Documente Academic
Documente Profesional
Documente Cultură
Setup Guide
May 2008
15 Centennial Drive
Peabody, MA 01960
(800) 542-9725
www.techmfg.com
Page i
Setup Guide
Vibration Isolation Systems
Content at a Glance
Introduction ................................................................ Section
Optical Tops, Breadboards, and Supports ................. Section
Laboratory Tables and TableTop Platforms ............... Section
Floor Platforms........................................................... Section
Service ...................................................................... Section
1
2
3
4
5
Page ii
Page iii
Table of Contents
TABLE OF CONTENTS
Page
1 Introduction ............................................................... 1
Safety............................................................................................. 1
System Air Supply Requirements .................................................. 2
Air Supply Filtering......................................................................... 3
Height Control Valves .................................................................... 3
Gimbal Piston Isolators .................................................................. 5
Improved Isolation Performance .............................................. 5
Design Differences................................................................... 5
Accessories ............................................................................31
Coupled Optical Tops .................................................................. 31
Introduction ............................................................................ 31
Safety ..................................................................................... 31
Preparation............................................................................. 33
Assembly and setup............................................................... 33
Troubleshooting ..................................................................... 40
Overhead Shelves ....................................................................... 41
Breadboard Levelers.................................................................... 42
Technical Manufacturing Corporation, Peabody, Massachusetts
Page iv
Table of Contents
TableTop Platforms..............................................................108
64 Series TableTop Platforms ................................................... 108
Introduction .......................................................................... 108
Setup Instructions ................................................................ 109
66 Series TableTop CSP ........................................................... 115
Introduction .......................................................................... 115
Setup Instructions ................................................................ 115
Page v
Table of Contents
4 Floor Platforms.......................................................117
65 Series Floor Platforms ....................................................118
Introduction ................................................................................ 118
Platform Installation ................................................................... 119
Quiet Island...........................................................................128
Quiet Island: Rigid-Damped Tripods.......................................... 128
Introduction .......................................................................... 128
Setup Procedure .................................................................. 128
Individual Rigid Stands......................................................... 130
Quiet Island: Sub-floor Platform & Stands ................................. 132
Introduction .......................................................................... 132
Sub-floor Inspection and Preparation................................... 134
Floor Stand Positioning Instructions..................................... 135
Rigid Platform and Stand Systems ...................................... 137
Platform Placement Instructions .......................................... 139
Adjusting Floor Stands ......................................................... 139
Small Platform Floor Stand Adjustments ............................. 140
Large Platform Floor Stand Adjustments ............................. 141
Checking Floor Stand Adjustments...................................... 141
Quiet Island: 67 Series with Gimbal Pistons .............................. 143
Introduction .......................................................................... 143
Floor Layout ......................................................................... 144
Isolator Assembly and Setup ............................................... 144
Final Stabilization ................................................................. 153
5 Service.................................................................... 155
Valve Replacement ..............................................................156
Replacement Instructions..................................................... 156
Page vi
Table of Contents
Page 7
1 Introduction
Introduction
Safety
Pinch Points
Caution should always be used when working with pneumatic isolators.
Floating a payload on pneumatic isolators may cause dangerous pinch
points.
Though care is taken to avoid designing pinch points, certain areas should
always be avoided (placing fingers in or under an inflated air piston for
example).
Each final table installation is unique. Your installed, populated table may
have pinch points created by your unique setup and the equipment being
supported.
Compressed Air
Tables are normally floated using compressed air from an air compressor,
nitrogen or air from a high-pressure cylinder. Compressed air can generate
large forces and should always be handled with great care. Your
compressor or cylinder may provide additional safety information.
Page 1
1 Introduction
Note
Most isolator systems are only partially loaded and can
operate with a supply pressure between 25 - 50 psi. The supply
pressure must be set at least 10 to 20 psi above the isolator
pressure to offset the pressure drop across the height control
valves and control flow orifices.
The actual pressure in the isolator is the pressure required to lift
the load.
( lift force = air pressure x effective area of the piston )
Page 2
1 Introduction
Page 3
Slave Isolator
1 Introduction
Page 4
1 Introduction
Design Differences
The visible difference is the load-bearing disc (load disk) that is supported
by each piston and shown in figure below. The difference internally is a
coupling, below the plane of the sealing diaphragm that permits horizontal
movements to be translated to a Gimbal-like rocking motion of the piston.
T a bl eT op
Load disk
Load pin
Piston
Clamp ring
Floating on air
above this point
Isolator post
Page 5
1 Introduction
Page 6
Optical Tops,
Breadboards, and
Supports
Contents at a Glance
Optical Tops & Breadboards ............................... 8
System 1 Modular Post-Mount Support ........... 11
Accessories......................................................... 31
Coupled Optical Tops .................................................................. 31
Overhead Shelves ....................................................................... 41
Breadboard Levelers.................................................................... 42
Earthquake Restraints ................................................................. 43
Laser Shelf................................................................................... 44
Page 7
Page 8
Unpacking Instructions
Remove optical top from receiving area or delivery truck.
Removing optical top will typically require a forklift.
Remove top, sides and ends of optical top crate exposing the top
on skid.
Lift skid with a fork lift centered on long side. The skid will bow
as crate is lifted.
Optical top
Skid
Fork lift tines
Optical top
Shim block
Skid bowing
Lower skid back onto ground. Optical top is sitting on shims over
skid as shown in figure below.
Optical top
Shim block
Fork lift tines
lowered to floor
Page 9
Lift optical top from skid using space between top and skid and
move to destination using fork lift if possible. Otherwise use
professional rigging techniques.
Optical top
Shim block
Skid
An optical top may be placed on its side. However, its load must
be supported by the top and bottom skins, not by the side-walls.
Note
Page 10
Gimbal Piston
Vibration Isolator
Post
Retractable Caster
Oversize Baseplate
Figure 1
Page 11
Installation Procedure
Tie-bar Installation
(Installation steps for systems equipped with tie-bars only.)
