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gap size
line width
4 mm
SiO2/Si substrate
Au electrode
Au lead
Micro-gap and
WO3 thin film
10 mm
Sensitivity (Rg/Ra)
0.5 ppm
10 1
0.2 ppm
0.1 ppm
0.05 ppm
10 0
0
0.2
0.4
0.6
0.8
1.2
1.4
1.6
Gap size / m
Fig. 2 Sensitivities to dilute NO2 of WO3 thin film
microsensors as a function of gap size (operating
temperature : 200
).
10 2
Sensitivity (Rg/Ra)
Line width : 50 m
10 1
Line width : 10 m
100
0.2
0.4
0.6
0.8
1.2
1.4
1.6
Gap size / m
Fig. 3 Sensitivities to 0.2 ppm NO2 of WO3 this film
microsensors with line width of 10 m and 50 m as a
function of gap size.