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Measured
thickness,um
0.329
2 - square
0.441
3 - square
1.019
4 - small square
0.697
5 - small
1.019
square
6 - small square 0.892
Free standing 1 46.965
Comments
Diamond film on Si
Large square
Diamond film on Si
Large square
Diamond film on Si
Large square
Diamond film on Si
Small square
Diamond film on Si
Small square
Diamond film piece
Spectral transmittance measurement was done in 700-1000nm range using highresolution spectrometer. The thickness was found using thick film algorithm (based
on FFT)
Fig. 2 Same data as Fig. 1 only calibrated to show real transmittance spectrum
Fig. 3 Free standing 1 sample - thickness is determined using thick film algorithm
(peak indicates the thickness value). Thickness 469468 Angstroms is displayed is
parameters table.
II.
Fig. 4 Measurement results of the diamond film thickness (sample 1). Thickness is
inferred from the best fit to measured data. Thickness=3290 Angstroms
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III.
Fig. 8 Measurement results of the diamond film thickness (sample 4). Thickness is
inferred from the best fit to measured data. Thickness=6971 Angstroms. This sample
shows low surface roughness. Effective surface roughness of ~ 200A was inferred from
the best fit.
VI. Sample 5 (small square)
Fig. 10. Measurement results of the diamond film thickness (sample 6). Thickness is
determined using thick film algorithm. Thickness = 8960 Angstroms