Systems are designed to optionally add a second row of tie-bars, one row
at the top and a second at the base for custom applications. Systems
equipped with tie-bars are typically supplied with one row for mounting
near the top of the posts.
Tie-bars longer than 40 inches: Systems requiring tie-bars longer than
40 inches achieve this length by joining two short tie-bars bolted end-toend with a spacer plate.
Hardware: 3/8-16 hex head bolts and matching nuts
Tools: 9/16 inch socket wrench
Step 1
be identical.
Systems with vibration isolator supports Three points
determine a plane. Three isolators are equipped with a
Height Control Valve (V) attached and are referenced as
Master Isolators (M). The remaining isolators do not have a
valve and referenced as Slave Isolators (S).
Page 12
Step 2
Part
Number
Code
Total Tie-bar
length in inches
Short tie-bar
combination
lengths in inches
15
n/a
20
n/a
30
n/a
40
n/a
50
20 + 30
60
30 + 30
70
40 + 30
26
n/a
35
n/a
Page 13
Rigid Support
Optical Table
Piston
Isolator
Alignment spacer
for tie bar sets
Tiebar
3/8-16 hardware
Page 14
Air Input
Adapter
1/8 NPT Male to
1/4 NPT Female
Straight Connector
1/8 NPT Thread
1/4 OD Tubing
Symbol key
Page 15
Connecting tube
Insert the air tube firmly into the self
sealing fitting as shown in figure below.
Disconnecting tube
Page 16
Connecting
Red Ring
(Orifice inside tubing)
Red Cylinder
Disconnecting
Pull red ring out
Orifices
Important
Page 17
TableTop Placement
Step 3
Step 4
Step 6
Page 18
Step 7
Foam pad
Step 8
Brass spacer
Step 9
Step 10
Step 11
Page 19
TableTop
Foam pad
with silver colored base
Horizontal Lever
Arm Screw (red)
Horizontal
Lever arm
Pivot bracket
CCW = Higher
Brass spacer
Locking nut
Knurled nut
Air supply
Pressure gauge
attachment port
(as required)
To Isolator Piston
Step 13
Step 14
Page 20
Turn on the main air supply and set to 60-80 psi max.
After a short delay, all the load disks should lift away from
the clamp rings and the tabletop will then be floating.
Step 16
Check to see that the top of the piston and the top surface of
the clamp ring are parallel as shown in figure below.
Sliding or tapping load disk towards the low spot of the
piston will correct any tilt.
T a bl eT op
Load disk
Piston
Clamp ring
Isolator post
Page 21
Step 17
Page 22
Step 1
Step 3
Hole to adjust
jack screw
Step 2
Step 3
Page 23
Baseplates Installation
System 1 frames can be configured with freestanding posts as an
alternative to having tie-bars. This requires an external baseplate on each
post. Some model system configurations may already have baseplates
installed as shown in figure 1 earlier in this section.
For systems that require baseplate installation proceed with either of the
following procedures as appropriate.
Base plate
Step 2
Figure 14
Baseplate clips
Page 24
Step 3
Position baseplate over post and screw button head capscrews through baseplate into clips.
Ensure the counter-bored side of plate faces the floor.
Step 2
Place the baseplate over the leg and attach using the
hardware provided.
Ensure the counter-bored side of plate faces the floor.
Page 25
Figure 15
Step 2
Page 26
Step 3
Post
Right angle
bracket
Important
Page 27
Adjuster block
Shaft
Split ring
Step 3
Step 4
Fasten shaft with split ring and secure using a flat end
screwdriver.
Page 28
Step 5
Step 6
Three points determine a level plane. All systems have only three support
modules with Height Control Valves regardless of the total number of
support modules.
Page 29
Upgrade Instructions
Step 1
Step 2
Loosen the set screws from inside plate and lift out Rigid
Support module. Reference figure 19.
Step 3
Step 4
Step 5
Step 6
Page 30
Accessories
Coupled Optical Tops
Introduction
TableTops can be coupled end-to-end or joined in L or T shape
configurations. They also can be configured with two working heights by
coupling tables with different thickness.
Safety
Ensure all safety procedures for the proper use of hand tools and
power lifting equipment are used.
Page 31
Gantry crane
(rated capacity greater than gross load)
Lifting hoist
(as required to assemble the Gantry crane at work site)
TMC provided slotted 0.030 inch thick x 2 inch wide x 7 inch long
backing shim
Lock-tight (tube)
Page 32
Preparation
Unloading and uncrating optical tables and support posts.
When the equipment arrives the optical tops and associated crates
will require a staging area (loading dock) or other area in which to
unload the truck. This will often require a forklift.
The crates will most likely arrive laying flat on the truck. To
safely unload them, it will be necessary to lift them from the
bottom using a fork lift or similar device (pallet jack dock
mules).
Uncrate the optical tops and support posts in accordance with the
un-packaging instructions on the crate.
Lift and move the optical top to the installation location. It may be
necessary to lift and rotate the optical table to its side position
using a Gantry and hoist.
Figure 2
Page 33
Step 2
Step 3
Step 4
Step 5
Step 6
Step 7
Step 8
Lift and move the second top and position it just above the
isolators/posts as shown in figure 3 below using the Gantry.
Step 9
Step 10
Page 34
Floor
Dowel hole
Dowel pin
Optical Top
Joiner plate-A
Joiner plate-B
Page 35
Step 12
Slowly ratchet the two tops together while ensuring that the
tops remain co-planar and level with respect to one another
as referenced in figure 3 above.
The dowel pins and holes referenced in figure 4 insert will
mate as tops come together.
Ensure that the honeycomb connectors (nuts) do not jam
against the corresponding joiner plate threaded holes.
