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Vibrationisolation
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Vibrationisolationistheprocessofisolatinganobject,suchasapieceofequipment,from

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thesourceofvibrations.

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Vibrationisundesirableinmanydomains,primarilyengineeredsystemsandhabitable

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spaces,andmethodshavebeendevelopedtopreventthetransferofvibrationtosuch

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systems.Vibrationspropagateviamechanicalwavesandcertainmechanicallinkages

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conductvibrationsmoreefficientlythanothers.Passivevibrationisolationmakesuseof
materialsandmechanicallinkagesthatabsorbanddampthesemechanicalwaves.Active

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vibrationisolationinvolvessensorsandactuatorsthatproducedestructiveinterferencethat

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cancelsoutincomingvibration.

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1 Passiveisolation
1.1 Commonpassiveisolationsystems

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1.2 Howpassiveisolationworks

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1.2.1 Factorsinfluencingtheselectionofpassivevibrationisolators

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1.2.2 Comparisonofpassiveisolators

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1.3 Negativestiffnessvibrationisolator
1.3.1 Verticalmotionisolation
1.3.2 Horizontalmotionisolation
1.3.3 Sixdegreeoffreedom(sixDOF)isolation
1.4 Vibrationisolationofsupportingjoint
1.4.1 Thevibrationisolator
1.5 Vibrationisolationofunsupportingjoint
1.5.1 Branchpipeaofisolatingvibration
1.6 Subframeisolation
2 Activeisolation
2.1 Sensorsforactiveisolation
2.2 Actuatorsforactiveisolation

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3 Seealso

Polski

4 References

5 Externallinks

SimpleEnglish
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Passiveisolation

[ edit ]

"Passivevibrationisolation"referstovibrationisolationormitigationofvibrationsbypassive
techniquessuchasrubberpadsormechanicalsprings,asopposedto"activevibration
isolation"or"electronicforcecancellation"employingelectricpower,sensors,actuators,and
controlsystems.

Passivevibrationisolationisavastsubject,sincetherearemanytypesofpassivevibration
isolatorsusedformanydifferentapplications.Afewoftheseapplicationsareforindustrial
equipmentsuchaspumps,motors,HVACsystems,orwashingmachinesisolationofcivil
engineeringstructuresfromearthquakes(baseisolation),[1]sensitivelaboratoryequipment,
valuablestatuary,andhighendaudio.
Abasicunderstandingofhowpassiveisolationworks,themorecommontypesofpassive
isolators,andthemainfactorsthatinfluencetheselectionofpassiveisolators:

Commonpassiveisolationsystems

[ edit ]

Pneumaticorairisolators
Thesearebladdersorcanistersofcompressedair.Asourceofcompressedairis
requiredtomaintainthem.Airspringsarerubberbladderswhichprovidedampingas
wellasisolationandareusedinlargetrucks.Somepneumaticisolatorscanattainlow
resonantfrequenciesandareusedforisolatinglargeindustrialequipment.Airtables
consistofaworkingsurfaceoropticalsurfacemountedonairlegs.Thesetablesprovide
enoughisolationforlaboratoryinstrumentundersomeconditions.Airsystemsmayleak
undervacuumconditions.Theaircontainercaninterferewithisolationoflowamplitude
vibration.
Mechanicalspringsandspringdampers
Theseareheavydutyisolatorsusedforbuildingsystemsandindustry.Sometimesthey
serveasmountsforaconcreteblock,whichprovidesfurtherisolation.
Padsorsheetsofflexiblematerialssuchaselastomers,rubber,cork,densefoam
andlaminatematerials.
Elastomerpads,denseclosedcellfoamsandlaminatematerialsareoftenusedunder
heavymachinery,undercommonhouseholditems,invehiclesandevenunderhigher
performingaudiosystems.[citationneeded]
Moldedandbondedrubberandelastomericisolatorsandmounts
Theseareoftenusedasmachinerymountsorinvehicles.Theyabsorbshockand
attenuatesomevibration.
Negativestiffnessisolators
Negativestiffnessisolatorsarelesscommonthanothertypesandhavegenerallybeen
developedforhighlevelresearchapplicationssuchasgravitywavedetection.Lee,
Goverdovskiy,andTemnikov(2007)proposedanegativestiffnesssystemforisolating
vehicleseats.
Thefocusonnegative'stiffnessisolatorshasbeenondevelopingsystemswithverylow
resonantfrequencies(below1Hz),sothatlowfrequenciescanbeadequatelyisolated,
whichiscriticalforsensitiveinstrumentation.Allhigherfrequenciesarealsoisolated.
Negativestiffnesssystemscanbemadewithlowstiction,sothattheyareeffectivein
isolatinglowamplitudevibrations.
Negativestiffnessmechanismsarepurelymechanicalandtypicallyinvolvethe
configurationandloadingofcomponentssuchasbeamsorinvertedpendulums.Greater
loadingofthenegativestiffnessmechanism,withintherangeofitsoperability,
decreasesthenaturalfrequency.
Wireropeisolators

