fv

OXFORD APPLIED RESEARCH

Quadrupole Mass Filter

Quadrupole Mass Filter

QMF200

OXFORD APPLIED RESEARCH

QMF200 Operation and Maintenance

Oxford Applied Research

Nanotech House, Nursery Rd North Leigh Business Park
Witney Oxfordshire
OX29 6SN
United Kingdom
Telephone: (0)1993 880005
Fax: (0)1993 880060

http://www.oaresearch.co.uk
Sales: sales@oaresearch.co.uk

Table of Contents
Safety
Principle of Operation

1
3

Quadrupole Mass Spectrometry

Mass
Resolution

3
4
4

The QMF200

Installation

Mounting and Pump Down

Source Bakeout

Electrical Connections

Operation

Front Panel Control of the Power Supply

Filter Mode
Scan Mode
Cluster source Mode
Other Information

9
10
14
15
16

Notes on Operating the QMF200 with the

NC200U Nanocluster Source
Acquiring a Mass Spectrum
Mass-Selecting Clusters
Frequency Effects
Using the QMF200 to Focus Cluster Ions

17
17
18
18
19

QUVI-2 Software Control Overview

Installation

20
21

Operation of the QMF200 using software control

22
Quadrupole Parameters
22
Cluster source Parameters
23
Scan Parameters
24
Acquiring a Scan
24
Scaling the data on the Screen
24
Storing and Viewing Multiple Spectra
25
Other Features
25
Maintenance

27

Quadrupole removal and cleaning

27

Quadrupole Exit Apertures

29

Specifications

31

Quadrupole Mass Filter

31

Power Supply

31

Oxford Applied Research

Quadrupole Mass Filter QMF200

Section

Version: 2.0

1
Safety

sers of this equipment must be made aware of the hazards associated

with its use. Throughout this manual attention is drawn to the safety
hazards as follows;

!WARNING!
Failure to observe a warning could lead to injury or
death to personnel.

!CAUTION!
Failure to observe a caution could lead to damage to
the equipment. Failure to observe these cautions will
invalidate the warranty

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Quadrupole Mass Filter QMF200
Version: 2.0

(i.)

Become familiar with the principle of operation of the equipment and

be aware of the function and operating voltage of each part of it.

(ii.)

Disconnect the power supply from the mains before adjusting any of
the cables.

(iii.)

Disconnect the electrical feedthrough leads before handling the source.

(iv.)

Do not probe the power supply or the connector leads. There are no
user serviceable components within them.

(v.)

Ensure that all electrical, control, water, and gas connections are
properly made.

(vi.)

Ensure that all of the equipment is properly earthed (grounded).

(vii.)

Ensure that there is sufficient ventilation for the electronics unit. The
air intakes are in the base of the box with the outlet at the rear.

!WARNING!
Failure to earth the equipment could lead to high
voltages appearing on exposed surfaces.

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Quadrupole Mass Filter QMF200

Section

Version: 2.0

Principle of Operation

he QMF200 quadrupole mass filter can be used to analyse and filter

charged nanoparticles from the NC200U nanocluster deposition source.
This section briefly explains the basic principles of quadrupole mass
spectrometry and describes the QMF200 mass filter.

Quadrupole Mass Spectrometry

Mechanically the core of the quadrupole assembly consists of four rods and a
detector plate on which the cluster ion current can be measured. The opposite rods
are electrically connected to each other. A voltage, which has a dc and ac
component (of frequency f), U+Vcos 2ft is applied to one pair of poles; the
negative (-U-Vcos 2ft) is applied to the other pair (see figure 1). The cluster ions
enter along the axis of the quadrupole and oscillate due to the electric field. Clusters
can be selected according to their mass to charge ratio by the quadrupole electric
field so that only ions of a defined mass will be transmitted to the ion detector
plate. The quadrupole acts as a band-pass filter. The parameters which can be
varied to allow clusters of a particular mass to pass through the filter are U, V and f.
Detector

- (U+Vcos2ft)

U+Vcos2ft

Cluster Ions

Figure 1: Quadrupole schematic

Oxford Applied Research

Quadrupole Mass Filter QMF200
Version: 3.0

Mass
The mass (M) is directly proportional to the amplitude of the ac voltage (V) and
inversely proportional to the square of the frequency (f2) applied to the poles:
M=7x107(kV/f2d2).1
Where d is the diameter of the poles and k is a correction factor. Scanning V, whilst
monitoring the ion current from the quadrupole exit, allows a mass spectrum of
the cluster beam to be acquired. The ratio of U/V (resolution) must be kept
constant throughout. The frequency applied to the poles determines the mass
range over which is scanned.
Resolution
The ratio of U/V defines the width of the cluster mass band transmitted through
the filter. This relationship can be proven by solving the Mathieu equations for
particle trajectories along a quadrupole . The theoretical resolution can be
expressed as:
M/M = 7.936(0.16784-(U/V))..2
As the ratio of U/V is increased the narrower the mass band transmitted through
the filter. Theoretically it should be possible to resolve one particular cluster mass;
however in reality the optimum resolution is determined by a number of other
parameters including the mechanical construction (diameter, tolerance and length
of rods) and variations in the initial cluster ion energy. There is also a large
compromise between the resolution and the cluster flux. The optimum resolution
is given by the expression:
M = 4x109 Vz/f2L2....3
Where Vz is the energy of the ions and L is the length of the quadrupole rods.

