TopSens Series

Chromatic confocal technology for optical measurement

of distance and thickness has been used in industry and
research for a long time. It is now a mature technology.

In cooperation with STIL S.A., inventor of this technology,

Polytec offers a huge variety of sensors for the measure-
ment of any kind of material with exceptional accuracy.
These sensors have applications in practically all sectors
of industry, whether as high-precision instruments in
metrology or research labs, or for quality control on
production lines. Designed for use in industrial environ-
ments, the TopSens sensors interface quickly and easily
with your common equipment.

Highlights
Measurement on any type of

material (metal, glass, ceramic,

semiconductors, paper)
Measurement of polished surfaces

(mirrors, wafers) and rough ones

Instant measurement with no

moving parts in the sensor

Resistant to harsh environments

(temperature, pressure, radiation)

Insensitive to ambient lighting

ISO 25178 compliant

Easy to integrate into production

lines

TopSens Series
Configurable Chromatic Confocal
Point Sensors
Datasheet
Highlights

CSS PRIMA
A single controller for distance and thickness

High axial and lateral resolution

Depth of field of perfect focus

Compact and light weight

Easy plugging with optical fibre cable

CSS VIZIR
A single controller for Visible and Infrared

High axial and lateral resolution

Large choice of depths of field of PERFECT FOCUS

Compact and lightweight

CSS OPTIMA+
Measurement on any type of material

(metal, glass, ceramic, semiconductors, paper)

Measurement of polished surfaces

(mirrors, wafers) and rough ones

Instant measurement with no moving parts

in the sensor
Resistant to harsh environments

(temperature, pressure, radiation)

Insensitive to ambient lighting

ISO 25178 compliant

Easy to integrate into production lines

Controllers
TopCCS PRIMA

TopCCS Functions Application

Auto-LED: LED brightness adapts itself automatically Samples with variable slope, e.g. lenses
First Peak: the sensor locks on the first surface Topography on transparent objects or coated samples

Double Frequency: the sensor selects the optimal measurement Samples with high, sharp reflectivity variations, e.g. masks for microelectronics
rate automatically
Hold Last Value: output data smoothing Difficult samples with many non-measurable points

Measurement frequency From 100 to 2,000 points/sec; user defined

Multichannel version 1 Available (2 & 4 channels)
Light source White LED
Light source brightness setting Programmable
First Peak Yes
Hold Last Value Yes
Thickness Calibration Yes
Auto-LED 2 Yes
Autodark 3 Yes
Double Frequency Up to 1,850 Hz
Distance
Measurement modes
Thickness
Calibration tables (max.) 20
Encoder input 4 Yes (up to 3 axes) TTL signal input 30-bit counters (>1 billion step count)
Digital output 30 bit resolution
Analog output 2 configurable outputs [0 ... 10 V] 16 bit resolution
Digital I/O USB 2.0 and RS-232/RS-422 (up to 46,800 baud)
Synchronization I/O 1 Synchro input (TTL) / 1 Synchro output (TTL)
Fiber optic connector E2000 type (push-pull) with Autoprotect system
Compatible optical pens All chromatic confocal pen types
Power supply/consumption 24 V DC/20 W
Temperature in use 5 C ... 40 C
Storage temperature -30 C ... 70 C
Relative humidity in use 5% ... 80% HR without condensation
Protection type IP 40
EMC EN 61000-6-3 and EN 61000-6-2 compliant
Weight 1.4 kg
Dimensions [W x H x D] 168 x 138 x 120 mm
Mechanical interface Integrated DIN rail-mount interface

1
TopCCS PRIMA 4 multiplexed channels: 1 (out of 4) optical pen can measure at a time; the sensor can switch to another optical pen in about 400 ms.
2
The Auto-LED function allows the TopCCS PRIMA to dynamically adjust the LED power in order to adapt it to the reflectivity of the measured object.
3
The Autodark function allows a constant and automatic regulation of the dark signal level of the TopCCS controller.
4
The incremental encoder input port allows the acquisition of the instant position of the measuring system motion axes (3 axes maximum).
These measurements are synchronized with the measurement frequency of the sensor.

Controller TopSens CCS PRIMA

VIZIR

Max. measuring rate (Visible/Infrared) 2 kHz/1kHz

No. of channels (Single Point Sensors) 1

Analog outputs 2 configurable outputs [0-10 V]; 16-bit resolution

Digital outputs USB / RS232

Trigger modes Master and Slave

Measuring modes 1
Distance and/or Thickness

Advanced features:
Double frequency Yes
Thickness calibration 2 Yes
1st peak 3 Yes

Chromatic confocal optical pens:

Visible range Accepts all STIL Pens (see table below)
Infrared range
1
Distance mode: High accuracy with factory calibration.
Thickness mode: Standard accuracy with factory calibration.
High accuracy with user thickness calibration.
2
Thickness calibration (also called "reflective index files") allows measuring thickness with a metrologic accuracy.
3
1st peak mode allows locking the measurement on the outer surface.

