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REQUIREMENTS

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REVISION RECORD
REV

ECO

DESCRIPTION

SUBMITTED

APP

DJP02803

Limit scope to CDA that comes in direct contact with

HSA, HGA and HDA components; 1. Changed the pressure range to 80-150 psig; 2. Changed the pressure dew
point range to -70 to -100 degrees F; 3. Specified tubing
materials as copper, stainless steel (preferred) and galvanized steel (allowed); 4. Added limits for hydrocarbons
and other compounds; 5. Added use of continuous inline
vapor monitor; 6. Added point of use filter sized at 0.01
micron; 7. added use of activated carbon filter at point of
use; 8. Added requirement for spec. certification and
defined procedure for notification when non-compliance
occurs

3/08/2001

Jeff B Nelson
Gary Geurts

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TABLE OF CONTENTS
PURPOSE ......................................................................................................................2
SCOPE ...........................................................................................................................2
GENERAL .....................................................................................................................2
EQUIPMENT REQUIRED FOR TESTING .................................................................3
CODES, SPECIFICATIONS AND REFERENCE MATERIALS ...............................4
COMPRESSORS ...........................................................................................................4
DRYERS ........................................................................................................................5
PRE FILTERS ................................................................................................................8
AFTER FILTER ............................................................................................................9
PARTICLE COUNTS ..................................................................................................10
TOTAL HYDROCARBONS .....................................................................................11
REPORTING FORMAT ..............................................................................................13
CERTIFICATION AND COMPLIANCE PROCEDCURE ....................................... 13

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PURPOSE
This specification establishes the acceptance criteria for all new and upgraded Clean Dry Air (CDA) systems supplying high purity compressed air to processes that expose product or components to the CDA
flow. The purpose of defining the quality of CDA is to ensure that the cleanliness of products and components is not jeopardized by CDA used in clean rooms. This specification also recommends CDA quality
levels that existing systems should attain for drive and production processes whenever practical, allowing
for budget and schedule restraints.

SCOPE
This specification applies to all new or upgraded Clean Dry Air systems that provide compressed air flow
that comes in direct contact with HSA, HGA, and HDA components and where high purity CDA is
critical to process or application.

GENERAL
3.1 The output of the system shall comply with the criteria below or as agreed upon, in writing by the
owner and seller.
3. 1. 1. FLOW (cfm)

To be defined by application

3.1.2

MAXIMUM PRESSURE RANGE (psig)

80 to 150

3.1.3

TEMPERATURE (degree F)

AMBIENT

3.1.4

ACCEPTABLE PRESSURE RANGE (degree F)

70 to 100

3.1.5

PARTICLES / cu ft (system)

0 particles / cu ft. = > 0.5 micron.

3.1.6

PARTICLES / cu ft (point of use)

To be defined by application

3.1.7

TUBING, MATERIAL

304 Stainless Steel (preferred)

Copper, (Type L cleaned for oxygen service)

3.18

HYDROCARBONS

< 1ppm

3.18

OTHER COMPOUNDS

< 2ppm

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EQUIPMENT REQUIRED FOR TESTING

4.1

PARTICLES
4.1.1

Laser Particle Counter with a 0.1 or 1.0 CFM sample rate capable of detecting
particles of 0.3 micron or less.
4.1.2 High Pressure Diffused (MET-ONE 2080732-X or equivalent) that is suitable
for use with the particle counter above.

4.2

TOTAL HYDROCARBONS
4.2.1

Method A. Continuous, Inline Hydrocarbon Vapor Monitor

4.2.1.1

Hydrocarbon Indicator; Zander Filter Model OP01(or equivalent) For point

of use protection since Oil Free systems may contain hydrocarbon vapors.

