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Review
Abstract
Metal chalcogenide thin lms preparation by chemical methods are currently attracting considerable attention as it is relatively
inexpensive, simple and convenient for large area deposition. A variety of substrates such as insulators, semiconductors or metals can be
used since these are low temperature processes which avoid oxidation and corrosion of substrate. These are slow processes which facilitates
better orientation of crystallites with improved grain structure. Depending upon deposition conditions, lm growth can take place by ionby-ion condensation of the materials on the substrates or by adsorption of colloidal particles from the solution on the substrate. Using these
methods, thin lms of group IIVI, VVI, IIIVI etc. have been deposited. Solar selective coatings, solar control, photoconductors, solid
state and photoelectrochemical solar cells, optical imaging, hologram recording, optical mass memories etc. are some of the applications of
metal chalcogenide lms.
In the present review article, we have described in detail, chemical bath deposition method of metal chalcogenide thin lms, it is capable
of yielding good quality thin lms. Their preparative parameters, structural, optical, electrical properties etc. are described. Theoretical
background necessary for the chemical deposition of thin lms is also discussed. # 2000 Elsevier Science S.A. All rights reserved.
Keywords: Metal chalcognide thin lms; Thin solid lms; Chemical bath deposition
1. Introduction
Thin lms have number of applications in various elds.
Few of them are A.R. coating, interference lters, polarisers,
narrow band lters, solar cells, photoconductors, IR detectors, waveguide coatings, temperature control of satellites,
photothermal solar coatings such as black chrome, nickel,
cobalt etc., magnetic lms, superconducting lms, anticorrosive lms, microelectronics devices, diamond lms,
reduction of fabrication through coating or surface modication i.e. epitaxy and heterostructure lms, high temperature wear resistance lms, hard coatings etc. Rapid progress
in lm devices has helped for ICs of monolithic and hybrid
microelectronics.
Thin chalcogenide lms are of particular interest for the
fabrication of large area photodiode arrays, solar selective
coatings, solar cells, photoconductors, sensors etc. Deposition of these lms by vacuum evaporation, sputtering and
chemical methods such as chemical vapour deposition,
spray pyrolysis, electrodeposition, anodization, electroconversion, electroless, dip growth, successive ionic adsorption
and reaction, chemical bath deposition and solutiongas
*
Corresponding author.
0254-0584/00/$ see front matter # 2000 Elsevier Science S.A. All rights reserved.
PII: S 0 2 5 4 - 0 5 8 4 ( 0 0 ) 0 0 2 1 7 - 0
R.S. Mane, C.D. Lokhande / Materials Chemistry and Physics 65 (2000) 131
(1)
CA CB
CAB
(2)
CA CB
K0
or
0
KK CA CB
(4)
0
(5)
R.S. Mane, C.D. Lokhande / Materials Chemistry and Physics 65 (2000) 131
Table 1
Solubility constant data for the compounds deposited by chemical methods
[1921]
stable phase (AB)n. The rate of growth is directly proportional to the supersaturation.
S. No.
Rate of growth Ko aQ S
1.
2.
3.
4.
5.
6.
7.
8.
9.
10.
11.
12.
13.
14.
15.
16.
17.
18.
19.
20.
21.
22.
23.
24.
25.
26.
Compound
Ag2S orthorhombic
Ag2S (b)
Bi2S3
CdS
CoS (a)
CoS (b)
CuS
CuxS
FeS
HgS (red)
HgS (black)
InS
In2S3
MnS (pink)
MoS2
Mo2S3
NiS (a)
NiS (b)
NiS (G)
PbS (a)
PbS (b)
SnS
SnS2
ZnS (S)
ZnS (W)
As2S3
Sb2S3
HgSe
MnSe
Fe2Se3
CoSe
NiSe
CuSe
ZnSe
PKsp [19]
36.3
36.1
63.1
15.9
7.2
13.0
22.1
35.1
3.7
39.1
38.7
16.4
44.3
2.6
40.9
55.8
6.9
12.2
13.9
44.8
15.2
60.1
16.3
11.5
8.7
PKsp [20,21]
26.5
90.5
27.8
20.4
24.7
41.09
46.7
3.90
47.17
73.24
15.16
2.5
3.0
4.7
3.18
5.20
0.1
2.2
22.80
33.19
92.77
59
7.27
4.0
7.08
5.29
7.78
7.72
ABn1 A B ) ABn2
(8)
0
(6)
(7)
R.S. Mane, C.D. Lokhande / Materials Chemistry and Physics 65 (2000) 131
Table 2
Preparative conditions and properties of metal chalcogenide films by chemical bath deposition method
S.
