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Fraunhofer IPMS
Agenda
Capacitive Micromachined Ultrasonic Transducers (CMUT)
What is ultrasound
History of CMUTs
Conclusion
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What is ultrasound?
S am ple applications :
Medical imaging
Non-destructive testing
Level sensors
Speed sensors
Etc
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Piezoelectric
Trans ducer
CMUT
Accepted technology
CMOS integration
Reliability(*)
RoHS compatible
Tight parameter specification
High temp. capable (ca. 800 C)
Scalability (size, shape, array, 2D)
Axial resolution
(*) Two
History of CMUTs
Khuri-Yakub, http://www-kyg.stanford.edu/khuriyakub/opencms/en/research/cmuts/History/index.html
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Khuri-Yakub, 2009
Degertekin, 2012
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Reference 2
Reference 1
1.
2.
Reference 2
Fraunhofer IPMS
Almira Ramanaviciene, Darius Virzonis, Gailius Vanagas and Arnas Ramanavicius, Capacitive
micromachined ultrasound transducer (cMUT) for immunosensor design, Analyst, 2010, 135, 1531
DOI: 10.1039/c0an00104j
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Reference 1
1.
2.
Omer Naor et al, Towards multifocal ultrasonic neural stimulation II: design
considerations for an acoustic retinal prosthesis, J. Neural Eng. 9 026006, 2012
Menz, Michael D - Oralkan, Omer - Khuri-Yakub, Pierre T - Baccus, Stephen A, Precise
neural stimulation in the retina using focused ultrasound, The Journal of
neuroscience: the official journal of the Society for Neuroscience, Vol. 33, No. 10
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Conclusions
IPMS has one of the few fabrication facilities around the world, where it
is possible to produce large MEMS arrays at tight tolerances.
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Thanks!
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