Documente Academic
Documente Profesional
Documente Cultură
Saleem Khan
Parveen Lehana
I.
S E d t E
D d E
E
d t is the transpose
of the piezoelectric coupling coefficient matrix, E is the
electric field vector, D is the electric displacement vector,
piezoelectric coupling coefficient matrix,
and is the electric permittivity matrix [17]. The stresscharge equation is significant for finite element analysis due
to its involvement in conversion of mechanical strain into
electrical power. Inspite of coupling matrix, piezoelectric
model also depend on the elasticity matrix and relative
permittivity equations. Elasticity matrix is required to
evaluate the elastic constants to transform the <100> axes of
the material into the axes of the substrate orientation.
Elasticity is the relationship between stress and strain.
Hooke's law describes the relationship between stress ( )
and strain ( ) and is given by
C
S
where C is the mechanical stiffness and S is the
compliance. The mechanical stiffness can be designated as a
single value of Youngs Modulus E . Hence Hookes law
can also be written as
ICETACS 2013
The elasticity matrix for isotropic materials can be expressed
as
0
0
0
1
1
0
0
0
1
0
0
0
E
SE
0
0 1 2
0
0
(1 )(1 2 ) 0
0
0
0
0 1 2
0
0
0
0
0 1 2
0
f0
FL3
3EI
where F is the load applied to the free end of beam, L
is the length of the beam, I is the second moment of the
beams crossectional area, and E is the Youngs modulus of
elasticity of the beam material [19]. I can be calculated as
wt
12
2t
E
2
2 L 12
where
1 2
R L2
and
3EI
L3
1
1
6 2 ( 1 2 )
R
Et
where R is the radius of curvature of micro-cantilever
beam due to stress on top and bottom surfaces, v is the
Poissons ratio of the material, t is the thickness of the beam,
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Piezoelectric
Material
Lithium
Niobate
Parameters
Substrate
Material
Silicon
Length
50
Width
10
10
Height
Density
(kg/m 3 )
2330
Be am
mate rial
Aluminium
50
10
1
4700
2700
Silicon
Aluminium
170 x 10 9
70 x 10 9
Poissons Ratio
0.28
0.35
Electrical
Conductivity (S/m)
1 x 10 12
35.5 x 10 6
T hermal Conductivity
(W/(m*K))
130
237
ICETACS 2013
0
0
S11 S12 S13 S14
0
S12 S11 S13 S14 0
S
S
S
0
0
0
13
33
S E 13
0
0
S14 S14 0 S44
0
0
0 S44
S14
0
0
0
S14 ( S11 S12 ) / 2
0
0
11 0
0 11 0
0
0 33
d d 22
d
31
The
d15
d 22
d15
d31
d33
coefficients
d 22
0
0
S11
Values
20.310 Nm-2
10
S12
5.310 10 Nm-2
S13
7.510 10 Nm-2
S14
0.910 10 Nm-2
S33
24.51010 Nm -2
S 44
6.010 10 Nm-2
11
44
33
29
d15
3.7 Cm -2
d 22
2.5 Cm -2
d 31
0.2 Cm -2
d 33
1.3 Cm -2
Parameters
Air
CO 2
Helium
Nitroge n
Dynamic
Viscosity
(kg/ms)
1.87
x10 -5
1.50
x10 -5
2.00 x10 -5
1.80 x10-5
Electrical
Conductivity
(W/mK)
0.026
0.01
7
0.15094
0.026184
Density
(kg/m 3 )
1.165
1.75
0
0.16124
1.1265
T hermal
Conductivity
(k -W/(mK))
0.025
0.01
63
0.142
0.024
Speed of
Sound (m/s)
349
267
1007
349
V.
Fig. 1 shows the meshing design of a microcantilever model. Normal meshing is conducted on the on
the whole enclosed micro-cantilever structure. The
maximum element size selected is 8. The design was
simulated on the computational machine having 3.2 GHz
processor speed. The virtual memory used while simulation
was 2.9 GB. Normal meshing is selected to reduce the
computational load.
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ICETACS 2013
REFERENCES
[1]
[2]
[3]
[4]
[5]
[6]
[7]
[8]
[9]
[10]
[11]
[12]
[13]
[14]
VI.
CONCLUSION
[15]
[16]
[17]
[18]
[19]
[20]
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