MSQ

Rotary Table/Rack & Pinion Style
Series MSQ
Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200
CRB2
-Z
CRBU2
CRB1
MSU
CRJ
CRA1
-Z
CRA1
CRQ2
MSQ
MSZ
CRQ2X
MSQX
MRQ
D-
297
Compact Rotary Table with Low Table Height

Large rolling element
bearing
3 to 4 times higher axial load
Easy mounting of workpiece.

Table I.D/O.D tolerances
Basic type: MSQB H9/h9
High precision type: MSQA H8/h8
Table inside and outside diameters

For alignment of rotation center and work piece
(compared with series CRQ)
Positioning pin hole

Hollow axis
Rolling bearing
Accommodates wiring and piping

for equipment mounted on the table
Positioning
pin hole
For position of
rotation direction
Hollow axis
Size
1
2
3
Hollow axis 3.5 3.8 5
Size
10
Hollow axis 6
Pivoting angle
adjustment range:
20
9
Basic type
7
6
30 50 70 100 200
12 13 16 19 24
MSQB
0 to 190
With internal
shock absorber
2 to 5 times more kinetic energy
(compared with an adjustment bolt)
Easy mounting of body

Reference dia: Boss, Hole
Mounting from 2 directions
Movement in direction of table's

radial thrust:
0.01mm or less
By using high precision bearing, the movement in the

direction of tables radial thrust is reduced.
Pin hole
High precision type
High precision type
MSQA
High precision
bearing
Reference diameter
(boss)
Reference diameter
(hole)
Pin hole
d
e
298
n
o
c
ti
d
id
e
S
po
on
directi
rt
ir
Front
po
po
rt
rt
Si
d
Piping position can be selected

accommodate mounting
conditions
ir
A ecti
po on
rt
Piping from 2 directions (front and side) is possible
Rotary Table
Series MSQ
Rack & Pinion Style
Small sizes 1, 2, 3, and 7

Small size and light weight
CRB2
-Z
CRBU2
CRB1
MSU
CRJ
Measure
C
mm
Size
Model
1
2
3
7
MSQB1A
MSQB2A
Full size (Picture of MSQB1A)
50.5
28
25
16
56
30
28
18
MSQB3A
60
34.5
30.5
20.5
MSQB7A
73.5
41
34.5
23
Weight (g)
CRA1
70
105
150
250
CRQ2
MSQ
Variety of installation options for space saving
MSZ
Offers maximum space saving installation by taking advantage of the compact body, space saving wiring and piping.
Easy center alignment at mounting Wiring and piping can be selected according to mounting conditions
Free mount
Top mounting
Bottom mounting
Reference dia (Boss)
Side mounting
CRA1
-Z
Example of auto switch and speed controller mounting
CRQ2X
MSQX
MRQ
Pin hole
Reference dia (Hole)

Pin hole
External shock absorber types

Total length shortened
4 to 10 times more allowable kinetic energy
(Compared with internal shock absorber type)
2 types of shock absorbers are available, for low energy and

high energy.
Longitudinal mounting space is reduced because there is

no protrusion from adjustment bolts or internal shock absorbers.
Allowable kinetic energy comparison (for size 30)

1
Moment of inertia (kgm2)
With external shock absorber

0.1
nerg
igh e
For h
w
For lo
Table height is the same for both types with adjustment bolts or internal shock absorbers.
energ
Rotation angle:
90, 180
0.01
With internal shock absorber
Left / Right symmetric type

A port
With adjustment bolt
0.001
Standard type
90
B port
B port
0.0001
0.2
0.3
0.4
0.5
0.6
0.7
0.8 0.9 1.0
180
Symmetric type
Rotation time (s/90)

A port
299
D-
Series MSQ
Table Displacement (Reference values)
100
The following graphs show the displacement

at point A, which is 100 mm apart from the
center of rotation, where the load is applied.
Load
Displacement
MSQ1A
MSQ10
(Ba
1A
QB
80
MS
60
40
(H
1A
QA
MS
20
1
pe)
n ty
isio
rec
p
igh
Displacement m
Displacement m
e)
typ
sic
100
5
Load N
h
0 (Hig
MSQA1
5
10
n type)
precisio
15
Load N
20
25
30
MSQ20
80
B2
Q
MS
60
ic
as
(B
40
cision
igh pre
A (H
SQA2
20
2
300
e)
typ
Displacement m
100
Displacement m
350
40
30
20
10
e)
typ
B1
Q
MS
MSQ2A
6
Load N
type)
10
e)
yp
ic t
s
(Ba
B2
250
Q
MS
200
190
40
30
20
10
MSQA20
12
ision type
(High prec
10
20
30
Load N
40
50
MSQ30
MSQ3A
3A
B
SQ
80
c ty
si
(Ba
60
40
igh
3A (H
pe)
ion ty
precis
A
MSQ
20
2
e)
300
pe)
Displacement m
100
Displacement m
400
ic
s
Ba
ic
as
250
12
14
16
150
130
50
18
(B
3
QB
200
MSQA30
8
10
Load N
typ
10
ision type
(High prec
20
30
40
Load N
50
60
70
MSQ50
MSQ7A
350
7A
QB
MS
80
pe
ic ty
60
MS
n
cisio
pe)
ty
re
hp
Hig
A(
7
QA
40
300
(Ba
Displacement m
Displacement m
100
20
250
sic
200
150
300
10 12 14
Load N
16
18
20
22
24
120
50
0
e)
typ
B5
Q
MS
MSQA50
0
a
(B
20
ion type)
(High precis
40
60
Load N
80
100
120
Series MSQ

100
Arm
Load
Displacement
80
80
70
70
60
50
40
30
80
100
120
CRA1
-Z
30
10
60
Load N
CRJ
40
10
40
MSU
50
20
20
CRB1
60
20
CRBU2
MSQB100
Displacement m
Displacement m
MSQB70
CRB2
-Z
CRA1
0
20
40
60
80
100 120
Load N
140
160
CRQ2
180
MSQ
MSQB200
MSZ
90
Displacement m
80
CRQ2X
MSQX
70
60
MRQ
50
40
30
20
10
0
50
100
150
Load N
200
250
300
Rotation Accuracy: Displacement Values at 180 (Reference values)

Rotating amount of table top
Rotating amount of table side
mm
Measuring plate
MSQA
MSQB
Rotating amount of table top
0.03
0.1
Rotating amount of table side
0.03
0.1
Values in the table are actual values and not guaranteed values.
D-
301
Series MSQ
Size: 1, 2, 3, 7
How to Order
MSQA 1 A
MSQB 1 A
High precision type
Basic type
M9BW
M9BW
Number of auto switches
Size
Nil
S
n
1
2
3
7
Auto switch type

Without auto switch (built-in magnet)
Nil
Refer to the table below for auto switch types.
The auto switch is included in the package (unmounted).
2 pcs.
1 pc.
n pcs.
Port location
End port
Moisture
Control Tube
Series IDK
Nil
When operating an actuator with a small diameter

and a short stroke at a high frequency, the dew
condensation (water droplet) may occur inside the
piping depending on the conditions.
Simply connecting the moisture control tube to the
actuator will prevent dew condensation from occurring. For details, refer to Series IDK in the
WEB catalog.
Front port
The port location cannot be changed

after the delivery of the product.
Type
Special function
Electrical
entry
Indicator
light
Applicable Auto Switches/Refer to pages 807 to 856 for detailed auto switch specification.
Auto switch model
Load voltage
Wiring
(Output)
DC
AC
Perpendicular
M9NV
M9N
F8N
M9PV
M9P
F8P
M9BV
M9B
F8B
M9NWV M9NW
M9PWV M9PW
M9BWV M9BW
M9NAV M9NA
M9PAV M9PA
M9BAV M9BA
3-wire (NPN)
Solid state auto switch
5 V, 12 V
3-wire (PNP)
12 V
2-wire
Grommet Yes
Diagnostic indication
(2-color display)
Water resistant
(2-color indication)
3-wire (NPN)
3-wire (PNP)
2-wire
3-wire (NPN)
3-wire (PNP)
2-wire
24 V
5 V, 12 V
12 V
5 V, 12 V
12 V
In-line
Lead wire length (m)

0.5
(Nil)
1
(M)
3
(L)
5
(Z)
Pre-wired
connector
Applicable load
IC
circuit
IC
circuit
Relay,
PLC
IC
circuit
Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction.
Auto switches marked with are made to order specification.
Lead wire length symbols: 0.5 m Nil (Example) M9NW
1 m M (Example) M9NWM
3 m L (Example) M9NWL
Refer to pages 843 and 844 for the details of solid
5 m Z (Example) M9NWZ
state auto switch with pre-wired connector.
Note 1) When using D-F8, mount it at a distance of 10 mm or more from magnetic substances such as iron.
Auto switches are shipped together, (but not assembled).
302
Series MSQ
Specifications
1
Size
Fluid
Maximum operating pressure
0.7 MPa
Minimum operating pressure
CRB2
-Z
0.1 MPa
0 to 60C (with no freezing)
Ambient and fluid temperature

Cushion
Basic type
Air (non-lube)
None
CRBU2
Rubber bumper
0 to 190
Angle adjustment range
CRB1
190
Maximum rotation
Cylinder bore size
Port size
10
M3 x 0.5
12
MSU
M5 x 0.8
CRJ
Allowable Kinetic Energy and Rotation Time Adjustment Range
High precision type
Symbol
Size
Allowable kinetic energy (J)
1
2
3
7
0.001
CRA1
-Z
Rotation time adjustment range for suitable operation (s/90)

0.2 to 0.7
0.0015
CRQ2
0.002
0.006
CRA1
0.2 to 1.0
Note) If operated where the kinetic energy exceeds the allowable value, this may cause damage to the
internal parts and result in product failure. Please pay special attention to the kinetic energy levels
when designing and during operation to avoid exceeding the allowable limit.
Weight
(g)
Size
Basic type
75
105
150
250
High precision type
80
115
165
265
MSQ
MSZ
CRQ2X
MSQX
MRQ
Note) Excluding the weight of auto switches
Clean Series
Prevents dispersion of the particles generated inside of the product into the clean room by sucking them out of the vacuum port on the body side.
How to Order
Specifications
11 MSQ B 1 A E M9BW S
Particle generation grade Suction flow rate (example)
Clean Series
Vacuum type
A
B
Number of
auto switches
Auto switch
High precision type

Basic type
Nil
E
A
1 L/min (ANR)
Note 1) Please refer to Pneumatic Clean Series

catalog for further details.
Port location
Size
1
2
3
7
Grade 1 Note 1)
11-MSQA is identical to the high precision type and

11-MSQB is identical to the basic type.
End port
Front port
Dimensions
Clean series products do not have a hollow axis.
Basic type
11-MSQBA
PA
(Vacuum port)
BK
High precision type

11-MSQAA
Size
BK
PA
1
2
3
7
5.3
M3 x 0.5
7.5
M3 x 0.5
9.5
M3 x 0.5
M5 x 0.8
D-
Dimensions other than above are identical to

the basic type and the high precision type.
303
Series MSQ
Rotation Direction and Rotation Angle
The rotary table turns in the clockwise direction when the A port is pressurized, and in the counter-clockwise direction when the B port is pressurized.
By adjusting the adjustment bolt, the rotation end can be set within the range shown in the drawing.
Counter-clockwise
er
-c
en lock
d a wis
d ju e
stme
nt range 95
22.5
Adjustment bolt B
(For clockwise
rotation end adjustment)
e
wis
lo
Clock
c
t
ju kwi
un on
stm se
Cootati
en rotation e d
r
n
19
t ra
nge 95
ge
ran
n
o
Maximum rotati
C d
a
A port
Clockwise
B port
B port
Adjustment bolt A
(For counter-clockwise
With adjustment bolt, internal shock absorber

Adjustment angle per rotation of
angle adjustment screw
8.2
10.0
10.9
10.2
Size
1
2
3
7
Note) The drawing shows the rotation range of the positioning pin hole.
The pin hole position in the drawing shows the counter-clockwise
rotation end when the adjustment bolts A and B are tightened
equally and the rotation is adjusted 180.
Rotation Range Example

