Documente Academic
Documente Profesional
Documente Cultură
a r t i c l e
i n f o
Article history:
Received 4 August 2009
Received in revised form
25 September 2009
Accepted 10 October 2009
Available online 20 October 2009
Keywords:
Gas sensor
ZnO
Sensor response formula
Nanostructure
a b s t r a c t
In this paper, we propose a new and general formula to describe ethanol adsorption mechanism underlying the response enhancement of ZnO nanostructure sensors. The derivation of sensor response formula
based on basic chemical reaction at the sensor surface is presented. The formula can be used to explain
response enhancement due to effect of metal doping, surface-to-volume ratio, and surface depletion
layer. Thus, it can be regarded as a general formula to describe the sensor response characteristics of ZnO
sensors. This general formula is a powerful tool for designing ZnO sensor at any desired sensor response.
Furthermore, it is reasonable to expand this formula to explain other sensing materials and also to explain
for different active gases.
2009 Elsevier B.V. All rights reserved.
1. Introduction
Metal-oxide semiconductor sensors based on materials such
as SnO2 , TiO2 , WO3 or ZnO are widely used for ethanol sensors
[114]. Especially, ZnO is a promising material for gas sensor applications due to feasibility for ultrahigh sensitive sensors or ppb-level
sensors. Recently, various morphologies of ZnO such as belt-like,
wire-like, rod-like or tetrapod for ethanol sensor applications have
been widely investigated [1522]. It was suggested that the sensor response characteristics of these sensors strongly depends on
the morphology of ZnO. Ethanol sensors based on ZnO nanostructure such as nanobelts, nanorods or nanowires usually exhibit high
sensor response and sometime up to a few hundred folds over conventional metal-oxide sensors at moderate concentration [9]. On
the other hand, a sensor based on a larger size of ZnO such as thin
lms or microtetrapods show lower sensor response [14,15]. Many
models have been proposed to explain sensor response characteristic of ZnO sensors and still be a subject of discussion.
Basically, the ZnO ethanol gas sensing was simply observed
on the resistance change under ethanol atmosphere. It can be
explained by the chemical reaction between the active gas and oxygen ion adsorption on the surface of ZnO. In air atmosphere and at
high operating temperature, oxygen molecules are adsorbed onto
the surface of the ZnO sensor to form O or O2 ions by attracting electrons from the conduction band of the ZnO. Under ethanol
atmosphere, the ethanol gas reacts with oxygen ion molecule on the
surface and gives back electrons into the conduction band, thereby
lowering the resistance of ZnO sensors. The ratio between two
resistances is then calculated as the sensor response. Typically, the
sensor response of the oxide semiconductor gas sensor can usually
be empirically represented as [1,5]: S = aCb , where C is the target gas
partial pressure, which is direct proportion to its concentration, and
the sensor response is characterized by the parameter a and exponent b. The value of b may have some rational fraction value usually
1 or 0.5 depending on the charge of the surface species [1,5].
Wang and co-workers have proposed a contact controlled model
[7] and surface-depletion controlled model [8] that can explain
the improvement of sensor response based on nanostructure. Chen
et al. [9] have used space-charge model to explain ultrahigh sensor response of ethanol sensor based on ower-like ZnO nanorods
with diameters less than 15 nm. Recently, Zhao and co-workers [10]
have used density functional theory (DFT) to reveal the gas-sensing
mechanism of ZnO and provided an exponentially formula of sensor response. However, there is still no general model or formula
to explain all circumstances of ethanol sensor based on ZnO. Thus,
it is interesting to generalize a simple model or formula in order to
describe the sensor response characteristics of ZnO sensor.
In this work, the sensor response formula based on ethanol
adsorption mechanism has been developed and obtained from
basic chemical reaction between ethanol molecule and oxygen ions
by including surface depletion layer. The sensor response formula
can be used to explain response enhancement due to effect of metal
doping, surface-to-volume ratio, and surface depletion layer. This
sensor response formula can be regarded as a general formula to
68
and air atmosphere, carrier concentration n and n0 can be considered as a constant with time. Thus, Eq. (10) can be rewritten
as
2. Theory
b
n = t kEth (T )[Oion
ads ] [CH3 CH2 OH] + n0
Normally, the ethanol vapor gas sensor based on ZnO semiconductor has an operating temperature at high temperature (about
250350 C). When the ZnO semiconductor is heated at lower temperature about 100200 C, oxygen molecules in the atmosphere
are adsorbed on the surface of ZnO and form oxygen ion molecules
as shown in Eq. (1).