No.
Bath
composition
Thickness
Deposition Substrates
temperature used
(8C)
Deposition
time
Remarks
References
Alkaline 812
8090
Stainless steel,
tin oxide coated
glass, titanium
glass
3040 min
[29]
2.
Cadmium
acetatetriethanolamine
(TEA)ammoniathiourea
Alkaline
7 mm
50
Glass
13 h
3.
Cadmium
acetateTEAthiourea in ratio
1:0.50.5
Alkaline
0.30.4 mm
75
Glass
4.
Alkaline 1011
12 mm
85
Glass
12 h
Alkaline 1011
12 mm
85
Glass
12 h
6.
Alkaline 1011
12 mm
85
Glass
12 h
7.
Alkaline 1011
12 mm
85
Glass
12 h
8.
Alkaline 1011
12 mm
85
Glass
12 h
9.
Alkaline 1011
12 mm
85
Glass
12 h
5.
[31,32]
[33]
[35]
[36]
[37]
[4]
R.S. Mane, C.D. Lokhande / Materials Chemistry and Physics 65 (2000) 131
pH
[38]
[3941]
Table 2 (Continued )
Bath
composition
pH
Thickness
Deposition Substrates
temperature used
(8C)
Deposition
time
Remarks
10.
1 M CdSO4Na2S2O3
Acidic 24
0.10.15 mm
85
Glass
1520 min
11.
Cd
saltthioureanitrotetraacetic
acid
0.1 M CdCl2 (50 cc)0.1 M
thiourea (50 cc)
Alkaline 10.7
2002000 A
Glass
Alkaline 910
8002030 A
085
Glass
30 min and
65 h
Alkaline
150 nm
60
Glass
2h
Alkaline
60
Glass
12.
13.
14.
25 ml (0.1 M) cadmium
nitrate20 ml (1 M)
ammonia10 ml (1 M)
thiourea37.5 ml water
0.015 M CdSO40.15 M
thioureaammonia
15.
0.14 M CdI20.14 M
thioureaammonia
11.5
70
Glass
1039 h
16.
2 M ammonia5103 M
CdSO45102 M thiourea
Alkaline
Ni coated glass
17.
0.02 M CdCl20.5 M
KOH1.5 M NH4OH0.2 M
CS (NH2)2
10
Glass
40 min
with increase in
Grain size was changed from 30 to 70 A
deposition temperature. Blue shift of 0.3 eV was observed.
Electrical resistivity was decreased from 9108 to 2108
. Activation
with increase in thickness from 8002000 A
energy varied from 0.24 to 0.125 eV
At 3005008C, In is deposited by thermal evaporation on
CdS surface. Grain size was found to increase from
1317 nm after diffusion of In, whereas Eg decreased from
2.58 to 2.37 eV with increase in electrical conductivity
Films were n-type in conductivity. Growth was in two steps,
the formation of dense compact inner layer followed by
porous, less adherent layer
Microstructure was changed depending on pH of the
solution, at pH11.9, films have poor coverage on substrate.
At pH 11.8, oxygen content was minimum and observed
good stoichiometry by AES, Z17% has been obtained and
were used in CuInGaSe2 solar cells as a buffer layer
These films have been studied in situ using electrochemical
open circuit potential (EOCPC) change measurement. An
explanation of EOCPC dependence with film thickness in
terms of space charge region theory has been reported.
SEM showed high compactness. It showed nucleation
growth mechanism, hexagonal cubic structure. Eg was
2.48 eV and r was 107 O cm. Nd was calculated using
EOCPC
Parallel and perpendicular magnetic field (0.049 0.077
Torr) was applied to the substrate and bandgap was found
to increas by 0.1 eV with magnetic field, resistivity
changed from 105101 O cm and average grain size from
73 to 30 nm. Magnetic field induces the formation of
sulphur vacancies
References
[44]
[45]
[46]
[15]
[48]
[49]
R.S. Mane, C.D. Lokhande / Materials Chemistry and Physics 65 (2000) 131
S.