Theseisolatorsaredurableandcanwithstandextremeenvironments.Theyareoften
usedinmilitaryapplications.
Baseisolatorsforseismicisolationofbuildings,bridges,etc.
Baseisolatorsmadeoflayersofneopreneandsteelwithalowhorizontalstiffnessare
usedtolowerthenaturalfrequencyofthebuilding.Someotherbaseisolatorsare
designedtoslide,preventingthetransferofenergyfromthegroundtothebuilding.
Tunedmassdampers
Tunedmassdampersreducetheeffectsofharmonicvibrationinbuildingsorother
structures.Arelativelysmallmassisattachedinsuchawaythatitcandampenouta
verynarrowbandofvibrationofthestructure.
DoitYourselfIsolators
Inlesssophisticatedsolutions,bungeecordscanbeusedasacheapisolationsystem
whichmaybeeffectiveenoughforsomeapplications.Theitemtobeisolatedis
suspendedfromthebungeecords.Thisisdifficulttoimplementwithoutadangerofthe
isolateditemfalling.Tennisballscutinhalfhavebeenusedunderwashingmachines
andotheritemswithsomesuccess.

Howpassiveisolationworks

[ edit ]

Apassiveisolationsystem,suchasashockmount,ingeneralcontainsmass,spring,and
dampingelementsandmovesasaharmonicoscillator.Themassandspringstiffness
dictateanaturalfrequencyofthesystem.Dampingcausesenergydissipationandhasa
secondaryeffectonnaturalfrequency.
Everyobjectonaflexiblesupporthasafundamental
naturalfrequency.Whenvibrationisapplied,energy
istransferredmostefficientlyatthenatural
frequency,somewhatefficientlybelowthenatural
frequency,andwithincreasinginefficiency

PassiveVibrationIsolation

(decreasingefficiency)abovethenaturalfrequency.
Thiscanbeseeninthetransmissibilitycurve,which
isaplotoftransmissibilityvs.frequency.
Hereisanexampleofatransmissibilitycurve.Transmissibilityistheratioofvibrationofthe
isolatedsurfacetothatofthesource.Vibrationsarenevercompletelyeliminated,butthey
canbegreatlyreduced.Thecurvebelowshowsthetypicalperformanceofapassive,
negativestiffnessisolationsystemwithanaturalfrequencyof0.5Hz.Thegeneralshapeof
thecurveistypicalforpassivesystems.Belowthenaturalfrequency,transmissibilityhovers
near1.Avalueof1meansthatvibrationisgoingthroughthesystemwithoutbeing
amplifiedorreduced.Attheresonantfrequency,energyistransmittedefficiently,andthe
incomingvibrationisamplified.Dampinginthesystemlimitsthelevelofamplification.Above
theresonantfrequency,littleenergycanbetransmitted,andthecurverollsofftoalow
value.Apassiveisolatorcanbeseenasamechanicallowpassfilterforvibrations.
Ingeneral,foranygivenfrequencyabovethenaturalfrequency,anisolatorwithalower
naturalfrequencywillshowgreaterisolationthanonewithahighernaturalfrequency.The
bestisolationsystemforagivensituationdependsonthefrequency,direction,and
magnitudeofvibrationspresentandthedesiredlevelofattenuationofthosefrequencies.

