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AbstractThis paper describes a 32-site 4-channel high-density intracochlear electrode array. Combining MEMS-based
processing technology with active circuitry, the thin-film device
realizes a stimulating site density three times that of commercial
systems, delivering 500 A biphasic current levels with 8-bit
resolution and less than 1% charge mismatch. The minimum
pulsewidth is 4 s, and the per-channel power dissipation is
2.5 mW from 2.5 V. The active circuit chip has a footprint of
2.4 mm 2.9 mm. Serving as the end-effector of a cochlear prosthesis, the active array also provides site-impedance measurement
and position-sensing functions.
Index TermsBioMEMS, cochlear implant, current stimulator,
electrode impedance, neural prostheses.
I. INTRODUCTION
INCE their introduction in the 1980s, cochlear implants
have been the most successful neural prostheses, with
nearly 100 000 profoundly deaf and severely hearing impaired
users worldwide [1]. By directing current through 1622 intracochlear wire electrodes, a cochlear implant exploits the
frequency-to-place mapping in the cochlea of the inner ear
to directly stimulate the auditory nerve electrically, thereby
replacing defective hair cells that in a normal individual would
transduce sound energy into nerve impulses (Fig. 1). Although
such implants have been remarkably effective, there remain
significant variations in speech perception among patients
exhibiting similar pre-implant etiologies, as well as difficulties
in understanding tonal languages and appreciating music [2]. A
potential solution to these problems is to develop electrode arrays having significantly increased numbers of stimulating sites
so that the arrays can more easily adapt to differing patterns
of neural survival and make use of multi-polar current shaping
to activate distinct nerve populations and enhance pitch perception [3]. However, merely scaling todays hand-assembled,
wire-bundle-based electrode arrays is precluded by the size of
the cochlea, which tapers from a diameter of about 1 mm to
about 200 m over its length. This paper presents a promising
alternativea MEMS-based microfabricated thin-film array
capable of supporting an electrode density three times that
of commercial systems while remaining consistent with the
cochlear space. The technology enables the integration of position sensors on the array to help optimize in vivo placement,
minimize insertion damage, and therefore preserve a patients
Manuscript received June 23, 2006; revised August 24, 2006. This work was
supported in part by the NSF-WIMS ERC under cooperative agreement EEC9986866 and by a gift from the late Ms. Polly V. Anderson of Cupertino, CA.
The authors are with the Engineering Research Center for Wireless Integrated
MicroSystems, The University of Michigan, Ann Arbor, MI 48109-2122 USA
(e-mail: pamelat@umich.edu; wise@umich.edu).
Digital Object Identifier 10.1109/JSSC.2006.884862
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Fig. 2. A cochlear prosthesis microsystem, composed of a speech processor worn behind the ear, an external coil for power/data transfer, implanted
electronics, and an electrode array placed in the cochlea. (Drawing courtesy of Cochlear Ltd.)
[6], but this is the first known effort to develop a fully integrated
wireless microsystem that includes the electrode array.
The integrated DSP core implements the Continuous
Interleaved Sampling (CIS) speech-processing algorithm
using the lowest active power consumption reported to date
(1.79 mW) [7]. Designed for biomedical and environmental
monitoring applications, the 16-bit MCU contains a 32 kB
on-chip memory and two peripheral interfaces, while providing
significant programmability and flexibility for optimizing a
patients speech processing parameters. Additionally, stimulation commands for other speech-processing algorithms
may be configured, as well as current steering and high-stimulus-rate research profiles. Controlling the wireless interface
is a bidirectional telemetry module [8]. Based on an FSK
transmission scheme, data and clock are recovered from 8-bit
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Fig. 7. Hybrid interconnects between the microcontroller, the cochlear ASIC, and the electrode array. The left inset is a scanning electron microscope view of a
gold rivet bond.
Fig. 8. Designations for the eight cable leads and the input data word structure
for the cochlear array.
Fig. 9. Error detection block output on the Data Valid line (DAV).
one of the eight sites for stimulation for the addressed channel.
In the second mode, extended-mode, bits 07 define the command while bits 1014 control operations within the command.