Step 13
Page 36
Slotted shim,
2 inches square, .030 inches thick,
5/8 inch cut-out slot
Joiner plate-B
.030 inch thick shim
Ensure a .030 inch gap
1/3 turn
(120 degrees)
1/4 inch thick wrench
Honeycomb
connector
Milled out area in
joiner plate-A
Step 14
Page 37
Step 15
Using the shim tool and wrench shown in figure above, start
from the left side of the optical top and turn each
honeycomb connector in consecutive order only 1/3 turn or
2 flats at a time, moving in a clockwise direction completely
around the top.
.
If one or more of the honeycomb
connectors becomes jammed, then stop and
loosen all connectors and start over.
Important
Step 16
Step 17
Step 18
Page 38
Step 19
Page 39
Troubleshooting
If a connector becomes jammed during the installation process, then
proceed as follows.
Once the optical tops are separated, remove and discard the
damaged 7/1620 cap screws.
Discard any honeycomb connectors that have been deformed.
Page 40
Accessory
Overhead Shelves
The overhead shelf is a free standing storage rack that spans the long axis
of the optical table for equipment and instrumentation.
The shelf is adjustable in height. The 6 foot shelf includes an electrical
strip with (2) eight grounded outlet strips and the 8 & 10 foot shelves
include (4) eight grounded outlets
Optional accessories include a second tier or a hanging monitor shelf.
Each shelf includes 2 rows of holes with 2 inch spacing to facilitate
mounting of fixtures
Electrical outlet box
Hanging
monitor shelf
Page 41
Accessory
Breadboard Levelers
Levelers can be applied to 2 inch thick breadboards with 1/8 or 3/16 inch
skins.
The leveler consists of a threaded sleeve bonded onto the top, a bushing
leveler, and a locknut. An M6 or 1/4-20 bolt may be used to fasten the
breadboard to another top. The lever is adjusted and locked with an Allen
wrench.
Breadboard
TableTop
Page 42
Accessory
Earthquake Restraints
Top Restraint Bracket - Bracket attaches to the underside of tabletop
encircling upper tie-bar as shown in figure below. On new table orders,
the top can be supplied with mounting holes. To retrofit tables without
mounting holes, contact TMC for recommendations.
Floor Restraint Bracket Bracket encircles the lower tie-bar close to the
support posts and bolts to the floor as shown in figure below.
Upper tiebar
Page 43
Accessory
Laser Shelf
The laser shelf can be fitted to tables larger than 36 x 72 inches and
supported at least 18 inches above the floor.
The shelf consists of an additional un-drilled 2 inch thick breadboard
attached to the bottom plate of the table.
Laser port
Mounting bracket
Laser shelf
Page 44
Page 45
Laboratory Tables
63-500 Series High-Performance Lab Tables
Sliding Shelf
(optional)
Arm Rests
(optional)
Introduction
The 63-500 Series Laboratory Tables employ Gimbal Piston Isolators that
require a continuous supply of compressed air or nitrogen to operate
properly. For a complete discussion of the air supply requirements, see
System Air Supply Requirements in introduction section of this document.
Tools Required
Utility Knife
Page 46
Red Cylinder
Air Input
Adapter
1/8 NPT Male to
1/4 NPT Female
Straight Connector
1/8 NPT Thread
1/4 OD Tubing
fitting.
Push the red cylinder with your thumb
and forefinger toward the center of the fitting body while
pulling the tube in the opposite direction.
Disconnecting
Symbol key
Figure 3 Valve schematic for a 4-isolator system
Page 47
Important
Step 3
Leg Section
Leveling foot
Leveling Wrench
Page 48
Step 4
Caution
The tabletops weigh approximately
275-300 pounds. Take proper precautions.
Page 49
Step 6
Step 7
Foam pad
Step 8
Step 9
Locking nut
Step 7
Brass spacer
Step 9
Page 50
Step 10
Step 11
TableTop
Foam Pad
with silver colored base
Horizontal Lever
Arm Screw (red)
Horizontal
Lever Arm
Pivot Bracket
CCW = Higher
Brass spacer
Locking nut
Knurled nut
Air supply
Pressure gauge
attachment port
To Isolator Piston
Step 14
Page 51
Turn on the main air supply and set to 60-80 psi max.
After a short delay, all the load disks should lift away from
the clamp rings and the tabletop will then be floating.
Step 16
T a bl eT op
Load disk
Piston
Clamp ring
Isolator post
Page 52
Step 17
Page 53
Troubleshooting Tips
Table Not Floating Properly
If slave piston is too high or too low, adjust HEIGHT ADJUSTMENT screw for
master valve controlling it to raise the piston.
Also, for piston diagonally opposite, slightly adjust the HEIGHT
ADJUSTMENT screw in the opposite direction.
Instability
If table oscillates uncontrollably, turn off air supply and contact TMC.
This problem is due to a combination of high mass and high center of
gravity and can be corrected.
Poor Isolation
To optimize isolation, ensure that tabletop is free to move vertically and
horizontally. Check section Installing and Leveling TableTop earlier in
this procedure.
Pistons Completely Down
If isolators do not rise from the down position, then the leveling valves are
not adjusted correctly or the air supply pressure is insufficient.
Pistons Completely Up
If an isolator cannot be lowered from the up position, the leveling valves
are not adjusted correctly or the system is not plumbed correctly.
Reference air supply diagram at the beginning of this procedure, Air
Supply Plumbing and Valve Setup Instructions.
Page 54
Accessories
Faraday Cages
Introduction
The Faraday Cage is available in two types of configurations.
Faraday Cage
Hanging shelf
Sliding shelf
Arm rests
Perimeter Enclosure
BenchTop model
Page 55
Assembly Instructions
Tools Required:
Hardware Provided
Page 56
Front panel
Top panel
Rear panel
Release lever
Page 57
Step 2
Insert first side panel vertical edge into the front panel
vertical side cavity as shown below.
Side panel
Front panel vertical cavity
Page 58
Step 4
Step 5
Small
Large
Step 6
Attach second side panel in the same way as the first, hold
panel in position and loosely fasten with a 10-32 x 1 inch
screw in side panel top hole location only.
