International Journal of Emerging Technology and Advanced Engineering

Website: www.ijetae.com (ISSN 2250-2459, Volume 2, Issue 11, November 2012)

Design and Analysis of Capacitive MEMS Viscometric

Sensor for CGM
P.N.Prabhakaran1, M.Renuga2
1,2

Assistant Professor, Department of Electronics and Instrumentation Engineering, JJCET, Trichy-India

Abstract This paper presents a study on the design and

analysis of capacitively based Micro-Electro-Mechanical
Systems (MEMS) sensor for continuous glucose monitoring
(CGM) applications. This sensor consists of Parylene
diaphragm, which is driven by a magnetic field and situated
inside a micro chamber. A biocompatible sensing solution
fills the micro chamber, which is separated from its
surroundings by a semi permeable membrane. An
electrolyte or bio molecule is permeating through the
membrane and binds reversibly to the bio compatible
sensing solution. This results in a viscosity change of the
sensing solution and due to the applied magnetic field
causing a detectable change in the Parylene diaphragm
which can be measured capacitively. This kind of sensors
can be used in continuous glucose monitoring.
INTELLISUITE FEM software is used for modeling and
simulating of MEMS capacitive Viscometric sensor to
optimize design, improve the performance and reduce the
time of fabricating process of the devices.

Furthermore, the rate of glucose consumption is

diffusion limited. Any changes in diffusion layers due to
biofouling (e.g., by protein adsorption, cell deposition,
and capsule formation) on the sensor surface affects the
diffusion rate and thus, the device sensitivity. In addition,
hydrogen peroxide production and interference from
electro deactive chemicals may cause erosion of the
sensor electrodes and deactivation of functional enzymes,
compromising the device accuracy, reliability, and
longevity [4]. As a result, electrochemical CGM sensors
generally exhibit large drifts over time, and require
frequent calibration by finger pricks (typically at least
once every 12 h) [5], [6]. This lack of reliability has been
severely hindering CGM applications to practical
diabetes management. To overcome the drawbacks of
electrochemical detection, alternative glucose sensing
techniques have been developed using MEMS
technology.
Microelectromechanical systems (MEMS) technology
has recently been utilized to manufacture various micro
devices, such as micro sensors, vibration sensors, Micro
probe, thermal vacuum sensors, DNA detection biochips,
accelerometers and vector hall sensors and
microactuators, micro band pass filters, micromirrors,
micromachined piezovalves, microwave switches, micro
impedance pumps, optical switches. Micro capacitive
sensors are widely applied in automotive, biomedical and
various industries. Capacitive sensors are fabricated by
MEMS technology have the benefits of small size, low
cost and high performance. Microelectromechanical
systems (MEMS) technology also holds the potential to
allow integrated implantable sensors for metabolic
monitoring, whose miniature sizes would lead to
improved measurement time response and minimized
invasiveness. MEMS and related technologies have been
applied to glucose sensors that are based on
electrochemical
[9],
[10].
Impedimetric
[14],
eletophoretic [11], thermal [8], [12], optical [15], and
colorimetric [16] detection methods. MEMS glucose
sensors have also exploited microdialysis [17] and
glucose-induced hydrogel swelling [7].
Silicon capacitive sensors are used in large quantities
in automotive, industrial, medical and consumer
applications. Especially, capacitive sensors provide very
high pressure sensitivity, low noise and low temperature
sensitivity and preferred in many high performance
applications.

Keywords - MEMS, bio-compatibility, bio-sensor,

continuous
glucose
monitoring
(CGM),
INTELLISUITE FEM, diabetes, viscometry.
I. INTRODUCTION
Long term continuous monitoring devices are critically
needed for a number of applications, including the
monitoring of blood glucose level. The close monitoring
of daily blood sugar levels reduces the risk of diabetesrelated complications by allowing timely identification
and correction of hyperglycemia (high blood sugar level)
as well as hypoglycemia (low blood sugar level), a
condition that typically results from excessive insulin
uptake or inadequate glucose intake. This can be most
effectively achieved by continuous glucose monitoring
(CGM),
which
involves
constantly
repetitive
measurements of physiological glucose levels.
Currently, subcutaneously implanted enzymatic
electro chemical detection is the prevailing CGM
technique and is the basis for several commercially
available devices, such MedtronicMiniMed Paradigm
[1], Freesstyle Navigator [2], and Dexcom Seven Plus
[3]. Electrochemical methods are capable of sensitive and
specific glucose detection but suffer from some
significant drawbacks. Firstly, the irreversible
consumption of glucose in electrochemical detection
induces a potential change in the equilibrium glucose
concentration in the tissue and thus affects the actual
measured glucose level.
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International Journal of Emerging Technology and Advanced Engineering

