Design and simulation of MEMS vector hydrophone with reduced cross section based

meander beams
Manoj Kumar, S. Dutta, Ramjay Pal, K. K. Jain, Sudha Gupta, and R. K. Bhan

Citation: AIP Conference Proceedings 1724, 020056 (2016); doi: 10.1063/1.4945176

View online: http://dx.doi.org/10.1063/1.4945176
View Table of Contents: http://aip.scitation.org/toc/apc/1724/1
Published by the American Institute of Physics
 Design and Simulation of MEMS Vector Hydrophone With
Reduced Cross Section Based Meander Beams

Manoj Kumar, S. Dutta, Ramjay Pal, K. K. Jain, Sudha Gupta and R.K. Bhan

Solid State Physics Laboratory, DRDO, Lucknow Road, Timarpur, Delhi, India 110054

Corresponding author: mnjdpt@gmail.com

Abstract. MEMS based vector hydrophone is being one of the key device in the underwater communications. In this
paper, we presented a bio-inspired MEMS vector hydrophone. The hydrophone structure consists of a proof mass
suspended by four meander type beams with reduced cross-section. Modal patterns of the structure were studied. First
three modal frequencies of the hydrophone structure were found to be 420 Hz, 420 Hz and 1646 Hz respectively. The
deflection and stress of the hydrophone is found have linear behavior in the 1 Pa 1Pa pressure range.
Keywords: Vector hydrophone, meander beams, reduced cross-section.

INTRODUCTION
Underwater communication is being one of the key technologies in the defense sector [1]. The use of
electromagnetic waves based communication is quite restricted in underwater due to the problem of multi-path
propagation, time variations of the communication channel, small bandwidth and strong signal. Instead, acoustic
wave based communication is being used to send and receive messages in underwater. There are several ways of
employing such communication but the most common is using hydrophones. Under water sensors systems exhibit
critical technology comprising of robust mechanical design, acoustic pressure sensing and electronics. Hydrophone
is used for obtaining vector information of underwater sound field. Various designs are available based on the
application requirement. A new modified design comprising of crab-meanders and reduced cross section of beam is
presented in this paper. Crab structure gives higher mechanical impedance by not allowing much hanging proof
mass at center, Meanders shape increases the length in the minimum area available, thereby improving the
deflection and stress in response. Reduced cross section offers less moment if inertia which improves bending
stresses. Relevant Modes of vibration have been simulated. Coventorware software has been used to carry out the
simulations. Improved linear stress zones are available for Peizoresistors to increase the sensing phenomenon.

FIGURE 1. 3-D model showing crab-meander and reduced cross section

A hydrophone is an underwater listening device. Hydrophones can be classified into two categories - omni-
directional and directional. The omni-directional type detects sounds from all the directions with equal sensitivity,

2nd International Conference on Emerging Technologies: Micro to Nano 2015 (ETMN-2015)

AIP Conf. Proc. 1724, 020056-1020056-4; doi: 10.1063/1.4945176
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while directional hydrophones have higher sensitivity to signals in a particular direction [2-4]. Thus directional
hydrophones are also known as vector hydrophones. Vector hydrophones are typically used in systems for locating
and tracking objects underwater.
In recent times, micro-electro-mechanical system (MEMS) based sensors are being utilized in wide variety of
applications [2-7]. By using MEMS technology one can produce smaller, more reliable, robust, large scale, and
cheaper devices. Researchers are also actively engaged in development of different types of vector hydrophones [1-
6].

Micro and nanotechnology researchers often look to nature for inspiration. Nature has perfected wide variety of
biological systems many with exquisite sensitivity, effectiveness, and reliability, through billions of years of
evolution. One such example is the lateral line sense organ of fish resembling a towed array with sensing organs
(stitches) spaced at intervals along the nerve fiber. It can detect the low-frequency vibration (noise) that cannot be
felt by internal ears of fish. Each stitch contains several neuromasts. Each neuromast comprises up to several
hundred mechano-sensory hair cells, popularly known as stereocilia. These stereocilia vibrate and act as sensors for
flow noise as the fish swims through water.
In past, there are few reports on the development of stereocilia inspired MEMS vector hydrophones [2-6]. Those
MEMS vector consists of two parts: four-beam microstructure and rigid plastic cylinder (density = 1gm/ cc) fixed at
the center of the microstructure. Each beam has two piezo-resistors located at the end of the beam. When the plastic
cylinder responds directly to the acoustic pressure, the beam structures will be subject to deformation. This leads to
generation of residual stress which in-turn changes the resistance of the piezo-resistors. By using piezo-resistors in
Wheatstone bridge configuration, deformation of the beams and thus acoustic pressure is being sensed.
In this paper, we replaced the straight beams of the bionic vector hydrophone with meander type beam structure.
Moreover, cross-section of the beams is reduced to enhance the piezoresistive effects. The modal pattern and effect
of the acoustic pressure on the vector hydrophone structure simulated.

