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CHAPTER 2

EE 5344 Intro to MEMS - Interface Circuitry

Open Loop vs Closed Loop Gain

v (s ) G (s ) Y (s ) Y (s ) = G (s )V (s )
open Loop no feedback

v( S ) +
- G (s ) Y (s ) e(s ) = V (s ) Y (s )H (s )
Y (s ) = G (s )e(s )

H (s ) Solve:
Y (s ) G (s )
Closed-Loop =
V (s ) 1 + G (s )H (s )
Feedback

Sensor Signals + Interfacing

Processor takes the signal from the sensor, conditions it, and converts it to an
understandable format. It may perform Analog to Digital conversion. Most sensors are
analog. Most processing is done in digital form.

Commonly measured electrical parameters:

1. Resistance
2. Capacitance
3. Inductance

Measurement of Resistance

The processor measures the change in the resistance of the sensing element.

R x = Ro (1 + x ) linear resistance sensor

(or R x = xRo )

Ro = Baseline resistance
x = fractional change

Examples: Bolometers, magnetoresistors

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Usually x < 1 . In the case of x >> 1 , a potential divider may be used.

Buffer
R
ref
V
ref

R
x
V
out

Voltage Divider

R
V =V x
out ref R + R
x ref

V Vref Vref
System gain: A = out = =
Rx R x + Rref Ro (1 + x ) + Rref

Vref Rref
Sensitivity S = dVout dR x =
(R x + Rref )
2

Since S is not constant, not linear.

S Linear only for

R x << Rref
R
x

If x is small <1% If x is large >>1

Vref Rref Vref Rref

S= S
[R (1 + x ) + R ]
o ref
2
[xR o + Rref ]
2

almost linear Make linear by making

Rref >> xRo

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Voltage dividers are not very sensitive to small changes in x. A better choice is a
Wheatstone Bridge.

R R2
3

V V
ref out

Rx R1

Rx R1
Vout = Vref
R3 + R x R1 + R2

R x R3 R1 R2
The bridge is nulled by adjusting R such that Vout = 0 . Then =
1 1 + R x R3 1 + R1 R2

R x R3 = R1 R2

However, for small x, it is common to use the circuit in unbalanced mode, measure Vout
and amplify it.

Capacitance Measurement

Capacitance is the amount of charge induced for a given voltage change.

dq q
C= if Linear C =
dV V

planar, parallel-plate capacitor r : relative permittivity

A: area
A A
C = o r = d: separation of plates
d d
o : permittivity of space

If a phenomenon changes A, r or d, the C can be measured to detect the phenomenon.

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dC dC dC
C = A, d + A + , A d
d dA ,d dd

Examples: IR radiation can change r

Force can change d.

Capacitive Voltage Divider:

C ref
Vout = Vref
C x + C ref
C ref
~
Vref
Cx Vout

More accurate way is: Bridge.

Series Arrangement:

R4 R2
R R1 =
1 1
R + R1 +
C C1 j C x jC1
~
Vout solve

R4 R2

R4 R1
From the real part: R x =
R2

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R2
From the imaginary part: C x = C1
R4

Parallel Arrangement:

R4 R2
=
R x (1 jC x ) R1 (1 jC1 )
R1
Cx
1 1
Rx + R1 +
j C x jC1
Rx C1

~ Vout Solve

R4
R2

R4 R1
From the real part = R x =
R2

R2
From the imaginary part: C x = C1
R4

Inductance Measurement:

d
Self Inductance L: L=N
di

Where N: Number of wire turns

: Magnetic flux
i: Current flowing through the wire

Magnetomotive force (mmf ) = Ni

Reluctance = R L = mmf

d Ni N
Therefore d di = =
di RL RL

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d N 2
And L=N =
di RL

Analogy Between Electric and Magnetic Circuits

Electric Magnetic
I current magnetic flux
V emf F mmf

For a solenoid

A=Area of core

l lo
RL = +
o r A o Ao

o=permeability of free space

r=relative permeability of the core

Most sensors operate by changing airgap lo or moving magnetic core and changing
This modifies the RL and therefore L, which is sensed by induced voltage.

di
Vout = L
dt

There is also mutual inductance between 2 or more coils: M

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Example

Linear Variable Differential Transformer

(LVDT)
ip
M1

L2
Vout
Vin L1

L2
M2

motion

di p
Vout = (M 1 M 2 )
dt

Measures displacement

Interface Electronic Circuitry

Processor or Pre-processor circuitry that biases the sensor and conditions the sensor
output.

Functions of interface electronics:

1. To amplify:
Operational amplifiers

2. To reduce noise:
Low-, High-, or band pass filters. Sample and hold circuits, Integrators.

3. To supply power:
Biasing circuits for modulating sensors. Can be dc or pulse bias.

4. To compensate:
Examples are Linearization circuits, comparators, calibrators.

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IR detector
radiation

comparator
IR detector in dark

Another example is a shutter in a radiation detector to blank out the signal.

5. To control
Self-testing, checking battery levels etc.
6. To transmit
Most of the time, signal is digitized, multiplexed for transmission.

Examples are:

Frequency modulation: Signal can be converted to frequency modulator.

Digitization: ADC (analog-to-digital converters) convert the analog signal to digital,

which is easier to transmit, manipulate and noise free.

Multiplexing: Very useful in the case of detector arrays. (For example, 120x320 arrays
of pixels in focal plane array of IR detectors).

1
2
3
4


MUX Processor
Sensor Output






Address (6-bit)
128

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Digital Transmission:

Serial Interfacing

RS-232 standard
(Others are RS-422 and RS-423)
Dual wire transmission (simple)
Line length < 35 feet
Speed < 20 kbits/s in binary channel
Controls 1 device at a time

GPIB (IEEE 488) Interfacing

General Purpose Instrument Bas, same as IEEE-488, called as HPIB by Hewlett-Packard

Co.

Requires a specialized cable with 25 lines.

Line length < 7 feet
Speed < 2 Mbits/s
Controls up to 20 devices at a time.

Specialized Sensor Interfacing

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