O2 (gas) + e O
2 (adsorb)
(low temperature)
(1)
1
O
2 2
Oxy
+ e
Oads
1
O
2 2
Oxy 2
+ 2e
Oads
(2)
(3)
The oxygen ions on the surface of ZnO are active with the ethanol
molecule and give up the electrons from the surface back to the
conduction band of ZnO semiconductor. The chemical reaction
between ethanol molecule and oxygen ions is shown in Eqs. (4)
and (5) for O and O2 , respectively.
k
Eth
CH3 CH2 OHads + O
C2 H4 O + H2 O + 1e
ads
(4)
or
kEth
CH3 CH2 OHads + O2
C2 H4 O + H2 O + 2e
ads
These cause an increasing in the conductivity and thus the decreasing resistance of the sensor.
2.2. Sensor response of ZnO sensor
From Eqs. (4) and (5), rate equation of electron density can be
written as Eqs. (6) and (7), respectively, which can then be combined to Eq. (8).
dn
1
= kEth (T )[O
] [CH3 CH2 OH]1
ads
dt
or
(6)
1/2
dn
] [CH3 CH2 OH]1/2
= kEth (T )[O2
ads
dt
(7)
b
dn
b
= kEth (T )[Oion
ads ] [CH3 CH2 OH]
dt
(8)
kEth (T ) = A exp
Ea
kB T
(9)
b
n = kEth (T )[Oion
ads ] [CH3 CH2 OH] t + n0
(10)
(12)
Sg =
b
t kEth (T )[Oion
Ra
ads ] [CH3 CH2 OH]
=
+ 1.
Rg
n0
(13)
Usually, temperature dependence of sensor response is controlled by two parameters; reaction rate coefcient kEth (T ) between
adsorbed oxygen ions with ethanol molecules, and electron density
of the sensor n0 . The reaction rate coefcient and electron density
increases exponentially with rising temperature. However, sensor
response is proportional to reaction rate coefcient but inversely
proportional to electron density. These two parameters compete
with each other and result in maximum sensor response at optimum operating temperature. Ethanol gas sensor based on ZnO
material has optimum operating temperature around 300 C [59].
Sometimes, a compact form of the sensor response relation on
ethanol concentration (Cg ) can be rewritten as
(14)
(15)
It can be seen that log(Sg 1) has a linear relation with log Cg having
a slope of b value. Thus, b value which represents oxygen ion species
on the surface of ZnO sensors can be obtained from a slope of a plot
between log(Sg 1) and log Cg .
In the nanostructure regime, the surface-to-volume ratio is an
important parameter and should be included in the sensor response
relation. Generally, this surface-to-volume ratio can be related to
the density of adsorbed oxygen ions. Thus, we propose that the
density of adsorbed oxygen ions can be written in term of surfaceto-volume ratio as
[Oion
ads ] =
b
t kEth (T )[Oion
1
1
ads ] [CH3 CH2 OH]
=
+
Rg
Ra
Sg = aCgb + 1.
(5)
(11)
0 Vm
Vs
(16)
where 0 is a number of oxygen ion per unit area, is a ratio of surface area per volume of material (Vm ), and Vs is the system volume.
Thus, substituting Eq. (16) onto Eq. (13) give
b
S =
(17)
k T 1/2
B
q2 n
(18)
69
Fig. 1. Schematic diagram of the depletion layer on the surface of cylinder with a
thickness of Ld , under condition of D 2Ld and D 2Ld (not in scale).
(D 2Ld )2
D2
(19)
where n0 is the carrier concentration of intrinsic material, n represents carrier concentration of the Debye length, and D is diameter
of the cylinder. Thus, the depletion layer effects on sensor response
based on cylindrical ZnO nanostructure are given by inserting Eq.