Allmechanicalsystemsintherealworldcontain
someamountofdamping.Dampingdissipates
energyinthesystem,whichreducesthevibration
levelwhichistransmittedatthenaturalfrequency.
Thefluidinautomotiveshockabsorbersisakindof
damper,asistheinherentdampinginelastomeric

negativestiffnesstransmissibility

(rubber)enginemounts.
Dampingisusedinpassiveisolatorstoreducetheamountofamplificationatthenatural
frequency.However,increasingdampingtendstoreduceisolationatthehigherfrequencies.
Asdampingisincreased,transmissibilityrolloffdecreases.Thiscanbeseeninthechart
below.
Passiveisolationoperatesinbothdirections,
isolatingthepayloadfromvibrationsoriginatingin
thesupport,andalsoisolatingthesupportfrom
vibrationsoriginatinginthepayload.Largemachines
suchaswashers,pumps,andgenerators,which
wouldcausevibrationsinthebuildingorroom,are
oftenisolatedfromthefloor.However,therearea
multitudeofsourcesofvibrationinbuildings,anditis

Dampingeffectontransmissibility

oftennotpossibletoisolateeachsource.Inmany
cases,itismostefficienttoisolateeachsensitive
instrumentfromthefloor.Sometimesitisnecessarytoimplementbothapproaches.
Factorsinfluencingtheselectionofpassivevibrationisolators [ edit ]
1. Characteristicsofitemtobeisolated
Size:Thedimensionsoftheitemtobeisolatedhelpdeterminethetypeof
isolationwhichisavailableandappropriate.Smallobjectsmayuseonlyone
isolator,whilelargeritemsmightuseamultipleisolatorsystem.
Weight:Theweightoftheobjecttobeisolatedisanimportantfactorinchoosing
thecorrectpassiveisolationproduct.Individualpassiveisolatorsaredesignedto
beusedwithaspecificrangeofloading.
Movement:Machinesorinstrumentswithmovingpartsmayaffectisolation
systems.Itisimportanttoknowthemass,speed,anddistancetraveledofthe
movingparts.
2. OperatingEnvironment
Industrial:Thisgenerallyentailsstrongvibrationsoverawidebandoffrequencies
andsomeamountofdust.
Laboratory:Labsaresometimestroubledbyspecificbuildingvibrationsfrom
adjacentmachinery,foottraffic,orHVACairflow.
Indoororoutdoor:Isolatorsaregenerallydesignedforoneenvironmentorthe
other.
Corrosive/noncorrosive:Someindoorenvironmentsmaypresentacorrosive
dangertoisolatorcomponentsduetothepresenceofcorrosivechemicals.
Outdoors,waterandsaltenvironmentsneedtobeconsidered.
Cleanroom:Someisolatorscanbemadeappropriateforcleanroom.