Website: www.ijetae.com (ISSN 2250-2459, Volume 2, Issue 11, November 2012)
Capacitive sensors rely upon the applied load altering
the distance between the two electrodes resulting in a
change in the capacitance. Typically, the position of one
electrode is fixed while the second electrode moves
relative to it. Many capacitive based microsensors have
been developed to date but continuing for fabricating
such devices. Silicon fusion bonding, improved silicon
etching processes and the use of finite element modeling
have enabled the rapid development of recent devices.
This paper presents the design and implementation of a
MEMS capacitive sensor system for biomedical
applications using INTELLISUITE simulation tool.

Then the 3D model of the device could be visualized

in the 3D viewer, and the model exported to an analysis
module.
TABLE I
DIMENSION OF CAPACITIVE SENSOR

II. PRINCIPLE AND DESIGN

The capacitance between two Parallel electrodes can
be expressed as

LAYERS

LENGTH
(m)

WIDTH
(m)

THICKNESS
(m)

Substrate

500

500

Diaphragm

420

420

Electrodes

400

400

0.1

SiO2

500

500

TABLE II
MATERIAL PROPERTY OF CAPACITIVE SENSOR

C = orA
d
Where o, r, A and d are permittivity of free space
(8.85410-14 F/cm), relative dielectric constant of
material between the plates (which is unity for air),
effective electrode area and gap between the plates,
respectively. From this relationship increasing or
decreasing the spacing between two plates would result
in a change in capacitance.
The MEMS capacitive sensor device is based on a
freestanding Parylene diaphragm that is situated inside a
micro chamber. The diaphragm is embedded with a
moving gold electrode, which forms a capacitor with a
fixed gold electrode on the substrate below. Separating
the electrodes is a sealed air gap. A set of Permalloy thinfilm strips is also integrated on the diaphragm. The
device is placed in a magnetic field produced, for
example, by a solenoid outside the skin. The magnetic
field generates a torque in the Permalloy film strips,
which has the magnitude T=VMH. Here, V is the total
Permalloy volume, H is the magnetic field component
perpendicular to the Permalloy surface and M is the
magnetization along the length of the Permalloy strips.
The torque is directed along the width of the diaphragm,
and causes diaphragm bending. Thus, a time-dependent
magnetic field generates a time-dependent torque, which
in turn causes the diaphragm to deform.
The design process of the sensor is carried out using
INTELLISUITE FEM simulation software. The sensor is
designed using both INTELLIFAB and 3D builder tool.
Using the fabrication process, the masks for the MEMS
device were imported first, then a process table was
generated which included all of the process steps
necessary to create the device and form which the
resulting material properties were determined. During
process design, the imported mask set was linked to the
process, which provided the definition of the x-y
geometry of the structure.

MATERIAL

YOUNGS
MODULS

POISSON
RATIO

DENSITY

Silicon

160

0.226

2.3

Silicon
dioxide

73

0.17

2.2

Gold

74.48

0.42

19.32

Parylene C

40000

0.4

1.3

Figure 1 shows the structure of the MEMS capacitive

sensor. The sensor is composed of a square Parylene
diaphragm of 3 m thickness that deflects because of
torque produced due to the applied magnetic field.

Figure 1(a) 3D View of Capacitive Sensor

Over the diaphragm, gold is deposited to form

electrode which acts as the movable plate of a differential
capacitor, and a fixed gold electrode is deposited over the
silicon dioxide layer which acts as an insulating layer
between electrode and the substrate.
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International Journal of Emerging Technology and Advanced Engineering

Website: www.ijetae.com (ISSN 2250-2459, Volume 2, Issue 11, November 2012)
<< w; << h
= length of the beam
w = width of the beam
h = height of the beam.
This assumption allows neglecting the shear stresses
and residual stresses near the fixed supports.
Finite Element Analysis (FEA) was performed since
the gap is not uniform when the diaphragm deflects and
to calculate the capacitance of the sensor due to
developed stress in the Parylene diaphragm. The
diaphragm moves up and down in response to
mechanical pressure. The diaphragm and the lower
surface of the sensor together form a parallel plate
capacitor whose capacitance changes with pressure.

