Sunteți pe pagina 1din 66

Semiconductor lasers

J. Faist

J. Faist Quantum Electronics

Bibliography
Optoelectronics:
E. Rosencher, B. Vinter Optolectronique, Masson
Jasprit Singh Semiconductor Optoelectronics Mc Graw Hill
A. Yariv Quantum electronics Wiley

Semiconductor lasers (multi-authors):


P. Zory Quantum Well lasers Academic Press
E. Kapon Semiconductor lasers (I, II), Academic Press

Semiconductor lasers (monographs, out of print):


G. P. Agrawal, N. K. Dutta Semiconductor lasers, Kluwer

J. Faist Quantum Electronics

Outline
Semiconductor materials: Bands and Gaps
direct/indirect, gap size

Waveguides
Heterojunctions
Semiconductor lasers

J. Faist Quantum Electronics

Materials

J. Faist Quantum Electronics

J. Faist Quantum Electronics

J. Faist Quantum Electronics

Essential feature: bands and gaps

J. Faist Quantum Electronics

Why gaps? Bragg reflection


Electron

transmission

The modulus of the


wavefunction is proportional
to (1-R)n

Energy (meV)

A periodic modulation of the potential opens gaps in the energy spectrum


J. Faist Quantum Electronics

Why bands?: coupling isolated states

m-1

(r)

A periodic array of coupled isolated states forms bands


J. Faist Quantum Electronics

Direct semiconductors

J. Faist Quantum Electronics

IV: indirect semiconductors

J. Faist Quantum Electronics

Semiconductor elements
Characteristics:
- Crystalline structure and lattice
- Nature and size of the gap
- Doping

J. Faist Quantum Electronics

Absorption edge semiconductors

J. Faist Quantum Electronics

III-V family
- Nitrides
lacking
- Availability of
substrates

J. Faist Quantum Electronics

Blue lasers: III-V vs II-VI

- very hard material


- GaN substrates rares and expensive

- Can be grown on GaAs


- Defects not solved
J. Faist Quantum Electronics

Injection of minority carriers

Key number:
Diffusion length of electron
and holes

J. Faist Quantum Electronics

A key element: the heterojunction

J. Faist Quantum Electronics

Heterojunctions

The junction between two semiconductors with different


bandgaps may align differently:
J. Faist Quantum Electronics

Even stranger heterojunctions


In this case, the energy
of the GaSb hole is
larger than the one of
the InAs electron!
One may use this for
tunneling from
valence to conduction
band

J. Faist Quantum Electronics

Waveguiding

J. Faist Quantum Electronics

Waveguiding

Simplest, total internal reflection


Helmholz equation

J. Faist Quantum Electronics

Two set of modes: TE and TM

J. Faist Quantum Electronics

Solution of the transandental equation

J. Faist Quantum Electronics

TE vs TM modes
The TE mode has
a better confinement,
so will lase before

= 1.55m

J. Faist Quantum Electronics

Gain in bulk semiconductor

J. Faist Quantum Electronics

Fermi-Dirac distribution

J. Faist Quantum Electronics

Adding doping

J. Faist Quantum Electronics

Quasi-Fermi levels

J. Faist Quantum Electronics

Gain condition

J. Faist Quantum Electronics

Gain computation

J. Faist Quantum Electronics

Gain versus injection

J. Faist Quantum Electronics

Density of states

J. Faist Quantum Electronics

Quantum well

J. Faist Quantum Electronics

Threshold condition

J. Faist Quantum Electronics

Threshold condition

J. Faist Quantum Electronics

1962

First GaAs laser diode


(pulsed operation, cryogenic temperature)
(General Electric Research Labs)

1970

AlGaAs / GaAs DH laser diode


(CW, 300K)
(Ioffe Institute, Bell Labs)

1974

AlGaAs / GaAs DFB laser diode

1976

GaInAsP / InP DH laser diode at 1.2m


(CW, 300K)
(Lincoln Labs)

1977

InGaAsP / InP QW laser


(Urbana University)

1978

AlGaAs / GaAs QW laser


(Urbana University)

1979

InGaAsP / InP VCSEL


(pulsed operation, 77K)
(Tokyo Institute of Technology)

Laser diodes:
milestones

1984

InGaAs / AlGaAs strained QW laser

1988

AlGaAs / GaAs VCSEL


(CW, 300K)
(Tokyo Institute of Technology)

1994

InGaAs / AlInAs / InP Quantum Cascade Laser


(pulsed operation, cryogenic temperatures)
(Bell Labs)

1995

InGaN/AlGaN/GaN blue laser diode


(pulsed operation, cryogenic temperatures)
(Nichia Chemicals)

1996

InGaN/AlGaN/GaN blue laser diode


(CW, 300K)
(Nichia Chemicals)

1998

AlGaAs / GaAs Quantum Cascade Laser


(pulsed operation, cryogenic temperatures)
(Thomson-CSF)

2002

InGaAs / AlInAs / InP Quantum Cascade Laser


(CW, 300K)
(University of Neuchtel)

J. Faist Quantum Electronics

1962: GaAs homojunction laser

GaAs p-n-junction
doped with Te (n-type)
and Zn (p-type)
Polished facets
Pulsed operation @ 77
K
Jth = 20000 A/cm2
Quist, APL, 1, 91, 1962
J. Faist Quantum Electronics