Page 59
Step 7
Step 8
Place the rear panel between the two side panels. Loosely
fasten rear vertical edge of each side panel against rear
panel with one 6 x 1 inch screw.
Step 9
Snap two small size hold down clips evenly spaced along
the bottom of rear panel the same as shown in figure 6
above for side panels.
In this step only the smaller clips are used regardless of the
size of the perimeter enclosure.
Step 10
Place the top panel over the two side panels and slide panel
into the top front panel cavity area and evenly align edges
with side panels.
Top panel
Front panel
cavity area
Side panel
Step 11
Page 60
Step 12
Step 13
Step 14
Page 61
Faraday Cage
Step 2
Page 62
Suspension bracket
Shelf
Faraday cage
Page 63
Step 2
Step 3
Step 4
Step 5
Step 6
Page 64
Accessory
Top Shelf
Power strip
Front horizontal
support bar
Keyboard shelf
Page 65
Assembly Instructions
Basic System
Step 1
Install one Post Wrap Clamp-1 and one Post Wrap Clamp-2
on each isolator leg using the following hardware.
3/8-16 x 1/2 inch socket head cap screws (4)
1/4-20 x 7/8 inch button head cap screws (2)
1/4-20 hex nuts (2)
Installation of the 1/4-20 screws will be easier if the 3/8-16
screws are left initially loose. Then tightened after the
1/4-20 screws and nuts are tightened.
Page 66
Step 2
Horizontal
Side Rail
Upright
Angle
Perimeter Enclosure Clip
Step 3
Page 67
Upright Angle
View looking down
Step 4
Upper Rear
Horizontal Rail
Upper Rear
Horizontal Side Rail
Page 68
Step 5
Install top shelf by sliding its rear edge into position from
the front of the SpaceSaver frame, then lowering the front
edges onto the support flanges of the upper side horizontal
rails once they clear the front upright angles.
Line up the holes in the top shelf with the holes in the
support flanges of the upper side horizontal rails.
Secure the top shelf using the following hardware.
Important
If the optional Power Strip Kit
(Catalog No. 81-344-01) is being installed. the
Power Strip should be mounted on the lower
rear horizontal rail prior to installation of the
lower rear horizontal rail detailed in the
following step.
Page 69
Step 6
Note
When determining the proper height of the lower
rear horizontal rail, consideration should be given to the
desired mounting height of optional accessories (Monitor
Arm, Rear Support Bar, Sliding Shelf) to avoid subsequent
interference.
Horizontal Rail
with lip facing up
Page 70
Support bar
Nut plate
Support bar clip
Step 2
Page 71
Protruding lip
Nut Plate
Loosen the 3/816 x 1/2 inch cap screws and then slide the
nut plates to the ends of the front support bar.
Step 3
Step 4
Tighten the 3/8-16 x 1/2 inch cap screws that were installed
in Step 2 above.
Page 72
Insert (2) nut plates in the slot on the underside of the front
support bar. Position the nut plates such that one tapped
hole in each nut plate aligns with one hole in the
keyboard shelf.
Step 2
Insert a 3/8-16 x 3/4 inch socket head cap screw with 3/8
inch SAE flat washer through each hole in the keyboard
shelf and thread into the nut plate. without tightening.
Step 3
Keyboard Shelf
Nut Plate
Support Bar
Page 73
Step 2
Step 3
Step 4
the
metal
and
plastic
washers
over
the
Insert the screw through the hole in the center of the base plate
and monitor bracket, and secure with the self-locking nut.
Step 5
Page 74
Insert (1) 6-32 x 1/2 inch pan head screw through the hole
in each of the two clips supplied with the power strip.
Step 2
Insert the screws with clips through the desired set of holes
in the rear horizontal rail and fasten with 6-32 hex nuts.
Step 3
Step 4
Slide the power strip along until both clips are engaged with
the slots on the power strip as shown in figure below.
Mounting clip
Lower rear
Horizontal rail
Power Strip
Step 5
Page 75
Page 76
Page 77
Qty
4
2
2
4
4
1
Hardware Kit
1/4-20 x 5/8 inch Button Head Cap Screws
1/4-20 x 7/8 inch Button Head Cap Screws
1/4-20 x 1-1/4 inch Button Head Cap Screws
3/8-16 x 1/2 inch Socket Head Cap Screws
1/4-20 Hex Nuts
20
24
4
16
48
4
2
1
6
1
1
2
* Requires Support Bar Kit (Cat. No. 81-346-01) when used with SpaceSaver
Overhead Rack System
** These items not used with SpaceSaver Overhead Rack System
4
2
1
6
1
1
2
* Requires Support Bar Kit (Cat. No. 81-346-01) when used with SpaceSaver
Overhead Rack System
** These items not used with SpaceSaver Overhead Rack System
Page 78
2
2
4
4
* A Support Bar Kit is required for each support bar (one for the front, one for
the rear) when used with SpaceSaver Overhead Rack System
Hardware Kit
3/8-16 x 3/4 inch Socket Head Cap Screws
3/8 inch SAE Flat Washer
Nut Plate
2
2
2
1
1
Hardware Kit
1/4-20 x 5/8 inch Button Head Cap Screws
1/4 -20 Hex Nuts
3/8-16 x 1-1/4 inch Socket Head Cap Screw
4
4
1
Hardware Kit
6-32 x 1/2 inch Pan Head Screws
6-32 Hex Nuts
6-32 x 3/4 inch Pan Head Screws*
#6 Flat Washers*
2
2
2
6
* These parts may not be required. The power strip is factory installed on the
rear horizontal rail if it is ordered with SpaceSaver.
When ordered separately, required mounting hardware is supplied.
2
2
8
8
Page 79
Accessory
Support Bars
Attach support bar brackets loosely to the support bar as shown in figure
below and also referenced in figure 12 earlier.