Temperature:Ingeneral,isolatorsaredesignedtobeusedintherangeof
temperaturesnormalforhumanenvironments.Ifalargerrangeoftemperatures
isrequired,theisolatordesignmayneedtobemodified.
Vacuum:Someisolatorscanbeusedinavacuumenvironment.Airisolatorsmay
haveleakageproblems.Vacuumrequirementstypicallyincludesomelevelof
cleanroomrequirementandmayalsohavealargetemperaturerange.
Magnetism:Someexperimentationwhichrequiresvibrationisolationalso
requiresalowmagnetismenvironment.Someisolatorscanbedesignedwith
lowmagnetismcomponents.
Acousticnoise:Someinstrumentsaresensitivetoacousticvibration.Inaddition,
someisolationsystemscanbeexcitedbyacousticnoise.Itmaybenecessaryto
useanacousticshield.Aircompressorscancreateproblematicacousticnoise,
heat,andairflow.
Staticordynamicloads:Thisdistinctionisquiteimportantasisolatorsare
designedforacertaintypeandlevelofloading.
Staticloading
isbasicallytheweightoftheisolatedobjectwithlowamplitudevibrationinput.
Thisistheenvironmentofapparentlystationaryobjectssuchasbuildings
(undernormalconditions)orlaboratoryinstruments.
Dynamicloading
involvesaccelerationsandlargeramplitudeshockandvibration.This
environmentispresentinvehicles,heavymachinery,andstructureswith
significantmovement.
3. Cost:
Costofprovidingisolation:Costsincludetheisolationsystemitself,whetheritisa
standardorcustomproductacompressedairsourceifrequiredshippingfrom
manufacturertodestinationinstallationmaintenanceandaninitialvibrationsite
surveytodeterminetheneedforisolation.
Relativecostsofdifferentisolationsystems:Inexpensiveshockmountsmayneed
tobereplacedduetodynamicloadingcycles.Ahigherlevelofisolationwhichis
effectiveatlowervibrationfrequenciesandmagnitudesgenerallycostsmore.
Pricescanrangefromafewdollarsforbungeecordstomillionsofdollarsfor
somespaceapplications.
4. Adjustment:Someisolationsystemsrequiremanualadjustmenttocompensatefor
changesinweightload,weightdistribution,temperature,andairpressure,whereas
othersystemsaredesignedtoautomaticallycompensateforsomeorallofthese
factors.
5. Maintenance:Someisolationsystemsarequitedurableandrequirelittleorno
maintenance.Othersmayrequireperiodicreplacementduetomechanicalfatigueof
partsoragingofmaterials.
6. SizeConstraints:Theisolationsystemmayhavetofitinarestrictedspaceina
laboratoryorvacuumchamber,orwithinamachinehousing.
7. Natureofvibrationstobeisolatedormitigated
Frequencies:Ifpossible,itisimportanttoknowthefrequenciesofambient

vibrations.Thiscanbedeterminedwithasitesurveyoraccelerometerdata
processedthroughFFTanalysis.
Amplitudes:Theamplitudesofthevibrationfrequenciespresentcanbe
comparedwithrequiredlevelstodeterminewhetherisolationisneeded.In
addition,isolatorsaredesignedforrangesofvibrationamplitudes.Someisolators
arenoteffectiveforverysmallamplitudes.
Direction:Knowingwhethervibrationsarehorizontalorverticalcanhelptotarget
isolationwhereitisneededandsavemoney.
8. Vibrationspecificationsofitemtobeisolated:Manyinstrumentsormachineshave
manufacturerspecifiedlevelsofvibrationfortheoperatingenvironment.The
manufacturermaynotguaranteetheproperoperationoftheinstrumentifvibration
exceedsthespec.
Comparisonofpassiveisolators [ edit ]
[citationneeded]

TypeofPassive

Applications

Isolation
AirIsolators
Springsor
springdampers
Elastomeror
corkpads

Largeindustrialequipment,someopticsand
instruments
Heavyloads,pumps,compressors

TypicalNatural
Frequency
1.53Hz,large
systemscustomizedto
0.5Hz
39Hz

Largehighloadapplicationswhereisolationof 340Hz,depending
mediumtohighfrequencynoiseandvibration

onsizeofpadand

isrequired

load

Machinery,instruments,vehicles,aviation

1020+Hz

Moldedor
bonded
elastomer
mounts
Negative
stiffness
isolators
Wirerope
isolators
Bungeecord
isolators
Baseisolators

Electronmicroscopes,sensitiveinstruments,
opticsandlasersystems,cryogenicsystems
Machinery,instruments,vehicles,aviation