No.
18.
CdSO4thioureaNH4OH
11.7
19.
0.55 M CdSO410150 mM
SC(NH2)2ammonia
12
70
Ni
20 min
20.
2 mM CdSO41 M Na2S2O3
38
<30
Glass
21.
37 ml (1 M) cadmium
acetate20 ml (13 M)
NH4OH10 ml triethanolamine
(TEA)100 ml waterthiourea
20 ml (0.2 M) CdCl220 ml
(7 M) NH4OH5 ml (2.5 M)
NH4Cl40 ml (1 M) CS(NH2)2.
Samples were immersed in ion
exchange solution containing
200 ml (0.025 M) thiosulphate
complex of AgNO3, pH7,
immersion 2030 s, heated
at 1508C for 24 h
5 ml (1 M) Cd salt2.5 ml
(7.4 M) TEA5 ml (14 M)
ammonia5 ml (1 M) thiourea
80
Glass
1025 min
10.8
80
Glass
2025 min
Alkaline 910
25
Glass
6.58 h
Alkaline 910
0.5 mm
85
[57]
Strong peak of CdS (2 0 0) was observed.
Photoluminescence shows band edge peak at 2.51 eV and
broad peak in red region associated with S vacancies. The
strain and defects in the lattice show large FWHM of the Lo
phonon in Raman scattering of an deposited film. Annealing
at 5008C leads to relaxation in strain impurity and improves
the crystalline quality of the film
The r103104 O cm and Eg2.3 eV were obtained. The
[58]
optimized parameters have enabled to maximize the
thickness of the deposited film in a single dip and to grow
thickness of films by periodically replacing the concentration
of reactants while the substrate remains continuously dipped
in reaction bath
23.
24.
[5052]
[53]
[54]
[55]
[56]
R.S. Mane, C.D. Lokhande / Materials Chemistry and Physics 65 (2000) 131
22.
Table 2 (Continued )
S.
No.
Bath
composition
pH
Thickness
Deposition Substrates
temperature used
(8C)
Deposition
time
Remarks
References
25.
100 mM CdCl2100 mM
SC(NH2)2
910
800203 A
085
Titanium
1h
[62]
26.
50 ml (0.1 M) cadmium
chlorideNH4OH50 ml
(0.1 M) thiourea
910
65
90 min
27.
(0.01 M) CdCl2(0.039 M)
NH4Cl(0.76 M)
NH4OH0.17 M SC (NH2)2
11
1.15 mm
73
Glass and
FTO coated
glass
28.
30 ml (0.1 M) cadmium
acetate812 ml (1 M) sodium
citrate15 ml (1.5 M)
NH4OH510 ml (1 M)
thioureawater
Cadmium acetate1 M
thioureaTEA14.4 M
NH4OH
5070
Glass
12 h
25 and 60
Glass
24 h at 258C
and 4 h at
608C
30.
1 M cadmium acetate1 M
thiourea1 M TEA30%
ammonia
0.350.5 mm
3085
Glass
2030 h
31.
1 M cadmium acetate0.5 M
thiourea30% NH4OH.
0.350.632 mm
24
Glass
1418 h
32.
20 ml (0.5 M) cadmium
nitrate10 ml 50% TEA15 M
NH4OH5 ml (1 M)
thiourea12 ml (1 M) sodium
citrate
25 ml (0.1 M) cadmium
chloride12 ml (1 M) sodium
citrate2 ml (50 M)
ammonia6 ml (1 M)
thiourea35 ml water
0.20.3 mm
75
Polyester
foil
116 h
300 nm
80
Glass
4h
33.
[64]
[65]
[66]
[67]
[68]
[69]
[70]
R.S. Mane, C.D. Lokhande / Materials Chemistry and Physics 65 (2000) 131
29.
[63]
34.
1 M CdSO41 M
thiourea14 M NH4OH
10
0.3 mm
90
Stainless steel
[72]
89
0.1 mm
2760
8h
[75]
11.5
600 A
70
Glass
80120 min
[76]
[78]
3.
1 M ZnSO41 M
thioacetamide50% TEA
10 (buffer)
0.44 mm
75
Glass
36 h
4.