Attach the support bar brackets to the top inside face of the isolator posts
and then tighten all bolts.
Shelf
Armrest pad
Shelf clip
Groove
TableTop
Support bar bracket
Support bar spacers (3)
Isolator post
Page 80
Accessory
Sliding Shelves
Shelves are mounted by attaching shelf clip as shown in figure 26 above.
The clip rests in a groove in the front bar. The rear end of the shelf rests on
the rear support bar.
Accessory
Perimeter Enclosure
Lower perimeter enclosure over the table top onto the attached
brackets.
Perimeter enclosure
Platform
Perimeter
Enclosure
Bracket
Isolator post
Page 81
Accessory
Casters
Casters are shipped attached to the base of the isolator legs.
To engage or disengage the caster, simply rotate the caster HEIGHT ADJUST
screw with a 3/4 inch wrench as referenced in figure below.
When not in use, the caster should be retracted for optimum isolation
performance.
Height Adjust
screw
Figure
Page 82
Casters
Page 83
The casters are the same type used on System 1 posts (6 x 6 inch
posts).
Page 84
Page 85
WARNINGS
Power Supply
The PEPS / PEPSVX controller does not use a universal power supply.
Country voltage setting The power entry module must be configured
for your countrys voltage as follows.
Remove the fuse access panel (Figure 10) on the PEPS controller.
Remove the small voltage selection card from the module.
Rotate the nylon tab to the correct voltage setting.
Re-insert the card into the power entry module.
Replace the cover. The nylon pin should protrude through a hole
in the cover labeled with your countrys voltage.
Important The unit is rated for 100, 115, or 230 Volt operation.
The 240 Volt setting should never be used. If you are in a country using
115 Volts, select the 120 Volt setting. Failure to properly configure the
input power module can result in permanent damage to the unit.
Power Cord Use only a UL/CSA/VDE marked mains power cord with
the PEPS controller. The power cord should have at least 0.75mm2 wire
(18 AWG), and include a PE ground. The cord should comply with all
local, regional and national standards for the country where the system is
to be used.
Controller Usage
The controller and its components are only to be used for its intended
purposes described in this manual. Any other usage could jeopardize
operator safety and cause possible injury.
Pneumatic Isolators
Great care should always be used when dealing with pneumatic isolators.
Floating a payload on pneumatic isolators can generate many pinch points.
One such pinch point is between the top of the fixed portion of the isolator,
and the bottom of the load disk supporting the payload (see Figure 11).
Page 86
Step 1
Step 2
Page 87
Step 3
Proximity
Sensor
connector
AC Power
Switch
1/4 inch
OD Tubing
Page 88
Isolator leg
Velocity sensors
mounted under
tabletop
Front
Air supply
Air regulator
adjustment
Waste Air
0utput
Proximity sensor
connector
Velocity sensor
Inputs VS1, VS2, VS3
Figure 5
Page 89
Step 4
Regulator Pressure
15psi (100 kPa) or greater above
the highest expected leg pressure.
Air supply
Adapter
1/4 NPT Male to
1/8 NPT Female
Straight Connector
1/8 NPT Thread
Page 90
Step 5
Piston assembly
Isolator
top plate
Alignment hole
Aluminum
piston ring
Alignment hole
Top View
Page 91
Step 6
Piston
assembly
VC3
VC2
VC1
Front view
VC1
VC3
Front
Sensor cables
Figure 9 Attaching velocity sensors
Page 92
Step 8
ENGAGED
(green LED)
AIR INPUT
from regulator
AUX IN-OUT
DB-25 connector
WASTE AIR
output
Fuse panel and main
voltage selection
ZEROING ON/
ENGAGED
(green LED)
ISOLATOR 1
output to leg 1
PROXIMITY SENSORS
green input connector
AC Power
ISOLATOR 2
output to leg 2
Out of Range
adjust
AC Power switch
RANGE OK
Out of Range/
(yellow/amber LED)
ISOLATOR 3 & 4
output to legs 3 & 4
Figure 10
PEPS/PEPS-VX Controller
Page 93
Step 9
Leveling Screw-A
Adjustments
Center piston assembly over leg by
adjusting each screw as little as possible any one time.
Continue to rotate around table slightly adjusting each leg
until all have been optimized.
Page 94
Step 10
Step 11
Good
ON
Good
Step 12
Page 95
Troubleshooting
Problem: My system doesn't float.
Check power
Set DIP switch #5 to ON (right position)
ZEROING ON LED: ON indicates
power is okay.
Set DIP switch #5 to OFF (left position)
once power status is determined.
Air lines:
Ensure air lines are
correctly connected, dont have any
kinks or pinched restricting air flow.
Page 96
> 1.5m
(H + 0.18m)
where W is the center-to-center distance between the isolators and H is the
height of the center-of-mass. Borderline systems tend to behave poorly.
Some systems which are stable with mechanical height control valves may
be unstable with PEPS. Mechanical valves act like springs which can help
stabilize a system (but also degrade the vibration isolation). Removing the
internal orifices also tends to make isolators softer, improving
performance, but making the system less tilt stable. PEPS cannot make a
mechanically unstable system stable.
Solutions to this problem include the following:
Lowering the center-of-gravity of the system
Increasing the separation between the isolators
Reconfiguring the system so the master/slave legs (legs 3\&4) are
along the long edge of the payload
Barometric pressure
Changes in barometric pressure can also
cause noise on a payload since the sealed chambers of the isolators
make them act like barometers.
Page 97
Positioning noise
The table can see excess positioning noise.
These sources of noise are not controllable by PEPS, and must be
addressed at the source. The specification for PEPS was determined
in a sealed room with no air circulation system running.
Pitch and roll gains Increase the pitch and roll gains until they are
as high as they can be without the system oscillating. Though this
does hurt the tilt vibration transfer, tilt noise is normally very low in
most environments.
Page 98
Page 99
(integrators OFF)
Switch 5 = OFF
Page 100
Set Integrators ON
Set switch 4 to the OFF position. The float height may change a little,
and final adjustments can be made to the sensors.