Various rotation ranges are possible as shown in the drawings below using adjustment bolts A and B.
(The drawings also show the rotation ranges of the positioning pin hole.)
Adjustment amount by
adjustment bolt A

Adjustment bolt A
Adjustment bolt B
(For clockwise
adjustment bolt B
Pin hole rotation range
190 (Maximum) Rotation
180 Rotation
adjustment bolt A
90 Rotation
304
Adjustment amount
by adjustment bolt B
Adjustment amount
Adjustment amount
adjustment bolt A
90 Rotation
90 Rotation
adjustment bolt A
Series MSQ
Construction
CRB2
-Z
CRBU2
CRB1
MSU
CRJ
o
@2
q
!8
!0
!8
!7
@0
!3
u
!4
@1
!5
!6
@4
!1
@3
CRA1
-Z
CRA1
!2
CRQ2
!7
MSQ
MSZ
CRQ2X
MSQX
MRQ
MSQAA
(High precision type)
!9
Component Parts
No.
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
Description
Body
Cover
Plate
Seal
End cover
Piston
Pinion
Hexagon nut
Adjustment bolt
Cushion pad
Table
Bearing retainer
Magnet
Size: 3, 7
Wear ring
Piston seal
Deep groove ball bearing
Basic type
Deep groove ball bearing
High precision type
Special bearing
Size: 1 to 3
Round head Philips screw No.0
Basic type
Size: 7
Round head Philips screw
Round head Philips screw High precision type
Round head Philips screw No.0
Hexagon socket head set bolt
Parallel pin
Seal washer
Hexagon socket head set screw
O-ring
Material
Aluminium alloy
Aluminium alloy
Aluminium alloy
NBR
Aluminium alloy
Stainless steel
Chrome molybdenum steel
Steel wire
Steel wire
Rubber material
Aluminium alloy
Aluminium alloy
Resin
NBR
Bearing steel
Note
Anodized
Anodized
Chromated
Anodized
Anodized
Anodized
Bearing steel
Steel wire
Steel wire
Stainless steel
Carbon steel
NBR
Stainless steel
NBR
D-
23 The hexagon socket head set screws are tightened at different positions
depending on the position of the connecting port.
The component parts cannot be shipped individually.
305
Series MSQ
Dimensions/Size 1, 2, 3, 7
Basic type/MSQBA
BJ
High precision type/

MSQAA
2 x JF depth JG
WB
BI
DI
DH
DJ
ctive
1
1
th W
XA
dep
WA
4 x JJ depth JK
FE
HA
(UV)
effe
8 x WD depth WE
(Circumference: 8 equivalents)
2 x J through
JA depth of counter bore JB
22.5
BE
DL
BD
BA
Effective depth FB
DD
D
DE
1
2
3
7
DI
DJ
DL
FE HA UV
27h8 27.5h8 14H8 4.5H8 8.2 13.5 29.5

29h8 29.5h8 14H8 5 H8 9.7 15.5 33.5
33h8 34h8 17H8 6 H8 9.7 15.5 36
39h8 40h8 20H8 7 H8 9.5 16.5 39.5
2xP
End port
(Plugged with a hexagon
socket head set screw
when front ports are used.)
(through)
AX
BB
S
AU
(Max. approx. SU)
BH
2xP
Front port
when end ports are used.)
DG
AV
SF
A
(UU)
BC
DF
JD
AY
SD
Effective
depth 1.2
AW
2 x JU
Size DH
FD
FA
2 x JC
Depth from bottom
(not including JD) JE
XB effective depth XC
(mm)
WF
BG
(mm)
AU AV AW AX AY BA BB
YA
1
2
3
7
A
28
2.8 11
8.2 5.5
1.5
35
39.6
30
3.6 12.6
9.2 7
37
45.1
34.5 4.4 15.5 10.5 8
2.5
43
46.7
Size
41
50
59.2
YB effective depth YC
BI
BJ
8.2
30
4.5 27h9 27.5h9 14H9 3.5 4.5H9 4.8
9.2
35
4.8 18.4 12.2 10
(mm)
Size BC BD BE BG BH
1
2
3
7
11
DD DE DF DG FA FB
FD
JA
JB
JC
JD
JE
JF
3.7
JG
3.3
3.5
M4 x 0.7
2.2
5.3
M4 x 0.7
4.5 29h9 29.5h9 14H9 3.8 5 H9 5.3
2.5
4.2 10
3.3
3.5
M4 x 0.7
2.2
5.3
M4 x 0.7
4.5
32
17
5.5
34
18.5 12.6
5.5
38
23
15.5 10.5
40
4.5 33h9 34 h9 17H9 5
6 H9 5.3
2.5
4.2 10
4.2
7.5
4.5
M5 x 0.8
2.5
M4 x 0.7
5.5
45
30
18.4 12.2
50
7 H9 6.5
2.5
4.5 11.5 4.2
7.5
4.5
M5 x 0.8
2.5
M5 x 0.8
39h9 40 h9 20H9 6
(mm)
Size
1
2
3
7
306
JJ
JK
JU
SD SF SU UU WA WB WC
M3 x 0.5 3.5
M3 x 0.5 M3 x 0.5 16
50.5 10.8 24.4 9.4 25
M3 x 0.5 3.5
M4 x 0.7 M3 x 0.5 18
56
M3 x 0.5 3.5
M5 x 0.8 M3 x 0.5 20.5 60
M4 x 0.7 4.5
M6 x 1
M5 x 0.8 23
WD
WE WF XA XB XC YA YB YC
20 22.5 2H9
11
2H9
10
2H9
M3 x 0.5 5.3
21 24.5 2H9
11.5 2H9
11.8 30.5 12
2H9
M3 x 0.5 5.3
25 27
2H9
13.5 2H9
73.5 15.4 37.4 14.9 34.5 14
3H9
M4 x 0.7 6.5
29 32.5 3H9
15.5 3H9
13.4 26.2 11.3 28

15.2 31
9.5 2H9
M3 x 0.5 4.8
Series MSQ
Size: 10, 20, 30, 50, 70, 100, 200

CRB2
-Z
How to Order
CRBU2
CRB1
Size
10
20
30
50
MSU
CRJ
High Precision Type
MSQ A 10 A
M9BW
Basic Type
MSQ B 10 A
M9BW
CRA1
-Z
CRA1
CRQ2
Thread type
Size
End port type

Nil
M5
Nil
Rc 1/8
-XF
G 1/8
-XN
NPT 1/8
10
20
30
50
70
100
200
A
R
MSQ
Size
10, 20
30, 50,
70, 100,
200
MSZ
CRQ2X
MSQX
Side ports are all M5.
MRQ

Nil
S
n

2 pcs.
1 pc.
n pcs.
Auto switch type

Nil
Without auto switch (built-in magnet)
Reed auto switch
Special function
(2-color display)
Water resistant
Electrical
entry
Indicator
light
Type
Load voltage
Wiring
(Output)
3-wire (NPN)
3-wire (PNP)
2-wire
3-wire (NPN)
Grommet Yes 3-wire (PNP)
2-wire
3-wire (NPN)
3-wire (PNP)
2-wire
3-wire
Yes (NPN equiv.)
Grommet
2-wire
No
DC
Auto switch model

AC
Perpendicular
M9NV
M9N
M9PV
M9P
M9BV
M9B
M9NWV M9NW
M9PWV M9PW
M9BWV M9BW
M9NAV1 M9NA1
M9PAV1 M9PA1
M9BAV1 M9BA1
5 V, 12 V
12 V
24 V
5 V, 12 V
12 V
5 V, 12 V
12 V
5V
24 V
12 V
A96V
A93V2
100 V
100 V or less A90V
In-line

Pre-wired
0.5 1 3 5
connector
(Nil) (M) (L) (Z)
Applicable load
A96
IC
circuit
A93
A90
IC circuit
Relay,
PLC
IC
circuit
IC
circuit
Relay,
PLC
IC
circuit
1 Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction.
2 1 m type lead wire is only applicable to D-A93.
3 m L
(Example) M9NWL
5 m Z
(Example) M9NWZ
Auto switches marked with a are produced upon receipt of orders.
D-

307
Series MSQ
Specifications
10
Size
20
30
50
Maximum With adjustment bolt

operating
pressure With internal shock absorber
Minimum Basic type
operating
pressure High precision type 0.2 MPa
Basic type/MSQB
Cushion
200
Note 1)
0.1 MPa
0.1 MPa
Rubber bumper
Shock absorber
Shock absorber RBA0805

model
-X692
RBA1006-X692
RBA1411
-X692
RBA2725
-X821
Note 2)
190
Maximum rotation
Port size
RBA2015-X821
0 to 190

Cylinder bore size
Symbol
100
1 MPa
0.6 MPa
High precision type/MSQA
70
Air (non-lube)
Fluid
15
18
21
25
M5 x 0.8
End ports
28
32
40
Rc 1/8, G 1/8, NPT 1/8

M5 x 0.8
Side ports
Note 1) The maximum operating pressure of the actuator is restricted by the maximum allowable thrust
of the shock absorber.
Note 2) Be careful if the rotation angle of a type with internal shock absorber is set below the value in the
table below, the piston stroke will be smaller than the shock absorber's effective stroke, resulting
in decreased energy absorption ability.
Size
Minimum rotation angle that will not allow
decrease of energy absorption ability
10
20
30
50
70
100 200
52
43
40
60
71
62
82
The service life of the shock absorber may be different from the rotary table body depending on
the operating conditions. Refer to Specific Product Precautions for the suitable replacement
period.
End ports
Side ports

Allowable kinetic energy (J) Note 1)
Rotation time adjustment range for stable operation (s/90)
Size
With
adjustment bolt
With
internal shock absorber
10
20
30
50
70
100
200
0.007
0.039
0.025
0.116
0.048
0.116
0.081
0.294
0.240
1.100
0.2 to 1.5
0.320
1.600
0.2 to 2.0
0.560
2.900
0.2 to 2.5
With
adjustment bolt
With Note 2)
internal shock absorber
0.2 to 1.0
0.2 to 0.7
0.2 to 1.0
Note 1) If operated where the kinetic energy exceeds the allowable value, this may cause damage to the
internal parts and result in product failure. Please pay special attention to the kinetic energy
levels when designing and during operation to avoid exceeding the allowable limit.
Note 2) When the rotation time of the type with an internal absorber is set longer than the time shown in
the table above, energy absorption of the shock absorber greatly decreases.
Weight
(g)
Size
10
20
30
50
70
100
200
500
940
1230
1990
2880
4090
7580
510
940
1230
2010
2890
4100
7650
High precision With adjustment bolt

type
530
1040
1350
2150
540
1040
1350
2170
Basic type
Note) Values above do not include auto switch weight.
308
Series MSQ

The rotary table turns in the clockwise direction where the A port is pressurized, and in the counter-clockwise direction when the B port
is pressurized.
By adjusting the adjustment bolt, the rotation end can be set within the ranges shown in the drawing.
The rotation angle can also be set on a type with internal absorber.
o
Cl dj
a
c
us kw
tm ise
en rot
t ra ation
nge end
95
Size
10
20
30
50
70
100
200
10.2
7.2
6.5
8.2
7.0
6.1
4.9
k
Cloc
e
wis
g
an
CRA1
CRB1
MSU
CRJ
CRA1
-Z
Clockwise

C
ro oun
ta te
tio r-c
n e lock
wi
nd
19
adju se
0
stment range 95
Adjustment bolt B
(For clockwise
CRBU2
22.5
Adjustment bolt A
B port
CRB2
-Z
Counter-clockwise
A port
um
Maxim
ati
rot
r
on
CRQ2
MSQ
MSZ
Rotation Range Example
CRQ2X
MSQX
MRQ
The rotation angle can also be set on a type with inertial absorber.
adjustment bolt A

Adjustment bolt A
Adjustment bolt B
(For clockwise
Adjustment amount
adjustment bolt A
180 Rotation
adjustment bolt A
adjustment bolt A
D-
Adjustment amount
Adjustment amount
90 Rotation
Adjustment amount
90 Rotation
90 Rotation
309
Series MSQ
Clean Series
Prevents dispersion of the particles generated inside of the product into the clean room by sucking them out of the vacuum port on the body side.
Specifications
How to Order
M9BW
11 MSQ B 10 A
Clean series
Vacuum type
A
B
Grade 1 Note 1)
1 L/min (ANR)
11-MSQA is identical to the high precision type and

11-MSQB is identical to the basic type.
Number of
auto switches
High precision type

Basic type
Note 1) Please refer to Pneumatic Clean Series

catalog for further details.
Auto switch type

Nil Without auto switch (built-in magnet)
Refer to page 307 for auto switch types.
Size
10
20
30
50
A
R
Particle generation grade Suction flow rate (example)
Thread type
End port type
M5
Nil
Nil
Rc 1/8
-XF
G 1/8
-XN
NPT 1/8

Shock absorber
Size
10, 20
30, 50
Dimensions
Clean series products do not have a hollow axis.
Basic type
11-MSQBA
11-MSQBR
DA
DB
M5 x 0.8 depth 5
(Vacuum port)
(mm)
(HD)
HC
11.5
5.5
HB
DC
Size
DA(h9)
DB(h9) DC(H9) DD(h9)
HB
HC
HD
10
20
30
50
46
45
20
61
60
28
35
20
59
40
22
67
65
65
32
48
22
77
75
68
35
54
24
77
Dimensions other than above are identical to the basic type.

