Surface

Analysis

Vacuum
Components

Surface
Analysis

Ion Source

IQE 10 and IQE 11

Manual

1.5

Computer
Technology

All rights reserved. No part of this manual may be reproduced

without the prior permission of SPECS GmbH.

Version 1.5 dated 15th December 2008.

SPECS GmbH - Surface Analysis

and Computer Technology
Voltastrasse 5
D-13355 Berlin, GERMANY
PHONE:+49 30 46 78 24 -0
FAX: +49 30 4 64 20 83
web-site:http://www.specs.de
e-mail: support@specs.de

IQE 10 and IQE 11

Chapter

T
1

I nt r o d uct i on

Qu i ck S t a r t

2.1

P re p a ra t i o n s .. . .. .. . .. .. . .. . .. .. . .. . .. .. . .. .. . .. . .. .. . .. . .. .. . .. .. . . 3

2.2

S w it c h i n g O n . . .. .. . .. .. . .. . .. .. . .. . .. .. . .. .. . .. . .. .. . .. . .. .. . .. .. . . 4

2.3

S w it c h i n g O ff . . .. .. . .. .. . .. . .. .. . .. . .. .. . .. .. . .. . .. .. . .. . .. .. . .. .. . . 4

D e s cr i p t i o n o f t h e U n i t
3.1

B a si c P ri n c i p le s o f O p e r a ti o n .. .. . .. .. . .. . .. .. . .. . .. .. . .. .. . . 7

3 .1 .1

Ion F or ma t io n . .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. . 7

3 .1 .2

Ion E x tr a ct io n . .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. . 8

System Operation

11

4.1

G e n e r a l .. . .. .. . .. . .. .. . .. .. . .. . .. .. . .. . .. .. . .. .. . .. . .. .. . .. . .. .. . .. .. 1 1

4.2

S e t u p f o r F i r s t U s e .. .. . .. . .. .. . .. . .. .. . .. .. . .. . .. .. . .. . .. .. . .. .. 1 1

4 .2 .1

Ini t ia l Che ck . .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. . 1 1

4 .2 .2

De ga ss i ng F il am ent an d S ou rc e .. .. .. .. .. .. .. .. .. .. .. .. .. . 1 1

4 .2 .2. 1
4 .2 .2. 2

4.3

IQE 10/11

Table of Contents

Ne w F ilam e nt / Fir st O pe r ate - Pr e par at io n . .. .. .. .. .. .. .. .. .. 12

D eg as . .. .. .. ... .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. 12

S y s t e m S t a r t u p .. .. . .. .. . .. . .. .. . .. . .. .. . .. .. . .. . .. .. . .. . .. .. . .. .. 1 2

4 .3 .1

S et up t he S ou rc e Pr e ss ur e .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. . 1 2

4 .3 .2

O pe ra t io n M od e . .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. . 1 4

4.4

I o n C u r re n t M e a s u re me n t . .. .. . .. . .. .. . .. .. . .. . .. .. . .. . .. .. . 1 4

4.5

Ti p s f o r B e tt e r O p e r a t io n . . .. .. . .. . .. .. . .. .. . .. . .. .. . .. . .. .. . 1 5

4 .5 .1

L i f et ime .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. .. .. .. .. . 1 5

4 .5 .2

S o ur ce P re s s ur e . .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. .. .. .. .. . 1 6

4. 5. 2. 1
4. 5. 2. 2

Op ti mal S ou rc e P r es sur e .. .. .. .. ... .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. 1 6

M ult ip lic ati on F act o rs (T ab le ) . ... .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. 1 7

M a i n t e na n c e / S e r v i c e

19

5.1

G e n e r a l . . .. .. . .. .. . .. . .. .. . .. .. . .. . .. .. . .. . .. .. . .. .. . .. . .. .. . .. . .. .. . 1 9

