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2. CONFIGURATION & SPECIFICATIONS ............. 3
3. CONTROL BOX ................................................... 6
4. OPERATION ........................................................ 7
4.1 TOUCH PANEL .............................................. 7
4.2 SET DATA ...................................................... 9
4.3 AUTO OPERATION ...................................... 10
4.4 OTHER FUNCTIONS ................................... 11
5. EMERGENCY STOP/ALARM ............................ 13
6. MAINTENANCE AND INSPECTION .................. 14
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SDI COMPANY., LTD.
1. INTRODUCTION
MICRO SPEED DIP SD-0808-M1 is a device to form a thin film on both sides
simultaneously by immersing samples in a tank.
This manual is a guide to how to use the MICRO SPEED DIP SD-0808-M1.
Before using the device, be sure you read this manual and thoroughly understand the
contents.
We recommend you have this manual on hand when working with our product. Feel free
to contact us with any questions or comments relating to our products or this manual.
Device configuration
Workpiece
Upward/downward driving part
Table part
Control Box
rotation angle adjustment part
Main unit upward/downward driving part
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1
5
4
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Device specification
Device specification
<Coated material>
Maximum substrate size 150 wafer
<Processing speed>
0.00004mm/sec 40.000mm/sec (can be adjusted in 0.00004mm/sec intervals)
Note: Settings other than units of 0.00004 are truncated. For example, the 0.00005 setting
becomes 0.00004.
<Stop time>
0.1 second 999.9sec (can be adjusted in 0.1sec intervals)
<Monitor function>
With the current speed, current position, remaining time, remaining number of times, and
display function
Specified programs
8 programs
<Power-supply voltage>
Single phase 100V 50/60Hz 250VA (when connected to a grounded outlet)
System requirements
System requirements
<Ambient temperature>
0C - 50C (do not use in freezing temperatures)
<Ambient humidity>
35% - 85% or less (do not use in environments exposed to condensation)
<Other requirements>
Do not use in environments exposed to caustic gases or dust.
Keep the device away from water, oil and other fluids.
3.Control Box
MICRO SPEED DIP SD-0808-M1 has a touch panel that allows users to change setting
data or check operation.
The figure below shows the control box..
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Control Box
No
Name
Touch panel
Description
A display panel that is used to change set values and
operate the unit using points.
Power-supply switch
Start switch
Starts operation.
Device operation can only be started when there is no
error.
Stop switch
Pauses operation.
The arm stops immediately when the switch is pressed.
The arm restarts when the switch is pressed again while
the arm is stopped.
Operation can be reset by pressing the home return
Switch during pause.
4. OPERATION
When the MICRO SPEED DIP SD-0808-M1 is turned ON, the start screen appears.
After the DIP arm returns to the initial position and you press the language switch
(select Japanese or English) on the title screen, the main screen appears and the unit is
now ready to operate. The following section describes how to operate the system.
Select Japanese or
English display.
The start screen appears and after returning to the initial position is completed,
pressing the language switch brings up the following screen.
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3
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No
Name
Description
Speed change
screen switch
to each point.
The effective range of the set value is 0.00004mm/sec 40mm/sec.
Point change
screen switch
each point.
The effective range of the set value is 0mm - 150mm.
Switches to the screen that is used set the stop time after
screen switch
moving to a point.
The effective range of the set value is 0.1sec - 999.9sec.
Data content
screen switch
Speed setting
Stop position setting
(using numeric keypad)
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5
6
7
9
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Stop position setting (teaching)
Point teaching
Press Teaching to display the teaching screen.
Select a point No. (the point lights in red when selected and lights in blue when
not). While checking the current position , press the upward/downward switches
to move to the position at which you wish to set the arm stop position. The
upward/downward moving speed can be changed using the
high-speed/low-speed/inching JOG switch (high-speed JOG is 10mm/sec,
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If the point data values are not an appropriate position or speed for the coating bath
and coating target work, change the processing point data to appropriate values.