The QMF200
A schematic of the un-mounted QMF200 is shown in figure 2. Grounded entrance
and exit apertures shield the cluster beam from the end of the quadrupole rods and
also help to define the beam. An isolated aperture plate beyond the exit aperture is
used to monitor the transmitted cluster ions. This plate can also be biased (+12V
or 12V) to extract more of the ions from the beam during measurement of the
cluster size. Ion steering plates fitted at the end can be used to separate the ionised
mass-selected cluster beam from the neutral cluster beam. Unlike other
quadrupole devices the QMF200 does not require an ioniser before the entrance

D. Bassi: in Atomic and Molecular Beam Methods, G.Scoles(ed.), Vol I, Chap 8, (Oxford
University Press, Oxford 1988)

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Quadrupole Mass Filter QMF200
Version: 3.0

aperture since the NC200U source produces a high content of ionised clusters
(typically >30%) and these can be utilised by the filter.
The QMF200 has a variable voltage range of 1-250V and a frequency range of 3100kHz. The quadrupole rods are 2.54cm in diameter and have a length of 25cm.
These parameters allow particles to be measured and filtered between ~30 and
~3x106 a.m.u. The typical usable cluster size resolution is ~ 2%. The mechanical
resolution should, in theory, be better than 0.01%, however in order to achieve a
useful flux, in conjunction with the source, it is not practical to obtain this value.
The QMF200 has two operational modes. The scan mode allows the user to
scan V (and hence the cluster mass) whilst monitoring the cluster ion current.
During this operation the U/V ratio is kept constant and U cannot be controlled
by the user. The filter mode allows the user to select a chosen V (mass) and
adjust the resolution (U/V).

Cluster ion
steering plates

Entrance
aperture Mounting
plate

Quadrupole
rods

Exit
aperture

Figure 2: Schematic of un-mounted QMF200

Ion collection
aperture plate

Oxford Applied Research

Quadrupole Mass Filter QMF200

Section

Version: 3.0

Installation
Mounting and Pump Down

Standard UHV practice should be adopted in installing the QMF200

quadrupole mass filter.

The QMF200 comes ready mounted within a straight tubulation or

differential pumping T-piece depending on customer requirements. The
filter should be mounted with the deflection plates facing into the chamber
and the opposite flange facing towards the NC200 nanocluster source.

Source Bakeout

The QMF200 can be baked to 150oC but all external electrical cabling must
be removed beforehand.

Electrical Connections
!WARNING!
Failure to earth the equipment could lead to high
voltages appearing on exposed surfaces. Ensure that
the GROUND connection (grounding stud, figure 3)
of the power supply is connected to same ground as
the system

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Quadrupole Mass Filter QMF200
Version: 3.0

Grounding stud
Air vent from cooling fan

Interlock connector (2 pin)

Input connection
from ion current
Mains input
collector plate
(universal voltage)
Connection to ReBus100
(3 pin)
remote interface for PC remote
Output to X and Y
control option
deflection plates
(5 pin)
(4 pin)

Output connection
to quadrupole rods

Interlock connector
shorting link

Quadrupole
rod-pair 2 (Q2)

Y deflection
plate (Y)

Quadrupole
rod-pair 1 (Q1)

Collector plate (C)

X deflection
plate (X)

Focussing lens (L)

Not connected
BNC shorting link

Figure 3: QMF200 electrical connections

The following electrical connections should be made from the power supply to the
instrument.

Quadrupole Output Connect the blue BNC cable from the

Quadrupole power supply (labeled output on the back of the power
supply) to the 2 BNC flange connections. The BNC connections are
labeled Q1 and Q2 on the flange,

Ion Current Input

Connect the black wire with the 3 pin connector to the connection labeled
collector on the power supply and to the BNC connection labeled C
on the quadrupole

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Quadrupole Mass Filter QMF200
Version: 3.0

Ion Steering Plates and focus facility . Connect the cables labeled X
and Y up to the X and Y BNC feedthroughs and to the X,Y connector on
the back of the power supply. Optionally one of the X or Y voltages may
be connected to the focusing lens (labeled L) depending on user
requirements. Whichever connection (X,Y or L) is not used should be
shorted out to ground using the BNC shorting link supplied. This
will prevent charging of the disconnected isolated plate which might cause
unexpected distortion of the cluster beam.
!WARNING!
It is recommended that the BNC shorting link is used
for the disconnected plate to prevent charging

Remote Connection If software has been supplied connect the multipin cable from the remote connection on the power supply to the
ReBus200 interface box. Do not plug in the USB cable from the
ReBus200 to the PC until the software installation has been completed as
described later in this manual.