5.2

S p a r e p a r t s . .. .. . .. . .. .. . .. .. . .. . .. .. . .. . .. .. . .. .. . .. . .. .. . .. . .. .. . 1 9

5.3

F i la m e n t / A n o d e / C e r a m i c R e p la c e m e n t . .. .. . .. . .. .. . 1 9

IQE 10/11

Chapter

Introduction

The ion sources IQE 10/35 and IQE 11/35 are designed for vacuum sample cleaning for
XPS, UPS and AES.
Prior to sample analysis some form of sample preparation is usually necessary. For
routine work, surface cleaning by ion sputtering is normally employed. This requires
reliable and easy-to-handle ion sources such as the Ion Source IQE 10/35 and IQE 11/35.
The main features of the ion sources are:

a high ion current with Gaussian beam profile.

Positive ion species of all inert gases as He, Ar, Ne, Xe, Kr, N2 can be generated
as well as reactive ions by use of O2 or H2. For high stability beam currents the
atoms or molecules of the operating gas are ionized by collision with electrons,
which are generated by a hot filament.

The beam energy can be varied from 200 eV up to 5 keV and

Typical beam currents are in the range of less 1 pA up to 10 mA.
The ion source can be baked up to 250C.
The IQE 10/35 and IQE 11/35 are different with respect to the gas inlet to the ionization
area. The IQE 11/35 is mounted with a separate gas inlet flange (DN16CF) which goes
directly to the ionizer. In case of IQE 10/35 the gas has to reach to the ionizer of the IQE
10/35 by a leak valve somewhere in the system being used.
The Power Unit PU - IQE 11 is designed to supply the SPECS ion gun IQE 10 or IQE 11 or
other ion guns based on the same physical working principle. It supplies all voltages
necessary for operation of the ion gun. All operational parameters can be controlled
with the front panel keyboard and jog shuttle as well as via various remote interfaces.
(IEEE- and RS 232 - bus interface.)
Several sets of operational parameters and setup parameters can be stored and recalled.
The parameters are configurable to a wide range of different experimental conditions.

IQE 10/11

Introduction

Safety Instructions
Be f or e a ny el e ct r ic o r e le ct r on ic op er a t io ns p le a s e co ns ul t t he
S PE CS S a f et y In st r uc t ion s ma nu al an d f o ll ow i t c ar e f ul ly.

The power unit supplies high voltages to the ion source which are dangerous to life! You
should therefore respect the following, in order to avoid serious injury or death:

Check whether your main voltage is the same as adjusted at the main in socket
of the Power Unit (visible at the fuse box).

Use only original cables and connectors from SPECS. Pay attention that no cable
has physical defects. In case of doubt the cable has to be replaced by a original
SPECS cable.

Before switching on the Power Unit all plugs have to be connected to the
corresponding socket.

After switching off the Power Unit you have to wait at least one minute before
opening connections.

Replace cable or ion source only with the Power Unit switched off.
Never operate the Power Unit with opened cover.
If you use cable, ion sources or further equipment other than provided by
SPECS, you may lose your warranty. In case of doubt please contact the SPECS
service department.

Some tests which might have to be carried out according to this manual are dangerous.
At each such a point there is a warning label, such as:

Warning
T he f oll ow i ng t e s ts h av e t o be pe r f or me d a t con ne ct or s of t he
e le c tr on ic s no t pl ugg ed i nt o th e s our ce . H az ar do us vo lt a ge s a r e pr e se nt ,
t he r ef o re onl y tr a in e d, qu al if i e d p er s on ne l a re al l ow ed t o do t he job .
Ma k e me a s ur e me nt s o nl y w i th s p ec ia l ly in s ula t e d to ol s de s i gne d f or
vol t a ge s hi ghe r th an 5 kV.