DD
High precision type

11-MSQAA
11-MSQAR
DA
DB
M5 x 0.8 depth 5
(Vacuum port)
DC
(mm)
HB
(HD)
HC
HE
HA
Size
10
20
30
50
DA(h8) DB(h8) DC(H8) DD(h8)
HA
HB
HC
HD
46
45
20
35
15.5
24
63
9.5
61
60
28
40
19.5
30
73
13.5
67
65
32
48
19.5
30
76
13.5
77
75
35
54
21.5
34
87
15.5
Dimensions other than above are identical to the high precision type.
DD
310
HE
Series MSQ
Construction
CRB2
-Z
CRBU2
CRB1
MSU
#1
o i @7 @8 t !0
MSQ R
(With internal shock absorber)
!3 #0
@0
y !6 !7 !8 !1 @5 e r w@4
@9 q @2 @0 @3
CRJ
CRA1
-Z
u @6 !9 !4 !5 !2 @1
CRA1
CRQ2
MSQ
MSZ
CRQ2X
MSQX
MSQA
(High precision type)
MRQ
Parts list
No.
1 Body
Description
Clean Series
Except Clean Series
Cover
3
4
Plate
Seal
End cover
6
7
Piston
Pinion
Compact hexagon nut
Hexagon nut
Adjustment bolt
Cushion pad
Seal retainer
Gasket
Gasket
Table
Bearing retainer
Magnet
Wear ring
Piston seal
8
9
10
11
12
13
14
15
16
17
18
Material
Aluminium alloy
Note
Anodized
Nickel plated
Plated
Aluminium alloy
Chromated
Aluminium alloy
NBR
Clean Series
Except Clean Series
Nickel plated
Plated
Aluminium alloy
Stainless steel
Size: 10 to 50
Size: 70 to 200
Description
Bearing
Size: 10 to 50
Needle bearing
Size: 70 to 200
Bearing
Basic type
20
Angular bearing
High precision type
No.
Material
19
Bearing steel
Size: 20 to 50
21 Round head philips screw No.0
Size: 70 to 200
22
23
Steel wire
Chrome molybdenum steel Chromated

Rubber material
Size: 10 to 50
Aluminium alloy
Chromated
Size: 70 to 200
NBR
NBR
Aluminium alloy
Anodized
Aluminium alloy
Anodized
Resin
NBR
24
25
26
27
28
29
30
31
Round head philips screw Size: 10

Hexagon thin socket head bolt Size: 20 to 50
Hexagon socket head set bolt Size: 70 to 200
Size: 10 to 70
Hexagon socket
head set bolt
Size: 100 to 200
Bushing nut
Size: 10 to 50
Type CS retaining ring Size: 70 to 200
Parallel pin
Size: 10 to 50
Parallel key
Size: 70 to 200
Seal washer
Plug
O-ring
Size: 70 to 200 only
Steel balls
Size: 70 to 200 only
Shock absorber
Note
Bearing steel
Steel wire
Stainless steel
Steel wire
Steel wire
Stainless steel
Stainless steel
Steel wire
Stainless steel
Carbon steel
NBR
Steel wire
Nickel plated
NBR
Stainless steel
Replacement parts
Description
Size
10
20
30
50
70
100
200
Seal kit
P523010-5
P523020-5
P523030-5
P523040-5
P391050-5
P391060-5
P391070-5
No. Description Qty. No. Description Qty. No. Description Qty. No. Description Qty. No. Description Qty. No. Description Qty. No. Description Qty.
4 Seal
1 4 Seal
1 4 Seal
1 4 Seal
1 4 Seal
1 4 Seal
1 4 Seal
1
12 Gasket
1 12 Gasket
1 12 Gasket
1 12 Gasket
1 12 Gasket
4 12 Gasket
4 12 Gasket
4
Parts included
13 Gasket
1 13 Gasket
1 13 Gasket
1 13 Gasket
1 17 Wear ring
4 17 Wear ring
4 17 Wear ring
4
in seal kit
17 Wear ring
4 17 Wear ring
4 17 Wear ring
4 17 Wear ring
4 18 Piston seal
4 18 Piston seal
4 18 Piston seal
4
18 Piston seal
4 18 Piston seal
4 18 Piston seal
4 18 Piston seal
4 27 Seal washer 2 27 Seal washer 2 27 Seal washer 2
27 Seal washer 2 27 Seal washer 2 27 Seal washer 2 27 Seal washer 2 29 O-ring
4 29 O-ring
4 29 O-ring
4
A grease pack (10 g) is included. When only a grease pack is needed, order with the following part number.
Grease pack part no: GR-S-010 (10 g)
311
D-
Series MSQ
Dimensions/Size 10, 20, 30, 50
2
2
WC
XA WA
45
4 x JJ depth 8
2 x J through
JA counter bore
depth JB
th
dep
ctive
effe
e
iv
ct
fe
ef XC
XB epth
8 x WD depth WE
WB
Basic type/MSQBA
BE
22.5
WF
2 x M5 x 0.8
Port (Plugged)
2 x JC depth JD
FA
CA
Effective
depth FB
2xP
Port
BB
BD
DD
D
DE
AY
AX
AV
SF
A
AA
DF
(Through)
AU
BA
BA
DG
Effective
depth FC
CB
AW
BC
SD SE
FD
Q
H
(UU)
2 x JU
YA
YB effective
depth YC
(Max. approx. SU)
View
With internal shock absorber High precision type

MSQAR
MSQAA/With adjustment bolt
MSQBR
MSQAR/With internal shock absorber
FE
HA
DI
DH
DJ
(mm)
10
20
30
50
(Max. approx. FU)
(mm)
(UV)
Size FU
31.5
34.7
34.7
51.7
DK (Through)
DL
Size DH
10
20
30
50
DI
DJ DK DL FE HA UV
45h8 46h8 20H8
6 15H8 10
60h8 61h8 28H8
9 17H8 15.5 26
18.5 52.5
63
65h8 67h8 32H8 12 22H8 16.5 27
67
75h8 77h8 35H8 13 26H8 17.5 30
76
(mm)
Size AA
10
20
30
50
AU AV AW AX AY BA BB BC BD BE CA CB
55.4
50
6.6 20
70.8
65
75.4
70
85.4
80
12
7.6 27.5 16
14
12
46
7.6 29
18.5
14
12
50
22
19
15.5 63
10
38
15.5
9.5 34.5 27.8
DD DE DF DG FA FB
FC FD
JA
JB
60
27
4.5 28.5 45h9 46h9 20H9
6 15H9
4.5
13
6.8
11
6.5
30
76
34
9 17H9 10
2.5
6.5
17
8.6
14
8.5
32
84
37
6.5 33.5 65h9 67h9 32H9 12 22H9 10
4.5
6.5
17
8.6
14
8.5
7.5
20
10.5
18
10.5
37.5 100
50 10
30.5 60h9 61h9 28H9
37.5 75h9 77h9 35H9 13 26H9 12
(mm)
Size
10
20
30
50
JC
JD
JJ
M8 x 1.25 12
M5 x 0.8
M10 x 1.5 15
M6 x 1
M10 x 1.5 15
M6 x 1
JU
M8 x 1
S
92
WD
3H9 3.5 M5 x 0.8
M5 x 0.8
34
13
45 17.7 47 15
32
27 3H9 3.5
19 3H9 3.5
M10 x 1 M5 x 0.8
M10 x 1 Rc 1/8
37
117 10
12
60 25
54 20.5 4H9 4.5
M6 x 1
10
43
36 4H9 4.5
24 4H9 4.5
40
127 11.5 14
65 25
57 23
M6 x 1
10
48
39 4H9 4.5
28 4H9 4.5
M12 x 1.75 18 M8 x 1.25 M14 x 1.5 Rc 1/8
46
152 14.5 15
75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12
55
45 5H9 5.5
33 5H9 5.5
In addition to Rc 1/ 8, G 1/ 8 and NPT 1/ 8 are also available.
312
SD SE SF SU UU WA WB WC
4H9 4.5
Series MSQ
Dimensions/Size 70, 100, 200

WB
XB
Basic type/MSQBA
ed
ctiv
iv
e
CRBU2
45
XA
CRB2
-Z
WA
XC
hW
ept
h
pt
de
4 x JJ depth JK
CRB1
22.5
2 x J through
JA counter bore
depth JB
effe
ct
fe
ef
8 x WD depth WE
BE
MSU
CRJ
WF
CRA1
-Z
BD
AV
(Through)
BA
DG
(Max. approx. SU)
SF
BA
FA
MSQ
MSZ
CRQ2X
MSQX
Effective
depth FC
FD
DF
AY
AX
CRQ2
2 x JU
BC
CB
AW
15
DE
2 x M5 x 0.8 (plug)
Port
30
SD
Q
H
(UU)
2 x Rc 1/8
Port
BB
CRA1
DD
2 x JC depth JD
Effective
depth FB
AB
MRQ
YA
View
With shock absorber

MSQBR
YB effective
depth YC
AA
(mm)
Size FU
70 55.4
100 55.5
200 79.5
(Max. approx. FU)
(mm)
Size AA AB
70 90 92 84
100 101 102 95
200 119 120 113
AV AW AX AY BA BB BC BD BE CB
42
25.5
27
17
50
29.5
60
36.5
27
36
10
DD DE DF DG FA FB
FC FD
JA
JB
75 44.5 110
57
36 88h9 90h9 46H9 16 22H9 12.5
3.5
22
10.4 17.5 10.5
17
85 50.5 130
66
42 98h9 100h9 56H9 19 24H9 14.5
3.5
12
27
10.4 17.5 10.5
24
103 65.5 150
80
57 116h9 118h9 64H9 24 32H9 16.5
5.5
15
32
14.2 20
12.5
(mm)
JC
70 M12 x 1.75
100 M12 x 1.75
200 M16 x 2
Size
JD
18
JJ
JK
JU
SD SF SU UU WA WB WC
WD
D-
M8 x 1.25 10 M20 x 1.5 53
170 18
79 34.2
75 32.5 5H9 5.5 M8 x 1.25 12.5 67
54 5H9 3.5
39 5H9 3.5
18
M8 x 1.25 10 M20 x 1.5 59
189 22
90 34.3
86 37.5 6H9 6.5 M10 x 1.5 14.5 77
59 6H9 4.5
49 6H9 4.5
25
M12 x 1.75 13 M27 x 1.5 74
240 29 108 40.2 106 44
8H9 8.5 M12 x 1.75 16.5 90
69 8H9 4.5
54 8H9 6.5
313
Series MSQ
With External Shock Absorber

