EX 3.

1
N
a

n (columns)
RF Power
160
180
200
220

Observed Etch rate

20
4
0.05
5
1
575
565
600
725

2
542
593
651
700

3
530
590
610
715

4
539
579
637
685

5 Totals (Yi.)
570
2756
610
2937
629
3127
710
3535

Y..
Y-i.
y-j.

Yi. Ave
551.2
587.4
625.4
707

Yj. Av
616.25
621.5
611.25
610
629.75
12355

3088.75
617.75

squares
330625
319225
360000
525625

293764
351649
423801
490000

280900
348100
372100
511225

290521
335241
405769
469225

324900
372100
395641
504100

Totals Sq
7595536
8625969
9778129
12496225

Anova Table
Source of Var
Treatment
Errors
Totals

F,a-1,N-a

SS
66870.55
5339.2
72209.75

3.2388715175

DOF

MS

Fo

Pvalue

3 22290.18 66.79707 2.88E-009

16
333.7
19

Rf power has an effect Reject Ho

-25.4

Residuals
23.8
-22.4
-25.4
18
Normal Score
0.025 -1.959964

2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19

-22.4
-22
-21.2
-15.4
-12.2
-9.2
-8.4
-7
2.6
3
3.6
5.6
8
11.6
18
18.8
22.6
23.8

0.075
0.125
0.175
0.225
0.275
0.325
0.375
0.425
0.475
0.525
0.575
0.625
0.675
0.725
0.775
0.825
0.875
0.925

-1.439531
-1.150349
-0.934589
-0.755415
-0.59776
-0.453762
-0.318639
-0.189118
-0.062707
-30
0.062707
0.189118
0.318639
0.453762
0.59776
0.755415
0.934589
1.150349
1.439531

-20

20

25.6

0.975 1.959964

30

20

10

0
400
-10

-20

-30

450

-9.2
5.6
25.6
-7

-21.2
2.6
-15.4
8

-12.2
-8.4
11.6
-22

18.8
22.6
3.6
3

ormal Score

checking normality assumptio

2.5
2
1.5
1
0.5
0
-30

-20

-10

-0.5
-1
-1.5
-2
-2.5

Column AB
0

10

20

30

checking constant variance as

Residual
30

20

10
Residual
0
400
-10

-20

-30

450

500

550

600

650

700

750

y assumption

variance assumption

50

Residual

predicted Residual
551.2
23.8
551.2
-9.2
551.2
-21.2
551.2
-12.2
551.2
18.8
587.4
-22.4
587.4
5.6
587.4
2.6
587.4
-8.4
587.4
22.6
625.4
-25.4
625.4
25.6
625.4
-15.4
625.4
11.6
625.4
3.6
707
18
707
-7
707
8
707
-22
707
3

Fisher LSD tes

t,N-a
LSD
551.2
587.4
625.4
707

2.119905
24.49202

Y-1.-y-2.
Y-1.-y-3.
Y-1.-y-2.
Y-2.-y-3.
Y-2.-y-4.
Y-3.-y-4.

-36.2
-74.2
-155.8
-38
-119.6
-81.6

significant
significant
significant
significant
significant
significant

EX 3.1
N
a

n (columns
RF Power
160
180
200
220

Observed Etch rate

16
4
0.05
4
1
3129
3200
2800
2600

2
3000
3300
2900
2700

3
2865
2975
2985
2600

4 Totals (Yi.) Yi. Ave

2890
11884
2971
3150
12625 3156.25
3050
11735 2933.75
2765
10665 2666.25

Y..
Y-i.
y-j.

=
11727.25
2931.813

46909

Yj. Av
2932.25
2975
2856.25
2963.75

squares
9790641 9000000
10240000 10890000
7840000 8410000
6760000 7290000

8208225
8850625
8910225
6760000

8352100
9922500
9302500
7645225

Totals Sq
1.4E+008
1.6E+008
1.4E+008
1.1E+008

Anova Table
Source of
Var
Treatment
Errors
Totals

489740.188
153908.25
643648.438

F,a-1,N-a

3.49029482

SS

DOF

MS

Fo

Pvalue

3 163246.7 12.72811 0.000489

12 12825.69
15

1 -181.25
2 -133.75
3
-106
4
-81
5 -66.25

Residuals
158
29
43.75
143.75
-133.75
-33.75
-66.25
33.75
Normal Score
0.03125 -1.862732
0.09375 -1.318011
0.15625 -1.00999
0.21875 -0.776422
0.28125 -0.579132