IQE 10/11

Chapter

Quick Start

The power supply can be installed in a very easy and straightforward way allowing one
to quickly get results.
Nevertheless, taking full advantage of all the benefits which are supplied by the Power
Unit will take more time and requires a careful tuning of all parameters. This chapter is
intended for users with Standard Usage requirements, so that they can be using the
Power Unit as quickly as possible. It is recommended however, that all users of this
product are familiar with all of the features and functions of the Unit, which are
described in the later chapters of this manual.

2.1 Preparations
1. Mount the source to the vacuum system.
2. Set up Power Unit in a secure place preferable in a 19 inch rack.
3. Connect the ground connector to the other vacuum components or to the rack.
4. Connect and fix all cables:

Filament and ionization voltages (plug with 4 connectors)

Connect the HV bridge cable at the back of the Power Unit (no. 8 with no. 6
(see manual Power Unit PU 11).
5 . Che ck t ha t t he c on fi gu ra bl e i npu t v o lt a ge of t he Po w er Un it an d
th e bu il di ngs ma ins v ol t a ge a r e i de nt ic al !
6. Check the vacuum.

IQE 10/11

Quick Start

2 . 2 S w i t c h i ng O n
If during the following actions an error message appears, shut down the Power Unit
immediately. Try to determine the problem with the help of the Troubleshooting
chapter of the Power Unit manual or contact the SPECS service department.
1. Switch on the Power Unit. Wait a few seconds. The Power Unit initializes in
STANDBY mode.
2. Press the EMISSION key to check the filament. The filament currents will
regulate to 3 A.
3. All parameters are set to enable the first operation. If you want to verify them,
press the desired parameter name on the 0 to 9 keys. No physical changes to
the system will occur by doing so.
4. For first usage please see section 4.2 on page 11!
5. Press the OPERATE key. Wait until the emission regulation is stable. This is
indicated by a change from the BUSY status to OPERATE.
6. Open the leak valve to set the desired pressure. (The source pressure should be
in the range from 5 x 10-5 to 1.2 x10-4 mbar, see section System Startup on
page 12).
7. An ion current is now leaving the ion source having an energy of 5 keV. With a
suitable method to measure the ion current (Faraday cup, positive biased
conducting sample etc.) this can be verified.

2 . 3 S w i t c h i ng O f f
1. Press OPERATE. The OPERATE mode is exited to the STANDBY mode.
2. Close the gas valve.
3. Switch off the main switch.

IQE 10/11

Chapter

Description of the Unit

The complete IQE 10 or IQE 11 ion source package consists of the ion source hardware
and the power supply with control electronics, PU-IQE 11, model no. 10 995 200.
The IQE 11/35 or IQE 10/35 model no. 10 867 011 or 10 867 010, are shown in figure 1
(IQE10/35 is similar but without gas inlet flange DN16CF)

FIGURE 1

IQE 10/11

Schematic of Ion Source IQE 11/35

Description of the Unit

The complete unit is mounted on the DN 38 CF feedthrough flange. It consists of

ionizer assembly (source-to-sample distance configurable to requirements),

which includes:

the repeller housing

internal anode cage and
the filament ring (cathode)
and for the IQE 11/35 an additional:

gas inlet flange

An optional part is:

a gas inlet system, SPECS Cat.No. 10 869 202 or 10 869 200 (three gases) with
leak valve, SPECS Cat.No. 10 087 395
To mount the ion source the DN 38 CF flange has to be connected to a suitable port on
the UHV system. Standard distance from the mounting flange to the sample is 186 mm.
Other distances are available from SPECS upon request however.
Connect the gas inlet system via a high precision DN 16 CF leak valve to the DN 16 CF gas
inlet flange on the ionization section housing.
For servicing (see section 5) the 4-pin feedthrough base flange has to be opened and the
complete source can removed. This allows an easy replacement of the filament or
ceramics.
All voltages and currents, which are necessary to operate the ion source, are generated
and controlled by the PU IQE 11 supply, as:

Filament current with emission control

Anode voltage
Reflector (Repeller) voltage
A general layout and the electrical wiring is shown in the Power Unit manual.

