Equipment for Physical and

Chemical Industry

General Purpose Equipment/

P.1
Measuring Equipment
Thermostatic/Drying .......... Thermoelectric Bath
Heating/Cooling ................. Chiller
Equipment for DI Water ..... Filter/Regulator/Flow Switch/Piping etc.
Fluid Feed, Pressure Feed, Pressurization,
Pressure Reduction ........... Pump/Flow Switch/Piping
Stirring ............................... Air Combination
Balance ....................... Ionizer

Cultivation/Separation/
Analysis

P.5

Storage/Transfer

P.6

Cooling Unit for Evaporator ....... Chiller

Dispense Pump
Liquid Dispense Pump

Test-tube ............................ Electric Actuator

Experimental Equipment

P.6

Tubing
Fittings

Cleaning/Sterilization

P.7

2 Port Valve
Filter

Process Gas Equipment

P.7

Regulator
Diaphragm Valve

High Vacuum Equipment

P.8

High Vacuum Equipment

P.8
Clean Series/
Static Electricity Elimination
Equipment
Ionizer

P-E12-16A

General Purpose Equipment/Measuring Equipment

Thermostatic/Drying
Accurately controls the temperature of liquid in the bath. Can indirectly control the temperature of chemical bottles,
test tubes, flasks, cooling coils (heat exchangers) in the thermostatic bath.

Thermoelectric Bath
Peltier-type Thermoelectric Bath/HEB

Peltier-type Thermoelectric Bath/INR-244-757

P.29

P.29

Cooling Capacity: 200 W

Temperature Stability: 0.04C

Cooling Capacity: 140

W
Temperature Stability: 0.01C

Supplies the dry air for N2 gas replacement.

Membrane Air Dryer (Hollow fiber membrane)

Membrane Air Dryer/IDG

P.11

Heatless Air Dryer

Heatless Air Dryer/ID

P.11

Refrigerated Air Dryer

Refrigerated Air Dryer/IDF

Standard dew point (C) : 15, 20, 25, 40, 60

Heating/Cooling
Chiller (Circulating Fluid Temperature Controller)
Three types of cooling and heating methods(Refrigerated/Water-cooled/Peltier-type) can be
selected from for a wide range of applications.

Thermo-chiller

Laser machining

P.28
Refrigerated Thermo-chiller/HRZ P.29
Water-cooled Thermo-chiller/HRW P.29
Thermo-chiller Compact Type/HRS

Cooling Capacity: 1 kW to 30 kW
Temperature Stability: 0.1/0.3C
Electronic
microscope

Thermo-con
Peltier-type Thermo-con/HEC

Ultra sonic wave

inspection machine

P.29

Cooling Capacity: 140 to 1200 W

Temperature Stability: 0.01C to 0.03C

Controls the temperature of chemicals by directly cooling and heating them.

Can directly control the temperature of chemicals such as hydrofluoric acid,
sulfuric acid, ammonia water, deionized water, etc.

Chemical Thermo-con
Peltier-type Chemical Thermo-con/HED

Cooling Capacity: 300 to 750 W

Temperature Stability: 0.1C

P.29

Reagent cooling equipment

P.11

Equipment for DI Water

Equipment for DI water line, such as DI water manufacture equipment or analysis equipment, and peripheral devices.
Stainless steel or fluoropolymer products
Filter

Regulator

Flow Switch

High Precision Filters for Liquids

High Precision Filter for Liquids/FGH

P.28

Quick Change Filter for Cleaning Fluid/FQ1

2 Port Valve

Restrictor

Needle Valve (Restrictor)

Fluoropolymer Needle Valve/LVN

P.18

P.28

HEPO2element
Membrane element

Regulators

Flow Switches
P.14

Clean Regulator/Fluororesin Type/SRF

Clean Regulator/SRH
Regulator for Water/WR

Digital Flow Switch for Deionized Water and Chemical Liquids/PF2D

P.14
P.14

Digital Flow Switch for PVC Piping/PF3W

P.22

2 Port Valves

Fittings
Stainless Steel 316 One-touch Fittings/KQG2

P.16

Stainless Steel 316 Insert Fittings/KFG2 P.17

S Couplers Stainless Steel Type/KKA

P.17
P.17

Clean One-touch Fittings for Blowing/KP

Fluoropolymer Fittings/LQ

P.22

Tubing

Air Operated Chemical Liquid Valve/Compact Type/LVD

P.25

P.25

Vinyl Chloride Air Operated Valve/LVP P.25

PVC Quick Drain Valve/LVW P.25

Fluoropolymer Tubing/TL P.19

FEP Tubing (Fluoropolymer)/TH

P.25

Air Operated Chemical Liquid Valve/Threaded Type/LVA P.25

Manually Operated Chemical Liquid Valve/Integral Fitting/Threaded Type/LVH P.25
Chemical Liquid Valve/Non-Metallic Exterior/LVQ

P.17

Fluoropolymer Tubing (PFA)/TLM

Air Operated Chemical Liquid Valve/Integral Fitting Type/LVC

P.20
P.19

Soft Fluoropolymer Tubing (Modified PTFE)/TD P.19

General Purpose Equipment/Measuring Equipment

Fluid Feed, Pressure Feed, Pressurization, Pressure Reduction
Process Pumps (Diaphragm Pumps)

Installation Examples

Automatically Operated Type (Internal Switching Type) Air Operated

Type (External Switching Type)/PA(F) 3000/5000 P.26

Transferring and Collecting liquid

Built-in Solenoid Valve Air Operated Type (External Switching Type)/

PB1000A/PB1313A P.26

Transferring liquid
by pressure

Atomizing liquid

Stirring liquid

Fittings & Tubing

Fluoropolymer Fittings/LQ

Reagents Transfer
P.17

Analyzer

Fluoropolymer Bore Through Connector/

LQHB P.17

LVM3 port

Fluoropolymer Tubing

Head

Fluoropolymer Tubing/TL P.19

P.20
FEP Tubing (Fluoropolymer)/TH P.19
Fluoropolymer Tubing (PFA)/TLM

Soft Fluoropolymer Tubing (Modified PTFE)/

TD P.19

Bellows

Syringe pump

Pressure Feed of Chemicals

Flow switch
N2

Flow Switches
3-Color Display Digital Flow Switch for Water/PF3W

Series LQHB
Bore Through Connector

Series LQ
Male Connector

Digital Flow Switch for Air/PF2A P.22

Discharge of chemicals

P.22

Digital Flow Switch for Deionized Water and Chemical Liquids/

PF2D P.22

A changing of the tube position is available in accordance

with the depth of the container.

Dispense Pump
Dispense Pump/LDP

P.26

<Special order>

Liquid Dispense Pump

Liquid Dispense Pump/
LSP P.26

Digital Pressure Switches

2-Color Display Digital Pressure Switch/ZSE80(F)/ISE80(H)

P.20

P.21
Low Differential Pressure Sensor/PSE550 P.21
Pressure Sensor for General Fluids/PSE560

Chemical Liquid Valve

Direct Operated 2/3 Port Solenoid Valve
for Chemical Liquids/LVM P.24

Stirring
Filter, regulator, and oil mist separator for air motor type stirring machine. Removes the dust and oil mist.

Air Filters/Regulators
Modular Type F.R.L. Unit/AC P.12
Air Filter/AF

P.12

Regulator/AR P.12
Filter regulator/AW

P.13
P.12

Mist Separator/AFM

Finger Valve (2 Port)/VHK P.24

Fittings & Tubing

One-touch Fittings/KQ2

P.15

Balance
Static Electricity Elimination Equipment
Antistatic equipment for samples or containers of electronic
balance

Ionizers
Ionizer/IZS40/41/42

P.23

Ionizer/Nozzle Type/IZN10 P.23

Ionizer/Fan Type/IZF10 P.23
Electrostatic Sensor/IZD10

P.23

Electrostatic Sensor Monitor/IZE11 P.23

Handheld Electrostatic Meter/IZH10

P.23

Clean Air Module

Clean Air Module/LLB

P.11

Air Blow Module/LLB1 P.11

Component Parts: Flow switch, Regulator, ON/OFF valve,
Restrictor, Filter

Cultivation/Separation/Analysis
Cooling Unit for Evaporator
Circulating Fluid Temperature Controller
Applicable to rotary evaporators, various concentrators, and distillators.

Thermo-chiller

Thermoelectric Bath

Thermo-chiller Compact Type/HRS

P.28

Cooling Capacity: 1

kW to 5 kW
Temperature Stability: 0.1C

Peltier-type Thermoelectric Bath/INR-244-757

Cooling Capacity: 200

P.29

Temperature Stability: 0.04C

Temperature control of concentration fluid

Conductivity meter

Peltier-type Thermoelectric Bath/

INR-244-757

Dispense Pump
Dispense Pump/LDP

P.26

Liquid Dispense Pump

Liquid Dispense Pump/LSP

P.26

<Special order>

Chemical Liquid Valve

Direct Operated 2/3 Port Solenoid Valve
for Chemical Liquids/LVM P.24

Highly integrated resin manifold (Made to Order)

LVM150
LVM100
LVM200

LVM095

Storage/Transfer
Test-tube
Electric Actuators
P.31

Electric Actuator/Slider Type/LEF

Application example of
specimen transfer system

P.33
Electric Gripper/LEH P.33
Card Motor/LAT P.34
Electric Slide Table/LES

Experimental Equipment
Tubing
Tubing
Polyurethane Tubing/TU

Fluoropolymer Tubing
P.18

Polyurethane Coil Tubing/TCU

Polyolefin Tubing /TPH

FEP Tubing (Fluoropolymer)/TH

P.19

P.19

Soft Fluoropolymer Tubing (Modified PTFE)/TD

P.19

Fluoropolymer Tubing/TL P.19

P.20

Fluoropolymer Tubing (PFA)/TLM P.20

Antistatic Tubing/TA

P.19

Tube Cutter/TK P.20

Fittings
Fittings
One-touch Fittings
One-touch Fittings/KQ2

P.15

Brass One-touch Fittings/KQB2

P.15

Stainless Steel 316 One-touch Fittings/

KQG2 P.16
Stainless Steel 316 Insert Fittings/
KFG2 P.17
Miniature Fittings/MS P.17

Fluoropolymer Fittings Hyper Fittings/

LQ P.17
S Couplers/KK/KKH P.16
S Couplers Stainless Steel Type/
KKA P.17
S Couplers/KK130 P.16
Clean One-touch Fittings for Blowing/
KP P.17

Cleaning/Sterilization
2 Port Valves
2 Port Valves

Pinch Valve

Direct Operated 2 Port Solenoid Valve/VX21/22/23

Pilot Operated 2 Port Solenoid Valve/VXD

P.24

P.24

P.24
P.24
Zero Differential Pressure Type/Pilot Operated 2 Port Solenoid Valve/VXS P.24
Direct Operated 2/3 Port Solenoid Valve for Chemical Liquids/LVM P.24
Zero Differential Pressure Type/Pilot Operated 2 Port Solenoid Valve/VXZ
Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air/VDW

Filters
Clean Gas Filter

Air Filters for Clean Blow

Clean Gas Filter /SF
Clean Air Filter/SFD

P.11
P.11

Process Gas Equipment

Regulator P.27
Diaphragm Valve P.27
Check Valve P.27
Vacuum Generator P.27
Flow Switch P.27

