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Abstract
Inspired from linear traveling wave ultrasonic motors, a dual piezoelectric beam robot is presented. It consists of an aluminum beam structure, with two non-collocated piezoelectric patches bonded on its surface. The aim of this article is
to study the effect of the piezoelectric patches positions on the performance of the robot. For a given robot dimension,
a finite element model developed in a previous work for the robot structure is verified experimentally here and then
used to determine the optimal piezoelectric patches position. It has been found that locating the piezoelectric patches
near the ends of the beam will lead to best performance, and that the traveling wave is mainly generated between the
two patches. Two prototypes have been manufactured for this aim and have shown good agreement with simulation
results.
Keywords
Piezoelectric, actuator, sensor, bio-inspired
Introduction
With the recent advancements in micro- and nanotechnology and the information technology, the need
has arisen for robots that can be easily miniaturized,
that is, without mechanical joints, screws, legs, and so
on, that have the ability to behave like swarms in biological systems and can serve in many applications by
changing the tools used. Such robots that respond to
these needs are still a challenge nowadays in the field of
micro-robot. An overview of locomotion principles for
piezoelectric miniature robots can be found in Hariri
et al. (2010), where many designs and mechanisms are
cited for piezoelectric miniature robots on a solid substrate (Bernard et al., 2011; Cimprich et al., 2006;
Ishihara et al., 1995; Simu and Jhansson, 2002; Son
et al., 2006; Uchino, 2006; Zesch et al., 1995). We are
interested in this research in the case where two piezoelectric transducers are used to generate propulsion. As
examples of propulsion system using two piezoelectric
transducers, we can find linear ultrasonic motor as in
Hernandez et al. (2010) and Smithmaitrie et al. (2012)
and ultrasonic transport system as in Jeong et al.
(2007), Kim et al. (2009), and Loh and Ro (2000). In
mini-robotics, Hariri et al. (2013) used two piezoelectric
patches to produce linear motion for a beam structure
without any contact pads, joints, or screws on it. Hariri
et al. (2013) were able to carry heavy weights up to 18 g
a brief presentation of the finite element model to modulate the robot structure. The influence of piezoelectric
patches positions on the performance of the robot is
studied and two prototypes at different piezoelectric
patches positions were fabricated and partially characterized for this aim.
Hariri et al.
Piezoelectric
patch
Piezoelectric
patch
(a)
(b)
(c)
Figure 1. A schematic figure for the dual piezoelectric beam robot: (a) vibratorabsorber, (b) vibratorvibrator, and (c) traveling
wave on the beam.
Figure 2. Geometric parameters, coordinate system, and description of the neutral axis.
bottom of the system according to the coordinate system adopted in Figure 2, and therefore
tm
sm
1 (z)dz + b
tm +
tp
tm
sp1 (z)dz = 0
1
d3 1
e 1 E E3
E
s11
s11
d31
d2
D3 = ep e1 + eep E3 = E e1 + es33 E31 E3
s11
s11
s1p = cp e1 ep E3 =
4
5
where cm and cp are the Young modulus for beam elastic material and piezoelectric patches, respectively; ep is
the piezoelectric constant; and eep is the piezoelectric
permittivity at constant strain. e1 is the strain in the x
direction and is defined by
e1 = x u1 = (z zn )2x w
cm (z zn )dz +
tm
+ tp
cp (z zn )dz = 0
tm
1 cm tm + cp tp + 2cp tp tm
2
cm t m + c p t p
tm
2
if x 2 to patches
if not
M
6
40
0
0
+
2
Kmm
6
K
4 vmp1
Kvmp2
3 2
32
i
C
0
U
76 7 6
0 54 E3p1 5 + 4 0
3p2
0
0
E
Kmvp1
Kmvp2
Kvvp1
Kvvp2
32
Ui
0
0
0
3
32
3
0
U_ i
76
7
0 54 E_ 3p1 5
0
E_ 3p2
2
Fi
76
7 6
7
54 E3p1 5 = 4 tp Qp1 5
E3p2
tp Qp2
10
where M, C, and Kmm are the mass, damping, and stiffness matrices, respectively; Kmv and Kvm are the piezoelectric coupling matrices; and Kvv is the dielectric
stiffness matrix. The mass and stiffness matrices
included all the geometric parameters and physical
properties of the system. Ui is the mechanical displacement at each node of the system, E3 is the piezoelectric
electric field. Fi is the mechanical load at each node and
Q is the electrical load. p1 and p2 denote piezoelectric
PZT (p)
rp = 7900
e33r = 1282
d31 = 21.3 3 10210
S11 = 1.3 3 10211
S12 = 24.76 3 10212
Emax = 300
smax = 600 3 106
32 3 17 3 0.27
24,126
cm = 69 3 109
y m = 0.33
rm = 2700
180 3 17 3 0.5
Hariri et al.