Switch 4 = OFF (integrators ON)
Switch 5 = OFF
Leveling time The time required for the payload to return to level
after a disturbance.
Set oscilloscope
Vertical direction............ v/div
Horizontal direction ....... 0.5 s/div.
Figure 12 below shows examples of the impulse response for
different gain settings.
Page 101
Press down lightly on the center of the payload, and you should see
a response on the scope.
Turn the gain down until the response looks like the left-hand curve
in Figure 12 below.
Page 102
Page 103
Page 104
The size of the window can be adjusted with the OUT OF RANGE
adjust (Figure 10).
Page 105
Environmental
For indoor use only, up to an elevation of ...................................................2,000m (6560ft.)
Temperature range............................................................................................. 5C to 40C
Humidity range ....... 80% up to 31C, decreasing linearly to 50% relative humidity at 40C
Tolerance in mains supply voltage .............................................. +/-10% of nominal voltage
Installation Category........................................................................................................... II
Pollution Degree .................................................................................................................. 2
Pins
Height Feed-Forward Input
Roll Feed-Forward Input
Pitch Feed-Forward Input
Height Analog Output
Roll Analog Output
Pitch Analog Output
Prox. Sensor (1) Output
Prox. Sensor (2) Output
Prox. Sensor (3) Output
Out of Range Logic Out
Out of Range Voltage TP
+15 EXT. Power Input (750mA max.)
-15 EXT. Power Input (100mA max.)
14)
15)
16)
17)
18)
19)
20)
21)
22)
23)
24)
25)
Page 106
Environmental
For indoor use only, up to an elevation of .................................................. 2,000m (6560ft.)
Temperature range.............................................................................................5C to 40C
Humidity range ........................................................ 80% up to 31C, decreasing linearly to
............................................................................................... 50% relative humidity at 40C
Installation Category........................................................................................................... II
Pollution Degree ..................................................................................................................2
Pin
Height Feed-Forward Input
Roll Feed-Forward Input
Pitch Feed-Forward Input
Height Analog Output
Roll Analog Output
Pitch Analog Output
Proximity Sensor (1) Output
Proximity Sensor (2) Output
Proximity Sensor (3) Output
Out of Range Logic Out
Out of Range Voltage TP
+15 Ext. Power Input (750mA max.)
-15 Ext. Power Input (100mA max.)
14)
15)
16)
17)
18)
19)
20)
21)
22)
23)
24)
25)
Page 107
TableTop Platforms
64 Series TableTop Platforms
Introduction
The 64 Series TableTop Platforms employ Gimbal Piston Isolators and
require a continuous supply of compressed air or nitrogen to operate
properly. For a complete discussion of the air supply requirements, see
System Air Supply Requirements in introduction section of this document.
Page 108
Setup Instructions
Tools Required
Utility knife
Flat screwdriver
1/2 inch wrench
Step 1
Note
Step 2
Caution
This may require several people as
the tops are relatively heavy.
Granite and
honey-comb tops weigh 105 to 155 lbs.
The
stainless steel laminate tops weigh 250 to
280 lbs.
Clamp housing
cover
TableTop
Clamp housing
Load disk
Isolator
Spacer blocks
Lab Bench
Retaining screw
Page 109
Step 3
Step 4
Isolator
Height Control Valve
4 way air supply splitter
3 Isolator System
Air Filter
4 Isolator System
Page 110
Step 8
Step 9
Foam pad
Step 10
Step 11
Page 111
Foam pad
Load disk scribe mark
Alignment hole alignment hole
Foam pad
Isolator in housing
Height Adjust hole
housing
Isolator
Step 14
Step 15
Step 16
Page 112
Clamp housing
Load disk
Piston
Clamp ring
Isolator post
Step 18
Step 19
Page 113
TableTop
Magnetic Strip
Isolator
Lab Table
Page 114
Introduction
The 66 Series TableTops require a continuous supply of compressed air or
Nitrogen to operate properly. For a complete discussion of the air supply
requirements, see System Air Supply Requirements in introduction section
of this document.
Setup Instructions
Tools Required: Utility knife, 6 inch scale
Step 1
Step 2
Step 3
Page 115
Step 4
Step 5
Step 6
Thumb Wheel
Page 116
4 Floor Platforms
Floor Platforms
Contents at a Glance
65 Series Floor Platforms ................................ 118
Quiet Island ....................................................... 128
Quiet Island Rigid-Damped Tripods........................................... 128
Quiet Island Sub-floor Platforms & Stands ................................ 132
Quiet Island 67 Series with Gimbal Pistons ............................... 143
Page 117
4 Floor Platforms
Introduction
65 Series Floor Platforms provide extremely efficient vibration isolation of
low frequency vertical and horizontal floor vibration.
Most floor platforms employ Gimbal Piston Isolators that require a
continuous supply of compressed air or nitrogen to operate properly. For
a complete discussion of the air supply requirements, see System Air
Supply Requirements in introduction section of this document.
Tools Required
Utility Knife
Page 118
4 Floor Platforms
Platform Installation
Step 1
Step 3
Step 4
Lifthood
Platform
Figure 2 Lifthoods
Page 119
4 Floor Platforms
Step 5
Load disk
Height
Adjustment Valve
Isolator
Lifthood
Step 6
Load disk
Page 120
4 Floor Platforms
Air Input
Adapter
1/8 NPT Male to
1/4 NPT Female
Straight Connector
1/8 NPT Thread
1/4 OD Tubing
Symbol key
Page 121
4 Floor Platforms
Disconnecting
Push the red cylinder with your thumb
and forefinger toward the center of the fitting body while
pulling the tube in the opposite direction as shown in figure
below.