1040+Hz
Dependsontypeof

Laboratory,home,etc.

cordandthemass
theysupport

Buildingsandlargestructures

TunedMass
Dampers

0.172.5Hz

Buildings,largestructures,aerospace

Low,seismic
frequencies
Any,butusuallyused
atlowfrequencies

Negativestiffnessvibrationisolator

[ edit ]

Theneutralityofthissectionisdisputed.Relevant
discussionmaybefoundonthetalkpage.Pleasedonot
removethismessageuntilconditionstodosoaremet.
(December2011)(Learnhowandwhentoremovethistemplate
message)

NegativeStiffnessMechanism(NSM)vibrationisolationsystemsofferauniquepassive
approachforachievinglowvibrationenvironmentsandisolationagainstsubHertz
vibrations."Snapthrough"or"overcenter"NSMdevicesareusedtoreducethestiffnessof
elasticsuspensionsandcreatecompactsixdegreeoffreedomsystemswithlownatural
frequencies.Practicalsystemswithverticalandhorizontalnaturalfrequenciesaslowas0.2
to0.5Hzarepossible.Electromechanicalautoadjustmechanismscompensateforvarying
weightloadsandprovideautomaticlevelinginmultipleisolatorsystems,similartothe
functionoflevelingvalvesinpneumaticsystems.Allmetalsystemscanbeconfiguredwhich
arecompatiblewithhighvacuumsandotheradverseenvironmentssuchashigh
temperatures.
Theseisolationsystemsenablevibrationsensitiveinstrumentssuchasscanningprobe
microscopes,microhardnesstestersandscanningelectronmicroscopestooperatein
severevibrationenvironmentssometimesencountered,forexample,onupperfloorsof
buildingsandincleanrooms.Suchoperationwouldnotbepracticalwithpneumaticisolation
systems.[citationneeded]Similarly,theyenablevibrationsensitiveinstrumentstoproducebetter
imagesanddatathanthoseachievablewithpneumaticisolators.[citationneeded]
ThetheoryofoperationofNSMvibrationisolationsystemsissummarized,sometypical
systemsandapplicationsaredescribed,anddataonmeasuredperformanceispresented.
ThetheoryofNSMisolationsystemsisexplainedinReferences1and2. [clarificationneeded]It
issummarizedbrieflyforconvenience.
Verticalmotionisolation [ edit ]
Averticalmotionisolatorisshown.ItusesaconventionalspringconnectedtoanNSM
consistingoftwobarshingedatthecenter,supportedattheirouterendsonpivots,and
loadedincompressionbyforcesP.ThespringiscompressedbyweightWtotheoperating
positionoftheisolator,asshowninFigure1.ThestiffnessoftheisolatorisK=KSKNwhere
KSisthespringstiffnessandKNisthemagnitudeofanegativestiffnesswhichisafunction
ofthelengthofthebarsandtheloadP.Theisolatorstiffnesscanbemadetoapproach
zerowhilethespringsupportstheweightW.
Horizontalmotionisolation [ edit ]
AhorizontalmotionisolatorconsistingoftwobeamcolumnsisillustratedinFigure.2.Each
beamcolumnbehavesliketwofixedfreebeamcolumnsloadedaxiallybyaweightloadW.
WithouttheweightloadthebeamcolumnshavehorizontalstiffnessKSWiththeweightload
thelateralbendingstiffnessisreducedbythe"beamcolumn"effect.Thisbehavioris
equivalenttoahorizontalspringcombinedwithanNSMsothatthehorizontalstiffnessis
K=KSKN,andKNisthemagnitudeofthebeamcolumneffect.Horizontalstiffnesscanbe
madetoapproachzerobyloadingthebeamcolumnstoapproachtheircriticalbuckling

load.