IQE 10/11

Basic Principles of Operation

3 . 1 B a s i c P r i nc i p l e s o f O p e r a t i o n
The voltages and currents for operation of the ion source pass the base flange by the
ceramic isolated feedthroughs, which are specified to hold 7 kV against ground
potential. The respective pin diagram is sketched in figure 2.

1,3:
2:
4:

Cathode
Repeller
Anode

View from air side to the flange

FIGURE 2

Pin Arrangement on the Source Base Flange

3 . 1 . 1 Io n F o r m at i o n
The neutral gas molecules and atoms are ionized by electron collision inside the
ionization assembly (refer to figure 3 on page 7).

Repeller
Anode Cage
Filament

Schematic of the Ionizer

FIGURE 3

IQE 10/11

Ionization Assembly

Description of the Unit

A grid cylinder (anode) is mounted inside a cylindrical housing (repeller). An shaped iridium ribbon filament is mounted around the anode a fixed distance. Electrons
emitted from the filament are accelerated to the anode and enter the inner grid cylinder
with an energy of about 100 eV. Here they may hit the gas particles, ionize them and
form an electron-ion plasma. The potential between ionization volume and sample
accelerates the ions out of the plasma area and forms the ion beam.
An electron which has been not affected by a collision leaves the anode cage and is
reflected by the potential on the reflector cylinder, and accelerated again to the anode
(sample). The procedure is repeated until the electron is lost by an ionization process.
This unique design allows an increase of the collision efficiency only by means of
electrostatic forces, so that additional magnetic fields are not needed.
The total yield Y of the produced positive ions I tot can be calculated by
I tot
1
Y = ------------------------------ [ mbar ]
I em p s ource

(EQ 1)

with the emission current I em and t he p r es s ur e in t h e di s ch ar ge a r ea of t he ion

s ou rc e psource. Typical operating values of the sources:
Iem =

10 mA,

Itot =

10 A, and

psource =

2 x10-4 mbar Argon

the calculated yield of the ionization efficiency is 5 mbar-1.

P le a s e not e t ha t t h e so ur ce p r es s ur e i s t he pr e s s ur e in t he d is c ha rg e a re a
of th e io ni z er as s e mbl y, no t ne ce s s ar y eq ua l th e ma i n c ha mb er p r es s ur e
( s e e section 3.1.2 ) !

3 . 1 . 2 Io n E x t r a c t i o n
The ions in the discharge plasma are affected by the potential difference between the
formation section and the sample.
The repeller (housing) works in the case of the IQE 11/35 as a kind of a differential
pumping aperture. It separates the discharge area from the UHV system.
The vacuum pressure in the discharge section has a strong influence on the total ion
current (see equation 1). Therefore, the measurement and the control of the gas
pressure in the ion source is strongly recommended for accurate reproducibility. The
pressure psource in the source can be estimated, if the pumping speed of the pumping
system Seff and the pressure in the analysis chamber pa is known.
p s ource C 0 = p a S eff

(EQ 2)

IQE 10/11

Basic Principles of Operation

with:
C0:

Conductivity of the repeller hole

This results in a pressure drop between the ionization volume and the chamber of about
one order of magnitude for the IQE 11/35. Nevertheless monitoring the chamber
pressure (as listed in the Product Performance Data Sheet for the source at different
energies) is indicative of the source pressure for IQE 10/35 and IQE 11/35. Therefore the
chamber pressure is a good value on which to base the selection of the ion current.
For more informations please refer to Vacuum Technology, its Foundations, Formulae
and Tables, Leybold AG (1987).

