Smart Contact Lens Google X

Tiny wireless chip and

miniaturized glucose sensor
embedded between two
layers of soft contact lens
material
Accurate glucose monitoring
for diabetics using bodily
fluids, i.e. tears
Prototypes can generate one
reading per second
Experimenting with LEDs to
serve as early warning for the
wearer

Source: Google X

Noninvasive Blood Monitor UCSD

Digital tattoo monitors blood below

the skin
Tattoos are needle-less, sensor-laden
transdermal patch and are painless
for the user
Tiny sensors ink can read blood
levels of sodium, glucose, kidney
function, and electrolyte balance
from a smartphone
Prototypes contain probes on the
wireless, battery-powered chip to
continually test up to a hundred
different samples

Source: 9TO5MAC

Transdermal patch or
digital tattoo

Concussion Sensor STMicro & X2 Biosystems

Wearable electronic head-impact

monitoring patch
Patch contains MEMS motion sensors,
microcontroller, low-power radio
transmitter, and power management
circuitry

A cloud-based system combines

athlete concussion history, pre-season
neurocognitive function, balance, and
coordinate-performance data to
create a baseline for comparison after
a suspected injury event

Source: ST Microelectronics

Ingestible Drug Delivery System Phillips

Electronic pill to treat

gastrointestinal cancer
An ingestible pill is
swallowed by the patient,
finds its way to the tumor,
dispenses the drugs and
passes harmlessly from
the body
Smart pill contains
reservoir for drug supply,
fluid pump for drug
delivery, pH sensor (for
navigation), thermometer,
microprocessor and radio
for communication

Source: Popular Science

Ingestible Biomedical Sensor Proteus

Proteus Digital Health is the first

company to receive FDA clearance
for an ingestible biomedical sensor
that monitors medication adherence
Embedded into a pill, the sensor is
activated by stomach fluid, then
transmits a signal through the body
to a skin patch
Indicates whether a patient has
ingested medication or not

Source: Gizmag

Microneedle Drug Delivery System Purdue

Micropump devices based on skin

contact actuation for drug delivery
Actuation mechanism only requires
body heat, no other external power
Induced actuation can result to a
gradient of 100 Pa/oC, sufficient to
drive liquid drug through microneedle
arrays
Prototypes exhibit low fabrication
costs, employment of biocompatible
materials and battery-less operation
Suitable for single- or multiple-use
transdermal drug dispensers

Source: Purdue University

Dietary Spectrometer Sensor TellSpec

Can measure:
Laser-driven, handheld spectrometer
for analyzing food
Scanned information is sent to a
cloud-based application that examines
the results

Chemicals
Gluten
Dyes
Allergens
Neurotoxins
Molds
Bacteria

Data is accumulated from many users

to develop warning algorithms for the
allergic, vegetarians and other
selective diets

Source: Financial Post

Wearable UV Exposure Sensor Sunfriend

Wristband for monitoring UV exposure

Allows user to maximize vitamin D
production while reducing the risk of
sun over-exposure and skin cancer
LED indicators light up as UV exposure
accumulates and flash once the safe
limit has been reached

UV Sensor

Source: Gizmag

Intraocular Pressure Sensor Sensimed & ST

STMicroelectronics teamed up with

Switzerlands Sensimed AG to develop
a smart contact lens called Triggerfish

Contact lens can measure, monitor,

and control intra-ocular pressure levels
for patients and catch early cases of
glaucoma
The sensor itself, a MEMS strain gage
pressure sensor, is mounted on a
flexible substrate

MEMS strain gage

Source: Electronic Design

10

MEMS Microphone University of Utah

MEMS enabled implantable

technology for hearing restoration

Wire bonds

Eliminates electronics outside the ear

associated with reliability issues and
social stigma
Accelerometer-based microphone
successfully tested in cadaver ear
canals
Prototype measures 2.5 x 6.2mm and
weighs 25mg