Pinch Valve/AXTP
<Special order>

P.24

High Vacuum Equipment

High Vacuum Valves
Aluminum High Vacuum Angle Valve/XL

P.30

Stainless Steel High Vacuum Angle Valve/XM

Stainless Steel High Vacuum In-line Valve/XY

P.31

Smooth Vent Valve/XVD

Slit Valve/XGT

P.30
P.30

P.31

Clean Series/Static Electricity Elimination Equipment

Ionizers
Ionizer/IZS40/41/42 P.23

P.23
P.23

Ionizer/Nozzle Type/IZN10
Ionizer/Fan Type/IZF10

INDEX
Air Preparation Equipment (Dryers, Filters)
Refrigerated Air Dryer IDF P.11
Heatless Air Dryer ID P.11
Membrane Air Dryer IDG P.11
Clean Gas Filter SF P.11
Clean Air Filter SFD P.11
Clean Air Module LLB P.11
Air Blow Module LLB1 P.11

F.R.L. Units
Modular Type F.R.L. Unit AC P.12
Air Filter AF P.12
Mist Separator AFM P.12
Micro Mist Separator AFD P.12
Regulator AR P.12
Regulator with Backflow Function AR P.12
Lubricator AL P.12
Filter Regulator AW P.13
Filter Regulator with Backflow Function AW P.13
Mist Separator Regulator AWM P.13
Micro Mist Separator Regulator AWD P.13
Modular Type F.R.L Unit ACG P.13

Pressure Control Equipment (Regulators)

Regulator with Built-in Pressure Gauge ARG P.14
Regulator with Built-in Pressure Gauge with Backflow
Function ARGK P.14
Filter Regulator with Built-in Pressure Gauge AWG P.14
Filter Regulator with Built-in Pressure Gauge
with Backflow Function AWGK P.14
Clean Regulator SRH P.14
Precision Clean Regulator SRP P.14
Clean Regulator/Fluororesin Type SRF P.14

Rectangular Multi-connector KDM P.16

Piping Module KB P.16
Antistatic One-touch Fittings KA P.16
Stainless Steel 316 One-touch Fittings KQG2 P.16
Stainless One-touch Fittings KG P.17
Stainless Steel 316 Insert Fittings KFG2 P.17
Miniature Fittings Stainless Steel 316 MS P.17
S Couplers Stainless Steel Type KKA P.17
Clean One-touch Fittings for Blowing KP P.17
Fluoropolymer Fittings Hyper Fitting LQ1 P.17
Fluoropolymer Fittings Hyper Fitting LQ3 P.17
Fluoropolymer Bore Through Connector LQHB P.17
Fluoropolymer Needle Valve LVN P.18
Low Torque Rotary Joint MQR P.18
Nylon Tubing T P.18
Soft Nylon Tubing TS P.18
Polyurethane Tubing TU P.18
Soft Polyurethane Tubing TUS P.18
Hard Polyurethane Tubing TUH P.18
Wear Resistant Tubing TUZ P.18
Polyurethane Coil Tubing TCU P.19
Polyurethane Flat Tubing TFU P.19
2-Layer Soft Fluoropolymer Tubing TQ P.19
Antistatic Soft Nylon Tubing TAS P.19
Antistatic Polyurethane Tubing TAU P.19
Fluoropolymer Tubing TL P.19
FEP Tubing (Fluoropolymer) TH P.19
Soft Fluoropolymer Tubing TD P.19
Fluoropolymer Tubing (PFA) TLM P.20
Polyolefin Tubing TPH P.20
Tube Cutter TK P.20

Pressure Switches

Regulator for Water WR110 P.14

2-Color Display High-Precision Digital Pressure Switch

ZSE30A(F)/ISE30A P.20

Fittings and Tubing

2-Color Display High-Precision Digital Pressure Switch

ZSE40A(F)/ISE40A P.20

One-touch Fittings KQ2 P.15

Metal One-touch Fittings KQB2 P.15
Rotary One-touch Fittings KS/KX P.15
One-touch Fittings Manifold KM P.15

Digital Pressure Switch ZSE10(F)/ISE10 P.20

2-Color Display Digital Pressure Switch
ZSE80(F)/ISE80(H) P.20

Insert Fittings KF P.15

Air Checker: Electronic Pressure Switch

PS1000/1100/1200 P.21

Miniature Fittings M P.15

Compact Pneumatic Pressure Sensor PSE53 P.21

Self-align Fittings H/DL/L/LL P.15

Compact Pneumatic Pressure Sensor PSE54 P.21

Self-seal Fittings KC P.15

Low Differential Pressure Sensor PSE55 P.21

S Couplers KK/KKH P.16

Pressure Sensor for General Fluids PSE56 P.21

S Couplers KK130 P.16

Multi-Channel Digital Pressure Sensor Controller PSE200 P.21

Multi-connector DM P.16

2-Color Display Digital Pressure Sensor Controller PSE300 P.21

Multi-connector with One-touch Fittings DMK P.16

Pressure Switch / Read Switch Type IS10 P.21

INDEX

Flow Switches
2-Color Display Digital Flow Switch PFM P.22
Digital Flow Switch for Air PF2A P.22
3-Color Display Digital Flow Switch for Water PF3W P.22
3-Color Display Digital Flow Switch for PVC Piping PF3W P.22

Regulator/Back Pressure Regulator

for General Applications AK/BP P.27
Diaphragm Valve for Ultra High Purity AP P.27
Diaphragm Valve for Ultra High Purity AZ P.27
Check Valve/Vacuum Generator/Flow Switch AP P.27

Digital Flow Switch for Deionized Water and

Chemical Liquids PF2D P.22

Filters for Liquids

Static Electricity Elimination Equipment

For cleaning Fluid/Quick Change Filter FQ1 P.28

High Precision Filter for Liquids FGH P.28

Ionizer IZS40/41/42 P.23
Ionizer/Nozzle Type IZN10 P.23

Chillers (Circulating Fluid Temperature Controller)

Ionizer/Fan Type IZF10 P.23

Refrigerated Thermo-cooler HRG P.28

Electrostatic Sensor IZD10 P.23

Thermo-chiller HRS P.28

Electrostatic Sensor Monitor IZE11 P.23

Thermo-chiller HRS-X017 P.28

Handheld Electrostatic Meter IZH10 P.23

Refrigerated Thermo-chiller HRZ P.29

Refrigerated Dual Thermo-chiller HRZD P.29

2/3 Port Valves for Fluid Control

Finger Valve VHK P.24
Direct Operated 2 Port Solenoid Valve VX2 P.24
Pilot Operated 2 Port Solenoid Valve VXD P.24
Zero Differential Pressure Type/Pilot Operated
2 Port Solenoid Valve VXZ P.24

Water-cooled Thermo-chiller HRW P.29

Peltier-type Thermo-con HEC P.29
Peltier-type Chemical Thermo-con HED P.29

Thermoelectric Bath
Peltier-type Thermoelectric Bath INR-244-757 P.29

Zero Differential Pressure Type/Pilot Operated

2 Port Solenoid Valve VXS P.24

Peltier-type Thermoelectric Bath HEB P.29

Compact Direct Operated 2 Port Solenoid Valve VDW P.24

Temperature Control Equipment

Compact Direct Operated 2/3 Port Solenoid Valve

for Chemical Liquids LVM P.24
Pinch Valve AXTP20<Special order> P.24
Air Operated Chemical Liquid Valve/Integral Fitting Type
LVC P.25
Air Operated Chemical Liquid Valve/Threaded Type LVA P.25
Manually Operated Chemical Liquid Valve/Integral Fitting/
Threaded Type LVH P.25
Air Operated Chemical Liquid Valve/Compact Type LVD P.25
Chemical Liquid Valve/Non-Metallic Exterior LVQ P.25
Vinyl Chloride Air Operated Valve LVP P.25
PVC Quick Drain Valve LVW P.25

Peltier-type Air-thermo HEA P.30

Thermo-dryer with Air Temperature Adjustment Function
IDH P.30

High Vacuum Equipment

Aluminum High Vacuum Angle Valve XL P.30
Stainless Steel High Vacuum Angle/In-line Valve XM/XY P.30
Smooth Vent Valve XVD P.31
Slit Valve XGT P.31

Electric Actuators
Electric Actuator/Slider Type LEF P.31

Pumps
Process Pump/Double Acting Pump PA P.26
Process Pump/Diaphragm Pump PB P.26

Electric Actuator/Rod Type LEY P.32

Electric Actuator/Guide Rod Type LEYG P.32
Electric Slide Table LES P.33

Non-Metallic Pump/Double Acting Pump PAF P.26

Electric Rotary Table LER P.33

Fixed Amount Liquid Dispense Pump (Solenoid Type)

LSP P.26

Controller LEC P.34

Dispense Pump LDP<Special order> P.26

Programless Controller LECP1 P.34

Electric Grippers LEH P.33

Pulse Input Driver LECPA P.34

Process Gas Equipment

AC Servo Motor Driver LECS P.34

Regulator/Back Pressure Regulator for Ultra High Purity

AP/SL/AZ/BP P.27

Card Motor LAT3 P.34

Card Motor Controller LATC4 P.34

10

Equipment Lineup for Physical and Chemical Industry

Air Preparation Equipment (Dryers, Filters)
Refrigerated Air Dryer IDF

Heatless Air Dryer ID

Refrigerant: R134a(HFC)[IDF1E to 15E1]

R407C(HFC)[IDF22E to 75E]
Improved corrosion resistance with the use
of a stainless steel, plate type heat changer.
(IDF4E to 75E)

Supply dry air with a low dew point below 30C.

Heater or electric control board is not required.
Possible to check the outlet dew point with the
indicator. (Selfregenerative style allows for easy
maintenance.)

Series

Applicable
compressor

IDF1E to 75E

0.75 to 75 kW

Air flow capacity m3/min (ANR)

50 Hz

60 Hz

Series

Outlet flow L/min (ANR)

Inlet flow L/min (ANR)

0.10 to 11.0

0.12 to 12.4

ID

80 to 780

100 to 975

Membrane Air Dryer IDG

Clean Air Filter SFD

Possible to easily supply dry air using the

hollow fiber membrane!
Non-fluorocarbon
Power supply not required
No vibration or heat discharge.
With a dew point indicator.