IQE 10/11

Description of the Unit

10

IQE 10/11

Chapter

System Operation

4.1 General
After pump down, a system bakeout is recommended for at least 12 hours at 200 C with
all cables removed.
The procedure should not be started before the pressure in the source is less than 10-5
mbar.
A gauge is useful to monitor the source pressure during bakeout and operation.
The bakeout should clean the internal surfaces of the source as well as parts of the
differential pumping and gas inlet system.
If a gas bottle is already fit to the inlet capillary, the bottle valve should be in closed
position, while the precision leak valve should be open. This ensures that any
contaminants from the gas inlet section, which drastically affect the lifetime of the ion
source during later operation, are removed.
After bakeout the system should be allowed to cool down. The gas inlet leak valve can
be closed and the bottle valve opened. The connecting cables to the power supply can
be plugged into the respective feedthroughs. The ion source is ready for operation.

4 . 2 S e t u p f o r Fi r s t U se
4 . 2 . 1 In i t i a l C h ec k
Make sure that the pressure in the source is better 10-5 mbar (better 10-8 mbar in the
analysis chamber). Switch on the power supply.

4 . 2 . 2 De g as s i ng F i l a m e n t an d So u r c e
Each source is tested and specified by SPECS. Nevertheless, be f or e t he f ir s t us a ge
(include DEGAS also), after installation, or before the use of a new cathode, the filament

IQE 10/11

11

System Operation

should be prepared as described in section 4.2.2.1 . Af t e r e v er y s y s t e m v e nt i ng the

ion source should be baked with your system, s e con d operated in low voltage low
current mode for 10 min and t he n internally cleaned by using the DEGAS function from
the power supply.

4 . 2 . 2 . 1 N e w F i la m e n t / F ir s t O pe r a t e - P r e pa r a t i o n
To prepare the filament for first use and to stabilize the coating for a long lifetime wait
in STANDBY mode (is set after turning on the supply) until the pressure is stable. Set
ENERGY to 500 eV press OPERATE and increase the EMISSION CURRENT slowly until an
increase of pressure in the source is seen.
Note:

This is only possible with the PU-IQE 11 power supply (for detailed instructions
please read the power supply manual).
Using the model PS-IQE 10 choose less than 1 keV for energy and switch to
OPERATE.

This procedure will sputter with ions from residual gas and gas from the
thermal wall-desorption. The pressure in the source with respect to the
chamber will increase.
Allow a pressure of 10-3 mbar in the source. Stop at a setting of 0.1 mA. Wait until the
pressure has dropped down below 10-4 mbar. While monitoring the pressure, increase
the ENERGY to a value up to 2 keV and increase the EMISSION CURRENT slowly up to
10 mA. Stop (STANDBY) if the pressure no longer increases and degas the source (see
Degas in 4.2.2.2 ).

4 . 2 . 2 . 2 D e ga s
Before operation, the ion source should be baked internally by using the DEGAS
function from the power supply. It is recommended to wait until the source pressure is
better 10-6 mbar. After activation of the DEGAS mode the emission is automatically
increased, which can be observed by the emission current and the ion gauge readout.
The pressure in the source will raise up to the 10-3 mbar range and drop after some time.
The DEGAS mode is switched off automatically after about 3 min and the controller
changes to STANDBY mode. Depending on the pressure increase it may be useful to
repeat the degas routine one or two more times.
In the STANDBY mode, the voltages for energy and lenses are set back to zero, while the
filament remains under current to avoid recontamination.

4.3 System Startup

4 . 3 . 1 Se t u p t h e S ou r ce P r es s u re
After cleaning the ion source under vacuum conditions (see section 4.2.2 ), normal
operation can be started by opening the gas inlet leak valve.