Alkaline
16.7
Glass
Alkaline
25
Glass
[79]
Alkaline
Glass
[73]
24
0.10.5 mm
85
[21]
10
Glass
23
0.48 mm
2550
Glass
90 min
2.
23
5001800 A
075
Glass
72 h
3.
HgI4SC (NH2)2ammonia
Alkaline
0.7 mm
27
Glass
24 h
4.
50 mm HgCl2100 mm
Na2S2O3 (of equal volume)
23
04 mm
40
1h
6.
7.
8.
0.025 M ZnSO41 M
NH33 M hydrazine
hydrate0.035 M thiourea
[80]
[83]
[86]
[81]
R.S. Mane, C.D. Lokhande / Materials Chemistry and Physics 65 (2000) 131
5.
[77]
[85]
S.
No.
Bath
composition
3.
1 M Mn acetate1 M
thioacetatamide1.4 M
NH4Cl14.7 M TEA80%
hydrazine hydrate
pH
Thickness
Deposition Substrates
temperature used
(8C)
Deposition
time
Remarks
References
810
36 mm
27
Glass
15 min
[91,92]
810
12 mm
855
Glass
20 min
[95]
2.22.6
0.14 mm
27
Glass
1h
810
0.30.6 mm
27
1h
0.5 mm
60
1h
[93,94]
Stainless
steel
Glass
910
0.26 mm
27
Glass
8h
[97]
9.79.8
0.60.7 mm
70
Glass
10 h
Alkaline
0.30.5 mm
2590
FTO coated
glass, glass,
glassy carbon
30 min
89
12 mm
27
Glass
2.53 h
[100]
0.050.1 mm
100
Glass
40 min
[101]
9.29
0.05 mm
Glass
30 min
[102]
4.
Bi(NO3)3TEAthioacetamide
27
Glass
10 ml (0.1 M) Bi(NO3)38 ml
(0.1 M) EDTA6 ml (0.1 M)
Na2S2O3 5H2O
1.4 mm
27
Glass
9h
[96]
[90]
[98]
[99]
[103]
[104]
R.S. Mane, C.D. Lokhande / Materials Chemistry and Physics 65 (2000) 131
10
Table 2 (Continued )
10 ml (0.1 M) Bi(NO3)310 ml
(0.1 M) EDTA12 ml (0.1 M)
thioacetamide
12 mm
27
Glass
8h
7.
10 ml (0.1 M) Bi(NO3)310 ml
(0.1 M) Na2S2O3
1.4
0.1 mm
27
Glass
4h
8.
30 ml (0.2 M) Bi(NO3)324 ml
(0.1 M) EDTA18 ml (0.2 M)
Na2S2O3
52218 nm
60
Glass
16 h
9.
5 ml (0.5 M) Bi(NO3)370 ml
(50%) TEA2 ml (1 M)
thioacetamide
0.16 mm
25
Glass
7h
10.
10 ml (0.5 M) Bi(NO3)370 ml
(50%) TEA4 ml (1 M)
thioacetamide
0.13 mm
25
Glass
6h
11.
0.5 M Bi(NO3)3TEA0.5 M
thioacetamide
0.05 mm
25
Glass
4575 min
12.
(Acidic) 23 and
(alkaline) 1011
0.50.1 mm
2560
and 0.30.5 mm
Glass
4 h and
30 min
13.
5 ml (0.5 M) Bi(NO3)3
5H2O2 ml (1 M)
thioacetamide
8.5
0.16 mm
25 and 50
Glass
7 and 3 h
14.
10 ml (0.5 M) Bi(NO3)38 ml
(3.7 M) TEA8 ml (1 M)
thioacetamide
8.5
0.13 mm
24
Glass
6h
15.
5 ml (0.5 M) Bi(NO3)38 ml
(3.7 M) TEA8 ml (1 M)
thioacetamide
8.5
0.28 mm
25
ZnS on glass
1 and 22 h
[105,106]
[107]
[108]
[109]
[110]
[111,112]
[113]
[114]
R.S. Mane, C.D. Lokhande / Materials Chemistry and Physics 65 (2000) 131
6.
[115,116]
[77]
11
12
Table 2 (Continued )
S.