Interlock connection The QMF200 can optionally be used with an

interlock switch which will disable the power supply outputs if the
interlock connection is broken. This could be used with an appropriate
pressure gauge over-pressure trip for example. If this facility is used, it
should be noted that the maximum recommended operating pressure of
the QMF200 is 1x10-3 mbar. If the user does not wish to make use of this
facility, the interlock connection shorting link shown in figure 3 should be
connected to the port labeled interlock on the back panel. This
connector permanently connects the two pins of the interlock connection
together.
!WARNING!
The interlock connection must be made to operate the
power supply without any error messages

!WARNING!
Ensure that the power supply is switched off when
making these connections and never remove the
OUTPUT connections when the power supply is
turned on.

Oxford Applied Research

Quadrupole Mass Filter QMF200

Section

Version: 3.0

Operation

efore operating the equipment ensure that all personnel are familiar with
the contents of this manual. Also ensure the following:

The instrument is installed in a vacuum system whose operational pressure

is below 1x10-3mbar.

The electrical connections from the power to the quadrupole are made.

Front Panel Control of the Power Supply

This section describes the control of the QMF200 using the front panel of the
power supply. For operation using the software control please refer section 5 of
this manual.
All operating parameters of the QMF200 may be set via the single control
knob on the front panel, and their status viewed in the digital multi function
display screen. The control knob is used by rotating in either direction until the
desired value is displayed on the digital display and then depressing the knob in
order to make a selection or accept the displayed value.
Power on/off
switch

Control knob

Multi-function
display screen

Figure 4 QMF200 power supply front panel

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Quadrupole Mass Filter QMF200
Version: 3.0

Turn on the power supply using the orange on/off switch. An animated OAR logo
will be displayed for a few seconds. Once the animation has finished, depress the
control knob once to clear the logo.
There are two main operation modes of the QMF200, scan mode and filter mode.
Scan mode is used to establish the mass distribution of clusters emerging from the
cluster source; filter mode is used to select the desired portion of this mass
distribution for deposition onto the sample.
Filter Mode
The filter mode screen will be displayed as shown in figure 5 after the logo screen is
cleared on first start-up.
Remote / Local control mode
status indicator

Figure 5. The power supply display panel when in filter mode

The filter mode screen also doubles as a set-up screen for setting up all the
parameters prior to scanning. In order to change a parameter, depress the control
knob so that the pop-up menu is shown on the screen (figure 6). Select the desired
parameter from the menu by rotating the knob and depress the control knob again.
The control knob may now be rotated in order to control that parameter. The
parameter which is currently being controlled is denoted in the filter mode screen
by an arrow > on the left hand side.

Pop-up menu box

Figure 6. The power supply display showing the menu

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Quadrupole Mass Filter QMF200
Version: 3.0

Some items in the pop-up menu will launch a sub-menu, these items are shown
between two arrows < and >. The menu items are described as follows:

X deflection: Sets the voltage on the X axis deflection plates at the

quadrupole exit between -100 and +100 V. This voltage is used to deflect
the charged clusters (which have been mass filtered) away from the neutral
clusters which are not affected by the mass filter. In order to ensure that
only the mass filtered beam is deposited onto the sample, the sample
should be placed off axis and the deflection voltage used to deflect the
charged clusters onto the sample. The voltage required will be determined
by the sample position and size.

Y deflection: As above but for the plates in the Y axis deflection plates

Note: If desired, one of the X or Y axis deflection voltages may be attached to

the focus electrode instead and be used to focus the cluster beam. See
Electrical connections in section 3.

Frequency: Adjusts the frequency of the AC voltage (V) applied to the

quadrupole rods between 3 and 100 kHz.

V: Adjusts the amplitude of the AC voltage applied to the quadrupole rods

between 0 and 250V. As this value is adjusted, the displayed value of U
(the DC voltage bias applied to the rods) will be observed to change
according to the resolution which is set. The displayed mass will also
change, so it can be seen that by adjusting V the selected mass for the filter
mode is changed (equation 1).

Resolution: Adjusts the cluster mass band passing through the

quadrupole for a given selected mass. The value is adjusted between 2%
and 100% M/M. This equates to a U/V value between 0.165 and 0.042
respectively according to equation 2 on page 4. Note that when a low
percentage value is selected, the flux of nanoclusters passing through the
filter is correspondingly reduced.