4.3.1

Method B. Batch Mode Hydrocarbon Analysis

4.3.1.2

Bubble Flow Meter; flow rate range to include 50-100cc/min

4.3.1.3

Stopwatch; lapse time

4.3.1.4

Packed ATD Sampling Tubes with Protective Caps packed with 200mg
Carbotrap C and 100mg of Carbotrap B (or equivalent packing from Supelco)

4.3.1.5

Ref: Tubes for Perkin-Elmer ATD400 are P/N L4270123

Teflon tubing, in. OD

PC-FM

4.3.1.6

Fittings, Swagelock with Teflon or graphite ferrules

4.3.1.7

Gas Chromatograph equipped with Mass Spectrometer (HP5890 Series II Gas

Chromatograph and HP5971A Mass Selective Detector

4.3.1.8

Auto-Thermal Desorption System (Perkin Elmer ATD 400)

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CODES, SPECIFICATIONS AND REFERENCE MATERIALS

5.1 Design shall be in accordance with all state and federal codes, ANSI, NEMA, ISA
and the ASME. Where ever practical, copper tubing of Type L or ACR grade is preferred
5.2 Any conflicts between the above listed codes and specifications shall be
resolved in writing by the vendor.

5.3 Seagate Specification 2080020-001, (General Outgas Test Procedure by Dynamic

Headspace Analysis)

COMPRESSORS
6.1 GENERAL
6.1.1

100% compressor capacity redundancy is required where CDA is critical to the process
or application,

6.1.2

Compressors must be oil free or oil-less type to be considered. Provide the energy model.

6.1.3

Compressor size and volume requirement to be agreed upon by buyer and seller.

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DRYERS
7.1

MECHANICAL DESIGN (non-heat regenerated type)

7.1.1

Where CDA is critical to the process or application, dryer capacity redundancy

of N+1 will be required, thus providing 1 unit in standby.

7.1.2

The velocity of the gas being dried shall be less than that which would fluidize the bed.

7.1.3

Dryer shall be designed for minimal pressure drop at operating rate flow, temperature
and pressure.

7.1.4

Depressurization shall be concurrent to regeneration and shall be controlled to prevent fluidization

of the desiccant.

7.1.5

Regeneration shall be accomplished without the use of heaters (internal or external).

7.1.6

Dryers shall be supplied with purge flow indicator and adjustment curves to compensate
for changes in operating conditions.

7.1.7

Dryer shall be furnished with a means of re-pressurization to allow the regeneration chamber to
reach line pressure prior to changeover.

7.1.8

Dryer shall be furnished with an exhaust muffler and flow restrictor to limit noise during dump
and purge cycles.

7.1.9

Valves shall be non-lubricated poppet type, and of suitable design for high cycle service of nonheat regenerated dryers. Valve internal shall be stainless steel, and positively pilot actuated. Bodies must be high strength carbon steel, coated internally with Teflon.

7.1.10 Manufacturer shall have tested valves for a minimum of 500,000 cycles without failure. Test
reports shall be submitted upon request.
7.1.11 Valve operators are to be supplied with permanently lubricated packing with the assurance NO
lubrication can enter the system.
7.1.12 The calculated desiccant life shall be stated and guaranteed by the vendor.
7.1.13 An energy saving demand cycle control shall be quoted as an option. This system shall perform
the following functions:

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7.1.13.1 Assure full utilization of the moisture holding capacity of the desiccant bed before
regenerating the bed.
7.1.13.2 Maintain outlet dew point at or below the specified level throughout the drying period.
7.1.13.3 Moisture sensing must be accomplished via capacitance measurement of actual
moisture on desiccant, not sensing of airflow. Method shall be described in detail.
7.1.13.4 Must utilize industrially hardened, abrasion and liquid water-resistant moisture
sensing probes. Capacitance-type sensing probes are preferred. Re-calibration must
be kept to a minimum. Re-calibration requirements must be stated within quote.
7.1.14

The dryer controller shall be comprised of intrinsically reliable and durable

components that are not susceptible to shorting and corrosion.

7.1.15

The controller shall be responsible for initiation and monitoring of the dryer operation.

7.1.16

Standard instrumentation shall include a purge flow indicator, chamber gauges,

inlet and outlet gauges and visual outlet moisture indicator.

7.1.17

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7.1.16.1

Chamber pressure gauges.

7.1.16.2

Power light on.

7.1.16.3

Chamber drying indicating lights.