Built-in hollow fiber element

Pressure drop
(Inlet pressure 0.7 MPa,
Max. flow rate)

SFD100

Series

Outlet flow L/min (ANR)

Standard dew point (C)

10 to 1000

15, 20, 40, 60

IDGA/IDG

Clean Gas Filter

Series

Type

SFD100

Disposable type
(Irreplaceable element)

SFD200

Cartridge type
(Replaceable element)

SFD200

Operating pressure

Filtration

MAX.1.0 MPa

0.01 m
(Filtration efficiency:
99.99%)

SF

Cartridge type allows element replacement

(SFA100/200/300, SFB100)
Compact disposable type
(SFB300, SFC100)

SFB
SFA
Series

Operating pressure

SFA100200300
SFB100
SFB300
SFC100

Max.0.99 MPa (Vacuum: 1.3 x 106 kPa)

Type
Cartridge type disc
Cartridge type straight
Disposable type straight
Disposable type multiple disc

SFC

SFB300

SFB200
Filtration

Max.0.99 MPa (Vacuum: 1.3 x 106 kPa)

0.01 m

Max.0.99 MPa (Vacuum: 1.3 x 106 kPa)

(Filtration efficiency 99.99%)

Max.0.99 MPa (Vacuum: 1.3 x 106 kPa)

Clean Gas Strainer

SFB200

Cartridge type straight

120 m

Max.0.99 MPa (Vacuum: 1.3 x 106 kPa)

Clean Air Module LLB

Air Blow Module LLB1

Clean equipment modularized (Reduction of piping labor/

Space-saving)
Clean air is easily available.
Nominal filtration rating: 0.01 m (Filtration
efficiency 99.99%)
Wetted parts: Grease-free, Silicone-free
Assembled in a clean room, shipped
and packed in a duplicate package
24 combinations available

Reduction of piping labor/Space-saving

Nominal filtration rating: 0.01 m (Filtration efficiency 99.99%)
Wetted parts: Grease-free
3 combinations available

LLB4

LLB3
Series

Fluid

Set pressure

LLB3
LLB4

Clean Air
Note)
N2 gas

0.05 to 0.4 MPa

Flow range L/min (ANR)

5 to 100
50 to 500

Note) Inlet air conditions ISO 8573-1 Quality grade: Equivalent to 1.4.1 to 1.6.1

11

Series

Fluid

Set pressure

Flow range L/min (ANR)

LLB1

Air N2 gas

0.05 to 0.6 MPa

Up to 100

Equipment Lineup for Physical and Chemical Industry

F.R.L. Units
Modular Type F.R.L. Unit AC
Easy replacement of the element
The element and the bowl are in one piece. Replacement can be done in hand.
Energy saving regulator Pressure drop: Max. 50% improvement
Reduced required maintenance space: Max. 46% reduction
Better visibility & safer
The bowl is covered with a transparent bowl guard.

Series

Combination equipment
Air filter, Regulator,Lubricator

AC20 to 40-A

Filter regulator,Lubricator

AC20A to 40A-A

Air filter, Regulator

AC20B to 40B-A

Air filter, Mist separator, Regulator

AC20C to 40C-A

Filter regulator, Mist separator

AC20D to 40D-A

Port size

Set pressure (MPa)

1/8, 1/4, 3/8, 1/2, 3/4

0.05 to 0.7

Air Filter AF

Mist Separator AFM

Easy replacement of the element

The element and the bowl are in one piece. Replacement
can be done in hand.
Reduced required maintenance space: Max. 46%
reduction
Better visibility & safer
The bowl is covered with a transparent bowl guard.

Better visibility & safer

The bowl is covered with a transparent bowl
guard.

Series

Port size

Filtration (m)

Series

Port size

Filtration (m)

AF20 to 40-A

1/8, 1/4, 3/8, 1/2, 3/4

AFM20 to 40-A

1/8, 1/4, 3/8, 1/2, 3/4

0.3

Micro Mist Separator AFD

Regulator AR

Better visibility & safer

The bowl is covered with a transparent bowl
guard.

Energy saving regulator

Pressure drop: Max. 50% improvement

Series

Port size

Filtration (m)

Series

Port size

Set pressure (MPa)

AFD20 to 40-A

1/8, 1/4, 3/8, 1/2, 3/4

0.01

AR20 to 40-A

1/8, 1/4, 3/8, 1/2, 3/4

0.05 to 0.7

Regulator with Backflow Function

AR

Built-in mechanism to release air pressure from the

outlet side efficiently and quickly. (Built-in check valve:
With backflow function)

Lubricator AL
Better visibility & safer
The bowl is covered with a transparent bowl
guard.

Series

Port size

Set pressure (MPa)

Series

Port size

Bowl capacity (cm3)

AR20K to 60K

1/8, 1/4, 3/8, 1/2, 3/4, 1

0.05 to 0.85

AL20 to 40-A

1/8, 1/4, 3/8, 1/2, 3/4

25 to 135

12

Equipment Lineup for Physical and Chemical Industry

Filter Regulator AW

Filter Regulator with Backflow Function AW

Easy replacement of the element

The element and the bowl are in one piece.
Replacement can be done in hand.
Energy saving regulator
Pressure drop: Max. 50% improvement
Reduced required maintenance space: Max.
46% reduction
Better visibility & safer
The bowl is covered with a transparent bowl
guard.

Built-in mechanism to release air pressure

from the outlet side efficiently and quickly.
(Built-in check valve: With backflow
function)

Series
AW20 to 40-A

Port size

Set pressure (MPa) Filtration (m)

1/8, 1/4, 3/8, 1/2, 3/4

0.05 to 0.7

Mist Separator Regulator

Series

Port size

AWM20 to 40

1/8, 1/4, 3/8, 1/2

AWM

Port size
1/8, 1/4, 3/8, 1/2, 3/4
3/4, 1

Set pressure (MPa) Filtration (m)

0.05 to 0.85

Micro Mist Separator Regulator AWD

Set pressure (MPa) Filtration (m)

0.05 to 0.85

Series

AW20K to 40K
AW60K

0.3

Series

Port size

AWD20 to 40

1/8, 1/4, 3/8, 1/2

Set pressure (MPa) Filtration (m)

0.05 to 0.85

0.01

Modular Type F.R.L Unit ACG

Improves visibility of pressure gauges
located in various locations.

Combination equipment
Air filter, Regulator with integral pressure gauge, Lubricator
Filter regulator with integral pressure gauge, Lubricator
Air filter, Regulator with integral pressure gauge
Air filter, Mist separator, Regulator with integral pressure gauge
Filter regulator with integral pressure gauge, Mist separator

13

Series

Port size

Set pressure (MPa)

AF + ARG + AL
AWG + AL
AF + ARG
AF + AFM + ARG
AWG + AFM

1/8, 1/4, 3/8, 1/2

0.05 to 0.85

Equipment Lineup for Physical and Chemical Industry

Pressure Control Equipment (Regulators)
Regulator with Built-in Pressure Gauge ARG

Regulator with Built-in Pressure Gauge with Backflow Function ARGK

Improves visibility of pressure gauges

located in various locations.

Improves visibility of pressure gauges

located in various locations.

Series

Port size

Set pressure (MPa)

Series

Port size

Set pressure (MPa)

ARG20 to 40

1/8, 1/4, 3/8, 1/2

0.05 to 0.85

ARG20K to 40K

1/8, 1/4, 3/8, 1/2

0.05 to 0.85

Filter Regulator with Built-in Pressure Gauge AWG

Filter Regulator with Built-in Pressure Gauge with Backflow Function AWGK

Improves visibility of pressure gauges

located in various locations.

Improves visibility of pressure gauges

located in various locations.

Series

Port size

AWG20 to 40

1/8, 1/4, 3/8, 1/2

Set pressure (MPa) Filtration (m)

0.05 to 0.85

Series

Port size

AWG20K to 40K 1/8, 1/4, 3/8, 1/2

Set pressure (MPa) Filtration (m)

0.05 to 0.85

Clean Regulator SRH

Precision Clean Regulator SRP

Contamination controlled stainless steel regulator

Oil-free
Two types of diaphragm materials:
PTFE, Fluororubber

High precision low flow consumption stainless steel regulator

Bleed air flow 0.5 L/min (ANR) or less (0.2 MPa at outlet
pressure)
Setting sensitivity: 0.3% F.S.
Repeatability: 1% F.S.

Series

SRH

Relief mechanism

Port size

Non-relief

Rc 1/8, 1/4, 3/8,1 /2

9/16-18UNF, 7/8-14UNF

Relief

Rc 1/8, 1/4, 3/8, 1/2

Set pressure (MPa)

Low pressure type: 0.02 to 0.2
High pressure type: 0.05 to 0.7

Clean Regulator/Fluororesin Type SRF

Series

SRP

Port size
M5, 1/8

Set pressure (MPa)

Low pressure type: 0.005 to 0.2
High pressure type: 0.01 to 0.4

Regulator for Water WR110

Wetted parts
Body: New PFA
Diaphragm: PTFE
Recommended maximum flow rate: 20
L/min (SRF50)
(0.3 MPa at inlet pressure, fluidization)

Series
Integrated with fitting

SRF

With nut
Tube extension

Applicable tubing O.D.

Metric size

Inch size

4 to 19

1/8 to 3/4

Fitting size: 2 to 6

Tubing O.D.
1/4 to 3/4

Set pressure (MPa)

0.02 to 0.4

Series

Port size

Set pressure (MPa)

WR110-X224

Rc 1/4

0.08 to 0.39

14

Equipment Lineup for Physical and Chemical Industry

Fittings and Tubing
One-touch Fittings KQ2

Metal One-touch Fittings KQB2

Possible to use in vacuum to 100 kPa.

Improved tube insertion/removal: Insertion force: Max. 30% reduction
: Removal force: Max. 20% reduction

Compact and lightweight

Fluid temperature: 5 to 150C
Brass parts: Electroless nickel plated
Grease-free

Tube pulling out strength is ensured to be equivalent to existing model.

Compact and lightweight: Dimensions height direction 24% shorter

Dimensions horizontal direction 23% shorter
: Weight 57% lighter
Existing model KQ2 series
Male elbow/Applicable tubing O.D.: 6/ Connection thread: R1/8

Body type: totaled 51 models

Thread material/Surface treatment: 2 types
Brass, Brass + Electroless nickel plated

Applicable tubing O.D.

Series

KQ2

2, 3.2, 4, 6, 8
Metric
10, 12, 16

Connection thread
M5 x 0.8, M6 x 1.0, M3 x 0.5
R, Rc 1/8, 1/4, 3/8, 1/2

Series

KQB2

Applicable tubing O.D.

Metric

3.2, 4, 6, 8
10, 12, 16

Connection thread
M5
R/Rc/G 1/8, 1/4, 3/8, 1/2

Rotary One-touch Fittings KS/KX

One-touch Fittings Manifold KM

Applicable to use for oscillating and rotating sections in robots.

Low torque rotation style rotary One-touch fittings.
Copper-free (Electroless nickel plated)

Compact manifold piping possible.

Series

Applicable tubing O.D.

Connection thread

KS
KX (High Speed Type)

4, 6, 8, 10, 12

M5 x 0.8, M6 x 1.0
1/8, 1/4, 3/8, 1/2

Applicable tubing: Metric size

Series

Applicable tubing O.D.

Connection thread

KM

4, 6, 8, 10, 12

1/8, 1/4, 3/8, 1/2

Insert Fittings KF

Miniature Fittings M

Vacuum 101.3 kPa applicable

Piping can be done without removing nut.
Fluid temperature: 5 to 150C (Brass sleeve)
5 to 60C (Resin sleeve)
Steam can be used.
Grease-free

Compact and non-tool connection

Compact piping space
Hose nipple, Hose elbow, Barb

Series
Series

Applicable tubing O.D.

Connection thread

KF

4, 6, 8, 10, 12

1/8, 1/4, 3/8, 1/2

M--2
M

Applicable tubing O.D.

M3, M5

3.2, 4, 6

M3, M5, 1/8

Self-align Fittings H/DL/L/LL

Self-seal Fittings KC

Applicable for use on soft copper steel pipe.

Flared ridge metal ferrule.

One-touch installation and removal.

Built-in self-seal mechanism.
Air does not exhaust after removal of
tubing.
Copper-free (Electroless nickel plated)

15

Series

Applicable tubing O.D.

Connection thread

H
DL
L
LL

4, 6, 8, 10, 12

1/8, 1/4, 3/8, 1/2

Connection thread

Series

Applicable tubing O.D.