CLIR MG Measuring Range Working Spot size

[m] distance [mm]
CLIR2 MG140 3.7
360 12.7
MG70 7.4
CLIR3 MG140 5.3
420 13.8
MG70 10.6
CLIR4 MG35 11
800 27.6
MG20 19.2

Other CLIR x MG y optical pens are available on request.

Controller VIZIR
OPTIMA+

Max. measuring rate 10 kHz

No. of channels (Single Point Sensors) 1

Digital outputs USB / RS232 / RS422

Analog outputs 2 configurable outputs [0-10 V]

Digital encoder input 3 axis simultaneously

Trigger modes Master and Slave

Measuring modes 1
Distance and/or Thickness

Advanced features:
Thickness calibration 2 Yes
Auto LED Yes
Double frequency Yes
1st peak 3 Yes

Chromatic confocal optical pens Accepts all STIL Pens

1
Distance mode: High accuracy with factory calibration.
Thickness mode: Standard accuracy with factory calibration.
High accuracy with user thickness calibration.
2
Thickness calibration (also called "reflective index files") allows measuring thickness with a metrologic accuracy.
3
1st peak mode allows locking the measurement on the outer surface.

Controller OPTIMA+
Optical Pens
CL-MG Series

Model CL0 CL1 CL2 CL3 CL4 CL5 CL6

Measuring range 1
[m] 100 150 400 1,400 4,000 12,000 24,000

Working distance 2 [mm] 2.69 3.35 10.8 12.0 16.2 25.9 21.5

Max. sample slope 3

[deg] 42 42.5 28 25 21 14 8.5

Reference plate 4
No No Yes Yes Yes Yes No

MG MG MG MG MG MG MG MG MG MG MG MG MG MG MG
Magnifier Model
210 140 210 140 210 140 70 140 70 35 20 35 20 35 20
Lateral (XY) Properties
Spot size diameter 11 [m] 1.8 2.2 2.7 3.5 4.0 5.2 8.8 6.8 11.9 12.3 19.9 24.3 40.0 26.8 43.0
Lateral resolution 6 [m] 1.1 1.0 1.1 1.3 1.7 1.8 3.7 2.6 4.5 4.6 7.0 11 14 11 18
Mechanical Interface
Length 7 [mm] 236.6 229 253.1 217.1 243.3 208.9 176.1 205.9 176.1 145.5 131.7 145.5 131.7 167.6 151.8
Diameter [mm] 27 27 27 27 27 27 27 27 27 27 27 27 27 27 27
Weight 7 [g] 227 192 268 195 248 190 189 215 214 155 140 175 160 195 180
Performances
Distance Measurement
Static Noise 8
With no averaging [nm] 5.0 6.0 7.0 8.0 17 20 25 50 60 110 135 370 425 700 800
With averaging 10 [nm] 1.7 2.0 2.3 2.8 2.7 6.7 8.3 17 20 37 45 123 142 233 277
Accuracy 9 [nm] 16 14 25 20 55 45 40 150 130 300 250 750 550 1.600 1.200
Measuring rough R R R R NR NR NR NR
metal surface 10

Thickness Measurement 12
Min. measurable thickness 13 [m] 5 7.5 9 14 14 22 38 40 110 120 350 550 590 725
Max. measurable thickness 13
[m] 100 175 510 2,000 5,700 16,500 34,000
Axial model 5 Standard
Radial model 5 Optional

ENDO Series

Model ENDO 0.1 ENDO 0.3 ENDO 0.3/90 ENDO 1.2 ENDO 1.2/90 ENDO 1.5 ENDO 2.0 ENDO 10

Measuring range 1 [m] 100 300 300 1,200 1,200 1,500 2,000 10,000

Working distance 2
[mm] 1.1 1.1 0.8 2.3 0.4 2.1 5.4 10.0

Measuring direction - axial axial radial axial radial axial axial axial

Max. sample slope 3 [deg] 24 11 11 13 11 14 5 7.2

Spot size 11 [m] 6.2 6.0 6.0 15 15 7.1 30 41.6

Mechanical Characteristics

Diameter [mm] 6.0 6.0 6.0 6.0 6.0 6.0 4.0 8.0

Length 7
[mm] 58.9 71.2 69.9 75.2 82.0 100.6 54.0 43.0

Weight 7
[g] 10 10 10 10 10 12 20 10
Metrological Performances
Static Noise 8 [m]
With no averaging 0.025 0.050 0.050 0.160 0.160 0.220 0.200 0.9
With averaging 10 0.008 0.017 0.017 0.053 0.053 0.073 - -