No.
Bath
composition
pH
Thickness
Deposition Substrates
temperature used
(8C)
Deposition
time
Remarks
References
16.
0.05 M Bi(NO3)30.05 M
Na2S2O30.1 M EDTA
10 ml (0.1 M) Bi(NO3)310 ml
(0.1 M) EDTA12 ml (0.1 M)
thioacetamide
23
200500 nm
27
10 min
[118]
100437 nm
9.29.5
10 ml (0.2 M) SbCl38 ml
(0.1 M) tartaric acid4 ml
(0.1 M) thioacetamide
10 ml (0.1 M) SbCl316 ml
(0.1 M) tartaric acid10 ml
(0.1 M) sodium thiosulphate
4.
525 h
12 mm
27
Glass
72 h
0.7 mm
27
Glass
8h
0.52 mm
27
Glass
9h
10 ml (0.1 M) SbCl38 ml
(0.1 M) tartaric acid4 ml
(0.1 M) thioacetamide
0.0420.47 mm
0 and 27
Glass
5h
5.
0.1 M Sb2O30.1 M
Na2S2O30.5 M NaOH
23
0.30.4 mm
27
Glass
12 h
6.
1 mm
27
SnO2 coated
glass, stainless
steel, glass
60 h
7.
25 ml (0.1 M) potassium
antimony tartarate5 ml
(7.4 M) TEA3 ml (17 M)
ammonia25 ml (0.1 M)
thioacetamide
1 mm
27
SnO2 coated
glass and glass
96 h
8.
112
27
Stainless steel
2030 min
17.
[119,120]
[121]
[123]
[122]
[124]
[125]
[126]
[127]
[128]
R.S. Mane, C.D. Lokhande / Materials Chemistry and Physics 65 (2000) 131
9.
0.050.15 mm
10
Glass
0.51 h
12
0.59 mm
25
Glass
30 h
23
0.20.3 mm
25
Glass
12 h
10 ml (0.1 M) As2O34 ml
(0.1 M) EDTA8 ml (0.1 M)
sodium thiosulphate
10 ml (0.1 M) As2O310 ml
(0.1 M) EDTA 8 ml (0.1 M)
thioacetamide
20 ml (0.1 M) As2O320 ml
(0.1 M) EDTA25 ml (0.1 M)
thioacetamide
Methanolic solutions of As3
and As2 (As2O3CH3CSNH2)
0.7 mm
25
Glass
5h
0.6 mm
25
Glass
9h
99.5
1.1 mm
25
Glass
7h
0.16 mm
27
Glass
12120 h
20 ml (0.1 M) As2O320 ml
(0.1 M) EDTA16 ml (0.1 M)
thioacetamide
50250 nm
Glass
525 h
Alkaline
0.1 mm
73
Glass
2h
Alkaline
1 mm
75
Glass
5h
1.6
27
60 min
[139141]
2.
1.6
55
Glass
(10 cm2),
FTO coated
glass, Ti, Plastic
(100 cm2)
FTO coated
glass, glass
20 min
[142]
10.
3.
4.
5.
6.
1 gm SnCl22H2O (in
acetone)8 ml 1 M
thioacetamide4 M
NH312 ml 51% TEA
0.1 M SnCl20.1 M
EDTA0.5 M Na2S2O3
[129]
[125]
[130]
[132]
[133]
[134]
[135]
[136]
[137]
[138]
R.S. Mane, C.D. Lokhande / Materials Chemistry and Physics 65 (2000) 131
2.
13
14
Table 2 (Continued )
S.
No.
Bath
composition
Thickness
Deposition Substrates
temperature used
(8C)
Deposition
time
Remarks
References
Acidic
0.2 mm
2770
Glass, FTO
coated glass
45 h
[146]
2.
0.2 mm
70
Glass
30 min
3.
5 mM InCl30.15 M
CH3CSNH2
Acidic
10 nm
70
20 min
1 mm
30
Glass
0.086
0.16 mm
36
Glass
45145 min
1 M lead acetate1M
TEANaOH
1011
0.1 mm
2426
Glass
1 h 45 min
4.
Lead acetatethioureaNaOH
56
27
Glass
5.
0.1 M Pb (CH3COO)0.1 M
Na2S2O3
56
80
Glass
1h
6.