<Factor k>: Mass Calibration Factor This is the correction factor

used in equation 1 (on page 4). It can have a value between 0.5 and 2 and is
used by the processor in the supply to calculate the cluster mass. It should
be used when calibrating the cluster mass with other characterisation
techniques such as TEM or AFM. The default value for this is 1.0.

<Display>: This menu displays the following options:

-

Filter mode: Change the display mode to filter mode (this option
should be used to enter the filter mode when the display is in scan
mode or cluster source mode)

Scan mode: Change the display mode to scan mode

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Quadrupole Mass Filter QMF200
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Cluster Source Change the display mode to show Cluster source

parameters

<Adjust display> :This menu displays the following options



Invert display: If this option is selected everything on the

screen is displayed as a negative image. Everything black
becomes white and vice versa. This may make the display
easier to see under certain light conditions.

<Adjust contrast>: Adjust the contrast of the display to

optimize it for the best viewing under the ambient light
conditions.

<Remote>:
-

Remote ON: Switches the power supply to remote control mode

so that all parameters are controlled from the QUVI2 software on
the PC. See section 5 for further information. The software must
be running and the power supply connected to the PC via the
ReBus200 interface box before this option is selected. Any
parameter settings for f, V, resolution, X and Y from the power
supply front panel will be disregarded in this mode.

Remote OFF: Will enable control from the power supply front
panel. Any parameter settings for f, V, resolution, X and Y from
the PC software will be disregarded in this mode.

The current remote / local status is shown by the status indicator in

the top right of the screen (figure 5). No remote is displayed if
remote control is selected but the software is not running or the PC is
not connected.

<Outputs>:
-

Ouputs ON: Switches on the output voltages to the quadrupole

for V,U, f, X and Y.

Outputs OFF: Switches off the output voltages to the

quadrupole.

The current status of the outputs is shown by the indicator in the top
left of the screen as either O/Ps: OFF or O/Ps: ON.
!WARNING!
Do not forget to switch on the quadrupole outputs
before attempting to make a scan!

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Quadrupole Mass Filter QMF200
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<Ion Meter>:
-

<Ion Polarity>:


Positive ions: Changes the polarity of the Y axis in scan

mode to positive.

Negative ions: Changes the polarity of the ion current (Y

axis) in scan mode to negative.

Note: the display in scan mode only shows one polarity of ions
at a time. If nothing can be seen on the screen, it may be that
the current is the opposite polarity from the one selected.
-

<Range>:


Full scale 2 nA: Changes the scale of the Y axis to a 2 nA

or -2 nA maximum depending on the ion polarity
selected. This option is useful when the ion current level is
low and mass spectrum cannot easily be seen on the
screen.

Full scale 20 nA: Changes the scale of the Y axis to a 20

nA or -20 nA maximum depending on the ion polarity
selected.

<Bias Voltage>:
This feature is used to apply a bias voltage to the ion collector
plate. This can be used to extract more ions from the beam for
current measurement when the measured current is low.


Zero bias: No bias voltage is applied to the collector if

this option is selected.

Negative bias: A bias voltage of -12V is applied to the

collector to extract more positively charged cluster ions
from the beam.

Positive bias: A bias voltage of +12V is applied to the

collector to extract more negatively charged cluster ions
from the beam.

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Quadrupole Mass Filter QMF200
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Scan Mode
The scan mode allows a mass spectrum of the clusters from the NC200 source to
be acquired. To access the scan mode go to the <Display> menu as described
above and select Scan mode. The scan mode screen layout is shown in figure 7.
Resolution

Ion current meter input

status indicator

Frequency of AC
voltage on quadrupole rods
Output status
indicator
(ON or OFF)
Y axis: Ion
current (nA)

Scan status
indicator
(STOP or PLOT)
Current value
of AC voltage
on rods (V)

Plotting area
X axis: AC voltage (V)

Figure 7: SCAN MODE page layout

In the scan mode all the quadrupole output parameters are also displayed, however
to change their values, the user must revert to the filter mode screen. In scan mode
some of the menu items for parameter control are replaced with new ones for
controlling the scanning process (figure 8). The voltage is shown along the X-axis
and the cluster ion current is shown along the Y axis. The plot parameters can be
selected from the new items in the menu as described below.

Pop-up menu
Figure 8: Menu in scan mode

Stop Scan: Will stop a scan currently in progress. The current scanning
status is shown on the right hand side of the screen (figure 7). Stop scan
will change the displayed status from PLOT to STOP. Any displayed
spectra will be cleared from the screen when this option is selected.

Start Scan: Will start a scan. The AC voltage (V) will then be scanned and
the ion current value plotted on the screen. To stop the plot at any time,
select stop scan from the menu. The scanning process will continue until

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Quadrupole Mass Filter QMF200
Version: 3.0

stop scan is selected, with multiple spectra being superimposed onto each
other.