Source: IEEE Spectrum

MEMS microphone
Microcontroller

11

Retinal 3D Imaging Mirrorcle

Micro-mirrors enabling handheld

ophthalmic swept source OCT model
for retinal 3D imaging

MEMS mirror on PCB substrate

Replaces bulky galvanometer scanners

in a handheld OCT probe for primary
care physicians

Ultrahigh-speed two-axis optical beam

steering by use of the compact,
gimbal-less MEMS mirrors
MEMS actuator with a 2.4 mm bonded
mirror and an angular reach of +6
Low power consumption of <100mW
including the MEMS actuator driver

Source: OCT News

MEMS mirror in
leaded IC package
12

Cell Phone Diagnostics Platform UCLA

Cellphone-based rapid-diagnostic-test
(RDT) reader platform
Lateral flow immuno-chromatographic
assays and similar tests to sense the
presence of a target analyte in a sample
Device connects to the camera on a cell
phone and weighs only 65 grams

Various types of RDTs can be inserted

to be imaged in reflection or
transmission modes under light
emitting diode (LED) based
illumination

Source: Royal Society of Chemistry

13

Organ-on-a-Chip Johns Hopkins University

Silicon substrate for living human

cells in a controlled environment
Emulate how cells function inside a
living human body
Replace controversial and costly
animal testing

Lab-on-a-chip: a cost effective end to animal testing

Source: Sound Color Vibration

14

Cerebral Pressure Sensor Fraunhofer

Fraunhofer Institute for Biomedical

Engineering has developed a sensor
to monitor cerebral pressure that can
lead to dementia
Pressure changes in the brain can be
measured and transmitted a reading
device outside the patients body
Operating at very low power, the
sensor module is powered wirelessly
by the reading device

Pressure diaphragm

Source: Gizmag

15

Implantable Aneurism Monitor CardioMEMS

FDA approved, implantable micro

device for monitoring and treating
aneurisms, a leading cause of heart
failure
RF-addressed wireless pressure
sensor are powered by inductive
coupling and do not need batteries

MEMS pressure sensor and wireless

antenna are inserted near the heart
with a catheter
Blood-pressure readings are sent to
a wireless scanner for monitoring

Source: Electronic Design

Pressure changes deflect the transducers

diaphragm and change the LC circuits
resonant frequency

16

Implantable Brain Activity Sensor NIBIB, NIH

Fully implantable within the brain

Allow natural studies of brain activity
in moving subjects and represents a
potential major step toward cord-free
control of advanced prosthetics that
move with the power of thought
Wireless charging
Prototypes transmitted brain activity
data wirelessly for more than a year in
early stage tests

Wireless, implantable brain sensor, shown

next to a U.S. quarter for size comparison.
Source: National Institute of Biomedical Imaging and Bioengineering

17

Implantable Blood Analyzer Chip EPFL

Tiny, implantable device for

instantaneous blood analysis
Wireless data transmission to a doctor
Applications include monitoring
general health, and tailor drug delivery
to a patients unique needs
Includes five sensors and a radio
transmitter
Powered via inductive coupling from a
battery patch worn outside the body

Source: Implantable Devices

18

Implantable Pressure Sensor Purdue

Implantable miniature pressure

sensor, powered by an acoustically
actuated cantilever from Birck
Nanotechnology Center, Purdue
University
No battery required as acoustic
waves in the 200-500 hertz range
cause cantilever to vibrate,
scavenging energy to power
pressure sensor and electronics

Acoustic receiver
Antenna/sensor
PDMS membrane
Acoustic wave
Ferrite
Rectifier buried in PDMS
RF radiation

Source: Popular Science

19

Wearable Skin Sensor KTH

Bio-patch for measuring and collecting

vital information through the skin
Inexpensive, versatile and comfortable
to wear for the user
Data being gathered depends on
where it is placed on the body:
Chest: electrocardiography (ECG)
Skull: measure brainwaves (EEC)
Forearm: measure muscle
response to stimulation from the
nervous system (EMG)

Skin sensor on flex substrate

Source: Chemistry 2011

20

MEMS Drug Delivery Devices CPRL

Implantable MEMS drug delivery

system
Device can deliver a vasoconstrictor
agent on demand to injured soldiers to
prevent hemorrhagic shock

Other applications include medical

implants for cancer detection and
monitoring
Implant can provide physicians and
patients real-time information on the
efficacy of treatment regimes

