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Introduction to ESD
What is ESD?
ESD - Electro-Static Discharge - is a charge balancing process
between two objects at different potential.
ESD is a transient discharge of static charge that arises from
either human handling or a machine contact.
Although ESD is the result of a static potential in a charged
object, the energy dissipated and damages made are mainly
due to the current flowing through ICs during discharge.
Most ESD damages are thermally initiated in the form of
device / interconnect burn-out or oxide break-down.
The basic phenomenon of ESD is that is a large amount of
heat is generated in a localized volume significantly faster
than it can be removed, leading to a temperature in excess of
the materials safe operating limits.
ESD Damages:
pn-junction may melt.
Gate oxide may have void formation.
Metal interconnects & Vias may melt or vaporization,
leading to shorts or opens.
Gate-oxide breakdown is another form of ESD damage.
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The level of ESD stress, however, does not scale down with
the technology.
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ESD Models
Human Body Model (HBM)
The HBM is a component level stress developed to simulate
the action of a human body discharging accumulated static
charge through a device to ground, and employs a series RC
network consisting of a 100pF capacitor and a 1500 resistor.
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Equivalent circuit of the machine model of ESD. The switch closes upon an ESD event.
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