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For other uses, see CMOS (disambiguation). chip. It was primarily for this reason that CMOS became
Complementary metaloxidesemiconductor, ab- the most used technology to be implemented in VLSI
chips.
The phrase metaloxidesemiconductor is a reference
to the physical structure of certain eld-eect transistors,
having a metal gate electrode placed on top of an ox-
ide insulator, which in turn is on top of a semiconductor
material. Aluminium was once used but now the mate-
rial is polysilicon. Other metal gates have made a come-
back with the advent of high-k dielectric materials in the
CMOS process, as announced by IBM and Intel for the
45 nanometer node and beyond.[4]
1 Technical details
CMOS refers to both a particular style of digital
circuitry design and the family of processes used to
implement that circuitry on integrated circuits (chips).
CMOS circuitry dissipates less power than logic fami-
lies with resistive loads. Since this advantage has in-
CMOS inverter (NOT logic gate)
creased and grown more important, CMOS processes
and variants have come to dominate, thus the vast ma-
breviated as CMOS /sims/, is a technology for con- jority of modern integrated circuit manufacturing is on
structing integrated circuits. CMOS technology is used CMOS processes.[5] As of 2010, CPUs with the best
in microprocessors, microcontrollers, static RAM, and performance per watt each year have been CMOS static
other digital logic circuits. CMOS technology is also logic since 1976.
used for several analog circuits such as image sensors
(CMOS sensor), data converters, and highly integrated CMOS circuits use a combination of p-type and n-
transceivers for many types of communication. In 1963, type metaloxidesemiconductor eld-eect transistor
while working for Fairchild Semiconductor, Frank Wan- (MOSFETs) to implement logic gates and other digital
lass patented CMOS (US patent 3,356,858). circuits. Although CMOS logic can be implemented with
discrete devices for demonstrations, commercial CMOS
CMOS is also sometimes referred to as complementary- products are integrated circuits composed of up to bil-
symmetry metaloxidesemiconductor (or COS- lions of transistors of both types, on a rectangular piece
MOS).[1] The words complementary-symmetry refer of silicon of between 10 and 400 mm2 .
to the fact that the typical design style with CMOS uses
complementary and symmetrical pairs of p-type and CMOS always uses all enhancement-mode MOSFETs (in
n-type metal oxide semiconductor eld eect transistors other words, a zero gate-to-source voltage turns the tran-
(MOSFETs) for logic functions.[2] sistor o).
Two important characteristics of CMOS devices are high
noise immunity and low static power consumption.[3]
Since one transistor of the pair is always o, the se- 2 Inversion
ries combination draws signicant power only momen-
tarily during switching between on and o states. Conse- CMOS circuits are constructed in such a way that all
quently, CMOS devices do not produce as much waste PMOS transistors must have either an input from the
heat as other forms of logic, for example transistor voltage source or from another PMOS transistor. Sim-
transistor logic (TTL) or NMOS logic, which normally ilarly, all NMOS transistors must have either an input
have some standing current even when not changing state. from ground or from another NMOS transistor. The
CMOS also allows a high density of logic functions on a composition of a PMOS transistor creates low resistance
1
2 2 INVERSION
B A
A B
Out
OUT
A
VSS
Vss
METAL1 N DIFFUSION
NAND gate in CMOS logic
POLY P DIFFUSION
the PMOS transistors will, and a conductive path will be
established between the output and V (voltage source), CONTACT N-WELL
bringing the output high. As the only conguration of
the two inputs that results in a low output is when both
are high, this circuit implements a NAND (NOT AND) The physical layout of a NAND circuit. The larger regions of
N-type diusion and P-type diusion are part of the transistors.
logic gate.
The two smaller regions on the left are taps to prevent latchup.
An advantage of CMOS over NMOS logic is that both
low-to-high and high-to-low output transitions are fast
since the (PMOS) pull-up transistors have low resistance The polysilicon, diusion, and n-well are referred to as
when switched on, unlike the load resistors in NMOS base layers and are actually inserted into trenches of
logic. In addition, the output signal swings the full voltage the P-type substrate. (See steps 1 to 6 in the process di-
between the low and high rails. This strong, more nearly agram below right) The contacts penetrate an insulating
symmetric response also makes CMOS more resistant to layer between the base layers and the rst layer of metal
noise. (metal1) making a connection.
See Logical eort for a method of calculating delay in a The inputs to the NAND (illustrated in green color) are in
CMOS circuit. polysilicon. The CMOS transistors (devices) are formed
by the intersection of the polysilicon and diusion; N dif-
fusion for the N device & P diusion for the P device
2.3 Example: NAND gate in physical lay- (illustrated in salmon and yellow coloring respectively).
out The output (out) is connected together in metal (illus-
trated in cyan coloring). Connections between metal and
This example shows a NAND logic device drawn as a polysilicon or diusion are made through contacts (illus-
physical representation as it would be manufactured. The trated as black squares). The physical layout example
physical layout perspective is a birds eye view of a stack matches the NAND logic circuit given in the previous ex-
of layers. The circuit is constructed on a P-type substrate. ample.