Source: MIT

21

Pressure Sensor for Damaged Nerves Orpyx

Wireless shoe insert to help diabetics

manage peripheral nerve damage
Insole collects data of where wearers
are putting pressure on their feet and
transmits wirelessly a wristwatch-type
display or a smartphone
Prevent amputations that often stem
from diabetic foot ulcers

Wireless transmission from insole to wrist

watch using ANT+

Source: Mobile Health News

22

Endoscope Probe Santec

5 mm
Endoscope using MEMS scanning
mirror for gastrointestinal and
urological imaging

Focus Lens
Sheath

1.3 um

Collimator

Alternative to biopsies in cancer

detection
MEMS Scanner

A laser beam pointed at the mirror is

precisely deflected and steered by the
scanning mirror to reach a target point

Beam Splitter

Optical Fiber

Source: Santec

Photovoltaic Cell
1.5 um
Ferrule

23

Insulin Micropump Debiotech

Microfluidic MEMS for diabetes

treatment
Watertight pump mounted on a
disposable skin patch to provide
continuous insulin infusion
Controlled by a dedicated smartphone
device incorporating a BGM (bloodglucose meter)

Source: Micronews

24

Microsurgical Tools Microfabrica

Micromachined surgical tools; silicon

MEMS tweezers
Used for minimally invasive surgical
(MIS) procedures where diagnosis,
monitoring, or treatment of diseases
are performed, performing with very
small incisions
MEMS based microsurgical tools is a
key enabling technology for
angioplasty, catheterization,
endoscopy, laparoscopy, and
neurosurgery

Source: ElectrolQ

25

Implantable Heart Sensor Wash. University

Biomedical engineers at Washington

University have developed a customfitted, implantable device for
treatment and prediction of cardiac
disorders
Working prototypes were developed
on inexpensive 3D printers
The 3D elastic membrane is made of a
soft, flexible, silicon material precisely
shaped to match the outer layer of the
heart

Source: Kurzweil

3D elastic membrane integrated with a heart

26

About Us
Rogue Valley Microdevices was
founded in 2003 and is dedicated to
providing fabrication services for the
MEMS and microelectronics industry
Located in Medford, Oregon we
maintain a 200mm MEMS device
foundry supporting our customers
from the early R&D phase through
pilot production
We are dedicated to providing foundry
services for the MEMS, nanotech, and
biotech industries. Our wafer
processing modules are designed to
handle silicon wafer substrates as well
as a variety of other materials such as
quartz, glass, sapphire, and ceramic
wafers

27

MEMS Foundry

INDUSTRIES
Semiconductor

We provide manufacturing services to a

worldwide customer base that spans
many high-tech industries

MEMS and nanotechnology

Sustainable technology

Government
Academia

Biotechnology

Emerging tech R&D

Proof of concept

Optoelectronics
Telecommunications

CUSTOMERS
Device Manufacturers

Government

Large Company
Product development
Small R&D projects

Rogue Valley Micro

MEMS Foundry

Start up company
R&D small batch device
fabrication

Universities
Equipment manufacturers
Materials distributors
Research and development

Midsize company
Process optimization
Pilot production

28

Our Services

PROCESS CAPABILITIES
Photo mask layout

Full Service MEMS Foundry with dedicated 200mm

Production Line

MEMS fabrication on CMOS wafers

Suspended membrane fabrication
Front to back alignment
I-line stepper lithography
Precious metal deposition and
patterning
Multi-layer metal films including
Au/Sn solder
Reactively sputtered dielectric and
Resistive Materials
LPCVD and PECVD dielectric film
deposition
KOH and TMAH silicon etch
Metal liftoff processing
Polyimide processing

29

R&D Device Manufacturing

Research and Development
We are not too big for small
R&D projects
Flexible equipment set
Small batch sizes

Fabless
Customer

Rogue Valley
Micro
Design
Review

Design but no
manufacturing capability

Creative and experienced engineers

Ability to work with non-standard
materials

Thin Films
Deposition

Fab Short
Customer

Great customer service

Willing to provide data

Design but limited

manufacturing capability

Etch

Photo
Patterning

One Stop Shop vs. Pit Stop

Device
Singulation

Final
Inspection

30

Contact Us

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