6
40
0
+
2
3 2
i
U
C
76 7 6
0 0 54 tp Qp1 5 + 4 0
p2
0
0 0
tp Q
0 0
32
Kmod
6
1
6 Kvvp1
Kvmp1
4
1
Kvvp2
Kvmp2
2
3
U_ i
76
7
0 54 tp Q_ p1 5
0
tp Q_ p2
0
0
1
Kmvp1 Kvvp1
1
Kmvp2 Kvvp2
1
Kvvp1
0
3
1
Kvvp2
ze = j(2p f )L + R
32
i
C
U
76 7 6 0
0 0 54 tp Qp1 5 + 4
0
p2
0 0
tp Q
0 0
Kmod
6
1
6 Kvvp1
Kvmp1
4
1
Kvvp2 Kvmp2
2
= 4 E3p1 (t) =
1
Kmvp1 Kvvp1
32
0
0
1
Kvvp1
1
Kvvp2
V
tp
U_ i
6 _ 7
0 7
54 tp Qp1 5
zt2e
tp Q_ p2
1
Kmvp2 Kvvp2
0
0
32
3
Ui
76
74 tp Qp1 7
5
5
tp Qp2
0
6 E3p1 (t) = V sin (2p ft) 7
=4
tp
5 12
E3p2 (t) = Vtp cos (2p ft)
32
32
3
Ui
76
74 tp Qp1 7
5
5
tp Qp2
11
13
1
1
Kmod = Kmm Kmvp1 Kvvp1
Kvmp1 Kmvp2 Kvvp2
Kvmp2 14
where ze is the electrical impedance for series RL circuit, f is the frequency of the applied sinusoidal voltage
of magnitude V, and Kmod is the modified stiffness of
the system.
Experimental validation
In order to validate the model, an aluminum cantilever
beam with two piezoelectric patches bonded on its surface is taken. The dual piezoelectric beam robot is free
at both ends; however, for measurement simplicity, a
clamped-free boundary condition is taken to validate
the model. The piezoelectric patches (NCE41) were
purchased from Noliac, Inc., Denmark, and they were
chosen as wrap around electrode (WAE) shapes to be
able to connect the two electrodes. The experimental
setup is presented in Figure 3. Geometric parameters
and properties for the piezoelectric ceramic material
(PZT, or lead zirconate titanate) and aluminum beam
used are given in Table 1.
14,134 (mm)
24,124 (mm)
34,114 (mm)
44,104 (mm)
54,94 (mm)
We begin the process of model validation by comparing the resonant frequencies of the model with the
experimental ones and then measure the transverse displacement of the beam and compare it with the model.
All measures are done using a high-resolution laser
interferometer LK-G3001PV Keyence France.
The model is verified experimentally by applying a
sinusoidal voltage of 20 V peak to peak at one
Hariri et al.
7
Table 3. Excitation frequencies at position 1.
1
2
3
4
5
fn (Hz)
fn+1 (Hz)
11
15
16
18
5337.8
9097.1
10,494
12,909
6241.2
10,494
11,795
14,246
5789.5
9795.5
11144.5
13577.5
Figure 8. Top view representation for a pure standing wave and a pure traveling wave on a beam.
Figures 7 and 9 to 12 by switching between two successive excitation frequencies. This result was demonstrated in Kim et al. (2009) for linear traveling wave
ultrasonic motors and in Hariri et al. (2012) for mobile
robots.
Hariri et al.
fn (Hz)
fn+1 (Hz)
fn (Hz)
fn+1 (Hz)
6
14
16
17
1579.3
7958.1
10,471
11,790
2184.6
9028.9
11,790
12,827
1882
8493.5
11130.5
12308.5
14
15
16
17
7960
8977.9
10,425
11,777
8977.9
10,425
11,777
12,765
8468.9
9701.6
11,101
12,271
10
fn (Hz)
fn+1 (Hz)
fn*(n+1)
= fexcitation (Hz)
fn (Hz)
fn+1 (Hz)
fn*(n+1)
= fexcitation (Hz)
14
15
16
17
7.9658e+003
8.9799e+003
1.0369e+004
1.1777e+004
8.9799e+003
1.0369e+004
1.1777e+004
1.2746e+004
8.4729e+003
9.6746e+003
11,073
12,261
7
14
15
16
2.1570e+003
7.9561e+003
9.0411e+003
1.0287e+004
2.7033e+003
9.0411e+003
1.0287e+004
1.1801e+004
2.4301e+003
8.4986e+003
9664.1
1.1044e+004
about electronics used in case of VV and VA operation principle can be found in Hariri et al. (2013).
Figure 14 shows the simulation results for the traveling
wave performance at positions 1 and 2 in both cases
(VV and VA).
The optimal RL shunt circuit has been calculated at
position 2 (R17 = 9.75 O, L17 = 9 mH) in the case of
VA operation principle in [14]. Following the same
methodology at position 1, the optimal RL circuit is
calculated (R16 = 23.75 O, L16 = 11.4 mH).
According to Figure 14, performances of waves
(transverse displacement and traveling wave ratio) can
be given in the descending order as follows: VV at
Hariri et al.
11
12
Figure 13. Mini-robot 1 and mini-robot 2 where PZT patches are located at positions 1 and 2.
Figure 14. Optimal traveling wave performance for both modes of operation at positions 1 and 2.
Hariri et al.
13
Funding
This research received no specific grant from any funding
agency in the public, commercial, or not-for-profit sectors.
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