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FEATURES
Complete Acceleration Measurement System
on a Single Monolithic IC
80 dB Dynamic Range
Pin Programmable 650 g or 625 g Full Scale
Low Noise: 1 m g /Hz Typical
Low Power: <2 mA per Axis
Supply Voltages as Low as 4 V
2-Pole Filter On-Chip
Ratiometric Operation
Complete Mechanical & Electrical Self-Test
Dual & Single Axis Versions Available
Surface Mount Package
+VS
2
ADXL150
SENSOR
COM
SELF-TEST
TP
(DO NOT CONNECT)
0.1mF
OFFSET
NULL
X OFFSET
NULL
25kV
GAIN
AMP
BUFFER
AMP
VOUTX
DEMODULATOR
SENSOR
GENERAL DESCRIPTION
BUFFER
AMP
25kV
ADXL250
VOUT
DEMODULATOR
CLOCK
+VS
The ADXL150 and ADXL250 are third generation 50 g surface micromachined accelerometers. These improved replacements for the ADXL50 offer lower noise, wider dynamic range,
reduced power consumption and improved zero g bias drift.
5kV
GAIN
AMP
0.1mF
5kV
+VS
2
CLOCK
5kV
GAIN
AMP
SENSOR
25kV
SELF-TEST
VOUTY
DEMODULATOR
COM
BUFFER
AMP
Y OFFSET
NULL
ratiometric to the power supply, eliminating the need for a voltage reference when driving ratiometric A/D converters such as
those found in most microprocessors. A power supply bypass
capacitor is the only external component needed for normal
operation.
The ADXL150/ADXL250 are available in a hermetic 14-lead
surface mount cerpac package specified over the 0C to +70C
commercial and 40C to +85C industrial temperature ranges.
Contact factory for availability of devices specified over automotive and military temperature ranges.
REV. 0
Information furnished by Analog Devices is believed to be accurate and
reliable. However, no responsibility is assumed by Analog Devices for its
use, nor for any infringements of patents or other rights of third parties
which may result from its use. No license is granted by implication or
otherwise under any patent or patent rights of Analog Devices.
Parameter
Conditions
SENSOR
Guaranteed Full-Scale Range
Nonlinearity
Package Alignment Error 1
Sensor-to-Sensor Alignment Error
Transverse Sensitivity2
ADXL150JQC/AQC
Min
Typ Max
ADXL250JQC/AQC
Min
Typ Max
40
40
50
0.2
1
0.1
2
g
% of FS
Degrees
Degrees
%
33.0
33.0
38.0 43.0
38.0 43.0
0.5
mV/g
mV/g
%
50
0.2
1
2
SENSITIVITY
Sensitivity (Ratiometric)3
Y Channel
X Channel
Sensitivity Drift Due to Temperature Delta from 25C to TMIN or TMAX
33.0
NOISE PERFORMANCE
Noise Density5
Clock Noise
FREQUENCY RESPONSE
3 dB Bandwidth
Bandwidth Temperature Drift
Sensor Resonant Frequency
SELF-TEST
Output Change6
Logic 1 Voltage
Logic 0 Voltage
Input Resistance
OUTPUT AMPLIFIER
Output Voltage Swing
Capacitive Load Drive
POWER SUPPLY (VS)7
Functional Voltage Range
Quiescent Supply Current
38.0 43.0
0.5
0.50 0.55
30
1
5
Units
0.45
20
2.5
0.50 0.55
30
V/V
k
1
5
mg/Hz
mV p-p
2.5
900
1000
50
24
900
1000
50
24
Hz
Hz
kHz
0.25
VS 1
0.40 0.60
0.25
VS 1
0.40 0.60
To Common
30
50
30
50
V
V
V
k
IOUT = 100 A
0.25
1000
TMIN to TMAX
Q=5
1.0
4.0
ADXL150
ADXL250 (Total 2 Channels)
1.8
1.0
VS 0.25
0.25
1000
VS 0.25
V
pF
6.0
3.0
4.0
6.0
5.0
V
mA
mA
+70
+85
C
C
3.5
TEMPERATURE RANGE
Operating Range J
Specified Performance A
0
40
+70
+85
0
40
NOTES
1
Alignment error is specified as the angle between the true axis of sensitivity and the edge of the package.
2
Transverse sensitivity is measured with an applied acceleration that is 90 degrees from the indicated axis of sensitivity.
3
Ratiometric: V OUT = VS /2 + (Sensitivity VS /5 V a) where a = applied acceleration in gs, and VS = supply voltage. See Figure 21. Output scale factor can be
doubled by connecting VOUT to the offset null pin.