<Start Point>: Sets the start voltage for the scan.

<Stop point>: Sets the stop voltage for the scan.

<Range>: Sets the range of voltages on the X axis which are displayed.
This does not have any effect on the voltage range actually being scanned.
To change this the start point and stop point options should be used.

<Factor k>: Mass Calibration Factor (see Filter mode fro description)

<Display>: (see Filter mode fro description)

<Ion Meter>: (see Filter mode fro description)

Cluster source Mode

The cluster source mode allows access to the mass/flow controllers and the
aggregation length, motor controls on the NCU200 cluster source.. To access the
Cluster Source mode go to the <Display> menu as described above and select
Cluster Source mode. The Cluster source mode screen layout is shown in figure 9.
Resolution

Ion current meter input

status indicator

Frequency of AC
voltage on quadrupole rods
Output status
indicator
(ON or OFF)
Y axis: Ion
current (nA)

Scan status
indicator
(STOP or PLOT)
Current value
of AC voltage
on rods (V)

Plotting area
X axis: AC voltage (V)

Figure 9: CLUSTER SOURCE MODE page layout

In cluster source mode the NCU 200 input gas mass/flow controllers & motorized
aggregation length parameters are displayed. To change their values, the user must
enter the appropriate menu. change the setpoint, then turn the control on or off..
The cluster source mode display shows the setpoints and actual readings for both
process gasses and the motorized Z-shift aggregation length (figure 10).
The menu options are as described below.

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Quadrupole Mass Filter QMF200
Version: 3.0

Figure 10: Menus in Cluster mode

<Argon>: This is the NCU200 cluster source main process gas control.
Use the knob to select the required the mass/flow setting on the slider
scale.( figure 10) Pressing the knob for the first will select the desired
value. The arrow should now disappear and the knob can be turned to
select the valve ON or OFF actions, pressing the knob for the second
time will activate your selection and return to the cluster source mode
display.

<Helium>: This is the NCU200 cluster source secondary process gas

control. Use the knob to select the required the mass/flow setting on the
slider scale. Pressing the knob for the first will select the desired value. The
arrow should now disappear and the knob can be turned to select the
valve ON or OFF actions, pressing the knob for the second time will
activate your selection and return to the cluster source mode display.

<Z-Shift>: Aggregation length Adjust. Use the knob to select the

required the aggregation length on the slider scale. Pressing the knob for
the first will select the desired value. The arrow should now disappear and
the knob can be turned to select the motor ON or OFF actions, pressing
the knob for the second time will activate your selection and return to the
cluster source mode display.

>Back< returns to cluster source mode display

<Display>: ( see filter mode fro description)

<Remote>: ( see filter mode fro description)

Other Information
Turning the power supply off First deactivate remote mode if engaged
and close down the PC software (QUVI2). Turn off the outputs using the
menus and turn the power supply off using the orange switch on the front
panel.

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Quadrupole Mass Filter QMF200
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Notes on Operating the QMF200 with the

NC200U Nanocluster Source
Acquiring a Mass Spectrum
1. Turn on the NC200U source as described in the separate NC200 manual.
2. Turn on the QMF200 power supply unit.
3. Monitor the ion current of the cluster beam with the outputs turned off.
The current will vary as the source warms up and it will take a few minutes
to equilibrate.
4. Vary the cluster source parameters to achieve an ion current of the order
of >0.1nA. (positive or negative).
NOTE: A bias can also be applied to the quadrupole ion collection aperture
plate. This will draw some of the ions out of the beam that passes through the
aperture and lead to an increase in the detectable ion current. The collector
plate bias value is set in the ion meter menu as described above.
5. With an ion current of >0.1nA (positive or negative) switch on the
outputs. Allow the power supply a few minutes to warm up.
6. Set V to around 150V and optimise the ion current by varying the
frequency. The frequency is used to set the mass range covered by a scan
from 1-250V (equation 1). The lower the frequency, the larger the mass
range. If the ion current exceeds the maximum value increase the
resolution (U/V), or increase the ion current range from 2nA to 20nA.
Note the maximum value of the ion current.
7. Once a suitable frequency has been determined reduce V to zero and enter
the scan mode.
8. In scan mode select the polarity of the clusters according to the previously
observed ion current.
9. Take a scan of the clusters. If the full spectrum does not fall within the
screen then decrease the frequency. This will increase the mass range over
which the spectrum is taken (see equation 1).
10. Adjust the source parameters and observe the shifts in the spectra for
various source conditions (refer to the test data for examples).