12

IQE 10/11

System Startup

Open the gas inlet valve slowly. Adjust the source pressure1 to about 5 x10-4 mbar (see
Multiplication Factors (Table) on page 17). The source pressure in the case of the
IQE10/35 is nearly the same as measured with a vacuum gauge in the chamber, but
about one order of magnitude higher than the chamber pressure for the IQE 11/35 with
a direct gas inlet. The closed ionizer volume for IQE 11/35 is only pumped through the
exit hole of the source.
The adjustment via the pressure of the analysis chamber is a simple method.
Nevertheless the following procedure for obtaining the optimal source pressure, which
has been proven to be very useful for testing the ion source, is recommended:
By a simple mathematical operation it can be shown, that psource~ Itot~ Ienergy,
if the emission current is constant. Itot can not be measured directly. But, the leak current
between the energy HV module and ground, I e n e r g y can be metered easily by the
power supply and ca n be us e d a s a s ig na l, wh ic h is i ndi ca t ive of the so ur ce
p re s s ur e.
Ienergy is a sum of leak currents, which are made up of the leaks inside the electronics,
the insulating ceramics inside the source, and by the losses due to the ion formation of
the gas molecules.
To select Ienergy

press the ENERGY button at the PU IQE 11 power supply and read the current
in the middle of the display

on the analog power supply model PS-IQE 10 model no. 10867910 this
procedure is not available.
During factory tests, the current Ienergy is listed for various settings of the emission
current for each individual ion source at the optimum pressure point. A standard factory
setting for energy and emission is stored permanently in the power supply memory
(press RECALL 0at PU IQE 11 power supply).
A t y p ic al v a l ue f or I energy i s a bou t 4 0 mA a t a so ur ce p r es s ur e o f a bou t
1 0 -4 mba r 1
using the standard setting (RECALL 0 for PU IQE 11)
Energy:

5 keV,

Emission Current:

10 mA.

P l ea s e n ot e: In the test documents the Ienergy meter readout is listed with the initial
leak currents. Please take into account that the leak current will increase with operating
time of the source due to ceramics becoming coated and therefore conductive.
Therefore the leak currents have to be checked from time to time and to be added to
the stated Ienergy for the optimal pressure.

1. Please note, that the source pressure psource is the pressure in the discharge area of
the ionizer assembly, not necessary equal the main chamber pressure! (see section 3.1.1 )

IQE 10/11

13

System Operation

4.3.2 Op er ation Mod e

1. Switch on the Power Unit. Wait a few seconds. The Power Unit initializes in the
STANDBY mode.
2. Press the EMISSION key to check the filament. The filament currents will
regulate to 3 A.
3. All parameters are set to enable the first usage. If you want to check them press
the parameter name corresponding to the key 0 to 9. This only switches the
displayed parameter without changing it.
4. For first operation please see section 4.2 on page 11!
5. S el e ct a s e t t ing from the factory presets, or use your own parameters (i.e.
energy, emission current).
6. Press the OPERATE key. Wait until the emission regulation is stable. This is
indicated by a change from the BUSY status to OPERATE.
7. Open the leak valve to set the desired pressure.
(see Setup the Source Pressure on page 12 The source pressure should be in
the range from 5 x 10-5 to 1.2 x 10-4 mbar, see section System Startup on
page 12).
An ion current should now be leaving the ion source with the desired energy. Using a
suitable method to measure the ion current (Faraday cup, positive biased conducting
sample etc.) this can be verified.
To create your own parameters, which may be needed, the following set is
recommended for a successful start:
Ion Energy:

3000 eV

Emission Current:

1 mA

Source pressure1:

about 10-4 mbar

G o t o t h e O PE RAT E mode; all parameters such as emission current and the

voltages are active.
With these settings a sample current should be metered.

4 . 4 I o n C ur r e nt M e a su r e m e nt
For ion current measurement and optimization a Faraday cup or a sample can be used,
which is electrically isolated from ground. To avoid incorrect current readouts by the
emission of secondary electrons the surface has to be put on a positive potential (see
figure 4 and figure 5).
As described above, the ion current on a sample depends on

1. Please note that the source pressure is the pressure in the discharge area of the
ionizer assembly, which is not necessary equal the chamber pressure! (see section 3.1.1 )

14

IQE 10/11

Tips for Better Operation

the emission current,

the gas pressure in the source,
the gas species, and
the ion energy.

