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I. INTRODUCTION
Fig. 1. Cross sectional view of (a) the conventional I-MOS and (b) the UIMOS.
Fig. 2. Reproduction of the simulated ID vs. VG plot of a conventional Pchannel I-MOS transistor in Fig. 2 of [18] for calibrating the TCAD setup
used for analysis of the UI-MOS transistor. The device is simulated at VS
= 7.8 V and VD = 0 V.
Fig. 4: (a) Energy Band diagram in the UI-MOS silicon film, measured 1
nm below the SiO2-Silicon interface, along the x-axis in the presence and
absence of negatively charged biomolecules for VG = -1 V, VS = 7.0 V and
VD = 0 V. The drain, gate, intrinsic and source regions are marked in the
figure. (b) Energy Band diagram in the underlap region marked in Fig.
4(a) to highlight the steep transition at the edge of the underlap region in
presence of charged biomolecules.
VG = - 3.2 V, which is very close to the turn-ON voltage (~ 3.5 V) for the UI-MOS in the absence of biomolecules. The
immobilization by the negatively charged biomolecules causes
an increased hole concentration in the channel under the
underlap region resulting in a reduction in the resistance of the
portion of the channel under the gate electrode. The channel of
the UI-MOS can be considered to be comprising of two
resistive regions in series viz. the portion of the channel under
the gate (LG) and the intrinsic (LIN) regions. Therefore, as the
resistance of the channel under the gate reduces due to the
increasing
immobilization
by
negatively
charged
biomolecules, a higher proportion of V SD appears across the
intrinsic region of the channel leading to a higher electric field
in this region. This leads to impact ionization at a lower
negative VG compared to the case when no biomolecule was
present. This explains the VG shift due to the presence of
charged biomolecules.
The increased hole accumulation in the channel due to the
negative biomolecular charges significantly affects the UIMOS sensitivity parameter Scurrent, as shown in Fig. 6. We had
seen previously in Fig. 3 that prior to immobilization by the
biomolecules, the UI-MOS is in subthreshold regime for VG
values up to ~-3.5 V. However, the presence of negatively
charged biomolecules causes an abrupt turn-ON of the UIMOS at VG ~-1 V. This abrupt turn-ON, characteristic of a
steep subthreshold slope device like the UI-MOS, explains the
reason for the large value of Scurrent (~107) at VG ~-1.1 V and is
significantly higher than the conventional FET based
biosensors [2]. Thus the UI-MOS biosensor is extremely
sensitive to the presence of biomolecules in the underlap
region.
B. Impact of Increasing Charge Density
Fig. 7 shows VG and the peak value of Scurrent for a range
of biomolecular charge densities [20] in the underlap region.
As previously mentioned in section III, the increasing charge
V. CONCLUSIONS
We have proposed and analyzed the concept of an underlap
impact-ionization MOS (UI-MOS) biosensor. The UI-MOS
biosensor is compatible with existing CMOS process
technology and the presence of a gate electrode enables
individual addressing in a sensor array [2], [7]-[8]. Thus, the
UI-MOS biosensor is a good candidate for integration with
read-out circuitry for application in point of care testing
systems. Our analysis of the UI-MOS as a biosensor
incorporates detailed TCAD modeling of the electrolyte
including the impact of electrostatic screening by ions in the
electrolyte on the device performance. The UI-MOS exhibits
very high sensitivity (~107) for label-free biomolecule
detection even in a wet environment. This is a significant
improvement over conventional underlap FET biosensors,
where a reduced sensitivity is observed in measurements done
in wet environment when compared with measurements with
air ambient [21]. The very high sensitivity of the UI-MOS in
the subthreshold regime is due to its steep subthreshold slope.
The device also shows a good sensitivity even in the linear
regime. The sensitivity of the UI-MOS is relatively less
impacted by ionic screening effects thus offering an advantage
over nanowire biosensors which can be significantly impacted
by ionic screening [23]. The UI-MOS is demonstrated to
exhibit a high sensitivity across a range of values for LG and
LU / LG. An important feature of the UI-MOS is that it
addresses the issue of reduced sensitivity with increasing
oxide thickness observed in FET based biosensors [3]. This
eliminates the need to manufacture very thin gate oxide
transistors. The very high sensitivity, possibility of low cost
fabrication, and the ability to integrate with read-out circuitry
make the UI-MOS based biosensor an attractive alternative to
the existing FET based biosensors.
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