The following options may be quoted:

7.1.17.1

Visual-type color change outlet moisture indicator.

7.1.17.2

Inlet and outlet gauges.

7.1.17.3

Switching failure alarm for inlet and purge exhaust valves

7.1.17.4

Chamber performance-degrading alarm.

7.1.17.5

An indicating light shall be provided to show that chamber performance is degrading

(a high humidity condition is approaching). If a malfunction of
the moisture sensing occurs, the dryer shall be automatically switched to a
fail safe fixed cycle operating mode. An indicating light shall show the mode
of operation (fixed cycle or demand cycle).

7.1.17.6

Dry contacts for customers alarm circuit shall be provided.

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7.2

CLEAN DRY AIR

REQUIREMENTS

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ACCEPTANCE CRITERIA
7.2.1

Dryer shall provide air with effluent dew point and quality in accordance with
paragraph 8.0.

7.2.2

Dryer shall be a dual chamber design with each chamber filled or capable of
being filled with equal quantities of absorbing desiccant.

7.2.3

The drying flow shall be downward to minimize fluidization of the desiccant in

the event of upset conditions.

7.2.4

Re-generation flow shall be counter-current to the direction of the inlet gas flow.

7.2.5

Each desiccant chamber shall be fitted with fill and drain ports equal to, or
greater in diameter than the main flow pipe size to facilitate filling and draining
of desiccant without the need to disassemble manifold piping.

7.2.6

Each chamber shall be provided with a removable stainless steel slotted sheet
inlet diffuser screen and desiccant bed support screen.

7.2.7

Each chamber shall be fitted with a relief valve.

7.2.8

Chambers are not to be supported by interconnecting piping in any way.

7.2.9

Desiccant vessels shall be designed in accordance with the ASME Pressure Vessel Code
and shall be stamped by the code inspector. Code calculations (if required by ASME Section VIII) shall be supplied for all pressure vessels.

7.2.10 All dryers requiring more than one voltage shall be supplied with a control voltage transformer. If the high voltage exceeds 230 volts, separate high and low tension enclosures
shall be provided.
7.2.11 Fail-safe Mode: Any power interruption to the dryer shall not result in the
interruption of the airflow through the dryer.
7.2.12 Only dry, oil free outlet air shall be used for pilot air necessary for dryer operation. A high
surface pilot airline filter with a 1.0-micron absolute rating shall be furnished for this service.
7.2.13 All vessels, steel piping and structural supports shall shot blasted to white metal to remove
scale and rust prior to painting. No visible oxidation of the surface shall be permitted
between the time of blasting and priming.
7.2.14 Surfaces prepared per Paragraph 7.2.13 above, shall be coated with an epoxy based zinc
chromate/iron oxide primer and high solids epoxy topcoat. The topcoat shall be applied in
two coats to a minimum dry thickness of 8 mils.

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PRE FILTERS
8.1

8.2

8.3

8.4

ACCEPTANCE CRITERIA
8.1.1

The pre filter shall be high efficiency, inside to outside flow element-type coalescing
filter.It shall be designed to provide high efficiency removal of liquids and solids after
becoming fully saturated with liquids.

8.1.2

The pre filter shall be made up of a coalescing filter element to remove the liquids, a
housing (bowl) to contain the element and the captured liquids with both parts combined
to form a complete assembly. Said assembly shall be fitted with a drain port to provide a
pathway to eliminate the collected liquid(s). Filter element to be positively sealed to the
filter housing using elastomeric (no silicones) seals. The media shall be well supported
inside and out.

PERFORMANCE
8.2.1

When challenged with an influent oil content ranging from one to 50 PPMW, the
pre filter should consistently provide effluent oil levels less than 0.003 PPMW.

8.2.2

The pre filter shall remove all particulates greater than 0.9 microns.

HOUSING CONSTRUCTION
8.3.1

The pre filter housing will allow for service of the elements without removing the
entire assembly from the system.

8.3.2

The pre filter bowl will provide the sufficient sump volume to prevent liquid
re-entertainment.