During factory testing, the general circuit layout of figure 4 is used to optimize the total
ion beam current and the test circuit of figure 5 for the beam profile. For suppression of
the secondary electrons a potential between 9 V (Inner Shield) and 90 V (Outer Shield) is
connected to the outer shield of the Faraday cup.

Faraday Cup
Inner Shield

+
-

I+

Outer Shield

FIGURE 4

90 V
pA- Meter

Test Circuit for Total Beam Current Measurement

Faraday Cup
Outer Shield

+
-

I+

Inner Shield

A
FIGURE 5

9V
pA- Meter

Test Circuit for Beam Profile Measurement

4 . 5 T i ps f o r B e t t e r O p e r a t i o n
4 . 5 . 1 Li f et i m e
The operating lifetime of the source is limited by the degradation of the cathode and
the ceramic insulators inside the source. This degradation is very much influenced by the
operating conditions of the source. In particular, the gas pressure inside the source
(source pressure1) must not exceed certain values.

1. see section 3.1.1

IQE 10/11

15

System Operation

The source pressure is made up of the partial pressure of the residual gases and of the
pressure of the operating gas. If the source pressure is too high the cathode will be
contaminated and the insulating parts (one ceramic set below the anode cage and the
glass balls at the cathode) will be coated with a conductive layer. The coating is caused
by the residual gas. To prevent this from happening, the source has to be baked after
system venting, be properly pumped during standstill, and degassed before being put
into operation.
If the pressure of the operating gas is much too high, a gas discharge will occur in the
source contaminating the source within a short period of time.
The high voltage supply of the source is current-limited to non-hazardous values (200
mA). If degraded insulators are causing currents near the limit value the source has to be
cleaned (see section 5.3 ).

4 .5.2 S ou r ce P r e ss u r e 1
The source pressure determines the ion beam intensity and influences the shape of the
ion beam. The heat transfer in the source (the gas cools the cathode) and the minimum
obtainable pressure inside the vacuum chamber depends on this source pressure as well.
Since the ion beam current is directly proportional to the product of emission current
and pressure, t he s o ur ce s ho ul d be op er a t e d w i t h h ig h e m is s io n cur r e nt
a nd l ow p re s s ur e v a l ue s.

4 . 5 . 2 . 1 O p ti m a l S o u r c e P r e s s u r e
The optimal pressure for various modes of operation can be determined by measuring
the beam (sample) current or evaluating the output signal of another analysis system.
This is done by determining the sample-current-pressure-function
ISample=f(psource,). This function shows a current maximum at the optimal pressure
setting, especially at low energies.
Note: Excessive pressure at high voltages will cause arcing in your source (plasma
discharge) and decrease the lifetime of your source.

1. see section 3.1.1

16

IQE 10/11

Tips for Better Operation

4 . 5 . 2 . 2 M u l t i pl i c a t i o n F a ct o r s ( T a b le )
I o n iz e d g a s

M ul ti p l ica t i o n f a ct o r r e l a t iv e to
N i tr o g e n
Air

He

6.9

6.0

Ne

4.35

3.7

Ar

0.83

0.71

Kr

0.59

0.5

Xe

0.33

0.33

H2

2.4

1.8

CO

0.92

0.85

CO2

0.69

0.59

CH4

0.8

0.7

N2O

0.7

0.6

T a b l e 1 : F ac t o r o f m ul t i p l i c a ti o n f o r p r es su r e m e as ur e m e n ts
w it h i o n iz a ti o n g au g e s i n ex t r a c t o r i o n so ur c es .

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17

System Operation

18

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Chapter

Maintenance / Service

5.1 General
SPECS offers a complete cleaning and testing of your source. This includes replacement
of filaments and ceramics replacement in the ionizer section and a complete certification
report.
Safety Information:

Note that products returned to SPECS for repair or maintenance must be free
of hazardous substances (e.g. radioactive, toxic, caustic or microbiological).
Otherwise, the type of hazard has to be declared.