Accuracy 9 [m] 0.045 0.085 0.100 0.200 0.250 0.300 - 1.2

 Nominal measuring range (MR) for the controller specified above the table. In certain cases it is
1
The accuracy is the max. error observed when comparing the distance measured
9

possible to calibrate on a larger range with reduced performances (for details contact us). by the sensor with sample position determined by an encoder of 1 nm accuracy
The Working Distance (WD) is the distance from the optical pen to the beginning of the
2 class. This parameter is measured immediately after calibration, at the following
measuring range, The values in this table were measured for CCS PRIMA. Variation: for CL0, conditions: optimized rate, slope angle = 0, temporal averaging = measuring
CL2, CL3, CL4: 3%, for CL1, CL5, CL6: 6% rate/10, number of steps at least 100. For sensors with "auto-adaptive LED" mode,
The Max. Sample Slope (MSS) is the max. angle between the optical axis and the normal to the
3 this mode is enabled.
sample surface for which measurement is still possible. The MSS refers to the real local slope at The accuracy is a good indicator for short-term repeatability of the sensor and of
the measured point, not to the slope of a theoretical "average surface". This feature is signifi- the calibration bench. The values in the table are max accepted values: the accura-
cant for specular (mirror-like) surfaces only, for scattering surfaces the maximal slope angle is cy of each individual sensor is measured immediately after calibration and specified
higher (up to 87 for perfect diffusers). However the intensity of the collected signal decreases in the calibration certificate.
with increasing slope angle for all types of samples. 10
For measuring rough metallic surfaces, the smaller the spot size, the better. As a
The MSS values given in this table are measured on a mirror at the lowest measuring rate of the thumb rule, optical pens marked with R (Recommended) may measure such sam-
sensor, with no averaging. ples with full performances; optical pens marked NR (Not Recommended) measure
The reference plate is a glass window that can be either located inside the optical pen, or fixed
4 such samples with reduced performances.
on the sample surface, or removed when measuring through an equivalent external window
11
Theoretical spot size, computed for the focalized wavelength (indicative value).
(for details contact us). 12
Performances in thickness measuring mode depend on the characteristics of the
For axial optical pens the measuring range is parallel to the mechanical axis of the pen.
5 sample. For CCS PRIMA and OPTIMA, best accuracy may be achieved by per-
For radial optical pens the measuring range is normal to the mechanical axis, allowing measur- forming a "thickness calibration" on a suitable standard, and loading the resulting
ing inside holes. refractive-index file into the sensor. This procedure is described in the sensor user
Lateral Resolution (LR) is the 10% - 90% transition distance observed when measuring an
6 manual. For STIL-Duo sensor thickness calibration may be applied by post-process-
abrupt photometry change. The values in this table are measured at the center of the measur- ing; for more information contact us. Axial resolution in thickness measuring mode
ing range. may be improved by placing the sample inside the MR so that the intensities of the
signal from the two faces are as close as possible.
Length and weight excluding the fiber optics cable. The values given in this table are for the
7

axial pen model.

13
The values in this table are typical values measured at the following conditions:
optimal rate, no averaging, min thickness measured at the center of the MR, sample
The Static Noise (SN) is the RMS of noise level measured on a perfectly static sample located at
8
refractive index =1.5 (for measuring air gaps, these values should be divided by 1.5).
the center of the measuring range. Two SN values are given in this table: one with no temporal
averaging, the other with temporal averaging 10. These are max. accepted values. The SN is
measured for each individual sensor immediately after calibration and is specified in the calibra-
tion certificate. This parameter determines the axial resolution of the sensor.

Fiber Optics Cables

E2000 Push-Pull Connector

Model Length Core Max Sheath

E50-5 5m 50/125 m 2.8 mm Standard

E50-10 10 m 50/125 m 2.8 mm Standard

E50-3-M 3m 50/125 m 5 mm armored

E50-5-M 5m 50/125 m 5 mm armored

E50-10-M 10 m 50/125 m 5 mm armored

E50-20-M 20 m 50/125 m 5 mm armored

Diameter

Length

Max. object slope Working distances

Measurement
spot size Measuring range
 The Optical Principle

TopSens optical sensors are based on the Chromatic Confocal Imaging principle. Incident white light is
imaged through a chromatic objective to yield a continuum of monochromatic images along the z-Axis,
thus color coding the optical axis. When an object is present in this field, an unique wavelength is
perfectly focused at its surface and is reflected back into the optical system. The backscattered beam
passes through a filtering pinhole into a spectrometer. The specific wavelength of the beam is calculated,
to precisely determine the objects position in the measurement field. Chromatic Confocal Imaging allows
for reliable, accurate and reproducible dimensional measurements with high resolution.

S: White-light
Source

Filtering
Spectrometer Pinhole

Beam Splitter

Display & Signal

Processing Lens

M Point 1
Monochromatic
M Images of the
Object Surface S Point Source
n

Polytec GmbH Polytec, Inc. Polytec Ltd. Polytec Japan Polytec China Ltd.
2016/04 - Technical specifications are subject to be changed without notice.

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