4
Ratiometric, proportional to V S /2. See Figure 21.
5
See Figure 11 and Device Bandwidth vs. Resolution section.
6
Self-test output varies with supply voltage.
7
When using ADXL250, both Pins 13 and 14 must be connected to the supply for the device to function.
Specifications subject to change without notice.
REV. 0
ADXL150/ADXL250
ABSOLUTE MAXIMUM RATINGS*
Package Characteristics
Package
uJA
uJC
Device Weight
14-Lead Cerpac
110C/W
30C/W
5 Grams
ORDERING GUIDE
*Stresses above those listed under Absolute Maximum Ratings may cause permanent damage to the device. This is a stress rating only; the functional operation of
the device at these or any other conditions above those indicated in the operational
sections of this specification is not implied. Exposure to absolute maximum rating
conditions for extended periods may affect device reliability.
ADXL150
14
ADXL250
NC
COMMON
14
NC
COMMON
14
ADXL150
TOP VIEW
(Not to Scale)
7
NC
ZERO g ADJ Y
VOUT Y
NC
TP (DO NOT CONNECT)
AY 908
7
0C to +70C
40C to +85C
0C to +70C
40C to +85C
NC
NC
NC
NC
TP (DO NOT CONNECT)
TOP VIEW
(Not to Scale)
AX
TOP VIEW
(Not to Scale)
AX
Temperature Range
ADXL150JQC
ADXL150AQC
ADXL250JQC
ADXL250AQC
PIN CONNECTIONS
Drops onto hard surfaces can cause shocks of greater than 2000 g
and exceed the absolute maximum rating of the device. Care
should be exercised in handling to avoid damage.
Model
14
ADXL250
TOP VIEW
(Not to Scale)
7
VS
NC
NC
NC
VOUT
SELF-TEST
ZERO g ADJ
VS
VS
NC
NC
VOUT X
SELF-TEST
ZERO g ADJ X
NC = NO CONNECT
NOTE: WHEN USING ADXL250, BOTH PINS 13 AND 14 NEED
TO BE CONNECTED TO SUPPLY FOR DEVICE TO FUNCTION
CAUTION
ESD (electrostatic discharge) sensitive device. Electrostatic charges as high as 4000 V readily
accumulate on the human body and test equipment and can discharge without detection.
Although the ADXL150/ADXL250 feature proprietary ESD protection circuitry, permanent
damage may occur on devices subjected to high energy electrostatic discharges. Therefore, pro per
ESD precautions are recommended to avoid performance degradation or loss of functionality.
REV. 0
WARNING!
ESD SENSITIVE DEVICE
ADXL150/ADXL250
Zero g Bias Level: The output voltage of the ADXL150/
ADXL250 when there is no acceleration (or gravity) acting
upon the axis of sensitivity. The output offset is the difference
between the actual zero g bias level and (VS/2).
GLOSSARY OF TERMS
Sensitivity: The output voltage change per g unit of acceleration applied, specified at the VOUT pin in mV/g.
14
ADXL150
AX
AX
AY
14
ADXL250
Acceleration Vectors
REV. 0
ADXL150/ADXL250
Typical Characteristics (@+5 V dc, +258C with a 38 mV/g Scale Factor unless otherwise noted)
6
5.0
0
TYPICAL OUTPUT RESPONSE IN dB
4.0
ERROR FROM IDEAL %
3.0
2.0
1.0
0
1.0
2.0
3.0
4.0
6
PACKAGE
RESONANCE
12
18
24
30
BEAM
RESONANCE
36
42
48
5.0
4.0
4.5
5.0
5.5
POWER SUPPLY VOLTAGE
6.0
100
1k
FREQUENCY Hz
10k
30
2.5
2.0
20
ZERO g DRIFT mV
1.5
ERROR %
1.0
0.5
0
0.5
10
10
1.0
20
1.5
2.0
4.0
4.5
5.0
SUPPLY VOLTAGE
5.5
30
40 30 20 10 0
6.0
10 20 30 40 50 60 70 80 90 100
TEMPERATURE 8C
2.4
600g
SUPPLY CURRENT mA
2.2
+1058C
500g
50g
500g INPUT
+258C
400g
40g
1.8
300g
408C
1.2
4.5
5
5.5
SUPPLY VOLTAGE Volts
30g
OUTPUT RESPONSE
1.6
1.4
200g
20g
100g
10g
0g
0g
TIME 0.2ms/Div
REV. 0
60g
ADXL150/ADXL250
1.6
20
1.4
10
RMS NOISE mg / Hz
15
5
0
5
NOISE FROM INTERNAL CLOCK
10
1.2
1.0
0.8
15
20
0.6
4.0
0
10
12
TIME ms
14
16
18
4.5
20
5.0
5.5
SUPPLY VOLTAGE Volts
6.0
30
SELF-TEST
OUTPUT
(0.2V/DIV)
SELF-TEST
INPUT
(2V/DIV)
25
20
15
10
0
0
10
12
TIME ms
14
16
18
20
100
1000
FREQUENCY kHz
10000
2.50
2.25
2.00
1.75
NOISE mg rms
1.50
1.25
1.00
0.75
0.50
0.25
10
100
FREQUENCY Hz
1k
2k
REV. 0
ADXL150/ADXL250
THEORY OF OPERATION
The ADXL150 and ADXL250 are fabricated using a proprietary surface micromachining process that has been in high
volume production since 1993. The fabrication technique uses
standard integrated circuit manufacturing methods enabling all
the signal processing circuitry to be combined on the same chip
with the sensor.