1 M lead acetate1 M
thiourea1 M TEA
1011
2224
Glass
1.304.30 h
7.
1 M lead acetate1 M
thiourea1 M TEA
1011
0.1 mm
60
Glass
4h
[149]
[144]
[160]
[162]
[162]
[164]
[163]
[159]
[11]
R.S. Mane, C.D. Lokhande / Materials Chemistry and Physics 65 (2000) 131
pH
0.1 mm
Room tem-Glass
perature
3 h 15 min
2.
15 ml (0.1 M) CuSO415 ml
(1 M) thiourea
0.5
0.37 mm
60
Glass
40 min
3.
1 M CuSO41 M sodium
acetate7.4 M TEA1 M
thiourea
9.4
500 A
40
Glass
1h
4.
0.15 M CuSO47.4 M
TEM14 M ammonia10.5 M
digol
CuClNaClEDTA
hydraxylamine hydrochloride
0.260.42 mm
3080
Glass
10 h
10
35 mm
3090
6.
Copper nitrateNaOHTEA
thiourea
25
Glass
12 h
7.
0.5 M CuSO42.5H2O9.4 M
thiourea in volume ratio 1:2
0.160.14 mm
Glass
2h
8.
1012
0.15 mm
24
Glass
2.15 h
9.
5 ml CuCl25H2O9 ml (1 M)
Na2S2O310 ml 0.5 M
dimethyl thiourea
0.5 mm
2770
Glass
6h
10.
CuCl2TEAthiourea
0.10.25 mm
50
Glass
36 h
0.020.07 mm
25
Glass
67 h
[179]
4.2
0.10.2 mm
80
Glass
30 min
[180]
1112
200400 nm
2560
Glass
615 h
[156]
[157]
[168]
[169]
[170]
[171]
[172]
[173]
[112]
[181]
15
[11]
R.S. Mane, C.D. Lokhande / Materials Chemistry and Physics 65 (2000) 131
5.
16
Table 2 (Continued )
S.
No.
Bath
composition
pH
Thickness
Deposition Substrates
temperature used
(8C)
Deposition
time
Remarks
References
78
0.30.4 mm
27
Glass
35 h
[183]
2.
0.030.09 mm
27
Glass
4h
RT
Glass
1/2 h
[184]
80
Glass
1h
[185]
34
11.5 mm
27
Glass
45 min
[186]
2.
11
1.15 mm
27
Glass
45 min
911.4
800 A
2860
Glass, Si, Ge
10
Stainless steel
Molybdenum sulphide
1.
5% ammonium
molybdate13.4 M
NH4OH20% sodium
dithionite1 M thioacetamide
CdSO4NTANa2SeSO3
Alkaline
Glass
4.
(0.09 M) CdCl2(0.1 M)
sodium nitrilothiacetate
Na2SeSO3
Ti
Below 9 pH value, films were non-uniform and nonadherent, deposition and growth is explained on the basis of
nucleation. Rate of deposition depends upon pH,
composition and deposition temperature
Adhesive and uniform CdSe film was deposited on the
substrate. Absorption coefficient was 104 cm1 and bandgap
was 1.7 eV. n-Type conductivity was reported. Efficiency of
CdSe was 0.098% in polyiodide electrolyte
Films showed blue shift of 0.5 eV in optical bandgap energy.
Mixed structure (cubic and hexagonal) was observed.
Depending upon deposition technique, crystal size was
and CdSe thin films exhibit
increased from 4080 A
quantum size effect
Films were polycrystalline. Photoluminescence and Raman
scattering were studied. After annealing average grain size
and Eg was
was found to be increased from 42 to 180 A
decreased from 2.00 to 1.74 eV
[182]
[187]
[188]
[189]
[190]
[191]
R.S. Mane, C.D. Lokhande / Materials Chemistry and Physics 65 (2000) 131
10 ml (0.8) NiSO415 ml
(7.4 M) TEA14 M
ammonia10 ml (0.8 M)
thioacetamide
5 ml (0.1 M) CdSO45 ml
(0.13 M) Na2SeSO32 ml
ammonia
10
0.30.5 mm
7080
Stainless steel
6.
8.5
10 hfew days
7.