Size: 10, 20, 30, 50
How to Order
MSQ B 10 L 2
M9BW
Made to Order or port type
A
B
Refer to page 320 for the Made to Order details.
High precision type

Basic type
Number of
auto switch
Size
10
20
30
50
Nil
S
n
2 pcs.
1 pc.
n pcs.
End port type

Size
10, 20
M5
Rc 1/8
30, 50
G 1/8
NPT 1/8
Combination with Made to Order
is not available.
Nil
Nil
-XF
-XN
Shock absorber type

Shock absorber for low energy
Shock absorber for high energy
Auto switch type

Nil
Port location/Rotation
Standard
type
180
90
Symmetric 180
type
90
Refer to the table to the right.
Rotation
180
3: Standard type, 90
4: Symmetric type, 180
5:Symmetric type, 90
Connecting port
Standard
Made to Order
90
2: Standard type, 180
Connecting port
Connecting port position

Symmetric type Standard type
Nil
X
Connecting port
2
3
4
5
Without auto switch (Built-in magnet)
Connecting port
L
H
Reed auto switch
Special function
(2-color display)
Water resistant
Electrical
entry
Indicator
light
Type
Load voltage
Wiring
(Output)
3-wire (NPN)
3-wire (PNP)
2-wire
3-wire (NPN)
2-wire
3-wire (NPN)
3-wire (PNP)
2-wire
3-wire
Yes (NPN equiv.)
Grommet
2-wire
No
DC
Auto switch model

AC
Perpendicular
M9NV
M9N
M9PV
M9P
M9BV
M9B
M9NWV M9NW
M9PWV M9PW
M9BWV M9BW
M9NAV1 M9NA1
M9PAV1 M9PA1
M9BAV1 M9BA1
5 V, 12 V
12 V
24 V
5 V, 12 V
12 V
5 V, 12 V
12 V
5V
A96V
In-line
A96

Pre-wired
0.5 1 3 5
connector
(Nil) (M) (L) (Z)
A93
A93V2
100 V

24 V
12 V
A90
100 V or less A90V

3 m L
(Example) M9NWL
5 m Z
(Example) M9NWZ
314
Applicable load
IC
circuit
IC
circuit
Relay,
PLC
IC
circuit
IC
circuit
IC circuit
Relay,
PLC

Series MSQ
Specifications
Size
10
20
Maximum operating pressure
1 MPa
Minimum operating pressure
0.2 MPa
CRB2
-Z
CRBU2
Shock absorber
Cushion
Shock absorber For low energy
type
For high energy
RB0805
RB1006
RB1411
RB0806
RB1007
RB1412
CRB1
MSU
90, 180
Rotation
Each rotation end 3
Angle adjusting range

Cylinder bore size
Port size
50
Symbol
30
Air (non-lube)
Fluid
15
End ports
18
21
M5 x 0.8
CRJ
25
Rc 1/8, G 1/8, NPT 1/8
Side ports
CRA1
-Z
M5 x 0.8
The service life of the shock absorber may be different from the rotary table body depending on the
operating conditions. Refer to Specific Product Precautions for the suitable replacement period.
CRA1
CRQ2
Side ports
End ports
MSQ
MSZ
CRQ2X
MSQX
MRQ

Made to Order
(Refer to page 320 for details)

Symbol
-X232
Specifications/Description
With external adjustment bolt
Size
Allowable kinetic energy (J) Note 1)

Shock absorber for low energy Shock absorber for high energy
10
20
30
50
0.161
0.231
0.574
1.060
0.805
1.210
1.310
1.820
Rotation time adjustment range

for stable operation (s/90)
0.2 to 1.0
Note 2)
Note 1) If operated where the kinetic energy exceeds the allowable value, this may cause damage to the
internal parts and result in product failure. Please pay special attention to the kinetic energy
levels when designing and during operation to avoid exceeding the allowable limit.
Note 2) Values above indicate the time between the start of rotation and the deceleration caused by the
shock absorber. Although the time required by the rotary table to reach the rotation end after
deceleration differs depending on the operating conditions (inertial moment of the load, rotation
speed and operating pressure), approximately 0.2 to 2 seconds are required. The range of
angles within which the shock absorber operates is between the rotation end and the values
shown below.
Size
For low energy
10
20
30
7.1
6.9
6.2
50
9.6
For high energy
8.6
8.0
7.3
10.5
Weight
(g)
Size
90 specification
10
20
30
50
600
1150
1460
2390
180 specification
570
1090
1390
2280
High precision 90 specification

type
180 specification
670
1340
1690
2720
640
1290
1620
2600
Basic type
D-
Note) Values above do not include auto switch weight.
315
Series MSQ
. The rotary table turns in the clockwise direction where the A port is pressurized, and in the counter-clockwise direction when the B port is pressurized.
. By adjusting the shock absorber, the rotation end can be set within the ranges shown in the drawing.
Standard type
For 180
For 90
Counter-clockwise
A port
A port
A port
22.5
rot
atio
n ran
ge 84
90
rot
atio
n r an
ge 96
um
ax
im
in
im
ge
18
6
Minimum
um
17
4
an
nr
tio
rota
ge
an
180 ion r
t
a
t
m ro
Maximu
Clockwise
se
Clockwi
22.5
3
se
Clockwi
B port
Position of bottom positioning pin hole
Symmetric type
For 180
For 90

3
B port
se
Clockwi
tion r
ange 96
rota
rot
a
um
A port
ax
18
Clockwise
n
ra
on
tati
o
r
ge
m
Minimu
an
180 ion r
tat
o
r
m
Maximu
in
im
17
ge
A port
se
Clockwi
90
tion
range 84
22.5
22.5
A port
im
um
Counter-clockwise

Size
10
20
30
50
316
Adjustment angle per rotation of angle adjustment screw

1.4
1.2
1.1
1.3
Note) The drawings show the rotation range for the top positioning pin
hole of the table.
rotation end when the shock absorbers are tightened equally
and the rotation is adjusted to 180 and 90.
Series MSQ
Construction
CRB2
-Z
CRBU2
CRB1
MSU
CRJ
CRA1
-Z
CRA1
CRQ2
MSQ
MSZ
CRQ2X
MSQX
MRQ
Component parts
No.
1
2
3
4
5
6
7
8
9
Material
Aluminium alloy
Aluminium alloy
Aluminium alloy
Stainless steel
Stainless steel
Steel wire
Steel wire
Description
End cover
Table
Arm
Shock absorber holder

Taper plug
Hexagon nut
Shock absorber
Note
Painted
Anodized
Nickel plated
Anodized
Replacement parts
Description
Seal kit
Kit no.
10
20
30
50
P523010-6
P523020-6
P523030-6
P523040-6
Note
Seal washer @7 is excluded from the kit contents described on page 311.
Grease pack part no: GR-S-010 (10 g)
D-
317
Series MSQ
Dimensions/With External Shock Absorber Size: 10, 20, 30, 50
ng
ing
at
er
op
rm
WF
GE
(A
ND
EC
ED
GA
GB
WC
22.5
depth
EB
tive
2 x J through
JA counter bore depth JB
2xK
Shock absorber
BD
EF
YA
WA
effec
(Max. approx. EE)
Note 1
EB
2 x M5 x 0.8
Port (Plugged)
Piping port
WB
ra
8 x WD depth WE
(Max. approx. EA)
Symmetric type
e)
Basic type/MSQBL
H

DD
D
DE
CB
DF
CA
SF
A
AA
(Through)
BA
BA
DG
Effective
depth FC
SD
BC
SE
FD
Q
(UU)
NC
FA
NA
NB
2xP
Port
BB
GD
GC 0.5
2 x JC depth JD
Effective
depth FB
Note 1
YA
High precision type

MSQAL
YB effective
depth YC
Note 1) This part is not available with 180 specification.
View
FE
HA
NF
NE
DI
DH
DJ
(UV)
(mm)
Size DH
10
20
30
50
DK (Through)
DL
DI
DJ DK DL FE HA NE NF
18.5 11
UV
45
46 20H8
6 15H8 10
18
52.5
60
61 28H8
9 17H8 15.5 26
17
25.5 63
65
67 32H8 12 22H8 16.5 27
18
26.5 67
75
77 35H8 13 26H8 17.5 30
18.5 29.5 76
(mm)
Size AA
10
20
30
50
55.4 50
BA BB BC BD CA CB
9.5 34.5 27.8
60 4.5 28.5 45
46 20H9
6 15H9 53
61 28H9
9 17H9 61.9 55.3 43
70.8 65 12
46
30
76 6
75.4 70 12
50
32
84 6.5 33.5 65
85.4 80 15.5 63
DD DE DF DG EA EB EC ED EE EF FA FB FC FD GA GB GC GD GE
30.5 60
37.5 100 10
37.5 75
97.3
44.3 33.5 14
80
4.5
20 15.6 11
7.5 45.2 13
117.2 100
10
2.5
6.5
25 19.5 14
9.5 56.4 17
67 32H9 12 22H9 62.1 60.3 46
19.5 122.4 110
10
4.5
6.5
27 21.5 14
9.5 61.5 17
77 35H9 13 26H9 86.8 71.4 56
22
158.2 130
12
7.5
32 28
18
18 11.5 72.9 20
(mm)
Size
10 6.8
20 8.6
30 8.6
50 10.5
JA JB
JC
JD
NA NB NC ND
318
S SD SE SF UU WA WB WC
6.5 M8 x 1.25 12
M8 x 1
10
5.5 12.5
M5 x 0.8
34
13
45
47 15
32
19 3H9 3.5
8.5 M10 x 1.5 15
M10 x 1
14
16.5
37
117 10
12
60
54 20.5 4H9 4.5
M6 x 1
10
43
24 4H9 4.5
14
8.5 M10 x 1.5 15
M10 x 1
14
16.5
M5 x 0.8
Rc 1/8
40
127 11.5 14
65
57 23
M6 x 1
10
48
28 4H9 4.5
Rc 1/8
46
152 14.5 15
75
66 26.5 5H9 5.5 M8 x 1.25 12
55
33 5H9 5.5
8.5 19.5
3H9 3.5 M5 x 0.8
WE WF YA YB YC
14
18 10.5 M12 x 1.75 18 M14 x 1.5 19
92
WD
11
4H9 4.5
Series MSQ
Proper Auto Switch Mounting Position at Rotation End

Size:
1 to 7
CRB2
-Z
CRBU2
CRB1
B
Rotation
1
2
3
7
190
190
190
190
CRJ
When D-F8 is used
When D-M9 is used
Size
MSU
CRA1
-Z

D-M9(V), D-M9W(V)
D-F8
Operating Hysteresis
A
B
angle
angle m
angle
angle m
20.9
22.8
24.4
28.7
10
10
10
10
49
50
47
31
16.9
18.8
20.4
24.7
20
20
15
15
CRA1
CRQ2
10
10
10
10
MSQ
MSZ
Operating angle m : Value of the operating range Lm of a single auto switch converted to an axial rotation angle.
Hysteresis angle
: Value of auto switch hysteresis converted to an angle.
Note) Since the above values are only provided as a guideline, they are not guaranteed.
In the actual setting, adjust them after confirming the auto switch operating condition.
Size:
10 to 200
CRQ2X
MSQX
MRQ
B
A
Magnet
Operating range at proper

mounting position (Lm/2)
Most sensitive position
Operating range of
single auto switch Lm
Reed auto switch

Size
D-A9, D-A9V
Rotation
angle m
angle
10
90
10
80
10
65
10
50
10
45
10
40
10
35
D-M9(V), D-M9W(V)
B angle m
angle
45
27
49
31
10
42
190
62
35
66
39
10
35
190
68
39
72
43
10
30
190
83
49
87
53
10
24
190
95
54
99
58
10
22
190
61 108
65 112
10
19
190
81 139
85 143
10
14
190
Operating angle m : Value of the operating range Lm of a single auto switch converted to an axial rotation angle.
A
10
20
30
50
70
100
200
D-
Hysteresis angle
: Value of auto switch hysteresis converted to an angle.
319
Series MSQ
Made to Order
Please contact SMC for detailed specifications, lead times and prices.
Symbol
1 With External Adjustment bolt
-X232
By reducing the effective stroke of the shock absorber, the absorption time will be reduced, enabling the cycle time to be improved.
How to Order
MSQ B 10 L 2 X M9BW X232