Connection thread

KC

4, 6, 8, 10, 12

M5 x 0.8
1/8, 1/4, 3/8, 1/2

Equipment Lineup for Physical and Chemical Industry

S Couplers KK/KKH

S Couplers KK130

One-touch fitting type standardized.(KK)

Use of ultra high-impact PBT resin.(KKH)

Cv factor: increased by 34%

Plug insertion force: reduced by 22%
(20 N)
Lightweight: reduced by 14% (12 g)
: Compared to the existing model

Series

KK
KKH

Applicable tubing O.D.

Connection thread

3.2, 4, 6, 8
10, 12, 16

M5 x 0.8, 1/8, 1/4

3/8, 1/2, 3/4

Series

Applicable tubing O.D.

Connection thread (R, NPT)

1/8, 1/4, 3/8, 1/2

KK130

6, 8, 10, 12

1/8, 1/4, 3/8, 1/2

Multi-connector DM

Multi-connector with One-touch Fittings DMK

One-touch installation and removal of

multi-tubes.
Prevents installation mistakes.

One-touch installation and removal of

multi-tubes.
Prevents installation mistakes.

Series

No. of connecting tubes

Applicable tubing O.D.

Series

No. of connecting tubes

Applicable tubing O.D.

DM

6, 12

4, 6

DMK

6, 12

3.2, 4

Rectangular Multi-connector KDM

Piping Module KB

One-touch installation and removal of

multi-tubes.
Prevents installation mistakes.
Built-in One-touch fittings.

Centralized distribution of supply air.

One-touch fitting installation without the
use of tools.
Air output direction possible
through 360C.

Series

No. of connecting tubes

Applicable tubing O.D.

Series

Applicable tubing O.D.

Connection thread

KDM

10, 20

3.2, 4, 6, 8

KB

4, 6, 8, 10, 12, 16

1/8, 1/4, 3/8, 1/2

Antistatic One-touch Fittings KA

Stainless Steel 316 One-touch Fittings KQG2

Surface resistance: 104 to 107

For preventing static electricity
Body: Conductive resin used for seal
parts
Copper-free (Electroless nickel plated)
Uni thread

Compact and lightweight

Fluid temperature: 5 to 150C
Material: Metal parts stainless steel 316,
seal parts special FKM
Grease-free/Can be used with steam.
Certified to meet current Food
Sanitation Law standards.

Series

KA

Applicable tubing O.D.

Connection thread

3.2, 4, 6, 8, 10, 12

M5 x 0.8, M6 x 1.0
standard UNI thread, 1/8, 1/4, 3/8, 1/2

Series

Applicable tubing O.D.

KQG2

3.2, 4, 6, 8
10, 12, 16

Metric

Connection thread
M5
R/Rc 1/8, 1/4, 3/8, 1/2

16

Equipment Lineup for Physical and Chemical Industry

Stainless One-touch Fittings KG

Stainless Steel 316 Insert Fittings KFG2

Possible to use in corrosive conditions

Metal parts: Stainless steel 303

Compact and lightweight

Fluid temperature: 65 to 260C (Swivel
elbow:5 to 150C )
Material: Stainless steel 316
Rubber material is not used.(Except
swivel elbow)
Grease-free/Can be used with steam.
Certified to meet current Food Sanitation
Law standards

Series

KG

Applicable tubing O.D.

Connection thread

4, 6, 8, 10, 12, 16

M5 x 0.8, M6 x 1.0
1/8, 1/4, 3/8, 1/2

Series

KFG2

Applicable tubing O.D.

Connection thread

4, 6, 8
10, 12, 16

Metric

RRc 1/8, 1/4, 3/8, 1/2

Miniature Fittings Stainless Steel 316 MS

S Couplers Stainless Steel Type KKA

Possible to use in corrosive conditions

Compact piping space
Hose nipple, Hose elbow, Barb

Body material: Stainless steel 304

Seal material: Fluoropolymer (Special
FKM) is employed.
Grease-free
Check valve built in to both plug and
socket

Series

Applicable tubing O.D.

Connection thread

Series

Connection thread

MS

3.2, 4, 6

M5

KKA

1/8, 1/4, 3/8, 1/2, 3/4, 1, 11/4, 11/2

Clean One-touch Fittings for Blowing KP

Fluoropolymer Fittings Hyper Fitting

LQ1

Insert bushing type

One-touch fittings for clean room blowing systems

Completely oil-free (Fluoro coated rubber portions)
Wetted parts are non-metallic.
Parts washed and assembled in a clean room,
packed in a duplicate package.
Can be used in a vacuum (100 kPa).

Series

Applicable tubing O.D.

Connection thread

Series

Maximum operating pressure

Operating temperature

KP

4, 6, 8, 10, 12

1/8, 1/4, 3/8, 1/2

LQ1

1.0 MPa

0 to 200C

Fluoropolymer Fittings Hyper Fitting LQ3

Fluoropolymer Bore Through Connector LQHB

Flare type

Freely choose tube positioning

As the tube runs through the fitting itself,
a setting is available for any optional
position.
Can be used in pressure feed of chemicals,
etc., during the production process of
semiconductors.
Applicable to chemicals such as acid,
alkali and deionized water.
Material: New PFA (Body, nut), PTFE
(Collet)

Series

LQ3

17

Maximum operating pressure

Operating temperature

1.0 MPa

Nut material PVDF: 0 to 150C

Nut material PFA: 0 to 200C

Series

LQHB

Applicable tubing O.D.

Metric size

Inch size

Operating
temperature (C)

3 to 25

1/8 to 1

0 to 200

Equipment Lineup for Physical and Chemical Industry

Fluoropolymer Needle Valve LVN

Low Torque Rotary Joint MQR

Material: New PFA

Fitting integrated, all-in-one structure
Hyper fitting/LQ2 series used
Triple seal structure

Metal seal type.

Air suppy to rotary/pivot shafts of turntables
and robot arms.
Low rotational torque: 0.003 to 0.50 Nm or less
Operating temperature: 10 to 80C
Allowable RPM: 200 to 3000 min1(r.p.m)

Series

Applicable tubing O.D. Flow adjustment range

(L/min)
Metric
Inch

LVN

4 to 12

1/8 to 1/2

0 to 12

Orifice dia. (mm)

4.4 to 10

Series

No. of circuits

Port size

Operating pressure

MQR

1, 2, 4, 8, 12, 16

M5 x 0.8

100 kPa to 1 MPa

Nylon Tubing T

Soft Nylon Tubing TS

For general pneumatic tubing

Maximum operating pressure: 1.5 MPa
(at 20C)

Maximum operating pressure: 1.0 MPa

(at 20C)

Tubing O.D.
Fluid
Color
Metric size
TS TISA 4, 6, 8, 10, 12, 16 Black, White, Red, Blue, Yellow, Green Air, Water
Compatible with water due to a change in materials. Compatible fluid types
are printed on the tube body for differentiation, so please be sure to check
this. (Refer to the table below.) If using the previous TS/TISA series with
water, the tube may shrink and cause air leakage or the tube may fall out.
Series

Printing/Fluid
Series

T TIA

Tubing O.D.

Color

Metric size

Fluid

4, 6, 8, 10, 12, 16 Black, White, Red, Blue, Yellow, Green Air, Water

Previous

NEW

Print code
SMC TS 0604 SOFTNYLON 6 x 4
SMC TS 0604 SOFTNYLON 6 x 4

Polyurethane Tubing TU

Soft Polyurethane Tubing TUS

Maximum operating pressure: 0.8 MPa

(at 20C)

Maximum operating pressure: 0.6 MPa

(at 20C)

Series

TU TIUB

Tubing O.D.

Color

Metric size
2, 4, 6, 8
10, 12, 16

Fluid

Black, White, Red, Blue, Yellow,

Green, Clear, Orange, and Others
Total 29 colors

Air, Water

Series

TUS

Tubing O.D.

Color

Black, White, Red, Blue, Yellow,

4, 6, 8, 10, 12
Green, Translucent, Yellow brown

Hard Polyurethane Tubing TUH

Wear Resistant Tubing TUZ

Superior restoring compared to the nylon

tubing.

Abrasion: Approx. 1/3 (Compared with

SMC polyurethane tubing TU series)

Series

TUH

Maximum operating pressure Tubing O.D.

Standard type

0.8 MPa (at 20C)

High pressure type

1.0 MPa (at 20C)

Color

4, 6, 8 Black, White, Blue,

10, 12
Translucent

Fluid
Air

Series

TUZ

Tubing O.D.
Metric size

Color

4, 6, 8, 10, 12 Black, White, Red, Blue, Yellow, Green

Fluid
Air
Air, Water

Fluid
Air

Fluid
Air

18

Equipment Lineup for Physical and Chemical Industry

Polyurethane Coil Tubing TCU

Polyurethane Flat Tubing TFU

Flexible
Maximum operating pressure: 0.8 MPa
(at 20C)
For moving applications.

Maximum operating pressure: 0.8 MPa

(at 20C)
Compact piping

Series

Tubing O.D.

Color

Number of cores

Fluid

TCU

4, 6, 8

Black

1, 2, 3

Air

Note) Colors other than black are available as Made-to-Order specifications.

Series

Tubing O.D.

Color

Number of cores

Fluid

TFU

4, 6, 8

Black

2, 3

Air

2-Layer Soft Fluoropolymer Tubing TQ

Antistatic Soft Nylon Tubing TAS

Carries fluid such as solvent with a soft

and abrasion resistant tube.
2-layer structure
Outer layer: Special nylon resin
Inner layer: Special fluoropolymer
Internal smoothness: Equivalent to Ra
0.02 m

Maximum operating pressure: 1.2 MPa

(at 20C)
For preventing static electricity.

Series

TQ

Tubing O.D.

Color

Metric size
4, 6, 8, 10, 12

Fluid

Translucent
Air, Water,
(Material color) Inert gas, Solvent

Series

TAS

Tubing O.D.
Metric size
3.2, 4, 6, 8, 10, 12

Antistatic Polyurethane Tubing TAU

Fluoropolymer Tubing TL

Maximum operating pressure: 0.9 MPa

(at 20C)
For preventing static electricity.

Maximum operating pressure: 1.0 MPa

(at 20C)
Maximum operating temperature: 260C
(This can vary according to operating
pressure.)

Series

TAU

Tubing O.D.
Metric size
3.2, 4, 6, 8, 10, 12

Color

Fluid

Series

Black

Air

TL/TIL

FEP Tubing (Fluoropolymer) TH

Maximum operating pressure: 2.3 MPa (at 20C)

Food Sanitation Law compliant
Complies with FDA (Food and Drug Administration) 177-1550 dissolution test.
Maximum operating temperature: 200C (This can vary according to operating pressure.)
This can vary according to size.

Series

TH/TIH

19

Tubing O.D.
Metric size
4, 6, 8, 10, 12

Color

Fluid

Translucent, Black, Red, Blue Air, Water

Color

Fluid

Black

Air

Tubing O.D.

Color

Metric size
4, 6, 8, 10, 12, 19

Translucent

Soft Fluoropolymer Tubing TD

Maximum operating pressure: 1.6 MPa (at 20C)

Food Sanitation Law compliant
Complies with FDA (Food and Drug Administration) 177-1550
dissolution test.
Maximum operating temperature: 260C (This can
vary according to operating pressure.)
This can vary according to size.