0.3 ml (0.5 M) Cd
(CH3COO)21 ml (7 M)
NH4OH30 ml (0.13 M)
Na2SeSO3
3 ml CdCl21 ml NaOH3 ml
NH4NO33 ml selenourea
Alkaline
0.13 mm
90
Ti
3060 min
7.047.90
2.5 mm
80
Glass
8.
[192]
[193]
[194]
[195]
9.
30 ml (0.1 M)
Cd(NO3)34H2O15 ml (0.8 M)
Na2COH5O72H2O1.4 ml
(30%) NH4OH30 ml (0.4 M)
dimethylselenourea
Alkaline
0.49 mm
24
Glass
10 h
10.
30 ml (0.1 M) cadmium
salt12 ml (1 M) sodium citrate
or tartarate12 ml (0.1 M)
NH4OH30 ml (0.4 M) N,Ndimethylselenourea
Alkaline
0.170.28 mm
24800 A
Glass
56 h
11.
10
0.8 mm
30
Stainless steel
30 min
11.411.7
5080
Glass
360 min
[28]
910
0.050.12 mm
100
Glass
1h
[204]
910
0.3 mm
50
Glass
8h
[205]
[198]
[199]
17
[196,197]
R.S. Mane, C.D. Lokhande / Materials Chemistry and Physics 65 (2000) 131
5.
18
Table 2 (Continued )
S.
No.
Bath
composition
pH
Thickness
Deposition Substrates
temperature used
(8C)
Deposition
time
Remarks
References
4.
10 ml (0.5 M) ZnSO40.06 M
selenourea10 ml hydrazine
hydrate0.7 M ammonia
ZnSO480% hydrazine
hydrate25%
ammoniaselenourea
35 ml (0.1 M) zinc
acetate16 ml (0.8 M) sodium
citrate5 ml (7.4 M)
ammonium hydroxide0.29
N,N0 -dimethyl
selenourea(0.01 M) Na2SO3
ZnSO4Na2SeSO3
7.5
0.2 mm
70
7.5
0.175 mm
30 min
[29]
70
Glass, FTO
coated glass, Ni,
GaP
Glass
30 min
[206]
0.3 mm
50
Glass
8h
9.25
11.30 mm
50
Glass
12 h
[208]
Alkaline
2790
GaAS (l l l)
1011
27
[203]
9.810
0.2 mm
30
Glass
2h
[214]
2.
0.5 mm
2240
Glass
1070 min
0.91.2 mm
30
Glass
10 h
[216]
0.60.25 mm
30
Glass
30 min
[217]
Alkaline
27
Glass
15 min
5.
6.
8.
9.
[209,210]
[215]
R.S. Mane, C.D. Lokhande / Materials Chemistry and Physics 65 (2000) 131
7.
[207]
2.
Thallium sulphateTEA
NH4OHNa2SeSO3
Alkaline
0.30.5 mm
Glass
[174]
902
Glass
30 min
[219]
30
Glass
1h
[220]
3.
98
27
Glass
30 min
23 and 910
1.1 mm
27
Glass
1824 h
[206]
5.
10.4
250450 nm
27
30 min
6.
11.2
0.26 mm
30
Glass
23 h
752
Pt (1 1 1)
2h
Tetraamine copperNa2SeSO3
in stoichiometric ratio
79
55
Glass
12 h
3.
10
23 mm
9095
Glass
30 min
Alkaline
0.50.6 mm
27
Glass
1/2 h
[188]
[223]
Film has FCC structure. From SEM studies, it was found that
first layer is compact whereas surface layer is less compact.
At room temperature there was an electrochemical
transformation to the orthorhombic phase and is attributed as
this transformation is catalyzed by the Cu3Se2 impurity
phase present in the cubic copper (I) selenide
min1. Annealed films at 5508C
Rate of deposition was 35 A
for 30 min gave stable and reproducible results as Eg1.44
1.39 eV. From XRD, cubic structure was confirmed. p-Type
electrical conductivity with Hall mobility and carrier
concentration 103 cm2 V1 s1 and 1020 cm3,
respectively, were obtained
Films were homogeneous with average grain size 0.7 mm,
having cubic structure (Cu2xSe) with bandgap energy
1.2 eV. P-Type electrical resistivity, r0.12102 O cm
were obtained
[225]
[184]
[226]
R.S. Mane, C.D. Lokhande / Materials Chemistry and Physics 65 (2000) 131
4.