3.
Check the distance between the coating bath and work and use the top handle to
adjust the distance.
4.
Use the rotation angle adjustment mechanism to adjust the angle of the main unit.
5.
Suspend the coating target work to the arm part and check the descend dip position
of the coating target work and the path position.
When the power switch is turned ON, the arm of the DT-0001 automatically returns
to its initial position.
2.
3.
Turn the start switch ON to process the sample in accordance with the specified
processing point data.
4.
After operation for all specified processing points is completed, the unit stops.
If the Stop switch is pressed during operation to change the speed or point
data, the setting of the next point becomes valid. Data cannot be changed
during movement.
The minimum processing point data used is 1 point. You cannot specify less
than 1 point. Point data is used from 1 to 8, in that order. Point data numbers
cannot be skipped. When a point is selected, the red lamp lights and when not
selected, the blue lamp lights.
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No
Name
Current position
Current speed
Description
Indicates the current DIP arm position.
Indicates the current DIP arm moving speed.
Remaining time
Normal/Repeat
operation switch
Repeat setting
screen switch
Total/partial
repeat operation
switch
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You can set the number of repeats or the point of partial repeat when performing repeat
operation.
The effective range of the number of times to repeat is 1 to 998.
For the effective point of partial repeat, Start point is 1 to 7, and End point is 2 to 8.
When the value indicator is set to 999, repeat operation is continued.
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Setting method
On each setting screen, press value indicator , , or . The indicator frame
flashes in setting changeable status.
Use numeric keypad to enter a value. After that, press the ENT key to register
the value.
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5. EMERGENCY STOP/ALARM
If you need to stop operation immediately, press the emergency stop switch.
Pressing the emergency stop switch displays the following screen.
When the emergency stop switch is released (turn the switch clockwise to reset the
emergency stop switch), press the alarm release switch. After the alarm is released,
pressing the Reset switch returns the screen to the start screen.
If an error occurred in the unit, an alarm sounds and the following screen appears.
Alarm code
Check the alarm code, release the alarm, remove the cause of the alarm, and then turn
the power ON again. The alarm content includes the following four items.
Code
Name
Action
01
Positioning unit
alarm
02
03
Motor driver
overheat
04
Backup battery
error
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Parts lifetime
The table below shows the expected battery life for batteries used in the device.
Note that the controller, the backlight used for the touch panel and the actuator
batteries have a certain battery life. The value is influenced by usage conditions and
is only estimated.
Part name
Life expectancy
CPU battery
Approximately 20000h
About five years in a normal temperature environment (+25C).
About two years in a high temperature environment (+40C).
When batteries are replaced, operate the device for at least ten
minutes and then turn the power OFF.
Inspection items
This section explains daily and periodic check items for normal usage conditions.
Daily check
Are device requirements within the specification?
Is the main body or control box producing abnormal vibrations or sounds?
Is there a smell being emitted from the control box?
Is the main body or control box contaminated with foreign matter?
Has the connection section come off or become loose?
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Is the wiring cable between the main body and control box damaged?
Is there adhesive or dirt from a drug solution in the clip?
Is the power-supply voltage normal?
Periodic inspection (every three months)
Is the main body damaged?
Has the operation data been changed?
Is the controller battery still good?
Is the driving part of the main body generating unusual vibrations?
Is there abnormal vibration or fan noise inside the control box?
Is there damage to any wiring?
Are the clip springs broken?
Are any of the screws that hold the driving joints (DIP arm, etc.) loose?
Warning
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Manufacturer/General Distributor
SDI COMPANY.,LTD.
600-8815
Room417,No.6 BLD.KYOTO RESERCH PARK
Chudoji, Awata-cho 93, Shimogyo-ku, Kyoto, Japan
TEL +81-(0)75-323-0236
600-8815
FAX +81-(0)75-323-0237
http://www.sdicompany.com
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