Connecting
Red Ring
(Orifice inside tubing)
Red Cylinder
Disconnecting
Pull red ring out
Page 122
4 Floor Platforms
Orifices
Important
Step 10
Step 11
Foam pad
Step 12
Step 13
Insert lever arm over
valve with Lever Arm
screw centered over
brass spacer
Brass spacer
Page 123
4 Floor Platforms
Step 12
Step 13
Step 14
Step 15
Lifthood
Foam pad
with silver colored base
Isolator Height Adjust
Horizontal
Lever arm
CCW = Higher
Horizontal Lever
Arm Screw (red)
Pivot bracket
Brass spacer
Locking nut
Knurled nut
Air supply
Pressure gauge
attachment port
To Isolator Piston
Page 124
4 Floor Platforms
Step 17
Step 18
Turn on the main air supply and set to 60-80 psi max.
After a short delay, all the load disks should lift away from
the clamp rings and the platform will float. The spacer
blocks should be free to remove.
If spacer blocks are not free, continue to adjust each
ISOLATOR HEIGHT ADJUST screw CCW an equal number of
Step 21
Check to see that the top of the piston and the top surface of
the clamp ring are parallel as shown below.
Sliding or tapping load disk towards the low spot of the
piston will correct any tilt of the piston.
L i f t h o od
Load disk
Piston
Clamp ring
Isolator post
Page 125
4 Floor Platforms
Step 22
Page 126
4 Floor Platforms
Step 24
Step 25
Page 127
4 Floor Platforms
Quiet Island
Quiet Island: Rigid-Damped Tripods
Introduction
The rigid-damped tripod is designed to bridge the space from a cleanroom
sub-floor to a tool foot at the height of the raised floor with a rigid, nonresonant, damped structure. Provisions are designed in to allow for subfloor attachment, tool attachment and clearance of sub-floor holes as well
as utilities.
Setup Procedure
Step 1
Page 128
4 Floor Platforms
Step 2
Adjust the 5/8-11 x 3 inch socket set screws at the three feet
of the tripod to bring the top, square surface of the tripod
flush with the raised floor.
The tripod has a 1 inch vertical travel range using an
Allen key.
Step 3
Step 4
Page 129
4 Floor Platforms
Raised floor
Support post
Leveling screw
Hoop filled with grout
Main floor
Raised floor
Support post
Leveling screw
Hoop filled with grout
Main floor
Page 130
4 Floor Platforms
8 - 12 inches
Raised floor
Tripod
Leveling screw
Hoop filled with grout
Main floor
12 inches
Raised floor
Tripod
Leveling
Hoop filled with grout
Main floor
Page 131
4 Floor Platforms
Introduction
Support platforms
Platform is made in a wide range of sizes to suit most equipment that is
best mounted on solid "tool pedestals" rather than on the raised cleanroom
floor.
Platforms might be used for vibration control or load support reasons.
Common platform thicknesses:
Jack Stands
A range of robust, adjustable jack stands are made to suit various raised
floor heights. Most stands are 8 inches square post type with baseplates
for shorter floor heights, or tripod type with greater lateral stability for
higher floors.
These instructions cover the general case of most simple platform setups
with a regular array of support stands.
Page 132
4 Floor Platforms
Platform
Tripod
Bonding hoop
Pour liquid grout or
epoxy gel into hoop
Floor
Platform
Restraint Plate
(attach last)
Bonding hoop
Pour liquid grout or
epoxy gel into hoop
Temporarily tape
hoop to the floor
Floor
Page 133
4 Floor Platforms
Stability
Best overall stability of the support system, and least amplification of
vibration and structural modes, depends on a solid contact to the sub-floor
under any baseplates or tripod feet.
It is recommended for all sensitive equipment installations, that a hardsetting grout be used under the baseplates of all support stands. A liquid
type of grout may be poured into bonding hoops that surround each baseplate; or a thicker, gel type of epoxy grout may be put on the floor and the
stand set on it.
Grout is only used for void filling and to give uniformity of support under
the base. Anchoring the stands to the floor with bolts is more for security
than for vibration control if the stands are grouted in places. When grout is
used it should be allowed to cure undisturbed before tightening the anchor
bolts.
Tools Required
Excluding rigging equipment or anchor bolts.
Check the surface of the concrete to make sure there are no breaks
or irregularities in the areas where the stands will be seated.
Again, inspect the surface and tap around in the area of contact to
make sure there are no hidden voids or lumps under the floor
covering.
Local areas should be cut away if there is a sub-surface problem.
Page 134
4 Floor Platforms
Step 2
Step 3
Step 4
Step 5
Step 6
Step 7
Place anchor bolts into the floor for attaching the floor
stands.
You may also wait until the floor stand locations have been
grouted before placing anchor bolts in the floor.
Page 135
Step 8
Step 9
4 Floor Platforms
Add grout into the center of the hoop at each of the floor
stand footplate locations as follows.
Page 136
4 Floor Platforms
Platform
Rigid Quad
Stand
Leveling post
Main floor
Platform
Rigid Quad
Stand
Main floor
Page 137
4 Floor Platforms
Raised floor
Platform
Rigid Quad
Stand
Tripod
Leveling
Stand
Main floor
Page 138
4 Floor Platforms
Step 2
Step 3
Step 4
Page 139
4 Floor Platforms
Turn down the jack screw of any floor stand support near
the center of the platform so that it will not interfere with
primary leveling.
Step 2
Step 3
Step 4
Fine adjust the 4th stand and any center stands according to
the Fine Adjustment Steps listed in Checking Floor Stand
Adjustments below.
Page 140
4 Floor Platforms
Step 2
Step 3
Step 4
The platform tops are stiff enough that once the floor stands are
uniformly adjusted, any one of the stands can be released rather
easily and abruptly.
This should be done as a test of adjustment, preferably for all of
the floor stands that were not the first primary 3 stands adjusted.
As a floor stand is rechecked by the release-and-re-tighten method
it may be locked securely.
Page 141
4 Floor Platforms
Page 142
4 Floor Platforms
Caution Ensure that the raised floor is rated for the load of
the platform top and counter weight as they are transported to
the site.