A
B
High precision type

Basic type
Auto Switch
Refer to page 314 for auto switch.
Size
Made to Order
10
20
30
50
2
3
4
5
Shock absorber type

L
H
With External
Adjustment bolt

Standard
type
Symmetric
type
180
90
180
90
Specifications
Size
10
20
30
50
Allowable kinetic energy (J)

0.231
0.161
1.060
0.574
1.210
0.805
1.820
1.310
Note 1) The allowable kinetic energy indicated in the table is the value for the case where the full stroke of the shock absorber is used. Note that if the effective stroke
of the shock absorber is shortened using the adjustment bolt, the allowable energy will be lower than the value in the table.
Note 2) If you wish to adjust the stroke of the shock absorber in order to reduce the cycle time, first set the shock absorber to the position where the shock absorber is
to be used in the full stroke, then while observing the operating condition of the product, gradually adjust the stroke in the direction such that the effective
stroke decreases.
Note 3) The shock absorber is a consumable part. If there are signs, such as bounding of the shock absorber at the motion end point, that the energy absorption
performance of the shock absorber has deteriorated, readjust the position of the shock absorber so as to increase its effective stroke. If bounding still occurs
even when the full stroke is used, it is necessary to replace the shock absorber with a new one.
Dimensions
Effective stroke
Note)
Symmetric type
Shock absorber
Adjustment bolt
NG
Adjustment bolt
Note) This part is not available with 180 specification.
320
EG
(mm)
Size
EG
NG
10
20
30
50
47.4
4.5
62
4.5
67.6
4.8
80
Dimensions other than the above are

the same as standard.
Series MSQ
Rotary Table
Specific Product Precautions 1
Be sure to read before handling.
Speed Adjustment
Warning
1. Perform speed adjustment gradually from the low

speed side.
Speed adjustment from the high speed side can cause product
damage leading to human injury and damage to equipment
and machinery.
Caution
1. When operating at high speed with a large load

weight, a large amount of energy is applied to the
actuator and can cause damage.
Refer to the model selection on page 22 to find the proper
operating time.
2. Do not machine the fixed orifice of the port to

enlarge its size. If the fixed orifice size is enlarged,
the actuator operating speed and impact force will
increase and cause damage.
Rotation Adjustment
Caution
CRB2
-Z
2. Series MSQ is equipped with a rubber bumper or shock

absorber. Therefore, perform rotation adjustment in the
pressurized condition (minimum operation pressure: 0.1 MPa
or more for adjustment bolt and internal shock absorber types,
and 0.2 MPa or more for external shock absorber type.)
Shock Absorber
Rotation Adjustment
Caution
1. As a standard feature, the rotary table is equipped with a

rotation adjustment screw (adjustment bolt or shock absorber)
that can be used to adjust the rotation. The table below shows
the rotation adjustment per single rotation of the rotation
adjustment screw.
Please refer to following pages for the rotation direction,
rotation angle and rotation angle range.
MSQ size1 to 7
page 304
MSQ size10 to 200
page 309
MSQ with external shock absorber page 316
With adjustment bolt, With external shock absorber
Size
1
2
3
7
10
20
30
50
70
100
200
Rotation adjustment per single rotation of rotation adjustment screw

8.2
10.0
10.9
10.2
10.2
7.2
6.5
8.2
7.0
6.1
4.9

Size
10
20
30
50
Rotation adjustment per single rotation of rotation adjustment screw

1.4
1.2
1.1
1.3
MSU
CRA1
1. Refer to the table below for tightening torques of the shock -Z

absorber setting nut.
Size
Tightening torque
N.m
10
20
1.67
30
50
70
10.8
3.14
100
200
62.8
23.5
2. Never rotate the bottom screw of the shock absorber. (It is not
an adjustment screw.) This may cause oil leakage.
Bottom screw cannot be rotated
Caution
This product is lubricated with grease at the factory, and further
lubrication will result in a failure to meet the product's specifications.
CRB1
CRJ
Caution
Lubrication
1. Use the product without lubrication.
CRBU2
3. When rotation of the rotary table with internal shock absorber

is set at a value smaller than the table below, the piston stroke
becomes smaller than the shock absorber's effective stroke
and energy absorption capacity decreases.
Size
10
20
30
50
70
100 200
Minimum rotation without energy

absorption capacity decrease
52
43
40
60
71
62
CRA1
CRQ2
MSQ
MSZ
CRQ2X
MSQX
MRQ
82
4. Products with shock absorber are not designed to smooth stop

but to absorb the kinetic energy of the load. If the load has to
be stopped smoothly, a shock absorber of the optimum size
meeting the operating conditions must be installed external to
the equipment.
5. Shock absorbers are consumable parts. When a decrease in

energy absorption capacity is noticed, it must be replaced.
Size
10
20
30
50
70
100
200
Shock absorber model

RBA0805-X692
RBA1006-X692
RBA1411-X692
RBA2015-X821
RBA2725-X821

Size
10
20
30
50
Type
For low energy
For high energy
For low energy
For high energy
For low energy
For high energy
For low energy
For high energy
Shock absorber model

RB0805
RB0806
RB1006
RB1007
RB1006
RB1007
RB1411
RB1412
D-
The rotation adjustment range for the external shock absorber

is 3 at each rotation end. When adjusted beyond this range,
note that the shock absorber's durability may decrease.
321
Series MSQ
Rotary Table
Specific Product Precautions 2
Service Life and Replacement Period of Shock Absorber
Caution
Caution
1. Allowable operation time under the specifications

set in this catalog is 1 million.
Note) Specified service life (suitable replacement period) is the value at
room temperature (20 to 25C). The period may vary depending on
the temperature and other conditions. In some cases the absorber
may need to be replaced before the allowable operation time above.
External Shock Absorber
Caution
The threaded orifices shown below are not connecting ports.
Never remove the plugs as this will cause malfunction.
Threaded orifices
Speed Controller and Fittings
Caution
Size 1, 2, and 3 use M3 x 0.5 piping ports. When connecting a
speed controller or fittings directly, use the following series.
Speed controller
AS121F/Elbow type
AS131F/Universal type
One-touch fitting
One-touch miniature fittings Series K J
Miniature fittings Series M3
Auto switch
Caution
In case of sizes 1, 2, 3 and 7, when 2 pieces of auto switches are
installed in one switch groove, the minimum detectable rotation
angles are as follows.
Size
1
2
3
7
322
Maintenance and Inspection
Minimum detectable rotation

25
25
20
20
Since sizes 1, 2, 3 and 7 require special tools, they cannot be

disassembled.
Since sizes 10, 20, 30 and 50 have the table press fit into an
angular type bearing, they cannot be disassembled.
Series
1122-
MSQ
Rotary table: Rack & Pinion type

Size: 1, 2, 3, 7, 10, 20, 30, 50
How to Order
Size: 1, 2, 3, 7
Clean series
11 Vacuum suction type
A
B
High precision style

Basic style
Size
Nil
E
1
2
Side ported
Front ported
3
7
11 - M S Q
- M9B
Auto switch
Reed switch
Solid state switch
2 pcs.
1 pc.
n pcs.
Nil
S
n
A90
M9B, M9N, F8B, F8N
Size: 10, 20, 30, 50
Clean series
Size
10
20
30
50
11 - M S Q
10
A - M9B
22 - M S Q
10
A - M9B
Copper, fluorine and

silicon-free +
Low particle generation
A High precision style

B
Basic style
Nil
S
n
2 pcs.
1 pc.
n pcs.
Auto switch
A
R

Reed switch
Solid state switch
A90
M9B, M9N
Auto switch specifications

Type
Auto switch model
Reed switch
D-A90
Solid state
switch
2-wire
3-wire
D-M9B, D-F8B
D-M9N, D-F8N
Load voltage
24 VAC or less, 48 VAC or less, 100 VAC or less
24 VDC or less, 48 VDC or less, 100 VDC or less
24 VDC (10 to 28 VDC)
24 VDC (4.5 to 28 VDC)
Refer to page 212 for a list of applicable auto switches.
204
Load current range
Indicator light
Applicable load
50mA, 40mA, 20mA
No
IC circuit,
Relay, PLC
2.5 to 40 mA
40 mA or less
Yes
Yes
24 VDC relay, PLC

24 VDC relay, PLC
Rotary table 1122-MSQ
Specifications
7
10
20
30
50
Air (Non-lube)
0.7MPa
1MPa
Not available
0.6MPa
0.1MPa
0.1MPa
0.2MPa
0.1MPa
0 to 60C (No freezing)
Not available
Rubber bumper
Shock absorber
Not available
1
1.5
2
6
7
25
48
81
39 116 116 294
Not available
0 to 190C
190C
0.2 to 0.7 s/90
0.2 to 1.0 s/90
Not available
0.2 to 0.7 s/90
M3 x 0.5
M5 x 0.8
Rc 1/8, M5 x 0.8
Size
Suction flow rate l/min (ANR)
1/2/3/7
10/20/30/50
11-: Fluorine grease

22-: Lithium soap based grease
11-: Grade 1
22-: Grade 1
Grease
Particle generation grade
(Refer to front matter pages 13 to 22 for details.)
Rotation range example
Size: 10 to 50
Counterclockwise
Flow control
equipment
The rotary table turns in the clockwise direction when the A port is pressurized, and in the counterclockwise direction when the B port is pressurized.
By adjusting the adjustment bolt, the rotation end can be set within the ranges shown in the drawing for the desired rotation angle.
The rotation angle can also be set on a type with internal absorber.
Size: 1 to 7
Air cylinder
Rotary actuator

Maximum
operating pressure With internal shock absorber
Basic style
Minimum
operating pressure High precision style
Cushion
Allowable kinetic With adjustment bolt
energy (mJ)
Maximum rotation
Rotation time
adjustment range With internal shock absorber
Port size
Air gripper
Directional control
valve
Size
Fluid
Suction flow rate of vacuum

suction type (Reference values)
Counterclockwise
A port
B port
Clockwise
wis
u
Maxim
on
ati
rot
c
dj k w is
us e
t m r o ta
e n tio n e
t ra
nge 9nd
5
n
ra
The pin hole position in the drawing shows the counterclockwise rotation end when
the adjustment bolts A and B are tightened equally and the rotation is adjusted 180.

Adjustment angle per rotation of angle adjustment bolt
8.2
10.0
10.9
10.2
Cloc
kw
Maxi
ise
mu
Fittings & Tubing
Adjustment bolt A
(For counterclockwise
Adjustment bolt B
(For clockwise rotation
end adjustment)
o
Cl A
C
o
dj u nt
us erc
tm lo c
ge
e n k w is
e
t ra
end
19
nge 9 rotation
0
5
2 2 .5
Clock
C
A d lo c k
jus wise
tm
e n t r o t a ti o n e n d
ran g e 9 5
C
Ad oun
jus ter
2 2.5
ng
tm clo c
e n t k w i s e r o t a ti o n e n d
e
19
ra n g
0
e 95
Adjustment bolt B
(For clockwise rotation
end adjustment)
Size
1
2
3
7
on
ati
rot
Air preparation
equipment

Adjustment bolt A
(For counterclockwise
ra
The pin hole position in the drawing shows the counterclockwise rotation end when
the adjustment bolts A and B are tightened equally and the rotation is adjusted 180.