Series

TD/TID

Tubing O.D.
Metric size
4, 6, 8, 10, 12

Color

Fluid

Translucent

Air, Water

Equipment Lineup for Physical and Chemical Industry

Fluoropolymer Tubing (PFA) TLM

Polyolefin Tubing TPH

Maximum operating temperature: 260C (This can vary according

to operating pressure.)
Food Sanitation Law compliant
Complies with FDA (Food and Drug Administration) 177-1550
dissolution test.

Maximum operating pressure

Tubing O.D.

Series

TLM/TILM

1.0 MPa

8, 10, 12

Color

Series

Translucent, Black, Red, Blue

TPH

Metric size
2, 3, 4, 6, 8, 10, 12, 16, 19, 25

4, 6

0.7 MPa (at 20C)

Tubing O.D.
Metric size

Color

Fluid

4, 6, 8, 10, 12 Black, White, Red, Blue, Yellow, Green Air, Water, Other

Tube Cutter TK

Series

Applicable tubing O.D.

Applicable tubing material

TK-1
TK-2
TK-3

13 mm or less

Nylon, Soft nylon,

Polyurethane, and
other soft plastic tubing

18 mm or less
12 mm or less

Pressure Switches
2-Color Display High-Precision Digital Pressure Switch

2-Color Display High-Precision Digital Pressure Switch

With One-touch fitting (Straight, Elbow)

Space-saving. Mountable side by side
without clearance.
Precision indicator setting function
Simultaneous copying is possible
for maximum 10 units.

IP65
Applicable fluid: Air, Non-corrosive gas,
Non-flammable gas
Simultaneous copying is possible
for maximum 10 units.
3-step setting
With One-touch fitting

ZSE30A(F)/ISE30A

ZSE40A(F )/ISE40A

Series

Type

Rated pressure range

Series

Type

Rated pressure range

ZSE30AF
ZSE30A
ISE30A

Compound pressure

100.0 to 100.0 kPa

Compound pressure

100.0 to 100.0 kPa

Vacuum pressure

0.0 to 101.0 kPa

Positive pressure

0.100 to 1.000 MPa

ZSE40AF
ZSE40A
ISE40A

Digital Pressure Switch ZSE10(F)/ISE10

Low profile 9.8 mm
Vertical mounting space reduced to approx. 1/2
(Compared to ZSE/ISE30A series)
Simultaneous copying is possible for maximum 10 units.
3-step setting

Series

Type

Rated pressure range

ZSE10F
ZSE10
ISE10

Compound pressure

100.0 to 100.0 kPa

Vacuum pressure

0.0 to 101.0 kPa

Positive pressure

0.100 to 1.000 MPa

Vacuum pressure

0.0 to 101.3 kPa

Positive pressure

0.100 to 1.000 MPa

2-Color Display Digital Pressure Switch

ZSE80(F )/ISE80(H )

Suitable for a wide variety of fluids with

stainless diaphragm
IP65
RoHS compatible
Low leakage VCR, Swagelok compatible fittings can be selected.
With One-touch fitting (Straight, Elbow)
Back piping, underside piping
Series

Type

Rated pressure range

ZSE80F
ZSE80
ISE80
ISE80H

Compound pressure

100.0 to 100.0 kPa

Vacuum pressure

0.0 to 101.0 kPa

Positive pressure

0.100 to 1.000 MPa

Positive pressure

0.100 to 2.000 MPa

20

Equipment Lineup for Physical and Chemical Industry

Air Checker: Electronic Pressure Switch

PS1000/1100/1200

Compact Pneumatic Pressure Sensor PSE53

Connector
Analog output (voltage)

Plug-in reducer for One-touch fittings.

With LED light.

Series

Type

Set pressure range

PS1000
PS1100
PS1200

Positive pressure

0.1 to 0.45 MPa

For vacuum/residual pressure

0.1 to 0.4 MPa

For vacuum

100 to 0 kPa

Series

Type

PSE531
PSE533
PSE532
PSE530

Vacuum pressure

Rated pressure range

0 to 101 kPa

Compound pressure

101 to 101 kPa

Low pressure

0 to 101 kPa

Positive pressure

0 to 1 MPa

Compact Pneumatic Pressure Sensor PSE54

Low Differential Pressure Sensor PSE55

Analog output (voltage)

Suitable for applications such as air current volume

maintenance, filter blockage, and liquid surface detection
Analog output (voltage/current)

Series

Type

PSE541
PSE543
PSE540

Vacuum pressure

Rated pressure range

0 to 101 kPa

Compound pressure

100 to 100 kPa

Series

Type

Rated pressure range

Positive pressure

0 to 1 MPa

PSE550

Differential pressure

0 to 2 kPa

Pressure Sensor for General Fluids PSE56

Wetted parts: Stainless steel 316L
IP65
Suitable for a wide variety of fluids
Analog output (voltage/current)
Low leakage VCR, Swagelok
compatible fittings can be selected.

PSE200

Four sensors can be connected.

Applicable sensors: PSE53, 54, 56
Capable of controlling various different
applications from one controller
4 inputs, 5 outputs (2 outputs for 1ch, 1
output for 2 to 4ch)

Series

Type

Rated pressure range

PSE561
PSE563
PSE564
PSE560

Vacuum pressure

0 to 101 kPa

Compound pressure

100 to 100 kPa

Positive pressure

0 to 500 kPa

Positive pressure

0 to 1 MPa

2-Color Display Digital Pressure Sensor Controller

PSE300

Applicable sensors: PSE53, 54, 550, 56

Compatible with voltage input and current input
Response time: 1 ms
Space-saving, capable of vertical and horizontal contact mounting
Panel mounting, Bracket mounting, DIN rail mounting
Series

Multi-Channel Digital Pressure Sensor Controller

Set pressure range

Series

101 to 101 kPa

10 to 101 kPa

PSE200

10 to 101 kPa
0.1 to 1 MPa

Pressure Switch/Read Switch Type IS10

16% lighter, 11% smaller (Compared with IS1000)
Service life: 5 million cycles
Can be connected to modular type F.R.L. units.

Set pressure range

101 to 101 kPa
10 to 101 kPa

PSE300

10 to 100 kPa
0.1 to 1 MPa
50 to 500 kPa
0.2 to 2 kPa

21

Series

Type

Set pressure range

IS10

Positive
pressure

0.1 to 0.4 MPa

0.1 to 0.6 MPa

Equipment Lineup for Physical and Chemical Industry

Flow Switches
2-Color Display Digital Flow Switch PFM

Digital Flow Switch for Air PF2A

Air, N2, Ar, CO2

Grease-free
Integrated flow adjustment valve
Compact, Lightweight, Space-saving

Integrated type and separate monitor type are available.

Switch output, accumulated pulse output, analog output
Capable of switching back and forth between cumulative and instantaneous flow
IP65
Series

Set flow range (L/min)

1 to 10
5 to 50

Series

10 to 100

Set flow range (L/min)

0.2 to 10 (0.2 to 5)

PFM

PF2A

0.5 to 25 (0.5 to 12.5)

50 to 500

1 to 50 (1 to 25)

150 to 3000
300 to 6000

2 to 100 (2 to 50)
(

3-Color Display Digital Flow Switch for Water

600 to 12000

): For CO2

PF3W

3-color / 2-screen display

Integrated flow adjustment valve and
temperature sensor
40% smaller than existing
product (PF2W)
IP65 compliant,
non-grease type
Fluid temperature: 0 to 90C
Series

20 to 200

3-Color Display Digital Flow Switch for PVC Piping

PF3W

Applicable fluid: Deionized water and chemical, etc

3-color / 2-screen display
IP65 compliant, non-grease type
Fluid temperature: 0 to 70C

Set flow range (L/min)

0.5 to 4
2 to 16

PF3W

5 to 40

Series

10 to 100

PF3W

50 to 250

Digital Flow Switch for Deionized Water and Chemical Liquids

Set flow range (L/min)

10 to 100
30 to 250

PF2D

Body sensor: New PFA, Tube: Super PFA

Low-particle generation, Excellent flow-through
characteristics

Series

Set flow range (L/min)

PF2D

1.8 to 20

0.4 to 4
4.0 to 40

22

Equipment Lineup for Physical and Chemical Industry

Static Electricity Elimination Equipment
Ionizer/Bar type IZS40/41/42

Ionizer/Nozzle Type IZN10

Potential amplitude is reduced with Dual AC type.

25 V or less (Installation height: 300 mm)
Rapid elimination of static electricity by a
feedback sensor.
Reduction of adjustment and maintenance
labor by auto balance sensor.
Simple operation: Can be controlled by
powering the ionizer ON. (Standard type)
Setting ionizer with remote controller.
Transition wiring may be used.
High speed static electricity elimination cartridges
and energy saving static electricity elimination
cartridges are available.
Series

Type

IZS42
IZS41
IZS40

Dual AC type

Ion generation method Ion balance

Feedback sensor type

Corona discharge type

30 V

Standard type

Dust removal and static electricity elimination by air blow

Spot type static electricity elimination.
Slim design: Thickness dimension 16 mm
Nozzle type can be selected according to applications.
Energy saving static electricity elimination
nozzle (Short range static electricity elimination,
design focuses on ion balance)
High flow static electricity elimination nozzle
(Long range static electricity elimination and
dust removal)
With alarm function
High-voltage error, electrode needle
contamination detector
Series

Ion generation method

IZN10

Energy saving static electricity elimination nozzle: 10 V or less

Corona discharge type
High flow static electricity elimination nozzle: 15 V or less

Ion balance

Ionizer/Fan Type IZF10

Electrostatic Sensor IZD10

Compact design: 80 mm 110 mm 39 mm

Weight: 280 g
Static electricity elimination time: 1.5 seconds
With alarm function
High-voltage error, electrode needle
contamination detector
2 types of fans available.
Rapid static electricity eliminating fan/
Low-noise fan

Detects electrostatic potential of the

workpiece, and is capable of switch output,
analog output or output of current.

Series

Ion generation method

Ion balance

IZF10

Corona discharge type (DC)

13 V

Series

Measurement potential

IZD10-110

0.4 kV
(At detection distance 25 mm)

IZD10-510

20 kV
(At detection distance 50 mm)

Output voltage

Effective detection
distance

1 to 5 V
Output impedance:
Approx. 100

10 to 50 mm

Electrostatic Sensor IZE11

Handheld Electrostatic Meter IZH10

Detects electrostatic potential of the

workpiece, and is capable of switch output,
analog output or output of current.

Easy-to-use handheld electrostatic meter.

Weight: 85g (excluding dry cell batteries)
With backlight
LOW battery indicator
Peak/Bottom value indication
Zero-clear function
Auto power-off function

23

Series

Rated measurement
range

Minimum unit
setting

Output

IZE11

0.4 kV to +0.4 kV
20 kV to +20 kV

0.001 kV
(at 0.4 kV)
0.1 kV
(at 20 kV)

Switch output x 2 + Analog output

(1 to 5 V, 4 to 20 mA)

Series

IZH10

25 to 75 mm

Rated measurement range

Minimum display unit

20.0 kV

0.1 kV (1.0 to 20.0 kV)

0.01 kV (0 to 0.99 kV)

Equipment Lineup for Physical and Chemical Industry

2/3 Port Valves for Fluid Control
Finger Valve VHK

Direct Operated 2 Port Solenoid Valve VX2

The valve direction clearly indicates whether the

valve is open or closed.
Small knob operating force. (0.04 to 0.14 Nm)

For Air, medium vacuum, water, oil, steam (can be used with heated water.)
Body material: (Air) Aluminum, Resin (Water, oil, medium vacuum) C37, Stainless steel
Available with One-touch fittings (resin body)
Flow rate: 20% more flow
Height: 10% smaller
Lightweight: 30% lighter

2 or 3 port valve selectable

Comparison with SMC existing model

Description

Series

Type

Port size

Finger Valve

VHK2
VHK3

2 port valve

4 to 12
M5, 1/8 to 1/2

3 port valve

Pilot Operated 2 Port Solenoid Valve VXD

For air, water, oil, heated water, high temperature oil
Body material: C37, CAC407, Aluminum, Resin and Stainless steel
Height: Approx. 7% smaller (7 mm)
Enclosure: IP65
(Electrical entry Faston type terminal is IP40)
Comparison with SMC existing model (VXD24)

Series

VXD

Actuation

Port size

Orifice diameter (mm)

N.C./N.O.

