and design ----------------------3
Fabrication of Sensor---------------------6
Detecting the direction of the wind--8
Dealing with temperature variaition-8
Conclusion----------------------------------8
Refrences-----------------------------------9
1-Abstract :
A drag force wind sensor using the torque of cantilever to measure the
velocity of wind is presented in this
paper. The sensor consists of a thin silicon plate and two short
cantilevers which connect with the plate
and silicon substrate and will bend when wind blow to the plate. The
drag force sensor was , analyzed with fluid mechanics principle and
fabricated using MEMS-based technology.
When setting the input 0.5 V we obtain a sensor capable of high
sensitivity 60 V/(m/s) at the
high wind velocity about 18 m/s. The results of experiments suggest that
the designed sensor can be used
to detect wind velocity and determine wind directions.
2-Introduction :
Wind velocity measurement is a very important factor in various
fields such as aeronautics, meteorology, sealing and farming.
The conventional wind sensor comprises small mechanical apparatus
such as propeller and cup anemometers, or consists of thermal
element such as hot wire anemometers, or has acoustic part such
acoustic radar as
In this paper a kind wind sensor based on drag
force fabricated with simply MEMS process is developed.
The drag force sensor has quadratic wind velocity dependence
2
like the lift force sensor.When the wind blows to the sensor it will
transform the energy of wind into the mechanical energy. So the
information of the wind is obtained by measuring the mechanical
energy. The sensor is designed as a structure with one plate
and two short cantilevers in which the mechanical energy mainly
concentrate in cantilevers and is measured by the strain change
of cantilevers. The sensor has shown good symmetry when wind
blows to it in the positive and negative direction. When the wind
blows to the sensor in positive direction the strain of resistance on
the two cantilevers will be tensile strain and in negative direction
the strain will be compression strain.
In this paper a method for wind velocity sensors structure
design, strain calculation and simulation is introduced. A formula
about the strain of cantilevers and the wind velocity is deduced
using the mechanical principles and material characteristics on
which the strain changes of the two cantilevers are based. The sensor
is also simulated in ANSYS CFD (Computational Fluid Dynamics)
software using the model solid92. The results of the strain of simulation
and calculation are almost similarity. A detailed developing
processes based on MEMS technology are given. The sensor was
tested in small wind tunnel in positive and negative direction,
analyzed the curve of experiments and drawn a conclusion that
designed sensor can be used to detect wind velocity and determine
wind directions.
2.2 Principle :
The strain of the cantilever can be get by :
where
is the local drag coefficient calculated by empirical formulae
and depends on the structure of materials, A is the area of
the plate and cantilever in the direction facing the wind flow, is
5
where Es, En and Eo are the Youngs modulus of silicon, SI3N4 and
,SiO2 respectively, Hs, Hn and Ho are the thickness of silicon layer
silicon nitride layer and silicon dioxide layer respectively and H is
the sum of Hs, Hn and Ho. Thus from Eqs. (1) and (5)(7) we can
obtain the strain of one cantilever :
3. Fabrication of sensor
The fabrication process starts with a thermal oxidation process
forming a silicon dioxide layer that the thickness is about 7000
from a cleaned, double-side polished, n-type and single-crystal
with the output voltage caused by the second direction of the air flow.
we can sense the other perpendicular directions by using another
perpendicular sensor the first one.
7. Conclusion
A drag force silicon plate wind velocity sensor has been designed
and fabricated. The principle for measuring wind velocity was
illustrated.
The figures shown in earlier section suggested that
the sensor can be used to measure the wind velocity and positive
and negative directions when the sensor is perpendicular to the
airflow.
The directions, besides positive and negative directions, can
be measured by perpendicular encapsulating two designed sensors.
It has a challenge to the portable or handhold anemometer
for its MEMS based advantages of small size, solid sensing
mechanism
and real-timemeasurement. Further researches are necessary
to improve the sensitivity in low wind velocity and enhance the
precision of wind velocity and direction.
8. References :
-Lidong Dua,b, Zhan Zhaoa,, Cheng Panga,b, Zhen Fanga, Drag force micro solid
state silicon plate wind velocity sensor, Sensors and Actuators A: Physical.
-Ulrich Buder, Ralf Petz, Moritz Kittel, Wolfgang Nitsche, Ernst Obermeier,
AeroMEMS polyimide based wall double hot-wire sensors for flow separation
detection, Sensors and Actuators A 142 (2008) 130137.
10