1970: single-/double-heterostructure laser

SH-structure provides econfinement only


Holes are less mobile
Reduce Ith to 11000 A/cm2
DH-structure provides eand hole confinement
Ith gets reduced to 2300 A/
cm2
Smaller active region area

Panish, APL, 16, 326, 1970


J. Faist Quantum Electronics

1979: SQW laser

QW structure thanks to
MOCVD growth
20 nm thickness
Ith = 2600 A/cm2 (today
10 x better !)
No waveguide layers
(QW guides optically)
Quantization in QW
Dupuis, APL, 34, 265, 1979
J. Faist Quantum Electronics

1986: Strained QWs

Strained InGaAs/GaAs
QW
Optical waveguide
(GRINSCH-structure)
Ith now at 200 A/cm2
>30 mW output power
Low loss optical WG
Fekete, APL, 49, 1659, 1986
J. Faist Quantum Electronics

Development of semiconductor lasers

Development triggered
by growth techniques
1962: Bulk crystals
1970: LPE thin layers
1979: MOCVD/MBE
QWs
1985: strained layers by
MOCVD

J. Faist Quantum Electronics

Separate confinement
- More or less
Gaussian mode
- Strongly confined
= 0.2m

= 1.7%

J. Faist Quantum Electronics

Materials and processing

Material choice: wavelength


Growth technology
Processing steps
Cavity geometries: DFB, DBR, VCELS,

J. Faist Quantum Electronics

Molecular Beam Epitaxy

J. Faist Quantum Electronics

MBE growth reactor

J. Faist Quantum Electronics

FABRICATION STEPS FOR A SEMICONDUCTOR LASER

1- SUBSTRATE

4- FACETS CLEAVING

2- EPITAXIE

5- SINGLE CHIP
PREPARATION

3- LASER PROCESSING

6- MOUNTING, BONDING

J. Faist Quantum Electronics

Semiconductor ridge laser


CrAu
AuGeNiAu
Ridge laser
Polymer BCB
or different type
of insulator

Active region

n-doped
Substrat
e

AuGeNiAu

J. Faist Quantum Electronics

RIDGE LASER WITH POLYMER

10 m

J. Faist Quantum Electronics

Laser characteristics
Power
Threshold current
Slope efficiency

Beam properties
Far-field/near field
Linewidth (Henry)

Modulation, noise

J. Faist Quantum Electronics

Applications
Telecommunications
modulation, tunability

Sensing
wavelength, tunability

Pumping of Solid-state lasers


Power, efficiency

Processing
Power, wavelength, efficiency
J. Faist Quantum Electronics

Semiconductor lasers features

J. Faist Quantum Electronics

Optical Power

J. Faist Quantum Electronics

J. Faist Quantum Electronics

Light vs current

J. Faist Quantum Electronics

Beam Profile
Semiconductor lasers
have wide divergence
because of narrow emitter

120 deg for the example!

J. Faist Quantum Electronics

Quantum Cascade Lasers

J. Faist Quantum Electronics

Material coverage

J. Faist Quantum Electronics

Interband vs intersubband
intersubband:

Interband:
E

k||
k||

Photon energy limited by gap


2D joint density of state
long lifetime (~1ns)

flexibility in tailoring wavefunctions


and energies
atomic-like joint density of state
short lifetime (~1ps)
J. Faist Quantum Electronics

Are these semiconductors transparent?

J. Faist Quantum Electronics

Intersubband absorption
Terahertz

Mid-Infrared
1.5

Absorbance

10K

1.0
= 5meV

0.5

0
120

130

140

150

160

Photon energy (meV)

Atomic - like transition


= 3-300m

J. Faist Quantum Electronics

Needed for a laser:

An optical transition
Population inversion:
need to engineer lifetimes
up > dn

long lifetime

short lifetime

Low loss optical resonator


J. Faist Quantum Electronics

Milestones: proposals
1971: R. Kazarinov and R.
Suris propose using
intersubband transitions in a
biased superlattice for light
amplification
R. F. Kazarinov, R.A. Suris, Sov. Phys. Semicond. 5, 707 (1971)

1986-93: Proposals for QCs using


resonant tunneling in superlattices:
F. Capasso et al, JQE (1986)
H. C. Liu et al, JAP (1988)

J. Faist Quantum Electronics

Quantum cascade laser


1994: First intersubband laser (quantum cascade laser) is
demonstrated in Bell Labs
Tmax = 125K (pulsed), Pmax = 10mW, = 4.26m

J. Faist, F. Capasso, D. L. Sivco, C. Sirtori, A.L. Hutchinson, A. Y. Cho, Science 264, 553 (1994)

J. Faist Quantum Electronics

Cascade

Cascade:
-1 electron may generate many photons
J. Faist Quantum Electronics

High temperature DFB-CW QC source

Narrow gain 2Ph design


Low active region doping
Standard mounting
Uncoated device

Jth=1.29 kA/cm2
Tmax cw of 400 K !!!
A. Wittmann et al., unpublished
J. Faist Quantum Electronics

QCL Performances

J. Faist Quantum Electronics

S-ar putea să vă placă și