1/4 to 1
32 A to 50 A

10 to 50

Series

VX21/22/23

Actuation

Port size

Orifice diameter (mm)

N.C./N.O.

1/8 to 1/2
6 to 12

2 to 10

Zero Differential Pressure Type/

Pilot Operated 2 Port Solenoid Valve VXZ
For air, water, oil, heated water, high temperature oil
Body material: C37, Stainless steel, Aluminum, and Resin
(With One-touch fittings)
Enclosure: IP65

Series

Actuation

Port size

Orifice diameter (mm)

VXZ

N.C./N.O.

1/4 to 1

10 to 25

Zero Differential Pressure Type/

Pilot Operated 2 Port Solenoid Valve VXS

Compact Direct Operated 2 Port Solenoid Valve

For air, water, heated water, steam

Body material: C37, Stainless steel
Special FKM seal material for high temperature
(Leakage rate: 1 cm3/min or less)
Enclosure: IP65

For air, medium vacuum, water

Body material: Aluminum, Resin (PPS), C37, Stainless steel
With One-touch fittings (resin body)
IP65

VDW

Series

Actuation

Port size

Orifice diameter (mm)

Series

Actuation

Port size

Orifice diameter

VXS

N.C./N.O.

1/4 to 1

10 to 25

VDW10/20

N.C.

3.2, 4, 6, M5, 1/8

1 to 3.2

Pinch Valves AXTP20

Compact Direct Operated 2/3 Port Solenoid

Valve for Chemical Liquids LVM

<Special order>

Isolated structure
Diaphragm isolates the solenoid drive body from the fluid.
Wetted parts: Body/plate: PEEK
Diaphragm: EPDM, FKM, Kalrez can be selected.
Series

Valve structure

Diaphragm type
LVM09/090 Directly operated poppet
(Locker type)

LVM11

Diaphragm type
Directly operated poppet

LVM10/100
Diaphragm type
LVM15/150 Directly operated poppet
(Locker type)
LVM20/200

Actuation

Orifice diameter (mm)

N.C.
N.O.
Universal

1.1

N.C.

1.5

N.C.
N.O.
Universal

1.4
1.6
2

Series

AXTP20

Actuation

Tubing

Operating pressure

N.O.

Silicone etc.
Outside diameter (O.D.) 4, 6 1/4

0 to 100 kPa

24

Equipment Lineup for Physical and Chemical Industry

Air Operated Chemical Liquid Valve/Integral Fitting Type LVC

Air Operated Chemical Liquid Valve/Threaded Type LVA

Body material:New PFA

Same configuration N.C./N.O./double-acting
Able to handle fluid temperatures up to 100C

Body material: New PFA/Stainless steel/PPS

Diaphragm material: PTFE, EPDM, NBR can be selected.

Actuation

Series
Integral
fitting

Applicable tubing O.D. Orifice diameter (mm)

N.C./N.O.
Double acting

LVC

Metric: 3 to 25
Inch: 1/8 to 1

4 to 22

Series
Threaded
type

LVA

Actuation

Port size

Orifice diameter (mm)

N.C./N.O.
Double acting

1/8 to 1

2 to 22

Manually Operated Chemical Liquid Valve/Integral Fitting/Threaded Type LVH

Air Operated Chemical Liquid Valve/Compact Type LVD

Body material:New PFA/Stainless steel/

PPS
Compatible with locking and non-locking
types

Lineup of compact and space-saving types

Up to 29% reduction in dimensions on
piping side
Body material: New PFA
Diaphragm material: PTFE
Actuator material: PPS

Series
Manual type
(Integral fitting/
Threaded type)

Actuation

LVH

N.C.

Orifice diameter
Port size
(Applicable tubing O.D.)
(mm)
1/8 to 1/2
(Metric:3 to 12
Inch:1/8 to 1/2)

Series
Integral fitting

4 to 12

Tube extension

Applicable tubing O.D.Note) Orifice diameter

(mm)
Metric
Inch

Actuation

LVD

N.C. N.O./
Double acting

3 to 19

1/8 to 3/4

2 to 16

6 to 19

1/4 to 3/4

4 to 16

Note) Tubing O.D. for tube extension type.

Chemical Liquid Valve/Non-Metallic Exterior LVQ

Vinyl Chloride Air Operated Valve LVP

No screws, all-in-one integrated design

Non-metallic structure with no metal
screws used to fasten the actuator portion
and body portion
Body material: New PFA
Diaphragm material: PTFE
Actuator material: PVDF

Applicable to rigid vinyl chloride tube: Union type

with PVC unfixed union
Body material: CPVC, Diaphragm material: PTFE
O-ring material: FKM, EPDM (selectable)
Applicable fluids: Deionized water, chemicals

Series
Integral fitting
Space-saving type
Tube extension

Actuation

Applicable tubing O.D. Orifice diameter

(mm)
Metric
Inch
3 to 25

1/8 to 1

N.C.
LVQ N.O.
Fitting size: 2 to 6
Double acting 6 to 25Note) 1/4 to 1Note)

4 to 22

Note) Tubing size

Type

Applicable tubing O.D.

LVP5 22 (Nominal dia.16A)

LVP6

26 (Nominal dia.20A)
32 (Nominal dia.25A)

Orifice diameter
(mm)
16
22

Actuation

Option

N.C.
With flow rate
N.O.
adjustment
Double acting

PVC Quick Drain Valve LVW

Complies to JIS standard for polyvinyl chloride piping (JIS K 6742)
Applicable fluids: Deionized water, Chemicals
Fluid contact materials:
PVC (Body)
PTFE (Poppet)
FKM (O-ring: Standard)
EPDM (O-ring: Optional)
Flow-rate characteristics:
Cv factor 10 to 198
Easy piping with union connection

Series

Applicable tubing O.D.

LVW60

32 (Nominal dia.25A)

LVW80

38 (Nominal dia.32A)
48 (Nominal dia.40A)
60 (Nominal dia.50A)

LVW90

75 (Nominal dia.65A)
89 (Nominal dia.80A)

25

Orifice diameter Actuation

25
40
Double acting
65
80

Equipment Lineup for Physical and Chemical Industry

Pumps
Process Pump/Double Acting Pump PA

Series

Type

Action

PA30
PA313
PA50
PA5000
PA513
PA3000

Process Pump/Single Acting Pump PB

Discharge rate
Wetted part material
(L/min)

Automatically operated type

1 to 20

Air operated type

0.1 to 12

Automatically operated type

5 to 45

Air operated type

1 to 24

ADC12
(Aluminum)
SCS14
(Stainless steel)

Type

PAF3410
PAF3413
PAF5410
PAF5000
PAF5413
PAF3000

Action

Discharge rate
Wetted part material
(L/min)

Automatically operated type

1 to 20

Air operated type

1 to 15

Automatically operated type

5 to 45

Air operated type

5 to 38

PB1000

Type

Discharge rate
Wetted part material
(mL/min)

Action

PB1011A Built-in solenoid valve 8 to 2000

Polypropylene
PB1013A Air operated type 8 to 1000 Stainless Steel 316
PB1313A Air operated type 8 to 1000

New PFA
(Fluororesin)

Liquid Dispense Pump (Solenoid type) LSP

Non-Metallic Pump/Double Acting Pump PAF

Series

Series

New PFA
(Fluororesin)

Tightening bolt, Air switching valve: Stainless steel

Use the PAF series standard products when metal-free pump is necessary
for hydrofluoric acid, etc./div.

Discharge rate can be adjusted.

Discharge rate stability (repetition
accuracy 1)
2% at 5 to 15 L
Shutoff function
Self-contained system does not need any
priming.
Fluid used: Water, deionized water,
diluent, and cleaning fluid

Series

Discharge rate adjustment range

5 to 50 L

LSP

50 to 100 L
100 to 200 L

Wetted part material

Body: PEEK
Diaphragm/Check valve: EPDM,FKM

Dispense Pump LDP

<Special order>

Series

LDP

Fluid adsorption/
Fluid adsorption/
discharge rate setting range discharge rate resolution Repeatability
0.05 to 5 mL

0.005 mL

1%

26

Equipment Lineup for Physical and Chemical Industry

Process Gas Equipment
Regulator/Back Pressure Regulator for Ultra High Purity AP/SL/AZ/BP
For UHP gas delivery in semiconductor and other clean
industries.
Body material: Stainless steel 316L secondary remelt or
Stainless steel 316L
Wetted parts material: Electropolish
External metal seal construction

Body material Connection type

Series

AP/SL

Single
stage

AZ

Bulk gas delivery Stainless steel 316L

1/2", 3/4", 1"

Source

BP

Two stage

Source

Stainless steel 316L

secondary remelt

Source

1/4", 3/8"
1/2", 3/4"

Face seal
Tube stub

Distribution

Single
stage

1/4", 3/8"
1/4", 3/8", 1/2", 3/4"

Sub-atmospheric

AP

Connection size

Distribution (Compact) Stainless steel 316L

secondary remelt
Distribution

1/4", 3/8"

Stainless steel 316L

1/4", 3/8"
1/2"

Stainless steel 316L

secondary remelt

1/4", 3/8"

Sub-atmospheric

Back pressure

regulator

Regulator/Back Pressure Regulator for General Applications AK/BP

For wide variety of applications from semiconductor to general
Body material Stainless steel 316 or brass available depending on gas

Body material Connection type

Series
Single

AK

BP

Connection size

Distribution

1/4", 3/8"
1/2"

Source

stage

NPT,
Compression
fitting

Sub-atmospheric Stainless steel 316

Brass
Two stage
Source
Back pressure
regulator

1/4"
1/4"

Diaphragm Valve for Ultra High Purity AP

Diaphragm Valve for Ultra High Purity AZ

For UHP gas delivery in semiconductor and other clean industries.

Shut off valve which uses a diaphragm for a moving element to open and
close the valve.
Springless diaphragm valves do not have a wetted spring.

Cleaned for high purity semiconductor applications.