-106
-181.25
51.25
-66.25

-81
-6.25
116.25
98.75

2.5
2
1.5
1
0.5
0

2.5
2

6
7
8
9
10
11
12
13
14
15
16

-66.25
-33.75
-6.25
29
33.75
43.75
51.25
98.75
116.25
143.75
158

0.34375
0.40625
0.46875
0.53125
0.59375
0.65625
0.71875
0.78125
0.84375
0.90625
0.96875

1.5

-0.40225
-0.237202
-0.078412
0.078412
0.237202
0.40225
0.579132
0.776422
1.00999
1.318011
1.862732

1
0.5
0
-200

-150

-100

-50

-0.5

-1
-1.5
-2
-2.5

R
30

20

10

0
400
-10

-20

-30

450

500

550

2.5
2
1.5
1
0.5
0

Column AA

2.5
2
1.5
1
0.5
Column AA

0
-100

-50

-0.5

50

100

150

200

-1
-1.5
-2
-2.5

Residual

Residual
500

550

600

650

700

750

predicted
2971
551.2
551.2
551.2
551.2
587.4
587.4
587.4
587.4
587.4
625.4
625.4
625.4
625.4
625.4
707
707
707
707
707

Residual
23.8
-9.2
-21.2
-12.2
18.8
-22.4
5.6
2.6
-8.4
22.6
-25.4
25.6
-15.4
11.6
3.6
18
-7
8
-22
3

Fisher LSD tes

t,N-a
LSD
2971
3156.25
2933.75
2666.25

2.178813
174.4798
Y-1.-y-2.
Y-1.-y-3.
Y-1.-y-2.
Y-2.-y-3.
Y-2.-y-4.
Y-3.-y-4.

-185.25
37.25
304.75
222.5
490
267.5

significant
Not sign
significant
significant
significant
significant

EX 4.1
N
a

n (columns
RF Power
160
180
200
220
Total

Observed Etch rate

24
4
0.05
6
1
90.3
92.5
85.5
82.5
350.8

2
89.2
89.5
90.8
89.5
359

3
98.2
90.6
89.6
85.6
364

4
93.9
94.7
86.2
87.4
362.2

5
87.4
87
88
78.9
341.3

6
Totals
97.9
95.8
93.4
90.7
377.8
Y..
Y-i.
y-j.
Y-..

(Yi.)
556.9
550.1
533.5
514.6

Yi. Ave
92.81667
91.68333
88.91667
85.76667

=
89.79583
89.79583
89.79583

Yj. Av
87.7
89.75
91
90.55
85.325
94.45
2155.1

squares
8154.09
8556.25
7310.25
6806.25

7956.64
8010.25
8244.64
8010.25

9643.24
8208.36
8028.16
7327.36

8817.21
8968.09
7430.44
7638.76

7638.76
7569
7744
6225.21

9584.41
9177.64
8723.56
8226.49

Totals Sq (i)
Square J
310137.61
123060.64
302610.01
128881
284622.25
132496
264813.16
131188.84
116485.69
142732.84
Anova Table
Source of Var

SS

DOF

Treatment
Blocks
Errors
Totals

178.1713
192.2521
109.8862
480.3096

3
5
15
23

F,a-1,(a-1)(b-1)

3.287382 Rf power has an effect Reject

MS

Fo

Pvalue

59.39042 8.107077 0.000994

38.45042 5.248666
7.32575

f power has an effect Reject Ho

1 -7.370833
2 -4.620833
3 -4.020833
4 -3.570833
5 -2.395833
6 -2.2875
7 -2.1375
8 -1.370833
9 -0.945833
10 -0.5375
11 -0.520833
12 -0.420833
13 -0.2125
14 -0.170833
15 0.279167
16 0.329167
17 0.429167
18 0.879167

Residuals
-0.420833 -3.570833
2.9125
-2.1375
-4.620833 3.979167
-4.020833 3.779167
Normal Score
0.020833 -2.036834
0.0625 -1.534121
0.104167 -1.258162
0.145833 -1.054472
0.1875 -0.887147
0.229167 -0.741594
0.270833 -0.610295
0.3125 -0.488776
0.354167 -0.374095
0.395833 -0.264147
0.4375 -0.157311
0.479167 -0.052245
0.520833 0.052245
0.5625 0.157311
0.604167 0.264147
0.645833 0.374095
0.6875 0.488776
0.729167 0.610295

19
20
21
22
23
24

2.2625
2.9125
3.554167
3.779167
3.979167
4.179167

0.770833
0.8125
0.854167
0.895833
0.9375
0.979167

0.741594
0.887147
1.054472
1.258162
1.534121
2.036834

4.179167 0.329167 -0.945833 0.429167

-2.2875
2.2625
-0.2125
-0.5375
-0.520833 -7.370833 3.554167 -0.170833
-1.370833 0.879167 -2.395833 0.279167