Size
10
20
30
50
70
100
200
Adjustment angle per rotation of angle adjustment bolt

10.2
7.2
6.5
8.2
7.0
6.1
4.9
205
Pressure switch
A port
Clockwise
Clean gas filter
B port
Filter, Pressure
control equipment
B port
1122-
Rotary table
MSQ
Proper auto switch mounting position at rotation end

Size: 1 to 7
B
D-F8
D-F9, M9
Solid state switch

Size
Rotating angle
1
2
3
7
190
190
190
190
DM9
Operating angle m Hysteresis angle
55
10
45
10
40
10
40
10
A
20.9
22.8
24.4
28.7
B
16.9
18.8
20.4
24.7
DF8
20
10
20
10
15
10
15
10
Operating angle m: Converts the operating range (Lm) of the auto switch into the rotation angle
Angle of hysteresis: The hysteresis of the auto switch is converted to degrees.
Size: 10 to 50
B
A
Magnet
Operating range at proper

mounting position (Lm/2)
Most sensitive position
Operating range of
single auto switch Lm
Reed switch
Size
Rotating angle
10
20
30
50
190
190
190
190
A
17
23
27
33
B
36
50
66
68
DA9, DA9V
90
10
80
10
65
10
50
10
Solid state switch
A
21
27
31
37
Operating angle m: Converts the operating range (Lm) of the auto switch into the rotation angle
Angle of hysteresis: The hysteresis of the auto switch is converted to degrees.
206
B
40
54
60
72
DM9
60
10
50
10
50
10
40
10
Dimensions: Size 1, 2, 3, 7
FE
HA
(UV)
WA
4 x JJ depth JK
e
ctiv
effe
WB th WC
dep
BI
XA
2 x J through
JA counterbore depth JB
27h8 27.5h8 14H8 4.5H8 8.2 13.5 29.5
29h8 29.5h8 14H8 5 H8 9.7 15.5 33.5
33h8 34h8 17H8 6 H8 9.7 15.5 36
39h8 40h8 20H8 7 H8 9.5 16.5 39.5
BA
2xP
Side port
when front ports are used)
Effective
depth FB
Vacuum suction port
JD
AX
BB
S
AU
(Max. approx. SU)
BH
Q
(UU)
BG
2xP
Front port (Plugged with a
hexagon socket head set
screw when side ports are used)
Fittings & Tubing
AY
BC
BK
SD
Effective
depth
1.2
AW
2 x JU
(mm)
AU AV AW AX AY BA BB
28
2.8 11
8.2 5.5
1.5
35
39.6
30
3.6 12.6
9.2 7
37
45.1
34.5 4.4 15.5 10.5 8
2.5
43
46.7
41
50
59.2
BI
BJ BK
4.8 18.4 12.2 10
YA
Size
(mm)
Size BC BD BE BG BH
1
4.5
32 17
5.5
34 18.5 12.6
11
5.5
5.5
DD
DE FA FB FD
JA JB
8.2 30
4.5
5.3 27h9 27.5h9 14H9 4.8
3.7
3.3
3.5
9.2 35
4.5
7.5 29h9 29.5h9 14H9 5.3
2.5
4.2 10
3.3
3.5
38 23
15.5 10.5 40
4.5
9.5 33h9 34 h9 17H9 5.3
2.5
4.2 10
4.2
7.5
4.5
45 30
18.4 12.2 50
2.5
4.5 11.5 4.2
7.5
4.5
39h9 40 h9 20H9 6.5
JC
M4 x 0.7
M4 x 0.7
M5 x 0.8
M5 x 0.8
JD JE
2.2
2.2
2.5
2.5
JF
JG
5.3 M4 x 0.7 4
5.3 M4 x 0.7 4
M4 x 0.7 4
6
M5 x 0.8 5
6
Air preparation
equipment
PA
DD
D
DE
FD
FA
2 x JC
Depth from bottom
(not including JD) JE
Directional control
valve
Flow control
equipment
DJ DL FE HA UV
Pressure switch
XB effective
depth XC
BE
BD
DI
Filter, Pressure
control equipment
22.5
(mm)
Size DH
Air gripper
DL
WF
AV
SF
A
Rotary actuator
BJ
DI
DH
DJ
2 x JF depth JG
8 x WD depth WE
Air cylinder
High precision style: MSQAA
Basic style: MSQBA
JK
3.5
3.5
3.5
4.5
JU
M3 x 0.5
M4 x 0.7
M5 x 0.8
M6 x 1
P
M3 x 0.5
M3 x 0.5
M3 x 0.5
M5 x 0.8
PA
M3 x 0.5
M3 x 0.5
M3 x 0.5
M5 x 0.8
S SD SF SU UU WA WB WC
16
50.5 10.8 24.4 9.4 25
18
56
23
10
2H9
11.8 30.5 12
2H9
73.5 15.4 37.4 14.9 34.5 14
3H9
20.5 60
13.4 26.2 11.3 28
9.5 2H9
15.2 31
WD
M3 x 0.5
M3 x 0.5
M3 x 0.5
M4 x 0.7
4.8
20 22.5 2H9
11
2H9
5.3
21 24.5 2H9
11.5 2H9
5.3
25 27
2H9
13.5 2H9
6.5
29 32.5 3H9
15.5 3H9
207
Clean gas filter
(mm)
JJ
Size
M3
x 0.5
1
2 M3 x 0.5
3 M3 x 0.5
7 M4 x 0.7
Dimensions: Size 10, 20, 30, 50
2
XA
2
WA
45
2-J through
JA counterbore depth JB
WB ctive
effe
8-WD (Circumference:
8 equivalents) depth WE
4-JJ depth 8
e
iv
ct
fe
ef XC
h
XB ept
d
Basic style: 1122- MSQBA
BE
22.5
th
dep
WC
WE
BD
M5 x 0.8 depth 5
(Vacuum suction port)
Effective
depth FB
DD
D
DE
BB
11.5
5.5
BC
FC
SD
AW
SE
2-JU
(UU)
HB
2-JC depth JD
2-P
Piping port
FA
2-M5 x 0.8
Piping port (Plugged)
AY
AU
AX
DF
BA
(Max. approx. SU)
BA
S
YC
AV
SF
YA
View
High precision style

1122- MSQAA
1122- MSQAR
DH
DG
Size
10
20
30
50
Size
10
20
30
50
AA
55.4
70.8
75.4
85.4
Size
10
20
30
50
JJ
M5 x 0.8
M6 x 1
M6 x 1
M8 x 1.25
208
A
50
65
70
80
(mm)
FU
31.5
34.7
34.7
51.7
AU AV AW
8.6 20 15.5
10.6 27.5 16
10.6 29 18.5
14 38 22
JU
M8 x 1
M10 x 1
M10 x 1
M14 x 1.5
Size
10
20
30
50
DG
45h8
60h8
65h8
75h8
DH
46h8
61h8
67h8
77h8
DI
20H8
28H8
32H8
35H8
DJ
35h8
40h8
48h8
54h8
FD
15.5
19.5
19.5
21.5
FE
9.5
13.5
13.5
15.5
AX AY BA BB BC BD
12 4 9.5 34.5 27.8 60
76
14 5 12 46 30
84
14 5 12 50 32
19 6 15.5 63 37.5 100
BE
27
34
37
50
D
45h9
60h9
65h9
75h9
DD
46h9
61h9
67h9
77h9
SF
45
60
65
75
SU
17.7
25
25
31.4
UU
59
65
68
77
WA WB
15 3H9
20.5 4H9
23 4H9
26.5 5H9
P
M5 x 0.8
M5 x 0.8
Rc 1/8
Rc 1/8
Q S SD SE
34 92 9 13
37 117 10 12
40 127 11.5 14
46 152 14.5 15
HA
24
30
30
34
(mm)
UV
63
73
76
87
DE DF
20H9 35h9
28H9 40h9
32H9 48h9
35H9 54h9
WC
3.5
4.5
4.5
5.5
FA
8
10
10
12
HA
(UV)
(Max. approx. FU)
FD
DI
FE

1122- MSQAR
1122- MSQBR
YB effective
depth
A
AA
DJ
FB FC HB J
5 20 6.8
4
6 22 8.6
6
4.5 6 22 8.6
7 24 10.5
5
WD
M5 x 0.8
M6 x 1
M6 x 1
M8 x 1.25
WE
8
10
10
12
WF
32
43
48
55
XA
27
36
39
45
(mm)
JD
JA JB
JC
11 6.5 M8 x 1.25 12
14 8.5 M10 x 1.5 15
14 8.5 M10 x 1.5 15
18 10.5 M12 x 1.75 18
XB
3H9
4H9
4H9
5H9
XC
3.5
4.5
4.5
5.5
YA
19
24
28
33
YB
3H9
4H9
4H9
5H9
YC
3.5
4.5
4.5
5.5
Rotary actuators: Precautions 1
6. Consider the possibility of power source related

malfunctions that could occur.
On the pieces of equipment that rely on power sources such as
compressed air, electricity, or hydraulic pressure, adopt a
countermeasure that will prevent these pieces of equipment from
causing hazards to humans or damage to equipment in the event
of a malfunction in these power sources.
7. If a speed controller is provided in the exhaust restrictor,
implement a safety design taking the residual pressure into
consideration.
If air pressure is applied to the air supply side without residual
pressure in the exhaust side, the rotary actuator will operate at
abnormally high speeds, which could pose a hazard to humans
and damage the machinery and equipment.
8. Consider the behavior of the rotary actuator in the event of
an emergency stop.
Devise a system that ensures safety so that if a person engages
the emergency stop, or if a safety device is tripped during a
system malfunction such as a power outage, the halting of the
machine will not cause the movement of the rotary actuator to
pose a hazard to humans or damage the equipment.
9. Consider the behavior of the rotary actuator when restarting
after an emergency stop.
Devise a design that ensures safety so that the restarting of the
rotary actuator will not pose a hazard to humans or damage the
equipment.
When the actuator has to be reset at the starting position, install
safe manual control equipment.
3. Do not stop or hold the product at midpoint by keeping air

pressure in the product.
With the product lacking an external stopping mechanism, if the
directional control valve is closed to keep the air pressure in the
product in an attempt to stop the product at midpoint, it might not
be possible to maintain that stopped position due to an air
leakage. As a result, it could pose a hazard to humans and
damage machinery and equipment.
Caution
1. Do not operate the product in a low speed range below the
speed adjustment range specified for the product.
If the product is used in the low speed range below the specified
speed adjustment range, it could cause the product to stick, slip,
or to stop its movement.
2. Do not apply an external torque to the product that exceeds
the rated output.
If an external force that exceeds the product's rated output is
applied to the product, it could damage the product.
3. The holding torque of the rotating end of the double piston
style
With a double piston product, if the internal piston is stopped by
coming into contact with the angle adjustment screw or the cover,
the holding torque at the rotating end is one-half that of the actual
output.
4. If it is necessary to provide repeatability of the rotation angle,
directly stop the load externally.
Even with a product that is equipped with an angle adjuster, there
are times in which the initial rotation angle could change.
5. Do not use the product under hydraulic pressure.
The product will be damaged if it is used by applying hydraulic
pressure.
6. With the vane style product, if it is necessary to ensure a
rotation angle, make sure to use a minimum pressure of 0.3
MPa.
209
Rotary actuator
Air gripper
Directional control
valve
Flow control
equipment
5. Consider the possibility of a reduction in the circuit air

pressure that could be caused by power outages.
When actuator is used as clamping mechanism, there is a danger
of workpiece dropping if there is a decrease in clamping force due
to a drop in circuit pressure caused by a power outage.
Therefore, safety equipment should be installed to prevent
damage to machinery and bodily injury.
2. Provide a shock absorber if the kinetic energy that is applied

to the product exceeds the allowable value.
If the product is used in a state in which the kinetic energy
exceeds the allowable value, it could damage the product, which
could pose a hazard to humans and damage the machinery and
equipment.
Filter, Pressure
control equipment
4. There may be cases in which a speed reduction circuit or a

shock absorber is required.
If the driven object moves at high speeds or has a large weight, it
will be unfeasible for the rotary actuator's cushions alone to
absorb shocks. Therefore, provide a speed-reduction circuit to
reduce the rotary actuator's speed before the thrust is applied to
the cushions, or an external shock absorber to dampen the
shocks. If these countermeasures are taken, make sure to take
the rigidity of the mechanical equipment into consideration.
Warning
1. Select a speed within the product's allowable energy value.
If the product is used in a state in which the kinetic energy of the
load exceeds the allowable value, it could damage the product,
which could pose a hazard to humans and damage the
machinery and equipment.
Fittings & Tubing
3. Make sure that the secured portions will not loosen.