Sixdegreeoffreedom(sixDOF)isolation [ edit ]
AsixDOFNSMisolatortypicallyusesthreeisolatorsstackedinseries:atiltmotionisolator
ontopofahorizontalmotionisolatorontopofaverticalmotionisolator.Figure3showsa
schematicofavibrationisolationsystemconsistingofaweightedplatformsupportedbya
singlesixDOFisolatorincorporatingtheisolatorsofFigures1and2.Flexuresareusedin
placeofthehingedbarsshowninFigure1.Atiltflexureservesasthetiltmotionisolator.A
verticalstiffnessadjustmentscrewisusedtoadjustthecompressionforceonthenegative
stiffnessflexurestherebychangingtheverticalstiffness.Averticalloadadjustmentscrewis
usedtoadjustforvaryingweightloadsbyraisingorloweringthebaseofthesupportspring
tokeeptheflexuresintheirstraight,unbentoperatingpositions.

Vibrationisolationofsupportingjoint

[ edit ]

Theequipmentorothermechanicalcomponentsarenecessarilylinkedtosurrounding
objects(thesupportingjointwiththesupporttheunsupportingjointthepipeductor

cable),thuspresentingtheopportunityforunwantedtransmissionofvibrations.Usinga
suitablydesignedvibrationisolator(absorber),vibrationisolationofthesupportingjointis
realized.Theaccompanyingillustrationshowstheattenuationofvibrationlevels,as
measuredbeforeinstallationofthefunctioninggearonavibrationisolatoraswellasafter
installation,forawiderangeoffrequencies.
Thevibrationisolator [ edit ]
Thisisdefinedasadevicethat
reflectsandabsorbswavesof
oscillatoryenergy,extendingfroma
pieceofworkingmachineryor
electricalequipment,andwiththe
desiredeffectbeingvibration
insulation.Thegoalistoestablish
vibrationisolationbetweenabody
transferringmechanicalfluctuations
andasupportingbody(forexample,
betweenthemachineandthe
foundation).Theillustrationshowsavibrationisolatorfromtheseries(~"VI"inRoman
characters),asusedinshipbuildinginRussia,forexamplethesubmarine"St.Petersburg"
(Lada).Thedepicteddevicesallowloadingsrangingfrom5,40and300kg.They
differintheirphysicalsizes,butallsharethesamefundamentaldesign.Thestructure
consistsofarubberenvelopethatisinternallyreinforcedbyaspring.Duringmanufacture,
therubberandthespringareintimatelyandpermanentlyconnectedasaresultofthe
vulcanizationprocessthatisintegraltotheprocessingofthecruderubbermaterial.Under
actionofweightloadingofthemachine,therubberenvelopedeforms,andthespringis
compressedorstretched.Therefore,inthedirectionofthespring'scrosssection,twistingof
theenvelopingrubberoccurs.Theresultingelasticdeformationoftherubberenvelope
resultsinveryeffectiveabsorptionofthevibration.Thisabsorptioniscrucialtoreliable
vibrationinsulation,becauseitavertsthepotentialforresonanceeffects.Theamountof
elasticdeformationoftherubberlargelydictatesthemagnitudeofvibrationabsorptionthat
canbeattainedtheentiredevice(includingthespringitself)mustbedesignedwiththisin
mind.Thedesignofthevibrationisolatormustalsotakeintoaccountpotentialexposureto
shockloadings,inadditiontotheroutineeverydayvibrations.Lastly,thevibrationisolator
mustalsobedesignedforlongtermdurabilityaswellasconvenientintegrationintothe
environmentinwhichitistobeused.Sleevesandflangesaretypicallyemployedinorderto
enablethevibrationisolatortobesecurelyfastenedtotheequipmentandthesupporting
foundation.