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Quadrupole Mass Filter QMF200
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Mass-Selecting Clusters
1. Once a mass spectrum of the desired cluster size has been achieved switch
to filter mode.
2. Go to the desired cluster mass by varying V.
3. Adjust the resolution (U/V) as required, whilst monitoring the ion current.
Note: The nominal current should be higher than 1nA in order to deposit a
fraction of a monolayer (ML) in a reasonable amount of time (as a rough guide
1nA corresponds to ~10% of a ML in an hour).
4. If using the collector bias, switch this off to allow all ionised clusters to
pass through the aperture.
5. Apply the required voltage to the beam steering plates and expose the
substrate (off-axis) to the beam.
Note: The required voltage used in steering the clusters will depend on the cluster
size and the polarity. The deposited beam will not result in two separate spots (i.e
the neutrals and the ionised clusters) but a broadening of the beam. As an example
for ~6nm diameter clusters at distance of 100mm the neutral beam diameter is
~18mm. With a +10V steering voltage applied the beam broadens on both sides
(due to positive and negative clusters) to a diameter of 32mm. therefore putting the
sample off-axis by 10mm will result in the deposition of the mass-selected ionised
clusters.
Frequency Effects
At lower frequencies there is a drop in the overall transmission of the quadrupole
due to fringe field effects. Using higher frequencies will give a larger ion current
also give the highest degree of accuracy for mass peak measurement. In addition at
low values of the resolution (U/V) there may be shifts in the spectra peak positions
for different frequencies. This can be overcome by winding the resolution up to
the maximum achievable.

!WARNING!
When high frequency is used (higher than 90 kHz), do
not operate the power supply more than one hour
continuously.

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Using the QMF200 to Focus Cluster Ions

The QMF200 can be used to focus the ionised clusters along its axis and can
improve the deposition rate at the sample. In this case the resolution must be set at
100% to give the best deposition rate.

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Quadrupole Mass Filter QMF200

Section

Version: 3.0

QUVI-2 Software Control Overview

The QUVI-2 control software package is designed to be used solely with the
Oxford Applied Research QMF200 Quadrupole Mass Filter. The software allows
complete remote control and monitoring of the instrument.

Figure 11: QUVI control window

The software is designed to run on IBM compatible computers with the following
minimum specification:

750 MHz processor speed

64 MB RAM

Windows 98SE or later (ME / 2000 / XP)

Free USB port

Display resolution 1024x768 pixels or more
All software was written in Visual Basic 6.0 and, as such, a number of VB run-time
libraries are required, these will be installed on running the setup program.
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Installation
IMPORTANT: Before connecting the anything to the computer, the
software should be installed first.
1) First make sure that all other programs are closed down before installing
the software. Insert the OAR QUVI2 CD into your CD-ROM drive.
2) If the contents of the CD are not automatically displayed, you should
double click on My computer on the Windows Desktop and then
double click on your CD-ROM drive.
3) First of all the driver for the ReBus200 USB remote interface should be
installed. Run the executable file called SUB-20. Follow the instructions
on the screen and accept all the default options.
4) Second the QUVI-2 software itself should be installed. This can be found
in the OAR folder on the CD and can be installed by running the
setup.exe installation program.
5) Connect the cable with the 5 pin DIN connectors at both ends to the
ReBus200 control box (connection labeled I2C Bus) and to the QMF200
power supply (connection labeled remote). Ensure that the screw fitting
is tightened at both ends.
6) Now connect the USB cable from the connector labeled USB on the
ReBus200 controller to a spare USB port on your PC. This can be done
while the PC is switched on.
7) As soon as the ReBus200 is connected to the USB port, the found new
hardware wizard should appear with a message saying the new hardware
(I2C bridge U2C-12 or U2C-12 USB-I2C/SPI/GPIO Interface
Adapter) has been found. You should select not to use Windows Update
to search for software updates and select to install the software
automatically. You may get a message saying that the software has not
passed the Windows Logo testing to verify its compatibility with your
version of Windows. You should select to continue anyway at this point.
The software is now installed and ready to use.

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Quadrupole Mass Filter QMF200
Version: 3.0

Operation of the QMF200 using software control

To enter software control mode, follow these steps:
1) Run the QUVI-2 program. A shortcut to this will be found in the start
menu under OAR QMF200 and QUVI-2 assuming that the steps in
the installation section have been followed.
2) Turn on the power supply.
3) Using the menu system as described in section 4, switch the power
supply into remote control mode.
4) The remote local status indicator in the bottom left of the software
screen should now indicate "Control: QUVI Software". And the status
indicator in the top right of the QMF200 power supply display should
indicate REMOTE.
5) Switch on the quadrupole outputs using the button labeled in figure 9.
The writing on the button change from red to green to indicate outputs
have been switched on, and the status indicator at the bottom of the
software screen should indicate "Outputs: ON" if this message has been
received by the power supply. Additionally the indicator on the power
supply screen will also show this.
Quadrupole Parameters
As for front panel control, the following parameters can be set up or monitored.
Parameters are displayed twice, once in green for the set value and once in red for
the actual value. If the set and actual values differ, check that remote mode is
engaged and that the outputs are switched on. To enter a new set-point, use the up
and down arrows next to each parameter, alternatively simply edit the setpoint by
typing it in and press return to set the new value.

