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MODELS
ENERGY-BASED MACRO
MODELS
Source
Senturia:
Microsystem
Design
Source
Senturia:
Microsystem
Design
Microsystems
Microsystems are low-power devices in greatly
confined spaces
RESULT: Strong coupling of physical quantities
between the components of a microsystem
In addition to component modelling and
simulation also system level simulation using
macromodels is needed
Macromodel
Also called lumped parameter model
Analytical, not numerical (FEM)
Exhbits correct dependencies on device geometry
and constitutive properties
Covers dynamic and quasi-static behavior
Simple to use, e.g. network analogy
Easy to connect to system level simulators
Agrees with 3D multiphysics simulation
Generalized variables
Models of transducers
Plate capacitance
C =
A
d
L=
A
d
Inductance
Model of a capacitor
Models of transducers
Models of transducers
Magnetic levitation
Magnetic levitation
MAGNETIC LEVITATION
Magnetic levitation
Magnetic levitation
Mechanical model
Mz = Fm Mg
Virtual work principle
W = Fm z
Fm =
W
W dW
or Fm = lim
=
z 0 z
z
dz
Force
L( z )i 2
W=
2
dW dL( z ) i 2
Fm =
=
dz
dz 2
Electrical model
d
( L( z (t ))i )
dt
di
dL( z (t ))
= Ri + L( z (t )) + i
dt
dt
di
dL dz
=i + L( z (t )) + i
dt
dz dt
E = Ri +
Theoretically
AN 2
L = 0
2z
A = Cross-sectional area
N = Number of turns
From measurements
2.1 104
L = 0.1
(H)
z
Magnetic levitation
Force-gap characteristic
State-space model
Fm
g
M
di E R
i dL dz
= i
dt L L
L dz dt
z=
1 dL
Fm = i 2
2 dz
k
L = k1 2 (H); k1 = 0.1; k2 = 2.1 10 4
z
dL k2
= 2
dz z
State-space model
x1 = x2
Fm
k2 x32
x2 =
g =
g
2
M
2M x1
x3 =
1 dL
E R
E R
k2 x2 x3
x3
x2 x3 = x3
L L
L dz
L L
L x12
k2 = 2.1104
Magnetic levitation
Model of a capacitor
V
(1 + g ( x ))
R0
Polynomial form
P(x) = P0(1+f(x))
1
1
= (1 + g ( x ))
P( x ) P0
V=iR(x)=iR0(1+f(x)) = V0 + V0 f(x)
V
i = (1 + g ( x ))
R0
V12=i R0
x(t )) 0
=
C ( x(t ))
d 1
d
1
=
=
+
i
d
i
d
i
d
(
)
(
)
(
)
dt
dt C ( x(t )) 0
C ( x(t )) dt 0
dt C ( x(t )) 0
A A d
d
=
= C0
C ( x) =
dx d dx
dx
dV p
Domains of simulation
SOLENOID
LAGRANGES EQUATION
MICROPHONE
MICROMACHINED MICROPHONE
ELECTROMECHANICAL SYSTEM
WITH CAPACITIVE COUPLING
ENERGY EXPRESSIONS
RESULTING MODEL