The surface micromachined sensor element is made by depositing polysilicon on a sacrificial oxide layer that is then etched
away leaving the suspended sensor element. Figure 14 is a
simplified view of the sensor structure. The actual sensor has
42 unit cells for sensing acceleration. The differential capacitor
sensor is composed of fixed plates and moving plates attached to
the beam that moves in response to acceleration. Movement of
the beam changes the differential capacitance, which is measured
by the on chip circuitry.
ACCELERATION
BEAM
PLATE
CAPACITANCES
FIXED
PLATE
UNIT CELL
ANCHOR
VOUT = VS /2 (Sensitivity
VS
a)
5V
Both the ADXL150 and ADXL250 have a 2-pole Bessel switchedcapacitor filter. Bessel filters, sometimes called linear phase
filters, have a step response with minimal overshoot and a maximally flat group delay. The 3 dB frequency of the poles is
preset at the factory to 1 kHz. These filters are also completely
self-contained and buffered, requiring no external components.
REV. 0
ADXL150/ADXL250
Increasing the iMEMS Accelerometers Output
Scale Factor
For the highest possible accuracy, an external trim is recommended. As shown by Figure 20, this consists of a potentiometer, R1a, in series with a fixed resistor, R1b. Another option is
to select resistor values after measuring the devices scale factor
(see Figure 17).
AC Coupling
If a dc (gravity) response is not requiredfor example in vibration measurement applicationsac coupling can be used between the accelerometers output and the external op amps
input as shown in Figure 16. The use of ac coupling virtually
eliminates any zero g drift and allows the maximum external
amp gain without clipping.
Resistor R2 and capacitor C3 together form a high pass filter
whose corner frequency is 1/(2 R2 C3). This filter will reduce
the signal from the accelerometer by 3 dB at the corner frequency, and it will continue to reduce it at a rate of 6 dB/octave
(20 dB per decade) for signals below the corner frequency.
Capacitor C3 should be a nonpolarized, low leakage type.
If ac coupling is used, the self-test feature must be monitored at
the accelerometers output rather than at the external amplifier
output (since the self-test output is a dc voltage).
TP
(DO NOT CONNECT)
5
+VS
14
+VS
2
ADXL150
C1
0.1mF
5kV
GAIN
AMP
SENSOR
R3
R1
10
DEMODULATOR
BUFFER
AMP
25kV
CLOCK
2
9
COM
SELF-TEST
OFFSET
NULL
+VS
2
OP196
C2
0.1mF
VOUT
6
7
C4
0.1mF
R3
OUTPUT SCALE FACTOR = 38mV/g
R1
+VS
1MV
+VS
C1
0.1mF
14
+VS
2
ADXL150
+VS
5kV
GAIN
AMP
C3
SENSOR
R2
2
10
DEMODULATOR
BUFFER
AMP
25kV
VOUT
COM
SELF-TEST
OFFSET
NULL
OP196
3
CLOCK
9
C4
0.1mF
OUTPUT
+VS
2
+VS
2
C2
0.1mF
1M V
EXTERNAL AMP GAIN =
R2
FS RANGE
R2
625g
1MV
0.15mF
0.05mF
0.015mF 0.0075mF
612.5g
332kV
0.47mF
0.15mF
0.047mF 0.022mF
610g
249kV
0.68mF
0.22mF
0.022mF 0.01mF
REV. 0
ADXL150/ADXL250
TP
(DO NOT CONNECT)
5
+VS
14
+VS
2
ADXL150
C1
0.1mF
R2 (SEE NOTES)
+VS OR GND
5kV
GAIN
AMP
R3
100kV
R1
SENSOR
10
DEMODULATOR
C4
0.1mF
+VS
BUFFER
AMP
25kV
CLOCK
2
9
COM
SELF-TEST
OFFSET
NULL
+VS
2
OP196
3
C2
0.1mF
NOTES:
0g QUICK CALIBRATION METHOD USING RESISTOR R2 AND A +5V SUPPLY.