Be sure to adopt a reliable connecting method if the rotary
actuator is used very frequently or if it is used in a location that is
exposed to a large amount of vibrations.
Selection
Air preparation
equipment
2. If there is a chance that it will pose a hazard to humans,

install a protective cover.
If the moving portion of the product will pose a hazard to humans
or will damage machinery or equipment, provide a construction
that prevents direct contact with those areas.
Warning
10. Do not use the product as a shock absorber.
If an abnormal pressure or air leakage occurs, the rotary
actuator's speed reduction capability could become severely
effected, which could pose a hazard to humans and damage the
Pressure switch
Warning
1. If the operation involves load fluctuations, ascending /
descending movements, or changes in frictional resistance,
make sure to provide safety measures.
Operating speed will increase, and bodily injury may occur, or
damage to the machinery itself may occur.
Caution on design
Clean gas filter
Caution on design
Air cylinder
Be sure to read before handling. Refer to main text for more detailed precautions on every series.

Mounting
Warning
Precautions when using external stoppers
1. Before adjusting the angle by supplying air pressure, take

appropriate measures to prevent the equipment from
rotating unnecessary.
When an adjustment is performed under air pressure, the
equipment could rotate and fall during the adjustment, depending
on the mounted posture of the equipment. As a result, it could
pose a hazard to humans and damage the machinery and
equipment.
2. Do not loosen the angle adjustment screw beyond the
allowable adjustment range.
The angle adjustment screw could pull out if it is loosened beyond
its allowable adjustment range, which could pose a hazard to
humans and damage the machinery and equipment.
3. Do not place a magnetic object near the product.
The auto switch is a magnetic sensing type. If a magnetic object
is placed close to it, the rotary actuator could operate suddenly,
which could pose a hazard to humans and damage the
4. Do not modify the product.
By modifying the product, its strength could be affected, which
could lead the product to break. As a result, it could pose a
hazard to humans and damage the machinery and equipment.
If the kinetic energy that is generated by the load exceeds the

actuator's threshold value, an external dampening function must
be provided to absorb the energy.
Furthermore, with the CRA1 series, which is a single rack pinion
type, there is a backlash (within 1 at the rotation end) of the rack
pinion mechanism. Thus, an external stopper is required in order
to determine the correct angle.
External stopper
Provide a buffer angle
Provide a
buffer angle
Angle controlled
by the external
stopper
External
stopper
Figure 10
5. Do not enlarge the fixed throttle by modifying the pipe

connectors.
If the hole diameter is enlarged, the product's rotation speed
increases, causing the shock force to increase and damage the
product. As a result, it could pose a hazard to humans and
damage the machinery and equipment.
6. If shaft couplings are to be used, use those with angular
freedom.
If shaft couplings that lack angular freedom are used, they could
scrape due to eccentricity, leading to equipment malfunction and
product damage. As a result, it could pose a hazard to humans
7. Do not apply to the shaft a load that exceeds the values
given.
If a load that exceeds the allowable value is applied to the
product, it could lead to equipment malfunction, which could pose
a hazard to humans and damage the machinery and equipment.
Provided that a dynamic load is not generated, a load that is
within the allowable radial/thrust load can be applied. However,
applications in which the load is applied directly to the shaft
should be avoided wherever possible. The methods such as
those described below are recommended to prevent the load
from being applied directly to the shaft in order to ensure a proper
operating condition.
Load
Thrust bearing
Load
Flexible coupling
Bearing
8. Place an external stopper in a position that is away from the

rotating shaft.
If the stopper is placed near the rotating shaft, the torque that is
generated by the product itself causes a reaction force that is
directed to the stopper to be applied to the rotating shaft, thus
leading the rotating shaft and the bearing to break. As a result, it
could pose a hazard to humans and damage the machinery and
equipment.
210
Rotation angle of actuator without

external stoppers
For external stopper use, some are provided with
an actuator with rotation angles of 100, 190
and 280, depending on the model.
External
stopper
becomes a fulcrum, and
the load's inertial force
is applied to the shaft as
a bending moment.
If an external stopper is
installed on the shaft
side opposite the load,
the
inertial
force
generated by the load is
applied directly to the
shaft.
Caution
1. Do not use organic solvent to wipe the area of the nameplate
that shows the model.
It will erase what is indicated on the nameplate.
2. Do not hit the rotating shaft by securing the body or hit the
body by securing the rotating shaft.
These actions could cause the shaft to bend or damage the
bearing. When a load must be coupled to the rotating shaft,
secure the rotating shaft.
3. Do not place your foot directly on the shaft or on the
equipment that is coupled to the shaft.
Placing one's weight directly onto the rotating shaft could cause
the rotating shaft or the bearing to become damaged.
4. If a product is equipped with an angle adjustment function,
use it within the specified adjustment range.
If the product is used outside the specified adjustment range, it
could lead to equipment malfunction or product damage. Refer to
the product specifications for details on the adjustment range of
the products.

Air cylinder
Air supply
Speed and bumper adjustment
1. Use clean air.

Do not use compressed air that contains synthetic oil, salt, and
corrosive gases in which chemicals and organic solvents are
present, because it could cause equipment damage or
malfunction.
1. To make a speed adjustment, gradually adjust starting from

the low speed end.
If the speed adjustment is performed from the high speed end, it
could damage the product. As a result, it could pose a hazard to
humans and damage the machinery and equipment.
Warning
1. Do not use the rotary actuator in an environment or location
that poses the risk of corrosion.
Refer to the respective construction diagram for details on the
materials used in the rotary actuator.
Rotary actuator
Air gripper
Directional control
valve
Flow control
equipment
Maintenance
Warning
1. Follow the procedures given in the operation manual to perform
a maintenance inspection. Improper handling could lead to
malfunction or damage the machinery and equipment.
2. During a maintenance inspection, do not disassemble the
equipment with electrical power or with an air supply applied.
3. After the product has been disassembled for inspection,
make sure to perform the appropriate functionality
inspection.
The product specifications cannot be met unless a functionality
inspection is performed.
Caution
1. For lubrication, use the type of grease that is used for the
respective product.
The use of a non-designated lubricant could damage the seals.
2. Series MSQ: Because sizes 1, 2, 3 and 7 require special tools,
they cannot be disassembled. Because sizes 10, 20, 30 and
50 have the table press fit into an angular type bearing, they
cannot be disassembled.
Filter, Pressure
control equipment
Operating environment
4. Do not apply an excessive force to loosen the cushion needle.

The needle itself is provided with a pull stop; however the pull
stop could be damaged if the needle is loosened through the
application of excessive force. As a result, it could pose a hazard
to humans and damage the machinery and equipment.
Fittings & Tubing
3. Ensure that the fluid and ambient temperature are within the
specified range.
If the fluid temperature is less than 5C, the moisture in the circuit
could freeze, causing damage to the seals and leading to
equipment malfunction. Therefore, take appropriate measures to
prevent freezing.
3. Do not use the rotary actuator with its cushion needle in the
fully closed state.
This could tear the seal, which could pose a hazard to humans
Air preparation
equipment
2. Take countermeasures to ensure air quality, such as by

installing an aftercooler, air dryer, or drain catch.
Compressed air that contains a large amount of drainage could
cause the rotary actuator or other types of pneumatic equipment
to malfunction. Therefore, take appropriate measures to ensure
air quality, such as by proving an aftercooler, air dryer, or drain
catch.
2. The cushion needle is not adjusted at the time of shipment.

Therefore, an adjustment must be made in accordance with
the operating speed and the moment of inertia of the load.
The absorption of kinetic energy by the bumper is regulated by
the adjustment of the needle. An improper adjustment could lead
to damage of the equipment and the product. As a result, it could
pose a hazard to humans and damage the machinery and
equipment.
Pressure switch
Caution
1. Install an air filter.
Install an air filter upstream, near the valve. Select an air filter
with a filtration degree of 5 m or finer.
Warning
Clean gas filter
Warning
211
Low-Speed Rotary Table

Rack & Pinion Style
Series MSQX
Size: 10, 20, 30, 50
CRB2
-Z
How to Order
Basic
MSQ X B 10
CRBU2
CRB1
M9BW
MSU
Made to Order
Size
Low-speed specification
Refer to page 370 for details.
10
20
30
50
Number of
auto switches
Nil
S
n
Thread type
Port type
Size
M5
10, 20
Nil
Rc 1/8
G 1/8
TF
30, 50
NPT 1/8
TN
TT NPTF 1/8
CRA1
-Z
2 pcs.
1 pc.
n pcs.
CRA1
CRQ2
Auto switch
Nil
Standard
Made to Order

Nil
For applicable auto switch models, refer to the
table below.
(2-color display)
Water resistant
Indicator
light
Type
Reed
auto switch
Electrical
entry
Load voltage
Wiring
(Output)
3-wire (NPN)
3-wire (PNP)
2-wire
3-wire (NPN)
2-wire
3-wire (NPN)
3-wire (PNP)
2-wire
3-wire
Yes (NPN equiv.)
Grommet
2-wire
No
DC
Auto switch model

AC
Perpendicular
M9NV
M9N
M9PV
M9P
M9BV
M9B
M9NWV M9NW
M9PWV M9PW
M9BWV M9BW
M9NAV1 M9NA1
M9PAV1 M9PA1
M9BAV1 M9BA1
5 V, 12 V
12 V
24 V
5 V, 12 V
12 V
5 V, 12 V
12 V
24 V
5V
12 V
MSQ
MSZ
CRQ2X
MSQX
Special function
CRJ
A96V
A93V2
100 V
100 V or less A90V
In-line

Pre-wired
0.5 1 3 5
connector
(Nil) (M) (L) (Z)
MRQ
Applicable load
A96
IC
circuit
A93
A90
IC circuit
Relay,
PLC
IC
circuit
IC
circuit
Relay,
PLC
IC
circuit
3 m L
(Example) M9NWL
5 m Z
(Example) M9NWZ
D-
369
Series MSQX
Specifications
10
Size
20
Fluid
30
50
Air (Non-lube)
Max. operating pressure
1 MPa
Min. operating pressure
0.1 MPa
0 to 60C (No freezing)
Cushion
Not attached
0 to 190
Maximum rotation angle
190
End port
Port size
M5 x 0.8
Rc 1/8, G 1/8, NPT 1/8, NPTF 1/8

M5 x 0.8
Side port
Output (N m)
0.89
1.8
2.7
4.6
Output under the operating pressure at 0.5 MPa. Refer to page 341 for further information.
Front port
Side port
Symbol
Allowable Kinetic Energy and

Rotation Time Adjustment Range
Made to Order
Refer to page 376 for details.