Before starting any work on the ion source mechanics, strip down the
respective wiring to the power supply and disconnect it from mains!
! M i nd t he s a f et y in st r uc t ion s g i v e n on pa ge 2 !

5.2 Spare parts

Spare part

SPECS order no.

Filament
Anode (cage)
Ionizer Ceramics

10867017
52470010
27625106 and 27625105

5.3 Filament/ Anode / Ceramic Replacement

To replace these, the ion source has to be removed. Take out the complete module on its
base flange and put it in a clean place. For further dismantling follow these steps:
1. Unscrew the two M2 nuts with 4 mm open-ended wrench and remove the
repeller from the base plate.

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19

Maintenance / Service

2. Check the resistance between the anode cage and the base plate. If the
ceramics are contaminated please r e pla c e. Sometimes invisible contaminants
will increase the leak currents and limit the performance of your source in the
near future.
3. If the filament is broken or if the yttrium oxide film is damaged, replace the
cathode completely. Unscrew the two Allen screws (Allen key 0.9 mm metric)
on the cathode support pins and take the cathode assembly off. Mount the
new filament 7 mm above the base plate (see figure 3 page 7)
4. Check the anode cage (shape) and replace if necessary.
5. To assemble the ionization module, follow above steps in reverse order.
6. Before re-assembling, check the resistance of all electrical connections by a
multimeter. All electrodes and the filament should have no contact to ground
or contact to each other, with the following exceptions:
Filament 1 - Filament 2:

about 1 W

7. Note the procedure for a new filament and the degas hints described in Setup
for First Use on page 11.

20

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Chapter

LF

List of Figures

FIG URE 1

Sc hemati c of Io n So ur ce I QE 11/ 35

FIG URE 2

Pin A rr angement o n t he So ur ce Bas e Flange

FIG URE 3

I oni zat i on As sem bly

F IG URE 4

Tes t C ir cui t f or Tot al B ea m Cur r en t Mea s ur em en t

15

F IG URE 5

Tes t C ir cui t f or B ea m Pr of il e Meas ur e me nt

15

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Chapter

LT
TABLE 1

IQ E 1 0 /1 1

List of Tables

Factor of multiplication for pressure measurements with ionization

gauges in extractor ion sources.

17

II

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Chapter

I
A
Allen key
anode cage
anode voltage

Index

emission current
EMISSION key
20 emission regulation
20 ENERGY button
6
F

15
4
14
13

B
bake up
bakeout
beam current
BUSY status

Faraday cup
1 Filament 1
11 filament ring
1 fuse box
4
G

4, 15
9
6
2

ion current
ion energy
ionization efficiency
ionization process
ionization section
ionization volume
Ionizer Ceramics
ionizer section

4, 14
15
8
8
6
8, 9
19
19

L
leak current
lifetime

13
16

C
cage
D
degas hints
DEGAS mode
differential pumping
aperture
discharge area
discharge plasma
discharge section

gas bottle
19 gas inlet flange
gas inlet leak valve
gas inlet system
Gaussian beam profile
20 ground connector
12
H
8
13 hot filament
8 HV bridge cable
8
I

11
6
11
6
1
3

Emission Current

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Multiplication Factors

1
3

17

O
OPERATE key
OPERATE mode
operating lifetime

4, 14
4
15

P
PS-IQE
PU-IQE 11

E
inert gase
13, 14 internal anode cage

10, 13
1, 5, 12

1
6

R
reactive ions
repeller housing
Repeller voltage
residual gas

1
6
6
16

S
separate gas inlet flange
1
Source Base Flange
7
source pressure
8, 16
spare parts
19
standard distance
6
STANDBY mode
4, 12, 14
system venting
12
T
total ion current
total yield

8
8

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