(a) WITH ACCELEROMETER ORIENTED AWAY FROM EARTHS
GRAVITY (i.e., SIDEWAYS), MEASURE PIN 10 OF THE ADXL150.
(b) CALCULATE THE OFFSET VOLTAGE THAT NEEDS TO BE NULLED:
VOS =(+2.5V VPIN10)(R3/R1).
2.5V (R3)
(c) R2 =
VOS
(d) FOR VPIN 10 > +2.5V, R2 CONNECTS TO GND.
(e) FOR VPIN 10 < +2.5V, R2 CONNECTS TO +VS.
VOUT
DESIRED
FS
OUTPUT
RANGE
SCALE FACTOR
EXT
AMP
GAIN
R1
VALUE
76mV/g
625g
2.0
49.9kV
100mV/g
620g
2.6
38.3kV
200mV/g
610g
5.3
18.7kV
400mV/g
65g
10.5
9.53kV
The device scale factor and zero g offset levels can be calibrated
using the earths gravity, as explained in the section calibrating
the ADXL150/ADXL250.
TP
(DO NOT CONNECT)
5
+VS
C1
0.1mF
14
+VS
2
ADXL150
5kV
GAIN
AMP
10
DEMODULATOR
SENSOR
VOUT
BUFFER
AMP
25kV
CLOCK
9
SELF-TEST
COM
C2
0.1mF
OFFSET
NULL
RIN AT PIN 8
30kV 610kV
+VS
200kV
REV. 0
ADXL150/ADXL250
DEVICE BANDWIDTH VS. MEASUREMENT
RESOLUTION
66mg
10mg
1mg
10
Table I.
6.6mg
1k
100
3dB BANDWIDTH Hz
2.0 rms
4.0 rms
6.0 rms
6.6 rms
8.0 rms
32%
4.6%
0.27%
0.1%
0.006%
The limiting resolution is predominantly set by the measurement noise floor, which includes the ambient background
noise and the noise of the ADXL150/ADXL250 itself. The level
of the noise floor varies directly with the bandwidth of the measurement. As the measurement bandwidth is reduced, the noise
floor drops, improving the signal-to-noise ratio of the measurement and increasing its resolution.
Alternatively, the signal-to-noise ratio may be improved considerably by using a microprocessor to perform multiple measurements and then to compute the average signal level.
Low-Pass Filtering
+VS
RT
200kV
0g TRIM
TP
(DO NOT CONNECT)
5
+VS
C1
0.1mF
14
5kV
R1b
R1a
75kV 50kV
GAIN
AMP
SENSOR
SELF-TEST
BUFFER
AMP
25kV
COM
R3
100kV
10
DEMODULATOR
CLOCK
R2
1MV
Cf
+VS
2
ADXL150
( )
660mg
100mg
( )
SCALE
FACTOR
TRIM
(OPTIONAL)
+VS
0.1mF
2
OFFSET
NULL
+VS
2
OP196
3
0.1mF
DESIRED
F.S.
OUTPUT
RANGE
SCALE FACTOR
EXT
AMP
GAIN
VOUT
R3
Cf (mF) Cf (mF) Cf (mF)
VALUE 100Hz 30Hz 10Hz
76mV/g
625g
2.0
200kV
0.0082 0.027
0.082
100mV/g
620g
2.6
261kV
0.0056 0.022
0.056
200mV/g
610g
5.3
536kV
0.0033 0.010
0.033
400mV/g
65g
10.5
1MV
Figure 20. One-Pole Post Filter Circuit with SF and Zero g Offset Trims
10
REV. 0
ADXL150/ADXL250
2.65
40.25
2.60
39.50
2.55
38.75
2.50
38.00
2.45
37.25
2.40
36.50
2.35
APPLICATION HINTS
ADXL250 Power Supply Pins
5.25 5.20 5.15 5.10 5.05 5.00 4.95 4.90 4.85 4.80 4.75
POWER SUPPLY VOLTAGE
R3
82.5kV
5
14
C1
0.1mF
+VS
2
ADXL150
GAIN
AMP
300Hz
C3
10
100Hz
0.082mF 0.01mF
30Hz
0.27mF
0.033mF
10Hz
0.82mF
0.1mF
DESIRED
F.S.