2.5
2
1.5
1
0.5
Column AC

0
-8

-6

-4

-2

-0.5
-1
-1.5
-2
-2.5

Residual
30

20

10

Residu
0
400
-10

-20

-30

450

500

550

600

650

700

750

Column AC
6

Residual
750

predicted Residual
92.81667
23.8
551.2
-9.2
551.2
-21.2
551.2
-12.2
551.2
18.8
587.4
-22.4
587.4
5.6
587.4
2.6
587.4
-8.4
587.4
22.6
625.4
-25.4
625.4
25.6
625.4
-15.4
625.4
11.6
625.4
3.6
707
18
707
-7
707
8
707
-22
707
3

Fisher LSD tes

t,N-a
LSD
92.81667
91.68333
88.91667
85.76667

2.085963
3.259659
Y-1.-y-2.
Y-1.-y-3.
Y-1.-y-2.
Y-2.-y-3.
Y-2.-y-4.
Y-3.-y-4.

1.133333
3.9
7.05
2.766667
5.916667
3.15

significant
significant
significant
significant
significant
significant

4//7
N
a

n (columns
RF Power
160
180
200
Total

Observed Etch rate

15
3
0.05
5
1
0.5
0.535
0.513
1.548

2
0.634
0.675
0.595
1.904

3
0.487
0.52
0.488
1.495

4
0.329
0.435
0.4
1.164

5
Totals (Yi.) Yi. Ave
0.512
2.462
0.4924
0.54
2.705
0.541
0.51
2.506
0.5012
1.562
Y..
Y-i.
y-j.
Y-..

=
0.511533
0.542417
0.511533

Yj. Av
0.516
0.634667
0.498333
0.520667
7.673

squares
0.25 0.401956 0.237169 0.108241 0.262144
0.286225 0.455625
0.2704 0.189225
0.2916
0.263169 0.354025 0.238144
0.16
0.2601

Totals Sq (iSquare J
6.061444
2.396304
7.317025
3.625216
6.280036
2.235025
1.354896
2.439844
Anova Table
Source of Var
Treatment
Blocks
Errors
Totals

F,a-1,(a-1)(b-1)

SS
0.006706
0.0921
0.004222
0.103028

DOF

MS

Fo

2 0.003353 6.352733
4 0.023025 43.62573
8 0.000528
14

4.45897 Rf power has an effect Reject Ho

Pvalue
0.022285

Reject Ho

Residuals
0.003133 0.018467
-0.010467 0.010867
0.025
0.089333

1 -7.370833
2 -4.620833
3 -4.020833
4 -3.570833
5 -2.395833
6 -2.2875
7 -2.1375
8 -1.370833
9 -0.945833
10 -0.5375
11 -0.520833
12 -0.420833
13 -0.2125
14 -0.170833
15 0.279167
16 0.329167
17 0.429167
18 0.879167
19 2.2625

Normal Score
0.020833 -2.036834
0.0625 -1.534121
0.104167 -1.258162
0.145833 -1.054472
0.1875 -0.887147
0.229167 -0.741594
0.270833 -0.610295
0.3125 -0.488776
0.354167 -0.374095
0.395833 -0.264147
0.4375 -0.157311
0.479167 -0.052245
0.520833 0.052245
0.5625 0.157311
0.604167 0.264147
0.645833 0.374095
0.6875 0.488776
0.729167 0.610295
0.770833 0.741594

0.0078
-0.0078
0

#REF!
0.410333

-8

-6

20
21
22
23
24

2.9125
0.8125 0.887147
3.554167 0.854167 1.054472
3.779167 0.895833 1.258162
3.979167
0.9375 1.534121
4.179167 0.979167 2.036834
30

20

10

0
400
-10

-20

-30

450

500

0.010467
-0.010133
-0.000333

2.5
2
1.5
1
0.5
Column AC

0
-8

-6

-4

-2

-0.5
-1
-1.5
-2
-2.5

Residual

Residual
450

500

550

600

650

700

750

predicted Residual
0.4924
23.8
551.2
-9.2
551.2
-21.2
551.2
-12.2
551.2
18.8
587.4
-22.4
587.4
5.6
587.4
2.6
587.4
-8.4
587.4
22.6
625.4
-25.4
625.4
25.6
625.4
-15.4
625.4
11.6
625.4
3.6
707
18
707
-7
707
8
707
-22
707
3

Fisher LSD tes

t,N-a
LSD
0.4924
0.541
0.5012

2.178813
0.031658
Y-1.-y-2.
Y-1.-y-3.

-0.0486
-0.0088

Y-2.-y-3.

0.0398

significant
significant
significant
significant