[221]
[227]
19
20
Table 2 (Continued )
S.
No.
Bath
composition
Thickness
Deposition Substrates
temperature used
(8C)
Deposition
time
Remarks
References
Alkaline
0.4 mm
Glass
4h
[228]
100
Glass
15 h
[229]
Alkaline
275 nm
Glass
1h
[230]
Alkaline
0.11 mm
27
Silicon, silica
[231]
2.
6.2
0.6 mm
70
24 h
1011
50
Glass activated
using PdCl2
CuInSe2 films
10 min
Alkaline
0.20.4 mm
8090
Glass
11.5
0.050.1 mm
27
Glass
10 h
[235]
10.511
0.2 m
3580
Glass
30 min
[236]
Alkaline
10002000 A
80
Glass
[234]
3.
4.
[232]
[233]
[234]
R.S. Mane, C.D. Lokhande / Materials Chemistry and Physics 65 (2000) 131
pH
Cadmium acetatethiourea
Na2SeSO3InCl3 was doped
from 0.01 to 1 mol%
60
Glass
45 min
10.4
55
Glass, FTO
coated glass
75 min
2790
GaAs (1 1 1)
[209,210]
Alkaline
0.51 mm
5090
Glass
60 min
[240]
Alkaline
0.10.15 mm
80
Glass
45 min
[241]
11
85
Glass
45 min
[242]
Alkaline
85
Glass
75 min
[245,246]
Alkaline
85
Glass
75 min
[247]
[237]
[238,239]
R.S. Mane, C.D. Lokhande / Materials Chemistry and Physics 65 (2000) 131
10
21
22
Table 2 (Continued )
Bath
composition
pH
Thickness
Deposition Substrates
temperature used
(8C)
Deposition
time
Remarks
References
2.
0.5 M Cd acetate0.5 M Zn
acetate7.4 M TEA13.4 M
ammonia
Alkaline
0.10.2 mm
9095
Glass
15 min
[248]
Alkaline
Glass
[253]
Alkaline
1090
Glass, Ge, Si
40 min
The films have both phases (a and b) of HgS into PbS lattice
up to 33 at.% of Hg
Electron microscopy and electron diffraction studies show
the predominance of [1 1 1] and [1 1 1] orientations in films
grown on [1 1 1] Ge and [1 1 1] Si substrates, respectively.
The films grew initially as b0 -PbHgS up to a thickness of
, beyond this thickness the films were a0 -PbHgS
about 800 A
810
0.3 mm
80
Glass
20 in
[255]
0.45 mm
60
Glass
1h
[256]
0.7 mm
80
Glass
1h
[257]
80
Glass
1h
[259]
0.5 mm
80
Glass
2h
[258]
0.40.5 mm
80
Glass
1h
The XRD showed that the films are amorphous. The optical
bandgap of the film was 2.5 eV. The electrical resistivity was
of the order of 103 O cm
[260]
45
[161]
R.S. Mane, C.D. Lokhande / Materials Chemistry and Physics 65 (2000) 131
S.
No.
910
10004000 A
[261]
10
1.32 mm
5090
Glass
30 min
[263]
2.
>9
300 nm
40
Glass
4h
3.
200300 A
27
SnO2:F coated
glass
10
27
Glass
9.5
1.012.03 mm
50
Glass
12 h
[265]
[266268]
R.S. Mane, C.D. Lokhande / Materials Chemistry and Physics 65 (2000) 131
4.
[264]
23
24
R.S. Mane, C.D. Lokhande / Materials Chemistry and Physics 65 (2000) 131
(9)
(10)
R.S. Mane, C.D. Lokhande / Materials Chemistry and Physics 65 (2000) 131
(11)
HSe OH , H2 O Se2
(12)
25
26
R.S. Mane, C.D. Lokhande / Materials Chemistry and Physics 65 (2000) 131
R.S. Mane, C.D. Lokhande / Materials Chemistry and Physics 65 (2000) 131
27
(13)
(14)
28
R.S. Mane, C.D. Lokhande / Materials Chemistry and Physics 65 (2000) 131
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