OUTPUT
RANGE
SCALE FACTOR
SELF-TEST
COM
OFFSET
NULL
R5
VALUE
+VS
2
OUTPUT
+VS
2
SCALING
AMPLIFIER
7
1/2
OP296
4
76mV/g
25g
2.0
200kV
100mV/g
20g
2.6
261kV
200mV/g
10g
5.3
536kV
400mV/g
5g
10.5
1MV
R5
11
2-POLE
FILTER
REV. 0
1/2
OP296
C2
0.1mF
EXT
AMP
GAIN
0.1mF
CLOCK
9
0.027mF 0.0033mF
C3
BUFFER
AMP
25kV
C4
+VS
R2
42.2kV
DEMODULATOR
C4
5kV
R1
82.5kV
SENSOR
35.75
TP
(DO NOT CONNECT)
+VS
SENSITIVITY
Cf =
Figure 22 shows how both the zero g offset and output sensitivity of the ADXL150/ADXL250 vary with changes in supply
voltage. If they are to be used with nonratiometric devices, such
as an ADC with a built-in 5 V reference, then both components
should be referenced to the same source, in this case the ADC
reference. Alternatively, the circuit can be powered from an
external +5 volt reference.
0g OFFSET
for various full-scale g levels and approximate circuit bandwidths. For bandwidths other than those listed, use the
formula:
R4
100kV
R6
1MV
+VS
200kV
0g TRIM
ADXL150/ADXL250
Additional Noise Reduction Techniques
14
14
14
0g
0g
(a)
(b)
14
+1g
(c)
1g
(d)
4.5
VOUT 50g
VOLTAGE Volts
4.0
3.5
VOUT = 0g
3.0
2.5
2.0
1.5
VOUT + 50g
1.0
0.04
0.08
0.12
0.16 0.20
TIME ms
0.24
0.28
0.32
0.5V
0.5
0
0.36
REV. 0
ADXL150/ADXL250
MINIMIZING EMI/RFI
Converter
Type
2n
Converter
SF
mV/Bit
Preamp in
(5 V/2n)
Gain
mV/g
FS
Range
in gs
System
Resolution
in gs (p-p)
8 Bit
256
19.5 mV
None
38
50
0.51
256
19.5 mV
76
25
0.26
256
19.5 mV
2.63
100
20
0.20
256
19.5 mV
5.26
200
10
0.10
1,024 4.9 mV
None
38
50
0.13
1,024 4.9 mV
76
25
0.06
1,024 4.9 mV
2.63
100
20
0.05
1,024 4.9 mV
5.26
200
10
0.02
4,096 1.2 mV
None
38
50
0.03
4,096 1.2 mV
76
25
0.02
4,096 1.2 mV
2.63
100
20
0.01
4,096 1.2 mV
5.26
200
10
0.006
10 Bit
12 Bit
REV. 0
Needs Op Amp
Needs Zero g Trim
Disadvantages:
Table III is a chart showing the required ADC resolution vs. the
scale factor of the accelerometer with or without a gain amplifier. Note that the system resolution specified in the table refers
13
ADXL150/ADXL250
to that provided by the converter and preamp (if used). It is
necessary to use sufficient post filtering with the accelerometer
to reduce its noise floor to allow full use of the converters resolution (see post filtering section).
+VS
The use of a gain stage following the accelerometer will normally require the user to adjust the zero g offset level (either by
trimming or by resistor selectionsee previous sections).
XL
+VS
ADC
VOUT
+VS
ADC
RF
XL
VOUT
INPUT
RESISTANCE
Cf
Cf
+VS
0g
OFFSET
ADJUST
R1
XL
VOUT
RF
ADC
VOS
NULL PIN
14
REV. 0
ADXL150/ADXL250
OUTLINE DIMENSIONS
Dimensions shown in inches and (mm).
C294984/98
14-Lead Cerpac
(QC-14)
0.390 (9.906)
MAX
14
0.419 (10.643)
0.394 (10.008)
0.291 (7.391)
0.285 (7.239)
1
7
PIN 1
0.300 (7.62)
0.195 (4.953)
0.115 (2.921)
0.020 (0.508)
0.004 (0.102)
0.215 (5.461)
0.119 (3.023)
0.050
(1.27)
BSC
0.020 (0.508)
0.013 (0.330)
0.0125 (0.318)
0.009 (0.229)
88
08
0.050 (1.270)
0.016 (0.406)
PRINTED IN U.S.A.
SEATING
PLANE
0.345 (8.763)
0.290 (7.366)
REV. 0
15