Cleanroom assembled and He leaked tested.
Valve meets dimensional requirements of SEMI Standard.
User-friendly forged body

Body material

Series
Body material Connection type Connection size

Series
Air operated type

Stainless steel 316L

AP
Manually operated type secondary remelt

Face seal
Tube stub

1/4", 3/8"
1/2", 3/4"

Air operated type

Stainless steel
AZ
316L
Manually operated type

Connection type

Connection size

Face seal

1/4, 3/8
1/2

1/2: Machined type/Tube weld only

Check Valve/Vacuum Generator/Flow Switch AP

[Check Valve]
To prevent reverse flow.
Unique design with only one moving part in the gas stream, an O-ring.
It is a springless design, free of springs and poppets.
[Vacuum Generator]
Vacuum generator
Applicable to emission of unnecessary gas remaining inside piping during replacement
of gas cylinder.
[Flow Switch]
It detects excess flow above a given flow rate, caused by pipe breakage etc.
Series

AP

27

Body material

Check valve

Stainless steel 316L secondary remelt, Stainless steel 316L

Vacuum generator

Stainless steel 316L

Flow switch

Stainless steel 316L secondary remelt, Stainless steel 316L

Connection type

Connection size

Face seal
Tube stub

1/4", 3/8"
1/2", 3/4"

Equipment Lineup for Physical and Chemical Industry

Filters for Liquids
High Precision Filter for Liquids FGH

Quick Change Filter/For Cleaning Fluid FQ1

Filtration efficiency: 99% or more

Ideal for low flow filtration (MAX.30 L/min)

No tools required.

Series

Port size

FGH

Rc3/8 to 1

Maximum operating pressure Temperature (C)

1 MPa

MAX.80

Series

Port size

FQ1

Rc1/2, 3/4, 1

Maximum operating pressure Temperature (C)

1 MPa

MAX.80

Chillers (Circulating Fluid Temperature Controller)

Refrigerated Thermo-cooler HRG

Thermo-chiller HRS-X017

Economy type chiler

(Three-phase power supply)

Basic type
Compact
W 377 x H 615 x D 435, 31 kg
Basic type with simple function and performance
With ready-to-use power cord

Air-cooled models provide cooling water wherever

needed thanks to easy mounting and easy operation.
Proven performance with a wide range of applications
such as lasers/analysis equipment/LCD manufacturing
equipment/mold temperature regulators, etc.
Series

HRG

Set temperature range Cooling capacity Temperature stability Cooling method Circulating liquid

5 to 35C

10 to 15 kW

1.0/
0.5C

Air-cooled
Clear water,
refrigeration/ Deionized water,
Water-cooled Ethylene glycol
refrigeration aqueous solution

Series

HRS-X017

Set temperature range Maximum cooling capacity Temperature stability Cooling method Circulating liquid

10 to 30C

1200 W

2C

Clear water,
Air-cooled
Ethylene glycol
refrigeration
aqueous solution

Thermo-chiller HRS

Compact type

Air-cooled models provide cooling water wherever needed thanks to easy mounting and easy operation.
Proven performance with a wide range of applications such as lasers/analysis equipment/LCD manufacturing equipment/mold temperature regulators, etc.
Compact W 377 x H 615 x D 500, 40 kg
Timer operation function, Low level in tank detecting function, Power failure auto-restart function, Anti-freezing function
Self diagnosis function
Ideal for overseas models (single-phase 200 to 230 VAC, single-phase 100 and 115 VAC)
Conforms to UL specifications, CE-marking.
Series

HRS

Set temperature range Cooling capacity Temperature stability Cooling method Circulating liquid

5 to 40C

1300 W
1900 W
2400 W
5100 W

0.1C

Air-cooled
refrigeration/ Clear water,
Water-cooled Ethylene glycol
refrigeration aqueous solution
Air-cooled refrigeration

28

Equipment Lineup for Physical and Chemical Industry

Refrigerated Thermo-chiller HRZ

Refrigerated Thermo-chiller HRZ

High-performance chiller

(High-performance chiller (Built-in inverter)

Proven performance with semiconductor process

equipment, with a wide range of features such
as high temperature stability, wide temperature
range, failure testing, external signal.
All models conform to safety standards.
Conforms to UL and SEMI specifications, CE-marking.

In addition to the state-of-the-art functions of the HRZ series, these models

employ a DC inverter compressor to achieve better energy efficiency.
Wide temperature range and cooling capacity range covered by one unit
Suited to the short innovation cycle of semiconductor equipment, and
capable of responding flexibly to changes in the process conditions.
Conforms to UL and SEMI specifications, CE-marking.

Series

Set temperature range Cooling capacity Temperature stability Cooling method Circulating liquid
20 to 40C

HRZ

20 to 90C

1 to 15 kW

0.1C

20 to 90C

Fluorinated liquid,
Clear water,
Water-cooled
Deionized water,
refrigeration
Ethylene glycol
aqueous solution

Series

Set temperature range Cooling capacity Temperature stability Cooling method Circulating liquid

HRZ

Fluorinated liquid,
Clear water,
Water-cooled
Deionized water,
refrigeration
Ethylene glycol
aqueous solution

20 to 90C

1.8 to
10 kW

0.1C

Refrigerated Dual Thermo-chiller HRZD

Water-cooled Thermo-chiller HRW

(Double inverter type)

(High-performance chiller (Water-cooled type)

Temperature for two systems can be controlled

separately by one chiller.
Double inverter type: Substantially more energy is
saved by using a DC inverter refrigerator and inverter
pump.
Space saving: Footprint reduced by 23 %
Reduced wiring, piping and labor: Single power cable,
single facility-water piping system
CE-marking

Direct heat exchanger for water circulated within a plant

For temperature regulation within the temperature
range where no freezer is needed
Proven performance with semiconductor process equipment, with a wide range of features
such as high temperature stability, wide temperature range, failure testing, external signal.
Conforms to UL and SEMI specifications, CE-marking.
Inverter type can be selected.

Series

HRZD

Series

Set temperature range Cooling capacity Temperature stability Cooling method Circulating liquid

HRW

Fluorinated liquid,
Clear water,
Water-cooled
Deionized water,
refrigeration
Ethylene glycol
aqueous solution

20 to 90C

2 to 30 kW

0.3C

Set temperature range Cooling capacity Temperature stability Cooling method Circulating liquid
30 to 90C

9.5 kW x 2

0.1C

Water-cooled refrigeration Fluorinated liquid

Peltier-type Thermo-con HEC

Peltier-type Chemical Thermo-con HED

High-precision chiller

Fluoropolymer temperature control equipment for chemical liquids

For applications requiring high-precision temperature control

High-precision, refrigerant-free temperature control equipment
employing Peltier elements
Simple structure and high reliability
Can easily be built into equipments with
compact and low-vibration design
Compatible with wide range of
power supply voltages
Conforms to UL specifications, CE-marking.

Heat exchanger employs Peltier elements for direct temperature control

of chemical liquids.
Fluoropolymer heat exchanger is suitable
for a wide range of chemical liquids.
Conforms to UL specifications,
CE-marking.

Series

HEC

Set temperature range Cooling capacity Temperature stability Cooling method Circulating liquid
10 to 60C

230, 600W 0.01 to 0.03C Peltier-type air cooled Clear water

Clear water,
140, 320,
Fluorinated
600, 1200 W 0.01 to 0.03C Peltier-type water cooled
liquid

Series

HED

Set temperature range Cooling capacity Temperature stability Cooling method Circulating liquid
10 to 60C

300 to
750 W

0.1C

Peltier-type
Deionized
water
water,
cooled Chemical liquids

Thermoelectric Bath
Peltier-type Thermoelectric Bath INR-244-757

Peltier-type Thermoelectric Bath HEB

High-precision thermoelectric bath
High-precision temperature-regulation thermostatic chamber that
employs Peltier elements
Compact and low vibration
Unique agitation method keeps up-down
temperature distribution to a minimum.

Series
Series

29

Set temperature range Cooling capacity Temperature stability

0 to 60C

300 W

0.04C

Cooling method
Peltier-type air cooled

HEB

Set temperature range Cooling capacity Temperature stability Cooling method Circulating liquid
Peltier-type Clear water,
Fluorinated
15 to 60C
140 W
0.1C
water cooled aqueous liquid

Equipment Lineup for Physical and Chemical Industry

Temperature Control Equipment
Peltier-type Air-thermo HEA

Thermo-dryer with Air Temperature Adjustment Function IDH

For temperature control of compressed

air at small flow rate

Discharges the compressed air after it has been

dehumidified and temperature-controlled.

Series
Series

HEA

Air flow capacity Outlet air temperature Outlet air set Outlet air temperature Temperature control
m3/min (ANR) adjustment range pressure range
stability
method

Set temperature range Cooling capacity Temperature stability Cooling method Circulating liquid

IDH4

100 to 500

0.1

IDH6

200 to 800

0 to 50

22 W

Peltier-type air cooled

Air

15 to 30

0.15 to
0.85 MPa

0.1

Heater operation
PID control

Material

Flange
size

High Vacuum Equipment

Aluminum High Vacuum Angle Valve XL
Strong against fluorine
Minimal gas emissions
Minimal heavy metal contamination

Series

All-in-one integrated structure with high-precision casting, no gas buildup

Mounting interchangeable with Aluminum High Vacuum Angle Valve Series XL
(Series XM)

Shaft seal Valve

system
type

XLA
Single acting
Body:
XLAV(With solenoid valve)
Bellows (N.C.) Aluminum alloy
16 to 160
seal
Bellows:
XLC
Double
acting Stainless steel 316L
XLCV(With solenoid valve)
XLF
Single acting
Air
16 to 160
XLFV(With solenoid valve) operated O-ring (N.C.)
Body:
seal
XLG
Double Aluminum alloy
16 to 160
acting
XLGV(With solenoid valve)
XLD
Bellows seal Single acting Body: Aluminum alloy
25 to 160
O-ring seal (N.C.) Bellows: Stainless steel 316L
XLDV(With solenoid valve)
Body:
16 to 50
Manual Bellows seal Manual
XLH
XLS

Stainless Steel High Vacuum Angle/In-line Valve XM/XY

Actuation

Series
Angle

In-line

XMA

XYA

XMC

XYC

XMD

XYD

XMH

XYH

Electromagnetic

Aluminum alloy
Pressure balanced Single acting Bellows:
(N.C.) Stainless steel 316L
bellow seal

Actuation

Shaft seal Valve

type
system

Air
operated

Manual

Material

16, 25

Flange
size

Single acting Body: SCS13

(equivalent to
Bellows (N.C.)
stainless steel 304) 16 to 80Note)
seal
Double Bellows: Stainless
acting
steel 316L
Body: SCS13
Bellows
(equivalent to
Single acting
seal
stainless steel 304) 25 to 80
(N.C.)
O-ring
Bellows: Stainless
seal
steel 316L
Body: SCS13
(equivalent to
Bellows
Manual stainless steel 304) 16 to 50Note)
seal
Bellows: Stainless
steel 316L

Note) Size 16 is not available for In-line type.

30

Equipment Lineup for Physical and Chemical Industry

Smooth Vent Valve XVD

Slit Valve XGT

With the valve and needle valve all in one

unit, takes up 1/4 the space of conventional
models
Major reduction in particles through the use
of a metal diaphragm in the sheet portion
The flow rate of both initial air supply and
main air supply can be adjusted.

Suitable for use as a block disk between

the load lock chamber and transfer
chamber, or the transfer chamber and
process chamber, of semiconductor
equipment

Valve type

Series

XVD

Fluid

Normally closed
Nitrogen, Air,
(Open when pressured, Spring seal) Inert gas, etc.