Frequency This can be set from 3-100kHz. The actual frequency value
is displayed in red and the mass range (in a.m.u.) over which the scan will
take place is shown below the frequency display.

Resolution This can be set from 100% to 2%. The equivalent U/V
value is also displayed below. If the show resolution button is depressed
the mass range for the currently selected voltage is shown in the grey area
of the scan window. This is useful when using the QMF200 as a filter, so
that the mass range

Voltage This can be set from 0-250V for the purposes of mass filtering.
The cluster parameters for the voltage and frequency selected are shown in

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Quadrupole Mass Filter QMF200
Version: 3.0

the top half of the cluster information panel. Note that the correct material
must be selected in order to display the correct values for diameter and
number of atoms (n).
Cluster source Parameters
As for front panel control, the following parameters can be set up or monitored.
Parameters are displayed twice, once in green for the set value and once in red for
the actual value. If the set and actual values differ, check that remote mode is
engaged and that the outputs are switched on. (the maganetron voltage & current
parameters may differ as the power supply switches between constant voltage &
constant current mode ) To enter a new set-point, use the up and down arrows
next to each parameter, alternatively simply edit the setpoint by typing it in and
press return to set the new value.

Argon Flow This can be set from 0-100 sccm. The actual mass flow
value is displayed in red and the Valve on/off condition is shown on a
green/red indicator next to the flow on/off button.

Helium Flow This can be set from 0-100 sccm. The actual mass flow
value is displayed in red and the Valve on/off condition is shown on a
green/red indicator next to the flow on/off button.

Agg. Position (Z shift) This can be set from 0 to 100mm. The

equivalent U/V value is also displayed below. If the show resolution
button is depressed the mass range for the currently selected voltage is
shown in the grey area of the scan window. This is useful when using the
QMF200 as a filter, so that the mass range

Mag. Voltage This can be set from 0-500V for the purposes of
generating a plasma in the magnetron. The voltage setpoint (limit) is shown
in green and the actual monitored value is shown in red. Note when a
plasma is obtained, the monitored voltage may fall below the setpoint if the
magnetron current is equal the setpoint limit. The voltage output can be
turned on or off using the button below the monitored value.

Mag. Current The setpoint current limit can be adjusted from 0 1.2A.
Set values are shown in green and actual values in red.

Mag. Power this monitor of power input to the magnetron is calculated

from the voltage & current monitors.
Note: The Magnetron power supply parameters are remotely sent via an
RS232 link, directly from the PC com port (or USB com port) .The
magnetron power supply is not controlled via the QMF200 PSU. If the
Magnetron power supply does not respond to remote commands, please
check Com port settings under the tools menu. The correct settings
will not take effect until the software program is closed and
restarted..
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Quadrupole Mass Filter QMF200
Version: 3.0

Scan Parameters
The following scan parameters can be set up:

Scan from: The starting value of V for the scan

Scan to: The ending value of V for the scan

The mass value equivalent to each of these voltages is shown below.

Acquiring a Scan
Once the parameters above have been set a scan can be taken:

Scan - This will start a mass spectrum over the range set. The data
from the scan will be kept in one of the 5 memory slots selected in the
use section on the right hand side of the window. This data can be saved
to a file for later use.

Scan cont This will continue scanning and show each scan on the
screen. A limited number of scans will be saved in the memory slot
selected in the use section on the right hand side of the window. Once
the memory slot is full the data is erased and scanning process starts again.
This cycle will be repeated indefinitely until the user presses the stop
button.

Stop Stops the scan at any time.

Clear - This button will erase all data from the 5 memory slots and clear
the screen.

Scaling the data on the Screen

To fit the scan to the screen:

Scale Screen to Range by pressing the Scale Screen to Range button

under the frequency slider the spectrum is fitted to the mass range of the
frequency selected.

Offset Slider This positions the zero offset of the cluster ion current on
the screen.

Scale This expands the vertical scale of the cluster ion current.

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Quadrupole Mass Filter QMF200
Version: 3.0

This button will expand the screen so that it fits the spectrum
with the maximum and minimum observed values.

This button will expand the display to show the full range of
the quadrupole.

Mass/Diameter selection The spectrum can be either displayed as a

function of the mass or the diameter. Note that the diameter information is
only correct if the correct material has been selected.

Storing and Viewing Multiple Spectra

A total of 5 spectra can be stored and viewed. To use a spectrum select one of the
use option buttons. If a spectrum is now taken (or loaded from a file) the data is
temporarily stored to this number and will overwrite any previous spectrum. To
view the spectrum on the display screen select the show check box of the desired
spectrum. Up to 5 spectra can be viewed on the screen at once.