4 3 POWER: SWITCHING AND LEAKAGE
The N device is manufactured on a P-type substrate while (for e.g., p-type diusion vs. n-well), wells and substrate
the P device is manufactured in an N-type well (n-well). (for e.g., n-well vs. p-substrate). In modern process diode
A P-type substrate tap is connected to VSS and an N- leakage is very small compared to sub threshold and tun-
type n-well tap is connected to VDD to prevent latchup. nelling currents, so these may be neglected during power
calculations.
CMOS logic dissipates less power than NMOS logic cir- 3.2 Dynamic dissipation
cuits because CMOS dissipates power only when switch-
ing (dynamic power). On a typical ASIC in a modern 3.2.1 Charging and discharging of load capaci-
90 nanometer process, switching the output might take tances
120 picoseconds, and happens once every ten nanosec-
onds. NMOS logic dissipates power whenever the tran- CMOS circuits dissipate power by charging the various
sistor is on, because there is a current path from V to load capacitances (mostly gate and wire capacitance, but
V through the load resistor and the n-type network. also drain and some source capacitances) whenever they
Static CMOS gates are very power ecient because they are switched. In one complete cycle of CMOS logic, cur-
dissipate nearly zero power when idle. Earlier, the power rent ows from VDD to the load capacitance to charge it
consumption of CMOS devices was not the major con- and then ows from the charged load capacitance (CL)
cern while designing chips. Factors like speed and area to ground during discharge. Therefore, in one com-
dominated the design parameters. As the CMOS technol- plete charge/discharge cycle, a total of Q=CLVDD is thus
ogy moved below sub-micron levels the power consump- transferred from VDD to ground. Multiply by the switch-
tion per unit area of the chip has risen tremendously. ing frequency on the load capacitances to get the current
used, and multiply by the average voltage again to get the
Broadly classifying, power dissipation in CMOS circuits characteristic switching power dissipated by a CMOS de-
occurs because of two components: vice: P = 0.5CV 2 f .
Since most gates do not operate/switch at every clock cy-
3.1 Static dissipation cle, they are often accompanied by a factor , called the
activity factor. Now, the dynamic power dissipation may
3.1.1 Subthreshold conduction when the transistors be re-written as P = CV 2 f .
are o A clock in a system has an activity factor =1, since it
rises and falls every cycle. Most data has an activity fac-
Both NMOS and PMOS transistors have a gatesource tor of 0.1.[7] If correct load capacitance is estimated on a
threshold voltage, below which the current (called sub node together with its activity factor, the dynamic power
threshold current) through the device drops exponen- dissipation at that node can be calculated eectively.
tially. Historically, CMOS designs operated at supply
voltages much larger than their threshold voltages (V
might have been 5 V, and V for both NMOS and PMOS 3.2.2 Short-circuit power dissipation
might have been 700 mV). A special type of the CMOS
transistor with near zero threshold voltage is the native Since there is a nite rise/fall time for both pMOS and
transistor. nMOS, during transition, for example, from o to on,
both the transistors will be on for a small period of time
in which current will nd a path directly from VDD to
3.1.2 Tunnelling current through gate oxide ground, hence creating a short-circuit current. Short-
circuit power dissipation increases with rise and fall time
SiO2 is a good insulator, but at very small thickness levels of the transistors.
electrons can tunnel across the very thin insulation; the
probability drops o exponentially with oxide thickness. An additional form of power consumption became sig-
Tunnelling current becomes very important for transistors nicant in the 1990s as wires on chip became narrower
below 130 nm technology with gate oxides of 20 or and the long wires became more resistive. CMOS gates
thinner. at the end of those resistive wires see slow input transi-
tions. During the middle of these transitions, both the
NMOS and PMOS logic networks are partially conduc-
3.1.3 Leakage current through reverse-biased tive, and current ows directly from VDD to VSS. The
diodes power thus used is called crowbar power. Careful design
which avoids weakly driven long skinny wires ameliorates
Small reverse leakage currents are formed due to forma- this eect, but crowbar power can be a substantial part of
tion of reverse bias between diusion regions and wells dynamic CMOS power.
5
To speed up designs, manufacturers have switched to con- by the gate voltage, starting from an occupation of zero
structions that have lower voltage thresholds but because electrons, and it can be set to 1 or many.[11]
of this a modern NMOS transistor with a V of 200
mV has a signicant subthreshold leakage current. De-
signs (e.g. desktop processors) which include vast num- 7 See also
bers of circuits which are not actively switching still con-
sume power because of this leakage current. Leakage Active pixel sensor
power is a signicant portion of the total power consumed
by such designs. Multi-threshold CMOS (MTCMOS), Beyond CMOS
now available from foundries, is one approach to manag- Electric (software) Used to lay out CMOS circuits
ing leakage power. With MTCMOS, high V transistors
are used when switching speed is not critical, while low FEOL (front-end-of-line) The rst part of IC fab-
V transistors are used in speed sensitive paths. Further rication process
technology advances that use even thinner gate dielectrics Gate equivalent A technology-independent mea-
have an additional leakage component because of current sure of circuit complexity
tunnelling through the extremely thin gate dielectric. Us-
ing high-k dielectrics instead of silicon dioxide that is the HCMOS High-speed CMOS 1982
conventional gate dielectric allows similar device perfor- Magic (software) Used to lay out CMOS circuits
mance, but with a thicker gate insulator, thus avoiding
this current. Leakage power reduction using new mate- MOSFET
rial and system designs is critical to sustaining scaling of
CMOS.[8]
8 References
4 Analog CMOS [1] COS-MOS was an RCA trademark, which forced other
manufacturers to nd another name CMOS
Besides digital applications, CMOS technology is also [2] What is CMOS Memory?". Wicked Sago. Retrieved 3
used in analog applications. For example, there are March 2013.
