Chartered Semiconductor Manufacturing

Fab 3 17K Implanter Cleanroom Expansion Project

1.2

MIXING STATION

The testing and commissioning of these units involve the following.

1.2.1

Mixing Station Schematics

The schematic diagram is necessary as it gives a simple illustration of the water

distribution.
1.2.2

Pump Performance

The performance of the pump is verified against the pump curve produced by the
manufacturer. The water flow rate and the head are significance. Measurements of water
flow through the secondary balancing valves and pressure gauge reading across the
pump, plotted on the pump curve, show the performance of the pump.
Pump shut-off condition is also verified by closing the discharge valve fully and
recording the pressure gauge readings across the pump.
1.2.3

Chilled Water Balancing

Chilled water flowing through the secondary balancing valve is throttled according to the
requirement of the dry coil. The primary balancing valve is also adjusted to allow about
one-third the amount of water required by the dry coils.
The secondary valve adjustment is necessary to ensure the correct amount of water flows
through to the dry coil. The primary valve adjustment is necessary the right mixing
amount to achieve the intended dry coil supply water temperature.

Takasago (S) Pte. Ltd.

Chartered Semiconductor Manufacturing

Fab 3 17K Implanter Cleanroom Expansion Project
1.2.2

PUMP PERFORMANCE

Objective:

To check the pump shut-off condition.

To verify pump water capacity and head.

Procedure:
1.
2.
3.
4.
5.
6.
7.
8.

Ensure that all valves at dry coil are opened fully

Ensure that all bypass valves are closed and all 3-way control valves stems are up.
Close the primary loops valves.
Open fully the balancing valve at secondary loop.
Hook up measuring instrument to balancing valve at secondary loop.
Run one pump.
Slowly, shut off the pump discharge valve completely.
Record readings of pressure gauges across the pump to calculate the head at zero
flow.
9. Measure and record reading of running ampere.
10. Open the pump discharge valve slowly, until the specified pump head is reached.
11. Measure and record water flowrate and pressure drop across the balancing valve.
12. Measure and record reading of running ampere and speed of motor.
13. Plot reading of flows and head on pump curve.
14. Repeat for the other pump.
Results:
From the results obtained, the performances of the pumps is within acceptable limits of
10%.
The flowrate capacity of the pumps differs from the -1%to+0.7%. This small differences
can be attributed to the accuracy of the achieving the pump head during measurement, as
it is only dependent on the visual reading of the pressure gauges, Since the required flow
is much less than this difference, the pumps still has some capacity for future upgrade.
All pumps meet the shut-off condition.

Takasago (S) Pte. Ltd.

Chartered Semiconductor Manufacturing

Fab 3 17K Implanter Cleanroom Expansion Project
1.2.3

CHILLED WATER BALANCING

Objective:

To balance the amount of water flow into the mixing station.

Procedure:
1. Ensure that all valves at dry coil are opened fully.
2. Ensure that all bypass valves are closed and all 3-way and 2-way control valve
stems are up.
3. Open fully the balancing valve at secondary loop.
4. Open fully all valves at primary loop except the bypass valve.
5. Hook up measuring instrument to primary balancing valve.
6. Ensure pump discharge valve is opened fully.
7. Run one pump.
8. Throttle the primary balancing valve to the required flow.
9. Measure and record water flowrate and pressure drop across the balancing valve.
Results:
From the balancing results, the valves have been acceptably adjusted to the required flow.

Takasago (S) Pte. Ltd.

Chartered Semiconductor Manufacturing

Fab 3 17K Implanter Cleanroom Expansion Project
1.3.2

CHILLED WATER BALANCING

Objectives:

To balance the amount of water flow into the dry coil.

Procedure:
1.
2.
3.
4.
5.

Ensure that all valves at dry coil are opened fully.

Ensure that all bypass valves are closed and all 3-way control valve stems are up.
Ensure only one pump is running.
Check initial flow in all the dry coils in the pump system.
Calculate the total l flow to establish that the initial in the coil is equivalent to the
flow in the balanced secondary loop.
6. Identify the branch with the highest to lowest flow.
7. Start balancing the dry coils from the branch with the highest flow.
8. Adjust the last coil (n) to the required flow.
9. Next, adjust the 2nd last coil (n-1) to the required flow.
10. Check back the flow in the last coil. Re-adjust, if necessary.
11. Check back the flow in the 2nd last coil. Re-adjust if necessary.
12. Next, adjust the 3rd last coil (n-2) to the required flow.
13. Continue checking back the coils in the order of n, n-1, n-2.
14. Then proceed to adjust the next coil to the required flow.
15. Repeat procedure until the adjustment and checking back is done to the 1st coil in
the branch.
16. Record all readings of flow for that branch.
17. Find the branch with the next highest flow and proceed to balance the dry coils in
the same manner as described above.
Results:
The dry coils have been balanced to the design flowrate and the result can be tabulated as
such:

Takasago (S) Pte. Ltd.

Chartered Semiconductor Manufacturing

Fab 3 17K Implanter Cleanroom Expansion Project

1.3

DRY COIL BALANCING

The testing and commissioning of these units involved the following:

1.3.1 Dry Coil Layout
The layout plan is necessary as it gives a clear illustration of the
arrangement of the dry coils, the zones affected and the water distribution.
1.3.2 Chilled Water Balancing
The dry coil system is balanced in a logical sequences. The branch with the
highest proportion of the flow is balanced first, thereby gradually forcing the
water into the areas with bad circulation.
However, when the balancing dry coils on that branch, the flow in the last
coil is adjusted first. Subsequently, the following 2nd last coil is adjusted.
Using only 1 measuring instrument, coils already adjusted have to be
checked back to confirm that the adjustment downstream do not change its
flow. Final flow measurement and recording is done when all coils in the
branch are adjusted and balanced.

Takasago (S) Pte. Ltd.