(19) in Eq. (17) and obtained
SLd =
D2 Cg b
(D 2Ld )
+ 1.
(20)
Fig. 2. Plot of sensor response (Sg 1) and ethanol concentration in log scale for
ethanol sensor based on different ZnO morphologies. The linear line in the graph
has a slope of 0.5.
Table 1
Sensor response of ZnO sensor with different morphologies.
Sensor response
Morphology
D (nm)
Nanowires [5]
Nanorods [7]
Nanorods [8]
Nanorods [9]
Au-doped nanorods [23]
Nanobelts [4] a
Nanowires [11] a
25 5
150
15
<15
15 5
50150
60180
5
8
4.4
16.4
b value
10
50
100
200
300
500
1000
15
5.8
10
20.5
20.1
11.4
18
104.9
41.8
7.3
32.5
14.6
30
176.8
89.5
11.8
5.07
47
224.2
55
258
193.6
25.2
72
267.7
250
21.1
9.79
30.1
100
23.2
14.14
2000
46.5
14.19
0.504
0.496
0.512
0.677
0.630
0.500
0.504
70
It was found that the value b of all sensors is close to 0.5 suggesting that the adsorbed surface oxygen species on ZnO sensor is O2
[3]. In addition, this suggests that the oxygen adsorption species
on the surface is independent on the grain size of ZnO regardless of
bulk, microstructure or nanostructure.
However, the value b of ZnO sensor which has diameter close to
Debye length (2Ld ) was not that close to 0.5, for example, the value
b of nanorods [9,24] with diameter size <15 nm is equal 0.677 and
0.630. Such deviation arises because the surface depletion layer
has some small effect on the oxygen adsorption species at ZnO
surface.
3.2. The effect of metal doping
From previous report, doping on semiconductor can modify
resistance [20] that also affect the sensor response. There have
been several reports on sensor response enhancement due to metal
doping effect such as Au-doped [11,23,24], Pd-doped [13,25] and
Pt-doped [26,27] sensors. However, the reason for sensor response
enhancement is still not clear. The metal doping effect can be simply
explained in our model by using Eq. (13).
From Eq. (13), it can be seen that the sensor response is proportional to the reaction rate constant, kEth (T) and kOxy (T), through
oxygen density. Basically, the reaction rate constant can be affected
by noble metals (such as Au, Pd, and Pt) in oxide semiconductor
sensor due to the catalytic effect. Thus, metal doping causes an
increasing of reaction rate constant and resulting in enhancement
of sensor response. The increase of reaction rate constant (or oxygen density) can be conrmed by observation of an increasing of
resistance in air due to metal doping [24]. The increasing resistance
in air suggests that the gold metal catalytically activates the dissociation of molecular oxygen due to higher reaction rate that results
in increasing quantity of oxygen adsorption. Therefore, an electron
in ZnO nanostructure was captured by oxygen adsorption to form
oxygen ion and hence ZnO nanostructure loses more electrons and
caused the larger depletion layer at ZnO surface resulting in higher
resistance.
Fig. 3. (a) Ethanol sensor based on ZnO thin lms with an area of 1 cm2 , (b) ethanol
sensor based on vertical alignment ZnO nanorods with diameter D and length L and
(c) sensor response ratio as a function of diameter where L = 10 m.
b
B
(21)
SLd 1
Sg 1
D2
(D 2Ld )2
(22)
The value of Ld can be obtained in Eq. (18) by using the electron density of about 1017 1018 cm3 [21,22] T = 573 K (optimum
temperature), = 7.9 8.85 1012 F m1 and then, give Ld of about
5 nm (for n = 8 1017 cm3 ).
Eq. (22) is plotted as shown in Fig. 4 by varying the rods diameter. It can be seen that the sensor response of nano-sensor is
increasing when the diameter steps down below 50 nm, wherein
the sensor response dramatically surging when the diameter is
Table 2
List of sensor response formula for ethanol sensor based on ZnO.