CMOS operational amplier ICs available in the market. [3] Fairchild. Application Note 77. CMOS, the Ideal Logic
Transmission gates may be used as analog multiplexers Family. 1983.
instead of signal relays. CMOS technology is also widely
[4] Intel 45nm Hi-k Silicon Technology
used for RF circuits all the way to microwave frequencies,
in mixed-signal (analog+digital) applications. [5] Baker, R. Jacob (2008). CMOS: circuit design, layout, and
simulation (Second ed.). Wiley-IEEE. p. xxix. ISBN
978-0-470-22941-5.
5 Temperature range [6] http://www.fairchildsemi.com/an/AN/AN-77.pdf
[7] K. Moiseev, A. Kolodny and S. Wimer, Timing-aware
Conventional CMOS devices work over a range of 55 power-optimal ordering of signals, ACM Transactions on
C to +125 C. Design Automation of Electronic Systems, Volume 13 Issue
4, September 2008, ACM
There were theoretical indications as early as August
2008 that silicon CMOS will work down to 233 C [8] A good overview of leakage and reduction methods are
(40 K).[9] Functioning temperatures near 40 K have since explained in the book Leakage in Nanometer CMOS
been achieved using overclocked AMD Phenom II pro- Technologies ISBN 0-387-25737-3.
cessors with a combination of liquid nitrogen and liquid [9] Edwards C, Temperature control, Engineering & Tech-
helium cooling.[10] nology 26 July - 8 August 2008, IET
[10] Patrick Moorhead (January 15, 2009). Breaking
Records with Dragons and Helium in the Las Vegas
6 Single-electron CMOS transis- Desert. blogs.amd.com/patmoorhead. Retrieved 2009-
09-18.
tors
[11] Prati, E.; De Michielis, M.; Belli, M.; Cocco, S.; Fanciulli,
M.; Kotekar-Patil, D.; Ruo, M.; Kern, D. P.; Wharam,
Ultra small (L = 20 nm, W = 20 nm) CMOS transistors
D. A.; Verduijn, J.; Tettamanzi, G. C.; Rogge, S.; Roche,
achieve the single-electron limit when operated at cryo- B.; Wacquez, R.; Jehl, X.; Vinet, M.; Sanquer, M. (2012).
genic temperature over a range of 269 C (4 K) to about Few electron limit of n-type metal oxide semiconduc-
258 C (15 K). The transistor displays Coulomb block- tor single electron transistors. Nanotechnology. 23 (21):
ade due to progressive charging of electrons one by one. 215204. doi:10.1088/0957-4484/23/21/215204. PMID
The number of electrons conned in the channel is driven 22552118.
6 10 EXTERNAL LINKS
9 Further reading
Baker, R. Jacob (2010). CMOS: Circuit Design,
Layout, and Simulation, Third Edition. Wiley-
IEEE. p. 1174. ISBN 978-0-470-88132-3. http:
//CMOSedu.com
Weste, Neil H. E.; Harris, David M. (2010). CMOS
VLSI Design: A Circuits and Systems Perspec-
tive, Fourth Edition. Boston: Pearson/Addison-
Wesley. p. 840. ISBN 978-0-321-54774-3. http:
//CMOSVLSI.com/
Veendrick, Harry J. M. (2008). Nanometer CMOS
ICs, from Basics to ASICs. New York: Springer. p.
770. ISBN 978-1-4020-8332-7.
10 External links
CMOS gate description and interactive illustrations
p-type substrate
p-type substrate
3. Diuse n-well
ox.
n-well
p-type substrate
n-well
p-type substrate
n-well
p-type substrate
6. Deposit polysilicon
ox.
Cross section of two transistors in a CMOS gate, in an N-well
n-well CMOS process
p-type substrate
n-well
p-type substrate
9. Grow nitride
ox.
n+ n+ p+ p+
n-well
p-type substrate
11.2 Images
File:CMOS_Inverter.svg Source: https://upload.wikimedia.org/wikipedia/commons/8/81/CMOS_Inverter.svg License: Public domain
Contributors: Own drawing, Inkscape 0.43 Original artist: inductiveload
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License: CC BY-SA 3.0 Contributors: Own work Original artist: ?
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cense: Public domain Contributors: originally uploaded to en.wikipedia (le log) Original artist: Reza Mirhosseini
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nal artist: ?
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CC-BY-SA-3.0 Contributors: This le was derived from Wiki letter w.svg: <a href='//commons.wikimedia.org/wiki/File:
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Original artist: Derivative work by Thumperward