DRAIN VALVE
8.4.1

The drain valve shall be automatically operated using either a direct acting or piloted
solenoid valve.

8.4.2Valve control circuitry shall be sealed against environmental intrusion and shall be
adjustable for cycles from 10 to 20 minutes and open times of 0.5 to 10 seconds.

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AFTER FILTER
9.1

9.2

9.3

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MECHANICAL DESIGN
9.1.1

The after filter shall be a particulate filter designed to prevent solid particulates from entering the compressed air stream. The after filter shall be placed in the compressed air stream
downstream (after) of the air dryer to capture desiccant particulates before they pass
downstream.

9.1.2

The after filter shall be made up of a particle removal element to capture solid particles
and a housing to contain the elements. Filter element to positively seal to the filter
housing using elastomeric (no silicones) seals. Media shall be well supported inside and
out.

PERFORMANCE
9.2.1

The system after filter element shall have an absolute filtration rating of 0.5 microns.

9.2.2

The clean after filter assembly pressure drop shall be no greater than 1.0 PSID. Each after
filter element shall be able to withstand a maximum differential pressure of 50 PSID in the
normal flow direction (outside in).

9.2.3

The after filter assembly for non-heat reactivated dryers shall have a standard temperature
rating of 200F.

POINT OF USE FILTERS

9.3.1

Point- of- use filters of 0.01 micron or as appropriate to the operation shall be installed at
all operations specifying compressed dry air cleaner than that provided by the system.

9.3.2

Point- of- use filters shall be installed as close as possible to the end use or
applications.

9.3.3

For longer life, the point of use filter shall be protected by two coarser filters located
upstream of the final 0.01 micron filter. These two filters should be in continuous series.
The first upstream filter sized at 0.10 micron should be located closest to the point of use
filter The second filter sized at 1.0 micron is located upstream of the 0.10 micron filter.

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9.3.4

9.3.5

9.3.6

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CLEAN DRY AIR

REQUIREMENTS

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For applications where compressed air comes in contact with product, an activated
carbon filter (Zander Microfilter series A or equivalent) is required to remove hydrocarbon
vapors and should be placed upstream of the 0.10 micron sized filter and the final point of
use filter sized at 0.01 micron. A reserve activated carbon filter unit should be placed in
parallel with the operating activated carbon filter for ease of maintenance and to avoid
down time when the operating activated carbon filter must be replaced.
A hydrocarbon indicator (Zander Model OP01 or equivalent) should be installed directly
after the activated carbon filter and upstream of the 0.10 micron sized filter. This indicator
can measure hydrocarbon levels with a detection limit of 0.01ppm, and serves to provide a
visual warning when the activated carbon filter needs replacement.
Additional pressure regulation may also be installed at this location. Install
regulators and valves upstream of the filter.

PARTICLE COUNTS
10.1 SAMPLE EXTRACTION
10.1.1 Particle counts samples shall be extracted from a line under full line pressure
using a high-pressure diffuser, (see Equipment, section 4.0)

10.2 MONITORING METHOD

10.2.1

Attach a laser particle counter to the high-pressure diffuser and sample with
a particle counter capable of detecting and recording the minimum particle
size specified.

10.2.2

Minimum sample volume shall be 2.0 cubic ft.

10.3 ACCEPTANCE CRITERIA

PC-FM

10.3.1

Vendors mechanical inspection and testing shall be indicated in the quotation

and the customer shall be given the opportunity to witness tests conducted
by vendor.

10.3.2

The manufacturer shall notify customer five working days prior to any
performance test so that a representative may be present at the test.

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CLEAN DRY AIR

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The system output shall provide the following purity of clean dry air:
10.3.3.1

Dew point -70 F to -100 F

10.3.3.2

Particle Count: Zero particles after system filters larger than 0.5 micron.
(Point of use filters will exhibit 0 particles larger than 0.3 micron or as specified by owner)

10.3.3.3

Pressure, 80 psig minimum output

10.3.3.4

Pressure, 150 psig maximum output (A lower pressure may be appropriate in

some piping installations or for quick disconnect fittings)

TOTAL HYDROCARBONS
11.1

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SAMPLE EXTRACTION

11.1.1

To extract a sample, reduce the flow from full line pressure to 100 cc/min.
through the use of a suitable flow reducer or pressure regulator.