Sensor response formula
Sg = aCgb + 1
b
Sg =
S =
SLd =
t kEth (T )[Oion ]
ads
Cgb + 1
n0
t kEth (T )(0 (Vm /Vs ))b b
Cg
n0
+ 1 2
D Cg b
(D2Ld )2
+1
Metal doping
Nanostructure (D 2Ld )
Fig. 4. Sensor response ratio (SLd 1/Sg 1) as a function of rod diameter. The
marked points on the graph are the sensor response of ZnO sensors in Table 1.
close to 15 nm. The experimental results (SLd ) from Table 1 are also
plotted in Fig. 4 by taking diameter of 150 nm as a microstructure
(Sg ) in order to neglect the surface-to-volume ratio effect. Surprisingly, the experimental results are in good agreement with Eq. (22).
Moreover, the sensors having size very close to the value of Debye
length (2Ld ) exhibited ultrahigh sensor response and have potential
to detect for a ppb level of ethanol concentration. This suggests that
the sensor response enhancement is prominent when the nanostructure is close to 15 nm [8,9].
4. Conclusions
In summary, the sensor response formulas for ethanol sensor
based on ZnO nanostructures are listed in Table 2. It can be seen
that the formula of SLd can be used to explain for all circumstances
of ethanol sensors based on ZnO. Thus, it can be regarded as a general formula to describe the sensor response characteristics of ZnO
sensor. This formula is a powerful tool for designing ZnO sensor at
any desired sensor response, especially in ppb level of concentration, and for further application such as designing electronic nose.
Furthermore, it is reasonable to expand this formula to explain
other sensing materials such as SnO2 , TiO2 , MoO3 or WO3 and also,
to explain for different active gases such as CO2 , CO, NOx , NH3 or
H2 S.
71
[8] C.C. Li, Z.F. Du, L.M. Li, H.C. Yu, Q. Wan, T.H. Wang, Surface-depletion controlled
gas sensing of ZnO nanorods grown at room temperature, Appl. Phys. Lett. 91
(2007) 032101/1032101/3.
[9] Y. Chen, C.L. Zhu, G. Xiao, Reduced-temperature ethanol sensing characteristics of ower-like ZnO nanorods synthesized by a sonochemical method,
Nanotechnology 17 (2006) 45374541.
[10] Q. Yuan, Y.P. Zhao, L. Li, T. Wang, Ab initio study of ZnO-based gas-sensing
mechanisms: surface reconstruction and charge transfer, J. Phys. Chem. C 113
(2009) 61076113.
[11] N. Hongsith, C. Viriyaworasakul, S. Choopun, Ethanol sensor based on ZnO and
Au-doped ZnO nanowires, Ceram. Int. 34 (2008) 823826.
[12] S. Choopun, N. Hongsith, S. Tanunchai, T. Chairuangsri, C. Krua-in, S. Singkarat,
T. Vilaithong, P. Mangkorntong, N. Mangkorntong, Single-crystalline ZnO
nanobelts by RF sputtering, J. Cryst. Growth 282 (2005) 365369.
[13] C. Liewhiran, S. Phanichphant, Doctor-bladed thick lms of ame-made Pd/ZnO
nanoparticles for ethanol sensing, Curr. Appl. Phys. 8 (2008) 336339.
[14] P.P. Sahay, S. Tewari, S. Jha, M.J. Shamsuddin, Sprayed ZnO thin lms for ethanol
sensor, Mater. Sci. 40 (2005) 47914793.
[15] B.B. Rao, Zinc oxide ceramic semi-conductor gas sensor for ethanol vapour,
Mater. Chem. Phys. 64 (2000) 6265.
[16] Z. Yang, L.M. Li, Q. Wan, Q.H. Liu, T.H. Wang, High-performance ethanol sensing
based on an aligned assembly of ZnO nanorods, Sens. Actuators B 135 (2008)
5760.
[17] J.J. Delaunay, N. Kakoiyama, I. Yamada, Fabrication of three-dimensional network of ZnO tetrapods and its response to ethanol, Mater. Chem. Phys. 104
(2007) 141145.
[18] Y.J. Chen, C.L. Zhu, G. Xiao, Ethanol sensing characteristics of ambient temperature sonochemically synthesized ZnO nanotubes, Sens. Actuators B 129 (2008)
639642.