The Permalloy strips are electroplated over the

movable gold electrode plate. The diaphragm is
suspended over the substrate by a gap of 5 m supported
by beams. The diaphragm and the substrate are separated
by air gap and a thin layer of SiO2.

A. Pressure VS Displacement
Increasing the applied pressure to the top face of the
diaphragm in step, diaphragm moves up and down. A
load applied here is pressure with a 0.1MPa and
displacement along Z-axis is obtained as shown in the
figure 2(a).

Figure 1(b) Z scale extended view

The designed sensor was imported to Thermo ElectroMechanical analysis tool for further static and analysis of
the sensor.
III. RESULTS AND DISCUSSION
The device is placed in a magnetic field produced, for
example, by a solenoid outside the skin. The magnetic
field generates a torque in the perm alloy film strips,
which has the magnitude T = VMH. Here, V is the total
perm alloy volume, H is the magnetic field component
perpendicular to the diaphragm surface and M is the
magnetization along the length of the perm alloy strips.
The torque is directed along the width of the diaphragm,
and the causes diaphragm bending. The device is placed
inside the micro chamber, which is filled with sensing
solution, which is separated from its surroundings by a
semi permeable membrane. An electrolyte or any bio
component permeates through the membrane and binds
reversibly to sensing solution. That results in a viscosity
change of the sensing solution. By calculating equivalent
pressure acting on the diaphragm due to the viscosity
change and torque produced, the corresponding
capacitance changes can be achieved. Based on the
capacitance value, the concentration of an electrolyte or
bio component in the blood level can be determined.
The diaphragm deflects towards the substrate under an
increasing external pressure, thus increasing the device
capacitance value. Stretching of the plate has been
neglected, since the gap between two plates is less when
compared to the thickness of diaphragm. According to
Bernoulli-Euler beam equation, the stress like residual
stress and shear stress are negligible if the beam
dimensions are in Bernoulli-Euler limit.

Figure 2(a) Displacement of diaphragm of capacitive sensor

Figure 2(b) 2D plot of pressure VS displacement

Increasing the load to the diaphragm from few to

several megapascals, the displacement gradually
increases, which can be shown from graph as illustrated
in figure 2(b).
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International Journal of Emerging Technology and Advanced Engineering

Website: www.ijetae.com (ISSN 2250-2459, Volume 2, Issue 11, November 2012)
B. Pressure VS Capacitance
The diaphragm moves up and down in response to
pressure applied. The diaphragm and lower surface of the
sensor together form parallel plate capacitor whose
capacitance changes with pressure. The change in
capacitance of the sensor is observed due to the
deformation of diaphragm for the applied pressure
ranging from 0.1MPa to 1MPa. The graph is plotted for
increasing pressure and corresponding capacitance value
is shown in figure 3(a). As the pressure increases, the
capacitance value is also increasing linearly.

The capacitance value is achieved at the range of 30Pf

and values are increasing and decreasing to the
corresponding load applied. Thus, from the capacitance
value, the increasing or decreasing of concentration of an
electrolyte or bio molecule can be measured. This device
can be used in the biomedical applications especially for
continuous glucose monitoring.
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Figure 3(a) 2D plot of pressure VS Capacitance

C. Natural Frequency Analysis

Natural frequency is the frequency at which a system
naturally vibrates once it has been set into motion. It is
the frequency at which the system oscillates between the
original and the displaced position. Frequency analysis
allows quickly checking our model setup and meshing
convergence information. Since AC/Frequency analysis
results can be performed quickly, they are often used to
make sure of the model accuracy.
TABLE III
NATURAL FREQUENCY OF SENSOR
MODE

FREQUENCY(Hz)

1.92764e+006

2.2847e+006

3.4527e+006

IV. CONCLUSION
The following were derived from modeling and
analyzing of the sensor. First, the sensor model
developed in INTELLISUITE FEM software. The static
analysis and the thermo electro mechanical analysis were
performed. The FEA modeling and simulated data were
generated. The capacitive response of the sensor
performed as expected according to the relationship of
the spacing of the plates.
138