Diaframma di silicio policristallino su Piastra di Nitruro di Silicio +

Silicio Policristallino

A. Dehe, M. Wurzer, M. Fuldner and U. Krumbein, "Design of a poly

silicon MEMS microphone for high signal-to-noise ratio," Solid-State
Device Research Conference (ESSDERC), 2013 Proceedings of the
European, Bucharest, 2013, pp. 292-295.
doi: 10.1109/ESSDERC.2013.6818876
URL: http://ieeexplore.ieee.org/stamp/stamp.jsp?
tp=&arnumber=6818876&isnumber=6818804
Diaframma di silicio policristallino su Piastra di silicio monocristallino

J. W. Weigold, T. J. Brosnihan, J. Bergeron and X. Zhang, "A MEMS

Condenser Microphone for Consumer Applications," Micro Electro
Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE
International Conference on, Istanbul, Turkey, 2006, pp. 86-89.
doi: 10.1109/MEMSYS.2006.1627742
URL: http://ieeexplore.ieee.org/stamp/stamp.jsp?
tp=&arnumber=1627742&isnumber=34154
Diaframma di Nitruro di Silicio su Piastra di Silicio

P. R. Scheeper et al., "A new measurement microphone based on

MEMS technology," in Journal of Microelectromechanical Systems, vol.
12, no. 6, pp. 880-891, Dec. 2003.
doi: 10.1109/JMEMS.2003.820260
URL: http://ieeexplore.ieee.org/stamp/stamp.jsp?
tp=&arnumber=1257368&isnumber=28121

Microfoni a condensatore con diaframma in Grafene

Q.Zhou, J. Zheng, S. Onishi, M. F. Crommie and A. K. Zettl, "Graphene

electrostatic microphone and ultrasonic radio," in PNAS 2015 112 (29)
8942-8946; published ahead of print July 6, 2015.
doi: 10.1073/pnas.1505200112
URL: http://www.pnas.org/content/112/29/8942.full.pdf

Microfoni Piezoelettrici a base di PVDF - 1

J. Xu, L. M. Headings and M. J. Dapino, "High Sensitivity Polyvinylidene

Fluoride Microphone Based on Area Ratio Amplification and Minimal
Capacitance," in IEEE Sensors Journal, vol. 15, no. 5, pp. 2839-2847,
May 2015.
doi: 10.1109/JSEN.2014.2379636
URL: http://ieeexplore.ieee.org/stamp/stamp.jsp?
tp=&arnumber=6981936&isnumber=7057632

Microfoni Piezoelettrici a base di PVDF 2

J. Xu, M. J. Dapino D. Gallego-Perez and D. Hansford, "Microphone

based on Polyvinylidene Fluoride (PVDF) micro-pillars and patterned
electrodes," in Sensors and Actuators A: Physical, Volume 153, Issue
1, 25 June 2009, Pages 24-32, ISSN 0924-4247.
doi: 10.1109/JSEN.2014.2379636
URL: http://www.sciencedirect.com/science/article/pii/S092442470900
212X/pdfft?md5=cd03a4c95c4603d28ca761470cf9f632&pid=1-s2.0S092442470900212X-main.pdf

Microfoni Piezoelettrici a base di Nitruro di Alluminio

M. D. Williams, B. A. Griffin, T. N. Reagan, J. R. Underbrink and M.

Sheplak, "An AlN MEMS Piezoelectric Microphone for Aeroacoustic
Applications," in Journal of Microelectromechanical Systems, vol. 21,
no. 2, pp. 270-283, April 2012.
doi: 10.1109/JMEMS.2011.2176921
URL: http://ieeexplore.ieee.org/stamp/stamp.jsp?
tp=&arnumber=6142001&isnumber=6177228