[19] L.J. Bie, X.N. Yan, J. Yin, Y.Q. Duan, Z.H. Yuan, Nanopillar ZnO gas sensor for
hydrogen and ethanol, Sens. Actuators B 126 (2007) 604608.
[20] S. Choopun, N. Hongsith, E. Wongrat, T. Kamwanna, S. Singkarat, P. Mangkorntong, N. Mangkorntong, Growth kinetic and characterization of RF-sputtered
ZnO:Al nanostructures, J. Am. Ceram. Soc. 91 (2008) 174177.
[21] I.M. Ser, F.F. Santiago, B. Denier, J. Bisquert, R.T. Zaera, J. Elias, C.L. Clment,
Determination of carrier density of ZnO nanowires by electrochemical techniques, Appl. Phys. Lett. 89 (2006) 203117/1203117/3.
[22] U. Grossner, J.S. Christensen, B.G. Svensson, Carrier concentration and shallow electron states in in-doped hydrothermally grown ZnO, Superlattices
Microstruct. 38 (2005) 364368.
[23] C.C. Li, L.M. Li, Z.F. Du, H.C. nYu, Y.Y. Xiang, Y. Li, Y. Cai, T.H. Wang, Rapid and
ultrahigh ethanol sensing based on Au-coated ZnO nanorods, Nanotechnology
19 (2008) 035501/1035501/4.
[24] E. Wongrat, P. Pimpang, S. Choopun, Comparative study of ethanol sensor based
on gold nanoparticles: ZnO nanostructure and gold: ZnO nanostructure, Appl.
Surf. Sci. (2009), doi:10.1016/j.apsusc.2009.02.046.
[25] T.J. Hsueh, S.J. Chang, C.L. Hsu, Y.R. Lin, I.C. Chen, Highly sensitive ZnO
nanowire ethanol sensor with Pd adsorption, Appl. Phys. Lett. 91 (2007)
053111/1053111/3.
[26] N. Hongsith, S. Choopun, Effect of platinum impregnation on ZnO tetrapods for
ethanol sensor, Adv. Mater. Res. 289 (2008) 5557.
[27] G. Neri, A. Bonavita, G. Micali, N. Donato, F.A. Deorsola, P. Mossino, I. Amato,
B.D. Benedetti, Ethanol sensors based on Pt-doped tin oxide nanopowders synthesised by gel-combustion, Sens. Actuators B 117 (2006) 196204.
Biographies
Acknowledgment
This work was supported by Thailand Research Fund (TRF).
Niyom Hongsith would like to acknowledge the nancial support
via the DPST scholarship, and the Graduate School, Chiang Mai University.
References
[1] D.E. Williams, Semiconducting oxides as gas-sensitive resistors, Sens. Actuators
B 57 (1999) 116.
[2] R.C. Singh, O. Singh, M.P. Singh, P.S. Chandi, Synthesis of zinc oxide nanorods
and nanoparticles by chemical route and their comparative study as ethanol
sensors, Sens. Actuators B 135 (2008) 352357.
[3] T.J. Hsueh, C.L. Hsu, S.J. Chang, I.C. Chen, Laterally grown ZnO nanowire ethanol
gas sensors, Sens. Actuators B 126 (2007) 473477.
[4] S. Choopun, N. Hongsith, P. Mangkorntong, N. Mangkorktong, Zinc oxide
nanobelts by RF sputtering for ethanol sensor, Physica E 39 (2007) 5356.
[5] Q. Wan, Q.H. Li, Y.J. Chen, T.H. Wang, X.L. He, J.P. Li, C.L. Lin, Fabrication and
ethanol sensing characteristics of ZnO nanowire gas sensors, Appl. Phys. Lett.
84 (2004) 36543656.
[6] S. Choopun, A. Tubtimtae, S. Santhaveesuk, S. NilPhai, E. Wongrat, N. Hongsith,
Appl. Surf. Sci. (2009), doi:10.1016/j.apsusc.2009.05.139.
[7] P. Feng, Q. Wan, T.H. Wang, Contact-controlled sensing properties of owerlike
ZnO nanostructures, Appl. Phys. Lett. 87 (2005) 213111/1213111/3.
72