Vibrationisolationofunsupportingjoint

[ edit ]

Vibrationisolationofunsupportingjointisrealizedinthedevicenamedbranchpipeaof
isolatingvibration.
Branchpipeaofisolatingvibration [ edit ]
Branchpipeaofisolatingvibrationisapartofatubewithelasticwallsforreflectionand
absorptionofwavesoftheoscillatoryenergyextendingfromtheworkingpumpoverwallof

thepipeduct.Isestablishedbetweenthepumpandthepipeduct.Onanillustrationis
presentedtheimageavibrationisolatingbranchpipeofaseries.Inastructureis
usedtherubberenvelope,whichisreinforcedbyaspring.Propertiesofanenvelopeare
similarenvelopetoanisolatorvibration.Hasthedevicereducingaxialeffortfromactionof
internalpressureuptozero.

Subframeisolation

[ edit ]

Anothertechniqueusedtoincrease
isolationistouseanisolatedsubframe.
Thissplitsthesystemwithanadditional
mass/spring/dampersystem.This
doublesthehighfrequencyattenuation
rolloff,atthecostofintroducing
additionallowfrequencymodeswhich
maycausethelowfrequencybehaviour
todeteriorate.Thisiscommonlyusedin
therearsuspensionsofcarswith
IndependentRearSuspension(IRS),
andinthefrontsubframesofsome
cars.Thegraph(seeillustration)shows
theforceintothebodyforasubframe
thatisrigidlyboltedtothebody
comparedwiththeredcurvethatshows
acompliantlymountedsubframe.

Subframevibrationisolationgraph:force
transmissiononsuspendedbodyvs.frequencyfor
rigidlyandcompliantlymountedsubframes.

Above42Hzthecompliantlymounted
subframeissuperior,butbelowthatfrequencytheboltedinsubframeisbetter.

Activeisolation

[ edit ]

Activevibrationisolationsystemscontain,alongwiththespring,afeedbackcircuitwhich
consistsofasensor(forexampleapiezoelectricaccelerometerorageophone),a
controller,andanactuator.Theacceleration(vibration)signalisprocessedbyacontrol
circuitandamplifier.Thenitfeedstheelectromagneticactuator,whichamplifiesthesignal.
Asaresultofsuchafeedbacksystem,aconsiderablystrongersuppressionofvibrationsis
achievedcomparedtoordinarydamping.Activeisolationtodayisusedforapplications
wherestructuressmallerthanamicrometerhavetobeproducedormeasured.Acoupleof
companiesproduceactiveisolationproductsasOEMforresearch,metrology,lithography
andmedicalsystems.Anotherimportantapplicationisthesemiconductorindustry.Inthe
microchipproduction,thesmalleststructurestodayarebelow20nm,sothemachineswhich
produceandcheckthemhavetooscillatemuchless.

Sensorsforactiveisolation

[ edit ]

Piezoelectricaccelerometersandforcesensors
MEMaccelerometers
Geophones
Proximitysensors

Interferometers

Actuatorsforactiveisolation

[ edit ]

Linearmotors
Pneumaticactuators
Piezoelectricmotors

Seealso

[ edit ]

Cushioning

Baseisolation

Passiveheave

Shockabsorber

Vibrationcontrol

compensation

Bushing(isolator)

Oscillation

Activevibrationcontrol

Vibration

Shockmount

Dampedwave

Noise,vibration,and

Soundproofing

Damping

harshness

Sorbothane

Damper(disambiguation)

References

[ edit ]

1. ^Reitherman,Robert(2012).EarthquakesandEngineers:AnInternationalHistory

.Reston,

VA:ASCEPress.ISBN9780784410714.

PlatusPhD,DavidL.,SPIEInternationalSocietyofOpticalEngineeringJuly1999,
OptomechanicalEngineeringandVibrationControlNegativeStiffnessMechanism
VibrationIsolationSystems
Harris,C.,Piersol,A.,HarrisShockandVibrationHandbook,FifthEdition,McGrawHill,
(2002),ISBN0071370811
A.KolesnikovNoiseandvibration.Russia.Leningrad.Publ.Shipbuilding.1988

Externallinks

[ edit ]

WhitePaperonActiveVibrationIsolationforLithographyandImaging
PassiveIsolationofHarmonicExcitation
Categories: Mechanicalengineering

Mechanicalvibrations

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