Platform top
Raised floor
Tiebars
Counterweight
Base plate grouted to floor
Isolator
Counter weight
corner supports
Support Post
Main floor
Page 143
Isolator
4 Floor Platforms
Tiebar
Isolation platform
(Raised floor is
shown transparent
for illustration only)
Counterweight
Counter weight
corner support
Raised floor area
Floor Layout
Follow the system drawing and place the isolator frame or individual
mounts in position in the floor, taking care to note locations of control
valves if indicated.
The counterweight may be pre-assembled to the platform if it is not too
large to handle, or it may be placed in the floor on spacer blocks and
the platform lowered onto it.
Take note of any special orientations of the platform top and
counterweight, as the counterweight may be off-set from center if it is
also used to counter a significantly offset equipment payload.
Step 2
Step 3
Page 144
4 Floor Platforms
Air Input
Adapter
1/8 NPT Male to
1/4 NPT Female
Straight Connector
1/8 NPT Thread
1/4 OD Tubing
Symbol key
Page 145
4 Floor Platforms
Page 146
4 Floor Platforms
Fitting Body
Red Ring
(Orifice inside tubing)
Red Cylinder
Orifices
Important
Page 147
4 Floor Platforms
Step 7
Step 8
Step 9
Align the top bolt holes in the hangers to the holes in the top
and loosely assemble them with the 5/8-11 bolt hardware
supplied.
Step 10
Step 11
Note
drawing.
Step 12
Page 148
4 Floor Platforms
Step 13
Step 15
Step 16
Foam pad
Step 17
Brass spacer
Page 149
4 Floor Platforms
Step 17
Step 18
Step 19
Step 20
Platform
Foam Pad
with silver colored base
Isolator Height Adjust
Horizontal
Lever arm
CCW = Higher
Horizontal Lever
Arm Screw (red)
Pivot Bracket
Brass spacer
Locking nut
Knurled nut
Air supply
Pressure gauge
attachment port
To Isolator Piston
Page 150
4 Floor Platforms
Step 22
Step 23
Turn on the main air supply and set to 60-80 psi max.
After a short delay, all the load disks should lift away from
the clamp rings and the tabletop will then be floating.
Step 25
Check to see that the top of the piston and the top surface of
the clamp ring are parallel as shown in figure below.
Sliding or tapping load disk towards the low spot of the
piston will correct any tilt.
Pl atform
Load disk
Piston
Clamp ring
Isolator post
Page 151
4 Floor Platforms
Step 26
Page 152
4 Floor Platforms
Final Stabilization
Ensure the isolators are leveled so that they support the top
without rocking with the air off.
Page 153
4 Floor Platforms
Page 154
5 Service
Service
Contents at a Glance
Valve Replacement ........................................... 156
Gimbal Piston Assembly Replacement .......... 164
Page 155
5 Service
Valve Replacement
Replacement Instructions
Step 1
Step 2
Step 3
TableTop
Foam Pad
with silver colored base
Isolator Height Adjust
Horizontal
Lever arm
CCW = Higher
Horizontal Lever
Arm Screw (red)
Pivot Bracket
Brass spacer
Locking nut
Knurled nut
Air supply
Pressure gauge
attachment port
To Isolator Piston
Page 156
5 Service
Lever Arm
Lever Arm
Attachment screw
Foam Pad
Height
Adjust
Post
Air Input
Step 4
Step 5
Step 6
Step 7
Install
any
Steps 5 & 6.
additional
replacement
valves
as
per
For tables with old style compression nut connectors, remove all
air fittings from the installed valve.
If sufficient slack exists in the air tubing, cut off and discard the
last 1/2 inch tubing with compression nuts attached. The new
valve can be installed with new push lock fittings in the same
configuration.
Page 157
5 Service
Symbol key
Page 158
5 Service
Connecting Insert the air tube firmly into the self sealing
fitting as shown in figure below.
Disconnecting
Push the red cylinder with your thumb
and forefinger toward the center of the fitting body while
pulling the tube in the opposite direction as shown in figure
below.
Fitting Body
Red Ring
(Orifice inside tubing)
Red Cylinder
Page 159
5 Service
Orifices
Important
Step 10
Step 11
Foam pad
Step 12
Brass spacer
Step 11
Page 160
5 Service
Step 12
Step 13
Step 14
Step 15
TableTop
Foam Pad
with silver colored base
Isolator Height Adjust
Horizontal
Lever arm
CCW = Higher
Horizontal Lever
Arm Screw (red)
Pivot Bracket
Brass spacer
Locking nut
Knurled nut
Air supply
Pressure gauge
attachment port
To Isolator Piston
Page 161
5 Service
Step 17
Step 18
Turn on the main air supply and set to 60-80 psi max.
After a short delay, all the load disks should lift away from
the clamp rings and the tabletop will then be floating.
Step 20
Check to ensure that the top of the piston and the top
surface of the clamp ring are parallel as shown in figure
below.
Sliding or tapping load disk towards the low spot of the
piston will correct any tilt of the piston.
T a bl eT op
Load disk
Piston
Clamp ring
Isolator post
Page 162
5 Service
Step 21
Page 163
5 Service
Replacement Instructions
Tool Required:
Step 1
9/64 Allen-wrench
Step 2
Page 164
5 Service
Load disk
Securing screw
Clamp ring
Isolator bulkhead
Isolator chamber
Isolator
Step 3
Step 4
Clamp ring
Piston
Restraint Bracket
Diaphragm
Isolator bulkhead
Page 165
5 Service
Step 5
should
be
Caution
Step 7
Place the ring over the diaphragm again, registering the hole
pattern as shown in figure below.
Clamp ring
Page 166
5 Service
Caution
Step 8
Step 9
Step 10
Step 11
Step 12
Page 167
5 Service
Step 13
Piston
Clamp ring
Step 14
Page 168
5 Service
Page 169