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Avinash Bhat
Product Manager
Cognitive design technology pvt ltd
Agenda of workshop
Day 1
Session 1- Introduction to TCAD
1) To create a MOSFET
structure in Atlas Device
simulation
2) Generation of simple Id
versus Vgs
3) Extraction of device
parameters such as Vt, Beta
and Theta.
1) Developing a good
simulation grid.
2) Defining our regions and
electrodes.
3) Defining proper material
and models.
4) Using appropriate
calculation method.
Simulating Nmos Device Structure
On the Deckbuild main
window type go atlas
Click on Commands--
>Structure-->Mesh
Once we have
defined our
mesh, the next
step is to define
the region.
Simulating Nmos Device Structure
Click on Commands-->Structure-->Region
After defining the regions, the next step is to define the electrodes.
Click on Commands-->Structure-->Electrode
Define the source, gate, drain and substrate for the Mosfet.
Once we enter all the details click on write button the following line
appears on the Deckbuild window
Simulating Nmos Device Structure
The next step will be to define our doping profile for the Silicon and
polysilicon material.
And also we will also use the Gaussian analytical function to generate the
doping profile.
Click on Commands-->Structure-->Doping-->Analytical profile
Simulating Nmos Device Structure
Click on the write button, the following line will be on the Deckbuild
window.
Simulating Nmos Device Structure
Click on plot-->display
Select the junctions and
the contours from the
tonyplot display and click
ok
Simulating Nmos Device Structure
Now we have completed our MOSFET structure. The next part will be
1) Defining our material model specification- material, models, contact
and interface.
2) Define Numerical Method
3) Solution specification
4) Analysis of result
In this example we are using silicon and polysilicon material to define those
the syntax is given below.
Material Material=Silicon
Material Material=polysilicon
By default the syntax will consider the default parameter which is shown in
the above table. We can also can the material properties by defining our own
set of values.
For example if we need to set the bandgap and low field electron mobility for
silicon region, then the following statement can be used which sets the
conduction band density of states at 300K for the material silicon.
Material Material= Silicon Eg300=1.1245 affinity=4.05 permitti=11.9
nc300=2.8e19
Material Material= Poly Eg300=1.245 affinity=4.05 permitti=11.9
Material Material=air permitti=1
The above syntax will set our material properties for the MOSFET device.
Simulating Nmos Device Structure
The next step is to define the physical models to simulate the MOS devices.
Models are accessed from the MODELS statement.
MODELS MOS will turn on the default set of physical models that are useful for
MOS simulation. MODELS MOS statement will enable SRH, Fermi and Lombardi
mobility model for transverse field dependence.
SRH is the Shockley Read Hall recombination model while the CVT model
is the inversion layer model from Lombardi.
Click on write
button the
following
models and
the CVT
mobility
parameters
will be
defined.
Simulating Nmos Device Structure
Next, we shall select the type of numerical methods to be used for the
simulation.
Several different methods can be used for solving the semiconductor device
problems.
For the MOS structure, the de-coupled (GUMMEL), and fully coupled
(NEWTON) methods are used.
In simple terms, the Gummel method will solve for each unknown in turn
keeping the other variables constant, repeating the process until a stable
solution is achieved.
On the other hand, the Newton method, solve the total system of
unknowns together.
Simulating Nmos Device Structure
Newton Iteration
Newton method solves a linearized version of the entire non-linear algebraic system.
The size of the problem is relatively large and each iteration takes long time.
Convergence are quicker in case of Newton iteration. Newton's method is default for
drift diffusion calculations. Newton methods are used for lumped elements, transient
calculations, curve tracing and for quantum tunnelling.
Gummel Iteration
Gummel method solves a sequence of relatively small linear Subproblems.
Subproblems are obtained by linearizing one equation of set with respect to its
primary solution variable while holding other variables at their most recently
computed value.
Gummel iteration typically converges relatively slower, but Gummel method will often
tolerate poor initial guess. Gummel algorithm cannot be used with lumped elements or
current boundary conditions.
Block Iteration
Block iteration are useful when lattice heating or energy balance equations are
included.
For our simulation since it involves drift diffusion calculation, we select the Newton
iteration method.
Simulating Nmos Device Structure
Click on Commands-->solutions-->Method
Initial Guess
1. The Log statement to save the log files which contains all the terminal
characteristics calculated by ATLAS;
2. The Solve statement for solving different bias conditions; and
3. The Load statement for loading the solution files.
In this tutorial, the first objective is to obtain a simple Id versus Vgs curve
for the NMOS structure.
In our example we will start with initial guess for the drain.
Click on Commands-->Solutions-->Solve
The solve dialog box appears, left click and click on add new row
Now we will solve for the drain voltage, select the type as constant and
give the initial value as 0.1V and next we will solve for gate voltage,
Simulating Nmos Device Structure
The threshold
voltage is also
extracted
Simulating Nmos Device Structure
Click on write, the following line will appear on the Deckbuild window.
Simulating Nmos Device Structure
We need to edit the above
command line.
Solve init
solve vgate=10 outf=solve_mos1
solve vgate=12 outf=solve_mos2
solve vgate=15 outf=solve_mos3
solve vgate=17 outf=solve_mos4
We will refine
our mesh by
selecting Refine
box Refine
both
Using Devedit
MOS Device structure after refine mesh
Using Devedit
The refined device structure can be plotted through tonyplot.
Right click on file and select tonyplot
Using Devedit
Click on file and click on Save as and provide a file name
Mosfet.str