Piping
Face seal
Compression

Port
size

Gate size Operating pressure

(MPa)
(Height x Width)

Series

Operating pressure
range (Pa)

Fluid

XGT

Atmospheric
pressure
to 1 x 106

Inert gas type

vacuum

1/4"

32 x 222
46 x 236
50 x 336

0.45 to 0.6

Electric Actuators
Electric Actuator/Slider Type LEF

Ball Screw Drive

Actuation type Specifications

Type

LEFS16

Step motor
(Servo/24 VDC)
Ball Screw
Drive

Belt Drive

Step motor
(Servo/24 VDC)
Servo motor
(24 VDC)

Ball Screw
Drive

AC servo motor
(100 W/200 W/400 W)

100 to 400
100 to 600

LEFS32

100 to 800

LEFS16A

200 to 1000
100 to 400

Ball Screw Drive

Work load (kg)

Horizontal

Vertical

Speed
(mm/s)

Screw lead
(mm)
10

10 to 500

10

5 to 250

20

7.5

12 to 500

12

20

15

6 to 250

40

10

16 to 500

16

45

20

8 to 250

50

20 to 500

20

60

23

10 to 250

10

10 to 500

10

10

5 to 250

11

2.5

12 to 500

12

18

6 to 250

LEFS25A

100 to 600

LEFB16
LEFB25
LEFB32
LEFB16A
LEFB25A

300 to 1000

48 to 1100

300 to 2000

48 to 1400

300 to 2000

14

300 to 1000

300 to 2000

LEFS25S

100 to 600

LEFS32S
LEFS40S

31

Stroke
(mm)

LEFS25

LEFS40

Servo motor
(24 VDC)

Belt Drive

100 to 800
200 to 1000

Positioning repeatability
(mm)

LECP6
LECP1
LECPA
0.02

LECA6

48
0.1

48 to 1500
48 to 2000

48
12

20

MAX.900

20

15

MAX.450

40

10

MAX.1000

16

45

20

MAX.500

50

15

MAX.1000

20

60

30

MAX.500

10

Controller
series

LECP6
LECP1
LECPA
LECA6

0.02

LECSA
LECSB
LECSC
LECSS

Equipment Lineup for Physical and Chemical Industry

Electric Actuator/Rod Type LEY

Motor parallel type

Specifications

Type

LEY16

Step motor
(Servo/24 VDC)

LEY25

LEY32

LEY16A

In-line motor type

Stroke (mm)

Pushing force
(N)

Vertical work load

(kg)

38

15 to 500

74

8 to 250

141

4 to 125

2.5

122

18 to 500

12

238

16

9 to 250

452

30

5 to 125

189

11

24 to 500

16

370

22

12 to 250

707

43

6 to 125

30

15 to 500

10

58

8 to 250

111

4 to 125

2.5

35

18 to 500

12
6

30 to 300

30 to 400

30 to 500

30 to 300

Servo motor
(24 VDC)

LEY25A

LEY25S

30 to 400

30 to 400

AC servo motor
(100 W/200 W)

LEY32S

Motor parallel type

30 to 500

In-line motor type

Speed (mm/s) Screw lead (mm)

Positioning repeatability
(mm)

Controller
series

10

72

9 to 250

130

12

5 to 125

131

900

12

255

16

450

485

30

225

157 (197)

9 (12)

1200 (1000)

20 (16)

308 (385)

19 (24)

600 (500)

10 (8)

588 (736)

37 (46)

300 (250)

5 (4)

LECP6
LECP1
LECPA

0.02
or less
LECA6

LECSA
LECSB
LECSC
LECSS

( ) indicates value when motor mounting position: straight is selected.

Electric Actuator/Guide Rod Type LEYG

Motor parallel type

Specifications

Type

LEYG16

Step motor
(Servo/24 VDC)

LEYG25

LEYG32

LEYG16A

In-line motor type

Stroke (mm)
30 to 200

30 to 300

30 to 300

30 to 200

Servo motor
(24 VDC)

LEYG25A

30 to 300

Pushing force (N) Vertical work load (kg)

Speed (mm/s)

Screw lead (mm)

38

15 to 500

10

74

8 to 250

141

4 to 125

2.5

122

18 to 500

12

238

16

9 to 250

452

30

5 to 125

189

11

24 to 500

16

370

22

12 to 250

707

43

6 to 125

30

15 to 500

10

58

8 to 250

111

4 to 125

2.5

35

18 to 500

12

72

9 to 250

130

12

5 to 125

Controller series

LECP6
LECP1
LECPA

LECA6

32

Equipment Lineup for Physical and Chemical Industry

Electric Slide Table LES
Easy setting: Data can be set with only 2 items, position and speed.
The controller is already set with the data of the actuator.
(The actuator and controller are sold as a package.)
Integration of the guide rail and the table.
Uses a recirculating linear guide for high rigidity and high precision.
Specifications

Type

Servo motor
(24 VDC)

Work load (kg)

Stroke (mm)

LESH8
Step motor
(Servo/24 VDC)

Reduced cycle time

Maximum acceleration/deceleration: 5,000 mm/s2
Maximum speed: 400 mm/s
Maximum pushing force: 180 N
Positioning repeatability: 0.05 mm

Horizontal

50, 75

LESH16

50, 100

LESH25

50, 100
150

LESH8A

50, 75

LESH16A

50, 100

LESH25A

50, 100
150

Vertical

Speed (mm/s)

Screw lead (mm)

2.0

0.5

10 to 200

1.0

0.25

20 to 400

6.0

2.0

10 to 200

4.0

1.0

20 to 400

10

9.0

4.0

10 to 150

6.0

2.0

20 to 400

16

2.0

0.5

10 to 200

1.0

0.25

20 to 400

5.0

2.0

10 to 200

2.5

1.0

20 to 400

10

6.0

2.5

10 to 150

4.0

1.5

20 to 400

16

Controller series

LECP6
LECP1
LECPA

LECA6

Electric Rotary Table LER

Rotation angle: 320(310), 180, 90
Possible to set speed, acceleration/deceleration,
( ) The value indicated in brackets shows the value for the LER10. and position. Max. 64 points
Low profile: Height 42 mm (LER10)
Energy-saving: Automatic 40% power
Space-saving: Built-in step motor
reduction after the table has stopped.
Shock-less/high speed actuation
Easy setting: Data can be set with only 2 items, position and speed.
Maximum speed: 420/sec (7.33 rad/sec)
The controller is already set with the data of the actuator.
Maximum acceleration/deceleration: 3000/sec2(52.36 rad/sec2) (The actuator and controller are provided as a set.)
Type

LER10
LER30
LER50

Rotation torque [Nm]

High torque

0.2

0.3

0.8

1.2

6.6

Positioning repeatability []

Maximum speed [/s]

Basic

Basic

High torque

420

280

Basic

High torque
0.05
(End: 0.01)

10

Controller series
LECP6
LECP1
LECPA

Value when an external stopper is mounted.

Electric Grippers LEH

Easy setting: Data can be set 2 items, position and force.
The controller is already set with the data of the actuator.
(The actuator and controller are sold as a package.)
Drop prevention function is provided. (Self-lock mechanism is provided for all series.)
Power consumption reduced by self-lock mechanism.
Gripping check function is provided.
Possible to set position, speed and force. (64 points)
Series

LEHZ
2 Finger

LEHZJ
2 Finger

LEHF
2 Finger

LEHS
3 Finger
Note) ( ): For long stroke

33

Body size

10
16
20
25
32
40
10
16
20
25
10
20
32
40
10
20
32
40

Stroke/Both sides
(mm)
4
6
10
14

Gripping force [N]

Basic

52 to 130
84 to 210

10
14

3 to 8
11 to 28

16 to 40

30
6

2 to 6

6 to 14

22
4

Compact

Opening and closing

speed (mm/s)

Controller series

5 to 80
5 to 100
5 to 120

3 to 6

6 to 14

4 to 8

16 to 40

11 to 28

16 (32) Note)

3 to 7

24 (48) Note)

11 to 28

32 (64) Note)

48 to 120

40 (80) Note)

72 to 180

5 to 80
5 to 100
5 to 80
5 to 100

2.2 to 5.5

1.4 to 3.5

9 to 22

7 to 17

36 to 90

5 to 100

12

52 to 130

5 to 120

5 to 70
5 to 80

LECP6
LECP1
LECPA

Equipment Lineup for Physical and Chemical Industry

Controller LEC

Programless Controller LECP1

The controller is already set with the

data of the actuator. (The actuator and
controller are sold as a package.)
Easy operation and simple setting: Easy
mode, detail setting: Normal mode
Teaching box, controller setting
software

No programming
Capable of setting up an electric actuator operation
without using a PC or teaching box
Speed/acceleration 16-level adjustment
Compatible with actuators with locks
Setting 3-level pushing force

Type

Series

Compatible Power Parallel input/output Number of

motor
supply
Input
Output step data

Step motor
11
13
Step data LECP6 (Servo/24 VDC)
24 VDC (Photo(Photoinput
coupler
coupler
Servo motor 10%
type
LECA6
isolation) isolation)
(24 VDC)

64

Type

Series

Compatible Power Parallel input/output Number of

motor
supply
Input
Output step data

Programless
Step motor 24 VDC
LECP1
type
(Servo/24 VDC) 10%

6
6
(Photo(Photocoupler
coupler
isolation) isolation)

14

Pulse Input Driver LECPA

A driver that uses pulse signals to allow positioning at
any position.
Return-to-origin command signal
With force limit function (Pushing force)

Type

Series

Compatible Power Parallel input/output

motor
supply
Input
Output

Pulse input
Step motor 24 VDC
LECPA
type
(Servo/24 VDC) 10%

Driver
type
Pulse input
type

AC Servo Motor Driver LECS

Compatible motor capacity: 100W, 200W, 400W
Compatible encoder: Incremental type
Absolute type
Servo adjustment using auto gain tuning
With display setting function
Type

Series

Pulse input type

(For incremental encoder)

LECSA

Pulse input type

(For absolute encoder)

LECSB

CC-Link direct input type

(For absolute encoder)

LECSC

SSCNET III type

(For absolute encoder)

LECSS

LECSA
Compatible motor

AC servo motor
(100/200 VAC)

Power supply

LECSB

LECSC

Parallel input/output
Input
Output
6

10

LECSS
Driver type

Pulse input type

100 to 120 VAC

(50/60 Hz)
200 to 230 VAC
(50/60 Hz)

CC-Link
SSCNET III

Card Motor LAT3

Card Motor Controller LATC4

The transportation, pushing and length measurement systems have been

miniaturized through the use of a linear motor.
Thickness 9 mm, Weight 130 g (at stroke 10 mm)
Moving magnetic type linear motor
Linear guide with circulating balls
Positioning repeatability: 5 m
Pushing measurement accuracy: 10 m
Easy programming (Cycle time entry)
Just input 3 parameters: Positioning time, Target position, Load mass.

Easy programming (Cycle time entry)

Just input 3 parameters: Positioning time, Target position,
Load mass.

Series

LAT3F

LAT3

Stroke
10
20
30
10
20
30

Sensor
(Optical linear Pushing Maximum load mass Maximum
encoder)
speed
Instantaneous
Resolution maximum
thrust Horizontal Vertical
5.2 N
100 g
1.25 m
6N
5.5 N
500 g
400 mm/s
5.2 N
6N
50 g
30 m
5.5 N

Type

Series

Power supply

Controller

LATC4

24 VDC10%

Parallel input/output
Input

Output
4
6
(Photo-coupler
(Photo-coupler
isolation/
isolation)
open collector
output)

34

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Specifications are subject to change without prior notice
and any obligation on the part of the manufacturer.

D-G

1st printing RS printing RS 8600KY Printed in Japan.