Symbol
Specifications/Content
-X15 With external stopper
Size
Allowable kinetic energy (J) Stable operational rotation time adjustment range (s/90)
10
0.007
20
0.025
30
0.048
50
0.081
1 to 5
Note) If operated where the kinetic energy exceeds the allowable value, this may cause damage to the
internal parts and result in product failure. Please pay special attention to the kinetic energy levels
when designing, adjusting and during operation to avoid exceeding the allowable limit.
Weight
(g)
Size
10
20
30
50
Basic
500
940
1230
1990
Not including the weight of auto switch.
370

Rack & Pinion Style
Series MSQX

The rotary table turns in the clockwise direction when the A port is pressurized, and in the counter-clockwise direction when the B port is pressurized.
By adjusting the adjustment bolt, the rotation end can be set within the range shown in the drawing for the desired rotation angle.
Counter-clockwise
22.5
Adjustment bolt B
(For clockwise
Clockwise
oc
Cl dju
a
i se
kw
Cloc
k
st wis
m er
en ot
t ra ation
nge end
95
With Adjustment Bolt

Size
10
20
30
50
m
imu
Max
10.2
7.2
6.5
8.2
CRBU2
o
ta unte
tio r-c
n e loc
nd kwise
ng
a d ju
e
stment
19
range 95
0
Adjustment bolt A
B port
CRB2
-Z
A port
CRB1
MSU
CRJ
CRA1
-Z
ro
ro t
on
ati
CRA1
ra
CRQ2
MSQ
MSZ
CRQ2X
MSQX
Rotation Angle Range Example
MRQ
The rotation angle can also be set on a type with inertial absorber.
Adjustment range by
adjustment bolt A
Adjustment bolt A
Adjustment bolt B
(For clockwise
Adjustment range

180 Rotation
Adjustment range by
adjustment bolt A
Adjustment range by
adjustment bolt A
Adjustment range by
adjustment bolt A
D-
Adjustment range
Adjustment range
90 Rotation
Adjustment range
90 Rotation
90 Rotation
371
Series MSQX
100
Arm
Load
Displacement
MSQXB10A
MSQXB20A
300
Displacement (m)
Displacement (m)
400
250
350
200
300
0
10
15
20
25
30
10
20
Load (N)
30
40
Load (N)
MSQXB30A
MSQXB50A
350
300
300
Displacement (m)
Displacement (m)
250
200
150
200
150
100
100
0
10
20
30
Load (N)
372
250
40
50
20
40
60
Load (N)
80
100

Rack & Pinion Style
Series MSQX
Construction
CRB2
-Z
CRBU2
CRB1
MSU
CRJ
o i @5 @6 t
!1
!4 y !5 !6
@3 e r w@2
q @0 !8 @1 u @4 !2 !3 !7
CRA1
-Z
CRA1
!0 !9
CRQ2
MSQ
MSZ
CRQ2X
MSQX
MRQ
Component Parts
Component Parts
Description
No.
Material
No.
Description
Material
Body
Aluminum alloy
15
Wear ring
Cover
Aluminum alloy
16
Piston seal
Plate
Resin
17
Bearing
Bearing steel
Seal
NBR
18
Bearing
Bearing steel
End cover
Aluminum alloy
19
Cross recessed screw No. 0
Piston
Stainless steel
Pinion
Hexagon small nut
Adjustment bolt
10
20
Resin
NBR
Cross recessed screw
Steel wire
Size: 10
Stainless steel
Hexagon this socket head bolt Size: 20 to 50
Steel wire
21
Hexagon socket head cap screw
Stainless steel
22
Hexagon socket head cap screw
Stainless steel
Gasket
NBR
23
Push nut
Stainless steel
11
Gasket
NBR
24
Parallel pin
12
Table
Aluminum alloy
25
Seal washer
13
Bearing retainer
Aluminum alloy
26
Plug
14
Magnet
Carbon steel
NBR
Steel wire
Individual part cannot be shipped.
Replacement Parts
Part no.
Description
Seal kit
No.
Parts included
in seal kit
10
20
30
50
P523010-20
Description
P523020-20
Description
P523030-20
Description
P523040-20
Description
Qty. No.
Qty. No.
Qty. No.
Qty.
Seal
Seal
Seal
Seal
10
Gasket
10
Gasket
10
Gasket
10
Gasket
11
Gasket
11
Gasket
11
Gasket
11
Gasket
15
Wear ring
15
Wear ring
15
Wear ring
15
Wear ring
16
Piston seal
16
Piston seal
16
Piston seal
16
Piston seal
25
Seal washer
25
Seal washer
25
Seal washer
25
Seal washer
A set includes all parts above.

Replacement parts/Grease pack part no: P523010-21 (10 g)
373
D-
Series MSQX
Dimensions
tive
ffec
XA
t
dep
45
WA
e
WB h WC
4 x JJ depth 8
2xJ
JA counter bore depth JB
e
iv
ct
fe
ef XC
8 x WD depth WE (Circumference: 8 equivalents)
XB pth
e
Basic: MSQXBA
BE
22.5
WF
DD
D
BB
DE
CA
2 x JC depth JD
CB
AU
DG
BA
(Max. approx. SU)
Effective depth FC
DF
(Through)
AY
AX
AV
SF
A
AA
BA
YA
SD
SE
AW
BC
FD
2 x JU
(UU)
2xP
Port
FA
Effective depth FB
BD
2 x M5 x 0.8
Port (plugged)
View
(mm)
Size AA
10
20
30
50
AU AV AW AX AY BA BB BC BD BE CA CB
55.4
50
6.6 20
70.8
65
75.4
70
85.4
80
12
7.6 27.5 16
14
12
46
7.6 29
18.5
14
12
50
22
19
15.5 63
10
15.5
38
9.5 34.5 27.8
DD DE DF DG FA FB
FC FD
JA
JB
60
27
4.5 28.5 45h9 46h9 20H9
15H9
4.5
13
6.8
11
6.5
30
76
34
17H9
10
2.5
6.5
17
8.6
14
8.5
32
84
37
6.5 33.5 65h9 67h9 32H9
12 22H9
10
4.5
6.5
17
8.6
14
8.5
37.5 100
50
13 26H9
12
7.5
20
10.5
18
10.5
10
30.5 60h9 61h9 28H9

37.5 75h9 77h9 35H9
(mm)
Size
JC
JD
JJ
10
20
30
50
M 8 x 1.25
12
M5 x 0.8
M10 x 1.5
15
M6 x 1
M10 x 1.5
15
M6 x 1
M12 x 1.75
18
M8 x 1.25
JU
M 8x1
M5 x 0.8
34
13
45
17.7 47
15
32
27
3H9 3.5
19
3H9 3.5
M10 x 1
37
117 10
12
60
25
54
20.5 4H9 4.5
M6 x 1
10
43
36
4H9 4.5
24
4H9 4.5
M10 x 1
M5 x 0.8
Rc 1/8
40
127 11.5 14
65
25
57
23
M6 x 1
10
48
39
4H9 4.5
28
4H9 4.5
M14 x 1.5
Rc 1/8
46
152 14.5 15
75
31.4 66
M8 x 1.25
12
55
45
5H9 5.5
33
5H9 5.5
92
SD SE SF SU UU WA WB WC
In addition to Rc 1/ 8, G 1/ 8, NPT 1/ 8 and NPTF 1/ 8 are also available.
374
3H9 3.5
4H9 4.5
26.5 5H9 5.5
WD
M5 x 0.8

Rack & Pinion Style
Series MSQX
Auto Switch Proper Mounting Position (at Rotation End Detection)

B
A
CRB2
-Z
CRBU2
CRB1
MSU
Magnet
Most sensitive
position
CRJ
Operating range at
proper mounting position (Lm/2)
CRA1
-Z
Operating range of
single auto switch (Lm)
CRA1
CRQ2
Size
10
20
30
50
Reed switch
Operating angle Hysteresis
angle
( m)
Solid state switch

Operating angle Hysteresis
B
angle
( m)
Rotation
angle
190
27
45
90
10
31
49
42
10
190
35
62
80
10
39
66
35
10
190
39
68
65
10
43
72
30
10
190
49
83
50
10
53
87
24
10
MSQ
MSZ
CRQ2X
MSQX
Operating angle m: Value of the operating range of single auto switch (Lm) as represented by rotation angle for shaft
Hysteresis angle: Value of the auto switch hysteresis as represented by angle
MRQ
D-
375
Series MSQX
Made to Order Specifications:

Please contact SMC for detailed specifications, lead times and prices.
Symbol
X150/X151/X152/X153
With External Stopper

Prevent holding torque from being halved at the rotation end.
How to Order
MSQXB 10
Port type
M5
Nil
Rc 1/8
G 1/8
TF
NPT 1/8
TN
NPTF 1/8
TT
Size
10, 20
Nil
X150
X151
X152
X153
Refer to page 369 for the part no. of

auto switches.
Standard, 180
Standard, 90
Symmetric type, 180
Symmetric type, 90
30, 50
Rotation angle
180
X150: Standard, 180
50
Weight
(g)
10
20
30
50
600
570
1150
1090
1460
1390
2390
2280
X152: Symmetric type, 180
X153: Symmetric type, 90

Connection port
30
90, 180
Each rotation end +3
5
Connection port
20
90
X151: Standard, 90
Connection port
10
Specifications other than the above are the same as standard.
Size
90 spec.
180 spec.
Connection port location and rotation angle
Auto switch
Specifications
Size
Rotation angle
X150
Connection port
10
20
30
50
Port type
Connection port location

Symmetric type
Standard
Size
AX M9BW
Values not including the auto switch weight.
Dimensions
ng
ti
era
Ar
op
EB
ED
2xK
Hexagon socket head set screw
NA
NC
NB
EC
GB
ND
GA
(Max. EA)
EF
GD
ran
22.5
(Max. EE)
(
GE
GC 0.5
ge
Note)
EB
Note) This component does not exist for 180 type.
(mm)
GA
GB
GC
GD
GE
NA
NB
NC
ND
47.1
44.3
33.5
14
91.4
80
20
57.1
55.3
43
18
100
25
112.4
58.4
60.3
46
19.5 118.7
110
27
74.4
71.4
56
22
145.8
130
32
Dimensions other than the above are the same as standard.
15.6
19.5
21.5
28
11
14
14
18
7.5
9.5
9.5
11.5
45.2
56.4
61.5
72.9
M8 x 1
M10 x 1
M10 x 1
M14 x 1.5
10
14
14
19
5.5
8
8
8.5
12.5
16.5
16.5
19.5
4
4
4
6
Size
10
20
30
50
376
EA
EB
EC
ED
EE
EF
Series CRQ2X/MSQX
Specific Product Precautions

Refer to front matter 35 for Safety Instructions and pages 4 to 14 for Rotary
Actuator and Auto Switch Precautions.
Selection
Caution
CRB2
-Z
1. Changes in speed occur in applications in which

there are changes to the load during operation, such
as the load being lifted (lowered) against gravity.
2. The purpose of this product is stable rotation at
low-speed.
CRBU2
CRB1
MSU
It does not provide any function to cushion the impact at the

operation start or end.
CRJ
3. Speed may vary at the rotation end depending on

operating conditions. (This phenomenon can be
avoided by using the external stopper.)
CRA1
-Z
CRA1
CRQ2
MSQ
MSZ
CRQ2X
MSQX
MRQ
D-
377

MSQ

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Rotary Table/Rack & Pinion Style

Compact Rotary Table with Low Table Height

Easy mounting of workpiece.

Table inside and outside diameters

(compared with series CRQ)

Positioning pin hole

Accommodates wiring and piping

Easy mounting of body

Mounting from 2 directions

Movement in direction of table's

By using high precision bearing, the movement in the

High precision type

High precision type

Piping position can be selected

Piping from 2 directions (front and side) is possible

Small sizes 1, 2, 3, and 7

Full size (Picture of MSQB1A)

Variety of installation options for space saving

Reference dia (Boss)

Example of auto switch and speed controller mounting

Reference dia (Hole)

External shock absorber types

2 types of shock absorbers are available, for low energy and

Longitudinal mounting space is reduced because there is

Allowable kinetic energy comparison (for size 30)

Moment of inertia (kgm2)

With external shock absorber

With internal shock absorber

Left / Right symmetric type

With adjustment bolt

0.8 0.9 1.0

Rotation time (s/90)

The following graphs show the displacement

Rotary Table/Rack & Pinion Style

Table Displacement (Reference values)

Rotation Accuracy: Displacement Values at 180 (Reference values)

Rotating amount of table side

Rotating amount of table top

Rotating amount of table side

Rotary Table/Rack & Pinion Style

High precision type

Auto switch type

With adjustment bolt

When operating an actuator with a small diameter

The port location cannot be changed

Solid state auto switch

Lead wire length (m)

Rotary Table/Rack & Pinion Style

Maximum operating pressure

Minimum operating pressure

Ambient and fluid temperature

Angle adjustment range

Cylinder bore size

Allowable Kinetic Energy and Rotation Time Adjustment Range

High precision type

Allowable kinetic energy (J)

Rotation time adjustment range for suitable operation (s/90)

High precision type

Note) Excluding the weight of auto switches

Particle generation grade Suction flow rate (example)

High precision type

Note 1) Please refer to Pneumatic Clean Series

11-MSQA is identical to the high precision type and

With adjustment bolt