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main regions. The first step-like change is regarded as the access voltage, , in the system from the sourcing electrode to the
sinking or return electrode. Losses such as the lead resistance,
contact resistance, and tissue spreading resistance are lumped
into an access resistance, . The second (more slowly moving)
response, the polarization voltage , is the loss due to charging
of the site interface capacitor and charge transfer via Faradic reactions at the electrode-electrolyte interface. This is modeled as
, in parallel with
. At present, clinical
a leaky capacitor,
software simply assesses the impedance by measuring the maximum response at the end of a 75- A 25- s pulse, and divides by
. By resolving the voltage response into
the current,
its essential components,
, , and
(Fig. 14), and monitoring their respective changes over time, the tissue response
at the electrode-tissue interface and endocochlear environment
can be inferred [16]. During the initial phase of tissue response,
it is believed that the surface quality of the electrode is altered by
a layer of protein on the surface, increasing . It is readily dispersed once stimulation commences. A more long-term tissue
response, exemplified by changes in the , is the formation of
a fibrous tissue sheath encapsulating the array as the foreign object is walled-off from the body. Such changes can reshape
the applied field and may even account for some variations in
speech perception [17], as well as increasing the power consumption of the system.
Our implementation allows the measurement of at least three
,
, and
time points of the voltage response for estimating
. A buffer on the cochlear ASIC provides the signal drive
to allow a commercial A/D converter located in the electronics
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TABLE I
COCHLEAR ASIC PERFORMANCE SUMMARY
The hybrid approach implemented here combines industry-standard circuit features with electrode fabrication and flexible cabling technologies.
The present array has been sized for the guinea pig animal model and serves as a template for a potential 128-site
16-channel human system. The cochlear ASIC presented is
directly portable to the human. The 16-bit command word
could readily specify site and channel addresses for site multiplexing on 128-sites and stimulation on 16 channels. Scaling
the cochlear ASIC to accommodate a human system would
result in an estimated chip footprint of 5 mm 5 mm, well
within the space available outside the human cochlea. The digital circuitry could also be compressed further using a smaller
feature-size technology, further reducing circuit area; however,
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of out-of-plane flexibility2 [20], [21]. The 2.5- m-thick substrate of the cochlear array may be coiled around a 500- m
cylinder; more than sufficient to follow the radius of curvature
exhibited by commercial devices in the basal and second turn,
1.8 mm and 0.75 mm, respectively [22]. However, although
silicon arrays can sustain some rotation and bending3 [23], the
anatomical requirements for an intracochlear electrode array are
challenging. The array must bend to match the scala tympanis
intra-cochlear tilt [24], [25]. In our in vivo insertion trials,
we found this in-plane bending to be especially pronounced
in small animals. In other applications requiring flexible substrates, polymers such as parylene-C or polyimide (Pyralin) are
attractive thin-film alternatives, exhibiting a Youngs Modulus
of 24 GPa and 7 GPa, respectively, compared with 200 GPa
for boron-doped silicon [26]. Polyimide-based electrode arrays have been explored for cortical and visual applications
[27], [28], and a parylene-silicon substrate cochlear array
for position-sensing has been developed [29]. An additional
benefit of these mixed-material approaches is the ability to integrate flexible cables with the process. Trade-offs in long-term
stability and electrical isolation compared with silicon-only
substrates must be investigated. Additionally, the development
of a stress-compensated multilevel metal process coupled
with high-quality inter-level dielectrics is essential to provide
interconnects for 128 sites.
Contemporary arrays are flexible and self-curling, thereby encouraging the sites to closely approach the modiolus. A patient
study comparing a straight banded array (Fig. 1) with a perimodiolar array reports significantly lowered threshold and comfort levels with the contoured device [30]. Such a perimodiolar
resting state requires a backing to the array and an insertion
tool coupled with the thin-film. We are collaborating with the
Epstein Laboratory at the University of California, San Francisco (UCSF) to develop a molded silicone carrier for the 32-site
silicon array. A full assembly has been demonstrated in vivo.
We are also working with Michigan Technological University
to develop a pneumatically actuated insertion tool as part of
an overall closed-loop feedback system [31]. A human implant
based on thin-film arrays coupled to a suitable backing structure
and introduced using an actuated tool should achieve deep insertion and therefore span a wider perceived frequency range;
at the same time it can closely couple the sites to the cochleas
central core (modiolus), achieving the highly focused stimulation that is capable only with high-density sites.