Info The Info button will show the information about the spectrum
selected. Additional information about the cluster source parameters can
also be added by editing the boxes with red text. These cluster source
parameters may then be set as the default for future spectra so that they
need not be re-entered for every spectrum.

Save To save a spectrum ensure that the use option button of the
spectrum is selected. Enter the file name and save. Note : the data is stored
as a type .qu2. This is a comma delimited ASCII data file which can be
imported into Notepad, Excel or data analysis programs.

Load - To load a spectrum first ensure that the data stored under the
use number is saved. Only .qu2 type files can be loaded up.

Other Features
Material Selection To load a new material select the Load New
button. Select an element from the periodic table provided by clicking on
that element. Data on the density and atomic mass will be loaded from
memory. Alternatively for non-elemental or compound targets, the
material name, density and unit mass may be entered manually. Selecting
the correct material is essential for the diameter calculation in the software.
The material information is saved when the software is closed down and
restarted.

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Quadrupole Mass Filter QMF200
Version: 3.0

Calibration factor The calibration factor (k in equation 1) can be set

using the box below the material data.

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Quadrupole Mass Filter QMF200

Section

Version: 2.0

Maintenance
The performance of the QMF200 may deteriorate over time due to a build up of
clusters on the apertures and quadrupole rods.

Quadrupole removal and cleaning

1. Remove the 2 NW35CF BNC feedthrough flanges and disconnect the
connections from the vacuum side. Note or mark the connectors X,Y etc.
2. Carefully undo the 8 M3 countersunk screws which hold the assembly
within the tubulation. Support the quadrupole and remove it from the Tpiece assembly.
3. Remove the outer quadrupole shield. 1 x M3 radial screw and 1 x M3 nut
at the collector plate end and put the quadrupole on its side. The
quadrupole base can now be removed and replaced if necessary.

Figure 10: Un-mounted quadrupole

4. . Take care when feeding the quadrupole connections through the hole in
the can.

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Quadrupole Mass Filter QMF200
Version: 3.0

5. Remove the quadrupole connecting cable from the pole by removing the
M3 cap head screw with an Allen key. Remove , clean and replace each rod
individually.
Note that the opposing poles of the quadrupole are electrically connected.

Figure 11: Pole connections

6. To remove the poles take out the screws which hold the poles against the
Macor blocks and slide the poles out. Note: The Macor blocks can be
easily chipped. Take care not to knock them hard with the poles.
7. The poles are best cleaned with, for example, isolproyl alcohol or acetone.
Try to avoid abrasive cleaners.
8. On re-assembly ensure that the poles are aligned and the correct electrical
connections are made.

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Quadrupole Mass Filter QMF200
Version: 3.0

Quadrupole Exit Apertures

The exit apertures may, after time, become blocked with clusters. The apertures
can easily be removed and cleaned by removing the 4 M3 nuts which secure them.
The inner plate is grounded. The second plate is isolated and used for the
collection of the cluster ions. The outer plate is also isolated and may be externally
grounded, or connected to a voltage supply for use as a focus electrode. Note the
position of these plates and the ceramics when disassembling.

Figure 12: Order of aperture plates (note old design and connectivity shown)

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Quadrupole Mass Filter QMF200
Version: 3.0

Figure 13: Electrical connectivity of apertures (current design)

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Quadrupole Mass Filter QMF200

Section

Version: 3.0

Specifications
Quadrupole Mass Filter
Mounting:
Poles diameter:
Poles length:
Total length:
Quadrupole first aperture:
Grounded outer inner aperture: 5mm
Ion collection plate aperture:
Grounded outer aperture:

in tubulation or T-piece.
25.4mm
25mm
285mm
13mm
4mm
5mm

Power Supply
General
Frequency range:
AC voltage range:
DC voltage range:
X and Y Steering voltage range:
Internal ammeter range:
External Input (if provided):
Mains:
Input mains voltage:
Protection:
Fuses:
Fused Externally:

3-100kHz
0-250V
0-50V
-100V to +100V
+/- 0.04 nA to +/- 20nA
Set up for Keithley 6485 picoammeter.
0 to +/- 1V (+1V= -10nA, -1V= +10nA)
Universal - 85-264 VAC 47-63Hz
VDE approved IEC320 input mains
filter
6.3AT @ 230V
10AT @ 110V

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Section

Version: 3.0

Please contact us directly at the address below:

Oxford Applied Research
Nursery Rd North Leigh Business Park
Witney Oxfordshire
OX29 6SN
United Kingdom
Telephone: (0)1993 880005
Fax: (0)1993 880060

http://www.oaresearch.co.uk

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