FEM SIMULATION OF VECTOR HYDROPHONE STRUCTURE

The proposed vector hydrophone consists of 10 m thick silicon inertial proofmass (500 m x 500 m) suspended
over a cavity with help of four meander shaped beam structures of width 120 m. The rigid plastic cylinder of
length 5 mm and diameter 200 m is fixed at the center of the proof mass. Finite element model (FEM) simulations
are carried out using Coventorware 2012 software to analyze the modal behavior of vector hydrophone. First three
modal frequencies of the hydrophone structure are found to be 420 Hz, 420 Hz and 1646 Hz respectively. Modal
patterns of the MEMS structure are shown in Figure 2. The whole structure has complete axial symmetry in the xoz
plane and yoz planes.
This report also discussed about effect of applied acoustic pressure on the deflection and stress of the hydrophone
structure. Figure 3 shows the deflection (max: 1.4 x 10-6 m) and stress (max: 0.66 x 10-6 MPa) of the vector
hydrophone under 1 Pa pressure. The deflection and stress of the hydrophone is found to be linearly dependent in
the 1 Pa 1Pa pressure range. Due to extended length of the beams in meander structure, it shows greater
sensitivity towards the applied pressure compared to the straight beams. Reduced cross-section of the beam
structures yielded higher stress values, which in-turn could be used to increase the piezo-resistance at these sites.

(a) (b) (c)

FIGURE 2. Modal patterns of the vector hydrophone: (a) 1st mode: 420 Hz, (b) 2nd mode: 420 Hz and (c) 3rd mode:1645.7 Hz

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 (a) (b)
FIGURE 3. Vector hydrophone under 1 Pa pressure (a) Deflection (max: 1.4X10 -6 m) (b) stress (max: 0.66X10-6 M Pa)

STRESS VARIATION
As the main target of introducing and using this unique geometry was to improve the stress in zones where
Peizoresistors shall be placed. Below shown fig. 4 shows the variation of stress along the meander beams, noticing
that stress zones are linear in the two ends fixed (one to the center proof mass and one to the outer frame). In
comparison to the linear beams, stress developed is almost double using this geometry. More variations can also be
tried using this concept for better sensing. Fig. 5 shows the natural frequency of this structure as 420 Hz in first
mode and maximum deflection with frequency upto 1000 Hz.The structure is made up using SOI (silicon on
insulator) wafers and center pole is made up of Polyimide for simulation using Coventorware software. Polyimide
has the same density as that of water. Damping ratio has been kept 0.1 for simulations.

FIGURE 4. (a)Stress Variation in meander (b) Enlarged Beam view upto 450 length

FIGURE 5. (a)Resonance at 420 Hz (b) Deflection frequency response

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 FIGURE 6. (a)Deflection of 1.4 micron at 1 Pa (b) Stress generated (0.66 M Pa) at 1 Pa
There is linear relationship between deflection and stress generated for 1 Pa 1Pa

CONCLUSIONS
MEMS based vector hydrophone is an important device in the underwater communications. This paper presents a
bio-inspired MEMS vector hydrophone. It consists of a proof mass suspended by four meander type beams with
reduced cross-section. Modal patterns of the vector hydrophone structure were studied. The deflection and stress of
the hydrophone is found have linear behavior in the 1 Pa 1Pa pressure range. Stress generated is more with
respect to simple straight beams [3]. As Peizoresistors are being used to detect the effect of acoustic pressure on the
pole, more is the deflection, more is the strain and stress, which accounts for better sensing the velocity and pressure
of water.

ACKNOWLEDGMENT
The authors acknowledge Director SSPL for his continuous support and for the permission to publish this work.

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