The work presented here is part of an on-going effort to
improve the electrical-neural interface to further enhance the
sound perception possible with a cochlear implant. Paralleling
the development of other neural prosthetic systems (visual and
cortical), we have taken a hybrid approach here. It is through
the sustained effort and collaboration among many individuals
in the neural prostheses community that we will ultimately be
2In-plane refers to the x-y plane, i.e., the plane of a wafer. Analogous to the
roll, pitch, and yaw angles of navigation dynamics; the out-of-plane bending
angle can be considered the pitch angle.
3Rotation describes when one end of the array remains fixed and the array is
twisted about an axis in the plane of the array (roll). Bending describes when
the free-end is rotated in-plane (yaw).
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Pamela T. Bhatti (S05M06) received the B.S. degree in biomedical engineering from the University
of California, Berkeley, in 1989, and the M.S.E.E.
degree from the University of Washington, Seattle,
in 1993. She received the Ph.D. degree in electrical
engineering from the University of Michigan, Ann
Arbor, in August 2006.
In January 2007, she will join the School of Electrical and Computer Engineering at the Georgia Institute of Technology as an Assistant Professor. From
1987 to 1990, she was a Member of the Technical
Staff at Alza Corporation, where she conducted clinical and experimental processing of controlled release drug delivery systems. From 1994 to 1995, she was
with Motorolas Semiconductor Products Sector, where she developed and participated in an engineering rotation program for the MOS Digital and Analog
Integrated Circuits Division, and later as an Applications Engineer with Motorola-LONWORKS. In 1996, she joined Microware Systems Corporation as
an Embedded Systems Software Engineer where she developed device drivers
enabling infrared data transfer. From 1997 to 2000, she served as a Clinical
Trials Research Associate with the Department of Radiology at the University
of Michigan where she investigated the discrimination and characterization of
breast cancer using 3-D Doppler ultrasound imaging. Her current research interests are in the general area of biomedical sensors and subsystems, bioMEMS,
and microelectronics. Specifically, she is interested in implantable cochlear electrode arrays, vestibular prostheses, and the integration of controlled-release drug
delivery technology with flexible neural recording/stimulating arrays.
Dr. Bhatti is a member of the IEEE, Society of Women Engineers, and Engineering in Medicine and Biology Society.
Kensall D. Wise (S61M69SM83F86) received the B.S.E.E. degree with highest distinction
from Purdue University, West Lafayette, IN, in
1963, and the M.S. and Ph.D. degrees in electrical
engineering from Stanford University, Stanford, CA,
in 1964 and 1969, respectively.
From 1963 to 1965 (on leave 19651969) and from
1972 to 1974, he was a Member of Technical Staff
at Bell Telephone Laboratories, where his work was
concerned with the exploratory development of integrated electronics for use in telephone communications. From 1965 to 1972, he was a Research Assistant and then a Research
Associate and Lecturer in the Department of Electrical Engineering at Stanford, working on the development of integrated circuit technology and its application to solid-state sensors. In 1974, he joined the Department of Electrical
Engineering and Computer Science at the University of Michigan, Ann Arbor,
where he is now the J. Reid and Polly Anderson Professor of Manufacturing
Technology and Director of the NSF Engineering Research Center for Wireless
Integrated MicroSystems. His present research interests focus on the development of integrated microsystems for health care and environmental monitoring.
Dr. Wise organized and served as the first chairman of the Technical Subcommittee on Solid-State Sensors of the IEEE Electron Devices Society (EDS).
He was General Chairman of the 1984 IEEE Solid-State Sensor Conference,
Technical Program Chairman of the IEEE International Conference on SolidState Sensors and Actuators (1985), and IEEE-EDS National Lecturer (1986).
He served as General Chairman of the 1997 IEEE International Conference
on Solid-State Sensors and Actuators. Dr. Wise received the Paul Rappaport
Award from the EDS (1990), a Distinguished Faculty Achievement Award from
the University of Michigan (1995), the Columbus Prize from the Christopher
Columbus Fellowship Foundation (1996), the SRC Aristotle Award (1997), and
the 1999 IEEE Solid-State Circuits Field Award. In 2002 he was named the
William Gould Dow Distinguished University Professor at the University of
Michigan. He is a Fellow of the IEEE and a member of the United States National Academy of Engineering.