11.1.2

Use a bubble flow meter or rotometer to verify flow of 100 cc/min.

11.1.3

Attach suitable clean tubing (1/4 inch Teflon) to source of regulated flow.
Assure there are no leaks.

11.1.4

Condition ATD tube per procedure defined in section 11.4, below.

11.1.5

Unpack and attach conditioned ATD tube to tubing using Swagelok fittings with Teflon
or graphite ferrules. Save packaging materials for return of the tube to
the lab for analysis.

11.1.6

Caution: Attach ATD tube so that the airflow enters the tube from the end that
has a small groove around the circumference.

11.1.7

Record date, exact time, ATD tube number, flow rate and location of sample at start of
test. Sample for 6 hours.

11.1.8

Remove ATD tube and repackage for return to lab. Replace tube caps and wrap tube
with aluminum foil (dull side toward tube).

11.1.9

Return packaged ATD tube and record reflecting date and exact time of end of test. The
lab will need total sample time and flow to calculate total hydrocarbons.

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11.2

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MEASUREMENT METHOD
11.2.1

Air Sampling Procedure (Organics) by ATD-GCMS Analysis

11.3 PROCEDURE
11.3.1

Conditioning of ATD Tubes

11.3.1.1 Condition the packed ATD tube at 350oC for 30 minutes under
constant flow of helium or nitrogen at 50 to 100cc/min
11.3.1.2 Run a tube background (blank) using the GC/MS

11.4 SAMPLING PROCEDURE

11.4.1

The adsorbent tube must be handled with cotton, nylon or latex gloves

11.4.2

At the sampling site, remove the protective Teflon end caps from the ends of
the tube

11.4.3

Connect the ATD tube to the exit port of the CDA source

11.4.4

Collect gas sample for 4 to 6 hours at a flow rate of 50 to 100cc/min.

11.4.5

A the end of the sampling period, replace the Teflon end caps and wrap the ATD tube
tightly in aluminum foil (dull side towards the tube).

11.4.6

Send the ATD tube to the lab for analysis by GC/MS or place in freezer at </=0oC.

11.5 SAMPLE ANALYSIS

11.5.1

The Dynamic Headspace Outgassing Test is to be conducted in accordance with Seagate

Specification 2080020-001.

11.5.2

Acceptance Criteria

Outgassing products shall not exceed the limits shown in Table 1 when tested per Seagate
Specification 2080020-001.

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TABLE 1: Acceptance Criteria for Clean Dry Air Purity

12

Controlled Chemicals

Nanograms/cm2 (1)

Hydrocarbons

1,000 (1ppm)

Other Compounds

(2)

(1)

To use hexadecane as an internal standard, build calibration curves for controlled compounds
using hexadecane (1000ng) as an internal standard on ChemStation Software. For compounds
not controlled, assume hexadecane response factor of 1.

(2)

Record type and amount of other compounds detected. Submit in report for customer
reference only.

REPORTING FORMAT
12.1 Report the total amount of hydrocarbons in the CDA sampled in ppm
12.2 Location of CDA outlet in clean room
12.3 Work station number
12.4 Work week/Date
12.5 Name of person collecting sample
12.6 Start and end of sampling time
12.7 Reference M&P Lab report number
12.8 Other compounds detected.

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CERTIFICATION AND COMPLIANCE PROCEDCURE

The site M&P Lab and the Facilities Engineer will perform the CDA performance and quality tests, (as
specified in sections 3.0, 9.3, 10.22, 10.33, and 11.5), on a quarterly basis for the process, or more frequently as required by the site quality and engineering departments. Facilities will certify that the site is
in compliance with the requirements of Spec. 35402-001(latest rev.).In the event of non-compliance, the
Facilities Manager/Director must notify the SVP of Quality and the site VP of Operations that the site is
non-conforming, and outline what corrective action is required for conformance.

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